Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318880
T. Abaya, M. Diwekar, Steve Blair, P. Tathireddy, L. Rieth, Florian Solzbacher
Early-generation waveguide arrays made of silicon (Si) and fused silica (SiO2) were micromachined for infrared (IR) neural stimulation and optogenetics applications in able to provide comprehensive and selective access to distributed targets. Edge-coupled multimode fibers delivered light through the optrodes. Maximum normalized output power from the tips, with respect to the fiber output, was determined as 0.33 and 0.71 for silicon and glass optrodes, respectively.
{"title":"3D waveguide penetrating arrays for optical neural stimulation","authors":"T. Abaya, M. Diwekar, Steve Blair, P. Tathireddy, L. Rieth, Florian Solzbacher","doi":"10.1109/OMEMS.2012.6318880","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318880","url":null,"abstract":"Early-generation waveguide arrays made of silicon (Si) and fused silica (SiO2) were micromachined for infrared (IR) neural stimulation and optogenetics applications in able to provide comprehensive and selective access to distributed targets. Edge-coupled multimode fibers delivered light through the optrodes. Maximum normalized output power from the tips, with respect to the fiber output, was determined as 0.33 and 0.71 for silicon and glass optrodes, respectively.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125628635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318879
K. Sawada
The ion image sensor was invented. The device enables two dimensional visualization of both the ion and optical imaging of chemical activity of solutions and cell activity. The CMOS device consists of an array of CCDs covered with functionalized membrane. Changes in the concentration and two dimensional distributions of several ions are detected by charge accumulation. We have recently reported on the use of the sensor for real time imaging of acetylcholine (ACh) enzyme reactions. Insights in the variation of the concentration of ACh may lead to new methods for the treatment of Alzheimer's disease.
{"title":"CCD based ion image sensors for novel bio imaging — Fusion of Sensor technology and LSI technology","authors":"K. Sawada","doi":"10.1109/OMEMS.2012.6318879","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318879","url":null,"abstract":"The ion image sensor was invented. The device enables two dimensional visualization of both the ion and optical imaging of chemical activity of solutions and cell activity. The CMOS device consists of an array of CCDs covered with functionalized membrane. Changes in the concentration and two dimensional distributions of several ions are detected by charge accumulation. We have recently reported on the use of the sensor for real time imaging of acetylcholine (ACh) enzyme reactions. Insights in the variation of the concentration of ACh may lead to new methods for the treatment of Alzheimer's disease.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128528142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318796
M. Malak, F. Marty, B. Capellazzi, P. Jouannard, T. Bourouina
We explore a technique for MEMS in situ reversible optical transduction of mechanical vibrations. While performing preliminary experiments, we found that the opto-mechanical coupling is strong enough at this scale to lead to hysteresis behavior.
{"title":"Optomechanical coupling effects in a Fabry-Perot mechanical resonator","authors":"M. Malak, F. Marty, B. Capellazzi, P. Jouannard, T. Bourouina","doi":"10.1109/OMEMS.2012.6318796","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318796","url":null,"abstract":"We explore a technique for MEMS in situ reversible optical transduction of mechanical vibrations. While performing preliminary experiments, we found that the opto-mechanical coupling is strong enough at this scale to lead to hysteresis behavior.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127831093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318774
F. Brossard, B. Reid, C. Chan, D. Williams, R. Murray, R. A. Taylor
Photonic crystal cavities embedded in photonic crystal waveguides are investigated using a nanopositioning photoluminescence mapping technique. Coupled-cavity modes near telecom wavelengths are shown and their suitability for strong light matter interaction discussed.
{"title":"Mode mapping of coupled cavities in photonic crystal waveguides","authors":"F. Brossard, B. Reid, C. Chan, D. Williams, R. Murray, R. A. Taylor","doi":"10.1109/OMEMS.2012.6318774","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318774","url":null,"abstract":"Photonic crystal cavities embedded in photonic crystal waveguides are investigated using a nanopositioning photoluminescence mapping technique. Coupled-cavity modes near telecom wavelengths are shown and their suitability for strong light matter interaction discussed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117237488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318813
T. Ogawa, Y. Ezoe, I. Mitsuishi, T. Kakiuchi, T. Moriyama, T. Ohashi, K. Mitsuda, M. Putkonen
We coated a MEMS-based silicon optic with iridium by means of atomic layer deposition. Its X-ray reflectivity is quantitatively measured using a parallel X-ray beam at Al Kα 1.49 keV.
{"title":"X-ray reflectivity measurement of a iridium coated MEMS optic with atomic layer deposition","authors":"T. Ogawa, Y. Ezoe, I. Mitsuishi, T. Kakiuchi, T. Moriyama, T. Ohashi, K. Mitsuda, M. Putkonen","doi":"10.1109/OMEMS.2012.6318813","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318813","url":null,"abstract":"We coated a MEMS-based silicon optic with iridium by means of atomic layer deposition. Its X-ray reflectivity is quantitatively measured using a parallel X-ray beam at Al Kα 1.49 keV.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126835655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318841
D. Mukhopadhyay, D. Walko, I. Jung, Jin Wang, G. Shenoy, D. López
We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated 1.59μs from their suppressed neighboring pulses.
{"title":"MEMS micromirror based X-ray pulse modulators","authors":"D. Mukhopadhyay, D. Walko, I. Jung, Jin Wang, G. Shenoy, D. López","doi":"10.1109/OMEMS.2012.6318841","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318841","url":null,"abstract":"We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated 1.59μs from their suppressed neighboring pulses.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127442249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318843
W. Chan, J. Talghader, M. Saarinen
An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.
{"title":"Electrostatic actuator for coupling quantum well electron states","authors":"W. Chan, J. Talghader, M. Saarinen","doi":"10.1109/OMEMS.2012.6318843","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318843","url":null,"abstract":"An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125920099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318802
Trần Nam Bình, S. Morishita, M. Kubota, Y. Mita
The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.
{"title":"A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors","authors":"Trần Nam Bình, S. Morishita, M. Kubota, Y. Mita","doi":"10.1109/OMEMS.2012.6318802","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318802","url":null,"abstract":"The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122243414","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318776
A. Kanhere, B. Aldalali, Li Zhang, Hongrui Jiang
We present a prototype of a micro panoramic vision system that includes five micro-cameras controlled simultaneously by mechanical arm-like actuators, structurally similar to umbrella ribs. Each camera rests on an arm that can be oriented at an angle simultaneously with the other four arms. This arrangement offers reconfigurable angle of view and depth perception. Stitching of the images from individual cameras yields a horizontal field of view of 360°. This micro-camera set is configured in the context of laparoscopic surgery and single-port surgery.
{"title":"Reconfigurable, panoramic vision micro camera array","authors":"A. Kanhere, B. Aldalali, Li Zhang, Hongrui Jiang","doi":"10.1109/OMEMS.2012.6318776","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318776","url":null,"abstract":"We present a prototype of a micro panoramic vision system that includes five micro-cameras controlled simultaneously by mechanical arm-like actuators, structurally similar to umbrella ribs. Each camera rests on an arm that can be oriented at an angle simultaneously with the other four arms. This arrangement offers reconfigurable angle of view and depth perception. Stitching of the images from individual cameras yields a horizontal field of view of 360°. This micro-camera set is configured in the context of laparoscopic surgery and single-port surgery.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131756282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318807
Jeong-Gil Kim, H. Choi, Hanhong Gao, I. Cornago, Chih‐Hao Chang, G. Barbastathis
Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.
{"title":"Mass replication of multifunctional surface by nanoimprint of high aspect ratio tapered nanostructures","authors":"Jeong-Gil Kim, H. Choi, Hanhong Gao, I. Cornago, Chih‐Hao Chang, G. Barbastathis","doi":"10.1109/OMEMS.2012.6318807","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318807","url":null,"abstract":"Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133884656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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