Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318862
B. Aldalali, A. Kanhere, Hongrui Jiang
We report on polydimethlysiloxane (PDMS) microlenses fabricated from liquid-phase photopolymerization and a single molding step. The mold is fabricated by photopolymerizing a polyacrylamide (PAAm) pre-hydrogel flowed into an aperture array with a channel underneath. PAAm shrinks isotropically while pinned around the rim of the apertures to form lens molds due to hydrophobic-hydrophilic boundaries. The lenses are then transferred to PDMS by a singlestep molding. The microlenses can be fabricated in different sizes and into arrays without extensive control of fabrication parameters. As an example, we show characterization of fabricated microlenses with a diameter of 1 mm and calculated focal length of 2.83 mm. The surface roughness of the microlenses is on the order of 150nm.
{"title":"Polydimethylsiloxane microlenses fabricated from liquid-phase photopolymerization and single molding step","authors":"B. Aldalali, A. Kanhere, Hongrui Jiang","doi":"10.1109/OMEMS.2012.6318862","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318862","url":null,"abstract":"We report on polydimethlysiloxane (PDMS) microlenses fabricated from liquid-phase photopolymerization and a single molding step. The mold is fabricated by photopolymerizing a polyacrylamide (PAAm) pre-hydrogel flowed into an aperture array with a channel underneath. PAAm shrinks isotropically while pinned around the rim of the apertures to form lens molds due to hydrophobic-hydrophilic boundaries. The lenses are then transferred to PDMS by a singlestep molding. The microlenses can be fabricated in different sizes and into arrays without extensive control of fabrication parameters. As an example, we show characterization of fabricated microlenses with a diameter of 1 mm and calculated focal length of 2.83 mm. The surface roughness of the microlenses is on the order of 150nm.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131053700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318881
K. Takahashi, H. Oyama, R. Ozawa, M. Ishida, K. Sawada
We report a MEMS-based label-free protein sensor which utilizes nonlinear optical transmittance change by a Fabry-Perot interference to enhance the sensitivity of surface-stress. The MEMS protein sensor is composed by a silicon photodiode and a free-standing thin film with a nano cavity. A deflection of the thin film caused by an antigen-antibody reaction is detected by a photocurrent change. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1μN/m which is two orders of magnitude smaller than piezoresistive type. An Ag half mirror is deployed on the Fabry-Perot interferometer for high wavelength selectivity. The Ag mirror provides high transmittance and sharp spectrum of 35-nm-FWHM. The sensitivity of the Fabry-Perot interferometric protein sensor could be improved to 1.5 times by simple metal deposition process.
{"title":"Highly-sensitive label-free protein sensor using MEMS Fabry-Perot interferometer","authors":"K. Takahashi, H. Oyama, R. Ozawa, M. Ishida, K. Sawada","doi":"10.1109/OMEMS.2012.6318881","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318881","url":null,"abstract":"We report a MEMS-based label-free protein sensor which utilizes nonlinear optical transmittance change by a Fabry-Perot interference to enhance the sensitivity of surface-stress. The MEMS protein sensor is composed by a silicon photodiode and a free-standing thin film with a nano cavity. A deflection of the thin film caused by an antigen-antibody reaction is detected by a photocurrent change. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1μN/m which is two orders of magnitude smaller than piezoresistive type. An Ag half mirror is deployed on the Fabry-Perot interferometer for high wavelength selectivity. The Ag mirror provides high transmittance and sharp spectrum of 35-nm-FWHM. The sensitivity of the Fabry-Perot interferometric protein sensor could be improved to 1.5 times by simple metal deposition process.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130641934","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318821
M. Ahmed, D. Butler, M. Rana, N. Melikechi
Polycrystalline ferroelectric modified lead titanate thin films have been deposited by pulsed laser deposition and annealed for pyroelectric infrared detection. The deposited thin films have been characterized for the temperature dependence of their pyroelectric parameters.
{"title":"Pyroelectric modified lead titanate thin films for uncooled infrared detection","authors":"M. Ahmed, D. Butler, M. Rana, N. Melikechi","doi":"10.1109/OMEMS.2012.6318821","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318821","url":null,"abstract":"Polycrystalline ferroelectric modified lead titanate thin films have been deposited by pulsed laser deposition and annealed for pyroelectric infrared detection. The deposited thin films have been characterized for the temperature dependence of their pyroelectric parameters.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131315176","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318829
M. Canonica, F. Zamkotsian, P. Lanzoni, W. Noell
MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.
{"title":"Large micromirror array designed and tested for multi-object spectroscopy","authors":"M. Canonica, F. Zamkotsian, P. Lanzoni, W. Noell","doi":"10.1109/OMEMS.2012.6318829","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318829","url":null,"abstract":"MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126778438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318874
T. Nakahara, J. Suzuki, Y. Hosokawa, Y. Ueda, K. Terao, H. Takao, F. Shimokawa, F. Oohira, H. Miyagawa, H. Kotera, T. Suzuki
In this paper, we investigate the reproducibility of a fabrication method for making active microstructures as micro-actuators for optical and/or fluidic micro-components. The proposed method uses a magnetic photosensitive nanocomposite made by mixing magnetic nanoparticles into photoresist without laborious processes. In the development process, the magnetic particles are taken off from the nanocomposite, and the reproducibility is drop down. It is experimentally confirmed that the dropout of the particles are reduced by increasing the exposure dose of the patterning for the active membrane made of the PNC.
{"title":"Improvement of processing reproducibility for a magnetic-driven microstructure made of photosensitive nanocomposite","authors":"T. Nakahara, J. Suzuki, Y. Hosokawa, Y. Ueda, K. Terao, H. Takao, F. Shimokawa, F. Oohira, H. Miyagawa, H. Kotera, T. Suzuki","doi":"10.1109/OMEMS.2012.6318874","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318874","url":null,"abstract":"In this paper, we investigate the reproducibility of a fabrication method for making active microstructures as micro-actuators for optical and/or fluidic micro-components. The proposed method uses a magnetic photosensitive nanocomposite made by mixing magnetic nanoparticles into photoresist without laborious processes. In the development process, the magnetic particles are taken off from the nanocomposite, and the reproducibility is drop down. It is experimentally confirmed that the dropout of the particles are reduced by increasing the exposure dose of the patterning for the active membrane made of the PNC.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"60 2","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114033928","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318782
J. Grepstad, P. Kaspar, O. Solgaard, I. Johansen, A. Sudbø
We present simulations showing how light scattered by isolated particles increases by a factor 10, when they are placed in photonic crystal membranes. Exploiting this effect, single nano-particles have been detected with an optical microscope.
{"title":"Enhanced scattering from nano-particles trapped in photonic crystal membranes","authors":"J. Grepstad, P. Kaspar, O. Solgaard, I. Johansen, A. Sudbø","doi":"10.1109/OMEMS.2012.6318782","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318782","url":null,"abstract":"We present simulations showing how light scattered by isolated particles increases by a factor 10, when they are placed in photonic crystal membranes. Exploiting this effect, single nano-particles have been detected with an optical microscope.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"146 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122643917","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318827
Y. Munemasa, Y. Akihama, Y. Kanamori, K. Hane
An improved gap-variable silicon nanowire waveguide coupler switch using microactuator is reported. The waveguide arrangement and actuator structure were optimized. The port isolation of 18.5dB was obtained. The characteristics of the coupler switch are presented.
{"title":"An improved gap-variable silicon nano-wire waveguide coupler switch","authors":"Y. Munemasa, Y. Akihama, Y. Kanamori, K. Hane","doi":"10.1109/OMEMS.2012.6318827","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318827","url":null,"abstract":"An improved gap-variable silicon nanowire waveguide coupler switch using microactuator is reported. The waveguide arrangement and actuator structure were optimized. The port isolation of 18.5dB was obtained. The characteristics of the coupler switch are presented.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"2016 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128052384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318866
A. Payne, G. Myatt, J. Hunter, M. Yeung, J. Lu, G. Beach, A. Volchegursky, L. Eng
Direct-write lithography holds the potential of revolutionizing micro-fabrication since it allows direct transmission of image data into the media, eliminating the time and cost of mask fabrication and maintenance. We have developed an 8192-channel direct-write spatial light modulator based on Grating Light Valve technology. This diffractive linear array operates at UV wavelengths from 350-450nm. It is a monolithically integrated device in which the GLV MEMS and CMOS drive circuitry are fabricated together on the same chip. The array operates with a refresh frequency of 250 kHz (4us), facilitating pixel transmission rates over 2 giga-pixels/s. Each channel driver supports 10-bit amplitude and 8-bit pulse edge timing control per column period. When combined with 355nm illumination and 10:1 reduction optics, 1.5um minimum features have been printed with a placement sub-grid resolution of 0.5um in both axes.
{"title":"An 8192-channel Grating Light Valve for Ultra-Violet Direct Write lithography","authors":"A. Payne, G. Myatt, J. Hunter, M. Yeung, J. Lu, G. Beach, A. Volchegursky, L. Eng","doi":"10.1109/OMEMS.2012.6318866","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318866","url":null,"abstract":"Direct-write lithography holds the potential of revolutionizing micro-fabrication since it allows direct transmission of image data into the media, eliminating the time and cost of mask fabrication and maintenance. We have developed an 8192-channel direct-write spatial light modulator based on Grating Light Valve technology. This diffractive linear array operates at UV wavelengths from 350-450nm. It is a monolithically integrated device in which the GLV MEMS and CMOS drive circuitry are fabricated together on the same chip. The array operates with a refresh frequency of 250 kHz (4us), facilitating pixel transmission rates over 2 giga-pixels/s. Each channel driver supports 10-bit amplitude and 8-bit pulse edge timing control per column period. When combined with 355nm illumination and 10:1 reduction optics, 1.5um minimum features have been printed with a placement sub-grid resolution of 0.5um in both axes.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134205514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318826
M. Malak, F. Marty, H. Nouira, J. Salgado, T. Bourouina
We report about profile measurements using miniaturized Michelson interferometer acting as optical probe. Two characterization techniques were deployed: FFT of spectral response and monochromatic light. Resulting profiles are compared with those obtained by commercial equipments.
{"title":"Optical profiling using a miniature michelson interferometer as an optical probe","authors":"M. Malak, F. Marty, H. Nouira, J. Salgado, T. Bourouina","doi":"10.1109/OMEMS.2012.6318826","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318826","url":null,"abstract":"We report about profile measurements using miniaturized Michelson interferometer acting as optical probe. Two characterization techniques were deployed: FFT of spectral response and monochromatic light. Resulting profiles are compared with those obtained by commercial equipments.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134277984","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318882
D. Yamane, Yi-Chien Wu, Ting-Hsiang Wu, H. Toshiyoshi, M. Teitell, P. Chiou
We present a novel electrical impedance sensor for measuring the resealing time of porated mammalian plasma membranes. Openings were generated by high speed cavitation bubbles using laser pulsing of metallic microdisks on transparent ITO electrodes. Real-time impedance measurements show that membrane resealing time and impedance recovery takes 1 to 2 minutes after laser pulsing. Our method can also detect cells under high energy laser pulsing that experience immediate death and a one-way impedance shift.
{"title":"Real-time monitoring of photothermal porated mammalian cells by electric impedance sensors","authors":"D. Yamane, Yi-Chien Wu, Ting-Hsiang Wu, H. Toshiyoshi, M. Teitell, P. Chiou","doi":"10.1109/OMEMS.2012.6318882","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318882","url":null,"abstract":"We present a novel electrical impedance sensor for measuring the resealing time of porated mammalian plasma membranes. Openings were generated by high speed cavitation bubbles using laser pulsing of metallic microdisks on transparent ITO electrodes. Real-time impedance measurements show that membrane resealing time and impedance recovery takes 1 to 2 minutes after laser pulsing. Our method can also detect cells under high energy laser pulsing that experience immediate death and a one-way impedance shift.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123887499","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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