Pub Date : 2025-12-01Epub Date: 2025-09-12DOI: 10.1016/j.mne.2025.100318
Sebastián Sierra-Alarcón , Evelio E. Ramírez-Miquet , Julien Perchoux , Laureline Julien , Benoit Charlot , Adam Quotb
Self-Mixing Interferometry (SMI) is an optical sensing technique that enables the creation of compact, all-in-one optical sensors for high-resolution measurements, making it an attractive tool for flowmetry applications, such as velocity mapping in microfluidic systems. Most research in this area has focused on artificial rectangular or circular channels, which do not fully replicate in vivo-like structures. This study demonstrates the application of SMI for velocity mapping in microchannels designed to mimic the retinal arteriolar network. These microchannels were fabricated using backside lithography, a novel technique that produces semi-rounded geometries closely resembling in vivo conditions. A high-resolution SMI system was developed, achieving accurate velocity measurements with a spatial resolution of 1 m for detailed flow profiles, as well as faster scans at lower resolutions for global flow patterns. The system’s ability to reconstruct velocity maps and track flow variations within an artificial vascular network highlights the potential of SMI sensors for use in more complex, in vivo-like applications.
{"title":"Self-mixing interferometry system for in-vitro flow mapping of retinal arteriolar network","authors":"Sebastián Sierra-Alarcón , Evelio E. Ramírez-Miquet , Julien Perchoux , Laureline Julien , Benoit Charlot , Adam Quotb","doi":"10.1016/j.mne.2025.100318","DOIUrl":"10.1016/j.mne.2025.100318","url":null,"abstract":"<div><div>Self-Mixing Interferometry (SMI) is an optical sensing technique that enables the creation of compact, all-in-one optical sensors for high-resolution measurements, making it an attractive tool for flowmetry applications, such as velocity mapping in microfluidic systems. Most research in this area has focused on artificial rectangular or circular channels, which do not fully replicate in vivo-like structures. This study demonstrates the application of SMI for velocity mapping in microchannels designed to mimic the retinal arteriolar network. These microchannels were fabricated using backside lithography, a novel technique that produces semi-rounded geometries closely resembling in vivo conditions. A high-resolution SMI system was developed, achieving accurate velocity measurements with a spatial resolution of 1 <span><math><mi>μ</mi></math></span>m for detailed flow profiles, as well as faster scans at lower resolutions for global flow patterns. The system’s ability to reconstruct velocity maps and track flow variations within an artificial vascular network highlights the potential of SMI sensors for use in more complex, in vivo-like applications.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100318"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145108227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01Epub Date: 2025-11-10DOI: 10.1016/j.mne.2025.100336
Nila Krishnakumar , Friederike Giebel , Eike Iseke , Konstantin Thronberens , Jacob Stupp , Nora D. Stahr , Rodrigo Munoz , Brigitte Kaune , Teresa Meiners , Ludwig Krinner , Christian Ospelkaus
Multilayer surface-electrode ion traps provide a scalable platform for quantum processors. In this paper we present a demonstrator chip designed to implement an 8-qubit shuttling-based quantum processor with chip-integrated microwave control for quantum gates. The design is based on a linear Paul trap geometry. All-to-all connectivity will be implemented through ion swapping. The production of the trap chip is carried out with multistep microfabrication. The 2-layer ion trap chip with two storage registers and an interaction zone has a size of 5 x 10. Flexibility in signal routing is improved through the use of thick and planarised metal–dielectric layers.
多层表面电极离子阱为量子处理器提供了一个可扩展的平台。在本文中，我们提出了一个演示芯片，旨在实现一个基于8量子位穿梭的量子处理器，该处理器具有芯片集成的微波控制量子门。该设计基于线性保罗陷阱几何。全对全连接将通过离子交换实现。陷阱芯片的生产采用多步微细加工。具有两个存储寄存器和一个相互作用区的2层离子阱芯片的尺寸为5mm x 10mm。通过使用厚而扁平的金属介电层，提高了信号路由的灵活性。
{"title":"Microfabrication of an 8-qubit processor chip for a trapped-ion quantum computer demonstrator","authors":"Nila Krishnakumar , Friederike Giebel , Eike Iseke , Konstantin Thronberens , Jacob Stupp , Nora D. Stahr , Rodrigo Munoz , Brigitte Kaune , Teresa Meiners , Ludwig Krinner , Christian Ospelkaus","doi":"10.1016/j.mne.2025.100336","DOIUrl":"10.1016/j.mne.2025.100336","url":null,"abstract":"<div><div>Multilayer surface-electrode ion traps provide a scalable platform for quantum processors. In this paper we present a demonstrator chip designed to implement an 8-qubit shuttling-based quantum processor with chip-integrated microwave control for quantum gates. The design is based on a linear Paul trap geometry. All-to-all connectivity will be implemented through ion swapping. The production of the trap chip is carried out with multistep microfabrication. The 2-layer ion trap chip with two storage registers and an interaction zone has a size of 5<span><math><mrow><mspace></mspace><mspace></mspace><mi>mm</mi></mrow></math></span> x 10<span><math><mrow><mspace></mspace><mspace></mspace><mi>mm</mi></mrow></math></span>. Flexibility in signal routing is improved through the use of thick and planarised metal–dielectric layers.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100336"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145525347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01Epub Date: 2025-09-29DOI: 10.1016/j.mne.2025.100323
Tapio Mäkelä, Asko Sneck, Olli Halonen, Ari Hokkanen, Kim Eiroma, Jaakko Leppäniemi
We demonstrate a manufacturing process for a transparent metal mesh heater using reverse offset printing (ROP), metal lift-off and Ni electroplating. All used methods are scalable and compatible with high-throughput roll-to-roll (R2R) fabrication. First, a Cu-mesh seed layer is produced by ROP printing of a ∼ 70 nm thick semi-dry poly 4-vinylphenol (PVPh) ink on polyethylene terephthalate (PET) substrate and followed by metal evaporation and a lift-off process using the patterned PVPh as a mask. After this, the thickness of the relatively thin Cu-mesh (40 nm) is increased using a Ni-electroplating process to achieve the desired resistivity (< 3 Ω/□) and metal thickness (1–5 μm) of the heater. Optical transparency of the metal heater is achieved by suitable design and a low linewidth (2 μm) of the ROP/lift-off patterned seed Cu-mesh. The performance of the transparent heater is evaluated e.g. by using a figure of merit (FoM) value and compared against indium tin oxide (ITO) based heaters on PET substrate with a sheet resistance of 50 Ω/□. The FoM value is ∼400 for 4.5 cm × 4.5 cm size heaters, compared to ∼50 for the reference ITO. Four different sized heaters are fabricated and tested with a constant voltage until the temperature of the heater is saturated, yielding >260 °C∙cm2/W thermal resistance, thus much higher than 68 °C∙cm2/W obtained for the ITO reference. The measured optical transparency of ∼74 % of the metal heater is close to the calculated transparency of 77 %. The transparency of the metal mesh is impacted by the relatively high ∼15 % haze, which is probably due to the high surface roughness of Ni. For ITO reference, the transparency and haze are ∼85 % and 1 %, respectively. The operation of the metal mesh heater is demonstrated in a defogging test where water vapor was removed from poly(methyl methacrylate) (PMMA) surface within 10 s of activating the heater. The heater uses relative low voltage (2.5 V) resulting in a surface temperature ∼ 50 °C. The ROP lift-off process produces superior quality of the Cu-seed layer at low-temperature, enables high transparency, allows the use of complex designs and a variety of substrates. The results indicate that the proposed metal mesh heater is a good candidate for scalable, high-volume manufacturing.
{"title":"Scalable transparent metal mesh heater on flexible substrate prepared using reverse-offset printed seed layer","authors":"Tapio Mäkelä, Asko Sneck, Olli Halonen, Ari Hokkanen, Kim Eiroma, Jaakko Leppäniemi","doi":"10.1016/j.mne.2025.100323","DOIUrl":"10.1016/j.mne.2025.100323","url":null,"abstract":"<div><div>We demonstrate a manufacturing process for a transparent metal mesh heater using reverse offset printing (ROP), metal lift-off and Ni electroplating. All used methods are scalable and compatible with high-throughput roll-to-roll (R2R) fabrication. First, a Cu-mesh seed layer is produced by ROP printing of a ∼ 70 nm thick semi-dry poly 4-vinylphenol (PVPh) ink on polyethylene terephthalate (PET) substrate and followed by metal evaporation and a lift-off process using the patterned PVPh as a mask. After this, the thickness of the relatively thin Cu-mesh (40 nm) is increased using a Ni-electroplating process to achieve the desired resistivity (< 3 Ω/□) and metal thickness (1–5 μm) of the heater. Optical transparency of the metal heater is achieved by suitable design and a low linewidth (2 μm) of the ROP/lift-off patterned seed Cu-mesh. The performance of the transparent heater is evaluated e.g. by using a figure of merit (FoM) value and compared against indium tin oxide (ITO) based heaters on PET substrate with a sheet resistance of 50 Ω/□. The FoM value is ∼400 for 4.5 cm × 4.5 cm size heaters, compared to ∼50 for the reference ITO. Four different sized heaters are fabricated and tested with a constant voltage until the temperature of the heater is saturated, yielding >260 °C<strong>∙</strong>cm<sup>2</sup>/W thermal resistance, thus much higher than 68 °C<strong>∙</strong>cm<sup>2</sup>/W obtained for the ITO reference. The measured optical transparency of ∼74 % of the metal heater is close to the calculated transparency of 77 %. The transparency of the metal mesh is impacted by the relatively high ∼15 % haze, which is probably due to the high surface roughness of Ni. For ITO reference, the transparency and haze are ∼85 % and 1 %, respectively. The operation of the metal mesh heater is demonstrated in a defogging test where water vapor was removed from poly(methyl methacrylate) (PMMA) surface within 10 s of activating the heater. The heater uses relative low voltage (2.5 V) resulting in a surface temperature ∼ 50 °C. The ROP lift-off process produces superior quality of the Cu-seed layer at low-temperature, enables high transparency, allows the use of complex designs and a variety of substrates. The results indicate that the proposed metal mesh heater is a good candidate for scalable, high-volume manufacturing.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100323"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145269213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01Epub Date: 2025-10-21DOI: 10.1016/j.mne.2025.100328
Liline A.S. Fermin , Daniel de Melo Pereira , Maryam Parvizifard , Noel L. Davison , Elizabeth R. Balmayor , Huipin Yuan , Pamela Habibović , Zeinab Niloofar Tahmasebi Birgani
Biomaterial surface topography can modulate cellular behavior and has become a powerful tool for developing highly functional biomaterials for tissue regeneration applications. For example, grained topographies in the microstructure of calcium phosphate ceramics, such as β-tricalcium phosphates (TCPs), were shown to impact their osteoinductive properties; yet the mechanisms of action underlying interactions of these surface topographies with cells are not fully understood. Probing these types of biological mechanisms is especially challenging because of the combined effects of biomaterial surface chemistry and topography, which are difficult to deconvolute. Previously, hot embossing with an inversely replicated polydimethylsiloxane (PDMS) mold was employed to transfer the topographies of TCPs onto polymer films and investigate their cell-instructive effects independent of the substrate chemistry. This method proved successful for copying the surficial topographies of the ceramics to the polymer substrates. Here, we describe an improved replication method using nickel mold galvanoforming and nanoimprinting to create high-fidelity replicas of micro- and sub-micro-sized topographies of TCPs in thermoplastic polyurethane (TPU). Our findings indicate that using the proposed method, the topography replication depth was greatly improved in both the intermediate molds and the TPU imprints of the TCPs compared to hot embossing method with PDMS mold. This method is particularly suitable for replicating complex, naturally occurring surface topographies onto different polymer films and allows for the reliable investigation of the role of micro- and sub-micro-sized topographies on cell behavior, as well as for developing highly functional biomaterials.
{"title":"A method for accurate replication of complex and cell-instructive surface microtopographies","authors":"Liline A.S. Fermin , Daniel de Melo Pereira , Maryam Parvizifard , Noel L. Davison , Elizabeth R. Balmayor , Huipin Yuan , Pamela Habibović , Zeinab Niloofar Tahmasebi Birgani","doi":"10.1016/j.mne.2025.100328","DOIUrl":"10.1016/j.mne.2025.100328","url":null,"abstract":"<div><div>Biomaterial surface topography can modulate cellular behavior and has become a powerful tool for developing highly functional biomaterials for tissue regeneration applications. For example, grained topographies in the microstructure of calcium phosphate ceramics, such as β-tricalcium phosphates (TCPs), were shown to impact their osteoinductive properties; yet the mechanisms of action underlying interactions of these surface topographies with cells are not fully understood. Probing these types of biological mechanisms is especially challenging because of the combined effects of biomaterial surface chemistry and topography, which are difficult to deconvolute. Previously, hot embossing with an inversely replicated polydimethylsiloxane (PDMS) mold was employed to transfer the topographies of TCPs onto polymer films and investigate their cell-instructive effects independent of the substrate chemistry. This method proved successful for copying the surficial topographies of the ceramics to the polymer substrates. Here, we describe an improved replication method using nickel mold galvanoforming and nanoimprinting to create high-fidelity replicas of micro- and sub-micro-sized topographies of TCPs in thermoplastic polyurethane (TPU). Our findings indicate that using the proposed method, the topography replication depth was greatly improved in both the intermediate molds and the TPU imprints of the TCPs compared to hot embossing method with PDMS mold. This method is particularly suitable for replicating complex, naturally occurring surface topographies onto different polymer films and allows for the reliable investigation of the role of micro- and sub-micro-sized topographies on cell behavior, as well as for developing highly functional biomaterials.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100328"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145417601","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01Epub Date: 2025-11-21DOI: 10.1016/j.mne.2025.100337
Rachel Ord , Bita Pourbahari , Jacques Gierak , Nabil Bassim
Focused ion beam (FIB) technology has transformed materials science by enabling precise micro- and nano-scale modifications through ion beam interactions. Originally developed for semiconductor doping and device fabrication, FIBs use different ionization sources such as liquid metals (e.g., gallium), gas field ionization, and plasma sources. Recent advancements include the use of Ionic Liquid Ion Sources (ILIS), which promise enhanced capabilities for materials research and applications. Recent progress in the Ionic Liquid Ion Sources- Focused ion beam (ILIS-FIB) technology is presented in this overview paper. ILIS-FIB systems operate similarly to conventional systems but employ ionic liquids (ILs) as ion sources, ionizing IL molecules at the emitter tip with applied voltage and using standard focusing components to refine the ion beam. Challenges which are reviewed in this article, include maintaining pure ionic emission for stable operation, necessitating optimization of tip emitting properties, IL characteristics, and voltage settings. It was reviewed in this paper that, ILIS-FIB systems use room-temperature ILs with low melting points, low vapor pressures, and customizable chemical compositions to ensure pure ion emission and improve beam performance for emerging applications. Despite challenges in beam composition and commercial readiness, ILIS-FIB research focuses on developing mathematical models to predict beam stability and performance, advancing theoretical groundwork for refinement and eventual commercialization of ILIS-based FIB technologies in materials science. This overview can shed light on the understanding of ionic liquid ion sources for Focused Ion Beam applications.
{"title":"Ionic liquid ion sources for focused ion beam applications: A review","authors":"Rachel Ord , Bita Pourbahari , Jacques Gierak , Nabil Bassim","doi":"10.1016/j.mne.2025.100337","DOIUrl":"10.1016/j.mne.2025.100337","url":null,"abstract":"<div><div>Focused ion beam (FIB) technology has transformed materials science by enabling precise micro- and nano-scale modifications through ion beam interactions. Originally developed for semiconductor doping and device fabrication, FIBs use different ionization sources such as liquid metals (e.g., gallium), gas field ionization, and plasma sources. Recent advancements include the use of Ionic Liquid Ion Sources (ILIS), which promise enhanced capabilities for materials research and applications. Recent progress in the Ionic Liquid Ion Sources- Focused ion beam (ILIS-FIB) technology is presented in this overview paper. ILIS-FIB systems operate similarly to conventional systems but employ ionic liquids (ILs) as ion sources, ionizing IL molecules at the emitter tip with applied voltage and using standard focusing components to refine the ion beam. Challenges which are reviewed in this article, include maintaining pure ionic emission for stable operation, necessitating optimization of tip emitting properties, IL characteristics, and voltage settings. It was reviewed in this paper that, ILIS-FIB systems use room-temperature ILs with low melting points, low vapor pressures, and customizable chemical compositions to ensure pure ion emission and improve beam performance for emerging applications. Despite challenges in beam composition and commercial readiness, ILIS-FIB research focuses on developing mathematical models to predict beam stability and performance, advancing theoretical groundwork for refinement and eventual commercialization of ILIS-based FIB technologies in materials science. This overview can shed light on the understanding of ionic liquid ion sources for Focused Ion Beam applications.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100337"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145623727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01Epub Date: 2025-09-05DOI: 10.1016/j.mne.2025.100317
Takuto Wakasa, Jun Taniguchi
Organisms naturally develop various physiological properties over time. For example, rose petals exhibit spherical repellence to water droplets, preventing them from falling even when inverted. In our previous study, we reproduced this adhesive hydrophobicity by creating microholes in a hydrophobic nanostructured film. However, this microstructure caused light scattering, which reduced the transmittance of the film. To address this, we focused our attention on an insect called the tenebrionid beetle, which collects water from fog using a two-region structure consisting of hydrophilic regions on a hydrophobic surface background. In a previous study, we combined this structure with a moth-eye structure to fabricate an adhesive hydrophobic surface with high permeability. We hypothesized that by reducing the size of the hydrophilic region within the two-region structure, it would be possible to align the water droplets within the hydrophilic regions. In future study, we aim to use these films as pipettes by transferring water droplets aligned on the hydrophilic regions onto a substrate. The optical transmittance of the film is important because it adjusts from the back of the film where the water droplets are being transferred. In this experiment, we fabricated hydrophilic regions using photolithography on a moth-eye mold, applying a hydrophilic photoresist. Subsequently, UV nanoimprint lithography was employed, utilizing a hydrophobic resist to form a two-region moth-eye-structured surface. When the hydrophilic regions had diameters ranging from 100 μm to 750 μm, water droplets preferentially aligned on the hydrophilic regions upon mist exposure using a humidifier. Notably, even when the film is inverted, the water droplets remain adhered, and due to the transmittance of the film of ∼90 %, they are visible from the reverse side. In addition, a 7 μL water droplet placed on the film demonstrated a contact angle of 148.4 degrees, confirming strong adhesive hydrophobicity.
{"title":"Water droplet alignment film fabricated by patterning hydrophilic and hydrophobic regions using a moth-eye structure","authors":"Takuto Wakasa, Jun Taniguchi","doi":"10.1016/j.mne.2025.100317","DOIUrl":"10.1016/j.mne.2025.100317","url":null,"abstract":"<div><div>Organisms naturally develop various physiological properties over time. For example, rose petals exhibit spherical repellence to water droplets, preventing them from falling even when inverted. In our previous study, we reproduced this adhesive hydrophobicity by creating microholes in a hydrophobic nanostructured film. However, this microstructure caused light scattering, which reduced the transmittance of the film. To address this, we focused our attention on an insect called the tenebrionid beetle, which collects water from fog using a two-region structure consisting of hydrophilic regions on a hydrophobic surface background. In a previous study, we combined this structure with a moth-eye structure to fabricate an adhesive hydrophobic surface with high permeability. We hypothesized that by reducing the size of the hydrophilic region within the two-region structure, it would be possible to align the water droplets within the hydrophilic regions. In future study, we aim to use these films as pipettes by transferring water droplets aligned on the hydrophilic regions onto a substrate. The optical transmittance of the film is important because it adjusts from the back of the film where the water droplets are being transferred. In this experiment, we fabricated hydrophilic regions using photolithography on a moth-eye mold, applying a hydrophilic photoresist. Subsequently, UV nanoimprint lithography was employed, utilizing a hydrophobic resist to form a two-region moth-eye-structured surface. When the hydrophilic regions had diameters ranging from 100 μm to 750 μm, water droplets preferentially aligned on the hydrophilic regions upon mist exposure using a humidifier. Notably, even when the film is inverted, the water droplets remain adhered, and due to the transmittance of the film of ∼90 %, they are visible from the reverse side. In addition, a 7 μL water droplet placed on the film demonstrated a contact angle of 148.4 degrees, confirming strong adhesive hydrophobicity.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100317"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145159603","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01Epub Date: 2025-09-21DOI: 10.1016/j.mne.2025.100322
C. Laurini , E. La Civita , E. Battista , V. Mollo , B. Della Ventura , R. Velotta , D. Terracciano , M.L. Coluccio , F. Gentile
Prostate-specific antigen (PSA) is a crucial biomarker for the early detection and monitoring of prostate cancer (PC). In this study, we present a biosensing approach that integrates plasmonic nanostructures with surface-enhanced Raman spectroscopy (SERS) for the ultrasensitive detection of PSA in diluted solution. Our sensor device consists of ordered arrays of densely packed gold nanoparticles (Au NPs), fabricated using a combination of optical-lithography and electroless deposition techniques. The plasmonic properties of the Au NPs enhance the Raman scattering effect, significantly improving sensitivity and detection limits. We demonstrate the device's capability to detect PSA at vanishingly low concentrations – as low as - well below the 4 ng/mL threshold used in clinical practice. Data analysis of Raman spectra illustrate that the response of the sensor device to PSA exhibits two distinct, approximately linear regimes. In the first regime (I), the Raman intensity increases with PSA concentration. In the second regime (II), the intensity decreases as concentration continues to rise. The transition between these regimes occurs at around . The existence of these regimes is explained by the peculiar behavior of surface enhanced Raman substrates, where the signal intensity non-linearly depends on the distance from the active metal nano-surface. At higher PSA concentrations, the biomarker may accumulate on the Au NPs, hampering the efficiency of sensing. These findings suggest that this plasmonic-SERS platform could provide a highly effective, non-invasive tool for PSA detection, potentially improving PC diagnostics.
{"title":"Enhanced detection of PSA by nanoscale plasmonic devices and Raman spectroscopy","authors":"C. Laurini , E. La Civita , E. Battista , V. Mollo , B. Della Ventura , R. Velotta , D. Terracciano , M.L. Coluccio , F. Gentile","doi":"10.1016/j.mne.2025.100322","DOIUrl":"10.1016/j.mne.2025.100322","url":null,"abstract":"<div><div>Prostate-specific antigen (PSA) is a crucial biomarker for the early detection and monitoring of prostate cancer (PC). In this study, we present a biosensing approach that integrates plasmonic nanostructures with surface-enhanced Raman spectroscopy (SERS) for the ultrasensitive detection of PSA in diluted solution. Our sensor device consists of ordered arrays of densely packed gold nanoparticles (Au NPs), fabricated using a combination of optical-lithography and electroless deposition techniques. The plasmonic properties of the Au NPs enhance the Raman scattering effect, significantly improving sensitivity and detection limits. We demonstrate the device's capability to detect PSA at vanishingly low concentrations – as low as <span><math><mn>38</mn><mspace></mspace><mi>pg</mi><mo>/</mo><mi>mL</mi></math></span> - well below the 4 ng/mL threshold used in clinical practice. Data analysis of Raman spectra illustrate that the response of the sensor device to PSA exhibits two distinct, <em>approximately linear</em> regimes. In the first regime (I), the Raman intensity increases with PSA concentration. In the second regime (II), the intensity decreases as concentration continues to rise. The transition between these regimes occurs at around <span><math><mn>3</mn><mspace></mspace><mi>ng</mi><mo>/</mo><mi>mL</mi></math></span>. The existence of these regimes is explained by the peculiar behavior of surface enhanced Raman substrates, where the signal intensity non-linearly depends on the distance from the active metal nano-surface. At higher PSA concentrations, the biomarker may accumulate on the Au NPs, hampering the efficiency of sensing. These findings suggest that this plasmonic-SERS platform could provide a highly effective, non-invasive tool for PSA detection, potentially improving PC diagnostics.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100322"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145120575","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01DOI: 10.1016/j.mne.2025.100341
Kazuki Bessho, Shin'ichi Warisawa, Reo Kometani
In this study, a highly sensitive method for measuring optical forces using a nanomechanical resonant device is proposed. This device features a nanomechanical resonator electrostatically coupled to a cantilever using an applied voltage. When an optical force bends the cantilever, the electrostatic force between the cantilever and the resonator changes, enabling the measurement of the optical force by observing the corresponding shift in the resonator's resonance frequency. By structurally separating the cantilever that receives the optical force from the resonator whose vibration is measured, this device effectively reduces the influence of photothermal effects and enables highly sensitive optical force measurement even with a continuous laser. A laser was used to apply an optical force to the cantilever, and the resulting change in the resonator's resonance frequency due to the optical force was measured under various electrostatic force conditions. The experimental results achieved a best calculated optical force measurement resolution of 0.15 fN, even at room temperature and atmospheric pressure. This study suggests the existence of an optimal electrostatic force for optical force measurement, indicating the potential to achieve even higher sensitivity with the same device. Furthermore, this device-based method is expected to become a key technique for the direct measurement of optical forces.
{"title":"Optical force measurement method by a nanomechanical resonant device with electrostatic force coupling","authors":"Kazuki Bessho, Shin'ichi Warisawa, Reo Kometani","doi":"10.1016/j.mne.2025.100341","DOIUrl":"10.1016/j.mne.2025.100341","url":null,"abstract":"<div><div>In this study, a highly sensitive method for measuring optical forces using a nanomechanical resonant device is proposed. This device features a nanomechanical resonator electrostatically coupled to a cantilever using an applied voltage. When an optical force bends the cantilever, the electrostatic force between the cantilever and the resonator changes, enabling the measurement of the optical force by observing the corresponding shift in the resonator's resonance frequency. By structurally separating the cantilever that receives the optical force from the resonator whose vibration is measured, this device effectively reduces the influence of photothermal effects and enables highly sensitive optical force measurement even with a continuous laser. A laser was used to apply an optical force to the cantilever, and the resulting change in the resonator's resonance frequency due to the optical force was measured under various electrostatic force conditions. The experimental results achieved a best calculated optical force measurement resolution of 0.15 fN, even at room temperature and atmospheric pressure. This study suggests the existence of an optimal electrostatic force for optical force measurement, indicating the potential to achieve even higher sensitivity with the same device. Furthermore, this device-based method is expected to become a key technique for the direct measurement of optical forces.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100341"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145690790","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Recently, there has been growing interest in ultrathin polydimethylsiloxane (PDMS) films, which are expected to serve as superior coating materials, offering enhanced surface adhesion and improved thermal conductivity to the surroundings. However, fabricating and patterning PDMS nanofilms using conventional techniques remain particularly challenging. In this study, we demonstrate a method for fabricating micropatterned ultrathin PDMS films less than 100 nm thick on substrates using maskless ultraviolet (UV) lithography. Photocurable PDMS is spin-coated to a thickness of several micrometers and then exposed to UV light with a shallow focal depth. After development with xylene, only the photo-cured PDMS remains on the substrate as an ultrathin film with a thickness ranging from several nanometers to a few hundred nanometers, which can be controlled by adjusting the exposure dose. This technique requires no lift-off or etching processes and offers broad applicability for various PDMS-based devices and systems.
{"title":"Direct fabrication of micropatterned PDMS nanofilms using maskless UV lithography","authors":"Hajime Okamoto , Riku Takahashi , Azusa Oshima , Satoshi Sasaki","doi":"10.1016/j.mne.2025.100329","DOIUrl":"10.1016/j.mne.2025.100329","url":null,"abstract":"<div><div>Recently, there has been growing interest in ultrathin polydimethylsiloxane (PDMS) films, which are expected to serve as superior coating materials, offering enhanced surface adhesion and improved thermal conductivity to the surroundings. However, fabricating and patterning PDMS nanofilms using conventional techniques remain particularly challenging. In this study, we demonstrate a method for fabricating micropatterned ultrathin PDMS films less than 100 nm thick on substrates using maskless ultraviolet (UV) lithography. Photocurable PDMS is spin-coated to a thickness of several micrometers and then exposed to UV light with a shallow focal depth. After development with xylene, only the photo-cured PDMS remains on the substrate as an ultrathin film with a thickness ranging from several nanometers to a few hundred nanometers, which can be controlled by adjusting the exposure dose. This technique requires no lift-off or etching processes and offers broad applicability for various PDMS-based devices and systems.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100329"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145467002","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-01Epub Date: 2025-10-10DOI: 10.1016/j.mne.2025.100325
Suhyun Park , Soobin Sim , Hyeonjun Lee , Hak June Lee , Jeong Woo Park , Jin Su Park , Wan Ki Bae , Hyunkoo Lee
The efficiency of quantum-dot light-emitting diodes (QLEDs) was improved by utilizing a microlens array (MLA) film, and the effect of the MLA film was investigated through optical simulation. The MLA films enhanced luminance by 1.51 and 1.28 times at 5 V for green and red QLEDs, respectively. The green and red QLEDs exhibited high external quantum efficiencies of 14.69 % and 19.87 %, and efficiency enhancement ratios were approximately 56.97 % and 21.68 %, respectively. Furthermore, the electroluminescence spectra remained stable, ensuring color consistency. By altering the dipole orientation of the emitter in the optical simulation, we observed that as the dipole became more vertical, the efficiency improved due to increased light extraction by the MLA. In addition, varying the number of microlens array by changing the microlens radius in the same emission area resulted in a consistent enhancement ratio, while increasing the MLA density significantly improved light extraction. These results suggest that MLA films effectively enhance the efficiency of QLEDs with color stability, providing a strategy for improving their performance.
{"title":"Effect of microlens arrays on light extraction efficiency in red and green quantum-dot light-emitting diodes","authors":"Suhyun Park , Soobin Sim , Hyeonjun Lee , Hak June Lee , Jeong Woo Park , Jin Su Park , Wan Ki Bae , Hyunkoo Lee","doi":"10.1016/j.mne.2025.100325","DOIUrl":"10.1016/j.mne.2025.100325","url":null,"abstract":"<div><div>The efficiency of quantum-dot light-emitting diodes (QLEDs) was improved by utilizing a microlens array (MLA) film, and the effect of the MLA film was investigated through optical simulation. The MLA films enhanced luminance by 1.51 and 1.28 times at 5 V for green and red QLEDs, respectively. The green and red QLEDs exhibited high external quantum efficiencies of 14.69 % and 19.87 %, and efficiency enhancement ratios were approximately 56.97 % and 21.68 %, respectively. Furthermore, the electroluminescence spectra remained stable, ensuring color consistency. By altering the dipole orientation of the emitter in the optical simulation, we observed that as the dipole became more vertical, the efficiency improved due to increased light extraction by the MLA. In addition, varying the number of microlens array by changing the microlens radius in the same emission area resulted in a consistent enhancement ratio, while increasing the MLA density significantly improved light extraction. These results suggest that MLA films effectively enhance the efficiency of QLEDs with color stability, providing a strategy for improving their performance.</div></div>","PeriodicalId":37111,"journal":{"name":"Micro and Nano Engineering","volume":"29 ","pages":"Article 100325"},"PeriodicalIF":3.1,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145321722","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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