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ICSE'98. 1998 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.98EX187)最新文献

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Determination of dynamic parameters for HSPICE IGBT model using curve-fitting optimisation method 采用曲线拟合优化方法确定HSPICE IGBT模型的动态参数
N. Mariun, Ishak Aris, W. Shepherd
The two important characteristics of an IGBT, which should be considered in device modelling, are the conduction (static) and the switching (dynamic) characteristics. The conduction characteristic parameters were discussed previously (Mariun et al, 1997) and here only the dynamic parameters are presented briefly to give background before detailed development of the model is presented. The curve-fitting optimisation method available in HSPICE is used to determine the model parameters and the results are compared with laboratory test results and are found to be in good agreement.
在器件建模中应该考虑的IGBT的两个重要特性是传导(静态)和开关(动态)特性。之前已经讨论过传导特性参数(Mariun et al, 1997),这里只简要介绍动态参数,以便在详细介绍模型发展之前提供背景。利用HSPICE中的曲线拟合优化方法确定了模型参数,并与实验室试验结果进行了比较,结果吻合较好。
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引用次数: 0
Loss dependence on pull speed and pull delay of 3 dB fused tapered single mode fiber coupler 3db熔锥单模光纤耦合器拉速和拉延时对损耗的影响
M. Ngadino, A. A. Hassan, M. K. Abdullah, H. Ahmad
We present here results on the effects of various pulling speeds (PS) and pull delays (PD) for a fixed flame profile on the performance of 1/spl times/2 50/50 or 3 dB fused biconical tapered (FBT) single mode optical fiber couplers. We study how these factors correlate with the shape of the fused tapered region and therefore influence the coupler performance. The fabrication technique, which is based on the heat fusion of the twisted section of two standard single mode fibers of the same type are elaborated. A good fiber coupler can be produced by pulling it in a speed range from 25 /spl mu/m/s to 250 /spl mu/m/s. It is also found that at a pull delay of 80 s, excess loss as low as 0.02 dB can be achieved.
本文研究了固定火焰轮廓下不同的拉速(PS)和拉延时(PD)对1/spl倍/2 50/50或3db熔融双锥锥(FBT)单模光纤耦合器性能的影响。我们研究了这些因素如何与熔融锥形区域的形状相关,从而影响耦合器的性能。阐述了基于两根同类型标准单模光纤扭曲段热熔的制作工艺。一个好的光纤耦合器可以在25 /spl mu/m/s到250 /spl mu/m/s的速度范围内拉动。还发现,在80 s的拉延迟下,可以实现低至0.02 dB的额外损耗。
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引用次数: 2
Current sensor and test processor design for integration of logic and IDDQ testing of CMOS ICs 电流传感器和测试处理器设计,用于集成CMOS芯片的逻辑和IDDQ测试
Md. Altaf-Ul-Amin, Z. M. Darus
This paper presents an approach to integrate logic and IDDQ testing which are crucial in verifying the functionality and improving the reliability of CMOS ICs. Work presented in this paper involves the design of an off-chip current sensor and a compatible test processor for the aforementioned purpose. The sensor is an analog circuit and the test processor is a digital ASIC. The performance of both the sensor and the test processor has been verified through computer simulation. Fault simulation results show that reasonable numbers of test vectors generated by the scheme used in this work are able to detect all detectable stuck-at faults in some ISCAS'85 benchmark circuits.
本文提出了一种集成逻辑测试和IDDQ测试的方法,这对验证CMOS集成电路的功能和提高其可靠性至关重要。本文所介绍的工作包括为上述目的设计一个片外电流传感器和一个兼容的测试处理器。传感器是一个模拟电路,测试处理器是一个数字ASIC。通过计算机仿真验证了传感器和测试处理器的性能。故障仿真结果表明,该方案生成的合理数量的测试向量能够检测出某些ISCAS’85基准电路中所有可检测的卡滞故障。
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引用次数: 1
Studies of a new chemical etching method-152 Secco Etch in failure analysis of wafer fabrication 一种新的化学蚀刻方法-152 Secco蚀刻在晶圆制造失效分析中的研究
H. Younan
Crystalline defects on silicon substrates affect the wafer fabrication yield. Secco Etch is a chemical etching method used to delineate crystalline defects on silicon wafer substrates. When Secco Etch is used directly, crystalline defects can be revealed on silicon substrates after 2 minutes on some areas. However, it does not fully deprocess the substrate layers where severe overetching occurs, even for etch times of up to 20 minutes. After delayering by using dry and wet etches and subsequent Secco Etch, crystalline defects were revealed. However, the delayering method is both time consuming and more costly, as it requires a long time to delayer. To reduce failure analysis cycle time, a new chemical etching method, 152 Secco Etch, has been proposed in this study. In 152 Secco Etch, hydrofluoric acid (HF) is used for deprocessing prior to Secco etch for wafer fabrication failure analysis applications. Analytical results show that 152 Secco Etch is a rapid and reliable chemical method and is effective in revealing crystalline silicon defects.
硅衬底上的晶体缺陷影响晶圆成品率。赛科蚀刻是一种化学蚀刻方法,用于描绘硅晶片衬底上的晶体缺陷。当直接使用赛科蚀刻时,在某些区域2分钟后可以在硅衬底上显示晶体缺陷。然而,即使蚀刻时间长达20分钟,它也不能完全去除发生严重过蚀刻的基板层。在使用干湿蚀刻和随后的赛科蚀刻进行分层后,发现结晶缺陷。但是,这种方法既耗时又成本高,需要很长时间进行延迟。为了缩短失效分析周期,本文提出了一种新的化学蚀刻方法——152 Secco蚀刻法。在152 Secco蚀刻中,氢氟酸(HF)在Secco蚀刻之前用于晶圆制造故障分析应用程序的预处理。分析结果表明,152 Secco蚀刻是一种快速、可靠的化学方法,能有效地揭示晶体硅缺陷。
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引用次数: 6
Fabrication of photodiode by screen printing technique 丝网印刷技术制造光电二极管
M. Yahaya, M. Salleh, T. K. Hoe
The photodiode is one of the most commonly used devices for photodetectors. Light absorption in the semiconductor produces electron-hole pairs in the depletion region which are separated by the electric field, leading to the flow of current in the external circuit. This paper describes preparation and characterization of photodiodes by the screen printing technique. Screen-printing is a cost effective thick film deposition method, where a paste containing the desired materials is printed on the substrate. The substrate is then fired under a controlled environment to yield devices bonded to the substrate. In this experiment, a layer of phosphorous thick films were deposited on the Si-substrate. Then, the p-n junction was formed by the usual doping via the diffusion method. The samples were characterized for the rectifier effect, quantum efficiency, response time and rise time. In the optimization process, samples were doped at temperatures from 800-1000/spl deg/C. It was found that samples doped at 900/spl deg/C had the highest speed and response time of 0.32 s and rise time of 0.48 s. This sample also has the highest responsivity and quantum efficiency. Problems in the thermal diffusion process and electrode design are described in detail.
光电二极管是光电探测器中最常用的器件之一。半导体中的光吸收在耗尽区产生电子-空穴对,它们被电场分开,导致电流在外部电路中流动。本文介绍了用丝网印刷技术制备光电二极管并对其进行表征。丝网印刷是一种具有成本效益的厚膜沉积方法,其中包含所需材料的浆糊印刷在基材上。然后在受控环境下烧制基板以产生与基板结合的器件。本实验在硅衬底上沉积了一层磷厚膜。然后,通过扩散方法,采用常规掺杂形成p-n结。对样品进行了整流效应、量子效率、响应时间和上升时间的表征。在优化过程中,样品的掺杂温度为800-1000/spl℃。结果发现,在900/spl度/C掺杂时,样品的速度和响应时间最高,为0.32 s,上升时间为0.48 s。该样品也具有最高的响应率和量子效率。详细介绍了热扩散过程和电极设计中存在的问题。
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引用次数: 5
Tapper ratio dependency of a low-cost passive OADM system 低成本无源OADM系统的抽动比依赖性
R. Bakar, M. Abdullah, F. Isnin, H. Ahmad, B. Ali
In this paper, a passive optical add-drop multiplexer (OADM) is developed. The employment of optical couplers as opposed to the beam splitters normally used makes it a very viable low-cost system. The tapper also provides flexibility in the design, whereby the tappers' coupling ratios can be easily changed. The effect of the tapper's coupling ratios on the system is analyzed here, with the emphasis on the insertion loss. In varying the coupling ratio, higher drop and add powers can be obtained with an equal power of add, drop and other channel's power found to be at 50-50 coupling.
本文研制了一种无源光加丢复用器(OADM)。与通常使用的分束器相反,光学耦合器的使用使其成为一种非常可行的低成本系统。攻丝器在设计上也具有灵活性,因此攻丝器的耦合比可以很容易地改变。分析了抽头的耦合比对系统的影响,重点分析了插入损耗。在改变耦合比的情况下,当加、降等功率与其他通道的功率处于50-50耦合时,可以获得更高的加、降功率。
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引用次数: 3
Design and fabrication of GaAs microwave monolithic integrated circuits using 0.2 /spl mu/m GMMT PHEMT foundry process 采用0.2 /spl mu/m GMMT PHEMT铸造工艺设计制作GaAs微波单片集成电路
B. Y. Majlis, A. Ariffin, A. Mat, S. Jaafar, S. Bujang, M. Yahya
Summary form only given. A number of MMICs with operating frequencies from L to X band have been designed and fabricated using the GMMT foundry. All circuits were designed using MMIC CAD Series IV Libra on PC and workstation. The circuit functions include a range of TWAs, LNAs, wide band amplifiers, switches, mixers, oscillators, four bit attenuators, phase shifters and power amplifiers. Fabrication was conducted on 3" GaAs wafers using the GMMT PHEMT process, with 0.3 /spl mu/m gate length, via holes through the substrate, MIM nitride and polyimide capacitors and is fully protected by silicon nitride passivation. The primary applications of GaAs high electron mobility transistor (HEMT) circuits are in satellite receivers, consumer video applications, high frequency scanners, wireless LAN and other low noise front ends. Most of the operating frequencies for this application are in the range from 1 to 15 GHz.
只提供摘要形式。许多工作频率从L到X波段的mmic已经使用GMMT代工厂设计和制造。所有电路均采用MMIC CAD Series IV Libra在PC和工作站上进行设计。电路功能包括一系列twa、lna、宽带放大器、开关、混频器、振荡器、四位衰减器、移相器和功率放大器。采用GMMT PHEMT工艺在3" GaAs晶圆上进行了制造,栅极长度为0.3 /spl mu/m,通过衬底、MIM氮化和聚酰亚胺电容器的孔,并由氮化硅钝化完全保护。GaAs高电子迁移率晶体管(HEMT)电路的主要应用是卫星接收器、消费视频应用、高频扫描仪、无线局域网和其他低噪声前端。此应用的大多数工作频率在1至15 GHz的范围内。
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引用次数: 0
BPM study of wavelength dependent of new design of variable x-coupler waveguide passive device 新设计的可变x耦合器波导无源器件波长依赖性的BPM研究
J.Y. Asous, S. Shaari
A new passive x-coupler waveguide optical device is proposed and its coupling behaviour in response to different wavelengths is studied using the beam propagation method. The coupling behaviour of 0.86 /spl mu/m, 1.3 /spl mu/m and 1.55 /spl mu/m wavelengths in this silica-based waveguide coupler is different for each wavelength. The device can behave as a WDM multiplexer, where each wavelength automatically selects its own output arm.
提出了一种新型无源x耦合器波导光学器件,并利用光束传播方法研究了该器件在不同波长下的耦合特性。该硅基波导耦合器在0.86 /spl mu/m、1.3 /spl mu/m和1.55 /spl mu/m波长下的耦合行为不同。该设备可以作为WDM多路复用器,其中每个波长自动选择自己的输出臂。
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引用次数: 0
A non-linear description of the bias dependent parasitic resistances of quarter micron MOSFETs 四分之一微米mosfet偏置相关寄生电阻的非线性描述
E. Gondro, P. Klein, F. Schuler, O. Kowarik
A new model description for source and drain resistances of LDD devices is proposed. It includes the dependence on the gate, bulk and drain bias. Measurements on a 0.25 /spl mu/m gate length device show excellent agreement with circuit simulation.
提出了一种描述LDD器件源极和漏极电阻的新模型。它包括对栅极、体积和漏极偏置的依赖。在0.25 /spl mu/m栅极长度器件上的测量结果与电路仿真结果非常吻合。
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引用次数: 1
Charge trapping in interpoly ONO film 内插型ONO薄膜中的电荷捕获
K. S. Lim, C. Ling
The stacked capacitor structure used in DRAM cells usually takes the form of an interpoly capacitor where the dielectric layer is sandwiched between two polycrystalline silicon plates. The charge trapping characteristics of the oxide-nitride-oxide (ONO) film in an interpoly capacitor structure has been investigated. The hole trapping characteristics are observed under constant current stress. The trapped charge centroid is found to be localised at the top oxide/nitride interface under both stress polarities. The larger hole trapping observed under negative stress correlates to a shorter electrical lifetime.
在DRAM单元中使用的堆叠电容器结构通常采用内插电容器的形式,其中介电层夹在两个多晶硅板之间。研究了内插电容结构中氧化氮氧化物(ONO)薄膜的电荷俘获特性。在恒电流应力下观察了空穴捕获特性。在两种应力极性下,捕获的电荷质心都集中在氧化物/氮化物界面的顶部。在负应力下观察到的较大的空穴捕获与较短的电寿命相关。
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引用次数: 3
期刊
ICSE'98. 1998 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.98EX187)
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