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Thermoelectric power of p-doped PbTe semiconductor microwires with resonant states of thallium impurities 掺磷PbTe半导体微线与铊杂质共振态的热电功率
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558779
E. Zasavitsky, V. Kantser, D. Meglei
Results of the measurements of thermoelectric properties of thin semiconductor microwires of Pb1-xTlxTe (x=0.001divide0.02, d=5-100 mum) in the temperature region 4.2divide300 K, which were obtained from solution melt by the filling of quartz capillary with the following crystallization of material are presented. For the samples corresponding to chemical composition with concentration of thallium 0.0025
本文介绍了用石英毛细管填充结晶材料制备的Pb1-xTlxTe薄半导体微线(x=0.001divide0.02, d=5-100 mum)在4.2 ~ 300 K温度范围内的热电性能测量结果。对于化学成分中铊浓度为0.0025
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引用次数: 1
Laser patterning - innovative technology for mass production of microstructures 激光图像化-微结构大规模生产的创新技术
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558759
D. Ulieru, A. Ciuciumis
The improvement of pattern resolution for microsystems fabrication is certainly a proven method for increasing of micro and nanostructure density. Our novel laser technology could be applied for thin metal or alloy films on polymer substrates, which could be structured directly with the laser direct patterning process. So is possible to manufacture ultrafine conductive or reflective structures down to 15 /spl mu/m in an economical and environmentally friendly way. Increasing demand on the accuracy of microsystems and sensors requires microstructures with lines and spaces down of approximately 5-100 /spl mu/m.
提高微系统制造的图案分辨率无疑是提高微纳结构密度的行之有效的方法。我们的新激光技术可以应用于聚合物基底上的金属或合金薄膜,这些薄膜可以通过激光直接图案化工艺直接结构。因此,可以以经济环保的方式制造低至15 /spl mu/m的超细导电或反射结构。对微系统和传感器精度的要求越来越高,要求微结构的线条和空间减少约5-100 /spl mu/m。
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引用次数: 1
Wet etching of glass 玻璃湿蚀刻
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558704
C. Iliescu, F. Tay
The purpose of this paper is to find ways to Improve the wet etching techniques used for glass etching. Essential elements of glass wet etching process such as: influence of glass composition, etching rate, influence of the residual stress in the masking layer, characterization of the main masking materials, the quality of surface generated using wet etching process are analyzed. As a result of this analysis an improved technique for deep wet etching of glass is proposed. A 500-/spl mu/m thick Pyrex glass wafer was etched through using a Cr/Au and photoresist mask, from our knowledge this is the best result reported. For an improved surface an optimal solution HF/HCl (10:1) was established for Pyrex and soda lime glasses. The developed techniques are currently used for fabrication of microfluidic devices on glass.
本文的目的是寻找改进湿法蚀刻技术用于玻璃蚀刻的方法。分析了湿法蚀刻工艺的基本要素,如:玻璃成分的影响、蚀刻速率的影响、掩膜层残余应力的影响、主要掩膜材料的表征、湿法蚀刻工艺生成的表面质量。在此基础上,提出了一种改进的玻璃深湿蚀刻工艺。通过使用Cr/Au和光阻掩膜蚀刻500-/spl mu/m厚的耐热玻璃晶圆,据我们所知,这是报道的最佳结果。为改进表面,确定了热玻璃和碱石灰玻璃的最佳溶液HF/HCl(10:1)。所开发的技术目前已用于玻璃微流控器件的制造。
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引用次数: 34
In situ temperature monitoring system for experimental investigation of microstructures 显微组织实验研究现场温度监测系统
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558762
C. Codreanu, I. Stan, F. Craciunoiu, V. Obreja
This paper presents a temperature monitoring system used for the experimental investigation and characterization of materials and microstructures or devices under different temperature conditions. After a general description of the measurement system, the temperature control and measurement block is presented. The heating and the sensing elements are firstly presented, and then the temperature monitoring unit is described. Besides the constructive solutions, problems related to thermal contact, calibration, error and sensitivity are also discussed.
本文介绍了一种温度监测系统,用于不同温度条件下材料和微结构或器件的实验研究和表征。在对测量系统进行了总体描述后,给出了温度控制和测量模块。首先介绍了加热元件和传感元件,然后介绍了温度监测单元。除了建设性的解决方案外,还讨论了与热接触、校准、误差和灵敏度有关的问题。
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引用次数: 0
Spin-orbit interaction and spintronics effects in semiconductor structures driven by interband coupling through optical phonon like displacements 光学类声子位移带间耦合驱动的半导体结构中的自旋轨道相互作用和自旋电子学效应
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558774
V. Kantser, S. Arapan, S. Carlig, F. Ermalai
In addition to known channels of spin-orbit interaction (SOI) in semiconductor materials and heterostructures. a new terms of SOI induced by interband coupling through optical phonon like displacement or electrical polarization are proposed and analyzed. Some spintronic particularities of the electronic states and tunneling characteristics related to new SOI terms are studied. Spin Hall effect driven by coupling of fight and heavy hole bands through optical phonon like displacement is studied on the basis of developed Luttinger effective Hamiltonians
除了半导体材料和异质结构中已知的自旋轨道相互作用(SOI)通道。提出并分析了由光声子位移或电极化等带间耦合引起的SOI的新术语。研究了与新SOI项相关的电子态的自旋电子特性和隧穿特性。在发展的Luttinger有效哈密顿量的基础上,研究了重空穴带和重空穴带通过光学声子类位移耦合驱动的自旋霍尔效应
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引用次数: 0
Improvements in the quality of CuSbS/sub 2/ films used in solid state solar cells 固态太阳能电池用cusb / sub2 /薄膜质量的改进
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558732
S. Manolache, M. Nanu, A. Duţă, A. Goossens, J. Schoonman
The aim of the paper is to present the research made in order to improve the diode behaviour of CuSbS/sub 2/ absorber films used in solar cells. Films obtained with other solvent than water (ethanol) were tested. This films reveal a small improvement in the quality of the films but after the optimization of the ethanol amount that must be added the improvements can be more consistent. Sb-rich films were obtained, free of pinholes but the I-V measurement under illumination reveals a very small injection of electrons from the absorber into the n-type semiconductor.
本文的目的是介绍为改善用于太阳能电池的CuSbS/sub - 2/吸收膜的二极管性能所做的研究。用除水(乙醇)以外的其他溶剂得到的薄膜进行了测试。结果表明,膜的质量得到了小幅改善,但在优化乙醇添加量后,改善效果更加一致。获得了富硒薄膜,没有针孔,但在照明下的I-V测量显示,吸收剂向n型半导体注入了非常小的电子。
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引用次数: 0
Electromagnetic modeling of micromachined GaN thin films for FBAR applications 用于FBAR应用的微机械GaN薄膜的电磁建模
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558725
D. Neculoiu, G. Konstantinidis, K. Mutamba, A. Takacs, D. Vasilache, C. Sydlo, T. Kostopoulos, A. Stavrinidis, A. Muller
The paper presents a new electromagnetic modeling approach for FBAR structures that integrates the piezoelectric/acoustic effects into a commercial Zeland IE3D electromagnetic simulator. An analytic dispersion model describes the piezoelectric material frequency dependent effective permittivity. Several GaN based test structures were fabricated using bulk micromachining technologies. From microwave measurements the model parameters were extracted.
本文提出了一种新的FBAR结构电磁建模方法,该方法将压电/声学效应集成到商用Zeland IE3D电磁模拟器中。一个解析色散模型描述了压电材料与频率相关的有效介电常数。采用本体微加工技术制备了几种氮化镓基测试结构。从微波测量中提取模型参数。
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引用次数: 3
Testing of digital circuitry using Xilinx chipscope logic analyzer 使用赛灵思芯片逻辑分析仪测试数字电路
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558829
O. Oltu, P. Milea, A. Simion
The latest technology, for FPGA testing provided by Xilinx and Altera for the new families of very large circuits is based on Logic Analysers implemented inside the tested chip. The ChipScope from Xilintx and the Signal Tap Logic Analyser from Altera allow to capture and display the signal in all internal nodes of the circuit usinzg the JTAG interface only. This paper presents the authors' experience in the use of ChipScope technology, for verification and debugging of a hardware simulator of the standard positioning system in aircraft radionavigation. The siystem was implemented in. the Spartan 3 (from Xilinx) based FPGA development board.
Xilinx和Altera为超大型新系列电路提供的最新FPGA测试技术基于测试芯片内部实现的逻辑分析仪。Xilintx的ChipScope和Altera的Signal Tap Logic analyzer允许仅使用JTAG接口在电路的所有内部节点中捕获和显示信号。本文介绍了作者利用ChipScope技术对飞机无线电导航标准定位系统的硬件模拟器进行验证和调试的经验。该系统在。基于Spartan 3(来自Xilinx)的FPGA开发板。
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引用次数: 11
Photoelectrode materials of tungsten oxide (WO/sub 3/) for water splitting 用于水分解的氧化钨(WO/sub 3/)光电极材料
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558782
A. Enesca, A. Duţă, M. Nanu, C. Enache, R. van der Krol, J. Schoonman
The aim of this paper is to investigate the stability of the tungsten trioxide thin films in different conditions. Tungsten oxide (WO 3) films are prepared by means of the spray pyrolysis deposition (SPD) method using W(OC2H5)2 ethanol. The films were investigated from the morphologic (SEM), crystalline (XRD) and conductive point of view. The resulting films are conductive, crystalline and with a good conductivity in acid electrolyte. The photoelectrolysis seems to be the most efficient and non-polluting method that can be used for wafer splitting using like energy the sunlight radiation
本文的目的是研究三氧化钨薄膜在不同条件下的稳定性。以W(OC2H5)2乙醇为原料,采用喷雾热解沉积(SPD)法制备了氧化钨(wo3)薄膜。从形貌(SEM)、晶体形貌(XRD)和导电性等方面对膜进行了表征。所得薄膜具有导电性、结晶性,在酸性电解质中具有良好的导电性。光电解法是利用太阳辐射等能量进行晶圆分解的最有效、无污染的方法
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引用次数: 1
4H-SiC PIN diodes for microwave applications 微波应用的4H-SiC PIN二极管
IF 0.1 0 THEATER Pub Date : 2005-12-19 DOI: 10.1109/SMICND.2005.1558702
K. Zekentes, N. Camara, L. Romanov, A. Kirillov, M. S. Boltovets, A. Lebedev, K. Vassilevski
4H-SiC p-i-n diodes were designed, fabricated and characterized with the aim to be used for microwave applications. The best diodes with mesa structure diameters between 80 and 150 /spl mu/m, exhibited a blocking voltage of 1100 V, a 100 mA differential resistance of 1-2 /spl Omega/, a capacitance below 0.5 pF at punchthrough voltage of 100 V and carrier effective lifetime between 15-27 ns. X-band microwave switches based on 4H-SiC p-i-n diodes are demonstrated for the first time. The switches exhibited insertion losses as low as 0.7 dB, isolation up to 25 dB and operation in pulsed high microwave powers of 2.2 k W in isolation mode and 0.4 kW in insertion mode.
以微波应用为目标,对4H-SiC p-i-n二极管进行了设计、制备和表征。结果表明,最优的二极管表面结构直径在80 ~ 150 /spl mu/m之间,阻塞电压为1100 V, 100 mA差分电阻为1 ~ 2 /spl ω /,击穿电压为100 V时电容低于0.5 pF,载流子有效寿命为15 ~ 27 ns。首次展示了基于4H-SiC p-i-n二极管的x波段微波开关。该开关的插入损耗低至0.7 dB,隔离度高达25 dB,在隔离模式和插入模式下的脉冲高微波功率分别为2.2 kW和0.4 kW。
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Teatro e Storia
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