Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051078
Zhengzheng Wu, M. Rais-Zadeh
In this work, an oxide-refill process is used to null the first-order temperature coefficient of frequency (TCF) of silicon MEMS resonators and to achieve high thermal resistance isolation structures. The technology enables fabrication of a low-power ovenized micro-platform on which multiple MEMS devices can be integrated. The intrinsic frequency-temperature characteristic of two resonators is utilized for temperature sensing, and closed-loop oven control is realized by phase-locking two MEMS oscillators at a specific temperature. PLL-based control circuitry is implemented in 0.18 μm CMOS to interface with the MEMS resonators. The ovenized MEMS oscillator exhibits an overall frequency drift of ± 5.5 ppm over -40 °C to 70 °C. The MEMS oscillator exhibits near zero phase noise degradation in closed-loop operation.
{"title":"A temperature-stable mems oscillator on an ovenized micro-platform using a PLL-based heater control system","authors":"Zhengzheng Wu, M. Rais-Zadeh","doi":"10.1109/MEMSYS.2015.7051078","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051078","url":null,"abstract":"In this work, an oxide-refill process is used to null the first-order temperature coefficient of frequency (TCF) of silicon MEMS resonators and to achieve high thermal resistance isolation structures. The technology enables fabrication of a low-power ovenized micro-platform on which multiple MEMS devices can be integrated. The intrinsic frequency-temperature characteristic of two resonators is utilized for temperature sensing, and closed-loop oven control is realized by phase-locking two MEMS oscillators at a specific temperature. PLL-based control circuitry is implemented in 0.18 μm CMOS to interface with the MEMS resonators. The ovenized MEMS oscillator exhibits an overall frequency drift of ± 5.5 ppm over -40 °C to 70 °C. The MEMS oscillator exhibits near zero phase noise degradation in closed-loop operation.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116696308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050876
Xiaojun Yan, Mingjing Qi, Liwei Lin
We present self-lifting artificial insect wings by means of electrostatic actuation for the first time. Excited by a DC power source, biomimetic flapping motions have been generated to lift the artificial wings 5cm above ground (limited by the current experimental setup) under an operation frequency of 50-70Hz. Three achievements have been accomplished: (1) first successful demonstration of self-lifting electrostatic flying wings; (2) low power consumption as compared to other actuation schemes; and (3) self-adjustable rotating wing design to provide the lifting force. As such, this work can lead to a new class of electrostatic flapping actuators for artificial flying insects.
{"title":"Self-lifting artificial insect wings via electrostatic flapping actuators","authors":"Xiaojun Yan, Mingjing Qi, Liwei Lin","doi":"10.1109/MEMSYS.2015.7050876","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050876","url":null,"abstract":"We present self-lifting artificial insect wings by means of electrostatic actuation for the first time. Excited by a DC power source, biomimetic flapping motions have been generated to lift the artificial wings 5cm above ground (limited by the current experimental setup) under an operation frequency of 50-70Hz. Three achievements have been accomplished: (1) first successful demonstration of self-lifting electrostatic flying wings; (2) low power consumption as compared to other actuation schemes; and (3) self-adjustable rotating wing design to provide the lifting force. As such, this work can lead to a new class of electrostatic flapping actuators for artificial flying insects.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116877329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050941
Pi-Hsun Chen, Che-Hsin Lin
This study presents an MEMS-based stencil reinforced with arch structures and a surrounding buffer reservoir for printing conductive paste of fine and long lines. The developed reinforced stencil successfully solves the problems came with the conventional stencil structure including limited printable line width and ease of fracture. A novel process was developed to fabricate a thin yet robust electroplated stencil by using two AZ4620 layers and one SU-8 layer as the electroplating molds. A precise stencil with a long and high-density line structure can be produced with the developed method. The printing results show that the developed stencil is capable of printing parallel lines of 20 μm in pitch. The printable length of the fine parallel lines is longer than 10 mm with the arch structure reinforced stencil. In addition, the developed stencil is capable of printing closed ring patterns with small pitch, which is not possible to be printed using conventional stencil or screen printing technologies. The MEMS-based stencil developed in the present study will give substantial impact on the paste printing technologies.
{"title":"Electroplated stencil reinforced with arch structures for printing fine and long conductive paste","authors":"Pi-Hsun Chen, Che-Hsin Lin","doi":"10.1109/MEMSYS.2015.7050941","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050941","url":null,"abstract":"This study presents an MEMS-based stencil reinforced with arch structures and a surrounding buffer reservoir for printing conductive paste of fine and long lines. The developed reinforced stencil successfully solves the problems came with the conventional stencil structure including limited printable line width and ease of fracture. A novel process was developed to fabricate a thin yet robust electroplated stencil by using two AZ4620 layers and one SU-8 layer as the electroplating molds. A precise stencil with a long and high-density line structure can be produced with the developed method. The printing results show that the developed stencil is capable of printing parallel lines of 20 μm in pitch. The printable length of the fine parallel lines is longer than 10 mm with the arch structure reinforced stencil. In addition, the developed stencil is capable of printing closed ring patterns with small pitch, which is not possible to be printed using conventional stencil or screen printing technologies. The MEMS-based stencil developed in the present study will give substantial impact on the paste printing technologies.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131061394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051146
Xinghua Wang, D. Xiao, Xuezhong Wu, Z. Hou, Zhihua Chen, Hanhui He
Many micro-electro-mechanical structures are always subject to residual stress and can easily cause mechanical deformation. The warpage of device substrate could directly affect the performance and should be effectively controlled. This paper mainly reports a novel concept of out-of-plane micro-force function generator for micro-deformation modifying. The proposed generator is based on batch fabricated polymer thermal actuators array and could actively modify micro-substrate warpage. Experimental results showed that the out-of-plane micro-force function generator was able to achieve accurate rectifying of substrate micro-deformation. This strategy constructively utilizes the inherent self-feedback for in-situ deformation control and has the potential for solving stress-induced problems of micro-fabricated devices.
{"title":"Out-of-plane micro-force function generator with inherent self-feedback for micro-deformation modifying","authors":"Xinghua Wang, D. Xiao, Xuezhong Wu, Z. Hou, Zhihua Chen, Hanhui He","doi":"10.1109/MEMSYS.2015.7051146","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051146","url":null,"abstract":"Many micro-electro-mechanical structures are always subject to residual stress and can easily cause mechanical deformation. The warpage of device substrate could directly affect the performance and should be effectively controlled. This paper mainly reports a novel concept of out-of-plane micro-force function generator for micro-deformation modifying. The proposed generator is based on batch fabricated polymer thermal actuators array and could actively modify micro-substrate warpage. Experimental results showed that the out-of-plane micro-force function generator was able to achieve accurate rectifying of substrate micro-deformation. This strategy constructively utilizes the inherent self-feedback for in-situ deformation control and has the potential for solving stress-induced problems of micro-fabricated devices.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131091215","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050880
S. Dellea, F. Giacci, A. Longoni, P. Rey, A. Berthelot, G. Langfelder
This work presents in-plane and out-of-plane Coriolis rate gyroscopes based on nano-scale piezoresistive readout and using an eutectic bonding between the bottom wafer, where the sensor is formed, and the cap wafer, where routing and metal pads are fabricated. The gyroscopes feature a novel design with a central levered sense frame, to maximize the device symmetry and compactness. The position of the piezoresistive nano-gauges along the lever system optimizes the scale-factor. Operation on a ± 3000 dps full-scale-range (FSR) demonstrates quite competitive performance, with a linearity error lower than 0.25% and a cross-axis rejection 50× better than state-of-the art consumer gyroscopes.
{"title":"Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors","authors":"S. Dellea, F. Giacci, A. Longoni, P. Rey, A. Berthelot, G. Langfelder","doi":"10.1109/MEMSYS.2015.7050880","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050880","url":null,"abstract":"This work presents in-plane and out-of-plane Coriolis rate gyroscopes based on nano-scale piezoresistive readout and using an eutectic bonding between the bottom wafer, where the sensor is formed, and the cap wafer, where routing and metal pads are fabricated. The gyroscopes feature a novel design with a central levered sense frame, to maximize the device symmetry and compactness. The position of the piezoresistive nano-gauges along the lever system optimizes the scale-factor. Operation on a ± 3000 dps full-scale-range (FSR) demonstrates quite competitive performance, with a linearity error lower than 0.25% and a cross-axis rejection 50× better than state-of-the art consumer gyroscopes.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"97 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131646629","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051125
Siddhartha Ghosh, G. Piazza
This paper presents a new type of acousto-optic modulator based on the conjunction of a piezoelectric contour mode resonator (CMR) with a photonic whispering gallery mode resonator (WGMR). The monolithic device fabricated in aluminum nitride (AlN) exhibits the coupling of piezoelectrically-generated lateral vibrations into a traveling-wave photonic ring resonator in a fully-integrated platform with electrodes directly patterned on the CMR body. We demonstrate the optical sensing of a piezoelectrically actuated mechanical mode at 654 MHz, enabling new possibilities for MEMS-based RF-photonics applications or new degrees of control of phonon-photon interactions in the field of optomechanics.
{"title":"Integrated piezoelectrically driven acousto-optic modulator","authors":"Siddhartha Ghosh, G. Piazza","doi":"10.1109/MEMSYS.2015.7051125","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051125","url":null,"abstract":"This paper presents a new type of acousto-optic modulator based on the conjunction of a piezoelectric contour mode resonator (CMR) with a photonic whispering gallery mode resonator (WGMR). The monolithic device fabricated in aluminum nitride (AlN) exhibits the coupling of piezoelectrically-generated lateral vibrations into a traveling-wave photonic ring resonator in a fully-integrated platform with electrodes directly patterned on the CMR body. We demonstrate the optical sensing of a piezoelectrically actuated mechanical mode at 654 MHz, enabling new possibilities for MEMS-based RF-photonics applications or new degrees of control of phonon-photon interactions in the field of optomechanics.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133380764","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051136
T. Naing, T. Rocheleau, C. Nguyen
An electromechanical circuit constructed from array-composites of capacitive-gap micromechanical resonators with differing frequencies, wired in closed-loop feedback with a single ASIC amplifier, provides a first MEMS-based multi-frequency oscillator generating simultaneous oscillation outputs in the vicinity of 61 MHz. The use of only one amplifier for all frequencies (as opposed to one for each frequency) saves substantial power and is made possible by exploiting softening and damping non-linearities in the MEMS resonators, often considered a limitation, but here providing amplitude limiting that prevents amplifier desensitization to other frequencies. Furthermore, electrical stiffness-based frequency tuning enables Frequency-Shift Keyed (FSK) modulation of the output waveform, offering a space and power-efficient multichannel transmitter, as desired for mobile applications requiring long battery life, such as wireless sensor nodes. Indeed, while capable of multiple simultaneous and independent frequency outputs, this oscillator consumes only 137 μW, which is one-third that of previous multi-frequency efforts that only produce one frequency at a time [1].
{"title":"Simultaneous multi-frequency switchable oscillator and FSK modulator based on a capacitive-gap MEMS disk array","authors":"T. Naing, T. Rocheleau, C. Nguyen","doi":"10.1109/MEMSYS.2015.7051136","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051136","url":null,"abstract":"An electromechanical circuit constructed from array-composites of capacitive-gap micromechanical resonators with differing frequencies, wired in closed-loop feedback with a single ASIC amplifier, provides a first MEMS-based multi-frequency oscillator generating simultaneous oscillation outputs in the vicinity of 61 MHz. The use of only one amplifier for all frequencies (as opposed to one for each frequency) saves substantial power and is made possible by exploiting softening and damping non-linearities in the MEMS resonators, often considered a limitation, but here providing amplitude limiting that prevents amplifier desensitization to other frequencies. Furthermore, electrical stiffness-based frequency tuning enables Frequency-Shift Keyed (FSK) modulation of the output waveform, offering a space and power-efficient multichannel transmitter, as desired for mobile applications requiring long battery life, such as wireless sensor nodes. Indeed, while capable of multiple simultaneous and independent frequency outputs, this oscillator consumes only 137 μW, which is one-third that of previous multi-frequency efforts that only produce one frequency at a time [1].","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"217 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123018190","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050993
D. Serien, S. Takeuchi
We report the multiphoton fabrication of hybrid microstructures of photoresist and chemically responsive protein hydrogel for microactuation, such as a lever and a rotary stepper. By two-step direct laser writing (DLW) technology, we combine chemically responsive protein hydrogel with mechanical robust photoresist into pH-responsive hybrid actuators that contain only biocompatible materials. The fabrication can be performed separately, without adding to the complexity of device fabrication. We observe micrometer-range motion of the photoresist components. These microactuators may also serve as a pH- or salt-concentration-sensor that measure and interact with their environment by their motion as immediate feedback.
{"title":"Chemically responsive protein-photoresist hybrid actuator","authors":"D. Serien, S. Takeuchi","doi":"10.1109/MEMSYS.2015.7050993","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050993","url":null,"abstract":"We report the multiphoton fabrication of hybrid microstructures of photoresist and chemically responsive protein hydrogel for microactuation, such as a lever and a rotary stepper. By two-step direct laser writing (DLW) technology, we combine chemically responsive protein hydrogel with mechanical robust photoresist into pH-responsive hybrid actuators that contain only biocompatible materials. The fabrication can be performed separately, without adding to the complexity of device fabrication. We observe micrometer-range motion of the photoresist components. These microactuators may also serve as a pH- or salt-concentration-sensor that measure and interact with their environment by their motion as immediate feedback.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"220 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128624809","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7050966
K. Yamauchi, T. Kuno, K. Sugano, Y. Isono
This research clarified the anomalous electric resistance change of ultrastrained multi-walled carbon nanotube (MWCNT), as well as its mechanical properties, using the Electrostatically Actuated NAnotensile Testing device (EANAT) mounted on the in-situ SEM nanomanipulation system. The Young's modulus of MWCNT and its shear stress during interlayer sliding deformation were estimated from the load-displacement curve. The electrical resistance of the MWCNT was 215 kΩ without strain, which was similar to the previously reported value, however the anomalous resistance change was observed under enormous strain. Although the resistance change ratio was almost constant during interlayer sliding of the MWCNT, it specifically showed a sharp raise at the end of the sliding in spite of the MWCNT not breaking mechanically. The molecular dynamics (MD) simulation provided a good understanding that the atomic reconfiguration due to the hard sticking at the edge of extracted outer layer of MWCNT might induce the sharp raise of resistance without its mechanically breaking. This result reported here is extremely important for reliability of MWCNT interconnects.
{"title":"Anomalous resistance change of ultrastrained individual MWCNT using MEMS-based strain engineering","authors":"K. Yamauchi, T. Kuno, K. Sugano, Y. Isono","doi":"10.1109/MEMSYS.2015.7050966","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7050966","url":null,"abstract":"This research clarified the anomalous electric resistance change of ultrastrained multi-walled carbon nanotube (MWCNT), as well as its mechanical properties, using the Electrostatically Actuated NAnotensile Testing device (EANAT) mounted on the in-situ SEM nanomanipulation system. The Young's modulus of MWCNT and its shear stress during interlayer sliding deformation were estimated from the load-displacement curve. The electrical resistance of the MWCNT was 215 kΩ without strain, which was similar to the previously reported value, however the anomalous resistance change was observed under enormous strain. Although the resistance change ratio was almost constant during interlayer sliding of the MWCNT, it specifically showed a sharp raise at the end of the sliding in spite of the MWCNT not breaking mechanically. The molecular dynamics (MD) simulation provided a good understanding that the atomic reconfiguration due to the hard sticking at the edge of extracted outer layer of MWCNT might induce the sharp raise of resistance without its mechanically breaking. This result reported here is extremely important for reliability of MWCNT interconnects.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129047620","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2015-03-02DOI: 10.1109/MEMSYS.2015.7051029
K. Sugano, D. Matsui, T. Tsuchiya, O. Tabata
This paper reports an ultrasensitive nanostructure for surface-enhanced Raman spectroscopy (SERS). The gold nanoparticle dimer, which has been reported as the highest Raman enhancing structure, was directionally arrayed on a substrate for the first time. The highest enhancement can be achieved when a particle connection direction of a dimer is matched to polarization direction of incident light. Therefore the huge enhancement can be achieved at all dimers in total. Optimizing the dimer arrangement, 10 pM limit of detection and 0.5 s rapid detection were achieved.
{"title":"Ultrasensitive surface-enhanced Raman spectroscopy using directionally arrayed gold nanoparticle dimers","authors":"K. Sugano, D. Matsui, T. Tsuchiya, O. Tabata","doi":"10.1109/MEMSYS.2015.7051029","DOIUrl":"https://doi.org/10.1109/MEMSYS.2015.7051029","url":null,"abstract":"This paper reports an ultrasensitive nanostructure for surface-enhanced Raman spectroscopy (SERS). The gold nanoparticle dimer, which has been reported as the highest Raman enhancing structure, was directionally arrayed on a substrate for the first time. The highest enhancement can be achieved when a particle connection direction of a dimer is matched to polarization direction of incident light. Therefore the huge enhancement can be achieved at all dimers in total. Optimizing the dimer arrangement, 10 pM limit of detection and 0.5 s rapid detection were achieved.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"99 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116797173","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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