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Preparation of yttrium aluminum garnet doped with cerium for application in optoelectronics 掺铈钇铝石榴石的制备及其光电子学应用
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558733
V. Schiopu, M. Macrin, I. Cernica
A sol-gel method has been developed to prepare pure yttrium aluminium garnet, Y/sub 3/Al/sub 5/O/sub 12/ (YAG), doped with cerium. The XRD pattern of the powder calcinated at 1100/spl deg/C shows the formation of single phase nanocrystal garnet materials with good performances provide by emission spectra of white light LEDs using these phosphors.
采用溶胶-凝胶法制备了掺铈的纯钇铝石榴石Y/sub 3/Al/sub 5/O/sub 12/ (YAG)。粉末在1100/spl度/C下煅烧后的XRD谱图表明,所制备的石榴石单相纳米晶材料具有良好的白光led发射光谱。
{"title":"Preparation of yttrium aluminum garnet doped with cerium for application in optoelectronics","authors":"V. Schiopu, M. Macrin, I. Cernica","doi":"10.1109/SMICND.2005.1558733","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558733","url":null,"abstract":"A sol-gel method has been developed to prepare pure yttrium aluminium garnet, Y/sub 3/Al/sub 5/O/sub 12/ (YAG), doped with cerium. The XRD pattern of the powder calcinated at 1100/spl deg/C shows the formation of single phase nanocrystal garnet materials with good performances provide by emission spectra of white light LEDs using these phosphors.","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"102 1","pages":"149-152 vol. 1"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75701761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Nanotube and nanowire transistors 纳米管和纳米线晶体管
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558700
G. Amaratunga, A. S. Teh, S. Cha, G. W. Ho, Jae Eun Jang, Yang Yang, Young Jin Choi, K. Teo, S. Dalal, D J Kang, N. Rupesinghe, William I. Milne, D. Hasko, M. Welland, Jong Min Kim
In this paper we report the use of in-situ grown single wall carbon nanotubes (SWCNTs) from pre-patterned catalyst islands to construct nanotube electronics. The SWCNTs were grown via thermal chemical vapour deposition (CVD) on catalysts islands which were prepared by sputtering, initially, alignment marks are patterned simultaneously with the catalysts islands to enable accurate overlay of contact patterns during the top down fabrication approach for SWCNT devices. The gate transfer characteristics of p-channel SWCNTs are presented. The use of pre-patterned catalyst islands allows control of the SWCNT location required for integrated circuits. Characteristics of ZnO nanowire transistors are also introduced. Very high mobilities are measured in n-channel devices in which the gate is defined in a self aligned manner to have a nanoscale air-gap insulator. The characteristics of the ZnO transistor are comparable to those of achieved from SWCNTs. This raises the possibility of using SWCNTs for p-channel and ZnO nanowires for n-channel in complimentary switching devices.
在本文中,我们报道了使用原位生长的单壁碳纳米管(SWCNTs)来构建纳米管电子学。通过热化学气相沉积(CVD)在溅射制备的催化剂岛上生长SWCNTs,最初,对准标记与催化剂岛同时形成图案,以便在自上而下的SWCNTs器件制造方法中精确覆盖接触图案。介绍了p通道SWCNTs的栅极转移特性。使用预图型催化剂岛可以控制集成电路所需的swcnts位置。介绍了氧化锌纳米线晶体管的特性。在n通道器件中测量到非常高的迁移率,其中栅极以自对准的方式定义,具有纳米级气隙绝缘体。ZnO晶体管的特性与SWCNTs晶体管相当。这提高了在互补开关器件中使用SWCNTs作为p沟道和ZnO纳米线作为n沟道的可能性。
{"title":"Nanotube and nanowire transistors","authors":"G. Amaratunga, A. S. Teh, S. Cha, G. W. Ho, Jae Eun Jang, Yang Yang, Young Jin Choi, K. Teo, S. Dalal, D J Kang, N. Rupesinghe, William I. Milne, D. Hasko, M. Welland, Jong Min Kim","doi":"10.1109/SMICND.2005.1558700","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558700","url":null,"abstract":"In this paper we report the use of in-situ grown single wall carbon nanotubes (SWCNTs) from pre-patterned catalyst islands to construct nanotube electronics. The SWCNTs were grown via thermal chemical vapour deposition (CVD) on catalysts islands which were prepared by sputtering, initially, alignment marks are patterned simultaneously with the catalysts islands to enable accurate overlay of contact patterns during the top down fabrication approach for SWCNT devices. The gate transfer characteristics of p-channel SWCNTs are presented. The use of pre-patterned catalyst islands allows control of the SWCNT location required for integrated circuits. Characteristics of ZnO nanowire transistors are also introduced. Very high mobilities are measured in n-channel devices in which the gate is defined in a self aligned manner to have a nanoscale air-gap insulator. The characteristics of the ZnO transistor are comparable to those of achieved from SWCNTs. This raises the possibility of using SWCNTs for p-channel and ZnO nanowires for n-channel in complimentary switching devices.","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"15 9 1","pages":"3-8 vol. 1"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82588361","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
New technological surface microfabrication methods used to obtain microchannels based systems onto various substrates 新技术表面微加工方法用于在各种衬底上获得基于微通道的系统
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558760
A. Coraci, C. Podaru, E. Manea, A. Ciuciumis, O. Corici
The use of microfluidic devices in biomedical research creates clinically useful technologies and devices (for biochemical reaction chambers, and physical particle separation), or in IC chip cooling applications has significant advantages. In the first case, because the fluid volumes within these microchannels are very small, usually several nanoliters, the amount of reagents and analytes used is quite small. In the second case, they present a negligible thermal resistance, due to direct contact with the chip dissipation surface. This paper presents some new technological methods used to prepare by surface microfabrication microchannels and other microfluidic elements, like chambers onto different substrates.
在生物医学研究中使用微流控装置创造了临床上有用的技术和装置(用于生化反应室和物理颗粒分离),或在IC芯片冷却应用中具有显着优势。在第一种情况下,由于这些微通道内的流体体积非常小,通常只有几纳升,因此所用的试剂和分析物的数量非常少。在第二种情况下,由于与芯片耗散表面直接接触,它们的热阻可以忽略不计。本文介绍了利用表面微加工技术在不同基底上制备微通道和微流控元件(如腔室)的新技术。
{"title":"New technological surface microfabrication methods used to obtain microchannels based systems onto various substrates","authors":"A. Coraci, C. Podaru, E. Manea, A. Ciuciumis, O. Corici","doi":"10.1109/SMICND.2005.1558760","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558760","url":null,"abstract":"The use of microfluidic devices in biomedical research creates clinically useful technologies and devices (for biochemical reaction chambers, and physical particle separation), or in IC chip cooling applications has significant advantages. In the first case, because the fluid volumes within these microchannels are very small, usually several nanoliters, the amount of reagents and analytes used is quite small. In the second case, they present a negligible thermal resistance, due to direct contact with the chip dissipation surface. This paper presents some new technological methods used to prepare by surface microfabrication microchannels and other microfluidic elements, like chambers onto different substrates.","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"32 1","pages":"249-252 vol. 1"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87911308","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Fabrication of electrostatic resonators with monocrystalline 3C-SiC grown on silicon 在硅上生长单晶3C-SiC静电谐振器的制备
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558800
M. Placidi, P. Godignon, N. Mestres, J. Esteve, G. Ferro, A. Leycuras, T. Chassagne
The development of high quality 3C-SiC layers on Si free of residual stress opens the possibility to use SiC for microsystems fabrication and to combine them with Si devices for sensor applications. A new front-side micromachining process technology for 3C-SiC layers on Si resonators has been developed. To show it feasibility several resonator cantilever or bridge test structures of various dimensions have been fabricated. The main advantage of SiC in comparison with Si lies on its higher Young's modulus (almost three times higher), which results in higher resonance frequencies and higher quality factors
在无残余应力的硅上开发高质量的3C-SiC层,开辟了将SiC用于微系统制造并将其与用于传感器应用的Si器件相结合的可能性。提出了一种新的硅谐振器上3C-SiC层的前端微加工工艺。为了证明该方法的可行性,我们制作了几个不同尺寸的谐振腔悬臂或桥梁试验结构。与硅相比,SiC的主要优势在于其更高的杨氏模量(几乎是Si的三倍),从而导致更高的共振频率和更高的质量因子
{"title":"Fabrication of electrostatic resonators with monocrystalline 3C-SiC grown on silicon","authors":"M. Placidi, P. Godignon, N. Mestres, J. Esteve, G. Ferro, A. Leycuras, T. Chassagne","doi":"10.1109/SMICND.2005.1558800","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558800","url":null,"abstract":"The development of high quality 3C-SiC layers on Si free of residual stress opens the possibility to use SiC for microsystems fabrication and to combine them with Si devices for sensor applications. A new front-side micromachining process technology for 3C-SiC layers on Si resonators has been developed. To show it feasibility several resonator cantilever or bridge test structures of various dimensions have been fabricated. The main advantage of SiC in comparison with Si lies on its higher Young's modulus (almost three times higher), which results in higher resonance frequencies and higher quality factors","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"10 1","pages":"361-364 vol. 2"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74621145","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The PTAT sensors in CMOS technology PTAT传感器采用CMOS技术
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558746
M. Szermer, A. Napieralski
In this paper the PTAT (point to absolute temperature) sensor design in CMOS technology is discussed and presented. Two different structures are described. The first one was implemented together with 12-bit ADC into a test chip. Although this sensor has a small linear region, only up to 60 C, it is fully functional and fulfills all requirements. Nevertheless, that was the reason why the new research was established, and a second structure with wide up to 180 /spl deg/C linear range was developed.
本文讨论并介绍了基于CMOS技术的点绝对温度传感器的设计。描述了两种不同的结构。第一个是将12位ADC与测试芯片一起实现的。虽然这个传感器有一个小的线性区域,只有60℃,但它功能齐全,满足所有要求。然而,这就是建立新研究的原因,并开发了第二种结构,其线性范围可达180 /spl度/C。
{"title":"The PTAT sensors in CMOS technology","authors":"M. Szermer, A. Napieralski","doi":"10.1109/SMICND.2005.1558746","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558746","url":null,"abstract":"In this paper the PTAT (point to absolute temperature) sensor design in CMOS technology is discussed and presented. Two different structures are described. The first one was implemented together with 12-bit ADC into a test chip. Although this sensor has a small linear region, only up to 60 C, it is fully functional and fulfills all requirements. Nevertheless, that was the reason why the new research was established, and a second structure with wide up to 180 /spl deg/C linear range was developed.","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"147 1","pages":"197-200 vol. 1"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74640739","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
A 6 bit resolution, 1 gsamples/sec digital to analog converter 一个6位分辨率,1gsamples /sec数模转换器
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558825
S. Spiridon, F. Op't Eynde
This paper presents the analyses and design of a very high speed 6 bit digital to analog converter intended for high-speed data streaming applications. The DAC is implemented using current switching technique. For eliminating non-monotonicity thermometric coding is used for the first five MSBs. The circuit has differential current outputs. The output voltage is generated externally by the current that the DAC injects into high precision resistors. The circuit operates at only 1.5 V, making it an ideal choice for low-power mobile applications. The circuit exhibits a third order intermodulation (IM3) of about 37 dBc with a full-scale two tone sinusoidal inputs at 150 MHz and 200 MHz. The DAC is fabricated in a 0.13mum in CMOS technology, it occupies 0.3 mm 2 and dissipates less then 7.5 mW
本文介绍了一种用于高速数据流应用的超高速6位数模转换器的分析和设计。该DAC采用电流开关技术实现。为了消除非单调性,对前五个msb使用温度编码。电路有差动电流输出。输出电压由DAC注入高精度电阻的电流在外部产生。该电路工作电压仅为1.5 V,使其成为低功耗移动应用的理想选择。该电路具有约37 dBc的三阶互调(IM3),并具有150 MHz和200 MHz的满量程双音正弦输入。该DAC采用0.13 μ m CMOS技术制造,占地0.3 mm2,功耗小于7.5 mW
{"title":"A 6 bit resolution, 1 gsamples/sec digital to analog converter","authors":"S. Spiridon, F. Op't Eynde","doi":"10.1109/SMICND.2005.1558825","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558825","url":null,"abstract":"This paper presents the analyses and design of a very high speed 6 bit digital to analog converter intended for high-speed data streaming applications. The DAC is implemented using current switching technique. For eliminating non-monotonicity thermometric coding is used for the first five MSBs. The circuit has differential current outputs. The output voltage is generated externally by the current that the DAC injects into high precision resistors. The circuit operates at only 1.5 V, making it an ideal choice for low-power mobile applications. The circuit exhibits a third order intermodulation (IM3) of about 37 dBc with a full-scale two tone sinusoidal inputs at 150 MHz and 200 MHz. The DAC is fabricated in a 0.13mum in CMOS technology, it occupies 0.3 mm 2 and dissipates less then 7.5 mW","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"26 1","pages":"455-458 vol. 2"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84130819","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Corrugated microstructures for silicon photodetectors 硅光电探测器的波纹微结构
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558730
A. Dinescu, G. Conache, R. Gavrila
In order to decrease the dark current of a pn junction photodetector together with improving its photoelectric response, thinning of a silicon wafer can be achieved without losing its mechanical resistance by a special etching process performed on both sides of the wafer. Corrugated microstructures were obtained by photolithographic and anisotropic etching procedures on silicon wafers meant to be used in photodetecting devices and optical measurements were performed.
为了降低pn结光电探测器的暗电流并改善其光电响应,可以通过在硅片两侧进行特殊的蚀刻工艺来实现硅片的减薄,而不会损失其机械电阻。通过光刻和各向异性刻蚀程序在硅片上获得波纹微结构,用于光探测器件和光学测量。
{"title":"Corrugated microstructures for silicon photodetectors","authors":"A. Dinescu, G. Conache, R. Gavrila","doi":"10.1109/SMICND.2005.1558730","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558730","url":null,"abstract":"In order to decrease the dark current of a pn junction photodetector together with improving its photoelectric response, thinning of a silicon wafer can be achieved without losing its mechanical resistance by a special etching process performed on both sides of the wafer. Corrugated microstructures were obtained by photolithographic and anisotropic etching procedures on silicon wafers meant to be used in photodetecting devices and optical measurements were performed.","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"1 1","pages":"137-140 vol. 1"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"88693957","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Thermoelectric power of p-doped PbTe semiconductor microwires with resonant states of thallium impurities 掺磷PbTe半导体微线与铊杂质共振态的热电功率
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558779
E. Zasavitsky, V. Kantser, D. Meglei
Results of the measurements of thermoelectric properties of thin semiconductor microwires of Pb1-xTlxTe (x=0.001divide0.02, d=5-100 mum) in the temperature region 4.2divide300 K, which were obtained from solution melt by the filling of quartz capillary with the following crystallization of material are presented. For the samples corresponding to chemical composition with concentration of thallium 0.0025
本文介绍了用石英毛细管填充结晶材料制备的Pb1-xTlxTe薄半导体微线(x=0.001divide0.02, d=5-100 mum)在4.2 ~ 300 K温度范围内的热电性能测量结果。对于化学成分中铊浓度为0.0025
{"title":"Thermoelectric power of p-doped PbTe semiconductor microwires with resonant states of thallium impurities","authors":"E. Zasavitsky, V. Kantser, D. Meglei","doi":"10.1109/SMICND.2005.1558779","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558779","url":null,"abstract":"Results of the measurements of thermoelectric properties of thin semiconductor microwires of Pb1-xTlxTe (x=0.001divide0.02, d=5-100 mum) in the temperature region 4.2divide300 K, which were obtained from solution melt by the filling of quartz capillary with the following crystallization of material are presented. For the samples corresponding to chemical composition with concentration of thallium 0.0025<x<0.005 double change of the sign of thermoelectric power is observed. In pure samples and samples with thallium concentration more than 1 at.% thermoelectric power it is positive in the whole temperature range. Various mechanisms which can lead to observable anomalies, including Kondo-like behavior of a nonmagnetic degenerate two-level system are discussed. Obtained experimental results let suppose that the observed anomalies can be interpreted on the basis of model of an impurity with mixed valences","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"12 1","pages":"281-284 vol. 2"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"81432491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Laser patterning - innovative technology for mass production of microstructures 激光图像化-微结构大规模生产的创新技术
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558759
D. Ulieru, A. Ciuciumis
The improvement of pattern resolution for microsystems fabrication is certainly a proven method for increasing of micro and nanostructure density. Our novel laser technology could be applied for thin metal or alloy films on polymer substrates, which could be structured directly with the laser direct patterning process. So is possible to manufacture ultrafine conductive or reflective structures down to 15 /spl mu/m in an economical and environmentally friendly way. Increasing demand on the accuracy of microsystems and sensors requires microstructures with lines and spaces down of approximately 5-100 /spl mu/m.
提高微系统制造的图案分辨率无疑是提高微纳结构密度的行之有效的方法。我们的新激光技术可以应用于聚合物基底上的金属或合金薄膜,这些薄膜可以通过激光直接图案化工艺直接结构。因此,可以以经济环保的方式制造低至15 /spl mu/m的超细导电或反射结构。对微系统和传感器精度的要求越来越高,要求微结构的线条和空间减少约5-100 /spl mu/m。
{"title":"Laser patterning - innovative technology for mass production of microstructures","authors":"D. Ulieru, A. Ciuciumis","doi":"10.1109/SMICND.2005.1558759","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558759","url":null,"abstract":"The improvement of pattern resolution for microsystems fabrication is certainly a proven method for increasing of micro and nanostructure density. Our novel laser technology could be applied for thin metal or alloy films on polymer substrates, which could be structured directly with the laser direct patterning process. So is possible to manufacture ultrafine conductive or reflective structures down to 15 /spl mu/m in an economical and environmentally friendly way. Increasing demand on the accuracy of microsystems and sensors requires microstructures with lines and spaces down of approximately 5-100 /spl mu/m.","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"32 1","pages":"245-248 vol. 1"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76137012","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Wet etching of glass 玻璃湿蚀刻
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558704
C. Iliescu, F. Tay
The purpose of this paper is to find ways to Improve the wet etching techniques used for glass etching. Essential elements of glass wet etching process such as: influence of glass composition, etching rate, influence of the residual stress in the masking layer, characterization of the main masking materials, the quality of surface generated using wet etching process are analyzed. As a result of this analysis an improved technique for deep wet etching of glass is proposed. A 500-/spl mu/m thick Pyrex glass wafer was etched through using a Cr/Au and photoresist mask, from our knowledge this is the best result reported. For an improved surface an optimal solution HF/HCl (10:1) was established for Pyrex and soda lime glasses. The developed techniques are currently used for fabrication of microfluidic devices on glass.
本文的目的是寻找改进湿法蚀刻技术用于玻璃蚀刻的方法。分析了湿法蚀刻工艺的基本要素,如:玻璃成分的影响、蚀刻速率的影响、掩膜层残余应力的影响、主要掩膜材料的表征、湿法蚀刻工艺生成的表面质量。在此基础上,提出了一种改进的玻璃深湿蚀刻工艺。通过使用Cr/Au和光阻掩膜蚀刻500-/spl mu/m厚的耐热玻璃晶圆,据我们所知,这是报道的最佳结果。为改进表面,确定了热玻璃和碱石灰玻璃的最佳溶液HF/HCl(10:1)。所开发的技术目前已用于玻璃微流控器件的制造。
{"title":"Wet etching of glass","authors":"C. Iliescu, F. Tay","doi":"10.1109/SMICND.2005.1558704","DOIUrl":"https://doi.org/10.1109/SMICND.2005.1558704","url":null,"abstract":"The purpose of this paper is to find ways to Improve the wet etching techniques used for glass etching. Essential elements of glass wet etching process such as: influence of glass composition, etching rate, influence of the residual stress in the masking layer, characterization of the main masking materials, the quality of surface generated using wet etching process are analyzed. As a result of this analysis an improved technique for deep wet etching of glass is proposed. A 500-/spl mu/m thick Pyrex glass wafer was etched through using a Cr/Au and photoresist mask, from our knowledge this is the best result reported. For an improved surface an optimal solution HF/HCl (10:1) was established for Pyrex and soda lime glasses. The developed techniques are currently used for fabrication of microfluidic devices on glass.","PeriodicalId":40779,"journal":{"name":"Teatro e Storia","volume":"15 1","pages":"35-44 vol. 1"},"PeriodicalIF":0.1,"publicationDate":"2005-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74303555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 34
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Teatro e Storia
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