Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318863
A. Duduś, R. Blue, D. Uttamchandani
Broadband interferometry was used to evaluate microfiber and side-polished fiber sensors for refractive index sensing of fluids. Refractive indices ranging from 1.33 to 1.451 were measured. Sensor behaviour agreed with a simple theoretical analysis.
{"title":"Comparison of fluidic refractive index sensing using microfibers and side-polished fibers","authors":"A. Duduś, R. Blue, D. Uttamchandani","doi":"10.1109/OMEMS.2012.6318863","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318863","url":null,"abstract":"Broadband interferometry was used to evaluate microfiber and side-polished fiber sensors for refractive index sensing of fluids. Refractive indices ranging from 1.33 to 1.451 were measured. Sensor behaviour agreed with a simple theoretical analysis.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116299701","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318878
A. Tait, M. Nahmias, M. Fok, P. Prucnal
We propose and simulate a novel integrated thresholder based on nonlinear silicon microring resonators. By interfering the complementary effects of two resonators, the proposed device achieves a sharp threshold with flat one- and zero-levels.
{"title":"A dual resonator enhanced asymmetric Mach-Zehnder: Ultrafast passive thresholder for silicon-on-insulator","authors":"A. Tait, M. Nahmias, M. Fok, P. Prucnal","doi":"10.1109/OMEMS.2012.6318878","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318878","url":null,"abstract":"We propose and simulate a novel integrated thresholder based on nonlinear silicon microring resonators. By interfering the complementary effects of two resonators, the proposed device achieves a sharp threshold with flat one- and zero-levels.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125082418","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318844
B. Yoo, T. Chan, M. Megens, T. Sun, Weijian Yang, F. Rao, C. Chang-Hasnain, D. Horsley, M. Wu
We report an optical phased array (OPA) using high-contrast-grating (HCG) as an electrostatically actuated mirror for the purpose of free space fast beamsteering. In this paper, several attractive properties of HCG mirror are introduced such as single material, high reflectance along a wide bandwidth and low-mass inertia and the fabrication result is shown. ±10° × 10° with 2° beam width is observed at 1550 nm wavelength using HCG optical phased array.
{"title":"Fast optical phased array with ultra-lightweight high-contrast-grating mirrors","authors":"B. Yoo, T. Chan, M. Megens, T. Sun, Weijian Yang, F. Rao, C. Chang-Hasnain, D. Horsley, M. Wu","doi":"10.1109/OMEMS.2012.6318844","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318844","url":null,"abstract":"We report an optical phased array (OPA) using high-contrast-grating (HCG) as an electrostatically actuated mirror for the purpose of free space fast beamsteering. In this paper, several attractive properties of HCG mirror are introduced such as single material, high reflectance along a wide bandwidth and low-mass inertia and the fabrication result is shown. ±10° × 10° with 2° beam width is observed at 1550 nm wavelength using HCG optical phased array.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114488278","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318864
D. Marom
The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.
{"title":"Switching capacity of MEMS tilting micromirrors","authors":"D. Marom","doi":"10.1109/OMEMS.2012.6318864","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318864","url":null,"abstract":"The theoretical switching capacity of MEMS tilting micromirrors is calculated, based solely on their size and angular tilt range. The metrics developed can be used to compare different mirror designs and their performance potential.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129028330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318814
T. Kakiuchi, Y. Ezoe, T. Moriyama, I. Mitsuishi, T. Ogawa, K. Mitsuda, K. Morishita, K. Nakajima
Implementation of a MEMS-based Wolter type-I optic that is suitable for future planetary exploration missions is described. A devised alignment system permits independent adjustment of position and angular settings of x-ray mirrors.
{"title":"Assembly of a MEMS-based Wolter type-I x-ray optic","authors":"T. Kakiuchi, Y. Ezoe, T. Moriyama, I. Mitsuishi, T. Ogawa, K. Mitsuda, K. Morishita, K. Nakajima","doi":"10.1109/OMEMS.2012.6318814","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318814","url":null,"abstract":"Implementation of a MEMS-based Wolter type-I optic that is suitable for future planetary exploration missions is described. A devised alignment system permits independent adjustment of position and angular settings of x-ray mirrors.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125468729","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318846
S. Lukes, D. Dickensheets
We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.
{"title":"MEMS mirror for flexible z-axis control in a commercial confocal microscope","authors":"S. Lukes, D. Dickensheets","doi":"10.1109/OMEMS.2012.6318846","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318846","url":null,"abstract":"We describe the use of a deformable membrane mirror for fast and flexible focus control in a commercial confocal microscope. En-face and oblique imaging over a 55 μm focal range has been demonstrated.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129419926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318856
C. Liou, Y. Chiu, H. Shieh, J. Chiou
A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.
{"title":"Design and fabrication of a near-field scanning optical microscope probe by CMOS-MEMS","authors":"C. Liou, Y. Chiu, H. Shieh, J. Chiou","doi":"10.1109/OMEMS.2012.6318856","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318856","url":null,"abstract":"A near-field scanning optical microscope (NSOM) probe based on CMOS-MEMS technology is proposed. The side pin-hole photodetector and the on-chip transimpedance amplifier were characterized. An optical profile measurement by using the fabricated device was performed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134285408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318819
A. Vijayakumar, S. Bhattacharya
Optical techniques are widely used for trapping of particles. One such technique involves the use of passive diffractive optical elements. Recently, a novel passive diffractive optical element, a spiral phase Fresnel zone plate (FZP) was proposed [1]. In this paper, we present an improved version, of the earlier reported element, that will allow for a compact optical configuration for generation of elliptical donut beams. This compact design enables easy insertion of the device into optical trapping experiments for micro level trapping. The proposed multilevel spiral phase FZP can be used for applications such as trapping by illuminating it with a narrow spectral width laser as shown in Fig. 1(a). The simulated 3-D structure of the proposed multilevel spiral phase FZP is shown in Fig. 1(b).
{"title":"Design of multilevel spiral phase Fresnel zone plates","authors":"A. Vijayakumar, S. Bhattacharya","doi":"10.1109/OMEMS.2012.6318819","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318819","url":null,"abstract":"Optical techniques are widely used for trapping of particles. One such technique involves the use of passive diffractive optical elements. Recently, a novel passive diffractive optical element, a spiral phase Fresnel zone plate (FZP) was proposed [1]. In this paper, we present an improved version, of the earlier reported element, that will allow for a compact optical configuration for generation of elliptical donut beams. This compact design enables easy insertion of the device into optical trapping experiments for micro level trapping. The proposed multilevel spiral phase FZP can be used for applications such as trapping by illuminating it with a narrow spectral width laser as shown in Fig. 1(a). The simulated 3-D structure of the proposed multilevel spiral phase FZP is shown in Fig. 1(b).","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129686016","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318809
Sang-Gil Park, K. Jin, Minwoo Yi, J. C. Ye, Jaewook Ahn, K. Jeong
This work presents tailored index in terahertz broadband frequency by a subwavelength silicon honeycomb structures. The structure is fabricated by deep reactive ion etching process and their indices are tailored depending on size of structures.
{"title":"Subwavelength silicon honeycomb structure for tailored index in terahertz broadband region","authors":"Sang-Gil Park, K. Jin, Minwoo Yi, J. C. Ye, Jaewook Ahn, K. Jeong","doi":"10.1109/OMEMS.2012.6318809","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318809","url":null,"abstract":"This work presents tailored index in terahertz broadband frequency by a subwavelength silicon honeycomb structures. The structure is fabricated by deep reactive ion etching process and their indices are tailored depending on size of structures.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131165592","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318806
R. Chuang, Mao-Teng Hsu
Multimode interference (MMI) waveguides-based photonic modulators integrated on silicon-on-insulator (SOI) substrates are designed, fabricated and evaluated. With 100% modulation depth achieved, the lowest rise and fall times were respectively measured to be 52 and 48 ns. The highest 3 dB bandwidth in the excess of 6.5 MHz was determined from the corresponding devices.
{"title":"Multimode interference (MMI) waveguides-based photonic modulators integrated on SOI substrates","authors":"R. Chuang, Mao-Teng Hsu","doi":"10.1109/OMEMS.2012.6318806","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318806","url":null,"abstract":"Multimode interference (MMI) waveguides-based photonic modulators integrated on silicon-on-insulator (SOI) substrates are designed, fabricated and evaluated. With 100% modulation depth achieved, the lowest rise and fall times were respectively measured to be 52 and 48 ns. The highest 3 dB bandwidth in the excess of 6.5 MHz was determined from the corresponding devices.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"15 S1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133111106","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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