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First light with a carbon fiber reinforced polymer 0.4 meter telescope 第一个用碳纤维增强聚合物制成的0.4米望远镜
C. Wilcox, F. Santiago, M. E. Jungwirth, T. Martinez, S. Restaino, B. Bagwell, R. Romeo
For the passed several years, the Naval Research Laboratory (NRL) has been investigating the use of Carbon Fiber Reinforced Polymer (CFRP) material in the construction of a telescope assembly including the optical components. The NRL, Sandia National Laboratories (SNL), and Composite Mirror Applications, Inc. (CMA) have jointly assembled a prototype telescope and achieved “first light” images with a CFRP 0.4 m aperture telescope. CFRP offers several advantages over traditional materials such as creating structures that are lightweight and low coefficient of thermal expansion and conductivity. The telescope’s primary and secondary mirrors are not made from glass, but CFRP, as well. The entire telescope weighs approximately 10 kg while a typical telescope of this size would weigh quite a bit more. We present the achievement of “first light” with this telescope demonstrating the imaging capabilities of this prototype and the optical surface quality of the mirrors with images taken during a day’s quiescent periods.
在过去的几年里,海军研究实验室(NRL)一直在研究碳纤维增强聚合物(CFRP)材料在望远镜组件(包括光学组件)建造中的使用。NRL、桑迪亚国家实验室(SNL)和复合镜应用公司(CMA)联合组装了一台原型望远镜,并使用CFRP 0.4 m口径望远镜获得了“首光”图像。与传统材料相比,碳纤维增强塑料具有许多优点,例如轻质、热膨胀系数和导电性低的结构。望远镜的主镜和副镜不是由玻璃制成的,而是由碳纤维增强塑料制成的。整个望远镜的重量约为10公斤,而这种尺寸的典型望远镜的重量要大得多。我们展示了这台望远镜“第一束光”的成就,展示了该原型的成像能力,以及在一天静止期间拍摄的反射镜的光学表面质量。
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引用次数: 1
Resolution and speed improvements of mid-infrared Fabry-Perot microspectrometers for the analysis of hydrocarbon gases 中红外法布里-珀罗显微光谱仪分析烃类气体的分辨率和速度的改进
M. Ebermann, N. Neumann, K. Hiller, M. Seifert, M. Meinig, S. Kurth
Micromachined tunable Fabry-Pérot filters (μFPF) are key elements in a new class of miniature spectrometers and analyzers. Different groups all over the world are working on μFPF for spectral ranges from the visible up to the long wave infrared. In order to achieve a large tuning range, the filters are normally operated in the first interference order. At the same time the spectral resolution is limited due to a limited effective finesse. A variety of applications demand for higher resolutions. This is particularly true for the multicomponent analysis of hydrocarbon gases, because the individual absorption bands are very similar and widely overlapping. In this paper μFPF in 3rd and 4th order configuration with a spectral resolution of about (20. . . 30) nm and a tuning range of (3.1. . . 3.7) μm are presented. For the measurement of additional gases in adjacent ranges (e.g. CO2 around 4.3 μm) a dualband configuration with simultaneous use of different orders is proposed. A largely reduced damping of the μFPF and the combination with a lead selenide photoresistor instead of a thermal detector allows for a fast acquisition of spectra.
微机械可调谐法布里-帕姆罗特滤波器(μFPF)是新型微型光谱仪和分析仪的关键元件。世界各地的不同小组都在研究从可见光到长波红外光谱范围的μFPF。为了实现较大的调谐范围,滤波器通常工作在第一干涉阶。同时,由于有效精细度有限,使得光谱分辨率受到限制。各种应用都需要更高的分辨率。对于碳氢化合物气体的多组分分析尤其如此,因为单个吸收带非常相似并且广泛重叠。本文采用三阶和四阶μFPF结构,光谱分辨率约为(20)。30) nm,调谐范围为(3.1…3.7) μm。对于相邻范围内的附加气体(例如4.3 μm左右的CO2)的测量,提出了同时使用不同顺序的双频配置。大大降低了μFPF的阻尼,并与硒化铅光敏电阻而不是热检测器相结合,可以快速获取光谱。
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引用次数: 10
Facile fabrication of nanogap electrodes for suspended graphene characterization using direct ion beam patterning 利用直接离子束图快速制备悬浮石墨烯纳米间隙电极
Z. Qi, A. T. Johnson
Graphene is a two-dimensional sheet of carbon atoms with exceptional electronic and mechanical properties, giving it tremendous potential in nanoelectromechanical system devices. Here, we present a method to easily and reproducibly fabricate suspended graphene nanoribbons across nanogap electrodes of various separation lengths, demonstrating a technique with aggressive gap scalability and device geometry control. Fabrication is based on using a focused gallium ion beam to create a slit between joined electrodes prepatterened on a 100 nm thick silicon nitride membrane. The transparency of the nitride membrane provides reduced ion backscattering and adds milling resolution. Large-area monolayer graphene grown by atmospheric pressure chemical vapor deposition was transferred onto the silicon nitride chip and patterned into a free-standing ribbon geometry via electron beam lithography on organic ebeam resist followed by an O2 plasma etch. We find that commonly used inorganic negative tone resist that requires a buffered oxide etch for resist removal will attack the adhesion layer (Cr2O3) between the electrode and nitride membrane, which is exposed immediately after milling, so an organic resist was selected to avoid this. Using this technique, we fabricate freestanding graphene devices contacted by electrodes of sub-100 nm separation length and preform a comparative study on the effects of current annealing on device resistance. The gap resolution of this technique is limited by the gallium ion beam, which allows for sub-100 nm gaps. Sub-10 nm gaps are feasible with He ion beams, proving direct applications in probing the high field transport properties of graphene nanoribbons at post-CMOS length scales.
石墨烯是一种二维碳原子薄片,具有优异的电子和机械性能,在纳米机电系统器件中具有巨大的潜力。在这里,我们提出了一种方法,可以轻松、可重复地在不同分离长度的纳米间隙电极上制造悬浮石墨烯纳米带,展示了一种具有侵略性间隙可扩展性和器件几何控制的技术。制造的基础是使用聚焦的镓离子束在连接电极之间创建一个狭缝,这些电极预先在100纳米厚的氮化硅膜上形成图案。氮化膜的透明性降低了离子的后向散射,增加了研磨分辨率。通过常压化学气相沉积法生长的大面积单层石墨烯转移到氮化硅芯片上,并通过电子束光刻在有机电子束抗蚀剂上形成独立的带状结构,然后进行O2等离子蚀刻。我们发现,通常使用的无机负色调抗蚀剂需要缓冲氧化物蚀刻来去除抗蚀剂,这将破坏电极和氮化膜之间的粘附层(Cr2O3),该层在铣削后立即暴露,因此选择有机抗蚀剂来避免这种情况。利用该技术,我们制备了以亚100 nm分离长度的电极接触的独立石墨烯器件,并对电流退火对器件电阻的影响进行了比较研究。这种技术的间隙分辨率受限于镓离子束,它允许低于100纳米的间隙。He离子束在10 nm以下的间隙是可行的,证明了在后cmos长度尺度上探测石墨烯纳米带的高场输运特性的直接应用。
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引用次数: 0
Frequency division multiplexed imaging: a Texas Instruments DMD implementation 频分复用成像:德州仪器DMD实现
H. Habibkhani, B. Gunturk, M. Feldman, Aziz Umit Batur
Recently we proposed frequency division multiplexed imaging (FDMI), which allows capturing multiple images in a single shot through spatial modulation and frequency domain filtering. This is achieved by spatially modulating the images so that different images or sub-exposures are placed at different locations in the Fourier domain. As long as there is no overlap of the individual bands, we can recover different components by band-pass filtering the multiplexed image. In this paper, we present a Texas Instruments DMD based implementation of FDMI. An image is formed on the DMD chip; pixels are modulated by the micro-mirrors; and the modulated image is captured by a camera. By applying modulation during a sub-exposure period, the corresponding sub-exposure image is at the end recovered from the fullexposure image. Such a system could be used in a variety of applications, such as motion analysis and image deblurring. We will provide experimental results with the setup, and discuss possible applications as well as limitations.
最近,我们提出了频分复用成像(FDMI),它可以通过空间调制和频域滤波在一次拍摄中捕获多幅图像。这是通过空间调制图像来实现的,这样不同的图像或子曝光被放置在傅里叶域中的不同位置。通过对复用图像进行带通滤波,只要各个波段不重叠,就可以恢复出不同的分量。在本文中,我们提出了一个基于德州仪器DMD的FDMI实现。在DMD芯片上形成图像;像素由微镜调制;调制后的图像被摄像机捕捉到。通过在次曝光期间施加调制,最终从全曝光图像中恢复相应的次曝光图像。这样的系统可用于各种应用,如运动分析和图像去模糊。我们将提供实验结果与设置,并讨论可能的应用以及局限性。
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引用次数: 0
Three-dimensional collimation of in-plane-propagating light using silicon micromachined mirror 利用硅微加工镜面对平面内传播光进行三维准直
Y. Sabry, D. Khalil, B. Saadany, T. Bourouina
We demonstrate light collimation of single-mode optical fibers using deeply-etched three-dimensional curved micromirror on silicon chip. The three-dimensional curvature of the mirror is controlled by a process combining deep reactive ion etching and isotropic etching of silicon. The produced surface is astigmatic with out-of-plane radius of curvature that is about one half the in-plane radius of curvature. Having a 300-μm in-plane radius and incident beam inplane inclined with an angle of 45 degrees with respect to the principal axis, the reflected beam is maintained stigmatic with about 4.25 times reduction in the beam expansion angle in free space and about 12-dB reduction in propagation losses, when received by a limited-aperture detector.
利用硅片上的深蚀刻三维曲面微镜实现了单模光纤的光准直。镜面的三维曲率由深反应离子蚀刻和硅的各向同性蚀刻相结合的工艺控制。所产生的表面是像散,其面外曲率半径约为面内曲率半径的一半。反射光束的面内半径为300 μm,入射光束的面内倾角为45度,在有限孔径探测器接收时,反射光束在自由空间中的扩展角减小了4.25倍,传播损耗减小了约12 db。
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引用次数: 2
Acoustic and optoelectronic nature and interfacial durability of modified CNT and GnP-PVDF composites with nanostructural control 纳米结构控制下改性CNT和GnP-PVDF复合材料的声光电性质和界面耐久性
Joung-Man Park, D. Kwon, Zuo-Jia Wang, L. DeVries
Nano- and hetero-structures of modified carbon nanotube (CNT) and Graphene nano Platelet (GnP) can control significantly piezoresistive and optoelectronic properties in Microelectromechanical Systems (MEMS) as acoustic actuators. Interfacial durability and electrical properties of modified CNT and GnP embedded in poly (vinylidene fluoride) (PVDF) nanocomposites were investigated for use in acoustic actuator applications. Modified GnP coated PVDF nanocomposite exhibited better electrical conductivity than neat and modified CNT due to the unique electrical nature of GnP. Modified GnP coating also exhibited good acoustical properties. Contact angle, surface energy, work of adhesion, and spreading coefficient measurements were contributed to explore the interfacial adhesion durability between neat CNT or plasma treated CNT and plasma treated PVDF. Acoustic actuation performance of modified GnP coated PVDF nanocomposites were investigated for different radii of curvature and different coating conditions, using a sound level meter. Modified GnP can be a more appropriate acoustic actuator than CNT cases because of improved electrical properties. Optimum radius of curvature and coating thickness was also obtained for the most appropriate sound pressure level (SPL) performance. This study can provide manufacturing parameters of transparent sound actuators with good quality practically.
改性碳纳米管(CNT)和石墨烯纳米板(GnP)的纳米和异质结构可以作为声致动器在微机电系统(MEMS)中显著控制压阻和光电子性能。研究了聚偏氟乙烯(PVDF)纳米复合材料中改性碳纳米管和GnP的界面耐久性和电性能。由于其独特的电学性质,改性GnP包覆PVDF纳米复合材料比纯碳纳米管和改性碳纳米管表现出更好的导电性。改性的GnP涂层也表现出良好的声学性能。通过接触角、表面能、粘附功和扩散系数的测量,探讨了纯碳纳米管或等离子体处理的碳纳米管与等离子体处理的PVDF之间的界面粘附耐久性。利用声级计研究了不同曲率半径和不同涂层条件下改性GnP包覆PVDF纳米复合材料的声致动性能。由于改进的电性能,改进的GnP可以成为比碳纳米管更合适的声学致动器。得到了最适宜声压级性能的曲率半径和涂层厚度。该研究可为高质量透明声致动器的制造参数提供实用依据。
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引用次数: 0
Calibrating bimetallic grayscale photomasks to photoresist response for precise micro-optics fabrication 校准双金属灰度光掩膜的光刻胶响应,用于精密微光学制造
G. Chapman, Reza Qarehbaghi, S. Roche
Microfabricating high resolution micro-optics structures requires shape control to <1/8th wavelength (~60nm) in both vertical and horizontal surface precision. Grayscale bimetallic photomasks are bi-layer thermal resists consisting of two thin layers of Bi-on-Indium or Tin-on-Indium. A focused laser spot creates a thermal metal oxide with a controllably transparency set by the beam power of optical density from ~3OD (unexposed) to <0.22OD (fully exposed). A directwrite raster-scan photomask laser system with a CW Argon-ion laser at 514nm for the bimetallic writing and 457nm line for measuring the OD change used a feedback-controlled Gaussian beam to achieve 256-level grayscale masks. Setting the graylevels required to achieve uniform vertical steps in the photoresist requires adjustment in transparency based on the exact response curves of a given resist/development process. An initial model is developed using the classic resist threshold dose exposure D0 and dose to clear Dc creating a power law relation between the required exposure dose for each thickness step and the mask transparency. However real resists behave differently than the simple model near the threshold requiring careful calibrating of mask graylevel transparencies with the photoresist response curve for a given resist/development process. Test structures ranging from steps to ramps and complex patterns were examined via both SEM and profilometry from the resulting bimetallic grayscale masks. Secondary corrections modify the needed bimetallic OD due to the exposure source spectrum differences from the 457nm measurement. This enhances the patterning of micro-optic and 3D MEMS structures.
微加工高分辨率微光学结构要求在垂直和水平表面精度上控制在小于1/8波长(~60nm)。灰度双金属掩膜是由两层薄的bi- on-铟或tin -on-铟组成的双层热阻片。聚焦的激光光斑产生一种热金属氧化物,其透明度可由光密度的光束功率控制,从~3OD(未曝光)到<0.22OD(完全曝光)。直接写入光栅扫描掩模激光系统采用反馈控制的高斯光束,在514nm处进行双金属写入,在457nm处测量外径变化,实现了256级灰度掩模。设置在光刻胶中实现均匀垂直步长所需的灰度级需要根据给定光刻胶/显影过程的精确响应曲线调整透明度。使用经典的抗阻阈值剂量暴露D0和清除Dc的剂量建立了初始模型,在每个厚度步骤所需的暴露剂量与掩膜透明度之间建立了幂律关系。然而,真实的抗蚀剂的行为与阈值附近的简单模型不同,需要仔细校准给定抗蚀剂/显影过程的光抗蚀剂响应曲线的掩膜灰度透明度。测试结构范围从台阶到坡道和复杂的图案,通过扫描电镜和轮廓术从所得的双金属灰度掩模检查。由于曝光源光谱与457nm测量值的差异,二次修正修正了所需的双金属外径。这增强了微光学和3D MEMS结构的图像化。
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引用次数: 3
Planar chalcogenide glass mid-infrared photonics 平面硫系玻璃中红外光子学
Hongtao Lin, Lan Li, Yi Zou, F. Deng, C. Ni, S. Danto, J. D. Musgraves, K. Richardson, Stephen T. Kozacik, Maciej Murakowski, D. Prather, Juejun Hu
Chalcogenide glasses, namely the amorphous compounds containing sulfur, selenium, and/or tellurium, have emerged as a promising material candidate for mid-infrared integrated photonics given their wide optical transparency window, high linear and nonlinear indices, as well as their capacity for monolithic integration on a wide array of substrates. Exploiting these unique features of the material, we demonstrated high-index-contrast, waveguide-coupled As2Se3 chalcogenide glass resonators monolithically integrated on silicon with a high intrinsic quality factor of 2 × 105 at 5.2 micron wavelength, and what we believe to be the first waveguide photonic crystal cavity operating in the mid-infrared.
硫系玻璃,即含有硫、硒和/或碲的无定形化合物,由于其宽的光学透明窗口、高线性和非线性指数以及在各种衬底上的单片集成能力,已成为中红外集成光子学的有前途的候选材料。利用材料的这些独特特性,我们展示了高折射率对比度,波导耦合As2Se3硫系玻璃谐振器单片集成在硅上,在5.2微米波长具有2 × 105的高内在质量因子,我们相信这是第一个在中红外波段工作的波导光子晶体腔。
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引用次数: 0
The use of hyperspectral imaging (HSI) in wound healing 高光谱成像(HSI)在伤口愈合中的应用
J. La Fontaine, L. Lavery, K. Zuzak
A hyperspectral imaging system (HsI), described previously, was utilized to evaluate and monitor wounds and their healing surgery and post-operatively. Briefly, the system consists of a DLP® based spectral light modulator providing active spectral illumination that is synchronized with a digital focal plan array for collecting spectroscopic images that are processed for mapping the percentage of oxyhemoglobin at each detector pixel non-invasively and at near video rates ~8 chemically encode images per second.
先前描述的高光谱成像系统(HsI)用于评估和监测伤口及其手术和术后愈合。简而言之,该系统由一个基于DLP®的光谱光调制器组成,该调制器提供主动光谱照明,与一个数字焦平面阵列同步,用于收集光谱图像,这些图像经过处理,用于绘制每个检测器像素处的血红蛋白百分比,无创且接近视频速率~每秒8个化学编码图像。
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引用次数: 6
High resolution and energetically efficient lensless imaging system based upon time varied pinholes array 基于时变针孔阵列的高分辨率高能量无透镜成像系统
A. Schwarz, A. Shemer, Z. Zalevsky
In this paper, we describe a novel super resolution method with variable pinholes arrays. The imaging system is based on super resolved time multiplexing method using variable and moving pinholes arrays. The improved resolution and signal to noise ratio are achieved with improved light intensity in the same exposure time, compared to imaging done with a single pinhole system. This new configuration preserves the advantages of pinhole optics while solving the resolution limitation problem and the low energetic efficiency of such system. The changeable and moving pinholes array can be realized using a DLP matrix. The system can also be used as an addition to several of existing optical systems which use visible, invisible light or even x-ray radiation.
本文提出了一种新的可变针孔阵列超分辨方法。该成像系统采用可变针孔和移动针孔阵列的超分辨时间复用方法。与单针孔成像系统相比,在相同的曝光时间内,提高了光强,实现了更高的分辨率和信噪比。这种新结构保留了针孔光学的优点,同时解决了该系统的分辨率限制和低能量效率问题。可变移动的针孔阵列可以用DLP矩阵来实现。该系统还可以作为几个现有光学系统的补充,这些光学系统使用可见光、不可见光甚至x射线辐射。
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引用次数: 1
期刊
Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components
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