首页 > 最新文献

2020 IEEE International Electron Devices Meeting (IEDM)最新文献

英文 中文
A Deep Learning Enabled Universal DPD System 基于深度学习的通用DPD系统
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9371952
C. I, Yingchao Lin, Guizhen Wang
Facing the severe power consumption and energy efficiency challenges in 5G era, a novel DPD solution enabled by deep learning and big data is proposed. This is a flexible system suitable for various wireless network architectures and diverse application scenarios. The architecture, mechanism and deployment strategy along with its advantages are presented. Preliminary validation and analyses are also illustrated for the feasibility.
面对5G时代严峻的功耗和能效挑战,提出了一种基于深度学习和大数据的DPD解决方案。这是一个灵活的系统,适用于各种无线网络架构和各种应用场景。介绍了该系统的体系结构、机制和部署策略,以及其优点。对该方法的可行性进行了初步验证和分析。
{"title":"A Deep Learning Enabled Universal DPD System","authors":"C. I, Yingchao Lin, Guizhen Wang","doi":"10.1109/IEDM13553.2020.9371952","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371952","url":null,"abstract":"Facing the severe power consumption and energy efficiency challenges in 5G era, a novel DPD solution enabled by deep learning and big data is proposed. This is a flexible system suitable for various wireless network architectures and diverse application scenarios. The architecture, mechanism and deployment strategy along with its advantages are presented. Preliminary validation and analyses are also illustrated for the feasibility.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116357375","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Surface Wave and Lamb Wave Acoustic Devices on Heterogenous Substrate for 5G Front-Ends 5G前端异质基板表面波和兰姆波声学器件
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372128
Hongyan Zhou, Shibin Zhang, Zhongxu Li, Kai Huang, Pengcheng Zheng, Jinbo Wu, Chen Shen, Liping Zhang, T. You, Lianghui Zhang, Kang Liu, Huarui Sun, Hongtao Xu, Xiaomeng Zhao, X. Ou
We demonstrate groups of surface wave (SH0 mode) and Lamb wave (S0 mode) acoustic devices on lithium niobate thin films on silicon carbide (LNOSiC) heterogeneous substrate. The 4-inch LNOSiC with an excellent thermal transport property is prepared by ion-cutting process. The fabricated acoustic resonators on the LNOSiC substrate show scalable resonances from 2.0 to 4.72 GHz, in which the SH0 (S0) mode resonator shows a $k_t^2$ of 24.1% (15.5%) and a maximum Bode-Q of 976 (577) at 2.54 (3.56) GHz. Moreover, the phase velocity (Vp) of the SH0 (S0) mode is greater than 5000 (6400) m/s, which is about 1.25 (1.6) times higher than that of the conventional SAWs, so as the operating frequency. The filter with a center frequency of 2.62 GHz, an insertion loss (IL) of 1.06 dB, and a 3-dB fractional bandwidth (FBW) of 12.6% (three times larger than that of the conventional SAWs) is also achieved. The acoustic devices on heterogeneous substrate are very promising for high frequency, wideband and high power 5G front-ends.
我们在碳化硅(LNOSiC)非均质衬底上的铌酸锂薄膜上展示了表面波(SH0模式)和兰姆波(S0模式)声学器件群。采用离子切割工艺制备了具有优异热输运性能的4英寸LNOSiC材料。在LNOSiC衬底上制备的声学谐振器在2.0 ~ 4.72 GHz范围内具有可扩展性,其中SH0 (S0)模式谐振器在2.54 (3.56)GHz处的$k_t^2$为24.1%(15.5%),最大Bode-Q为976(577)。SH0 (S0)模式的相速度(Vp)大于5000 (6400)m/s,是常规saw的1.25(1.6)倍,工作频率也随之提高。该滤波器的中心频率为2.62 GHz,插入损耗(IL)为1.06 dB, 3db分数带宽(FBW)为12.6%(是传统saw的3倍)。异质基板上的声学器件在高频、宽带、大功率5G前端中具有广阔的应用前景。
{"title":"Surface Wave and Lamb Wave Acoustic Devices on Heterogenous Substrate for 5G Front-Ends","authors":"Hongyan Zhou, Shibin Zhang, Zhongxu Li, Kai Huang, Pengcheng Zheng, Jinbo Wu, Chen Shen, Liping Zhang, T. You, Lianghui Zhang, Kang Liu, Huarui Sun, Hongtao Xu, Xiaomeng Zhao, X. Ou","doi":"10.1109/IEDM13553.2020.9372128","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372128","url":null,"abstract":"We demonstrate groups of surface wave (SH0 mode) and Lamb wave (S0 mode) acoustic devices on lithium niobate thin films on silicon carbide (LNOSiC) heterogeneous substrate. The 4-inch LNOSiC with an excellent thermal transport property is prepared by ion-cutting process. The fabricated acoustic resonators on the LNOSiC substrate show scalable resonances from 2.0 to 4.72 GHz, in which the SH0 (S0) mode resonator shows a $k_t^2$ of 24.1% (15.5%) and a maximum Bode-Q of 976 (577) at 2.54 (3.56) GHz. Moreover, the phase velocity (Vp) of the SH0 (S0) mode is greater than 5000 (6400) m/s, which is about 1.25 (1.6) times higher than that of the conventional SAWs, so as the operating frequency. The filter with a center frequency of 2.62 GHz, an insertion loss (IL) of 1.06 dB, and a 3-dB fractional bandwidth (FBW) of 12.6% (three times larger than that of the conventional SAWs) is also achieved. The acoustic devices on heterogeneous substrate are very promising for high frequency, wideband and high power 5G front-ends.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"65 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125443901","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 22
High Speed Memory Operation in Channel-Last, Back-gated Ferroelectric Transistors 最后通道背控铁电晶体管的高速存储器操作
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9371940
Abhishek A. Sharma, B. Doyle, H. Yoo, I. Tung, J. Kavalieros, M. Metz, M. Reshotko, P. Majhi, Tobias L. Brown-Heft, Yu-Jin Chen, V. Le
Scaled ferroelectric transistors (Lg =76 nm) in a back- gated configuration are fabricated with a channel-last process flow. Using this approach, optimization of the ferroelectric gate oxide film can be decoupled from that of the semiconductor channel to reduce parasitic interfaces. As a result, ferroelectric transistors with 3σ memory window for fast programming time of 10 ns (including an instantaneous read-after-write) at 1.8 V and high endurance of 1012 cycles are demonstrated for the first time.
采用通道末端工艺流程制备了背门控结构的尺度铁电晶体管(Lg =76 nm)。利用这种方法,优化的铁电栅氧化膜可以与半导体沟道解耦,以减少寄生界面。结果表明,在1.8 V电压下,具有3σ存储窗口的铁电晶体管可实现10 ns的快速编程时间(包括瞬时读后写)和1012个周期的高寿命。
{"title":"High Speed Memory Operation in Channel-Last, Back-gated Ferroelectric Transistors","authors":"Abhishek A. Sharma, B. Doyle, H. Yoo, I. Tung, J. Kavalieros, M. Metz, M. Reshotko, P. Majhi, Tobias L. Brown-Heft, Yu-Jin Chen, V. Le","doi":"10.1109/IEDM13553.2020.9371940","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9371940","url":null,"abstract":"Scaled ferroelectric transistors (Lg =76 nm) in a back- gated configuration are fabricated with a channel-last process flow. Using this approach, optimization of the ferroelectric gate oxide film can be decoupled from that of the semiconductor channel to reduce parasitic interfaces. As a result, ferroelectric transistors with 3σ memory window for fast programming time of 10 ns (including an instantaneous read-after-write) at 1.8 V and high endurance of 1012 cycles are demonstrated for the first time.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"177 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124396866","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 29
Extended-Gate FET cortisol sensor for stress disorders based on aptamers-decorated graphene electrode: Fabrication, Experiments and Unified Analog Predictive Modeling 基于适配体修饰石墨烯电极的应激障碍扩展栅极场效应晶体管皮质醇传感器:制造、实验和统一模拟预测建模
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372063
L. Capua, S. Sheibani, S. Kamaei, J. Zhang, A. Ionescu
In this work we report the fabrication, characterization and validation of a cortisol biosensor, together with a unified predictive calibrated model. We demonstrated the possibility of using a classical submicron semiconductor FET as the transducer for a cortisol biosensor, extending its gate with a graphene on platinum electrode decorated with cortisol specific aptamers. The sensor outperforms the so far any reported cortisol sensors, in terms of performance and integration capability: (i) we report sensor validation over 4 orders of concertation (1 nM - 10 μM, matching human sweat concentration range), (ii) with excellent voltage (14.7 mV/dec.) and current (80% relative change with respect baseline) sensitivity, (iii) low drift, smaller than 10 mV/h, (iv) low power consumption (sub-nW DC power), (v) record low detection limit (LOD) for cortisol of 0.2nM, and (vi) selectivity over other hormones such as testosterone. Moreover, we have developed and validated the first unified compact analog predictive calibrated model for cortisol FET sensors based on experimental data, valid from weak to strong inversion, and able to capture the output current dependence on hormone concentrations. In addition, this model is accurate in the prediction of ID, gm and transconductance efficiency, ID/gm, enabling simulation and optimization of analog design readout, together with power and signal-to-noise ratio trade-offs.
在这项工作中,我们报告了皮质醇生物传感器的制造,表征和验证,以及统一的预测校准模型。我们展示了使用经典的亚微米半导体场效应晶体管作为皮质醇生物传感器的换能器的可能性,并将其栅极扩展为石墨烯在铂电极上,并用皮质醇特异性适配体装饰。该传感器在性能和集成能力方面优于迄今为止任何报道的皮质醇传感器:(i)我们报告了传感器在4个量级浓度(1 nM - 10 μM,与人体汗液浓度范围相匹配)下的验证,(ii)具有优异的电压(14.7 mV/ 12)和电流(与基线相对变化80%)灵敏度,(iii)低漂移,小于10 mV/h, (iv)低功耗(亚nw直流功率),(v)对皮质醇的最低检测限(LOD)为0.2nM, (vi)优于其他激素(如睾酮)。此外,我们基于实验数据开发并验证了第一个统一的紧凑模拟预测校准皮质醇FET传感器模型,该模型从弱到强反转有效,并且能够捕获对激素浓度的输出电流依赖。此外,该模型在预测ID, gm和跨导效率,ID/gm方面是准确的,可以模拟和优化模拟设计读出,以及功率和信噪比权衡。
{"title":"Extended-Gate FET cortisol sensor for stress disorders based on aptamers-decorated graphene electrode: Fabrication, Experiments and Unified Analog Predictive Modeling","authors":"L. Capua, S. Sheibani, S. Kamaei, J. Zhang, A. Ionescu","doi":"10.1109/IEDM13553.2020.9372063","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372063","url":null,"abstract":"In this work we report the fabrication, characterization and validation of a cortisol biosensor, together with a unified predictive calibrated model. We demonstrated the possibility of using a classical submicron semiconductor FET as the transducer for a cortisol biosensor, extending its gate with a graphene on platinum electrode decorated with cortisol specific aptamers. The sensor outperforms the so far any reported cortisol sensors, in terms of performance and integration capability: (i) we report sensor validation over 4 orders of concertation (1 nM - 10 μM, matching human sweat concentration range), (ii) with excellent voltage (14.7 mV/dec.) and current (80% relative change with respect baseline) sensitivity, (iii) low drift, smaller than 10 mV/h, (iv) low power consumption (sub-nW DC power), (v) record low detection limit (LOD) for cortisol of 0.2nM, and (vi) selectivity over other hormones such as testosterone. Moreover, we have developed and validated the first unified compact analog predictive calibrated model for cortisol FET sensors based on experimental data, valid from weak to strong inversion, and able to capture the output current dependence on hormone concentrations. In addition, this model is accurate in the prediction of ID, gm and transconductance efficiency, ID/gm, enabling simulation and optimization of analog design readout, together with power and signal-to-noise ratio trade-offs.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127777584","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Nanophotonic sensor implants with 3D hybrid periodic-amorphous photonic crystals for wide-angle monitoring of long-term in-vivo intraocular pressure 三维周期性非晶态混合光子晶体纳米光子传感器植入物用于长期体内眼压的广角监测
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372016
R. Siddique, L. Liedtke, H. Park, S. Y. Lee, H. Raniwala, D. Y. Park, D. Lim, H. Choo
Glaucoma, one of the leading cause of irreversible blindness, is largely caused by an elevated intraocular pressure (IOP). However, current IOP monitoring techniques inherit major disadvantages such as imprecision, no real or long time monitoring, and difficult readout. Here, we report on a highly miniaturized (200 um thick) optomechanical nanophotonic sensor implant for long-term, continuous and on-demand IOP monitoring. This IOP sensor is made of a flexible 3D hybrid photonic crystals (HPC) that functions as a pressure-sensitive optical resonator (0.1 nm/mm Hg) and delivers IOP readings when interrogated with near-infrared light with an average accuracy of 0.56 mm Hg over the range of 0–40 mm Hg. A new fabrication process is developed using colloidal self-assembly leading to a single step formation of hybrid periodic and amorphous layers exploiting the inverse process of a drying "coffee-stain" effect. The HPC results in a wide-angle strong resonance of ±40° ensuring an easy and accurate remote and long readout distance. 8 sensors were mounted inside the anterior chamber in New Zealand white rabbits and provided continuous, accurate measurements of IOP with handheld detector for up to 6 months with no signs of inflammation.
青光眼是不可逆失明的主要原因之一,主要由眼压升高引起。然而,目前的IOP监测技术存在着不精确、不能实时监测或长时间监测、读数困难等主要缺点。在这里,我们报道了一种高度小型化(200um厚)的光机械纳米光子传感器植入物,用于长期、连续和按需监测IOP。该IOP传感器由柔性3D混合光子晶体(HPC)制成,可作为压敏光学谐振器(0.1 nm/mm Hg),并在近红外光下提供IOP读数,在0-40 mm Hg范围内平均精度为0.56 mm Hg。利用胶体自组装技术开发了一种新的制造工艺,利用干燥“咖啡渍”效应的逆过程,可一步形成混合周期性和非晶态层。HPC产生±40°的广角强共振,确保轻松准确的远程和长读数距离。在新西兰大白兔的前房内安装8个传感器,用手持探测器连续、准确地测量IOP长达6个月,无炎症迹象。
{"title":"Nanophotonic sensor implants with 3D hybrid periodic-amorphous photonic crystals for wide-angle monitoring of long-term in-vivo intraocular pressure","authors":"R. Siddique, L. Liedtke, H. Park, S. Y. Lee, H. Raniwala, D. Y. Park, D. Lim, H. Choo","doi":"10.1109/IEDM13553.2020.9372016","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372016","url":null,"abstract":"Glaucoma, one of the leading cause of irreversible blindness, is largely caused by an elevated intraocular pressure (IOP). However, current IOP monitoring techniques inherit major disadvantages such as imprecision, no real or long time monitoring, and difficult readout. Here, we report on a highly miniaturized (200 um thick) optomechanical nanophotonic sensor implant for long-term, continuous and on-demand IOP monitoring. This IOP sensor is made of a flexible 3D hybrid photonic crystals (HPC) that functions as a pressure-sensitive optical resonator (0.1 nm/mm Hg) and delivers IOP readings when interrogated with near-infrared light with an average accuracy of 0.56 mm Hg over the range of 0–40 mm Hg. A new fabrication process is developed using colloidal self-assembly leading to a single step formation of hybrid periodic and amorphous layers exploiting the inverse process of a drying \"coffee-stain\" effect. The HPC results in a wide-angle strong resonance of ±40° ensuring an easy and accurate remote and long readout distance. 8 sensors were mounted inside the anterior chamber in New Zealand white rabbits and provided continuous, accurate measurements of IOP with handheld detector for up to 6 months with no signs of inflammation.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129023026","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Dynamics of HfZrO2 Ferroelectric Structures: Experiments and Models HfZrO2铁电结构动力学:实验与模型
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372013
Taekyong Kim, J. D. del Alamo, D. Antoniadis
We have carried out a detailed experimental study of the switching dynamics of HfZrO2 Metal-Ferroelectric-Metal (MFM) and Metal-Ferroelectric-Insulator-Metal (MFIM) structures. In order to extract the intrinsic dynamic response, our experimental methodology has paid close attention to minimizing and calibrating all circuit and sample parasitics. In MFM structures, we have found no evidence of negative capacitance (NC) effect. A new dynamic model based on the multi-domain Preisach model describes well all observed behavior including major and minor charge-voltage loops. Our study also reveals the crucial role that parasitics play in the observed device dynamics and can explain claims of NC effects in MFM structures in the literature. In our MFIM structures, we observe clear NC behavior. We not only confirm the transient quasi-static S-like ferroelectric (FE) charge-field behavior described in the literature, but for the first time, we report a dynamic response that displays a hysteretic behavior in the NC region. A model based on the Landau-Khalatnikov (L-K) equation that incorporates FE dynamics via a phenomenological frictional resistance adequately describes the observed results when that resistance is made dependent on the direction of the voltage drive vs. time. Mitigation of this hysteretic NC behavior will be crucial for the harnessing of NC in practical MOSFETs.
我们对金属-铁电-金属(MFM)和金属-铁电-绝缘体-金属(MFIM)结构的切换动力学进行了详细的实验研究。为了提取固有的动态响应,我们的实验方法密切关注最小化和校准所有电路和样品的寄生。在MFM结构中,我们没有发现负电容效应的证据。一个基于多域Preisach模型的动态模型很好地描述了所有观测到的行为,包括主要和次要的电荷电压环路。我们的研究还揭示了寄生在观察到的器件动力学中发挥的关键作用,并可以解释文献中MFM结构中NC效应的说法。在我们的MFIM结构中,我们观察到明显的NC行为。我们不仅证实了文献中描述的瞬态准静态类s铁电(FE)电荷场行为,而且首次报道了在NC区域显示滞后行为的动态响应。基于Landau-Khalatnikov (L-K)方程的模型,通过现象摩擦阻力结合了FE动力学,充分描述了当电阻依赖于电压驱动与时间的方向时所观察到的结果。缓解这种滞后的NC行为对于在实际的mosfet中利用NC至关重要。
{"title":"Dynamics of HfZrO2 Ferroelectric Structures: Experiments and Models","authors":"Taekyong Kim, J. D. del Alamo, D. Antoniadis","doi":"10.1109/IEDM13553.2020.9372013","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372013","url":null,"abstract":"We have carried out a detailed experimental study of the switching dynamics of HfZrO2 Metal-Ferroelectric-Metal (MFM) and Metal-Ferroelectric-Insulator-Metal (MFIM) structures. In order to extract the intrinsic dynamic response, our experimental methodology has paid close attention to minimizing and calibrating all circuit and sample parasitics. In MFM structures, we have found no evidence of negative capacitance (NC) effect. A new dynamic model based on the multi-domain Preisach model describes well all observed behavior including major and minor charge-voltage loops. Our study also reveals the crucial role that parasitics play in the observed device dynamics and can explain claims of NC effects in MFM structures in the literature. In our MFIM structures, we observe clear NC behavior. We not only confirm the transient quasi-static S-like ferroelectric (FE) charge-field behavior described in the literature, but for the first time, we report a dynamic response that displays a hysteretic behavior in the NC region. A model based on the Landau-Khalatnikov (L-K) equation that incorporates FE dynamics via a phenomenological frictional resistance adequately describes the observed results when that resistance is made dependent on the direction of the voltage drive vs. time. Mitigation of this hysteretic NC behavior will be crucial for the harnessing of NC in practical MOSFETs.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"139 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132671365","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
The Wonderful World of Designer Ge Quantum Dots 设计师葛量子点的奇妙世界
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372027
I-Hsiang Wang, P. Hong, K. Peng, Horng-Chih Lin, T. George, Pei-Wen Li
Starting with our remarkable discovery of spherical germanium (Ge) quantum dot (QD) formation, we have embarked on an exciting journey of further discovery, all the while maintaining CMOS-compatible processes. We have taken advantage of the many peculiar and symbiotic interactions of Si, Ge and O interstitials to create a novel portfolio of electronic, photonic and quantum computing devices. This paper summarizes several of these completely new and counter-intuitive accomplishments. Using a coordinated combination of lithographic patterning and self-assembly, size-tunable spherical Ge QDs were controllably placed at designated spatial locations within Si-containing layers. We exploited the exquisite control available through the thermal oxidation of Si1-xGex patterned structures in proximity to Si3N4/Si layers. Our so-called "designer" Ge QDs have succeeded in opening up myriad device possibilities, including paired QDs for qubits, single-hole transistors (SHTs) for charge sensing, photodetectors and light-emitters for Si photonics, and junctionless (JL) FETs using standard Si processing.
从我们非凡的球形锗(Ge)量子点(QD)形成的发现开始,我们已经踏上了进一步发现的激动人心的旅程,同时保持了cmos兼容的工艺。我们利用Si, Ge和O的许多特殊的共生相互作用来创造一个新的电子,光子和量子计算设备组合。本文总结了这些全新的、反直觉的成就。利用光刻和自组装的协调组合,可调节尺寸的球形锗量子点被可控地放置在含硅层内的指定空间位置。我们利用了通过Si3N4/Si层附近的Si1-xGex图案结构的热氧化提供的精细控制。我们所谓的“设计师”Ge量子点已经成功地开辟了无数器件的可能性,包括用于量子比特的配对量子点,用于电荷传感的单孔晶体管(sht),用于硅光子学的光电探测器和发光体,以及使用标准硅处理的无结场效应管(JL)。
{"title":"The Wonderful World of Designer Ge Quantum Dots","authors":"I-Hsiang Wang, P. Hong, K. Peng, Horng-Chih Lin, T. George, Pei-Wen Li","doi":"10.1109/IEDM13553.2020.9372027","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372027","url":null,"abstract":"Starting with our remarkable discovery of spherical germanium (Ge) quantum dot (QD) formation, we have embarked on an exciting journey of further discovery, all the while maintaining CMOS-compatible processes. We have taken advantage of the many peculiar and symbiotic interactions of Si, Ge and O interstitials to create a novel portfolio of electronic, photonic and quantum computing devices. This paper summarizes several of these completely new and counter-intuitive accomplishments. Using a coordinated combination of lithographic patterning and self-assembly, size-tunable spherical Ge QDs were controllably placed at designated spatial locations within Si-containing layers. We exploited the exquisite control available through the thermal oxidation of Si1-xGex patterned structures in proximity to Si3N4/Si layers. Our so-called \"designer\" Ge QDs have succeeded in opening up myriad device possibilities, including paired QDs for qubits, single-hole transistors (SHTs) for charge sensing, photodetectors and light-emitters for Si photonics, and junctionless (JL) FETs using standard Si processing.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130693000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Dual gate synthetic WS2 MOSFETs with 120μS/μm Gm 2.7μF/cm2 capacitance and ambipolar channel 双栅合成WS2 mosfet,电容为120μS/μm Gm, 2.7μF/cm2,双极通道
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372055
D. Lin, Xiangyu Wu, D. Cott, D. Verreck, B. Groven, S. Sergeant, Q. Smets, S. Sutar, I. Asselberghs, I. Radu
We have engineered dual gate WS2 transistors with scaled top and back gate stacks based on a surface physisorption ALD approach for advanced logic applications. Connected dual gate MOSFET operation with a 2ML WS2 channel reaches 210μA/um drain current and 2.7μF/cm2 capacitance (>3.4×1013/cm2 sheet charge density) at 3V gate bias, with >108 on-off ratio, 120μS/um max. transconductance and 109mV/dec sub-threshold swing at 100nm Lch. This dual gate design enables us to explore EOT scaling, ambipolar I-V and C-V(capacitance-voltage) response on CVD WS2 channel.
我们设计了双栅极WS2晶体管,基于表面物理吸收ALD方法,具有缩放的顶部和后门堆栈,用于高级逻辑应用。采用2ML WS2通道的双栅极MOSFET工作,在3V栅极偏置下可达到210μA/um漏极电流和2.7μF/cm2电容(>3.4×1013/cm2片电荷密度),通断比>108,最大120μS/um。在100nm Lch下的跨导和109mV/dec亚阈值振荡。这种双栅极设计使我们能够在CVD WS2通道上探索EOT缩放,双极性I-V和C-V(电容电压)响应。
{"title":"Dual gate synthetic WS2 MOSFETs with 120μS/μm Gm 2.7μF/cm2 capacitance and ambipolar channel","authors":"D. Lin, Xiangyu Wu, D. Cott, D. Verreck, B. Groven, S. Sergeant, Q. Smets, S. Sutar, I. Asselberghs, I. Radu","doi":"10.1109/IEDM13553.2020.9372055","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372055","url":null,"abstract":"We have engineered dual gate WS2 transistors with scaled top and back gate stacks based on a surface physisorption ALD approach for advanced logic applications. Connected dual gate MOSFET operation with a 2ML WS2 channel reaches 210μA/um drain current and 2.7μF/cm2 capacitance (>3.4×1013/cm2 sheet charge density) at 3V gate bias, with >108 on-off ratio, 120μS/um max. transconductance and 109mV/dec sub-threshold swing at 100nm Lch. This dual gate design enables us to explore EOT scaling, ambipolar I-V and C-V(capacitance-voltage) response on CVD WS2 channel.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130706409","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Ultra-Low Power Flexible Precision FeFET Based Analog In-Memory Computing 基于超低功耗柔性精确场效应晶体管的内存模拟计算
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372124
T. Soliman, F. Müller, T. Kirchner, T. Hoffmann, H. Ganem, E. Karimov, T. Ali, M. Lederer, C. Sudarshan, T. Kämpfe, A. Guntoro, N. Wehn
This paper presents an efficient crossbar design and implementation intended for analog compute-in-memory (ACiM) acceleration of artificial neural networks based on ferroelectric FET (FeFET) technology. The novel mixed signal blocks presented in this work reduce the device-to-device variation and are optimized for low area, low power and high throughput. In addition, we illustrate the operation and programmability of the crossbar that adopts bit decomposition techniques for MAC operation. Our crossbar based ACiM accelerator achieves a record peak performance of 13714 TOPS/W.
本文提出了一种基于铁电场效应管(FeFET)技术的高效交叉棒设计和实现,用于模拟内存计算(ACiM)加速的人工神经网络。本工作中提出的新型混合信号块减少了器件之间的差异,并针对低面积、低功耗和高吞吐量进行了优化。此外,我们还说明了采用位分解技术进行MAC操作的十字棒的操作和可编程性。我们基于交叉棒的ACiM加速器达到了13714 TOPS/W的创纪录峰值性能。
{"title":"Ultra-Low Power Flexible Precision FeFET Based Analog In-Memory Computing","authors":"T. Soliman, F. Müller, T. Kirchner, T. Hoffmann, H. Ganem, E. Karimov, T. Ali, M. Lederer, C. Sudarshan, T. Kämpfe, A. Guntoro, N. Wehn","doi":"10.1109/IEDM13553.2020.9372124","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372124","url":null,"abstract":"This paper presents an efficient crossbar design and implementation intended for analog compute-in-memory (ACiM) acceleration of artificial neural networks based on ferroelectric FET (FeFET) technology. The novel mixed signal blocks presented in this work reduce the device-to-device variation and are optimized for low area, low power and high throughput. In addition, we illustrate the operation and programmability of the crossbar that adopts bit decomposition techniques for MAC operation. Our crossbar based ACiM accelerator achieves a record peak performance of 13714 TOPS/W.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116581330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 39
28-nm 0.08 mm2/Mb Embedded MRAM for Frame Buffer Memory 28纳米0.08 mm2/Mb嵌入式MRAM帧缓冲存储器
Pub Date : 2020-12-12 DOI: 10.1109/IEDM13553.2020.9372040
S. H. Han, J. Lee, H. Shin, J. Lee, K. Suh, K. Nam, B. Kwon, M. Cho, J. Lee, J. Jeong, J. Park, S. C. Oh, S. O. Park, S. Hwang, S. Pyo, H. Jung, Y. Ji, J. Bak, D. S. Kim, W. S. Ham, Y. Kim, K. Lee, Y. J. Song, G. Koh, Y. Hong, G. Jeong
We present the world-first demonstration of 28-nm embedded MRAM (eMRAM) for frame buffer memory, highlighting the smallest macro size (0.08 mm2/Mb) reported to date. Compared to SRAM that is commonly used for frame buffer memory, eMRAM provides 47% area saving. For frame buffer applications, read disturbance and endurance are the most critical reliability considerations. With magnetic tunnel junction process improvements, we have verified sufficient read disturbance margins and met the endurance requirement (> 1E10 cycles) which corresponds to 10-year continuous usage. Compared to flash-type eMRAM, we have achieved 40% switching current reduction with < 50ns read/write speed.
我们展示了世界上第一个用于帧缓冲存储器的28纳米嵌入式MRAM (eMRAM)演示,突出了迄今为止报道的最小宏尺寸(0.08 mm2/Mb)。与通常用于帧缓冲存储器的SRAM相比,eMRAM可以节省47%的面积。对于帧缓冲应用,读取干扰和持久性是最关键的可靠性考虑因素。随着磁隧道结工艺的改进,我们已经验证了足够的读取干扰裕度,并满足了耐久性要求(> 1E10次循环),相当于连续使用10年。与闪存型eMRAM相比,我们以< 50ns的读写速度实现了40%的开关电流降低。
{"title":"28-nm 0.08 mm2/Mb Embedded MRAM for Frame Buffer Memory","authors":"S. H. Han, J. Lee, H. Shin, J. Lee, K. Suh, K. Nam, B. Kwon, M. Cho, J. Lee, J. Jeong, J. Park, S. C. Oh, S. O. Park, S. Hwang, S. Pyo, H. Jung, Y. Ji, J. Bak, D. S. Kim, W. S. Ham, Y. Kim, K. Lee, Y. J. Song, G. Koh, Y. Hong, G. Jeong","doi":"10.1109/IEDM13553.2020.9372040","DOIUrl":"https://doi.org/10.1109/IEDM13553.2020.9372040","url":null,"abstract":"We present the world-first demonstration of 28-nm embedded MRAM (eMRAM) for frame buffer memory, highlighting the smallest macro size (0.08 mm2/Mb) reported to date. Compared to SRAM that is commonly used for frame buffer memory, eMRAM provides 47% area saving. For frame buffer applications, read disturbance and endurance are the most critical reliability considerations. With magnetic tunnel junction process improvements, we have verified sufficient read disturbance margins and met the endurance requirement (> 1E10 cycles) which corresponds to 10-year continuous usage. Compared to flash-type eMRAM, we have achieved 40% switching current reduction with < 50ns read/write speed.","PeriodicalId":415186,"journal":{"name":"2020 IEEE International Electron Devices Meeting (IEDM)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2020-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131532145","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
期刊
2020 IEEE International Electron Devices Meeting (IEDM)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1