Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318791
A. Gawarikar, R. Shea, J. Talghader
This paper presents the design and fabrication of narrowband resonant cavity absorbers in the long wave infrared. Absorption in multiple spectral bands is demonstrated with a structure whose thermal mass is compatible with thermal detectors.
{"title":"Resonant absorber structures for multi spectral detection in the infrared","authors":"A. Gawarikar, R. Shea, J. Talghader","doi":"10.1109/OMEMS.2012.6318791","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318791","url":null,"abstract":"This paper presents the design and fabrication of narrowband resonant cavity absorbers in the long wave infrared. Absorption in multiple spectral bands is demonstrated with a structure whose thermal mass is compatible with thermal detectors.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130044359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318839
S. Juodkazis, L. Rosa, G. Gervinskas, E. Brasselet
Three-dimensional patterning of gold nano-particles on SiO2 and Si substrates is performed by ion-beam lithography with 15-20 nm resolution. Realization of an on-demand achiral and chiral modifications of nano-structures are demonstrated. Simulations of optical properties of the obtained nano-architectures reveal the possibility to tailor the field enhancement both in the spatial and spectral domains, which are foreseen to be applicable for light harvesting and opto-mechanics at nanoscale.
{"title":"Tailoring plasmonic field enhancement in spatial and spectral domains","authors":"S. Juodkazis, L. Rosa, G. Gervinskas, E. Brasselet","doi":"10.1109/OMEMS.2012.6318839","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318839","url":null,"abstract":"Three-dimensional patterning of gold nano-particles on SiO2 and Si substrates is performed by ion-beam lithography with 15-20 nm resolution. Realization of an on-demand achiral and chiral modifications of nano-structures are demonstrated. Simulations of optical properties of the obtained nano-architectures reveal the possibility to tailor the field enhancement both in the spatial and spectral domains, which are foreseen to be applicable for light harvesting and opto-mechanics at nanoscale.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"74 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126979534","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318816
S. Ohba, S. Kumagai, H. Kawashima, Y. Ohishi, M. Sasaki
Infra-red absorption spectrum is measured for obtaining the molecular information. The device has the crossing of the supercontinuum light path and the liquid trench. When the water is introduced in the liquid channel between the optical fiber, the characteristic absorption peaks are confirmed.
{"title":"Molecular measurement based on infra-red absorption spectrum using supercontinuum light from fiber","authors":"S. Ohba, S. Kumagai, H. Kawashima, Y. Ohishi, M. Sasaki","doi":"10.1109/OMEMS.2012.6318816","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318816","url":null,"abstract":"Infra-red absorption spectrum is measured for obtaining the molecular information. The device has the crossing of the supercontinuum light path and the liquid trench. When the water is introduced in the liquid channel between the optical fiber, the characteristic absorption peaks are confirmed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115975813","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318777
F. Havermeyer, L. Ho, C. Moser
We present a discretely tunable laser utilizing a digital micromirror device. Key performance parameters include 50 μs switching time, 3 pm wavelength repeatability and up to 40 mW optical power in the near infrared.
{"title":"Discrete tunable laser for 3D imaging","authors":"F. Havermeyer, L. Ho, C. Moser","doi":"10.1109/OMEMS.2012.6318777","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318777","url":null,"abstract":"We present a discretely tunable laser utilizing a digital micromirror device. Key performance parameters include 50 μs switching time, 3 pm wavelength repeatability and up to 40 mW optical power in the near infrared.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"127 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122422666","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318775
D. Neshev
We present our advances on manipulation of light in metallic nanostructures, including nonlinear control of light transmission in left-handed metamaterials as well as light manipulation on metal surfaces through Airy nondiffracting surface plasmons.
{"title":"Functional metamaterials and plasmonic structures","authors":"D. Neshev","doi":"10.1109/OMEMS.2012.6318775","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318775","url":null,"abstract":"We present our advances on manipulation of light in metallic nanostructures, including nonlinear control of light transmission in left-handed metamaterials as well as light manipulation on metal surfaces through Airy nondiffracting surface plasmons.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132354622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318883
Chi-Chieh Huang, B. Aldalali, Hongrui Jiang
Most optical systems utilize refractive lenses to focus light. These lenses have low transmission and suffer chromatic aberration because the refractive index is a function of wavelength. Focusing light by reflective curved surfaces (e.g., spherical mirrors) could address these two issues. However, this is hard to implement in micro-optical systems since the imager, with similar dimensions to other components, would inherently be on the same side of the curved mirror as the light source, thus blocking the incoming light. Some natural visual systems, however, rely on a configuration of distributed mirrors to focus light [1]. Inspired by such systems, we designed and realized a cylindrical lens based on reflection from an array of micro-mirrors fabricated on a cylindrical flexible substrate.
{"title":"A bio-inspired cylindrical lens based on reflection from an array of micro-mirrors fabricated on a cylindrical flexible substrate","authors":"Chi-Chieh Huang, B. Aldalali, Hongrui Jiang","doi":"10.1109/OMEMS.2012.6318883","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318883","url":null,"abstract":"Most optical systems utilize refractive lenses to focus light. These lenses have low transmission and suffer chromatic aberration because the refractive index is a function of wavelength. Focusing light by reflective curved surfaces (e.g., spherical mirrors) could address these two issues. However, this is hard to implement in micro-optical systems since the imager, with similar dimensions to other components, would inherently be on the same side of the curved mirror as the light source, thus blocking the incoming light. Some natural visual systems, however, rely on a configuration of distributed mirrors to focus light [1]. Inspired by such systems, we designed and realized a cylindrical lens based on reflection from an array of micro-mirrors fabricated on a cylindrical flexible substrate.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130967430","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318889
Hyeon-cheol Park, Jung-Hwan Lee, Sang-Gil Park, K. Jeong
Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.
{"title":"Millimeter-scale scanning MEMS mirror with sub-wavelength micro-hole arrays for terahertz wave scanning","authors":"Hyeon-cheol Park, Jung-Hwan Lee, Sang-Gil Park, K. Jeong","doi":"10.1109/OMEMS.2012.6318889","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318889","url":null,"abstract":"Millimeter scale scanning MEMS mirror with sub-wavelength microhole arrays has been successfully demonstrated for terahertz wave scanning. Sub-wavelength microhole arrays provide both high reflectivity at THz waves and low air damping during the mirror scanning.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134364579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318876
Yangkyu Park, Seungwan Seo, Jong-Hyun Lee
We have fabricated coplanar liquid lens having dielectric layer with thickness gradient, which was realized using reflow process of photoresist, demonstrating that the off-centering error was 20um that is considerably smaller than geometrical centering.
{"title":"Off-centering reduction of coplanar micro liquid lens using a thickness-gradient dielectric","authors":"Yangkyu Park, Seungwan Seo, Jong-Hyun Lee","doi":"10.1109/OMEMS.2012.6318876","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318876","url":null,"abstract":"We have fabricated coplanar liquid lens having dielectric layer with thickness gradient, which was realized using reflow process of photoresist, demonstrating that the off-centering error was 20um that is considerably smaller than geometrical centering.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"96 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133051612","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318836
S. Kumagai, T. Tomikawa, S. Ogawa, S. Miyachi, I. Yamashita, Y. Uraoka, M. Sasaki
A spatial light modulator (SLM) was fabricated with a poly-Si film that was obtained by metal-induced lateral crystallization (MILC) using Ni nanoparticles synthesized within cage-shaped protein molecules. The MILC increased crystallinity and increased residual tensile stress in the Si film. The large tensile stress generated hard spring effect in the SLM device to expand the actuation range of the SLM. In the frequency response of the SLM, Q factor increase was observed.
{"title":"A spatial light modulator fabricated with bionano-crystallized poly-Si film","authors":"S. Kumagai, T. Tomikawa, S. Ogawa, S. Miyachi, I. Yamashita, Y. Uraoka, M. Sasaki","doi":"10.1109/OMEMS.2012.6318836","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318836","url":null,"abstract":"A spatial light modulator (SLM) was fabricated with a poly-Si film that was obtained by metal-induced lateral crystallization (MILC) using Ni nanoparticles synthesized within cage-shaped protein molecules. The MILC increased crystallinity and increased residual tensile stress in the Si film. The large tensile stress generated hard spring effect in the SLM device to expand the actuation range of the SLM. In the frequency response of the SLM, Q factor increase was observed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121144096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-10-04DOI: 10.1109/OMEMS.2012.6318852
W. Liao, Yiping Zhu, Wenjing Liu, Lin Liu, Yongming Tang, Baoping Wang, Huikai Xie
This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation), respectively. At resonance, the maximum piston motion is 92 μm and the rotational scan angle is 9.6°, both measured at a 5 Vpp sinusoidal driving voltage.
{"title":"Tip-tilt-pistion micromirror based on symmetrical lateral-shift-free piezoelectric actuators","authors":"W. Liao, Yiping Zhu, Wenjing Liu, Lin Liu, Yongming Tang, Baoping Wang, Huikai Xie","doi":"10.1109/OMEMS.2012.6318852","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318852","url":null,"abstract":"This paper presents the design, fabrication and characterization of a high-fill-factor tip-tilt-piston (TTP) micromirror which employs four symmetrical lateral-shift-free (LSF) piezoelectric actuators. Lead zirconate titanate (PZT) is the piezoelectric material deposited using a sol-gel process. The measured resonant frequencies of the fabricated micromirror are 990 Hz (piston) and 1450 Hz (rotation), respectively. At resonance, the maximum piston motion is 92 μm and the rotational scan angle is 9.6°, both measured at a 5 Vpp sinusoidal driving voltage.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"85 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121361070","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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