Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318873
S. Choi, A. Higo, K. Kikuta, H. Toshiyoshi, Y. Nakano
We propose a simple and efficient off-chip coupler for vertical coupling between optical fibers and InP-based slab waveguides. Etching angle of the waveguide edge is controlled by an etching jig made of SiO2-coated aluminum for ICP-RIE. Simulation shows that maximum 71% coupling efficiency would be obtained by matrix expansion methods.
{"title":"A slanted InP waveguide for fiber coupler using skewed dry etching process","authors":"S. Choi, A. Higo, K. Kikuta, H. Toshiyoshi, Y. Nakano","doi":"10.1109/OMEMS.2012.6318873","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318873","url":null,"abstract":"We propose a simple and efficient off-chip coupler for vertical coupling between optical fibers and InP-based slab waveguides. Etching angle of the waveguide edge is controlled by an etching jig made of SiO2-coated aluminum for ICP-RIE. Simulation shows that maximum 71% coupling efficiency would be obtained by matrix expansion methods.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"65 9","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132476871","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318781
D. Goldberg, Vinod M. Menon
We report enhanced amplified-spontaneous-emission from CdSe/ZnS quantum-dots in an all-dielectric Si3N4/SiO2 microcavity. Directional emission is observed through the cavity mode. Enhancement is confirmed with time-resolved and steady-state photoluminescence measurements showing a Purcell factor of ~1.3.
{"title":"Enhanced gain in colloidal quantum dots in all-dielectric microcavities","authors":"D. Goldberg, Vinod M. Menon","doi":"10.1109/OMEMS.2012.6318781","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318781","url":null,"abstract":"We report enhanced amplified-spontaneous-emission from CdSe/ZnS quantum-dots in an all-dielectric Si3N4/SiO2 microcavity. Directional emission is observed through the cavity mode. Enhancement is confirmed with time-resolved and steady-state photoluminescence measurements showing a Purcell factor of ~1.3.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132058887","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318884
Jae-jun Kim, Youngseop Lee, Minhee Kang, K. Jeong
This work presents an effective method for the wide angle and high efficiency illumination with hierarchical structures on lens surfaces, which were fabricated by a photolithography and a capillary force lithography.
本文提出了一种利用光刻技术和毛细管力光刻技术在透镜表面制造具有层次结构的广角高效照明的有效方法。
{"title":"Hierarchically structured LED lens for wide angle and high efficiency illumination","authors":"Jae-jun Kim, Youngseop Lee, Minhee Kang, K. Jeong","doi":"10.1109/OMEMS.2012.6318884","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318884","url":null,"abstract":"This work presents an effective method for the wide angle and high efficiency illumination with hierarchical structures on lens surfaces, which were fabricated by a photolithography and a capillary force lithography.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"152 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134211926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
We report a photonic bandedge laser using subwavelength-scale pillars with a metal reflector plane bonded on the silicon substrate. Surface-emitting operation near the gamma point of the photonic band diagram is observed at 77 K.
{"title":"Nano pillar array laser with a bottom metal plane","authors":"Kyungmook Kwon, Jong-Bum You, Youngho Jung, Jaeho Shim, Kyoungsik Yu","doi":"10.1109/OMEMS.2012.6318887","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318887","url":null,"abstract":"We report a photonic bandedge laser using subwavelength-scale pillars with a metal reflector plane bonded on the silicon substrate. Surface-emitting operation near the gamma point of the photonic band diagram is observed at 77 K.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"82 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131146462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318869
E. Keeler, S. Rydberg, V. Paeder, H. Herzig, D. Dickensheets, W. Nakagawa
Optical nanostructures have the potential to provide useful new functionalities, using materials and fabrication methods that are compatible with standard silicon-based processes. For example, it has been shown that a nanoscale grating coated with a metal layer produces polarization-selective reflectivity (Paeder, 2011 and Paeder et al., 2009), based on the combined effects of form birefringence and a resonant cavity (Tyan et al., 1997). In this work, we adapt this design approach to develop two devices optimized to operate around 1.55 μm wavelength: a polarizing beam splitter, and a polarization-selective reflector. Such devices are of particular interest as they may provide optical properties such as polarization selectivity or enhanced reflectivity using nanostructures compatible with optical micro-electro-mechanical systems (MEMS).
{"title":"Polarization-selective optical nanostructures for optical MEMS integration","authors":"E. Keeler, S. Rydberg, V. Paeder, H. Herzig, D. Dickensheets, W. Nakagawa","doi":"10.1109/OMEMS.2012.6318869","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318869","url":null,"abstract":"Optical nanostructures have the potential to provide useful new functionalities, using materials and fabrication methods that are compatible with standard silicon-based processes. For example, it has been shown that a nanoscale grating coated with a metal layer produces polarization-selective reflectivity (Paeder, 2011 and Paeder et al., 2009), based on the combined effects of form birefringence and a resonant cavity (Tyan et al., 1997). In this work, we adapt this design approach to develop two devices optimized to operate around 1.55 μm wavelength: a polarizing beam splitter, and a polarization-selective reflector. Such devices are of particular interest as they may provide optical properties such as polarization selectivity or enhanced reflectivity using nanostructures compatible with optical micro-electro-mechanical systems (MEMS).","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127268131","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318808
Li Li, R. Bauer, G. Brown, D. Uttamchandani
A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.
{"title":"A 2D MEMS scanning micromirror with electrothermal and electrostatic actuators","authors":"Li Li, R. Bauer, G. Brown, D. Uttamchandani","doi":"10.1109/OMEMS.2012.6318808","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318808","url":null,"abstract":"A hybrid two-axis scanning micromirror combining electrostatic and electrothermal actuators was fabricated using SOIMUMPs. Experimental evaluation shows the device is capable of scan in two orthogonal directions and produces a rectangular raster-scan pattern.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116513898","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318774
F. Brossard, B. Reid, C. Chan, D. Williams, R. Murray, R. A. Taylor
Photonic crystal cavities embedded in photonic crystal waveguides are investigated using a nanopositioning photoluminescence mapping technique. Coupled-cavity modes near telecom wavelengths are shown and their suitability for strong light matter interaction discussed.
{"title":"Mode mapping of coupled cavities in photonic crystal waveguides","authors":"F. Brossard, B. Reid, C. Chan, D. Williams, R. Murray, R. A. Taylor","doi":"10.1109/OMEMS.2012.6318774","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318774","url":null,"abstract":"Photonic crystal cavities embedded in photonic crystal waveguides are investigated using a nanopositioning photoluminescence mapping technique. Coupled-cavity modes near telecom wavelengths are shown and their suitability for strong light matter interaction discussed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117237488","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318841
D. Mukhopadhyay, D. Walko, I. Jung, Jin Wang, G. Shenoy, D. López
We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated 1.59μs from their suppressed neighboring pulses.
{"title":"MEMS micromirror based X-ray pulse modulators","authors":"D. Mukhopadhyay, D. Walko, I. Jung, Jin Wang, G. Shenoy, D. López","doi":"10.1109/OMEMS.2012.6318841","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318841","url":null,"abstract":"We describe a MEMS micromirror for modulation of X-ray pulses needed for critical time-resolved process studies of cyclical and far-from-equilibrium phenomena. This MEMS micromirror leverages grazing-angle reflection of X-ray pulses to generate its temporal modulation response. The generated responses are 1.5μs wide for 8keV X-rays and have been successfully used to isolate single X-ray pulses separated 1.59μs from their suppressed neighboring pulses.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127442249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318802
Trần Nam Bình, S. Morishita, M. Kubota, Y. Mita
The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.
{"title":"A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors","authors":"Trần Nam Bình, S. Morishita, M. Kubota, Y. Mita","doi":"10.1109/OMEMS.2012.6318802","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318802","url":null,"abstract":"The authors propose a universal method to form cylindrically-curved surfaces by dynamically bending in-plane a DRIE-etched flat vertical silicon plate with microactuator. The stiffness is designed position-dependent, thus allowing ideal curvature over large area.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122243414","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318879
K. Sawada
The ion image sensor was invented. The device enables two dimensional visualization of both the ion and optical imaging of chemical activity of solutions and cell activity. The CMOS device consists of an array of CCDs covered with functionalized membrane. Changes in the concentration and two dimensional distributions of several ions are detected by charge accumulation. We have recently reported on the use of the sensor for real time imaging of acetylcholine (ACh) enzyme reactions. Insights in the variation of the concentration of ACh may lead to new methods for the treatment of Alzheimer's disease.
{"title":"CCD based ion image sensors for novel bio imaging — Fusion of Sensor technology and LSI technology","authors":"K. Sawada","doi":"10.1109/OMEMS.2012.6318879","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318879","url":null,"abstract":"The ion image sensor was invented. The device enables two dimensional visualization of both the ion and optical imaging of chemical activity of solutions and cell activity. The CMOS device consists of an array of CCDs covered with functionalized membrane. Changes in the concentration and two dimensional distributions of several ions are detected by charge accumulation. We have recently reported on the use of the sensor for real time imaging of acetylcholine (ACh) enzyme reactions. Insights in the variation of the concentration of ACh may lead to new methods for the treatment of Alzheimer's disease.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"55 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128528142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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