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Extension of light transmission distance of single core fiber with a micro axicon fixed at fiber end 通过在光纤端固定微轴,延长单芯光纤的光传输距离
Pub Date : 2015-03-06 DOI: 10.1117/12.2084986
Yuanzheng Chen, Tong Zhou, Jiwen Cui, Jiubin Tan
A micro-axicon was designed and fixed at the end of single core fiber to extend its light transmission distance. The effectiveness of the micro-axicon was verified through simulation and experiment. Simulation and experimental results indicated that compared to a flat end, the divergence angle of effluent light could be reduced from 4.1° to 0.47°, and an increase of 80μm could be achieved using the micro-axicon fixed at fiber end in the light transmission distance of single core fiber. The stability of light beam was improved by 97% using the micro-axicon. It was therefore concluded the micro-axicon fixed at the fiber end was effective in extending the light transmission distance of single core fiber.
在单芯光纤端部设计了微型轴突,延长了单芯光纤的光传输距离。通过仿真和实验验证了微轴突的有效性。仿真和实验结果表明,与平面光纤相比,光纤端部固定的微轴子可使流出光发散角由4.1°减小到0.47°,使单芯光纤的光传输距离增加80μm。使用微轴突后,光束的稳定性提高了97%。由此可见,固定在光纤端部的微轴突可以有效地延长单芯光纤的光传输距离。
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引用次数: 0
Modeling and active vibration control of six-DOF manipulator through μ-synthesis with parameter uncertainties 考虑参数不确定性的六自由度机械臂的μ综合建模与振动主动控制
Pub Date : 2015-03-06 DOI: 10.1117/12.2180664
Kaiping Yu, Ying Wu
A new linear dynamic model of a six-spherical-prismatic-spherical (SPS) Stewart platform with the base excitation was formulated via Kane’s method. In order to satisfy the practical situation, the uncertainties of mass center location, stiffness and damping were concerned. Then a robust μ-synthesis controller was developed by applying D-K iteration to attenuate the base excitation. Comparisons were conducted by analyzing the responses of the open and closed loops in the frequency and time domain. Simulation results indicated that the proposed robust controller is of fine properties and good robustness, which laid a sound foundation of active micro-vibration control of a satellite.
利用Kane方法建立了基于基激励的六球-棱镜-球面Stewart平台的线性动力学模型。为了满足实际情况,考虑了质心位置、刚度和阻尼的不确定性。然后采用D-K迭代法对基激励进行衰减,设计了鲁棒μ合成控制器。通过分析开环和闭环在频域和时域上的响应进行比较。仿真结果表明,所提出的鲁棒控制器性能优良,鲁棒性好,为卫星微振动主动控制奠定了良好的基础。
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引用次数: 5
Double-grating diffraction interferometric stylus probing system for surface profiling and roughness measurement 用于表面轮廓和粗糙度测量的双光栅衍射干涉式触头探测系统
Pub Date : 2015-03-06 DOI: 10.1117/12.2180826
Peipei Wei, Zhengang Lu, Lihua Liu
A double-grating diffraction interferometric stylus probing transducer consisting of a cylindrical grating and a planar grating has been presented to transform the surface profile information to electrical signals. The transducer has the merit of compact construction and high resolution. The relationship between the electrical signals and the displacement of the cylindrical grating is briefly reviewed. The existence of the cylindrical grating brings angle and position deviation, and the deviation will affect the interference of the diffracted beams. To ensure the interference of the diffracted beams, the relationships between the angle deviation, the position deviation, and the radius of curvature of the cylindrical grating are analyzed. The analysis shows that the diffracted beams will interfere normally when suitable radius of curvature of the cylindrical grating and suitable distance between the two gratings are adopted, thus the profile information can be obtained.
提出了一种由圆柱光栅和平面光栅组成的双光栅衍射干涉式触针探测传感器,将表面轮廓信息转换为电信号。该传感器具有结构紧凑、分辨率高的优点。简要介绍了圆柱光栅的位移与电信号的关系。圆柱光栅的存在带来了角度和位置的偏差,这种偏差会影响衍射光束的干涉。为了保证衍射光束的干涉,分析了圆柱光栅的角度偏差、位置偏差和曲率半径之间的关系。分析表明,当选择合适的圆柱光栅曲率半径和光栅间距时,衍射光束会正常干涉,从而获得轮廓信息。
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引用次数: 1
Surface profile measurement of microstructures with steep slopes by sample-titling strategy 用取样方法测量陡坡微结构表面轮廓
Pub Date : 2015-03-06 DOI: 10.1117/12.2180891
Bin Xu, Wei Chen, Yubo Huang, Kang‐Xiang Song, Shiping Zhao
A sample-titling strategy is proposed for the correction of the relative slope of microstructures and the scanning stylus during the surface profile measurement of microstructures with steep slopes. The correct surface profile of a measurement sample was reconstructed by data fusion of the probe trace, rotation angles of a sample and the motion of the scanner. Slope prediction and scanner control methods were also proposed to determine the rotation angle of a sample. Simulation was performed using a stylus with a tip of 2 μm and included angle of 90 degrees, and a trapezoid microstructure with a slope of 60 degrees to verify the feasibility of the proposed method. The measurement error of the proposed method is 0.31 μm while that of an existing scanning method is 4.50 μm in the simulation. Simulation results indicated that the proposed method could be used to increase the maximum detectable slope of a stylus profiling system and to reduce slope measurement errors as well.
针对陡坡微结构表面轮廓测量过程中微结构相对坡度和扫描笔尖的校正问题,提出了一种采样校正策略。通过探针轨迹、样品旋转角度和扫描仪运动的数据融合,重建了测量样品的正确表面轮廓。还提出了坡度预测和扫描仪控制方法来确定样品的旋转角度。采用尖端为2 μm、夹角为90°的触控笔和倾斜为60°的梯形微结构进行了仿真,验证了所提方法的可行性。仿真结果表明,该方法的测量误差为0.31 μm,现有扫描方法的测量误差为4.50 μm。仿真结果表明,该方法可以提高触控笔剖面系统的最大可检测坡度,减小坡度测量误差。
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引用次数: 0
Optimal design of a touch trigger probe 触控触发探头的优化设计
Pub Date : 2015-03-06 DOI: 10.1117/12.2180866
Ruijun Li, Meng Xiang, K. Fan, Hao Zhou, Jian Feng
A tungsten stylus with a ruby ball tip was screwed into a floating plate, which was supported by four leaf springs. The displacement of the tip caused by the contact force in 3D could be transferred into the tilt or vertical displacement of a plane mirror mounted on the floating plate. A quadrant photo detector (QPD) based two dimensional angle sensor was used to detect the tilt or the vertical displacement of the plane mirror. The structural parameters of the probe are optimized for equal sensitivity and equal stiffness in a displacement range of ±5 μm, and a restricted horizontal size of less than 40 mm. Simulation results indicated that the stiffness was less than 0.6 mN/μm and equal in 3D. Experimental results indicated that the probe could be used to achieve a resolution of 1 nm.
一个带有红宝石球头的钨笔被拧到一个由四个弹簧支撑的浮动板上。由三维接触力引起的尖端位移可以转化为安装在浮板上的平面镜的倾斜或垂直位移。采用基于象限光探测器(QPD)的二维角度传感器检测平面镜的倾斜或垂直位移。探头结构参数优化为在±5 μm的位移范围内等灵敏度、等刚度,限制水平尺寸小于40 mm。仿真结果表明,该结构的刚度小于0.6 mN/μm,且三维刚度相等。实验结果表明,该探针可以达到1 nm的分辨率。
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引用次数: 1
Research on PID controller with input shaping algorithm for linear motor 带输入整形算法的直线电机PID控制器研究
Pub Date : 2015-03-06 DOI: 10.1117/12.2182387
Yang Liu, Yue Dong, W. Fan, Zhenxian Fu
The reticle stage of lithography is a high precision servo motion platform, which requires using macro movement of linear motor and micro movement of voice coil motor to realize an nm-level positioning precision and tracking. In order to increase the control effect and response speed of macro movement linear motor of reticle stage of lithography, the paper presents an efficient control for linear motor. The method use input shaping technique with Proportional Integral Derivative (PID) controller to realize the high position precision in small stetting time. In the paper we firstly build the linear motor mathematical modeling which is end to velocity loop or position loop. so that we mainly focus on the tracking of speed signal. Then a PID controller is introduced in the system, which is high frequency used in industrial control. Finally, as the need of high positioning precision and small stetting time, we apply input shaping algorithm to solve the problem. The simulation of the system is performed by using MATLAB/Simulation. The evaluation of the method is the performance of input tracking capability.
光刻工作台是一个高精度的伺服运动平台,需要利用直线电机的宏观运动和音圈电机的微观运动来实现纳米级的定位精度和跟踪。为了提高光刻工作台宏动直线电机的控制效果和响应速度,提出了一种对直线电机的高效控制方法。该方法采用输入整形技术和比例积分导数(PID)控制器,在较短的起动时间内实现了较高的位置精度。本文首先建立了直线电机的端到速度回路和位置回路的数学模型。因此,我们主要关注速度信号的跟踪。然后在系统中引入了用于工业控制的高频PID控制器。最后,针对定位精度高、定位时间短的要求,提出了输入整形算法。利用MATLAB/ simulation对系统进行仿真。对该方法的评价是输入跟踪能力的表现。
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引用次数: 1
Multi-functional hinge equipped with a magneto-rheological rotary damper for solar array deployment system 用于太阳能电池阵展开系统的带有磁流变旋转阻尼器的多功能铰链
Pub Date : 2015-03-06 DOI: 10.1117/12.2181839
Mingfu Wen, M. Yu, J. Fu, Zheng-Hong Wu
This article describes the design and simulation of a novel multi-functional hinge equipped with a rotary magnetorheological damper for solar array deployment system, which is comprised of a hinge, an angular sensor, a positioning and locking mechanism and a rotary damper. In order to achieve the compact design in structure, some components were reused in different function modules. It’s the first to use magnet-rheological fluid (MRF) to dissipate the energy in solar array deployment system. The main advantage in using MR rotary damper instead of a viscous fluid rotary damper is that the damping force of MR damper can be adjusted according to the external magnetic field environment excited. A mechanic model was built and the structure design was focused on the MR rotary damper, a damping force model of this damper is deduced based on hydromechanics with Bingham plastic constitutive model. A simulation of deployment motion was taken to validate the motion sequence of various components during the unfolding and locking process. It can be obtained that a constant damping coefficient can hardly balance the different performance of solar deployment system, then a simulation of the proposed deployment system equipped with rotary MR damper was carried out. According to the simulation, it can be obtained that the terminal velocity decreased by 75.81% and the deployment time decreased by 72.37% compared with a given constant damping coefficients. Therefore, the proposed new type of rotary damper can reach a compromise with different performance utilizing an on-off control strategy.
本文介绍了一种用于太阳能电池阵列展开系统的新型多功能铰链的设计与仿真,该铰链由铰链、角度传感器、定位锁紧机构和旋转阻尼器组成。为了实现结构上的紧凑设计,在不同的功能模块中重用了一些组件。在太阳能电池阵部署系统中首次使用磁流变液(MRF)来耗散能量。用磁流变阻尼器代替粘性流体旋转阻尼器的主要优点是磁流变阻尼器的阻尼力可以根据所激发的外部磁场环境进行调节。建立了磁流变旋转阻尼器的力学模型,并对其进行了结构设计,基于流体力学,采用Bingham塑性本构模型推导了磁流变旋转阻尼器的阻尼力模型。通过展开运动仿真,验证了展开和锁定过程中各部件的运动顺序。得出恒定阻尼系数很难平衡太阳能展开系统的不同性能,然后对安装旋转磁流变阻尼器的太阳能展开系统进行了仿真。仿真结果表明,在一定阻尼系数下,终端速度降低了75.81%,部署时间减少了72.37%。因此,所提出的新型旋转阻尼器可以通过开关控制策略在不同性能下达到折衷。
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引用次数: 4
Abnormal events detection in crowded scenes by trajectory cluster 基于轨迹聚类的拥挤场景异常事件检测
Pub Date : 2015-03-06 DOI: 10.1117/12.2180725
Shifu Zhou, Zhijiang Zhang, Dan Zeng, Wei Shen
Abnormal events detection in crowded scenes has been a challenge due to volatility of the definitions for both normality and abnormality, the small number of pixels on the target, appearance ambiguity resulting from the dense packing, and severe inter-object occlusions. A novel framework was proposed for the detection of unusual events in crowded scenes using trajectories produced by moving pedestrians based on an intuition that the motion patterns of usual behaviors are similar to these of group activity, whereas unusual behaviors are not. First, spectral clustering is used to group trajectories with similar spatial patterns. Different trajectory clusters represent different activities. Then, unusual trajectories can be detected using these patterns. Furthermore, behavior of a mobile pedestrian can be defined by comparing its direction with these patterns, such as moving in the opposite direction of the group or traversing the group. Experimental results indicated that the proposed algorithm could be used to reliably locate the abnormal events in crowded scenes.
由于正常和异常定义的不稳定性、目标上的像素数量少、密集填充导致的外观模糊以及严重的目标间遮挡,在拥挤场景中异常事件的检测一直是一个挑战。基于通常行为的运动模式与群体活动的运动模式相似的直觉,提出了一种新的框架,用于使用移动行人产生的轨迹来检测拥挤场景中的异常事件,而异常行为则不是。首先,利用光谱聚类对具有相似空间模式的轨迹进行分组。不同的轨迹簇代表不同的活动。然后,利用这些模式可以检测到不寻常的轨迹。此外,移动行人的行为可以通过将其方向与这些模式进行比较来定义,例如在群体的相反方向移动或穿过群体。实验结果表明,该算法能够可靠地定位拥挤场景中的异常事件。
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引用次数: 6
The propagation of manufacture uncertainty to dynamic measurement 制造不确定度对动态测量的传播
Pub Date : 2015-03-06 DOI: 10.1117/12.2181409
Jun Wang, Huaxia Deng, Jin Zhang, Liandong Yu
Uncertainty is the degree of suspicious for correctness or accuracy of measurement results. Parts of the manufacturing error directly affect the structural dynamic characteristics. The propagation of uncertainty in the static measurement from characteristics to the measurement results has been investigated for decades. However, the propagation of manufacture uncertainty to the results of dynamic measurement has been rarely investigated, which is an important issue for the design and tests of structures and equipment. In this paper, the propagation of manufacturing uncertainty to the dynamic measurement is investigated on the basis of modal analysis method. The manufacturing uncertainty here is represented by the tolerance of form and position, which is the difference between actual shape or position and the digital 3D model of geometry shape and position. Tolerance of form and position is an< important indicator to evaluate object geometry size and the relative position in the mechanical design. The uncertainty of the tolerance of form and position is assumed to satisfy Gaussian distribution. The relationship between modal parameters and tolerance is predicted by analyzing transition rules of modal parameters. A series of beams with tolerance of form and position analyzed experiment to verify transitive relation between varied modal parameters in modal analysis and tolerance. The investigation found that the distribution of the uncertainty of the parameters of dynamic measurement, such as the natural frequencies and modal shapes, are not inherently satisfied with Gaussian distribution, although the uncertainty of characteristics are Gaussian distributed, which confirms the difference of uncertainty propagation in the static measurement and dynamic measurement.
不确定度是对测量结果的正确性或准确性的怀疑程度。零件的制造误差直接影响结构的动态特性。静态测量中的不确定度从特性到测量结果的传播已经研究了几十年。然而,制造不确定度对动态测量结果的影响很少被研究,这是结构和设备设计和测试的一个重要问题。本文基于模态分析方法,研究了制造不确定性对动态测量的影响。这里的制造不确定性用形状和位置公差来表示,它是实际形状或位置与数字三维几何形状和位置模型之间的差值。在机械设计中,形位公差是评价物体几何尺寸和相对位置的重要指标。假设形状和位置公差的不确定性满足高斯分布。通过分析模态参数的转换规律,预测了模态参数与公差之间的关系。对一系列具有形位公差的梁进行了试验分析,验证了模态分析中各模态参数与公差之间的传递关系。研究发现,动态测量参数的固有频率和模态振型等不确定度的分布并非固有地满足高斯分布,尽管特性的不确定度是高斯分布,这证实了静态测量和动态测量中不确定度传播的差异。
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引用次数: 0
Measurement of centering error for probe of swing arm profilometer using a spectral confocal sensor 用光谱共聚焦传感器测量摆臂轮廓仪探头定心误差
Pub Date : 2015-03-06 DOI: 10.1117/12.2180887
Lin Chen, Hongwei Jing, Zhong-wei Wei, X. Cao
A spectral confocal sensor was used to measure the centering error for probe of swing arm profilometer (SAP). The feasibility of this technology was proved through simulation and experiment. The final measurement results was also analyzed to evaluate the advantages and disadvantages of this technology.
采用光谱共聚焦传感器测量摆臂轮廓仪探头的定心误差。通过仿真和实验验证了该技术的可行性。最后对测量结果进行了分析,评价了该技术的优缺点。
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引用次数: 1
期刊
Precision Engineering Measurements and Instrumentation
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