Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346584
Jianye Sui, Pengfei Xie, Zhongtian Lin, M. Javanmard
Electronically barcoded micro-particles have been demonstrated for use in various multiplexed molecular biomarker assays. Traditional optical and plasmonic methods for barcoding are capable of high throughput and high sensitivity, but require bulky instrumentation for readout, which cannot be easily made into a portable device. Previously, we reported a novel impedance based barcoding technique by fabricating tunable nano-capacitors on micro-particle surfaces thus modulating the overall particle impedance. In this work, we expand the library of barcoded particles using atomic layer deposited oxides of varying thickness and dielectric permittivity and study the effect of thickness and dielectric permittivity using multi-frequency impedance flow cytometry and utilize machine learning to classify different particle barcodes.
{"title":"Multiplexed molecular biomarker analysis using an expanded library of nanoelectronically barcoded particles enabled through machine learning analysis","authors":"Jianye Sui, Pengfei Xie, Zhongtian Lin, M. Javanmard","doi":"10.1109/MEMSYS.2018.8346584","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346584","url":null,"abstract":"Electronically barcoded micro-particles have been demonstrated for use in various multiplexed molecular biomarker assays. Traditional optical and plasmonic methods for barcoding are capable of high throughput and high sensitivity, but require bulky instrumentation for readout, which cannot be easily made into a portable device. Previously, we reported a novel impedance based barcoding technique by fabricating tunable nano-capacitors on micro-particle surfaces thus modulating the overall particle impedance. In this work, we expand the library of barcoded particles using atomic layer deposited oxides of varying thickness and dielectric permittivity and study the effect of thickness and dielectric permittivity using multi-frequency impedance flow cytometry and utilize machine learning to classify different particle barcodes.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125388462","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346672
T. Manzaneque, Ruochen Lu, Yansong Yang, S. Gong
We present a new type of acoustic devices that, for the first time, can simultaneously perform chirp compression and impedance transformation to achieve passive voltage amplification with a gain of 12. The device consists of an acoustic dispersive delay line (DDL) based on shear-horizontal waves (SH0) in lithium niobate (LiNbO3). SH0 waves are employed due to their demonstrated high electromechanical coupling (k2) of 39%, low propagation loss, and a slow phase velocity of 3700 m/s. As a result of these desirable features, the fabricated device demonstrates a large fractional bandwidth (FBW) of 50%, a low insertion loss (IL), a high processing gain (TB) of 76, and a compact size of 1.57 by 0.23 mm. In addition to the compression, the device harnesses an asymmetrical transduction scheme to provide a compounding voltage gain from impedance transformation. Consequently, it results in a much higher voltage at the device output, which can be exploited to attain a higher sensitivity for wake-up radio receivers.
{"title":"An SH0 lithium niobate trans-impedance chirp compressor with high voltage gain","authors":"T. Manzaneque, Ruochen Lu, Yansong Yang, S. Gong","doi":"10.1109/MEMSYS.2018.8346672","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346672","url":null,"abstract":"We present a new type of acoustic devices that, for the first time, can simultaneously perform chirp compression and impedance transformation to achieve passive voltage amplification with a gain of 12. The device consists of an acoustic dispersive delay line (DDL) based on shear-horizontal waves (SH0) in lithium niobate (LiNbO3). SH0 waves are employed due to their demonstrated high electromechanical coupling (k2) of 39%, low propagation loss, and a slow phase velocity of 3700 m/s. As a result of these desirable features, the fabricated device demonstrates a large fractional bandwidth (FBW) of 50%, a low insertion loss (IL), a high processing gain (TB) of 76, and a compact size of 1.57 by 0.23 mm. In addition to the compression, the device harnesses an asymmetrical transduction scheme to provide a compounding voltage gain from impedance transformation. Consequently, it results in a much higher voltage at the device output, which can be exploited to attain a higher sensitivity for wake-up radio receivers.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128553476","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346542
S. Yoshida, S. Takeuchi
This manuscript describes selective pairing and fusion of biological vesicles using dielectrophoretic (DEP) tweezer. Fusion of biological vesicles have been widely studied for artificial cell system, however, low selectivity of fused vesicle has been problematic. We propose selective pairing and fusion of vesicles such as cell-sized liposomes and giant bacteria using microfabricated DEP tweezer. As DEP force can manipulate cell-sized (approximately 10 μm) objects, for the first time we achieved selective pairing and fusion of the vesicles and in conjunction with electrofusion device. We believe our method will be useful in vesicle fusion studies including material transport and generation of artificial cells.
{"title":"Selective pairing and fusion of vesicles using dielectrophoretic tweezers","authors":"S. Yoshida, S. Takeuchi","doi":"10.1109/MEMSYS.2018.8346542","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346542","url":null,"abstract":"This manuscript describes selective pairing and fusion of biological vesicles using dielectrophoretic (DEP) tweezer. Fusion of biological vesicles have been widely studied for artificial cell system, however, low selectivity of fused vesicle has been problematic. We propose selective pairing and fusion of vesicles such as cell-sized liposomes and giant bacteria using microfabricated DEP tweezer. As DEP force can manipulate cell-sized (approximately 10 μm) objects, for the first time we achieved selective pairing and fusion of the vesicles and in conjunction with electrofusion device. We believe our method will be useful in vesicle fusion studies including material transport and generation of artificial cells.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"56 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130998043","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346522
Hidetoshi Takahashi, I. Shimoyama
This paper reports a Pitot tube type airflow sensor, which achieves both high sensitivity and water resistance. The proposed Pitot tube is composed of piezoresistive cantilevers as differential pressure sensing elements and nano-hole arrays as waterproof elements. The nano-hole arrays are attached to the air inlets, which are located the tip of the tube and sides of the sphere. When airflow is applied to the Pitot tube, air passes through the nano-hole arrays, and differential pressure between two inlets acts on the piezoresistive cantilevers. On the other hand, when locating in water, the nano-hole arrays protect the water penetration into the tube. The Pitot tube will be used for the airspeed measurement of flying marine birds.
{"title":"Waterproof pitot tube with high sensitive differential pressure sensor and nano-hole array","authors":"Hidetoshi Takahashi, I. Shimoyama","doi":"10.1109/MEMSYS.2018.8346522","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346522","url":null,"abstract":"This paper reports a Pitot tube type airflow sensor, which achieves both high sensitivity and water resistance. The proposed Pitot tube is composed of piezoresistive cantilevers as differential pressure sensing elements and nano-hole arrays as waterproof elements. The nano-hole arrays are attached to the air inlets, which are located the tip of the tube and sides of the sphere. When airflow is applied to the Pitot tube, air passes through the nano-hole arrays, and differential pressure between two inlets acts on the piezoresistive cantilevers. On the other hand, when locating in water, the nano-hole arrays protect the water penetration into the tube. The Pitot tube will be used for the airspeed measurement of flying marine birds.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132443224","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346550
W. F. Quirós-Solano, N. Gaio, C. Silvestri, Yusuf B Arık, Oscar Stassen, A. D. V. D. Meer, C. Bouten, A. V. D. Berg, Ronald Dekker, P. M. Sarro
We present a novel method to easily and reliably transfer highly porous, large area, thin microfabricated Polydimethylsiloxane (PDMS) porous membranes on Lab-on-Chip (LOC) and Organ-on-Chip (OOC) devices. The use of silicon as carrier substrate and a water-soluble sacrificial layer allows a simple and reproducible transfer of the membranes to any PDMS-based OOC and LOC device. The use of IC and MEMS compatible techniques reduces significantly the fabrication time and the need of manual handling. Our method is suitable for automatic assembling systems, such as pick-and-place, crucial to significantly increase the throughput of OOC and LOC devices assembling. Membranes with 8 μm pore size and as thin as 4 μm are successfully transferred. The viability and biocompatibility of the transfer was assessed by culturing two different cell lines on an OOC with transferred porous PDMS membranes.
{"title":"A novel method to transfer porous PDMS membranes for high throughput Organ-on-Chip and Lab-on-Chip assembly","authors":"W. F. Quirós-Solano, N. Gaio, C. Silvestri, Yusuf B Arık, Oscar Stassen, A. D. V. D. Meer, C. Bouten, A. V. D. Berg, Ronald Dekker, P. M. Sarro","doi":"10.1109/MEMSYS.2018.8346550","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346550","url":null,"abstract":"We present a novel method to easily and reliably transfer highly porous, large area, thin microfabricated Polydimethylsiloxane (PDMS) porous membranes on Lab-on-Chip (LOC) and Organ-on-Chip (OOC) devices. The use of silicon as carrier substrate and a water-soluble sacrificial layer allows a simple and reproducible transfer of the membranes to any PDMS-based OOC and LOC device. The use of IC and MEMS compatible techniques reduces significantly the fabrication time and the need of manual handling. Our method is suitable for automatic assembling systems, such as pick-and-place, crucial to significantly increase the throughput of OOC and LOC devices assembling. Membranes with 8 μm pore size and as thin as 4 μm are successfully transferred. The viability and biocompatibility of the transfer was assessed by culturing two different cell lines on an OOC with transferred porous PDMS membranes.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125089048","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346575
T. Ota, Masamitsu Nakayama, Y. Kanno, Tetsuya Suzuki, N. Miki
In this report, we experimentally investigated the blood hemofiltration capacity of a nanoporous dialysis membrane (poly(ether sulfone), PES) whose surface was modified with fluorine-doped diamond-like carbon(f-DLC). Surface modification of the nanoporous membrane without clogging the nanopores is challenging. In vitro experiments revealed that the modified membrane successfully exhibited water permeability of one-tenth of the untreated. In vivo experiments with ultra-small hemofiltration devices composed of f-DLC PES membranes using SD rats were also conducted for the first time. The results proved that the f-DLC coated PES membrane can be used for hemofiltration, which will extend the lifetime of microfluidics-based implantable artificial kidney.
{"title":"In vitro and in vivo tests of nanoporous membrane coated with biocompatible fluorine-doped diamond-like carbon for hemofiltration treatment","authors":"T. Ota, Masamitsu Nakayama, Y. Kanno, Tetsuya Suzuki, N. Miki","doi":"10.1109/MEMSYS.2018.8346575","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346575","url":null,"abstract":"In this report, we experimentally investigated the blood hemofiltration capacity of a nanoporous dialysis membrane (poly(ether sulfone), PES) whose surface was modified with fluorine-doped diamond-like carbon(f-DLC). Surface modification of the nanoporous membrane without clogging the nanopores is challenging. In vitro experiments revealed that the modified membrane successfully exhibited water permeability of one-tenth of the untreated. In vivo experiments with ultra-small hemofiltration devices composed of f-DLC PES membranes using SD rats were also conducted for the first time. The results proved that the f-DLC coated PES membrane can be used for hemofiltration, which will extend the lifetime of microfluidics-based implantable artificial kidney.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114433107","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346682
Wei Xu, Beiqi Lijin, Mingzheng Duan, Xiaoyi Wang, Jeffry Wicaksana, A. Min, Moaaz Ahmed, Ruijin Wang, N. Fang, A. Bermak, Yi-Kuen Lee
In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.
{"title":"A wireless dual-mode micro thermal flow sensor system with extended flow range by using CMOS-MEMS process","authors":"Wei Xu, Beiqi Lijin, Mingzheng Duan, Xiaoyi Wang, Jeffry Wicaksana, A. Min, Moaaz Ahmed, Ruijin Wang, N. Fang, A. Bermak, Yi-Kuen Lee","doi":"10.1109/MEMSYS.2018.8346682","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346682","url":null,"abstract":"In this paper, we report a wireless dual-mode micro thermal flow (DMTF) sensor system with the extended flow range by using InvenSense 0.18μm CMOS MEMS technology. For the N2 gas flow, the DMTF sensor gains a flow range of 0∼73m/s, which is 2.4 times larger than that of calorimetric flow sensor (0∼31m/s) setup. Besides, the calibrated DMTF sensor system shows an accuracy of less than 2% with the wireless monitoring capability. Therefore, this low-cost wireless DMTF sensor system will be a promising IoT (Internet of Things) device for the smart energy-efficient buildings application.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122154897","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346491
Y. Iwata, S. Miyashita, E. Iwase
We propose a design method of a micro self-rolling up structure using a temperature-responsive hydrogel sheet with rigid plate array. Our self-rolling up is a method for developing a micro three-dimensional (3D) structure performed by rolling up a two-dimensional (2D) flat sheet, like making a croissant, through a continuous self-folding. The local curvature of the self-rolled up structure could be controlled by the length of rigid plates. By controlling the local curvature, we designed and developed self-rolled up structures with or without gaps between the self-rolled up layers, such as cylindrical and croissant-like ellipsoidal structures. In addition, all the structures demonstrated repetitive deformation of forward and backward rolling up by changing a temperature of water.
{"title":"Self-rolling up micro assembly using temperature — Responsive hydrogel sheet with rigid plate array","authors":"Y. Iwata, S. Miyashita, E. Iwase","doi":"10.1109/MEMSYS.2018.8346491","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346491","url":null,"abstract":"We propose a design method of a micro self-rolling up structure using a temperature-responsive hydrogel sheet with rigid plate array. Our self-rolling up is a method for developing a micro three-dimensional (3D) structure performed by rolling up a two-dimensional (2D) flat sheet, like making a croissant, through a continuous self-folding. The local curvature of the self-rolled up structure could be controlled by the length of rigid plates. By controlling the local curvature, we designed and developed self-rolled up structures with or without gaps between the self-rolled up layers, such as cylindrical and croissant-like ellipsoidal structures. In addition, all the structures demonstrated repetitive deformation of forward and backward rolling up by changing a temperature of water.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129304618","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346686
D. Alveringh, R. Wiegerink, J. C. Lotters
Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R2 = 99.83 %) with the model.
{"title":"Inline relative permittivity sensing using silicon electrodes realized in surface channel technology","authors":"D. Alveringh, R. Wiegerink, J. C. Lotters","doi":"10.1109/MEMSYS.2018.8346686","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346686","url":null,"abstract":"Sensing relative permittivity is useful for fluid characterization, since its value differs significantly for different substances. A microfabricated inline relative permittivity sensor is realized using surface channel technology with support for isolated silicon electrodes. This enables non-invasive composition measurements of chemicals, i.e. the chemicals are not in contact with an electrode, do not need to be heated or need to be mixed with a chemical marker. Since this sensor operates inline, real-time measurements of the fluid can be obtained. Besides, integration with other fluid sensors, e.g. flow or pressure sensors, on a single chip could be achieved due to the sensor's full compatibility with surface channel technology. This is the first device that successfully uses the isolated silicon electrode functionality of this fabrication technology. Preliminary measurement results show a high coefficient of determination (R2 = 99.83 %) with the model.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131486282","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346597
Yongkeun Oh, D. Kwon, Wondo Kim, Jongbaeg Kim
In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.
{"title":"Location-specific fabrication of suspended metal nanowire based on electrospun nanofibers on MEMS platform","authors":"Yongkeun Oh, D. Kwon, Wondo Kim, Jongbaeg Kim","doi":"10.1109/MEMSYS.2018.8346597","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346597","url":null,"abstract":"In this paper, we propose a location-specific batch fabrication process to form suspended metal nanowire between two microelectrodes. This simple and low temperature fabrication method consists of 3 steps; electrospinning polymer nanofibers on MEMS platform with micro gap, metal evaporation, and dissolving polymer nanofibers in liquid and drying. Here we demonstrate the proposed process with Pd to form suspended Pd nanowire, for the possible future application as hydrogen sensor. The surface tension force during the drying enables the formation of single wire from multiple wires. The proposed method allows diverse choice of nanowire material and thus can find various applications of two-terminal nanowire devices.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129594744","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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