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Multifunction surface measurement system based on focusing optical stylus interference and confocal image 基于聚焦光学触针干涉和共聚焦像的多功能表面测量系统
Pub Date : 2015-03-06 DOI: 10.1117/12.2181402
F. Lin, Shu-zhong Zhao, Su-ping Chang, Yanling Sun, T. Xie
In this paper a multifunction surface measurement system based on focusing optical stylus interference and confocal image is researched. This system is designed on the structure of optical interference microscopy and could accomplish two measurement functions of optical stylus scanning measurement and confocal image measurement. Optical path difference would vary with the surface and interference fringe from optical interference microscopy is detected by photo sensor, so optical stylus scanning measurement would be accomplished combining with the X-Y two-dimensional stage. While the reference path of the interference microscope is blocked and the confocal images of the measured surface from CCD is analyzed, confocal imaging measurement would be carried out by the nanometer scanning displacement stage. According to the performance analysis, optical stylus scanning measurement has the measurement range of 50μm and the vertical scanning resolution of 0.005μm, while confocal imaging measurement has the measurement rage of 2mm and the vertical scanning resolution of 1.5μm.
本文研究了一种基于光学触针干涉和共聚焦像的多功能表面测量系统。该系统是在光学干涉显微镜结构上设计的,可以实现光学触针扫描测量和共聚焦图像测量两种测量功能。光程差随表面的变化而变化,光学干涉显微镜的干涉条纹是通过光敏传感器检测的,因此结合X-Y二维阶段完成光学触针扫描测量。在遮挡干涉显微镜的参考路径并分析CCD对被测表面的共焦图像的情况下,通过纳米扫描位移阶段进行共焦成像测量。根据性能分析,光学触针扫描测量的测量范围为50μm,垂直扫描分辨率为0.005μm,而共聚焦成像测量的测量范围为2mm,垂直扫描分辨率为1.5μm。
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引用次数: 1
Data communication between Panasonic PLC and PC using SerialPort control in C#.NET environment 松下PLC与PC机之间的数据通信采用c#串行端口控制。网络环境
Pub Date : 2015-03-06 DOI: 10.1117/12.2181373
Ting Gao, Xiaochuan Gan, Liqun Ma
With the gradual promotion of Microsoft.NET platform, C# as an object-oriented programming language based on the platform has been widely used. Therefore, more attention is concentrated on how to achieve the communication between Panasonic PLC and PC efficiently and fast in C#.NET environment. In this paper, a method of using SerialPort control which could be used for achieving communication between PLC and PC is introduced. Meanwhile, the reason of abnormal thread when displayed the receiving data in form is analyzed and the programming method to solve the problem of thread safety is designed. Achieving the communication of Panasonic PLC and PC in C#.NET environment can give full play to the advantages of the .NET framework. It is practical, easy communication, high reliability and can combine with other measurement and calibration procedures effectively and conveniently. Configuration software is expensive and can only communicate with PLC separately, but these shortcomings can be solved in C#.NET environment. A well-designed user interface realized real-time monitoring of PLC parameters and achieved management and control integration. The experiment show that this method of data transfer is accurate and the program’ running is stable.
随着微软的逐步推广。在。NET平台上,c#作为一种基于该平台的面向对象程序设计语言得到了广泛的应用。因此,如何在c#中实现松下PLC与PC机之间高效、快速的通信成为人们关注的焦点。网络环境。本文介绍了一种利用串口控制实现PLC与PC机通信的方法。同时,分析了接收数据以表格形式显示时出现线程异常的原因,设计了解决线程安全问题的编程方法。用c#实现了松下PLC与PC机的通信。.NET环境可以充分发挥。NET框架的优势。该系统实用、通讯方便、可靠性高,可与其它测量校准程序有效、方便地结合使用。组态软件价格昂贵,只能与PLC单独通信,但这些缺点都可以在c#中解决。网络环境。精心设计的用户界面实现了PLC参数的实时监控,实现了管理与控制的一体化。实验表明,该方法传输数据准确,程序运行稳定。
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引用次数: 0
Modeling of terahertz metamaterial-sensors for simulation based on effect of resonance induction 基于共振感应效应的太赫兹超材料传感器仿真建模
Pub Date : 2015-03-06 DOI: 10.1117/12.2084169
Yehua Bie, Jun Luo, Weijun Li, Xinyu Zhang, An Ji, Hongshi Sang, C. Xie
In order to observe more properties of an electrically resonant metamaterial-sensor, a single cubic unit of the matamaterial-sensor was simulated using the finite-element algorithm and Microwave Studios by CST. Meanwhile, an adaptive mesh refinement was used to ensure an accurate numerical solution with relatively short calculation time. In order to effectively conduct the simulation, some field monitors were also added to help the observation of electromagnetic properties of the unit. Through the electromagnetic simulation, the transmission and reflection spectra of the unit metamaterial-sensor were acquired. At the SRR gap, each kind of metamaterial-sensor structure presents an obvious resonant response at several THz frequency points. Simulation results indicated that the transmission was as low as 0.03 at ~0.79 THz. Other simulation results such as the surface current, the electric field, the electric energy density, and the power loss density, were also observed. By analyzing the simulation results, an idea to obtain the resonant strength in an indirect way was worked out and a way was found to realize the multispectral imaging in THz region.
为了观察电谐振超材料传感器的更多特性,利用CST的有限元算法和微波工作室对单立方材料传感器进行了模拟。同时,采用自适应网格细化,保证了在较短的计算时间内得到准确的数值解。为了有效地进行模拟,还增加了一些现场监测器,以帮助观察机组的电磁特性。通过电磁仿真,获得了单元超材料传感器的透射和反射光谱。在SRR间隙处,每种超材料传感器结构在几个太赫兹频率点上都表现出明显的谐振响应。仿真结果表明,在~0.79 THz下,透射率低至0.03。观察了表面电流、电场、电能密度、功率损耗密度等其他模拟结果。通过对仿真结果的分析,提出了一种间接获取谐振强度的思路,并找到了实现太赫兹区多光谱成像的方法。
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引用次数: 1
Design of handwriting drawing board based on common copper clad laminate 基于普通覆铜板的手写画板设计
Pub Date : 2015-03-06 DOI: 10.1117/12.2083577
Hongyuan Wang, Wen-Hui Gao, Y. Wang
Handwriting drawing board is not only a subject which can be used to write and draw, but also a method to measure and process weak signals. This design adopts 8051 single chip microprocessor as the main controller. It applies a constant-current source[1][2] to copper plate and collects the voltage value according to the resistance divider effect. Then it amplifies the signal with low-noise and high-precision amplifier[3] AD620 which is placed in the low impedance and anti-interference pen. It converts analog signal to digital signal by an 11-channel, 12-bit A/D converter TLC2543. Adoption of average filtering algorithm can effectively improve the measuring accuracy, reduce the error and make the collected voltage signal more stable. The accurate position can be detected by scanning the horizontal and vertical ordinates with the analog switch via the internal bridge of module L298 which can change the direction of X-Y axis signal scan. DM12864 is used as man-machine interface and this hominization design is convenient for man-machine communication. This collecting system has high accuracy, high stability and strong anti-interference capability. It's easy to control and has very large development space in the future.
手写绘图板不仅是一个可以书写和绘图的主体,也是一种测量和处理微弱信号的方法。本设计采用8051单片机作为主控制器。它在铜板上施加恒流源[1][2],并根据分阻效应收集电压值。然后利用放置在低阻抗、抗干扰笔中的低噪声、高精度放大器[3]AD620对信号进行放大。它通过11通道12位A/D转换器TLC2543将模拟信号转换为数字信号。采用平均滤波算法可以有效地提高测量精度,减小误差,使采集到的电压信号更加稳定。通过模块L298的内部桥架,可以改变X-Y轴信号扫描的方向,通过模拟开关扫描横坐标和纵坐标,可以检测到准确的位置。采用DM12864作为人机接口,这种人性化设计方便了人机通信。该采集系统具有精度高、稳定性好、抗干扰能力强等特点。它易于控制,未来有很大的发展空间。
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引用次数: 0
Improvement spatial resolution of frequency modulated continuous wave laser ranging system by splicing equal optical frequency interval sampled signal 利用等光频间隔采样信号拼接提高调频连续波激光测距系统的空间分辨率
Pub Date : 2015-03-06 DOI: 10.1117/12.2180837
G. Shi, Fumin Zhang, Xinghua Qu
A dual interferometry FMCW laser ranging system is presented. The auxiliary interferometer for generating the clock pulses at equally spaced optical frequencies is incorporated into the main interferometer to simplify the system configuration and to compensate the tuning linearity of the laser source. The need of widely tunable laser limits the practical application of the FMCW laser ranging for precision industrial measurement. Splicing sampled signal method is proposed to break though the tuning range of the laser source limitation against the special resolution. In the experiments, 50 μm range resolution at 8.7 m is demonstrated, and this resolution is maintained over the entire measuring range. The measuring range depending on the power and coherence length of the source can reach more than 20 m. The system structure is simple, and the requirement on the tuning range of laser source is reduced in this system.
提出了一种双干涉FMCW激光测距系统。在主干涉仪中加入辅助干涉仪以产生等间隔光频率的时钟脉冲,以简化系统配置并补偿激光源的调谐线性度。广泛可调谐激光的需求限制了FMCW激光测距在精密工业测量中的实际应用。提出了采样信号拼接的方法,突破了激光源调谐范围对特殊分辨率的限制。实验证明,在8.7 m处,该分辨率可达50 μm,并在整个测量范围内保持该分辨率。根据光源的功率和相干长度,测量范围可达20米以上。该系统结构简单,减小了对激光光源调谐范围的要求。
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引用次数: 0
Discuss on traceability method of light-scattering airborne particle counter’s counting performance 光散射机载粒子计数器计数性能溯源方法探讨
Pub Date : 2015-03-06 DOI: 10.1117/12.2181958
Q. Ji, Zhi-liang Gao, Xunbiao Zhang, Jian Chen
The traceability of light-scattering airborne particle counter’s counting performance has received more attention, but has failed to settle internationally. This paper puts forward a traceability method of light-scattering airborne particle counter’s counting performance on single particle size, based on Anodic Aluminum Oxide (AAO) template andScanning Electron Microscope (SEM), by reforming the traditional standard airborne particle counter, building a measurement system including AAO and SEM, and utilizing the method of statistical physics in data processing to obtain more accurate measurement results. According to the actual test results and its uncertainty analysis, the traceability method of light-scattering airborne particle counter’s counting performance based on AAO and SEM makes sense in theory, and has certain research value on a solution to the traceability problem of light-scattering airborne particle counter internationally.
光散射机载粒子计数器计数性能的可追溯性受到了广泛的关注,但在国际上尚未得到解决。本文提出了一种基于阳极氧化铝(AAO)模板和扫描电子显微镜(SEM)的光散射机载粒子计数器单粒径计数性能溯源方法,通过对传统标准机载粒子计数器进行改造,构建了包括AAO和扫描电子显微镜在内的测量系统,并在数据处理中运用统计物理方法,以获得更准确的测量结果。根据实际测试结果及其不确定度分析,基于AAO和SEM的光散射机载粒子计数器计数性能溯源方法在理论上是有意义的,对解决国际上光散射机载粒子计数器溯源问题具有一定的研究价值。
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引用次数: 3
High precision fabrication of antennas and sensors 天线和传感器的高精度制造
Pub Date : 2015-03-06 DOI: 10.1117/12.2180814
A. Balčytis, G. Seniutinas, D. Urbonas, M. Gabalis, K. Vaškevičius, R. Petruskevicius, G. Molis, G. Valušis, S. Juodkazis
Electron and ion beam lithographies were used to fabricate and/or functionalize large scale - millimetre footprint - micro-optical elements: coupled waveguide-resonator structures on silicon-on-insulator (SOI) and THz antennas on low temperature grown LT-GaAs. Waveguide elements on SOI were made without stitching errors using a fixed beam moving stage approach. THz antennas were created using a three-step litography process. First, gold THz antennas defined by standard mask projection lithography were annealed to make an ohmic contact on LT-GaAs and post-processing with Ga-ion beam was used to define nano-gaps and inter digitised contacts for better charge collection. These approaches show the possibility to fabricate large footprint patterns with nanoscale precision features and overlay accuracy. Emerging 3D nanofabrication trends are discussed.
电子和离子束光刻技术被用于制造和/或功能化大规模毫米足迹的微光学元件:在绝缘体上硅(SOI)上的耦合波导谐振器结构和在低温生长的LT-GaAs上的太赫兹天线。采用固定波束移动台方法制备了无拼接误差的SOI波导元件。太赫兹天线是用三步光刻工艺制作的。首先,通过标准掩模投影光刻定义的金太赫兹天线在LT-GaAs上退火形成欧姆接触,并使用ga离子束后处理来定义纳米间隙和数字化接触,以便更好地收集电荷。这些方法显示了制造具有纳米级精度特征和覆盖精度的大型足迹图案的可能性。讨论了新兴的三维纳米加工趋势。
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引用次数: 4
Effects of dynamic characters of the macro-micro fast coupling system in long stroke system 大行程系统中宏微快速耦合系统动态特性的影响
Pub Date : 2015-03-06 DOI: 10.1117/12.2181599
Jianwei Wu, Yongjie Yuan, Jiwen Cui
Macro-micro fast coupling system of dual-stage is used for the detachment and coupling of the macro-motion system and the wafer-stage. When the macro-motion system couples with the wafer-stage, the wafer-stage is driven by macro-motor to achieve long stroke motion. In this paper, the bottom air bearings of wafer stage are analyzed when the driving force of macro motor shifts the center of mass of wafer stage in Z direction. The X, Y, Z stiffness of the coupling system are obtained by using ANSYS.
采用双级宏微快速耦合系统实现宏观运动系统与晶片级的分离与耦合。当宏运动系统与硅片级耦合时,由宏电机驱动硅片级实现长行程运动。本文分析了宏电机驱动力使圆片级质心向Z方向移动时圆片级底部空气轴承的受力情况。利用ANSYS计算了耦合系统的X、Y、Z轴刚度。
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引用次数: 0
Measurement of duration of AC transient signal waveform using Hilbert transform and least square method 用希尔伯特变换和最小二乘法测量交流暂态信号波形的持续时间
Pub Date : 2015-03-06 DOI: 10.1117/12.2182352
Puzhong Ouyang, Zhonghua Zhang
The time coordinates of interaction points could be established by extracting the envelop of a transient signal waveform through Hilbert transform and formulating the line equations for the increasing and decreasing segments of an envelope using least square method. The difference of time coordinates lies in the duration time. The duration of increasing and decreasing segments and the whole duration of AC transient signal waveform could be accurately evaluated using waveform measurement and least square method. It was found through analyses and experiments that an uncertainty of less than 0.5ms could be achieved for a SNR of more than 40 dB. It was therefore concluded that the proposed method could be used to measure under-voltage waveform and further extended to do power characteristics testing including compliance test of automotive electronic devices.
通过希尔伯特变换提取暂态信号波形的包络线,利用最小二乘法建立包络线的增、减段线方程,建立相互作用点的时间坐标。时间坐标的差异在于时间的持续时间。利用波形测量和最小二乘法可以准确地求出交流暂态信号波形的增减段持续时间和总持续时间。通过分析和实验发现,在信噪比大于40 dB的情况下,不确定度小于0.5ms。由此得出结论,所提出的方法可用于测量欠压波形,并进一步扩展到包括汽车电子设备符合性测试在内的功率特性测试。
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引用次数: 0
Optical fiber waist-enlarged bitaper-based Michelson interferometric humidity sensor 光纤腰型放大位轴式迈克尔逊干涉湿度传感器
Pub Date : 2015-03-06 DOI: 10.1117/12.2180815
P. Hu, Zhemin Chen, Sunqiang Pan, Guoshui Li, Jianfeng Zhang, Jia Cheng
An optical fiber waist-enlarged bitaper-based Michelson interferometric sensor is proposed and experimentally demonstrated for humidity measurement. The waist enlarged bitaper is created for light coupling between core mode and cladding modes propagating in the fiber interferometer. A chitason layer is plated onto the surface of the interferometer to act as a humidity-to-refractive index (RI) transducer and thus humidity measurement can be realized by monitoring the wavelength shifts of its interferogram induced by RI variations. The influence of the coating thickness and concentration of chitason on relative humidity (RH) measurement is experimentally studied. The coating sensor demonstrates an optimal humidity-sensing ability, with a humidity sensitivity and fast time-response of ~26 pm/%RH and ~5 s respectively, when it is 3-dip coated in chitason solutions of the concentration of 1 wt.%. The proposed humidity sensor is compact, cost-effective and of easy-operation, therefore it has potentials in many practical applications.
提出了一种用于湿度测量的光纤增腰双孔干涉式迈克尔逊传感器,并进行了实验验证。为了在光纤干涉仪中传播的芯模和包层模之间的光耦合,设计了一种腰型放大的双波导。在干涉仪表面镀上一层chitason层,作为湿度-折射率(RI)换能器,通过监测由RI变化引起的干涉图波长位移来实现湿度测量。实验研究了涂层厚度和chitason浓度对相对湿度(RH)测量的影响。该传感器在浓度为1 wt.%的chitason溶液中进行3浸涂时,湿度灵敏度为~26 pm/%RH,时间响应速度为~5 s,具有最佳的湿度传感能力。该湿度传感器结构紧凑、性价比高、操作方便,具有广泛的实际应用潜力。
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引用次数: 4
期刊
Precision Engineering Measurements and Instrumentation
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