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Corrugated microstructures for silicon photodetectors 硅光电探测器的波纹微结构
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558730
A. Dinescu, G. Conache, R. Gavrila
In order to decrease the dark current of a pn junction photodetector together with improving its photoelectric response, thinning of a silicon wafer can be achieved without losing its mechanical resistance by a special etching process performed on both sides of the wafer. Corrugated microstructures were obtained by photolithographic and anisotropic etching procedures on silicon wafers meant to be used in photodetecting devices and optical measurements were performed.
为了降低pn结光电探测器的暗电流并改善其光电响应,可以通过在硅片两侧进行特殊的蚀刻工艺来实现硅片的减薄,而不会损失其机械电阻。通过光刻和各向异性刻蚀程序在硅片上获得波纹微结构,用于光探测器件和光学测量。
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引用次数: 0
Laser patterning - innovative technology for mass production of microstructures 激光图像化-微结构大规模生产的创新技术
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558759
D. Ulieru, A. Ciuciumis
The improvement of pattern resolution for microsystems fabrication is certainly a proven method for increasing of micro and nanostructure density. Our novel laser technology could be applied for thin metal or alloy films on polymer substrates, which could be structured directly with the laser direct patterning process. So is possible to manufacture ultrafine conductive or reflective structures down to 15 /spl mu/m in an economical and environmentally friendly way. Increasing demand on the accuracy of microsystems and sensors requires microstructures with lines and spaces down of approximately 5-100 /spl mu/m.
提高微系统制造的图案分辨率无疑是提高微纳结构密度的行之有效的方法。我们的新激光技术可以应用于聚合物基底上的金属或合金薄膜,这些薄膜可以通过激光直接图案化工艺直接结构。因此,可以以经济环保的方式制造低至15 /spl mu/m的超细导电或反射结构。对微系统和传感器精度的要求越来越高,要求微结构的线条和空间减少约5-100 /spl mu/m。
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引用次数: 1
Thermoelectric power of p-doped PbTe semiconductor microwires with resonant states of thallium impurities 掺磷PbTe半导体微线与铊杂质共振态的热电功率
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558779
E. Zasavitsky, V. Kantser, D. Meglei
Results of the measurements of thermoelectric properties of thin semiconductor microwires of Pb1-xTlxTe (x=0.001divide0.02, d=5-100 mum) in the temperature region 4.2divide300 K, which were obtained from solution melt by the filling of quartz capillary with the following crystallization of material are presented. For the samples corresponding to chemical composition with concentration of thallium 0.0025
本文介绍了用石英毛细管填充结晶材料制备的Pb1-xTlxTe薄半导体微线(x=0.001divide0.02, d=5-100 mum)在4.2 ~ 300 K温度范围内的热电性能测量结果。对于化学成分中铊浓度为0.0025
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引用次数: 1
Piezoelectric properties of bismuth modified lead titanate ceramics 铋改性钛酸铅陶瓷的压电性能
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558776
C. Miclea, L. Amarande, C. Tănăsoiu, I. Spanulescu, C. Miclea
Effect of Bi additives on the piezoelectric properties of PT ceramics having the formula (Pb1-3x/2Bix)(Ti0.98Mn0.02)O 3 with x=0.04, 0.06, 0.08 was investigated. The samples were prepared by conventional ceramic technique, using p.a. purity raw materials. The mixed powders were sintered at temperatures between 1050-1300degC. Poling was done in fields of about 70 kV/cm. Density and coupling factors of the samples were determined as a function of sintering temperatures, and doping level. Temperature dependence of the main piezoelectric characteristics was also investigated for temperatures as high as 500degC. A Curie point of 450degC, a low dielectric constant (<140) and a large electromechanical anisotropy (the radial mode is nearly inexistent, at room temperature and the thickness coupling factor is about 0.4) were found. These enhanced properties make such ceramics very attractive for high temperature and high frequency transducers applications
研究了铋添加剂对(Pb1-3x/2Bix)(Ti0.98Mn0.02) o3 (x=0.04, 0.06, 0.08) PT陶瓷压电性能的影响。样品采用常规陶瓷工艺制备,原料为p.a.纯度。混合粉末在1050-1300℃的温度下烧结。在约70 kV/cm的电场中进行了Poling。测定了烧结温度和掺杂水平对样品密度和耦合系数的影响。对温度高达500℃时主要压电特性的温度依赖性进行了研究。居里点450℃,介电常数<140,机电各向异性大(室温下径向模态几乎不存在,厚度耦合系数约为0.4)。这些增强的性能使这种陶瓷在高温和高频换能器应用中非常有吸引力
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引用次数: 1
Cylindrical thermoelectric microwires under radial electric field effect 径向电场效应下的圆柱形热电微丝
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558781
V. Kantser, Z. Dashevsky, D. Meglei, I. Bejenari
The electric field effect (EFE) in a coaxial cylindrical capacitor configuration was used to study the modification of transport and thermoelectric properties of semiconductor PbTe and Bi2Te3 glass coated microwires. The first results of experimental measurements of wire transport properties under EFE show the increasing or decreasing of the average Seebeck coefficient in dependence of gate potential polarity in accordance with the theoretical analysis
利用同轴圆柱形电容器结构中的电场效应(EFE)研究了半导体PbTe和Bi2Te3玻璃包覆微导线输运和热电性能的改变。电激电法测量导线输运特性的初步实验结果表明,平均塞贝克系数随栅极电位极性的变化而增大或减小,与理论分析一致
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引用次数: 0
Synthesis and characterization of indium tin oxide and cerium dioxide thin films by sol-gel method 溶胶-凝胶法制备氧化铟锡和二氧化铈薄膜及表征
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558817
A. Ciuciumis, I. Cernica
The paper presents indium tin oxide and cerium dioxide thin films obtained by sol-gel method and deposited on the different wood substrates. Films deposition was performed by immersion of the substrates into coating solution and flow-coating process. Investigation of the surface chemistry and morphology of the wood substrates before and after deposition were obtained by means of atomic force microscopy and optical microscopy. The sol-gel deposit on the wood substrates lowered the rates of water and water vapour sorption (absorption and/or adsorption)
采用溶胶-凝胶法制备了氧化铟锡和二氧化铈薄膜,并将其沉积在不同的木材基材上。薄膜的沉积是通过基材浸入镀膜液和流动镀膜工艺进行的。采用原子力显微镜和光学显微镜对木材基材沉积前后的表面化学和形貌进行了研究。木材基材上的溶胶-凝胶沉积降低了水和水蒸气的吸收率(吸收和/或吸附)。
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引用次数: 0
Silicon carbide (SiC): a short history. an analytical approach for SiC power device design 碳化硅(SiC):历史较短。SiC功率器件设计的一种分析方法
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558796
G. Brezeanu
As this year we celebrate a century since the discovery of Silicon Carbide, a short history of semiconductor material is presented in the first part of the paper. Design guidelines, based on simple analytical expressions, for ideal structures of high power SiC Schottky barrier diodes (SBD), are also included
在今年我们庆祝碳化硅发现一百周年之际,本文的第一部分介绍了半导体材料的简短历史。设计指南,基于简单的解析表达式,为高功率SiC肖特基势垒二极管(SBD)的理想结构,还包括
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引用次数: 14
Testing of digital circuitry using Xilinx chipscope logic analyzer 使用赛灵思芯片逻辑分析仪测试数字电路
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558829
O. Oltu, P. Milea, A. Simion
The latest technology, for FPGA testing provided by Xilinx and Altera for the new families of very large circuits is based on Logic Analysers implemented inside the tested chip. The ChipScope from Xilintx and the Signal Tap Logic Analyser from Altera allow to capture and display the signal in all internal nodes of the circuit usinzg the JTAG interface only. This paper presents the authors' experience in the use of ChipScope technology, for verification and debugging of a hardware simulator of the standard positioning system in aircraft radionavigation. The siystem was implemented in. the Spartan 3 (from Xilinx) based FPGA development board.
Xilinx和Altera为超大型新系列电路提供的最新FPGA测试技术基于测试芯片内部实现的逻辑分析仪。Xilintx的ChipScope和Altera的Signal Tap Logic analyzer允许仅使用JTAG接口在电路的所有内部节点中捕获和显示信号。本文介绍了作者利用ChipScope技术对飞机无线电导航标准定位系统的硬件模拟器进行验证和调试的经验。该系统在。基于Spartan 3(来自Xilinx)的FPGA开发板。
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引用次数: 11
Low loss coplanar lines on low resistivity silicon SU-S thick negative photoresist 低电阻率硅SU-S厚负光刻胶上的低损耗共面线
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558722
R. Marcelli, S. Catoni, L. Frenguelli
In this paper a new approach to obtain low losses coplanar waveguide (CPW) lines is described. A photolithographic process is performed by using SU-S thick negative photo-resist on low resistivity silicon to obtain CPW lines elevated with respect to the substrate to get the advantages from transmission line structures which are almost on-the-air.
介绍了一种获得低损耗共面波导(CPW)线的新方法。采用SU-S厚负光刻胶在低阻硅上进行光刻工艺,获得相对于衬底升高的CPW线,以获得几乎在空中的传输线结构的优势。
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引用次数: 7
A MEMS dedicated to the bio-components detection, inspired from the SON architecture 一个MEMS致力于生物成分检测,灵感来自于SON架构
IF 0.1 Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558752
C. Ravariu, A. Rusu, O. Nedelcu, F. Ravariu, F. Babarada, L. Dobrescu
The Silicon On Insulator technology has reached a new stage through the nanodevices way: Silicon On Nothing, where "Nothing" means a vacuum cavity underneath an ultrathin Si film. A mobile and thin semiconductor membrane results, by enlarging the cavity. In the empty space can be handled a bioliquid using a diffuser/nozzle micropump. The mobile Si membrane is bending by the substrate biasing and plays a double role: as actuator and detector. This paper presents a MEMS, based on a new work principle than traditional ISFETs, which detects the ionic analytes from a bioliquid and has its own actuator for the microfluidic handle.
绝缘体上的硅技术通过纳米器件的方式达到了一个新的阶段:无硅上的硅,这里的“无”意味着超薄硅薄膜下面的真空腔。通过扩大腔体,形成可移动的薄半导体膜。在真空中,可以使用扩散器/喷嘴微泵处理生物液体。移动硅膜由于衬底偏置而弯曲,具有致动器和探测器的双重作用。本文提出了一种基于新的工作原理的MEMS,它可以检测生物液体中的离子分析物,并具有微流体手柄的执行器。
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引用次数: 1
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