R. Tamburo, S. Narasimhan, Anthony G. Rowe, T. Kanade, E. Nurvitadhi, Mei Chen
The primary goal of a vehicular headlight is to improve safety in low-light and poor weather conditions. The typical headlight however has very limited flexibility - switching between high and low beams, turning off beams toward the opposing lane or rotating the beam as the vehicle turns - and is not designed for all driving environments. Thus, despite decades of innovation in light source technology, more than half of the vehicular accidents still happen at night even with much less traffic on the road. We will describe a new DMD-based design for a headlight that can be programmed to perform several tasks simultaneously and that can sense, react and adapt quickly to any environment with the goal of increasing safety for all drivers on the road. For example, we will be able to drive with high-beams without glaring any other driver and we will be able to see better during rain and snowstorms when the road is most treacherous to drive. The headlight can also increase contrast of lanes, markings and sidewalks and can alert drivers to sudden obstacles. In this talk, we will lay out the engineering challenges in building this headlight and share our experiences with the prototypes developed over the past two years.
{"title":"DMDs for smart headlights","authors":"R. Tamburo, S. Narasimhan, Anthony G. Rowe, T. Kanade, E. Nurvitadhi, Mei Chen","doi":"10.1117/12.2053788","DOIUrl":"https://doi.org/10.1117/12.2053788","url":null,"abstract":"The primary goal of a vehicular headlight is to improve safety in low-light and poor weather conditions. The typical headlight however has very limited flexibility - switching between high and low beams, turning off beams toward the opposing lane or rotating the beam as the vehicle turns - and is not designed for all driving environments. Thus, despite decades of innovation in light source technology, more than half of the vehicular accidents still happen at night even with much less traffic on the road. We will describe a new DMD-based design for a headlight that can be programmed to perform several tasks simultaneously and that can sense, react and adapt quickly to any environment with the goal of increasing safety for all drivers on the road. For example, we will be able to drive with high-beams without glaring any other driver and we will be able to see better during rain and snowstorms when the road is most treacherous to drive. The headlight can also increase contrast of lanes, markings and sidewalks and can alert drivers to sudden obstacles. In this talk, we will lay out the engineering challenges in building this headlight and share our experiences with the prototypes developed over the past two years.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"48 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133474953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
2D MEMS scanners are used for e.g. Laser projection purposes or Lidar applications. Electrostatically driven resonant torsional oscillations of both axes of the scanners lead to Lissajous trajectories for Laser beams reflected from the micro mirror. Wafer level vacuum encapsulation with tilt glass capping ensures high angular amplitudes at low driving voltages additionally preventing environmental impacts. Applying Laser Doppler Vibrometry, the effect of residual gas friction, squeezed film damping and internal friction on 2D MEMS scanners is analyzed by measuring the Q-values associated with the torsional oscillations. Vibrometry is also used to analyze the oscillatory motion of the micro mirror and the gimbal of the scanners. Excited modes of the scanner structures are identified giving rise to coupling effects influencing the scanning performance of the 2D MEMS mirrors.
{"title":"Studies on the dynamics of vacuum encapsulated 2D MEMS scanners by laser Doppler vibrometry","authors":"J. Janes, U. Hofmann","doi":"10.1117/12.2037182","DOIUrl":"https://doi.org/10.1117/12.2037182","url":null,"abstract":"2D MEMS scanners are used for e.g. Laser projection purposes or Lidar applications. Electrostatically driven resonant torsional oscillations of both axes of the scanners lead to Lissajous trajectories for Laser beams reflected from the micro mirror. Wafer level vacuum encapsulation with tilt glass capping ensures high angular amplitudes at low driving voltages additionally preventing environmental impacts. Applying Laser Doppler Vibrometry, the effect of residual gas friction, squeezed film damping and internal friction on 2D MEMS scanners is analyzed by measuring the Q-values associated with the torsional oscillations. Vibrometry is also used to analyze the oscillatory motion of the micro mirror and the gimbal of the scanners. Excited modes of the scanner structures are identified giving rise to coupling effects influencing the scanning performance of the 2D MEMS mirrors.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133106835","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results.
{"title":"Towards superfast 3D optical metrology with digital micromirror device (DMD) platforms","authors":"T. Bell, Song Zhang","doi":"10.1117/12.2035270","DOIUrl":"https://doi.org/10.1117/12.2035270","url":null,"abstract":"This paper summarizes our decade-long research efforts towards superfast 3D shape measurement leveraging the digital micromirror device (DMD) platforms. Specifically, we will present the following technologies: (1) high-resolution real-time 3D shape measurement technology that achieves 30 Hz simultaneous 3D shape acquisition, reconstruction and display with more than 300,000 points per frame; (2) Superfast 3D optical metrology technology that achieves 3D measurement at a rate of tens of kHz utilizing the binary defocusing method we invented; and (3) the improvement of the binary defocusing technology for superfast and high-accuracy 3D optical metrology using the DMD platforms. This paper will present both principles and experimental results.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"8979 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130039563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. A. Cooper, L. Carpenter, P. Mennea, C. Holmes, J. Gates, Peter G. R. Smith
An optomechanical dual cantilever device has been fabricated with applications as a displacement sensor and variable attenuator. A novel fabrication approach using a precision dicing saw has benefits for fabrication time, cost and energy consumption. The displacement sensor sensitivity is 0.8 dB/micron and a suppression ratio of 25 dB is obtained when the device is used as an attenuator.
{"title":"Optomechanical cantilever device for displacement sensing and variable attenuator","authors":"P. A. Cooper, L. Carpenter, P. Mennea, C. Holmes, J. Gates, Peter G. R. Smith","doi":"10.1117/12.2039806","DOIUrl":"https://doi.org/10.1117/12.2039806","url":null,"abstract":"An optomechanical dual cantilever device has been fabricated with applications as a displacement sensor and variable attenuator. A novel fabrication approach using a precision dicing saw has benefits for fabrication time, cost and energy consumption. The displacement sensor sensitivity is 0.8 dB/micron and a suppression ratio of 25 dB is obtained when the device is used as an attenuator.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":" 14","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114103122","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A proof of concept of the Highly Accelerated Life Testing (HALT) technique was explored to assess and optimize electronic packaging designs for long duration deep space missions in a wide temperature range (–150°C to +125°C). HALT is a custom hybrid package suite of testing techniques using environments such as extreme temperatures and dynamic shock step processing from 0g up to 50g of acceleration. HALT testing used in this study implemented repetitive shock on the test vehicle components at various temperatures to precipitate workmanship and/or manufacturing defects to show the weak links of the designs. The purpose is to reduce the product development cycle time for improvements to the packaging design qualification. A test article was built using advanced electronic package designs and surface mount technology processes, which are considered useful for a variety of JPL and NASA projects, i.e. (surface mount packages such as ball grid arrays (BGA), plastic ball grid arrays (PBGA), very thin chip array ball grid array (CVBGA), quad flat-pack (QFP), micro-lead-frame (MLF) packages, several passive components, etc.). These packages were daisy-chained and independently monitored during the HALT test. The HALT technique was then implemented to predict reliability and assess survivability of these advanced packaging techniques for long duration deep space missions in much shorter test durations. Test articles were built using advanced electronic package designs that are considered useful in various NASA projects. All the advanced electronic packages were daisychained independently to monitor the continuity of the individual electronic packages. Continuity of the daisy chain packages was monitored during the HALT testing using a data logging system. We were able to test the boards up to 40g to 50g shock levels at temperatures ranging from +125°C to -150°C. The HALT system can deliver 50g shock levels at room temperature. Several tests were performed by subjecting the test boards to various g levels ranging from 5g to 50g, test durations of 10 minutes to 60 minutes, hot temperatures of up to +125°C and cold temperatures down to -150°C. During the HALT test, electrical continuity measurements of the PBGA package showed an open-circuit, whereas the BGA, MLF, and QFPs showed signs of small variations of electrical continuity measurements. The electrical continuity anomaly of the PBGA occurred in the test board within 12 hours of commencing the accelerated test. Similar test boards were assembled, thermal cycled independently from -150°C to +125°C and monitored for electrical continuity through each package design. The PBGA package on the test board showed an anomalous electrical continuity behavior after 959 thermal cycles. Each thermal cycle took around 2.33 hours, so that a total test time to failure of the PBGA was 2,237 hours (or ~3.1 months) due to thermal cycling alone. The accelerated technique (thermal cycling + shock) required only 12 hours to c
{"title":"HALT to qualify electronic packages: a proof of concept","authors":"R. Ramesham","doi":"10.1117/12.2038319","DOIUrl":"https://doi.org/10.1117/12.2038319","url":null,"abstract":"A proof of concept of the Highly Accelerated Life Testing (HALT) technique was explored to assess and optimize electronic packaging designs for long duration deep space missions in a wide temperature range (–150°C to +125°C). HALT is a custom hybrid package suite of testing techniques using environments such as extreme temperatures and dynamic shock step processing from 0g up to 50g of acceleration. HALT testing used in this study implemented repetitive shock on the test vehicle components at various temperatures to precipitate workmanship and/or manufacturing defects to show the weak links of the designs. The purpose is to reduce the product development cycle time for improvements to the packaging design qualification. A test article was built using advanced electronic package designs and surface mount technology processes, which are considered useful for a variety of JPL and NASA projects, i.e. (surface mount packages such as ball grid arrays (BGA), plastic ball grid arrays (PBGA), very thin chip array ball grid array (CVBGA), quad flat-pack (QFP), micro-lead-frame (MLF) packages, several passive components, etc.). These packages were daisy-chained and independently monitored during the HALT test. The HALT technique was then implemented to predict reliability and assess survivability of these advanced packaging techniques for long duration deep space missions in much shorter test durations. Test articles were built using advanced electronic package designs that are considered useful in various NASA projects. All the advanced electronic packages were daisychained independently to monitor the continuity of the individual electronic packages. Continuity of the daisy chain packages was monitored during the HALT testing using a data logging system. We were able to test the boards up to 40g to 50g shock levels at temperatures ranging from +125°C to -150°C. The HALT system can deliver 50g shock levels at room temperature. Several tests were performed by subjecting the test boards to various g levels ranging from 5g to 50g, test durations of 10 minutes to 60 minutes, hot temperatures of up to +125°C and cold temperatures down to -150°C. During the HALT test, electrical continuity measurements of the PBGA package showed an open-circuit, whereas the BGA, MLF, and QFPs showed signs of small variations of electrical continuity measurements. The electrical continuity anomaly of the PBGA occurred in the test board within 12 hours of commencing the accelerated test. Similar test boards were assembled, thermal cycled independently from -150°C to +125°C and monitored for electrical continuity through each package design. The PBGA package on the test board showed an anomalous electrical continuity behavior after 959 thermal cycles. Each thermal cycle took around 2.33 hours, so that a total test time to failure of the PBGA was 2,237 hours (or ~3.1 months) due to thermal cycling alone. The accelerated technique (thermal cycling + shock) required only 12 hours to c","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134221171","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
One photon diffusive photopolymers enable self-developing three dimensional (3D) refractive index patterning of up to cm thick solid volumes for the fabrication of micro-optics. However, one photon absorption in solid, thick materials does not yield complete control of the 3D refractive index distribution due to diffraction and the excessive development time for index features measuring 100’s of microns in diameter or larger. We present a fabrication method and photopolymer formulation that can efficiently create mm3 optical devices with programmable, gradient index of refraction with arbitrary feature size and shape. Index contrast of 0.1 is demonstrated, which is 20 times larger than commercial holographic photopolymers. Devices are fabricated by repetitive micro-fluidic layering of a self-developing photopolymer structured by projection lithography. The process has the unusual property that total fabrication time for a fixed thickness decreases as the number of layers is increased, reducing the fabrication time for high axial resolution micro-optics. We demonstrate the process by fabricating thick waveguide arrays and gradient index lenses.
{"title":"Liquid deposition photolithography for the fabrication of gradient index (GRIN) micro-optics","authors":"Adam C. Urness, Michael C. Cole, R. McLeod","doi":"10.1117/12.2043537","DOIUrl":"https://doi.org/10.1117/12.2043537","url":null,"abstract":"One photon diffusive photopolymers enable self-developing three dimensional (3D) refractive index patterning of up to cm thick solid volumes for the fabrication of micro-optics. However, one photon absorption in solid, thick materials does not yield complete control of the 3D refractive index distribution due to diffraction and the excessive development time for index features measuring 100’s of microns in diameter or larger. We present a fabrication method and photopolymer formulation that can efficiently create mm3 optical devices with programmable, gradient index of refraction with arbitrary feature size and shape. Index contrast of 0.1 is demonstrated, which is 20 times larger than commercial holographic photopolymers. Devices are fabricated by repetitive micro-fluidic layering of a self-developing photopolymer structured by projection lithography. The process has the unusual property that total fabrication time for a fixed thickness decreases as the number of layers is increased, reducing the fabrication time for high axial resolution micro-optics. We demonstrate the process by fabricating thick waveguide arrays and gradient index lenses.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"438 1-2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116578124","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ke Lin, Yanguang Yu, J. Xi, Yuanlong Fan, Huijun Li
This paper presents a novel approach for determining the Young’s modulus by using a self-mixing laser diode (SMLD). An SMLD system consists of a laser diode (LD), a microlens and an external target. With a small portion of light backscatterd or reflected by the target re-entering the LD inside cavity, both the amplitude and frequency of the LD power are modulated. This modulated LD power is referred as a self-mixing signal (SMS) which is detected by the photodiode (PD) packaged in the rear of the LD. The external target is the tested sample which is in damping vibration excited by a singular elastic strike with an impulse tool. The vibration information from the tested sample is carried in the SMS. Advanced data processing in frequency-domain is applied on the SMS, from which the resonant frequency of the vibration can be retrieved, and hence Young’s modulus is calculated. The proposed method has been verified by simulations.
{"title":"Measuring Young's modulus using a self-mixing laser diode","authors":"Ke Lin, Yanguang Yu, J. Xi, Yuanlong Fan, Huijun Li","doi":"10.1117/12.2039004","DOIUrl":"https://doi.org/10.1117/12.2039004","url":null,"abstract":"This paper presents a novel approach for determining the Young’s modulus by using a self-mixing laser diode (SMLD). An SMLD system consists of a laser diode (LD), a microlens and an external target. With a small portion of light backscatterd or reflected by the target re-entering the LD inside cavity, both the amplitude and frequency of the LD power are modulated. This modulated LD power is referred as a self-mixing signal (SMS) which is detected by the photodiode (PD) packaged in the rear of the LD. The external target is the tested sample which is in damping vibration excited by a singular elastic strike with an impulse tool. The vibration information from the tested sample is carried in the SMS. Advanced data processing in frequency-domain is applied on the SMS, from which the resonant frequency of the vibration can be retrieved, and hence Young’s modulus is calculated. The proposed method has been verified by simulations.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121903148","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
C. Snyder, A. Kadiyala, Maurya Srungarapu, Yuxin Liu, J. Dawson
Photonic crystals are nanofabricated structures that enhance light as it is passed through the constructed design. These structures are normally fabricated out of silicon but have shown to be an improvement if fabricated from a more cost effective material. Photonic crystals have uses within biosensing as they may be used to analyze DNA and other analytes. Microfluidic channels are used to transport different analytes and other samples from one end to another. Microfluidics are used in biosensing as a means of transport and are typically fabricated from biocompatible polymers. Integrated together, the photonic crystals and microfluidic channels would be able to achieve better sensing capabilities and cost effective methods for large scale production. Results will be shown from the co-molding.
{"title":"Co-molding of nanoscale photonic crystals and microfluidic channel","authors":"C. Snyder, A. Kadiyala, Maurya Srungarapu, Yuxin Liu, J. Dawson","doi":"10.1117/12.2040150","DOIUrl":"https://doi.org/10.1117/12.2040150","url":null,"abstract":"Photonic crystals are nanofabricated structures that enhance light as it is passed through the constructed design. These structures are normally fabricated out of silicon but have shown to be an improvement if fabricated from a more cost effective material. Photonic crystals have uses within biosensing as they may be used to analyze DNA and other analytes. Microfluidic channels are used to transport different analytes and other samples from one end to another. Microfluidics are used in biosensing as a means of transport and are typically fabricated from biocompatible polymers. Integrated together, the photonic crystals and microfluidic channels would be able to achieve better sensing capabilities and cost effective methods for large scale production. Results will be shown from the co-molding.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123587030","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Our objective is precise wavefront reconstruction using complex modulation of light. A high precision amplitude beam shaper based on a digital micromirror device is used to image a shaped beam onto a phase-only spatial light modulator. To achieve our goal, a significant first step is deriving an efficient backwards propagation algorithm for hologram design that does not degrade the image by truncating high spatial frequencies or by aliasing. In addition, we show that reconstruction fidelity also depends on spatial bandwidth of the amplitude modulation. Thus, a minimum in error is found by considering both factors. Simulation verifies that the target image can be successfully reconstructed by using the proposed method.
{"title":"Precise holograms using complex light modulation","authors":"Jinyang Liang, M. Becker","doi":"10.1117/12.2040569","DOIUrl":"https://doi.org/10.1117/12.2040569","url":null,"abstract":"Our objective is precise wavefront reconstruction using complex modulation of light. A high precision amplitude beam shaper based on a digital micromirror device is used to image a shaped beam onto a phase-only spatial light modulator. To achieve our goal, a significant first step is deriving an efficient backwards propagation algorithm for hologram design that does not degrade the image by truncating high spatial frequencies or by aliasing. In addition, we show that reconstruction fidelity also depends on spatial bandwidth of the amplitude modulation. Thus, a minimum in error is found by considering both factors. Simulation verifies that the target image can be successfully reconstructed by using the proposed method.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"2014 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123831193","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Otto, R. Saupe, V. Stock, T. Seider, T. Gessner
Mid infrared spectroscopy has been developed to a powerful and essential method of material analysis, with a steadily increasing number of industrial and scientific application fields. The so called spectral fingerprint range enables identification of chemical compounds by their unique spectral pattern. To provide a suitable miniaturized and portable MIR spectrometer solution at an affordable price, an existing MEMS NIR spectrometer module which already bases on micro system technology has been expanded in its wavelength range. The developed spectrometer belongs to the category of scanning grating spectrometers. Main component is a fast oscillating micro-mirror which moves sinusoidal with high mechanical precision enabling a high stability of according wavelength axis. This is supported by a highly precise optical tracking of the actual motion. Mono-crystalline silicon guarantees a long-life operation with no wear even under harsh environmental conditions. Spectral signal acquisition is realized by using a TE-cooled MCT single element detector assisted by low noise trans-impedance amplifier. With the help of integrated logic components a data pre-processing takes place, such as averaging, offset subtraction, detector transfer characteristic correction and noise shaping. Due the compact and flexible setup, the spectrometer is suitable for the use in various applications, such as process control in chemical industry, gas mixture analysis or liquid verification. The portability of the device opens up new application possibilities in mobile environment. The advances of the promising technology and its specific applications will be described in this paper. Advanced performance issues of the device be reviewed in detail.
{"title":"A new generation of MEMS middle-infrared spectrometers","authors":"T. Otto, R. Saupe, V. Stock, T. Seider, T. Gessner","doi":"10.1117/12.2042679","DOIUrl":"https://doi.org/10.1117/12.2042679","url":null,"abstract":"Mid infrared spectroscopy has been developed to a powerful and essential method of material analysis, with a steadily increasing number of industrial and scientific application fields. The so called spectral fingerprint range enables identification of chemical compounds by their unique spectral pattern. To provide a suitable miniaturized and portable MIR spectrometer solution at an affordable price, an existing MEMS NIR spectrometer module which already bases on micro system technology has been expanded in its wavelength range. The developed spectrometer belongs to the category of scanning grating spectrometers. Main component is a fast oscillating micro-mirror which moves sinusoidal with high mechanical precision enabling a high stability of according wavelength axis. This is supported by a highly precise optical tracking of the actual motion. Mono-crystalline silicon guarantees a long-life operation with no wear even under harsh environmental conditions. Spectral signal acquisition is realized by using a TE-cooled MCT single element detector assisted by low noise trans-impedance amplifier. With the help of integrated logic components a data pre-processing takes place, such as averaging, offset subtraction, detector transfer characteristic correction and noise shaping. Due the compact and flexible setup, the spectrometer is suitable for the use in various applications, such as process control in chemical industry, gas mixture analysis or liquid verification. The portability of the device opens up new application possibilities in mobile environment. The advances of the promising technology and its specific applications will be described in this paper. Advanced performance issues of the device be reviewed in detail.","PeriodicalId":395835,"journal":{"name":"Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2014-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125111557","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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