Micro and Nano Engineering最新文献

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Near-collector electroprinting of cellulose acetate structures with large specific surface per volume 具有大体积比表面积的醋酸纤维素结构的近捕集器电印刷

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2025-05-06 DOI: 10.1016/j.mne.2025.100299

Farnaz Rezaei , Daniel O. Carlsson , Jimmy Hedin Dahlstrom , Jonas Lindh , Stefan Johansson

This study focuses on the fabrication and analysis of 3D-printed high-detail resolution cellulose acetate (CA) structures, particularly examining their specific surface area per volume

(S_{v})

. While electrospinning is a widely used technique for creating nanofiber membranes with high

S_{v}

, which is advantageous for applications like chromatography, the performance could be further improved by precisely controlling fiber placement. To further develop membranes, this research explores the use of electroprinting with small distances between nozzle and collector, here named near-collector electroprinting, to create 3D structures. By optimizing printing parameters, in particular the reduction of the nozzle-to-collector distance, 3D structures with precise fiber placement within a few micrometers were fabricated. The specific surface area per volume was calculated for both 3D-printed and electrospun filters. Results showed that 3D-printed structures with a 5 μm pitch achieved a

S_{v}

similar to electrospun filters.

Incorporating polyethyleneimine (PEI) in the CA ink enabled the 3D-printed structures to gain ion binding capacity which was further investigated. This ion-exchange ability which integrated into the printing step, eliminating the need for a separate post-modification process in bio-separation applications. By switching the substrate voltage from positive to negative, relative to the grounded nozzle, the printed fiber diameter decreased substantially for the CA ink with PEI. The

S_{v}

for near-collector electroprinted fibers of this material could therefore potentially be higher than that of electrospun membranes, provided that an order of magnitude higher printing speed, than presently possible can be used. These findings suggest that near-collector electroprinted CA structures offer potential improvements in membrane design and performance, making them a promising alternative to traditional electrospun membranes for bio-separation applications.

本研究侧重于3d打印高细节分辨率醋酸纤维素（CA）结构的制造和分析，特别是检查其每体积比表面积Sv。虽然静电纺丝是一种广泛使用的技术，用于制造高Sv的纳米纤维膜，这有利于色谱等应用，但通过精确控制纤维的放置可以进一步提高性能。为了进一步开发膜，本研究探索了喷嘴和集热器之间距离较小的电打印技术的使用，这里称为近集热器电打印，以创建3D结构。通过优化打印参数，特别是减少喷嘴到收集器的距离，可以制造出在几微米内精确放置纤维的3D结构。计算了3d打印和静电纺过滤器的每体积比表面积。结果表明，间距为5 μm的3d打印结构获得了与静电纺过滤器相似的Sv。在CA墨水中加入聚乙烯亚胺（PEI）使3d打印结构获得离子结合能力，这一点得到了进一步的研究。这种离子交换能力集成到打印步骤中，消除了生物分离应用中单独的后修饰过程的需要。相对于接地喷嘴，通过将衬底电压从正开关到负开关，具有PEI的CA油墨的印刷纤维直径大大减小。因此，这种材料的近集电极电印刷纤维的Sv可能比电纺膜的Sv高，前提是可以使用比目前可能的印刷速度高一个数量级。这些发现表明，近集热器电印刷CA结构在膜设计和性能方面有潜在的改进，使其成为传统电纺膜在生物分离应用中的有希望的替代品。

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引用次数: 0

Ultrasonic power and data transfer for active medical implants using adaptive beamforming 使用自适应波束形成的有源医疗植入物的超声功率和数据传输

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2025-04-29 DOI: 10.1016/j.mne.2025.100296

Tianhui Li , James A. Flint , Hailing Fu , Sotiris Korossis , Stephanos Theodossiades

Wireless power transfer provides a sustainable power source for active medical implants. Recent developments in biosensors, MEMS technologies and the advent of ubiquitous computing has opened up the potential for a millimeter-sized active medical implant for continuous health monitoring. Frequent wireless communication and data processing requires more energy than traditional active medical implants. Therefore, a continuous power source is needed. This study investigated the development of an ultrasonic power transfer (USPT) system for active medical implants. The system, comprised of a wearable and an implantable device, can transfer both power and data between the implant and the wearable. By implementing beamforming, it can adapt to misalignment between the transmitter and the receiver. In the experiments, the receiver outputs 0.16 mW after rectification, when transmitting through 0.5 cm of water. By measuring the time-of-flight (ToF) of a pulse transmitted from the receiver, implant position feedback is achieved. Data transfer is demonstrated at a rate of 1 kbit/s, across a 4 cm path in water, which is adequate for many biomedical applications.

无线电力传输为有源医疗植入物提供了一种可持续的电源。生物传感器、微机电系统技术和无处不在的计算技术的最新发展，为毫米大小的主动医疗植入物的持续健康监测开辟了潜力。频繁的无线通信和数据处理比传统的有源医疗植入物需要更多的能量。因此，需要一个连续的电源。本研究探讨了一种用于有源医疗植入物的超声功率传输（USPT）系统的开发。该系统由可穿戴设备和可植入设备组成，可以在植入设备和可穿戴设备之间传输功率和数据。通过实现波束形成，它可以适应发射器和接收器之间的不对准。在实验中，当通过0.5 cm的水传输时，接收器经过整流后输出0.16 mW。通过测量从接收机发射的脉冲的飞行时间（ToF），实现了植入物的位置反馈。数据传输速度为1kbit /s，在水中横跨4厘米的路径，足以满足许多生物医学应用。

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引用次数: 0

Regional proximity effect correction for replicating 28 nm lines/spaces in HSQ as dielectric diffraction gratings with high aspect ratio 高纵横比介质衍射光栅复制HSQ中28nm线/空间的区域邻近效应校正

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2025-03-01 DOI: 10.1016/j.mne.2025.100295

Qingxin Wu , Wentao Yuan , Qiucheng Chen , Hao Quan , Yifang Chen

With the rapid advances of extreme ultraviolet (EUV) lithography toward ultra-high resolution, characterization technique of EUV resists by interference lithography (IL) for 14-nm node process needs urgent upgrading because of the considerable loss of light transmission by metallic grating masks. Diffraction phase gratings in dielectric silicon dioxide as masks are a promising solution, provided that 28 nm lines/spaces with high aspect ratio as well as large grating areas are obtained. This paper reports our recent success in replicating 28 nm half-pitch gratings with the aspect ratio of 13:1 and the area up to 200 × 200 μm² by state-of-the-art electron beam lithography with regional proximity effect correction (PEC) in hydrogen silsesquioxane (HSQ) coated on a 100 nm silicon nitride membrane. To ensure well resolved lines/spaces in 350 nm thick HSQ, Monte Carlo algorithm is applied in the simulations of 3D absorbing electron energy density distributions, followed by calculations of equal energy contours of deposited energy based on the kinetic development model, which enables us to work out reliable dose windows. The process developed in this work should be feasibly extended to large area gratings in a future industrialization.

随着极紫外（EUV）光刻技术向超高分辨率的快速发展，金属光栅掩模对极紫外电阻的透射损失较大，14nm节点工艺的干涉光刻（IL）表征技术急需升级。以介质二氧化硅为掩模的衍射相位光栅是一种很有前途的解决方案，只要能获得高纵横比和大光栅面积的28 nm线/空间。本文报道了利用最先进的电子束光刻技术，利用区域接近效应校正（PEC）在100 nm氮化硅膜上涂覆的硅氧烷氢（HSQ）上成功地复制出28 nm宽高比为13:1、面积达200 × 200 μm2的半间距光栅。为了保证350 nm厚HSQ中线条/空间的良好分辨，采用蒙特卡罗算法模拟了三维吸收电子能量密度分布，并根据动力学发展模型计算了沉积能量的等能量轮廓，从而得到了可靠的剂量窗。在未来的工业化生产中，本研究开发的工艺可以推广到大面积光栅中。

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引用次数: 0

Corrigendum to “Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers” [Micro and Nano Engineering Volume 16, August 2022, 100141] “理解高分辨率50kv电子束光刻在厚抗蚀剂层上的剂量校正”的勘误表[微纳米工程卷16，August 2022, 100141]

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2025-03-01 DOI: 10.1016/j.mne.2025.100297

Mattias Åstrand, Thomas Frisk, Hanna Ohlin, Ulrich Vogt

引用次数: 0

Rapid prototyping of 3D microstructures: A simplified grayscale lithography encoding method using blender 三维微结构的快速成型：一种使用搅拌器的简化灰度光刻编码方法

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2024-12-27 DOI: 10.1016/j.mne.2024.100294

Fabrício Frizera Borghi , Mohammed Bendimerad , Marie-Ly Chapon , Tatiana Petithory , Laurent Vonna , Laurent Pieuchot

The democratization of fabrication equipment has spurred recent interest in maskless grayscale lithography for both 2D and 3D microfabrication. However, the design of suitable template images remains a challenge. This work presents a simplified method for encoding 3D objects into grayscale image files optimized for grayscale lithography. Leveraging the widely used and open-source 3D modeling software Blender, we developed a robust approach to convert geometric heights into grayscale levels and generate image files through top-view rendering. Our method accurately reproduced the overall shape of simple structures like stairs and ramps compared to the original designs. We extended this approach to complex 3D sinusoidal surfaces, achieving similar results. Given the increasing accessibility and user-friendliness of digital rendering tools, this study offers a promising strategy for rapid prototyping of initial designs with minimal effort.

制造设备的民主化激发了最近对二维和三维微加工的无掩模灰度光刻的兴趣。然而，设计合适的模板图像仍然是一个挑战。这项工作提出了一种简化的方法，将3D对象编码为灰度图像文件，优化了灰度光刻。利用广泛使用的开源3D建模软件Blender，我们开发了一种强大的方法来将几何高度转换为灰度级别，并通过俯视图渲染生成图像文件。与原始设计相比，我们的方法准确地再现了楼梯和坡道等简单结构的整体形状。我们将这种方法扩展到复杂的3D正弦曲面，获得了类似的结果。考虑到数字渲染工具的可访问性和用户友好性的增加，本研究为以最小的努力快速构建初始设计原型提供了一个有前途的策略。

引用次数: 0

Pattern distortion in nanoimprint lithography using UV-curable polymer stamps 紫外光固化聚合物压印纳米压印中的图案畸变

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2024-12-01 DOI: 10.1016/j.mne.2024.100293

Fangfang Li , Marina Fetisova , Mervi Koskinen , Jukka Viheriälä , Tapio Niemi , Petri Karvinen , Markku Kuittinen

Quantification of pattern distortion in nanoimprint lithography (NIL) is required when applying it to specific applications, especially those with tight tolerances. We present a systematic study on full wafer NIL distortion using soft stamps made of different carrier foils and UV-curable polymer structure layers. These errors are evaluated by overlay patterning using NIL and optical lithography on 4-in. wafers over a distance of 80 mm. Potential causes for pattern distortion and possible correction methods are discussed in terms of stamp composition and environmental impact. Pattern distortion along axes causing dimensional change is stamp dependent, and stiffer stamps show less pattern dimensional change than the softer ones. In the best case, the minimum variation is 4 parts per million (ppm), and in the worst case, 252 ppm with a softer stamp. Stamp flatness and uniform contact during imprinting are important in reducing high-order pattern distortion. A maximum dimensional variation of 32 ppm in a batch run demonstrates good pattern repeatability. Long-term dimensional stability can be affected by relative humidity, with variations on the order of 100 ppm.

当纳米压印光刻技术应用于特定的应用场合，特别是那些具有严格公差的应用场合时，需要对其图案畸变进行定量分析。本文系统地研究了由不同载体箔和紫外光固化聚合物结构层制成的软邮票在全晶圆上的畸变。这些误差是通过在4-in上使用NIL和光学光刻的覆盖图案化来评估的。晶圆片超过80毫米的距离。从邮票的构成和对环境的影响两方面讨论了图案失真的潜在原因和可能的校正方法。沿轴方向的图案畸变引起的尺寸变化与图章有关，较硬的图章比较软的图章表现出较小的图案尺寸变化。在最好的情况下，最小变化是百万分之4 (ppm)，而在最坏的情况下，最小变化是252ppm。在压印过程中，邮票的平整度和均匀接触是减少高阶图案失真的重要因素。在批量运行中，最大尺寸变化为32 ppm，显示出良好的图案可重复性。长期尺寸稳定性可能受到相对湿度的影响，其变化顺序为100ppm。

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引用次数: 0

In situ measurements of thermal and pressure dependent stress in SOG films by phase shifting interferometry 用相移干涉法原位测量SOG薄膜中的热和压力相关应力

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2024-12-01 DOI: 10.1016/j.mne.2024.100292

T.M. van den Berg, A. Bosseboeuf, P. Coste, L. Vincent

Hydrogen silsesquioxane (HSQ) and Medusa are spin-on-glasses used for several applications and more specifically for electron-beam lithography. To characterize the thermal densification of these resists on silicon, the mean resist film stress was measured in situ as function of temperature up to 600 °C in a vacuum chamber by the curvature method. The curvature was evaluated from 3D profiles of uncoated and coated dies measured by full field phase shifting interferometry. Three resists were investigated: FOx-15, FOx-25 and Medusa-82. The initial resist stress at room temperature after spin coating and baking is slightly tensile and becomes highly tensile above a certain temperature dependent on the resist. This variation is mainly attributed to resists densification. FOx-15 and FOx-25 start densifying at 500 °C, and FOx-25 densifies more than FOx-15. Medusa-82 is densifying around 300 °C and has the highest tensile stress but the film relaxes beyond 405 °C. In the case of FOx-15, it was found that vacuum annealing prevents densification. Finally, we evaluated the in-plane average coefficient of thermal expansion of the resists from stress measurements during cooling to room temperature. For FOx-15, a CTE equal to 1.5 ppm/K is found, while it is close to 0.0±0.2 ppm/K for FOx-25 and 1.3 ppm/K for Medusa-82.

氢硅氧烷（HSQ）和美杜莎是用于多种应用的自旋玻璃，更具体地说是电子束光刻。为了表征这些电阻在硅上的热致密性，在真空室中使用曲率法测量了温度高达600°C时电阻膜的平均应力。利用全场移相干涉法对未涂覆模具和涂覆模具的三维轮廓进行了曲率评估。研究了3种抗虫剂：FOx-15、FOx-25和Medusa-82。经旋涂和烘烤后的抗蚀剂在室温下的初始应力是微拉伸的，在一定温度以上根据抗蚀剂的不同而变为高拉伸的。这种变化主要归因于抗蚀剂致密化。FOx-15和FOx-25在500℃时开始致密化，FOx-25的致密化程度高于FOx-15。Medusa-82在300°C左右致密化，拉伸应力最高，但在405°C以上薄膜松弛。在FOx-15的情况下，发现真空退火可以防止致密化。最后，我们评估了从冷却到室温的应力测量中电阻的面内平均热膨胀系数。对于FOx-15，发现CTE等于1.5 ppm/K，而FOx-25和Medusa-82的CTE接近0.0±0.2 ppm/K和1.3 ppm/K。

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引用次数: 0

Laser-engraved holograms as entropy source for random number generators 激光雕刻全息图作为随机数生成器的熵源

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2024-11-04 DOI: 10.1016/j.mne.2024.100290

Christos Tselios , Anastasios Tsakas , Simone Mazzucato , Christina Politi (Tanya) , Panagiotis Rizomiliotis , Dimitris Alexandropoulos

Our study introduces a novel approach to true random number generation (TRNG) using speckle patterns generated by laser-engraved holograms on carbon fiber-reinforced polymer (CFRP) composite substrates. Unlike previous methods, our approach simplifies the process by generating the necessary image dataset from a single microscope image of the engraved hologram. We achieve a high extraction ratio of 76 %, demonstrating the effectiveness of our TRNG. Moreover, our method successfully passes rigorous statistical tests proposed by the National Institute of Standards and Technology (NIST), indicating its suitability for cryptographic and secure system applications. This work offers promising implications for enhancing security in various domains, from secure communication networks to IoT devices.

我们的研究介绍了一种利用激光在碳纤维增强聚合物（CFRP）复合基材上雕刻全息图所产生的斑点图案进行真随机数生成（TRNG）的新方法。与以往的方法不同，我们的方法通过从雕刻全息图的单个显微镜图像生成必要的图像数据集来简化过程。我们的提取率高达 76%，证明了 TRNG 的有效性。此外，我们的方法还成功通过了美国国家标准与技术研究院（NIST）提出的严格统计测试，表明它适用于加密和安全系统应用。这项工作为增强从安全通信网络到物联网设备等各个领域的安全性提供了广阔的前景。

引用次数: 0

Release of hydrogen gas from PECVD silicon nitride thin films in cavities of MEMS sensors PECVD 氮化硅薄膜在 MEMS 传感器空腔中释放氢气

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2024-11-03 DOI: 10.1016/j.mne.2024.100291

P. Dani , M. Tuchen , B.E. Meli , J. Franz , J. Knoch

In this work we investigate the release of hydrogen gas from PECVD silicon nitride thin films in the cavities of MEMS based inertial sensors. Firstly, material characterization is conducted on two types of PECVD silicon nitride thin films to study the release of hydrogen gas with analytical methods. The release of hydrogen gas from these materials in encapsulated cavities of MEMS sensors, and its influence on the cavity pressure is also investigated experimentally with the help of functional microchips of MEMS based inertial sensors. Based on our findings and reports from other works, we propose steps by which change in the cavity pressure of the investigated microchip occurs over its different fabrication processes. We suggest that hydrogen gas is released form PECVD silicon nitride thin films at high temperatures during wafer bonding, which can then diffuse in cavities at low pressure over the lifetime of the sensor.

在这项工作中，我们研究了基于 MEMS 的惯性传感器空腔中 PECVD 氮化硅薄膜释放氢气的情况。首先，我们对两种类型的 PECVD 氮化硅薄膜进行了材料表征，用分析方法研究了氢气的释放。在基于 MEMS 的惯性传感器功能微芯片的帮助下，还通过实验研究了这些材料在 MEMS 传感器封装腔中的氢气释放及其对腔压的影响。根据我们的研究结果和其他研究报告，我们提出了所研究的微芯片在不同制造过程中腔体压力发生变化的步骤。我们认为，氢气是在晶片键合过程中以高温形式从 PECVD 氮化硅薄膜中释放出来的，然后在传感器的整个生命周期中以低压在腔体内扩散。

引用次数: 0

Developments in the design and microfabrication of photovoltaic retinal implants 光电视网膜植入物的设计和微加工进展

IF 2.8 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Micro and Nano Engineering

Pub Date : 2024-10-29 DOI: 10.1016/j.mne.2024.100289

Pratik Kusumanchi , Stephan Sylvest Keller , Rasmus Schmidt Davidsen

Photovoltaic retinal implants are emerging as a promising technological solution for restoring vision for patients suffering from retinal degenerative diseases such as retinitis pigmentosa and age-related macular degeneration. These prostheses contain arrays of miniaturized solar cells converting light into electrical output signals, which subsequently are employed for local activation of the intact neuroretina via microelectrodes. Leveraging cutting-edge microfabrication techniques, photovoltaic retinal implants are compact and provide a high density of solar cell pixels. This potentially increases the resolution of the artificial vision and the field of view and lowers the threshold for stimulation of retinal neurons. The introduction of flexible substrates and the integration of 3D electrodes has greatly improved the connection with retinal neurons, optimizing the spatial resolution and potentially lowering the stimulation threshold. This review explores the latest developments in photovoltaic retinal prostheses, highlighting key aspects of their design, fabrication and performance. This field of research is still in its early stage and particular emphasis is laid on promising future research directions including miniaturization of pixels, incorporation of organic flexible semiconductors and first studies considering 3D stimulating electrode structures. Despite the significant progress made, there are still substantial challenges to overcome, such as ensuring long-term biocompatibility and validation of the novel concepts in clinical trials. Ongoing interdisciplinary research and development are essential for moving these promising technologies from the lab to real-world clinical applications, ultimately enhancing vision restoration. This review aims to provide a comprehensive overview of the current state of photovoltaic retinal implants and pinpoints critical areas for future research to further advance this transformative technology.

光生伏打视网膜植入物正在成为恢复视网膜变性疾病（如视网膜色素变性和老年性黄斑变性）患者视力的一种有前途的技术解决方案。这些假体包含微型太阳能电池阵列，可将光转换为电子输出信号，然后通过微电极局部激活完整的神经视网膜。利用尖端的微加工技术，光电视网膜假体结构紧凑，太阳能电池像素密度高。这有可能提高人工视觉的分辨率和视野，并降低刺激视网膜神经元的阈值。柔性基板的引入和三维电极的集成大大改善了与视网膜神经元的连接，优化了空间分辨率，并有可能降低刺激阈值。本综述探讨了光电视网膜假体的最新发展，重点介绍了其设计、制造和性能的关键方面。这一研究领域仍处于早期阶段，特别强调了未来大有可为的研究方向，包括像素的微型化、有机柔性半导体的融入以及首次考虑三维刺激电极结构的研究。尽管取得了重大进展，但仍有大量挑战需要克服，如确保长期生物兼容性和在临床试验中验证新概念。要将这些前景广阔的技术从实验室推向现实世界的临床应用，并最终促进视力恢复，持续的跨学科研究和开发至关重要。本综述旨在全面概述光伏视网膜植入物的现状，并指出未来研究的关键领域，以进一步推动这一变革性技术的发展。

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