Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318801
Chenhui Li, Hongrui Jiang
We report on a flexible liquid microlens actuated by electrowetting mechanism. The microlens structure is made of soft polymer and its substrate is made much thinner than the lens to reduce the stress on the lens when it is stretched on a curved surface. A low-temperature fabrication process is developed to reduce the stress in the polymer. The focal length f can be varied between -14 mm and 33 mm. The lens can resolve 11.30 line pairs per mm at f = 33 mm according to a 1951 USAF resolution chart test and the response time of the lens is approximately 50 ms.
{"title":"A flexible liquid microlens based on electrowetting","authors":"Chenhui Li, Hongrui Jiang","doi":"10.1109/OMEMS.2012.6318801","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318801","url":null,"abstract":"We report on a flexible liquid microlens actuated by electrowetting mechanism. The microlens structure is made of soft polymer and its substrate is made much thinner than the lens to reduce the stress on the lens when it is stretched on a curved surface. A low-temperature fabrication process is developed to reduce the stress in the polymer. The focal length f can be varied between -14 mm and 33 mm. The lens can resolve 11.30 line pairs per mm at f = 33 mm according to a 1951 USAF resolution chart test and the response time of the lens is approximately 50 ms.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128121696","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318890
K. Koh, Chengkuo Lee
A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.
{"title":"A low power 2-D raster scanning MEMS mirror driven by hybrid electrothermal and electromagnetic actuation mechanisms","authors":"K. Koh, Chengkuo Lee","doi":"10.1109/OMEMS.2012.6318890","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318890","url":null,"abstract":"A novel, CMOS compatible, low power hybrid MEMS mirror driven by electrothermal and electromagnetic actuations has been developed and demonstrated for 2-D raster scanning applications.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128452446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318798
A. Liu
Microfluidics represents the science and technology that processes or manipulates a small amount of fluid (10-9 to 10-18 litres) with dimensions of tens to hundreds of micrometers in a microfluidic chip. Optofluidics aims in manipulating light and fluid at microscale and exploiting their interaction to create highly versatile devices that have significant scientific interests in many areas. The novelties of the integrated optofluidics are two-fold. First, fluids can be used to carry substances for analysis in highly sensitive optical micro-devices. Second, fluids can also be exploited to control light, making them tunable, reconfigurable and adaptive. It is a new breakthrough research area that provides new solutions and opportunities for a wide range of traditional photonic devices, allowing tuning and reconfiguration at the micrometer scale by using microfluidic manipulation. This new innovation allows scientists and researchers to tackle many classical problems with new tools and new research ideas. In this paper, the state-of-the-art of optofluidic research is reviewed with breakthrough innovations in optical and photonic devices, including the high potential applications of optofluidics in biophysical, biochemistry and biomedical studies.
{"title":"Approach of optofluidics from optics to photonics","authors":"A. Liu","doi":"10.1109/OMEMS.2012.6318798","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318798","url":null,"abstract":"Microfluidics represents the science and technology that processes or manipulates a small amount of fluid (10-9 to 10-18 litres) with dimensions of tens to hundreds of micrometers in a microfluidic chip. Optofluidics aims in manipulating light and fluid at microscale and exploiting their interaction to create highly versatile devices that have significant scientific interests in many areas. The novelties of the integrated optofluidics are two-fold. First, fluids can be used to carry substances for analysis in highly sensitive optical micro-devices. Second, fluids can also be exploited to control light, making them tunable, reconfigurable and adaptive. It is a new breakthrough research area that provides new solutions and opportunities for a wide range of traditional photonic devices, allowing tuning and reconfiguration at the micrometer scale by using microfluidic manipulation. This new innovation allows scientists and researchers to tackle many classical problems with new tools and new research ideas. In this paper, the state-of-the-art of optofluidic research is reviewed with breakthrough innovations in optical and photonic devices, including the high potential applications of optofluidics in biophysical, biochemistry and biomedical studies.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127321971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318851
Lin Liu, Huikai Xie
We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.
{"title":"Three-dimensional confocal scanning microscope using an MEMS mirror for lateral scan and an MEMS lens scanner for depth scan","authors":"Lin Liu, Huikai Xie","doi":"10.1109/OMEMS.2012.6318851","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318851","url":null,"abstract":"We present a three-dimensional confocal scanning microscope using MEMS scanners for both the lateral and the axial scan. The lateral scan is performed by an electrothermal two-axis MEMS mirror that is capable of scanning large angles up to ± 20° at low driving voltages less than 4.5 V. The depth scan is accomplished by an electrothermal lens scanner with a large tunable range of 475 μm at 3 V. 2D and 3D confocal images have been obtained by this system.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130661160","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318797
A. Grine, N. Quack, K. Grutter, T. Rocheleau, J. Huang, C. Nguyen, M. Wu
We present wafer-scale processed optomechanical oscillators with low threshold power (<;120μW) owing to high Qoptical = 5.3M, with phase noise of -110dBc/Hz (10kHz offset, 18.6MHz carrier). Phase noise is modeled, and measured vs. Qoptical and Qmechanical.
{"title":"Wafer-scale silica optomechanical oscillators with low threshold power and low phase noise for monolithic optical frequency references","authors":"A. Grine, N. Quack, K. Grutter, T. Rocheleau, J. Huang, C. Nguyen, M. Wu","doi":"10.1109/OMEMS.2012.6318797","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318797","url":null,"abstract":"We present wafer-scale processed optomechanical oscillators with low threshold power (<;120μW) owing to high Q<sub>optical</sub> = 5.3M, with phase noise of -110dBc/Hz (10kHz offset, 18.6MHz carrier). Phase noise is modeled, and measured vs. Q<sub>optical</sub> and Qmechanical.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"151 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133612864","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318867
Jaeho Shim, Kyungmook Kwon, Kyoungsik Yu
We report on the hydrothermal synthesis of ZnO nanorod clusters by localized optical heating from the focused laser beam. The spatial distribution of the nanorods and their growth rate can be easily controlled.
{"title":"Hydrothermal fabrication of patterned ZnO nanorod clusters using laser direct writing","authors":"Jaeho Shim, Kyungmook Kwon, Kyoungsik Yu","doi":"10.1109/OMEMS.2012.6318867","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318867","url":null,"abstract":"We report on the hydrothermal synthesis of ZnO nanorod clusters by localized optical heating from the focused laser beam. The spatial distribution of the nanorods and their growth rate can be easily controlled.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"291 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134556174","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318817
G. Putrino, M. Martyniuk, A. Keating, L. Faraone, J. Dell
An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted that this device will be able to measure the height to a shot-noise limited deflection noise density (DND) of 4 fm/√Hz.
{"title":"Demonstration of a method for detecting MEMS suspended beam height","authors":"G. Putrino, M. Martyniuk, A. Keating, L. Faraone, J. Dell","doi":"10.1109/OMEMS.2012.6318817","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318817","url":null,"abstract":"An integrated optical technique for interrogating the height of a suspended micro-electro-mechanical systems (MEMS) beam is demonstrated. This technique is highly sensitive, and capable of using WDM techniques to interrogate the height information of large arrays of beams. Our experimental results show a 7 dB change in the transmitted optical power when the beam height changes by 100 nm. It is predicted that this device will be able to measure the height to a shot-noise limited deflection noise density (DND) of 4 fm/√Hz.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132247051","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318803
Peng Qu, H. Qu
This paper presents design and simulation of an improved CMOS-MEMS electrostatic torsional micro-mirror for rotational scanning. The inclusion of substrate single crystal silicon (SCS) in vertical comb drives (VCDs) allows for large electrostatic force and scanning angle. The uniqueness of the VCDs also includes elevation tenability of the electrodes. The device design and simulation for improvements are based on AMI 0.5 μm CMOS technology with which the previous devices were fabricated. With typical technological parameters included in simulation, a maximum scanning angle of ±10° can be obtained at a 27 V driving voltage.
{"title":"A novel CMOS-MEMS scanning micro-mirror using vertical comb drives","authors":"Peng Qu, H. Qu","doi":"10.1109/OMEMS.2012.6318803","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318803","url":null,"abstract":"This paper presents design and simulation of an improved CMOS-MEMS electrostatic torsional micro-mirror for rotational scanning. The inclusion of substrate single crystal silicon (SCS) in vertical comb drives (VCDs) allows for large electrostatic force and scanning angle. The uniqueness of the VCDs also includes elevation tenability of the electrodes. The device design and simulation for improvements are based on AMI 0.5 μm CMOS technology with which the previous devices were fabricated. With typical technological parameters included in simulation, a maximum scanning angle of ±10° can be obtained at a 27 V driving voltage.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"87 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133457264","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318838
M. Moghimi, C. Wilson, D. Dickensheets
A novel actuation scheme for MEMS deformable mirrors is presented in this paper. In this method electrostatic actuation is combined with pneumatic actuation to achieve either concave or convex surface curvature and to increase the optical focus range of the mirrors. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The principle of the operation, fabrication process and deflection curves are presented.
{"title":"Electrostatic-pneumatic MEMS deformable mirror for focus control","authors":"M. Moghimi, C. Wilson, D. Dickensheets","doi":"10.1109/OMEMS.2012.6318838","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318838","url":null,"abstract":"A novel actuation scheme for MEMS deformable mirrors is presented in this paper. In this method electrostatic actuation is combined with pneumatic actuation to achieve either concave or convex surface curvature and to increase the optical focus range of the mirrors. The fabricated device consists of two membranes made of the photoset epoxy SU-8. One membrane serves as the deformable mirror and the other one as the pneumatic actuator. The principle of the operation, fabrication process and deflection curves are presented.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"71 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126951083","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318888
T. Taira
We have demonstrated an efficient laser ignition for internal combustion engine by using plug size giant-pulse microchip ceramic lasers. The progress of giant micro-photonics produced those multi mega-watt high-brightness compact lasers in pulse-gap region.
{"title":"Giant micro-photonics for laser ignitions","authors":"T. Taira","doi":"10.1109/OMEMS.2012.6318888","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318888","url":null,"abstract":"We have demonstrated an efficient laser ignition for internal combustion engine by using plug size giant-pulse microchip ceramic lasers. The progress of giant micro-photonics produced those multi mega-watt high-brightness compact lasers in pulse-gap region.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115142811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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