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2020 IEEE International Electron Devices Meeting (IEDM)最新文献

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Electrically Reconfigurable Active Metasurface for 3D Distance Ranging 用于3D距离测距的电可重构主动超表面
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372059
Sun Il Kim, Junghyun Park, B. Jeong, Duhyun Lee, Jungwoo Kim, C. Shin, Chang-Bum Lee, Tatsuhiro Otsuka, Sangwook Kim, Kiyeon Yang, Yong-Young Park, Jisan Lee, Inoh Hwang, Jaeduck Jang, K. Ha, H. Choo, B. Choi, Sungwoo Hwang
For the first time, we have successfully demonstrated a 3-dimensional (3-D) depth scan using an electrically-tunable active metasurface, which is an array of plasmonic resonators with an active indium-tin-oxide (ITO) layer. Our active device can steer a beam in reflection with a positive side-mode suppression ratio by independently controlling the amplitude and the phase from 0 to 360° using two separate bias controls. These are very promising results for small and high speed 3D depth sensing for mobile and automotive applications.
我们首次成功展示了使用电可调谐有源超表面进行三维(3-D)深度扫描,这是一种具有活性铟锡氧化物(ITO)层的等离子体谐振器阵列。我们的有源器件通过使用两个单独的偏置控制,在0到360°范围内独立控制振幅和相位,从而使反射光束具有正的边模抑制比。对于移动和汽车应用的小型高速3D深度传感来说,这些都是非常有希望的结果。
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引用次数: 1
Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck 2nm及以上互连研究的拐点和趋势,以解决RC瓶颈
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9371903
Z. Tokei, V. Vega, G. Murdoch, M. O'Toole, K. Croes, R. Baert, M. V. Veen, C. Adelmann, J. Soulie, J. Boemmels, C. Wilson, S. Park, K. Sankaran, G. Pourtois, J. Sweerts, S. Paolillo, S. Decoster, M. Mao, F. Lazzarino, J. Versluijs, V. Blanco, M. Ercken, E. Kesters, Q. Le, F. Holsteyns, N. Heylen, L. Teugels, K. Devriendt, H. Struyf, P. Morin, N. Jourdan, S. Elshocht, I. Ciofi, A. Gupta, H. Zahedmanesh, K. Vanstreels, M. Na
Interconnect options will be introduced and reviewed targeting tight pitch metal layers at the local levels. Examples include hybrid metallization, semi-damascene interconnects as well as potential new conductor materials.
将引入互连选项,并在地方一级审查针对紧密间距金属层。例子包括混合金属化、半大马士革互连以及潜在的新导体材料。
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引用次数: 14
System exploration and technology demonstration of 3D Wafer-to-Wafer integrated STT-MRAM based caches for advanced Mobile SoCs 基于先进移动soc的3D片对片集成STT-MRAM缓存的系统探索和技术演示
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372046
M. Perumkunnil, F. Yasin, S. Rao, S. Salahuddin, D. Milojevic, G. van der Plas, J. Ryckaert, E. Beyne, A. Furnémont, G. Kar
This paper analyzes the most feasible 3D integration and partitioning scheme for STT-MRAM based caches in an advanced Mobile SoC based on the process demonstration of the first ever functional 3D integrated STT devices. We present 3D partitioning schemes from a design -architecture perspective and Power Performance and Area (PPA) analysis is carried out for the 2D and 3D SoC designs with both SRAM and STT-MRAM caches. Our work shows that the PPA benefits from 3D Memory on Logic partitioning are magnified when it can be exploited to accommodate larger caches in general. We also show that STT-MRAM based 3D partitioned caches can exploit this potential increase in capacity to improve performance even more than SRAM. These 3D Wafer-to-Wafer (W2W) integrated STT-MRAM caches can result in up-to 30% performance improvement at 17% power and 15% footprint reduction for our target SoC.
本文通过首个功能3D集成STT器件的工艺演示,分析了先进移动SoC中基于STT- mram的缓存最可行的3D集成和分区方案。我们从设计架构的角度提出了3D分区方案,并对具有SRAM和STT-MRAM缓存的2D和3D SoC设计进行了功率性能和面积(PPA)分析。我们的工作表明,当可以利用3D内存来容纳更大的缓存时,PPA在逻辑分区上的好处被放大了。我们还表明,基于STT-MRAM的3D分区缓存可以利用这种潜在的容量增加来提高性能,甚至超过SRAM。这些3D晶圆对晶圆(W2W)集成STT-MRAM缓存可以在17%的功耗下实现高达30%的性能提升,并为我们的目标SoC减少15%的占地面积。
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引用次数: 6
Portable Multi-Spectral Imaging: Devices, Vertical Integration, and Applications 便携式多光谱成像:设备、垂直集成和应用
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372014
A. Valdes-Garcia, P. Pepeljugoski, Ivan Duran, J. Plouchart, M. Yeck, Huijuan Liu
Recent advances in semiconductor and packaging technologies have accelerated the miniaturization of portable sensing devices including visible-domain cameras, IR cameras, and millimeter-wave (mmWave) radars. Simultaneously, image and sensor data processing capabilities based on Systems-on-Chip (SoCs) have evolved as well to the extent toward the goal of implementing learning-based automatic recognition capabilities. This paper discusses the challenges and opportunities associated with the vertical sensors-to-software integration of portable systems capable of performing multi-spectral imaging, where data from different portions of the EM spectrum is captured, processed, and displayed simultaneously. An example hardware implementation, multi-spectral image data, and potential applications are discussed
半导体和封装技术的最新进展加速了便携式传感设备的小型化,包括可见域相机、红外相机和毫米波(mmWave)雷达。同时,基于片上系统(soc)的图像和传感器数据处理能力也在朝着实现基于学习的自动识别能力的目标发展。本文讨论了能够执行多光谱成像的便携式系统的垂直传感器到软件集成相关的挑战和机遇,其中来自EM光谱不同部分的数据被同时捕获,处理和显示。讨论了硬件实现示例、多光谱图像数据和潜在应用
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引用次数: 1
Imaging in Short-Wave Infrared with 1.82 μm Pixel Pitch Quantum Dot Image Sensor 1.82 μm像素间距量子点图像传感器短波红外成像研究
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372018
Jiwon Lee, Epimitheas Georgitzikis, Yunlong Li, Ziduo Lin, Jihoon Park, I. Lieberman, D. Cheyns, M. Jayapala, A. Lambrechts, S. Thijs, R. Stahl, P. Malinowski
A high pixel density image sensor for the Short Wave Infrared (SWIR) range is presented. A PbS quantum dot (QD) photodiode array is monolithically integrated on a silicon custom readout IC. Imaging in VIS and SWIR is demonstrated using focal plane arrays with pixel pitch down to record 1.82 μm. Through-silicon vision and lens-free imaging (LFI) microscopy are shown as applications that can benefit from high resolution/small pixel dimensions. In the LFI demonstration, the captured hologram is computationally reconstructed to acquire SWIR microscopic images, resulting in a wavelength equivalent resolution LFI microscopy system. To our knowledge, this is the smallest pitch SWIR pixel ever reported and the first LFI system using a QD image sensor.
提出了一种用于短波红外(SWIR)范围的高像素密度图像传感器。将PbS量子点(QD)光电二极管阵列单片集成在硅自定义读出IC上。使用焦平面阵列演示了VIS和SWIR成像,像素间距降至1.82 μm。通过硅视觉和无透镜成像(LFI)显微镜显示的应用可以受益于高分辨率/小像素尺寸。在LFI演示中,捕获的全息图被计算重建以获得SWIR显微图像,从而产生波长等效分辨率的LFI显微系统。据我们所知,这是有史以来报道的最小螺距SWIR像素,也是第一个使用QD图像传感器的LFI系统。
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引用次数: 16
Gate Drive Concept for dv/dt Control of GaN GIT-Based Motor Drive Inverters 基于GaN git的电机驱动逆变器dv/dt控制的栅极驱动概念
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372095
E. Persson, D. Wilhelm
In high-volume applications like home appliance motor drives, system cost and density are key value metrics. In many cases, system packaging puts severe limits on the power dissipation ability of the power electronics, so inverter losses must be kept to a minimum. GaN power transistors can offer significant improvements in power loss compared to IGBT or MOSFET-based inverters [1], [2], but controlling switching speed (dv/dt) can be challenging.This paper proposes a simplified active dv/dt control method that can be integrated into the driver IC and GaN transistor using low-cost techniques without adding passive components or bondwires inside the Integrated Power Module (IPM). The circuit is implemented in a monolithic 3-phase gate driver IC using low-cost 0.35 μm HVJI CMOS process. The package- integrated 3-phase inverter using the IC with 6 discrete GaN GIT is demonstrated to be capable of delivering 226 W from a 12x12 mm package, about double the power delivered by today’s silicon-based inverter in the same package size.The results of simulation and experiment are provided for an integrated IPM driving a motor load up to 226 W.
在像家用电器电机驱动这样的大批量应用中,系统成本和密度是关键的价值指标。在许多情况下,系统封装对电力电子器件的功耗能力施加了严格的限制,因此逆变器的损耗必须保持在最低限度。与IGBT或基于mosfet的逆变器相比,GaN功率晶体管可以显著改善功率损耗[1],[2],但控制开关速度(dv/dt)可能具有挑战性。本文提出了一种简化的有源dv/dt控制方法,该方法可以使用低成本技术集成到驱动IC和GaN晶体管中,而无需在集成功率模块(IPM)内部添加无源元件或键合线。该电路采用低成本的0.35 μm HVJI CMOS工艺在单片三相栅极驱动IC中实现。采用6分立GaN GIT集成IC的封装集成三相逆变器被证明能够从12x12 mm封装中提供226 W的功率,大约是目前相同封装尺寸的硅基逆变器功率的两倍。仿真和实验结果表明,集成IPM可以驱动高达226 W的电机负载。
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引用次数: 4
BEOL-Compatible Multiple Metal-Ferroelectric-Metal (m-MFM) FETs Designed for Low Voltage (2.5 V), High Density, and Excellent Reliability beol兼容多金属-铁电-金属(m-MFM)场效应管设计低电压(2.5 V),高密度,卓越的可靠性
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9371916
Mengyao Yan, Ming-Hung Wu, Hsin-Hui Huang, Yu-Hao Chen, Y. Chu, Tian-Li Wu, P. Yeh, Chih-Yao Wang, Yu-De Lin, Jian-Wei Su, P. Tzeng, S. Sheu, W. Lo, Chih-I Wu, T. Hou
An experiment-calibrated SPICE model considering dynamic ferroelectric switching and charge injection is established to co-optimize memory window, write speed, endurance, and retention of MFMFET where a standard BEOL HfZrOx MFM capacitor is stacked on top of the logic transistor. This promising SOC-compatible, low-power and low-voltage embedded memory achieves a high current on-off ratio > 104 when programming at ±2.5 V for 3 μs without compromising 10-year retention and MFM-equivalent endurance. A novel m-MFMFET utilizing multiple MFMs is also proposed. m-MFMFET achieves equivalent performance as the standard MFMFET but further reduces the unit cell size by 22 %.
建立了一个考虑动态铁电开关和电荷注入的实验校准SPICE模型,以共同优化MFMFET的存储窗口、写入速度、持久时间和保持时间,其中标准BEOL HfZrOx MFM电容器堆叠在逻辑晶体管的顶部。这种有前途的soc兼容、低功耗和低电压嵌入式存储器在±2.5 V下编程3 μs时实现了> 104的高电流通断比,而不会影响10年的保留和mfm等效的耐用性。并提出了一种利用多个MFMs的新型m-MFMFET。m- mfmffet达到了与标准mfmffet相当的性能,但进一步减少了22%的单位电池尺寸。
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引用次数: 10
Toward high-performance and reliable Ge channel devices for 2 nm node and beyond 面向2nm及以上节点的高性能、可靠的Ge通道器件
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372007
H. Arimura, E. Capogreco, A. Vohra, C. Porret, R. Loo, E. Rosseel, A. Hikavyy, D. Cott, G. Boccardi, L. Witters, G. Eneman, J. Mitard, N. Collaert, N. Horiguchi
This paper describes our recent research progress on high-mobility Ge-channel n/pFETs. Gate stack, junction and contact are the key challenging components of Ge n/pFETs. Through the improvement of those unit modules, the electrical performance and reliability of Ge FinFET and gate-all-around (GAA) nanowire (NW) pFETs have been improved. Remaining technical challenges for the realization of high performance and reliable Ge n/pFETs will be discussed.
本文介绍了近年来高迁移率ge沟道n/ pfet的研究进展。栅极堆、结和触点是Ge n/ pfet的关键元件。通过对这些单元模块的改进,提高了Ge FinFET和栅极全能(GAA)纳米线(NW) pfet的电学性能和可靠性。将讨论实现高性能和可靠的Ge n/ pfet的剩余技术挑战。
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引用次数: 5
High-voltage micro-plasma switch for efficient power management of triboelectric kinetic energy harvesters 用于摩擦电动能采集器高效电源管理的高压微等离子体开关
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372026
P. Basset, H. Zhang, F. Marty, A. Delbani, N. Hodžić, A. Karami, D. Galayko
As for any electrostatic transducer, triboelectric energy generators (TENGs) need to maximize their bias voltage for a good kinetic-to-electrical energy conversion. If several hundreds of volts can be obtained directly by triboelectric contacts for some state-of-art devices, unstable charge-pump (UCP) conditioning circuits can also be used to reach such high values with more basic TENGs. Whatever the chosen solution, this high-voltage must be reduced to a few volts to power an electronic device. In this abstract, we first compare the three main UCPs and we propose to use an autonomous MEMS micro-plasma switch in a Buck DC-DC converter in order to maximized the voltage across the TENG while obtaining a low voltage rectified output without any external control.
对于任何静电换能器,摩擦发电机(teng)都需要最大化其偏置电压以实现良好的动能到电能的转换。如果一些最先进的设备可以通过摩擦电接触直接获得几百伏的电压,那么不稳定电荷泵(UCP)调节电路也可以使用更基本的teng达到如此高的电压。无论选择何种解决方案,这个高电压必须降低到几伏才能为电子设备供电。在本摘要中,我们首先比较了三种主要的ucp,并建议在降压DC-DC转换器中使用自主MEMS微等离子体开关,以便在没有任何外部控制的情况下最大化TENG的电压,同时获得低压整流输出。
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引用次数: 0
Next-Generation Design and Technology Co-optimization (DTCO) of System on Integrated Chip (SoIC) for Mobile and HPC Applications 面向移动和高性能计算应用的系统集成芯片(SoIC)的下一代设计和技术协同优化(DTCO)
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372005
Y. Cheng, F. Lee, M.F. Chen, J. Yuan, Tze-Chiang Huang, K.-J. Chen, C. Wang, C.-L. Chen, C. Tsai, Douglas C. H. Yu
This paper demonstrates the next-generation design and technology co-optimization (DTCO) of system on integrated chip (SoIC) for mobile and HPC applications, where the SoIC technology was proposed to integrate multichips with different functionality and technology into a single SoC chip. The new DTCO includes overall die partitioning, die integration, and interconnect. These methodologies can be used for improving time-to-market and trade-off between performance and cost. In this paper, two prototypes of stacking CPU and memory dies are demonstrated with 15% performance gain and 30% average point-to-point distance reduction.
本文展示了用于移动和高性能计算应用的系统集成芯片(SoIC)的下一代设计和技术协同优化(DTCO),其中SoIC技术被提出将具有不同功能和技术的多芯片集成到单个SoC芯片中。新的DTCO包括整体芯片划分、芯片集成和互连。这些方法可用于缩短上市时间,并在性能和成本之间进行权衡。本文演示了两种堆叠CPU和内存芯片的原型,性能提高了15%,平均点对点距离减少了30%。
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引用次数: 8
期刊
2020 IEEE International Electron Devices Meeting (IEDM)
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