Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346536
H. Yasuga, Weijin Guo, J. Hansson, T. Haraldsson, N. Miki, Wouter van der Wijngaart
Here, we demonstrate, for the first time: the self-digitization, i.e. spontaneous formation, of microdroplets during the imbibition of paper; the on-demand merging of individual microdroplets in paper; and the on-demand ejection of individual microdroplets from the paper. Two technical novelties underlie these novel functions: the formation of free-standing synthetic microfluidic paper, i.e. a porous matrix of slanted and interconnected micropillars without bottom layer; and the hydrophobic surface modification of the paper. The ease of manipulation and the direct access to the microdroplets from the environment makes this an extremely versatile tool, with potential applications in liquid sample digitisation and microparticle generation.
{"title":"Droplet microfluidics inside paper","authors":"H. Yasuga, Weijin Guo, J. Hansson, T. Haraldsson, N. Miki, Wouter van der Wijngaart","doi":"10.1109/MEMSYS.2018.8346536","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346536","url":null,"abstract":"Here, we demonstrate, for the first time: the self-digitization, i.e. spontaneous formation, of microdroplets during the imbibition of paper; the on-demand merging of individual microdroplets in paper; and the on-demand ejection of individual microdroplets from the paper. Two technical novelties underlie these novel functions: the formation of free-standing synthetic microfluidic paper, i.e. a porous matrix of slanted and interconnected micropillars without bottom layer; and the hydrophobic surface modification of the paper. The ease of manipulation and the direct access to the microdroplets from the environment makes this an extremely versatile tool, with potential applications in liquid sample digitisation and microparticle generation.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130095568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346710
D. Baek, S. Pyo, Jongbaeg Kim
This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.
{"title":"Fabrication of C-doped WO3 nanoamterial-based gas sensors for highly sensitive NO2 detection at room temperature","authors":"D. Baek, S. Pyo, Jongbaeg Kim","doi":"10.1109/MEMSYS.2018.8346710","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346710","url":null,"abstract":"This paper firstly reports a method to fabricate C-doped tungsten oxide (WO3) nanomaterials using carbon nanotubes (CNTs) template and demonstrates its application to highly sensitive NO2 gas sensing at room temperature. The W-coating on the CNTs template is performed by a simple solution process, and the C-doped WO3 nanomaterials are synthesized through an annealing process while the CNTs are removed simultaneously. The synthesized C-doped WO3 has a shape like the CNTs, which indicates that the material has a large surface area favorable for sensitive gas detection. The fabricated sensor detected 6 ppm of NO2 at room temperature and returned perfectly to its original state. These sensing performance is comparable to the existing WO3-based NO2 sensors.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"100 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134107415","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346514
Jiahui Wang, X. Thow, Hao Wang, Sanghoon Lee, K. Voges, N. Thakor, S. Yen, Chengkuo Lee
Wearable artificial sensors are proposed as a way to capture information for restoration of sensory feedback to persons with tetraplegia. However, the ability of these artificial sensors is limited. One relatively unexplored approach is to make use of the signals from surviving tactile and proprioceptive receptors by recording from the transmitting axons. In this paper, we describe a spiked ultraflexible neural (SUN) interface, which can be implanted into the peripheral nervous system (PNS) to capture sensory information. The 3D design, which integrates spiked structures for intrafascicular nerve recording with flexible substrate, enables a conformal interface to the target nerve.
{"title":"Decoding peripheral nerve sensory information with a spiked flexible neural interface","authors":"Jiahui Wang, X. Thow, Hao Wang, Sanghoon Lee, K. Voges, N. Thakor, S. Yen, Chengkuo Lee","doi":"10.1109/MEMSYS.2018.8346514","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346514","url":null,"abstract":"Wearable artificial sensors are proposed as a way to capture information for restoration of sensory feedback to persons with tetraplegia. However, the ability of these artificial sensors is limited. One relatively unexplored approach is to make use of the signals from surviving tactile and proprioceptive receptors by recording from the transmitting axons. In this paper, we describe a spiked ultraflexible neural (SUN) interface, which can be implanted into the peripheral nervous system (PNS) to capture sensory information. The 3D design, which integrates spiked structures for intrafascicular nerve recording with flexible substrate, enables a conformal interface to the target nerve.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134415837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346570
Naixin Song, Pengfei Xie, W. Shen, M. Javanmard, M. Allen
Measurement of various specific proteins in body fluids can be a key component of continuous health monitoring. The gold-standard technique for protein quantification is ELISA, which typically relies on labeling and optical fluorescence. Impedance sensors provide a promising alternative due to ease of miniaturization, rapid readout and label-free operation; yet lag their fluorescent counterparts in terms of sensitivity. We present a flexible micromachined needle-shaped impedance sensor for label-free in-situ detection of cytokines and other biomarkers. The sensor utilizes a micro-well array configuration at the needle tip to enable label-free detection while simultaneously maintaining the capability of high sensitivity detection, despite the high salt concentration of complex biological fluids. Real-time label-free detection is achieved in an in vitro skin phantom by monitoring the impedance change of the sensor electrodes as specific binding of target proteins to antibodies on the sensor surface occurs.
{"title":"Microwell-array on a flexible needle: A transcutaneous insertable impedance sensor for label-free cytokine detection","authors":"Naixin Song, Pengfei Xie, W. Shen, M. Javanmard, M. Allen","doi":"10.1109/MEMSYS.2018.8346570","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346570","url":null,"abstract":"Measurement of various specific proteins in body fluids can be a key component of continuous health monitoring. The gold-standard technique for protein quantification is ELISA, which typically relies on labeling and optical fluorescence. Impedance sensors provide a promising alternative due to ease of miniaturization, rapid readout and label-free operation; yet lag their fluorescent counterparts in terms of sensitivity. We present a flexible micromachined needle-shaped impedance sensor for label-free in-situ detection of cytokines and other biomarkers. The sensor utilizes a micro-well array configuration at the needle tip to enable label-free detection while simultaneously maintaining the capability of high sensitivity detection, despite the high salt concentration of complex biological fluids. Real-time label-free detection is achieved in an in vitro skin phantom by monitoring the impedance change of the sensor electrodes as specific binding of target proteins to antibodies on the sensor surface occurs.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"252 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133511464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346691
Juhee Ko, Amun Jarzembski, Keunhan Park, Jungchul Lee
This paper reports the first demonstration of hydrogel atomic force microscope (AFM) tip attachment to quartz tuning forks (QTFs) by using elastomeric tip molds replicated from an electrochemically etched tungsten wire. The tungsten tip of ∼20 nm radius obtained by time-controlled electrochemical etching is replicated with h-polydimethylsiloxane (h-PDMS) to make negative conical tip molds large enough to be used for QTFs. Using the h-PDMS tip molds, a polyethyleneglycol-diacrylate (PEG-DA) tip is attached to various facets of QTFs without using an adhesive. In addition, we have shown that hydrogel tip can be regenerated multiple times to address issues associated with tip wear.
{"title":"Hydrogel tip attached quartz tuning fork using elastomeric tip mold replicated from electrochemically etched tungsten wire","authors":"Juhee Ko, Amun Jarzembski, Keunhan Park, Jungchul Lee","doi":"10.1109/MEMSYS.2018.8346691","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346691","url":null,"abstract":"This paper reports the first demonstration of hydrogel atomic force microscope (AFM) tip attachment to quartz tuning forks (QTFs) by using elastomeric tip molds replicated from an electrochemically etched tungsten wire. The tungsten tip of ∼20 nm radius obtained by time-controlled electrochemical etching is replicated with h-polydimethylsiloxane (h-PDMS) to make negative conical tip molds large enough to be used for QTFs. Using the h-PDMS tip molds, a polyethyleneglycol-diacrylate (PEG-DA) tip is attached to various facets of QTFs without using an adhesive. In addition, we have shown that hydrogel tip can be regenerated multiple times to address issues associated with tip wear.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127153418","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346678
M.-T. Hsu, Te-Yen Chiu, Sirao Wu, Y. Cheng, C.-H. Li, C. Kuo
This paper presents the first silicon-based parabolic Sub-THz reflector antenna with corresponding fabrication processes. The antenna is side fed with an on-chip 340 GHz patch antenna on a reflector made of stacked micromachined silicon substrates with a parabolic-shaped Kapton film coated with aluminum on top. The antenna with a size of 18 ×18 ×4 mm3 and an aperture of ∼10mm can be easily integrated with monolithic microwave integrated circuit sources, i.e. 40 nm CMOS triple-push oscillator in this case, and exhibit not only ∼12.4 dB directive gain enhancement and 4.34° HPBW (Half Power Beam Width) for far field radiation but also an excellent near field focus characteristic with a 28.5 mm depth of field (DOF).
{"title":"A silicon-based parabolic sub-THz reflector antenna for gain enhancement and near-field focus applications","authors":"M.-T. Hsu, Te-Yen Chiu, Sirao Wu, Y. Cheng, C.-H. Li, C. Kuo","doi":"10.1109/MEMSYS.2018.8346678","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346678","url":null,"abstract":"This paper presents the first silicon-based parabolic Sub-THz reflector antenna with corresponding fabrication processes. The antenna is side fed with an on-chip 340 GHz patch antenna on a reflector made of stacked micromachined silicon substrates with a parabolic-shaped Kapton film coated with aluminum on top. The antenna with a size of 18 ×18 ×4 mm3 and an aperture of ∼10mm can be easily integrated with monolithic microwave integrated circuit sources, i.e. 40 nm CMOS triple-push oscillator in this case, and exhibit not only ∼12.4 dB directive gain enhancement and 4.34° HPBW (Half Power Beam Width) for far field radiation but also an excellent near field focus characteristic with a 28.5 mm depth of field (DOF).","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130617210","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-04-24DOI: 10.1109/MEMSYS.2018.8346795
Kazuma Fujimoto, K. Higashi, H. Onoe, N. Miki
This paper describes a microfluidic device to continuously produce a hydrogel microtube using triple-coaxial flow. In our prior work, double-coaxial flow was used to produce hydrogel microtubes, though continuous and mass production was a challenge. In this work, we also demonstrate bioremediation using the microtubes that encapsulate microbial suspension. The microenvironment created by the microtubes enabled efficient purification of aqueous sample solution and in addition, the microbes are maintained inside the microtube and are easily collected without contaminating the solution. The proposed technology can be applied to any types of microbes and can be of great benefit for various microbial processes.
{"title":"Triple-coaxial flow for continuous production of microtubes containing microbes for bioremediation","authors":"Kazuma Fujimoto, K. Higashi, H. Onoe, N. Miki","doi":"10.1109/MEMSYS.2018.8346795","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346795","url":null,"abstract":"This paper describes a microfluidic device to continuously produce a hydrogel microtube using triple-coaxial flow. In our prior work, double-coaxial flow was used to produce hydrogel microtubes, though continuous and mass production was a challenge. In this work, we also demonstrate bioremediation using the microtubes that encapsulate microbial suspension. The microenvironment created by the microtubes enabled efficient purification of aqueous sample solution and in addition, the microbes are maintained inside the microtube and are easily collected without contaminating the solution. The proposed technology can be applied to any types of microbes and can be of great benefit for various microbial processes.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114974843","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-02-07DOI: 10.1109/MEMSYS.2018.8346681
K. Vinayakumar, A. Persaud, Q. Ji, P. Seidl, T. Schenkel, A. Lal
We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer-based accelerator architecture that lends itself to orders-of-magnitude reduction in cost, volume and weight of charged particle accelerators. ESQs are a key building block in developing compact Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) [1]. In a MEQALAC electrostatic forces are used to focus ions, and electrostatic field scaling permits high beam current densities by decreasing the beam aperture size for a given peak electric field set by breakdown limitations. Using multiple parallel beams, each totaling to an area A, can result in higher total beam current compared to a single aperture beam of the same area. Smaller dimensions also allow for higher focusing electric field gradients and therefore higher average beam current density. Here we demonstrate that Deep Reactive Ion Etching (DRIE) micromachined pillar electrodes, electrically isolated by silicon-nitride thin films enable higher performance ESQA with waferscale scalability. The fabricated ESQA are able to hold up toi kV in air. A 3×3 array of 12 keV argon ion beams are focused in a wafer accelerator unit cell to pave the way for multiple wafer accelerator.
{"title":"Waferscale electrostatic quadrupole array for multiple ION beam manipulation","authors":"K. Vinayakumar, A. Persaud, Q. Ji, P. Seidl, T. Schenkel, A. Lal","doi":"10.1109/MEMSYS.2018.8346681","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346681","url":null,"abstract":"We report on the first through-wafer silicon-based Electrostatic Quadrupole Array (ESQA) to focus high energy ion beams. This device is a key enabler for a wafer-based accelerator architecture that lends itself to orders-of-magnitude reduction in cost, volume and weight of charged particle accelerators. ESQs are a key building block in developing compact Multiple Electrostatic Quadrupole Array Linear Accelerator (MEQALAC) [1]. In a MEQALAC electrostatic forces are used to focus ions, and electrostatic field scaling permits high beam current densities by decreasing the beam aperture size for a given peak electric field set by breakdown limitations. Using multiple parallel beams, each totaling to an area A, can result in higher total beam current compared to a single aperture beam of the same area. Smaller dimensions also allow for higher focusing electric field gradients and therefore higher average beam current density. Here we demonstrate that Deep Reactive Ion Etching (DRIE) micromachined pillar electrodes, electrically isolated by silicon-nitride thin films enable higher performance ESQA with waferscale scalability. The fabricated ESQA are able to hold up toi kV in air. A 3×3 array of 12 keV argon ion beams are focused in a wafer accelerator unit cell to pave the way for multiple wafer accelerator.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127229643","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-01-25DOI: 10.1109/MEMSYS.2018.8346523
T. Schut, D. Alveringh, W. Sparreboom, J. Groenesteijn, R. Wiegerink, J. C. Lotters
This paper reports on a fluid viscosity sensor consisting of pressure sensors fully integrated with a Coriolis mass flow sensor. The sensor is capable of measuring viscosities of both liquids and gases through a mathematical model. For liquids, this model is simply the Hagen-Poiseuille equation. For gases, a more elaborate model is derived, taking into account compressibility and additional pressure losses due to channel geometry. Viscosities of (mixtures of) water and isopropanol were measured and correspond well with values found in literature. Viscosities of nitrogen and argon were measured with accuracies of −0–12%, depending on input pressure and mass flow rate. Improvement of the mathematical model could lead to higher accuracy and less dependence on mass flow or pressure.
{"title":"Fully integrated mass flow, pressure, density and viscosity sensor for both liquids and gases","authors":"T. Schut, D. Alveringh, W. Sparreboom, J. Groenesteijn, R. Wiegerink, J. C. Lotters","doi":"10.1109/MEMSYS.2018.8346523","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346523","url":null,"abstract":"This paper reports on a fluid viscosity sensor consisting of pressure sensors fully integrated with a Coriolis mass flow sensor. The sensor is capable of measuring viscosities of both liquids and gases through a mathematical model. For liquids, this model is simply the Hagen-Poiseuille equation. For gases, a more elaborate model is derived, taking into account compressibility and additional pressure losses due to channel geometry. Viscosities of (mixtures of) water and isopropanol were measured and correspond well with values found in literature. Viscosities of nitrogen and argon were measured with accuracies of −0–12%, depending on input pressure and mass flow rate. Improvement of the mathematical model could lead to higher accuracy and less dependence on mass flow or pressure.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129329816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-01-25DOI: 10.1109/MEMSYS.2018.8346719
Milind S. Pandit, Chun Zhao, G. Sobreviela, Arif Mustafazade, X. Zou, A. Seshia
This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.
{"title":"A mode-localized MEMS accelerometer with 7μg bias stability","authors":"Milind S. Pandit, Chun Zhao, G. Sobreviela, Arif Mustafazade, X. Zou, A. Seshia","doi":"10.1109/MEMSYS.2018.8346719","DOIUrl":"https://doi.org/10.1109/MEMSYS.2018.8346719","url":null,"abstract":"This paper reports on the experimental characterization of the resolution, sensitivity and common mode rejection metrics for a mode-localized MEMS accelerometer. A bias stability of 7μg is achieved for closed-loop amplitude ratio measurements at an integration time of 30s representing a significant advancement in the development of high-stability accelerometers employing this transduction principle.","PeriodicalId":400754,"journal":{"name":"2018 IEEE Micro Electro Mechanical Systems (MEMS)","volume":"367 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122846733","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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