Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318796
M. Malak, F. Marty, B. Capellazzi, P. Jouannard, T. Bourouina
We explore a technique for MEMS in situ reversible optical transduction of mechanical vibrations. While performing preliminary experiments, we found that the opto-mechanical coupling is strong enough at this scale to lead to hysteresis behavior.
{"title":"Optomechanical coupling effects in a Fabry-Perot mechanical resonator","authors":"M. Malak, F. Marty, B. Capellazzi, P. Jouannard, T. Bourouina","doi":"10.1109/OMEMS.2012.6318796","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318796","url":null,"abstract":"We explore a technique for MEMS in situ reversible optical transduction of mechanical vibrations. While performing preliminary experiments, we found that the opto-mechanical coupling is strong enough at this scale to lead to hysteresis behavior.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127831093","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318843
W. Chan, J. Talghader, M. Saarinen
An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.
{"title":"Electrostatic actuator for coupling quantum well electron states","authors":"W. Chan, J. Talghader, M. Saarinen","doi":"10.1109/OMEMS.2012.6318843","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318843","url":null,"abstract":"An actuator was designed and fabricated to actively tune the nanometer-scaled gap between quantum wells in a collapsed cantilever structure. Maximum actuation of 55nm was achieved. Photoluminescence from the quantum wells at the collapsed cantilever was observed at cryogenic temperature, indicating that the wells remained intact after fabrication.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125920099","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318813
T. Ogawa, Y. Ezoe, I. Mitsuishi, T. Kakiuchi, T. Moriyama, T. Ohashi, K. Mitsuda, M. Putkonen
We coated a MEMS-based silicon optic with iridium by means of atomic layer deposition. Its X-ray reflectivity is quantitatively measured using a parallel X-ray beam at Al Kα 1.49 keV.
{"title":"X-ray reflectivity measurement of a iridium coated MEMS optic with atomic layer deposition","authors":"T. Ogawa, Y. Ezoe, I. Mitsuishi, T. Kakiuchi, T. Moriyama, T. Ohashi, K. Mitsuda, M. Putkonen","doi":"10.1109/OMEMS.2012.6318813","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318813","url":null,"abstract":"We coated a MEMS-based silicon optic with iridium by means of atomic layer deposition. Its X-ray reflectivity is quantitatively measured using a parallel X-ray beam at Al Kα 1.49 keV.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"63 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126835655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318880
T. Abaya, M. Diwekar, Steve Blair, P. Tathireddy, L. Rieth, Florian Solzbacher
Early-generation waveguide arrays made of silicon (Si) and fused silica (SiO2) were micromachined for infrared (IR) neural stimulation and optogenetics applications in able to provide comprehensive and selective access to distributed targets. Edge-coupled multimode fibers delivered light through the optrodes. Maximum normalized output power from the tips, with respect to the fiber output, was determined as 0.33 and 0.71 for silicon and glass optrodes, respectively.
{"title":"3D waveguide penetrating arrays for optical neural stimulation","authors":"T. Abaya, M. Diwekar, Steve Blair, P. Tathireddy, L. Rieth, Florian Solzbacher","doi":"10.1109/OMEMS.2012.6318880","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318880","url":null,"abstract":"Early-generation waveguide arrays made of silicon (Si) and fused silica (SiO2) were micromachined for infrared (IR) neural stimulation and optogenetics applications in able to provide comprehensive and selective access to distributed targets. Edge-coupled multimode fibers delivered light through the optrodes. Maximum normalized output power from the tips, with respect to the fiber output, was determined as 0.33 and 0.71 for silicon and glass optrodes, respectively.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125628635","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318828
H. Imam, R. Adamson, J. Brown, Yuan Ma
Electrostatically actuated torsional micromirror fabricated using MicroElectroMechanical Systems (MEMS) technology is a fundamental building block for many optical network applications, such as optical wavelength-selective switch, configurable optical add-drop multiplexers and optical cross-connects. A two-dimensional (2D) micro-mirror functioning with a flexible secondary tilting offers tremendous value for the network designers. Commonly, electrostatic MEMS micromirrors have been designed with a gimbal surrounding the mirror plate and four square electrodes underneath. The main disadvantage of this type of design is the X-Y tilts are extensively coupled, which makes design of a control system difficult. In this work, design and control of an electrostatically actuated 2D MEMS micromirror has been reported. Triangular shaped electrodes have been used to achieve relative decoupling and a multi-loop proportional, integral and derivative (PID) controller is designed. The simulation results show that decoupling for small tilting angles has been achieved and that the controller can achieve a larger controllable tilting angle than the pull-in angle resulting in significantly enhanced device performance and functionality.
{"title":"Two-dimensional (2D) micromirror with enhanced tilting angle using active control methods","authors":"H. Imam, R. Adamson, J. Brown, Yuan Ma","doi":"10.1109/OMEMS.2012.6318828","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318828","url":null,"abstract":"Electrostatically actuated torsional micromirror fabricated using MicroElectroMechanical Systems (MEMS) technology is a fundamental building block for many optical network applications, such as optical wavelength-selective switch, configurable optical add-drop multiplexers and optical cross-connects. A two-dimensional (2D) micro-mirror functioning with a flexible secondary tilting offers tremendous value for the network designers. Commonly, electrostatic MEMS micromirrors have been designed with a gimbal surrounding the mirror plate and four square electrodes underneath. The main disadvantage of this type of design is the X-Y tilts are extensively coupled, which makes design of a control system difficult. In this work, design and control of an electrostatically actuated 2D MEMS micromirror has been reported. Triangular shaped electrodes have been used to achieve relative decoupling and a multi-loop proportional, integral and derivative (PID) controller is designed. The simulation results show that decoupling for small tilting angles has been achieved and that the controller can achieve a larger controllable tilting angle than the pull-in angle resulting in significantly enhanced device performance and functionality.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124417817","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318783
M. Khorasaninejad, M. Adachi, J. Walia, K. Karim, S. Saini
Silicon nanowires were grown on glass and steel substrates and investigated with Raman spectroscopy. It is shown that the Raman shift is mainly due to local heating of the nanowires.
{"title":"Raman spectrum of core-shell silicon nanowires on different substrates","authors":"M. Khorasaninejad, M. Adachi, J. Walia, K. Karim, S. Saini","doi":"10.1109/OMEMS.2012.6318783","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318783","url":null,"abstract":"Silicon nanowires were grown on glass and steel substrates and investigated with Raman spectroscopy. It is shown that the Raman shift is mainly due to local heating of the nanowires.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114691357","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318812
R. Bauer, W. Lubeigt, D. Uttamchandani
A comb-drive actuated MEMS scanning mirror is used to actively Q-switch a side-pumped Nd:YAG laser. Minimum pulse durations of 38 ns are observed and maximum average output powers of 55 mW at 17.625 kHz pulse repetition frequency.
{"title":"Q-switching of Nd:YAG solid-state laser with intra-cavity MEMS resonant scanning mirror","authors":"R. Bauer, W. Lubeigt, D. Uttamchandani","doi":"10.1109/OMEMS.2012.6318812","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318812","url":null,"abstract":"A comb-drive actuated MEMS scanning mirror is used to actively Q-switch a side-pumped Nd:YAG laser. Minimum pulse durations of 38 ns are observed and maximum average output powers of 55 mW at 17.625 kHz pulse repetition frequency.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130382454","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318850
N. Saulnier, E. Towe
The extraction efficiency of a laser with a photonic crystal at the top and a distributed Bragg reflector below can be as high as 90% if the reflector is a distance of one period away.
在一个周期的距离上，上有光子晶体，下有分布布拉格反射器的激光器提取效率可高达90%。
{"title":"Improving extraction efficiency of light-emitting devices through use of bottom distributed Bragg reflectors","authors":"N. Saulnier, E. Towe","doi":"10.1109/OMEMS.2012.6318850","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318850","url":null,"abstract":"The extraction efficiency of a laser with a photonic crystal at the top and a distributed Bragg reflector below can be as high as 90% if the reflector is a distance of one period away.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130560217","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318776
A. Kanhere, B. Aldalali, Li Zhang, Hongrui Jiang
We present a prototype of a micro panoramic vision system that includes five micro-cameras controlled simultaneously by mechanical arm-like actuators, structurally similar to umbrella ribs. Each camera rests on an arm that can be oriented at an angle simultaneously with the other four arms. This arrangement offers reconfigurable angle of view and depth perception. Stitching of the images from individual cameras yields a horizontal field of view of 360°. This micro-camera set is configured in the context of laparoscopic surgery and single-port surgery.
{"title":"Reconfigurable, panoramic vision micro camera array","authors":"A. Kanhere, B. Aldalali, Li Zhang, Hongrui Jiang","doi":"10.1109/OMEMS.2012.6318776","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318776","url":null,"abstract":"We present a prototype of a micro panoramic vision system that includes five micro-cameras controlled simultaneously by mechanical arm-like actuators, structurally similar to umbrella ribs. Each camera rests on an arm that can be oriented at an angle simultaneously with the other four arms. This arrangement offers reconfigurable angle of view and depth perception. Stitching of the images from individual cameras yields a horizontal field of view of 360°. This micro-camera set is configured in the context of laparoscopic surgery and single-port surgery.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131756282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318807
Jeong-Gil Kim, H. Choi, Hanhong Gao, I. Cornago, Chih‐Hao Chang, G. Barbastathis
Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.
{"title":"Mass replication of multifunctional surface by nanoimprint of high aspect ratio tapered nanostructures","authors":"Jeong-Gil Kim, H. Choi, Hanhong Gao, I. Cornago, Chih‐Hao Chang, G. Barbastathis","doi":"10.1109/OMEMS.2012.6318807","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318807","url":null,"abstract":"Tapered nanostructures with high aspect ratio were fabricated using high-throughput nanoimprint process. The replicated nanostructures have axially increasing effective refractive index, which enhances the optical transmission over a wide range of wavelengths and incident angles.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133884656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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