Lirong Qiu, Lei Wang, Dali Liu, Maosheng Hou, Weiqian Zhao
In the process of zero-crossing trigger measurement of differential confocal microscope, the sample surface features or tilt will cause the edges can't be triggered. Meanwhile, environment vibration can also cause false triggering. In order to restore the invalid information of sample, and realize high-precision surface topography measurement, Total Variation (TV) inpainting model is applied to restore the scanning images. Emulation analysis and experimental verification of this method are investigated. The image inpainting algorithm based on TV model solves the minimization of the energy equation by calculus of variations, and it can effectively restore the non-textured image with noises. Using this algorithm, the simulation confocal laser intensity curve and height curve of standard step sample are restored. After inpainting the intensity curve below the threshold is repaired, the maximum deviation from ideal situation is 0.0042, the corresponding edge contour of height curve is restored, the maximum deviation is 0.1920, which proves the algorithm is effective. Experiment of grating inpainting indicates that the TV algorithm can restore the lost information caused by failed triggering and eliminate the noise caused by false triggering in zero-crossing trigger measurement of differential confocal microscope. The restored image is consistent with the scanning result of OLYMPUS confocal microscope, which can satisfy the request of follow-up measurement analysis.
{"title":"Image inpainting for the differential confocal microscope","authors":"Lirong Qiu, Lei Wang, Dali Liu, Maosheng Hou, Weiqian Zhao","doi":"10.1117/12.2181352","DOIUrl":"https://doi.org/10.1117/12.2181352","url":null,"abstract":"In the process of zero-crossing trigger measurement of differential confocal microscope, the sample surface features or tilt will cause the edges can't be triggered. Meanwhile, environment vibration can also cause false triggering. In order to restore the invalid information of sample, and realize high-precision surface topography measurement, Total Variation (TV) inpainting model is applied to restore the scanning images. Emulation analysis and experimental verification of this method are investigated. The image inpainting algorithm based on TV model solves the minimization of the energy equation by calculus of variations, and it can effectively restore the non-textured image with noises. Using this algorithm, the simulation confocal laser intensity curve and height curve of standard step sample are restored. After inpainting the intensity curve below the threshold is repaired, the maximum deviation from ideal situation is 0.0042, the corresponding edge contour of height curve is restored, the maximum deviation is 0.1920, which proves the algorithm is effective. Experiment of grating inpainting indicates that the TV algorithm can restore the lost information caused by failed triggering and eliminate the noise caused by false triggering in zero-crossing trigger measurement of differential confocal microscope. The restored image is consistent with the scanning result of OLYMPUS confocal microscope, which can satisfy the request of follow-up measurement analysis.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122519463","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Moving photogrammetry is an application of close range photogrammetry in industrial measurement to realize threedimensional coordinate measurement within large-scale volume. This paper describes an approach of relaxation matching algorithm applicable to moving photogrammetry according to the characteristics of accurate matching result of different measuring images. This method uses neighborhood matching support to improve the matching rate after coarse matching based on epipolar geometry constraint and precise matching using three images. It reflects the overall matching effect of all points, that means when a point is matched correctly, the matching results of those points round it must be correct. So for one point considered, the matching results of points round it are calculated to judge whether its result is correct. Analysis indicates that relaxation matching can eliminate the mismatching effectively and acquire 100% rate of correct matching. It will play a very important role in moving photogrammetry to ensure the following implement of ray bundle adjustment.
{"title":"Relaxation matching algorithm for moving photogrammetry","authors":"Lei Guo, Ke Liu, Yinxiao Miao, Jigui Zhu","doi":"10.1117/12.2181152","DOIUrl":"https://doi.org/10.1117/12.2181152","url":null,"abstract":"Moving photogrammetry is an application of close range photogrammetry in industrial measurement to realize threedimensional coordinate measurement within large-scale volume. This paper describes an approach of relaxation matching algorithm applicable to moving photogrammetry according to the characteristics of accurate matching result of different measuring images. This method uses neighborhood matching support to improve the matching rate after coarse matching based on epipolar geometry constraint and precise matching using three images. It reflects the overall matching effect of all points, that means when a point is matched correctly, the matching results of those points round it must be correct. So for one point considered, the matching results of points round it are calculated to judge whether its result is correct. Analysis indicates that relaxation matching can eliminate the mismatching effectively and acquire 100% rate of correct matching. It will play a very important role in moving photogrammetry to ensure the following implement of ray bundle adjustment.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123074208","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A novel cylindrical capacitive sensor (CCS) with differential, symmetrical and integrated structure was proposed to measure multi-degree-of-freedom rotation errors of high precision spindle simultaneously and to reduce impacts of multiple-sensors installation errors on the measurement accuracy. The nonlinear relationship between the output capacitance of CCS and the radial gap was derived using the capacitance formula and was quantitatively analyzed. It was found through analysis that the thickness of curved electrode plates led to the existence of fringe effect. The influence of the fringe effect on the output capacitance was investigated through FEM simulation. It was found through analysis and simulation that the CCS could be optimized to improve the measurement accuracy.
{"title":"Design of a data acquisition system of articulated arm coordinate measuring machines","authors":"H. Yang, Guanbin Gao, Wen Wang","doi":"10.1117/12.2180840","DOIUrl":"https://doi.org/10.1117/12.2180840","url":null,"abstract":"A novel cylindrical capacitive sensor (CCS) with differential, symmetrical and integrated structure was proposed to measure multi-degree-of-freedom rotation errors of high precision spindle simultaneously and to reduce impacts of multiple-sensors installation errors on the measurement accuracy. The nonlinear relationship between the output capacitance of CCS and the radial gap was derived using the capacitance formula and was quantitatively analyzed. It was found through analysis that the thickness of curved electrode plates led to the existence of fringe effect. The influence of the fringe effect on the output capacitance was investigated through FEM simulation. It was found through analysis and simulation that the CCS could be optimized to improve the measurement accuracy.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123934650","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In the paper, a precision press-fit instrument for assembling small interference fitting parts is introduced, which includes pressing module and parts alignment module. The pressing module was used to clamp and position parts, and parts alignment module was used for the two parts’ alignment. Through analyzing press-fit control method, component alignment and adjustment strategy, and machine vision device calibration method, the instrument meets the pressing requirements of precision small components. Finite element method is used to predict the reasonable range of press-fit force, and pressing result of the instrument is tested by experiments.
{"title":"A precision press-fit instrument for assembling small parts","authors":"Z. Lou, Xiao-dong Wang, Bo You, Yang Xu","doi":"10.1117/12.2180857","DOIUrl":"https://doi.org/10.1117/12.2180857","url":null,"abstract":"In the paper, a precision press-fit instrument for assembling small interference fitting parts is introduced, which includes pressing module and parts alignment module. The pressing module was used to clamp and position parts, and parts alignment module was used for the two parts’ alignment. Through analyzing press-fit control method, component alignment and adjustment strategy, and machine vision device calibration method, the instrument meets the pressing requirements of precision small components. Finite element method is used to predict the reasonable range of press-fit force, and pressing result of the instrument is tested by experiments.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114895438","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Focusing on the pixel level multi-source image fusion problem, the paper proposes an algorithm of compressive sensing image fusion based on the multi-resolution analysis. We present the method to decompose the images by nonsubsampled contourlet transform and wavelet successively, and fuse the images in the compressive domain. It means that the images can be sparsely represented by more than one basis functions. Since the nonsubsampled contourlet and wavelet basis functions have complementary advantages in the image multi-resolution analysis, and the signals are sparser after decomposed by two kinds of basis functions, the proposed algorithm has perceived advantages in comparison with CS image fusion in the wavelet domain which is widely reported by literatures. The simulations show that our method provides promising results.
{"title":"Compressive sensing image fusion based on blended multi-resolution analysis","authors":"Ying Tong, Leilei Liu, Mei-rong Zhao, Zilong Wei","doi":"10.1117/12.2086338","DOIUrl":"https://doi.org/10.1117/12.2086338","url":null,"abstract":"Focusing on the pixel level multi-source image fusion problem, the paper proposes an algorithm of compressive sensing image fusion based on the multi-resolution analysis. We present the method to decompose the images by nonsubsampled contourlet transform and wavelet successively, and fuse the images in the compressive domain. It means that the images can be sparsely represented by more than one basis functions. Since the nonsubsampled contourlet and wavelet basis functions have complementary advantages in the image multi-resolution analysis, and the signals are sparser after decomposed by two kinds of basis functions, the proposed algorithm has perceived advantages in comparison with CS image fusion in the wavelet domain which is widely reported by literatures. The simulations show that our method provides promising results.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128040583","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
In order to improve the throughput of lithography machine, a new type of lithography machine began to adopt double wafer stages which make the exposure and measurement work simultaneously. But at the same time, this structure also increases the risk greatly, the wafer stage collision for instance. Therefore, a corresponding safety protection system is necessary to protect the whole double wafer stages system and to improve the throughput on the premise of safety. In this paper, a passive safety protection strategy for double-stages lithography machine is proposed based on analysis of its working conditions. The design principle of safety needle is elaborated, and then needle distribution is determined correspondingly. The simulation results show that, the proposed passive protection method carried out by safety needles could avoid damages of sensitive apparatus.
{"title":"Passive protective strategy for ultra-precision dual-stage","authors":"Yang Liu, Zhenyu Chen, Zhenxian Fu","doi":"10.1117/12.2182389","DOIUrl":"https://doi.org/10.1117/12.2182389","url":null,"abstract":"In order to improve the throughput of lithography machine, a new type of lithography machine began to adopt double wafer stages which make the exposure and measurement work simultaneously. But at the same time, this structure also increases the risk greatly, the wafer stage collision for instance. Therefore, a corresponding safety protection system is necessary to protect the whole double wafer stages system and to improve the throughput on the premise of safety. In this paper, a passive safety protection strategy for double-stages lithography machine is proposed based on analysis of its working conditions. The design principle of safety needle is elaborated, and then needle distribution is determined correspondingly. The simulation results show that, the proposed passive protection method carried out by safety needles could avoid damages of sensitive apparatus.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121837257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ming-Fu Chen, B. Chen, Chih-Wen Chen, Rui-Cian Weng, Ming Chang
A compact and cost-effective illumination platform was developed for a versatile optical inspection system to improve the detection accuracy of defects in glass substrates. The illumination device was developed in two phases, initially to demonstrate its feasibility for surface defect inspection in glass based on dark field images, and subsequently to optimize the design so it can provide multi-directional lighting and increase light scattering from defects on the substrate. Three LED arrays were installed above the substrate carrier and projected at an angle onto the glass substrate for the phase-I illumination device. Surface defects on the glass substrate were successfully reconstructed from images acquired by a line scanned CCD camera, but non-uniformity of defects intensity distribution on images was revealed. To optimize the illumination, two sets of tightly arrayed 3-watt LEDs were symmetrically installed at the entrance slit of the lens-camera module for phase-II illumination device. The inspection data were able to show clearer images of surface defects. The design issues such as poor contrast and sharpness of acquired images due to low scattering efficiency and non-uniform illumination were addressed as well. PCBs for the installation of the LED arrays and their power supply were also optimized. These were manufactured on aluminum substrate to help regulate heating of the inspection platform. This feature makes the system more compact, operable at low power, and easy for modification.
{"title":"Design and implementation of an illumination device for optical inspection of defects in glass substrates","authors":"Ming-Fu Chen, B. Chen, Chih-Wen Chen, Rui-Cian Weng, Ming Chang","doi":"10.1117/12.2181948","DOIUrl":"https://doi.org/10.1117/12.2181948","url":null,"abstract":"A compact and cost-effective illumination platform was developed for a versatile optical inspection system to improve the detection accuracy of defects in glass substrates. The illumination device was developed in two phases, initially to demonstrate its feasibility for surface defect inspection in glass based on dark field images, and subsequently to optimize the design so it can provide multi-directional lighting and increase light scattering from defects on the substrate. Three LED arrays were installed above the substrate carrier and projected at an angle onto the glass substrate for the phase-I illumination device. Surface defects on the glass substrate were successfully reconstructed from images acquired by a line scanned CCD camera, but non-uniformity of defects intensity distribution on images was revealed. To optimize the illumination, two sets of tightly arrayed 3-watt LEDs were symmetrically installed at the entrance slit of the lens-camera module for phase-II illumination device. The inspection data were able to show clearer images of surface defects. The design issues such as poor contrast and sharpness of acquired images due to low scattering efficiency and non-uniform illumination were addressed as well. PCBs for the installation of the LED arrays and their power supply were also optimized. These were manufactured on aluminum substrate to help regulate heating of the inspection platform. This feature makes the system more compact, operable at low power, and easy for modification.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"88 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122596358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yinhan Gao, Juxian Wang, Kai Yang, Tianhao Wang, Z. An
This paper presents an equivalent circuit of high frequency voltage-controlled switch model of IGBT, and a surge voltage absorption circuit as well. This model can not only significantly reduce the surge voltage, decrease EMI noise, but also obviously inhibit common mode voltage towards the DC power mains.
{"title":"Common mode EMI prediction and research in induction motor for electric vehicles","authors":"Yinhan Gao, Juxian Wang, Kai Yang, Tianhao Wang, Z. An","doi":"10.1117/12.2180671","DOIUrl":"https://doi.org/10.1117/12.2180671","url":null,"abstract":"This paper presents an equivalent circuit of high frequency voltage-controlled switch model of IGBT, and a surge voltage absorption circuit as well. This model can not only significantly reduce the surge voltage, decrease EMI noise, but also obviously inhibit common mode voltage towards the DC power mains.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"9446 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131280398","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Zhang, M. Shi, J. Sun, C. Yang, Yajuan Zhang, F. Scopesi, P. Makobore, C. Chin, G. Serra, Y. Wickramasinghe, P. Rolfe
Brain activity can be monitored non-invasively by functional near-infrared spectroscopy (fNIRS), which has several advantages in comparison with other methods, such as flexibility, portability, low cost and fewer physical restrictions. However, in practice fNIRS measurements are often contaminated by physiological interference arising from cardiac contraction, breathing and blood pressure fluctuations, thereby severely limiting the utility of the method. Hence, further improvement is necessary to reduce or eliminate such interference in order that the evoked brain activity information can be extracted reliably from fNIRS data. In the present paper, the multi-distance fNIRS probe configuration has been adopted. The short-distance fNIRS measurement is treated as the virtual channel and the long-distance fNIRS measurement is treated as the measurement channel. Independent component analysis (ICA) is employed for the fNIRS recordings to separate the brain signals and the interference. Least-absolute deviation (LAD) estimator is employed to recover the brain activity signals. We also utilized Monte Carlo simulations based on a five-layer model of the adult human head to evaluate our methodology. The results demonstrate that the ICA algorithm has the potential to separate physiological interference in fNIRS data and the LAD estimator could be a useful criterion to recover the brain activity signals.
{"title":"Recovering fNIRS brain signals: physiological interference suppression with independent component analysis","authors":"Y. Zhang, M. Shi, J. Sun, C. Yang, Yajuan Zhang, F. Scopesi, P. Makobore, C. Chin, G. Serra, Y. Wickramasinghe, P. Rolfe","doi":"10.1117/12.2083483","DOIUrl":"https://doi.org/10.1117/12.2083483","url":null,"abstract":"Brain activity can be monitored non-invasively by functional near-infrared spectroscopy (fNIRS), which has several advantages in comparison with other methods, such as flexibility, portability, low cost and fewer physical restrictions. However, in practice fNIRS measurements are often contaminated by physiological interference arising from cardiac contraction, breathing and blood pressure fluctuations, thereby severely limiting the utility of the method. Hence, further improvement is necessary to reduce or eliminate such interference in order that the evoked brain activity information can be extracted reliably from fNIRS data. In the present paper, the multi-distance fNIRS probe configuration has been adopted. The short-distance fNIRS measurement is treated as the virtual channel and the long-distance fNIRS measurement is treated as the measurement channel. Independent component analysis (ICA) is employed for the fNIRS recordings to separate the brain signals and the interference. Least-absolute deviation (LAD) estimator is employed to recover the brain activity signals. We also utilized Monte Carlo simulations based on a five-layer model of the adult human head to evaluate our methodology. The results demonstrate that the ICA algorithm has the potential to separate physiological interference in fNIRS data and the LAD estimator could be a useful criterion to recover the brain activity signals.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"217 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131404958","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
The research of changes of the parameters for the polarized radiation output anisotropic linear phase-shifting elements, with their minor collimation turns about the source of spatial orientation in the optical scheme of measuring polarization device, is performed. Comparative analysis of the polarization and energy parameters of the radiation output retards of crystalline silica, magnesium fluoride, and polyvinyl alcohol are accomplished. The dependencies of changes of the ellipticity and azimuth of the output radiation, as well as the transmission coefficient of the phase plate with the changing spatial orientation from the hade on refracting side and azimuth of linearly polarized radiation at its input are considered.
{"title":"Analysis of the effect anisotropic retards collimation turns on polarization and energy radiation parameters","authors":"V. Korotaev, V. Ryzhova, A. V. Trushkina","doi":"10.1117/12.2181959","DOIUrl":"https://doi.org/10.1117/12.2181959","url":null,"abstract":"The research of changes of the parameters for the polarized radiation output anisotropic linear phase-shifting elements, with their minor collimation turns about the source of spatial orientation in the optical scheme of measuring polarization device, is performed. Comparative analysis of the polarization and energy parameters of the radiation output retards of crystalline silica, magnesium fluoride, and polyvinyl alcohol are accomplished. The dependencies of changes of the ellipticity and azimuth of the output radiation, as well as the transmission coefficient of the phase plate with the changing spatial orientation from the hade on refracting side and azimuth of linearly polarized radiation at its input are considered.","PeriodicalId":380636,"journal":{"name":"Precision Engineering Measurements and Instrumentation","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2015-03-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125561739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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