Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318857
T. Kusserow, Yousuf Khan, R. Zamora, F. Messow, H. Hillmer
We present nanophotonic structures consisting of a dielectric slab waveguide with low index contrast and photonic crystals. The guided-mode resonance effect is used to implement elements with selective reflection properties. The design procedure, including numerical simulations, as well as a fabrication approach employing a focused ion beam system is described. Finally, a device layout with DBR mirrors to reduce lateral losses is discussed.
{"title":"Guided-mode resonances in dielectric photonic crystal slabs with low index contrast","authors":"T. Kusserow, Yousuf Khan, R. Zamora, F. Messow, H. Hillmer","doi":"10.1109/OMEMS.2012.6318857","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318857","url":null,"abstract":"We present nanophotonic structures consisting of a dielectric slab waveguide with low index contrast and photonic crystals. The guided-mode resonance effect is used to implement elements with selective reflection properties. The design procedure, including numerical simulations, as well as a fabrication approach employing a focused ion beam system is described. Finally, a device layout with DBR mirrors to reduce lateral losses is discussed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130503725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318833
A. Svetlitza, I. Brouk, S. Bar-Lev, S. Stolyarova, Y. Nemirovsky
We report a novel THz sensor, based on several leading technologies: THz photonics, CMOS-SOI and NEMS. By integrating the TeraMOS sensor with “thermal antenna”, we expect to achieve a breakthrough in uncooled Terahertz passive imaging.
{"title":"The TeraMOS sensing pixel for monolithic passive uncooled THz imagers","authors":"A. Svetlitza, I. Brouk, S. Bar-Lev, S. Stolyarova, Y. Nemirovsky","doi":"10.1109/OMEMS.2012.6318833","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318833","url":null,"abstract":"We report a novel THz sensor, based on several leading technologies: THz photonics, CMOS-SOI and NEMS. By integrating the TeraMOS sensor with “thermal antenna”, we expect to achieve a breakthrough in uncooled Terahertz passive imaging.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121533284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318790
Youmin Wang, Y. D. Gokdel, N. Triesault, C. Spruell, A. Hu, D. Waters, Xiaojing J Zhang
This paper presents the fabrication, characterization and imaging results of a wide-scanning, low voltage driven and electrical discharge machining (EDM) process fabricated stainless steel micro-scanner based real-time confocal hyperspectral fluorescence microscope for skin cancer detection.
{"title":"Magnetic-actuated stainless steel micro-scanner for confocal hyperspectral fluorescence microscope","authors":"Youmin Wang, Y. D. Gokdel, N. Triesault, C. Spruell, A. Hu, D. Waters, Xiaojing J Zhang","doi":"10.1109/OMEMS.2012.6318790","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318790","url":null,"abstract":"This paper presents the fabrication, characterization and imaging results of a wide-scanning, low voltage driven and electrical discharge machining (EDM) process fabricated stainless steel micro-scanner based real-time confocal hyperspectral fluorescence microscope for skin cancer detection.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121675909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318853
S. Kundu, S. Ogawa, S. Kumagai, M. Fujishima, K. Hane, M. Sasaki
The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.
{"title":"Analysis of hard spring effect of tense poly-Si torsion bar of micromirror","authors":"S. Kundu, S. Ogawa, S. Kumagai, M. Fujishima, K. Hane, M. Sasaki","doi":"10.1109/OMEMS.2012.6318853","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318853","url":null,"abstract":"The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"217 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124290926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318832
Chun-Wen Chen, Pei-Jen Wang, D. Yao, J. Yeh
The tunable LED-based illumination system using dielectric liquid lens with changing light distribution from side emitting to focusing. LED and liquid lens set in one package filling with oil reducing the junction temperature.
{"title":"Development of an integrated tunable LED-based illumination system using the dielectric liquid lens","authors":"Chun-Wen Chen, Pei-Jen Wang, D. Yao, J. Yeh","doi":"10.1109/OMEMS.2012.6318832","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318832","url":null,"abstract":"The tunable LED-based illumination system using dielectric liquid lens with changing light distribution from side emitting to focusing. LED and liquid lens set in one package filling with oil reducing the junction temperature.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124308732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318831
Myun-Sik Kim, E. Keeler, S. Rydberg, W. Nakagawa, G. Osowecki, T. Scharf, H. Herzig
We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at λ = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show both spot-size reduction and peak-intensity enhancement, which are consistent with the immersion effect.
{"title":"Reflow of non-circular nano-pillars to fabricate nano-scale solid immersion lenses","authors":"Myun-Sik Kim, E. Keeler, S. Rydberg, W. Nakagawa, G. Osowecki, T. Scharf, H. Herzig","doi":"10.1109/OMEMS.2012.6318831","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318831","url":null,"abstract":"We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at λ = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show both spot-size reduction and peak-intensity enhancement, which are consistent with the immersion effect.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115509455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318854
Hongbin Yu, Guangya Zhou, F. Chau
A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.
{"title":"An electrostatically-driven MEMS tunable miniature iris diaphragm","authors":"Hongbin Yu, Guangya Zhou, F. Chau","doi":"10.1109/OMEMS.2012.6318854","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318854","url":null,"abstract":"A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115518853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318871
M. Strathman, Jingda Wu, L. Lin
We demonstrated generation of various optical trap spots using a MEMS scanning micromirror with optical tweezers. By controlling the actuation voltage pattern, various focused laser lines and separate laser spots were achieved.
{"title":"Reconfigurable optical tweezers using MEMS scanning micromirror","authors":"M. Strathman, Jingda Wu, L. Lin","doi":"10.1109/OMEMS.2012.6318871","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318871","url":null,"abstract":"We demonstrated generation of various optical trap spots using a MEMS scanning micromirror with optical tweezers. By controlling the actuation voltage pattern, various focused laser lines and separate laser spots were achieved.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115574168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318855
Chih-chieh Chang, Keng-hsing Chao, Bing-jun Yang, Ming-chun Su, J. Tsai
We report an independently-addressed micro tunable cat's eye retro-reflector array. The device aims at serving as the ID tag in an optical identification system, hopefully a superior alternative to the current RFID systems. Dynamic images have been successfully generated by the tunable cat's eye array.
{"title":"Independently-addressed tunable cat's eye retro-reflector array for an optical identification system","authors":"Chih-chieh Chang, Keng-hsing Chao, Bing-jun Yang, Ming-chun Su, J. Tsai","doi":"10.1109/OMEMS.2012.6318855","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318855","url":null,"abstract":"We report an independently-addressed micro tunable cat's eye retro-reflector array. The device aims at serving as the ID tag in an optical identification system, hopefully a superior alternative to the current RFID systems. Dynamic images have been successfully generated by the tunable cat's eye array.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129700781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318787
T. Tanae, H. Kawaguchi, A. Iwabuchi, K. Hane
Freestanding membrane GaN light emitting diode (LED) was fabricated on Si substrate for MEMS applications. GaN LED layer grown on Si substrate was used for the fabrication. Removing Si substrate by deep reactive ion etching (DRIE), the freestanding membrane structure of GaN LED was generated. In spite of the DRIE, no degradation was observed in the fabricated membrane LED. Using the membrane structure with grating, wavelength selective emission was obtained.
在硅衬底上制备了可用于MEMS的悬浮膜GaN发光二极管。采用生长在硅衬底上的GaN LED层进行制作。采用深度反应离子蚀刻法(deep reactive ion etching, DRIE)去除Si衬底，生成GaN LED的悬空膜结构。尽管有DRIE，但在制备的薄膜LED中没有观察到降解。采用带光栅的薄膜结构，实现了波长选择性发射。
{"title":"Fabrication of freestanding membrane GaN light-emitting diode on Si substrate for MEMS applications","authors":"T. Tanae, H. Kawaguchi, A. Iwabuchi, K. Hane","doi":"10.1109/OMEMS.2012.6318787","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318787","url":null,"abstract":"Freestanding membrane GaN light emitting diode (LED) was fabricated on Si substrate for MEMS applications. GaN LED layer grown on Si substrate was used for the fabrication. Removing Si substrate by deep reactive ion etching (DRIE), the freestanding membrane structure of GaN LED was generated. In spite of the DRIE, no degradation was observed in the fabricated membrane LED. Using the membrane structure with grating, wavelength selective emission was obtained.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124594529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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