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2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)最新文献

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Novel Approach to Display Failure on OLED Display Device OLED显示器件显示故障的新方法
Hoseok Song, Ki-Jong Lee, Yong H. Lee
A novel failure analysis (FA) method was developed for the identification of failure root cause in a display device. Conventionally, FA on display failure requires the components to be detached from the integrated display device, which involves potentially destructive steps. These may result in an alteration of the defect, preventing a precise localization and further analysis of the failure root cause of display failure. To overcome this issue, a specific FA workflow involving in-place analysis was developed. It enabled a successful localization and characterization of the defect via emission analysis from both sides of the device and cross-sectional analysis. With this new workflow, the manufacturing step responsible for the defect was well identified. This makes FA result of display failure clearer enough to give feedback to manufacturing line for process rectification.
提出了一种用于显示设备故障根源识别的失效分析方法。通常,FA显示故障需要将组件从集成显示设备中分离出来,这涉及到潜在的破坏性步骤。这些可能会导致缺陷的改变,阻止精确定位和进一步分析显示故障的根本原因。为了克服这个问题,开发了一个涉及就地分析的特定FA工作流。它可以通过装置两侧的发射分析和横截面分析成功地定位和表征缺陷。有了这个新的工作流程,负责缺陷的制造步骤就被很好地确定了。这使得显示故障的FA结果足够清晰,可以反馈给生产线进行工艺整改。
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引用次数: 0
TEM sample preparation for a suspended structure with deep cavity 深空腔悬浮结构的TEM样品制备
I. Tee, Jie Zhu
Transmission electron microscope (TEM) failure analysis has been widely adopted in the field of semiconductor manufacturing because of its ability to provide high resolution measurement and elemental characterization in (sub) nanometer scale. Despite many advantages of the TEM technique, one challenge that the conventional sample preparation by Focused Ion Beam (FIB) is limitations on the TEM lamella size, structure, or pattern of the target. In this work, we demonstrate how TEM lamellas were prepared on a suspended structure with deep cavity. In the first case study, proper selection of coating materials with tilted angle deposition and use of in-situ lift-out technique are critical for successful sample preparation to study thin residue layer along large sidewall of a suspended structure. In the second case study, application of fine cleaving and sample reorientation enabled us to prepare an artifact-free sample to characterize post-etch residue at the bottom of a very deep cavity.
透射电子显微镜(TEM)失效分析由于能够在亚纳米尺度上提供高分辨率的测量和元素表征而被广泛应用于半导体制造领域。尽管TEM技术有许多优点,但传统的聚焦离子束(FIB)样品制备的一个挑战是对目标的TEM片层尺寸、结构或模式的限制。在这项工作中,我们展示了如何在具有深空腔的悬浮结构上制备TEM薄片。在第一个案例研究中,正确选择倾斜沉积的涂层材料和使用原位提升技术是成功制备样品的关键,可以研究悬架结构沿大侧壁的薄残留层。在第二个案例研究中,应用精细切割和样品重定向使我们能够制备无伪影样品,以表征非常深的空腔底部的蚀刻后残留物。
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引用次数: 0
Atomic Force Probing and Focus Exposure Matrix Analysis to Resolve High Leakage Current Failure on SRAM 原子力探测和聚焦曝光矩阵分析解决SRAM高漏电流故障
Teck Leong Wee, Handoko Linewih, Sally Chwa, P. K. Tan, A. Quah, P. T. Ng, Hnin Hnin Won, Thoungh Ma, Fransiscus Rivai
This paper demonstrates the use of Current Imaging, Atomic Force Probing (AFP) and Focus Exposure Matrix (FEM) analysis to identify the root cause of high leakage current issue in Static Random-Access Memory (SRAM) array in the product. Through current imaging and AFP probing, abnormal current image contrast was observed on the P-Channel Field Effect Transistor (PFET) of bad SRAM bit cells. Further physical failure analysis by delayering and Transmission Electron Microscopy (TEM) found no physical-related defect. This indicates that the high leak path is caused by front-end of line (FEOL) process-related issue. The AFP analysis results indicate a possible implant-related issue. Focus Exposure Matrix (FEM) analysis was carried out on an implant mask and the results correlate well to the SRAM leakage, which suggests counter-doping due to insufficient resist coverage that leads to a new product mask evaluation.
本文演示了使用电流成像、原子力探测(AFP)和聚焦曝光矩阵(FEM)分析来确定产品中静态随机存取存储器(SRAM)阵列中高泄漏电流问题的根本原因。通过电流成像和AFP探测,在SRAM坏位单元的p沟道场效应晶体管(pet)上观察到异常的电流图像对比。进一步的物理失效分析,通过脱层和透射电子显微镜(TEM)没有发现物理相关的缺陷。这表明高泄漏路径是由生产线前端(FEOL)工艺相关问题引起的。AFP分析结果显示可能与植入物有关。对一种植入膜进行了聚焦暴露矩阵(FEM)分析,结果与SRAM泄漏有很好的相关性,这表明由于抗阻覆盖不足而导致反掺杂,从而导致新产品的掩膜评估。
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引用次数: 0
PinPoint: An SMD Pin Localization Method 一种SMD引脚定位方法
Nathan Jessurun, Jacob Harrison, M. Tehranipoor, N. Asadizanjani
Automated optical inspection (AOI) is used to verify quality of printed circuit board (PCB) assembly and has been proposed for detecting counterfeit components and malicious "trojan" PCB modifications. Component pin localization and characterization is an important step in both of these processes. We present PinPoint: a computer vision algorithm which extracts pin information from surface-mount device (SMD) contours. PinPoint is robust against contour noise, component size, and package type. We evaluate PinPoint against a sample of SMD contours and show that it achieves remarkable performance. Our algorithm could serve as an efficient pin localization step in traditional assembly quality checks and can support future efforts to extract expensive-to-forge characteristics of SMD packages to improve optical assurance.
自动光学检测(AOI)用于验证印刷电路板(PCB)组件的质量,并已被提议用于检测假冒组件和恶意“特洛伊木马”PCB修改。元件引脚定位和表征是这两个过程中的重要步骤。我们提出了一种从表面贴装器件(SMD)轮廓中提取引脚信息的计算机视觉算法。PinPoint对轮廓噪声、组件尺寸和封装类型都具有鲁棒性。我们对SMD轮廓样品进行了评估,并表明它实现了卓越的性能。我们的算法可以作为传统组装质量检查中有效的引脚定位步骤,并可以支持未来提取SMD封装昂贵的锻造特性以提高光学保证。
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引用次数: 0
Physical Assurance for Heterogeneous Integration: Challenges and Opportunities 异构集成的物理保证:挑战与机遇
Chengjie Xi, Aslam A. Khan, Nathan Jessurun, Nidish Vashisthan, M. Tehranipoor, N. Asadizanjani
Integrated Circuit (IC) hardware assurance is an increasingly concerning topic for semiconductor industries. Because ICs are the industries’ fundamental building blocks, they are consistently targeted for adversarial attacks. Physical inspection methods (i.e., Scanning Electron Microscopy (SEM), X-ray, and THz) are used to verify the IC hardware from the transistor to the device level. However, these inspection methods are difficult to apply to emerging packaging technologies and Heterogeneous Integration (HI) due to their inherent limitations and sample complexity. HI complex nature can provide some inherent features employable as countermeasures. For instance, the material and the structural fingerprints can be used to monitor, verify, and provide device assurance. This paper will introduce potential security vulnerabilities in HI hardware and review various physical inspection methods and their limitations surrounding comprehensive assurance. Both non-destructive and destructive methods will be discussed, ranging from material/structural analysis to transistor-level physical inspection. Insights to the MEMS & NEMS implantation into the package to secure the original design, will be also explored in this paper.
集成电路(IC)硬件保障是半导体行业日益关注的课题。由于集成电路是行业的基本组成部分,因此它们一直是对抗性攻击的目标。物理检查方法(即扫描电子显微镜(SEM), x射线和太赫兹)用于验证从晶体管到器件级的IC硬件。然而,由于其固有的局限性和样品复杂性,这些检测方法难以应用于新兴的封装技术和异构集成(HI)。HI的复杂性提供了一些可作为对策的内在特征。例如,材料和结构指纹可用于监控,验证和提供设备保证。本文将介绍HI硬件中潜在的安全漏洞,并回顾各种物理检测方法及其在全面保证方面的局限性。将讨论非破坏性和破坏性方法,从材料/结构分析到晶体管级物理检查。本文还将探讨MEMS和NEMS植入封装以确保原始设计的见解。
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引用次数: 1
Case Study For STI-LDNMOS Burned During HCI Stress to Passing Reliability Specifications 在HCI应力下燃烧的STI-LDNMOS通过可靠性规范的案例研究
Wei-Cheng Chu, B. Tsai, H. Yoshida, Yi-Heng Chen, Yung-Lung Hsu
The Ibmax (Maximum Substrate Current) of general LDNMOS has two peaks, one is located at Ndrift (N drift region) under Gox, far from the pinch-off point, while the other is close to the pinch-off point [1]. Considering the actual application of the component, we chose the first peak for HCI (Hot Carrier Injection) stress, and found that the 32V symmetry STI-LDNMOS (Shallow Trench Isolation Lateral Diffusion) on different platforms (A and B) seem to have different reasons for burning. The experimental data shows that the component burnout of platform A is similar to the papers published by the authors [2], that is, HCI stress will degrade the diode characteristics of drain to bulk, making the maximum electric field closer to the drain terminal and the kirk effect of IbVg worse. What's interesting is that during the HCI stress of the components on platform B, the measured IdVd, IbVd and IbVg do not have the signs of burning like those of platform A. In order to clarify the reason for its burning, we performed a series of experiments, and finally proved that it may originate from BJT (Bipolar Junction Transistor) being turned on, not HCI induced TDDB (Time Dependent Dielectric Breakdown). Finally, in order to save costs, we chose to change the process conditions of LDNH2 (Ndrift is near the channel) for reducing the implant energy and increasing the concentration to solve the burn-out problem and pass the criteria.
一般LDNMOS的Ibmax (Maximum Substrate Current)有两个峰,一个位于Gox下的Ndrift (N漂移区),远离掐断点,另一个靠近掐断点[1]。考虑到元件的实际应用,我们选择了HCI(热载流子注入)应力的第一个峰,发现不同平台(A和B)上的32V对称STI-LDNMOS(浅沟槽隔离横向扩散)似乎有不同的燃烧原因。实验数据显示,A平台的元器件燃尽与作者发表的论文相似[2],即HCI应力会使漏极二极管特性降为体积,使最大电场更靠近漏极端,IbVg的kirk效应变差。有趣的是,在B平台上元件的HCI应力过程中,测量到的IdVd、IbVd和IbVg没有像a平台那样有燃烧的迹象。为了阐明其燃烧的原因,我们进行了一系列的实验,最终证明它可能是由于BJT (Bipolar Junction Transistor)被接通,而不是HCI引起的TDDB (Time Dependent Dielectric Breakdown)。最后,为了节省成本,我们选择改变LDNH2的工艺条件(Ndrift靠近通道),降低植入体能量,增加浓度,解决烧尽问题,通过标准。
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引用次数: 0
Physical origin of the permanent components of the positive charge buildup resulting from NBTI/PBTI stress in nMOS/pMOS transistors nMOS/pMOS晶体管中NBTI/PBTI应力引起的正电荷积累的永久元件的物理来源
F. Palumbo, M. Klebanov, G. Monreal, S. Chetlur
It is well established that the bias temperature instability (BTI) mechanism alters the Vth distribution with reliability implications to balanced analog circuits. This paper presents a deep understanding of the mechanisms involved in the permanent components of BTI effects that dominate the long-term reliability projections. By use of CV measurements, the energetic distribution of traps in the bandgap was studied where hydrogen reactions are linked to the positive charge buildup.
偏置温度不稳定性(BTI)机制改变了Vth分布,影响了平衡模拟电路的可靠性。本文对主导长期可靠性预测的BTI效应的永久成分所涉及的机制进行了深入的理解。通过CV测量,研究了带隙中氢反应与正电荷形成相关的陷阱的能量分布。
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引用次数: 1
Interconnection Reliability on FinFET Devices FinFET器件的互连可靠性
Xin Yang, Yongkang Xue, Z. Dong, Chaolun Wang, Zhigang Ji, Chihang Tsai, Yongren Wu, Weisong Yu, Runsheng Wang, Xing Wu
Reliability issues of semiconductors devices are always related with defects accumulation. Repeatedly switching processes of a semiconductor device could induce the defects accumulation which results in performance degradation. Bulk fin field-effect transistor (FinFET) devices, with a miniaturized three-dimensional structure, have a more complex reliability mechanism that requires detailed research. In this experiment, failure analysis was studied on the same batch of the FinFET devices which suffered performance degradation aging tests at different stress time. During this process, the magnitude of each applied electrical current was not exceeded the operating current. In this work, microstructural and chemical elements differences were characterized by transmission electron microscopy. It is founded that the interconnection part next to the core fin structure was destructed under the electrical over stress (EOS). These phenomena were not observed in the normal FinFET. It can be concluded that the effective contact area of the interconnection part decreased, resulting in the increased internal electrical field. Tungsten (W), as the metal 0 (M0) layer, migrated under defects accumulation. This work paves a guideline for the reliability improvements of FinFET.
半导体器件的可靠性问题往往与缺陷积累有关。半导体器件的反复开关过程会引起缺陷的积累,从而导致性能下降。体翅片场效应晶体管(FinFET)器件具有小型化的三维结构,其可靠性机制更为复杂,需要进行详细的研究。本实验对同一批FinFET器件在不同应力时间下进行性能退化老化试验进行失效分析。在此过程中,每次施加的电流的大小不超过工作电流。在这项工作中,通过透射电子显微镜对微观结构和化学元素的差异进行了表征。研究发现,靠近核心翅片结构的互连部分在电过应力作用下发生了破坏。这些现象在正常的FinFET中没有观察到。可以得出互连部分的有效接触面积减小,导致内部电场增大的结论。钨(W)作为金属0 (M0)层,在缺陷积累过程中发生迁移。该工作为提高FinFET的可靠性提供了指导。
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引用次数: 0
High-Voltage Electrostatic Discharge Protection Device development in 28nm BCDLite Technology 28nm BCDLite技术高压静电放电保护装置的研制
Prantik Mahajan, Vishal Ganesan, N. Subramani, Ruchil Jain, S. Mitra, R. Gauthier
Best-in-class (BIC) High-Voltage (HV) Electrostatic Discharge (ESD) solutions for 8-12V power pad protection in first-of-its-kind GlobalFoundries® 28nm low-cost BCDLite process are evaluated. A comparative analysis between different types of devices, namely gate-grounded NMOS (GGNMOS), NPN, PNP and Diode, showing DC & 100ns Transmission Line Pulse (TLP) performance from Technology Computer-Aided Design (TCAD) simulations and silicon measurement results with performance metrics in terms of core device ESD protection effectiveness w.r.t Safe Operating Area (SOA) boundary and key Figures of Merit (FOMs) is elucidated.
GlobalFoundries®28nm低成本BCDLite工艺中用于8-12V电源垫保护的同类最佳(BIC)高压(HV)静电放电(ESD)解决方案进行了评估。对栅极接地NMOS (GGNMOS)、NPN、PNP和二极管等不同类型器件进行了比较分析,从计算机辅助设计(TCAD)仿真和硅测量结果中得出直流和100ns传输线脉冲(TLP)性能指标,并从安全工作区(SOA)边界和关键性能指标(FOMs)的角度阐述了核心器件ESD保护有效性。
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引用次数: 0
Research on the factors affecting warpage of the light guide plate in the process of reliability 对可靠性过程中影响导光板翘曲的因素进行了研究
Shang Jiantong, Yang Gang, Song Yong, Yu Hongjun, Chen Chuncheng
This paper explores the influence factors of warpage of the light guide plate (LGP) by conducting the reliability experiments. The results show that the warpage of the LGP is mainly caused by uneven stress release under the thermal shock test (TST) condition, while the warpage of the LGP under the high temperature & humidity test (THS) condition is mainly caused by the interactive compression of LGP and the mold frame. The study provides a theoretical basis for the design of LGP in backlight module and can effectively reduce the incidence of warpage and deformation in the LGP.
通过可靠性试验,探讨了导光板翘曲的影响因素。结果表明:在热冲击试验(TST)条件下,LGP的翘曲主要是由于应力释放不均匀引起的,而在高温高湿试验(THS)条件下,LGP的翘曲主要是由LGP与模架的相互压缩引起的。该研究为背光模块中LGP的设计提供了理论依据,可以有效降低LGP中翘曲和变形的发生率。
{"title":"Research on the factors affecting warpage of the light guide plate in the process of reliability","authors":"Shang Jiantong, Yang Gang, Song Yong, Yu Hongjun, Chen Chuncheng","doi":"10.1109/IPFA55383.2022.9915754","DOIUrl":"https://doi.org/10.1109/IPFA55383.2022.9915754","url":null,"abstract":"This paper explores the influence factors of warpage of the light guide plate (LGP) by conducting the reliability experiments. The results show that the warpage of the LGP is mainly caused by uneven stress release under the thermal shock test (TST) condition, while the warpage of the LGP under the high temperature & humidity test (THS) condition is mainly caused by the interactive compression of LGP and the mold frame. The study provides a theoretical basis for the design of LGP in backlight module and can effectively reduce the incidence of warpage and deformation in the LGP.","PeriodicalId":378702,"journal":{"name":"2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-07-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131209879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2022 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
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