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Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)最新文献

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Investigation of 2-dimensional charge distribution on dielectric surface in vacuum by real-time measurement technique 真空介质表面二维电荷分布的实时测量研究
K. Kato, S. Ito, Y. Yamano, Y. Hakamata, H. Okubo
For the establishment of the vacuum insulation technique, the electrical insulation characteristics under the existence of the solid insulator need to be given attention. In particular, a study of a charging mechanism on the solid surface in vacuum is very important. For this reason, we measured a 2-dimensional surface charge distribution using a real-time measurement technique. Under electron beam irradiation to the dielectric surface, we measured the time-transition of surface charge accumulation by electrostatic probes. By varying the electron beam current and the beam energy, we investigated the dependence of such parameters on the charging process. From the measurement results, we clarified that such a measurement technique allowed us to obtain the time varying 2D charging characteristics, which resulted in the clarification of the charging mechanism caused by electron irradiation in vacuum.
对于真空绝缘技术的建立,需要关注固体绝缘子存在下的电绝缘特性。特别是研究真空中固体表面的带电机理是非常重要的。因此,我们使用实时测量技术测量了二维表面电荷分布。在电子束辐照下,用静电探针测量了介质表面电荷积累的时跃迁。通过改变电子束电流和束流能量,研究了这些参数对充电过程的依赖关系。从测量结果中,我们澄清了这种测量技术可以让我们获得随时间变化的二维充电特性,从而澄清了真空中电子辐照引起的充电机制。
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引用次数: 0
High field insulation relevant to vacuum microelectronic devices 与真空微电子器件相关的高场绝缘
T. Sudarshan, Xianyun Ma, P. Muzykov
This paper briefly introduces the authors' recent results on high field vacuum insulation relevant to vacuum microelectronics. It addresses the key factors that contribute to the failure of the vacuum gap insulation. Approaches to the development of specific solutions to improve the vacuum gap breakdown voltages are presented. Solutions to alleviate the edge breakdown effect in the thin-film vacuum gap and to inhibit the formation of electrical activity in the spacer triple junction area were proven to be very effective in improving the vacuum insulation performance of vacuum microelectronics. The influence of the presence of an electron beam on the plain-vacuum-gap insulation is also reported.
本文简要介绍了作者在真空微电子领域高场真空绝缘方面的最新研究成果。它解决了导致真空间隙绝缘失效的关键因素。提出了提高真空间隙击穿电压的具体解决方案。缓解薄膜真空间隙边缘击穿效应和抑制间隔层三结区电活动形成的解决方案对提高真空微电子器件的真空绝缘性能是非常有效的。本文还报道了电子束的存在对平面真空间隙绝缘的影响。
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引用次数: 7
Plasma filtration of vacuum arc droplets 真空电弧液滴的等离子体过滤
P. Shanin, N. Koval, A. V. Kozirev, I. Goncharenko, J. Langner, S. Grigoriev
Theoretical and experimental studies have been performed on the effect of the gas-discharge plasma on the vacuum arc droplet fraction arriving at the sample in plasma-assisted deposition of TiN coatings. It has been shown that the number of droplets on a negatively biased sample decreases four or five times if the droplet flow passes through the plasma of a low-pressure nonself-sustained arc discharge having a higher electron temperature than the plasma of the vacuum arc. Possible mechanisms for the observed plasma filtration of the droplet fraction of a vacuum arc are discussed.
对等离子体辅助沉积TiN涂层中气体放电等离子体对到达样品的真空弧滴分数的影响进行了理论和实验研究。结果表明,当液滴流通过电子温度比真空电弧等离子体高的低压非自持续电弧放电等离子体时,负偏置样品上的液滴数量会减少四到五倍。讨论了观察到的等离子体过滤真空电弧液滴部分的可能机制。
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引用次数: 2
A radial graded solid insulation structure in vacuum 一种径向梯度真空固体绝热结构
Meng Wang, Jian-jun Deng, G. Dai
A radial graded solid insulation structure was designed and applied in 2.4 MeV electron injector. It operates in high vacuum, which is in the order of 10/sup -5/ Torr. The pulsewidth of applied voltage is 90 ns and its magnitude is -1.2 MV. Simulation with ANSYS code was made on the distribution of electric field. A series of fundamental experiments was performed to study characteristics of the solid insulators in vacuum. A detailed investigation has been made about the some important factors which affect the flashover voltage. The theoretical results and some disciplinarian methods in designing of radial insulation system have been obtained.
设计了径向梯度固体绝缘结构,并应用于2.4 MeV电子注入器。它在高真空下工作,其数量级为10/sup -5/ Torr。施加电压的脉宽为90ns,其幅度为-1.2 MV。利用ANSYS软件对电场分布进行了仿真。为研究固体绝缘子在真空中的特性,进行了一系列的基础实验。对影响闪络电压的几个重要因素进行了详细的研究。得到了径向保温系统设计的理论结果和一些有规律的方法。
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引用次数: 1
Present state of the theory of vacuum arcs 真空电弧理论的现状
I. Beilis
The understanding of vacuum arc processes including the cathode and anode phenomena with cold and hot electrodes as well as the processes in interelectrode plasma is presented. In the case of cold electrodes, the current continuity mechanism, the nature of mass loss, spot motion, plasma jet generation in the spots and the cathode potential drop are reviewed. The explosive and gas-dynamical models of cathode spot operation are described. In the case of hot electrodes, the diffuse current continuity mechanism is analyzed. The present state of electrical and plasma characteristics of high current arcs in magnetic fields are discussed.
介绍了真空电弧过程,包括冷电极和热电极的阴极和阳极现象,以及电极间等离子体的过程。在冷电极的情况下,综述了电流的连续性机制、质量损失的性质、斑点运动、斑点中等离子体射流的产生和阴极电位下降。描述了阴极点操作的爆炸模型和气体动力学模型。在热电极的情况下,分析了扩散电流的连续性机制。讨论了磁场中大电流电弧的电特性和等离子体特性的现状。
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引用次数: 2
Electrical conductivity of CuCr alloys [for vacuum switches] CuCr合金的电导率[真空开关用]
Z. Tie, H. Jun-jia, Z. Jiyan
Based on the resistance theory of metals, the influence of phase structure on the electrical conductivity of CuCr alloys is analyzed. The electrical conductivity is calculated under different phase structure models. By comparison with measurements, the utility of these models are discussed. Some influencing factors on the conductivity of CuCr are summarized. Several ways to improve the electric conductivity of CuCr alloys for vacuum switch applications are presented.
基于金属电阻理论,分析了相结构对CuCr合金电导率的影响。计算了不同相结构模型下的电导率。通过与实测数据的比较,讨论了这些模型的实用性。总结了影响CuCr电导率的一些因素。提出了几种提高真空开关用CuCr合金电导率的方法。
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引用次数: 2
An improved automatic finite element mesh generation for arbitrary multiply connected domains in electric field analysis of vacuum interrupters 真空灭流器电场分析中任意多连通域有限元网格自动生成的改进方法
Wang Shuhong, Jia Shenli, Zhao Luhual, Qiu Jie, Liu Qinfu
This paper presents an improved fully automatic finite element mesh generation for arbitrary multiply connected domains in vacuum interrupter electric field analysis. This method is based on the advancing front method. It doesn't need to apply the aided lines between the solution domain boundary with the subdomain boundaries and the coherence of the finite elements to the subdomain boundary is satisfied automatically. This method deals with the subdomains directly in mesh processing. The characteristic constraints such as polylines and fixed nodes involved in solution domain are discussed by this method in this paper. Finally, a 110 kV vacuum interrupter is applied by the method. It is shown that the improved mesh method is correct, simple and universal.
提出了一种改进的真空灭弧电场分析中任意多连通域的全自动有限元网格生成方法。该方法是在前沿推进法的基础上发展起来的。该方法不需要在解域边界与子域边界之间施加辅助线,且能自动满足有限元与子域边界的相干性。该方法在网格处理中直接处理子域。本文用该方法讨论了解域中涉及的折线和固定节点等特征约束。最后,应用该方法设计了一台110kv真空灭流器。结果表明,改进后的网格划分方法正确、简单、通用性强。
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引用次数: 0
A nonstationary model for vacuum arcs with refractory hot anode 难熔热阳极真空电弧的非平稳模型
I. Beilis, R. Boxman, S. Goldsmith
A new form of arc, termed the refractory hot anode vacuum arc (HRAVA), was analyzed. The HRAVA has a thermally isolated anode and a cooled cathode. The arc operates initially as a multi-cathode-spot vacuum arc, and material from the cathode spot jets deposits on the anode. During a transition stage, the arc heats the anode and evaporates the material deposited thereon, forming an anode plasma plume. A system of time-dependent equations were formulated and solved for the heat flux from the plasma to the anode surface, heat conduction within the anode, electron energy balance and heavy particle conservation in the anode plasma. The calculations show that the plasma electron temperature decreases while the anode temperature and plasma density increase with time. The model results agree well with previously measured data.
分析了一种新的电弧形式——难熔热阳极真空电弧(HRAVA)。HRAVA具有热隔离阳极和冷却阴极。电弧最初作为一个多阴极点真空电弧运行,阴极点喷射的材料沉积在阳极上。在过渡阶段,电弧加热阳极并蒸发沉积在阳极上的材料,形成阳极等离子体羽流。建立并求解了等离子体到阳极表面的热流、阳极内部热传导、阳极等离子体中的电子能量平衡和重粒子守恒等与时间有关的方程组。计算表明,等离子体电子温度随时间的增加而降低,阳极温度和等离子体密度随时间的增加而增加。模型结果与以往的实测数据吻合较好。
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引用次数: 0
Control of charge-up on insulating glass in vacuum due to plasma processing 真空中等离子体处理对中空玻璃充放电的控制
H. Fujii
In order to control charge-up on insulating glasses used for high-voltage vacuum equipment, H/sub 2/ plasma processing on the glass surface was studied. Borosilicate glass plates were used as test samples. The glasses were exposed to H/sub 2/ plasma produced by AC (60 Hz) voltage application. The surface resistivity of the glass was deceased with H/sub 2/ plasma processing time. By H/sub 2/ plasma exposure for 20 minutes, the surface resistivity was reduced from 10/sup 17/ /spl Omega/ to 10/sup 12/ /spl Omega/. Due to the reduction of the surface resistivity, charge-up of the glass irradiated by electron beam can be controlled to the level not to cause surface flashover.
为了控制高压真空设备用中空玻璃的充放电,研究了H/sub - 2/等离子体对玻璃表面的处理。以硼硅酸盐玻璃板为试样。将玻璃暴露在交流(60hz)电压产生的H/sub /等离子体中。玻璃的表面电阻率随H/sub /等离子体处理时间的延长而降低。通过H/sub / 2/等离子体照射20分钟,表面电阻率从10/sup 17/ /spl Omega/降至10/sup 12/ /spl Omega/。由于表面电阻率的降低,电子束辐照玻璃的充电可以控制在不引起表面闪络的水平。
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引用次数: 0
Effect of the magnetic field on the anode spot formation in the vacuum arc 磁场对真空电弧中阳极斑点形成的影响
K. Ulyanov, V. Fedorov, Ye.F. Prozorov
The aim of the work is to obtain quantitative experimental data on the process of suppressing the anode spot of a vacuum arc by a longitudinal magnetic field and to compare them with theoretical calculations. In addition to this, the authors designed a system of impulse longitudinal magnetic field which exceeds, by many times, the inherent magnetic field of the arc current at a maximum current value.
本文的目的是获得纵向磁场抑制真空电弧阳极光斑过程的定量实验数据,并与理论计算结果进行比较。除此之外,作者还设计了一个脉冲纵向磁场系统,该系统在最大电流值下超过了弧电流固有磁场的许多倍。
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引用次数: 1
期刊
Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)
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