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In situ TEM investigation of nickel catalytic graphitization 镍催化石墨化的原位 TEM 研究
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-13 DOI: 10.1016/j.mtadv.2024.100494
Jaemin Kim, Seungwoo Son, Myeonggi Choe, Zonghoon Lee
With the increasing demand for production of graphitic materials for various applications, it becomes crucial to get a fundamental understanding of how graphene layers grow on metal catalysts. Here, we performed an heating transmission electron microscopy (TEM) study to understand the mechanism of graphitization of amorphous carbon (a-C) on Ni catalyst by following graphene growth at atomic resolution in real time. By discerning the NiC phase from the pure Ni phase during the graphitic carbon growth process, we demonstrate that growth occurs through the carbide graphitization of NiC. Additionally, during the graphitization, Ni diffusion has a crucial effect on the structure of the resulting graphene. Under our experimental conditions, we observed graphene contains islands of multilayers. Based on our experimental results, we suggest a mechanism for graphitization of the a-C/Ni system and explain the dynamics resulting from Ni diffusion. Our study can contribute to the control of graphitization by using Ni catalyst in the production of graphene and other graphitic materials.
随着各种应用领域对石墨材料生产的需求日益增长,从根本上了解石墨烯层如何在金属催化剂上生长变得至关重要。在此,我们进行了一项加热透射电子显微镜(TEM)研究,通过以原子分辨率实时跟踪石墨烯的生长,了解无定形碳(a-C)在镍催化剂上的石墨化机制。通过分辨石墨碳生长过程中的 NiC 相和纯 Ni 相,我们证明了生长是通过 NiC 的碳化物石墨化实现的。此外,在石墨化过程中,镍的扩散对生成的石墨烯的结构有着至关重要的影响。在我们的实验条件下,我们观察到石墨烯含有多层的岛屿。基于我们的实验结果,我们提出了 a-C/Ni 体系的石墨化机制,并解释了镍扩散所产生的动态变化。我们的研究有助于在石墨烯和其他石墨材料的生产中使用镍催化剂来控制石墨化。
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引用次数: 0
Performance improvement of blue light micro-light emitting diodes (< 20 μm) by neutral beam etching process 通过中性束蚀刻工艺提高蓝光微型发光二极管(< 20 μm)的性能
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-11 DOI: 10.1016/j.mtadv.2024.100496
Yu-Hsuan Hsu, Yun-Cheng Hsu, Chien-Chung Lin, Yi-Hsin Lin, Dong-Sing Wuu, Hao-Chung Kuo, Seiji Samukawa, Ray-Hua Horng
In this study, micro-light emitting diodes array (μLEDs) with dimensions of 5 μm and 15 μm chip size were fabricated using Neutral Beam Etching (NBE) processes. Size-dependent issues of μLEDs processed by traditional inductively coupled plasma-reactive ion etching (ICPRIE) were alleviated by NBE technology, which exhibited lower equivalent resistance, turn-on voltage, and Ideality factor as compared with those of μLEDs by ICPRIE. Additionally, higher light output power of μLEDs processed by NBE with both 5 μm and 15 μm resulted in higher EQE 7.6 % and 7.7 % than those of μLEDs processed by ICPRIE. Furthermore, the size effect led to a decrease in EQE values of the ICPRIE sample by 0.4 %, but only a 0.1 % decay in NBE. Overall, samples fabricated by the NBE process exhibited superior optoelectronic characteristics. Finally, non-radiative recombination behaviors on the mesa sidewall were verified by cathodoluminescence analysis, showing significant decay in ICPRIE samples but not in NBE samples. These results demonstrated the potential of the NBE process for fabricating small chip sizes blue-light μLEDs required for high-brightness, high-efficiency, and high-resolution μLED displays.
本研究采用中性束蚀刻(NBE)工艺制造了芯片尺寸分别为 5 μm 和 15 μm 的微型发光二极管阵列(μLED)。通过 NBE 技术,传统电感耦合等离子体反应离子蚀刻(ICPRIE)工艺处理的 μLED 的尺寸相关问题得到了缓解,与 ICPRIE 工艺处理的 μLED 相比,NBE 工艺处理的 μLED 具有更低的等效电阻、导通电压和理想系数。此外,采用 NBE 技术处理的 5 μm 和 15 μm μLED 的光输出功率更高,与采用 ICPRIE 技术处理的 μLED 相比,EQE 分别提高了 7.6% 和 7.7%。此外,尺寸效应导致 ICPRIE 样品的 EQE 值下降了 0.4%,但 NBE 仅下降了 0.1%。总体而言,采用 NBE 工艺制作的样品具有更优越的光电特性。最后,通过阴极发光分析验证了介子侧壁上的非辐射重组行为,结果显示 ICPRIE 样品有显著衰减,而 NBE 样品则没有。这些结果证明了 NBE 工艺在制造高亮度、高效率和高分辨率 μLED 显示器所需的小芯片尺寸蓝光 μLED 方面的潜力。
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引用次数: 0
Strategies for robust electrocatalytic activity of 2D materials: ORR, OER, HER, and CO2RR 增强二维材料电催化活性的策略:ORR、OER、HER 和 CO2RR
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-08 DOI: 10.1016/j.mtadv.2024.100488
Ali Raza, Jahan Zeb Hassan, Usman Qumar, Ayesha Zaheer, Zaheer Ud Din Babar, Vincenzo Iannotti, Antonio Cassinese
Electrocatalysis utilizing 2D materials is an encouraging approach for advancing sustainable energy conversion technologies. This review explores the strategies employed to achieve robust electrocatalytic activity of 2D materials in key reactions, namely, the OER, HER, and CORR. The distinct structural and electrical characteristics of 2D materials offer opportunities for rapid catalytic performance, indicating significant energy efficiency and selectivity. We systematically discuss the factors governing the electrocatalytic efficiency of two-dimensional materials, including their intrinsic properties, surface modification techniques, heterostructure engineering, and the role of defects. Furthermore, we summarize the recent advances in experimental and theoretical studies to understand the fundamental mechanisms of 2D materials with respect to their catalytic behavior. For the HER, OER, and ORR, defect engineering, phase engineering, interface engineering, and heteroatom doping techniques have been explored. In addition, in the case of the CORR, surface modification, surface-structure tuning, and electrolyte and electrolyzer optimization strategies were examined. This review emphasizes prospective two-dimensional materials as efficient and sustainable electrocatalysts for energy conversion processes. Moreover, it provides future insights into this rapidly evolving field and highlights the possible challenges. In conclusion, it aims to serve as a remarkable resource for researchers seeking to harness the potential response of two-dimensional materials for sustainable energy conversion applications.
利用二维材料进行电催化是推进可持续能源转换技术的一种令人鼓舞的方法。本综述探讨了二维材料在关键反应(即 OER、HER 和 CORR)中实现强大电催化活性的策略。二维材料独特的结构和电学特性为实现快速催化性能提供了机会,并显示出显著的能源效率和选择性。我们系统地讨论了影响二维材料电催化效率的因素,包括其固有特性、表面改性技术、异质结构工程以及缺陷的作用。此外,我们还总结了为了解二维材料催化行为的基本机制而进行的实验和理论研究的最新进展。对于 HER、OER 和 ORR,我们探索了缺陷工程、相工程、界面工程和杂原子掺杂技术。此外,还研究了 CORR 的表面改性、表面结构调整以及电解质和电解槽优化策略。本综述强调了二维材料作为能源转换过程中高效、可持续的电催化剂的前景。此外,它还提供了对这一快速发展领域的未来见解,并强调了可能面临的挑战。总之,本综述旨在为寻求利用二维材料的潜在反应进行可持续能源转换应用的研究人员提供重要资源。
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引用次数: 0
First integration of Ni barrier layer for enhanced threshold switching characteristics in Ag/HfO2-based TS device 在基于 Ag/HfO2 的 TS 器件中首次集成镍阻挡层以增强阈值开关特性
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-03 DOI: 10.1016/j.mtadv.2024.100492
Daeyoung Chu, Sanghyun Kang, Gwon Kim, Juho Sung, Jaehyuk Lim, Yejoo Choi, Donghwan Han, Changhwan Shin
Utilizing Ag/HfO with nickel (Ni) as a barrier layer, a novel threshold switching (TS) device is devised to overcome challenges such as low reliability, high threshold voltage, and high leakage current. Compared against an Ag/Ti/HfO-based TS device, the Ag/Ni/HfO-based TS device exhibits improved electrical characteristics: yield enhancement from 31.7 % to 40.0 %, enhanced endurance from ∼10 cycles to ∼300 cycles, and suppression in off-state current (I) from 1.2 × 10 A to 5.2 × 10 A under a high compliance current (e.g., 10 A). The results obtained through transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS), and atomic force microscopy (AFM) support the evidence of those accomplishments. Reducing the effective area of the TS device improves control over erratically generated filaments and the electric field within the switching layer, resulting in enhanced performance such as a reduced threshold voltage (V ∼0.35 V), minimized V variability (∼0.01 V), decreased a threshold current (I, i.e., the leakage current in the off-state before activation, ∼5.2 × 10 A), and maximum conductance (∼5.0 × 10 S) of low-resistance state. These findings suggest that the optimized Ag/Ni/HfO-based TS device can serve as a practical solution for low-power applications.
利用镍(Ni)作为阻挡层的 Ag/HfO 设计了一种新型阈值开关(TS)器件,以克服低可靠性、高阈值电压和高漏电流等挑战。与基于 Ag/Ti/HfO 的 TS 器件相比,基于 Ag/Ni/HfO 的 TS 器件具有更好的电气特性:良率从 31.7% 提高到 40.0%;耐久性从 10 次循环提高到 300 次循环;在高顺从电流(如 10 A)条件下,离态电流 (I) 从 1.2 × 10 A 抑制到 5.2 × 10 A。通过透射电子显微镜(TEM)、能量色散 X 射线光谱(EDS)和原子力显微镜(AFM)获得的结果也证明了这些成就。减小 TS 器件的有效面积可改善对开关层内不规则产生的灯丝和电场的控制,从而提高性能,如降低阈值电压(V ∼ 0.35 V)、最大限度地减少 V 变化(∼ 0.01 V)、减小阈值电流(I,即关断状态下的漏电流)、5.2 × 10 A)和低电阻状态的最大电导(∼5.0 × 10 S)。这些研究结果表明,经过优化的 Ag/Ni/HfO 基 TS 器件可以作为低功耗应用的实用解决方案。
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引用次数: 0
Wet-spinning of reduced graphene oxide composite fiber by mechanical synergistic effect with graphene scrolling method 利用机械协同效应和石墨烯卷绕法湿法纺制还原氧化石墨烯复合纤维
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-05-03 DOI: 10.1016/j.mtadv.2024.100491
Chae-Lin Park, Du Won Kim, Sujin Ryu, Joonmyung Choi, Young-Chul Song, Keon Jung Kim, Sang Won Lee, Seongjae Oh, Doyoung Kim, Young Hwan Bae, Hyun Kim, Seon-Jin Choi, Jaehoon Ko, Shi Hyeong Kim, Hyunsoo Kim
Carbon-based fibers have attracted attention in various field owing to their exceptional properties, including high tensile strength, thermal stability, and electrical conductivity. In particular, graphene-based high-strength fibers are promising materials in aerospace, automotive, and marine sectors. Recently, the hybrid fiber, consisting of carbon nanotubes (CNTs) and graphene with enhanced toughness was reported by deflecting cracks and enabling high deformation. However, complex synthesis and structural optimization of composite fiber with two different materials make challenge for mass production. Here, we introduce a novel graphene composite fiber, consisting of reduced graphene oxide (rGO) and scrolled rGO (SrGO), showing remarkable toughness. A multidimensional-state solution with 2D rGO and 1D SrGO was obtained by using a simple sonication technique. Mass production of high-toughness composite fibers was achieved via wet-spinning, with enhanced toughness attributed to microstructure optimization by controlling the SrGO ratio. Additionally, the use of poly(vinyl alcohol) (PVA) as the matrix facilitated high deformation, resulting in a remarkable 90.7 % increase in mechanical toughness without complex composite material synthesis.
碳基纤维因其卓越的性能,包括高拉伸强度、热稳定性和导电性,在各个领域都备受关注。尤其是石墨烯基高强度纤维,是航空航天、汽车和船舶领域前景广阔的材料。最近,有报道称由碳纳米管(CNT)和石墨烯组成的混合纤维通过偏转裂缝和实现高变形来增强韧性。然而,两种不同材料复合纤维的复杂合成和结构优化给大规模生产带来了挑战。在此,我们介绍一种新型石墨烯复合纤维,它由还原型氧化石墨烯(rGO)和卷曲型氧化石墨烯(SrGO)组成,具有显著的韧性。通过使用简单的超声技术,我们获得了具有二维 rGO 和一维 SrGO 的多维态溶液。通过湿法纺丝实现了高韧性复合纤维的批量生产,通过控制 SrGO 的比例实现了微结构的优化,从而提高了韧性。此外,使用聚乙烯醇(PVA)作为基体可促进高变形,从而在不合成复杂复合材料的情况下显著提高了 90.7% 的机械韧性。
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引用次数: 0
Dynamic and controlled stretching of macroscopic crystalline membranes towards unprecedented levels 宏观晶体膜的动态可控拉伸达到前所未有的水平
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-04-17 DOI: 10.1016/j.mtadv.2024.100489
T.U. Schülli, E Dollekamp, Z Ismaili, N. Nawaz, T. Januel, T. Billo, P. Brumund, H. Djazouli, S.J. Leake, M. Jankowski, V. Reita, M. Rodriguez, L. André, A. Aliane, Y.M. Le Vaillant
Imposing and controlling strain in materials such as semiconductors or ferroelectrics is a promising way to obtain new or enhance existing properties. Although the field of strain engineering has seen a rapid expansion over the last two decades, straining semiconductor membranes over large areas remains a challenge. A generic way of tuning strain and hence band structure and electric or magnetic properties of any crystalline material can be obtained by compression of a composite structure involving poorly compressible elastomers. Mechanically similar to the principle of a hydraulic press, this work proposes a device and describes analytically a methodology to easily strain macroscopic membranes up to unprecedented values. Using X-ray diffraction and Raman spectroscopy, we tuned the biaxial strain in silicon membranes up to a value of 2.1 %, paving the way for new studies in the field of strain related physics, from semiconductors to perovskite oxide multiferroics.
在半导体或铁电体等材料中施加和控制应变是获得新特性或增强现有特性的一种很有前途的方法。虽然应变工程领域在过去二十年中迅速发展,但大面积应变半导体膜仍然是一项挑战。通过压缩涉及可压缩性差的弹性体的复合结构,可以获得调整应变的通用方法,进而调整任何晶体材料的带状结构和电或磁特性。与液压机的原理类似,这项研究提出了一种装置,并通过分析描述了一种方法,可以轻松地将宏观膜的应变值提高到前所未有的水平。利用 X 射线衍射和拉曼光谱,我们将硅膜中的双轴应变调整到了 2.1 % 的值,为应变相关物理学领域的新研究铺平了道路,包括从半导体到过氧化物多铁氧体。
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引用次数: 0
High-throughput design of three-dimensional carbon allotropes with Pmna space group 高通量设计具有 Pmna 空间群的三维碳同素异形体
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-04-17 DOI: 10.1016/j.mtadv.2024.100486
Qingyang Fan, Heng Liu, Chongdan Ren, Sining Yun, Udo Schwingenschlögl
284 carbon allotropes with space group (No. 53) are proposed based on high-throughput calculations and density functional theory. Out of 14,285 initially identified candidates, 284 carbon allotropes are confirmed by structure optimization, removal of repetitive structures, calculation of relative enthalpies, and verification of the mechanical and thermal stabilities. Among them, 135 are metals, 55 are direct band gap semiconductors (in 15 cases with a band gap between 1.0 and 1.5 eV), 46 have three-dimensional conductive channels, 32 are superhard, and 3 are type-I Dirac semimetals.
基于高通量计算和密度泛函理论,提出了 284 个空间群(53 号)的碳同素异形体。在 14285 个初步确定的候选碳同素异形体中,284 个碳同素异形体通过结构优化、去除重复结构、计算相对焓以及验证机械和热稳定性而得到确认。其中 135 种是金属,55 种是直接带隙半导体(15 种的带隙在 1.0 和 1.5 eV 之间),46 种具有三维导电通道,32 种是超硬,3 种是 I 型狄拉克半金属。
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引用次数: 0
Low magnetic noise, easy-to-process polystyrene-grafted amorphous alloy composites for extremely-weak magnetic measurement at ultra-low frequency 低磁噪声、易加工的聚苯乙烯接枝非晶合金复合材料,用于超低频极弱磁场测量
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-04-16 DOI: 10.1016/j.mtadv.2024.100487
Ting Sai, Pengfei Wang, Xiaoying Gu, Xueping Xu, Jinji Sun, Jing Ye
Cobalt-based amorphous alloys (Co-MG) demonstrate ultra-high permeability and remarkably-low power loss, positioning them as promising candidates for shielding (near-) static magnetic fields and addressing accuracy limitations in extremely-weak magnetic measurements. , the brittleness and poor understanding about magnetic performance below 100 Hz have impeded their widespread adoption. To integrate satisfied processing, magnetic and mechanical performances, polystyrene-grafted Co-MG composites are developed. Compared with permalloy-1J85, Co-MG-(-PS_35 %) composite exhibits 40 % increase in initial permeability, 48 % increase in saturation magnetization, 71 % reduction in remanence within shielding area. In contrast to Mn–Zn ferrite, Co-MG-(-PS_35 %) composite demonstrates the power loss and ″/′ values lower by an order of magnitude, resulting in magnetic noises 85 % lower at 1 Hz. Furthermore, the resultant composite maintains similar processing-rheological behaviors and mechanical properties compared with bulk polystyrene. It provides an innovative solution to expand real-world applications for biomagnetic detection, and overcome the sensitivity limitation of extremely-weak magnetic measurement.
钴基非晶合金(Co-MG)具有超高的磁导率和极低的功率损耗,是屏蔽(近)静磁场和解决极弱磁场测量精度限制的理想材料。然而,脆性和对 100 Hz 以下磁性能的不甚了解阻碍了它们的广泛应用。为了综合满足加工、磁性和机械性能的要求,我们开发了聚苯乙烯接枝 Co-MG 复合材料。与 permalloy-1J85 相比,Co-MG-(-PS_35 %)复合材料的初始磁导率提高了 40%,饱和磁化率提高了 48%,屏蔽区内的剩磁降低了 71%。与锰锌铁氧体相比,Co-MG-(-PS_35 %)复合材料的功率损耗和″/′值低了一个数量级,从而使 1 Hz 时的磁噪声降低了 85 %。此外,与块状聚苯乙烯相比,这种复合材料还具有类似的加工流变行为和机械性能。它为拓展生物磁性检测的实际应用提供了创新解决方案,并克服了极弱磁性测量的灵敏度限制。
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引用次数: 0
Emerging hydrogel therapies for translating brain disease: Materials, mechanisms, and recent research 用于转化脑部疾病的新兴水凝胶疗法:材料、机制和最新研究
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-04-10 DOI: 10.1016/j.mtadv.2024.100490
Xinyu Lu, Yi Luo, Xiaochun Hu, Jianjian Chu, Siqi Li, Mengqi Hao, Jianhua Zhuang, Yan Liu, Jie Gao, You Yin
Brain diseases, encompassing neurodegenerative disorders, strokes, and brain tumors, represent significant medical conditions with profound implications for human health. The blood-brain barrier (BBB) and the blood-cerebral-spinal cord barrier (BCSFB) limited drug penetration, poor drug targeting, and limited proliferation and easy death of mature neuronal cells greatly impair regeneration of the central nervous system after the injury, and thus call for more advanced therapeutic strategies in the clinic. Biomedical hydrogel research presents a potentially novel therapeutic approach for the management of brain disorders. Hydrogels are extremely biocompatible scaffolding materials that can be loaded with a variety of drugs for achieving effective treatments for brain disorders and can be customized with different mechanical properties to match the target organ or modulate its environment. This article offers an overview of recent research progress, challenges, and prospective developments in the utilization of hydrogels for treating brain disorders, with the objective of accentuating their potential as an early intervention in the preclinical phase. The unique mechanisms of drug release in hydrogels are examined in detail: extended-release medications, environmental release of drugs, and the material's own activity. An understanding of these mechanisms helps to make more effective drug delivery systems to the brain possible.
脑部疾病包括神经退行性疾病、中风和脑肿瘤,是对人类健康影响深远的重大疾病。血脑屏障(BBB)和血脑脊髓屏障(BCSFB)限制了药物的渗透,药物靶向性差,成熟神经细胞增殖受限且易死亡,这些都极大地影响了中枢神经系统在损伤后的再生,因此临床上需要更先进的治疗策略。生物医学水凝胶研究为治疗脑部疾病提供了一种潜在的新型治疗方法。水凝胶是一种生物相容性极佳的支架材料,可负载多种药物,从而实现对脑部疾病的有效治疗,并可定制不同的机械性能,以匹配目标器官或调节其环境。本文概述了利用水凝胶治疗脑部疾病的最新研究进展、挑战和前瞻性发展,旨在强调水凝胶作为临床前阶段早期干预措施的潜力。研究详细探讨了水凝胶中药物释放的独特机制:缓释药物、药物的环境释放以及材料自身的活性。对这些机制的了解有助于为大脑提供更有效的给药系统。
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引用次数: 0
Performance comparison of InGaN-based 40–80 μm micro-LEDs fabricated with and without plasma etching 使用和不使用等离子刻蚀技术制造的基于 InGaN 的 40-80 μm 微型 LED 的性能比较
IF 1 2区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Pub Date : 2024-03-29 DOI: 10.1016/j.mtadv.2024.100485
Yu-Yun Lo, Yi-Ho Chen, Yun-Cheng Hsu, Tzu-Yi Lee, Yu-Ying Hung, Yu-Cheng Kao, Hsiao-Wen Zan, Dong- Sing Wuu, Hao-Chung Kuo, Seiji Samukawa, Ray-Hua Horng
The fabrication of InGaN-based blue 4✕4 array micro-LEDs (μLEDs) with 40 μm ✕40 μm chip size and 2✕2 array μLEDs with 80 μm ✕80 μm chip size etching by the inductive coupled plasma reactive ion etching (ICPRIE) and defect-free neutral beam etching (NBE) processes was studied in this work. In μLEDs of this size, the influence of defects formation in the sidewalls on EQE was evaluated. There was almost no difference in EQE between μLEDs array etched by the NBE process no matter 40 μm ✕40 μm and 80 μm ✕80 μm, but the dependence was observed in the ICPRIE. Even with this size, it was found that the size effect of EQE is smaller than that in case of using ICPRIE for defect-free neutral beam etching. This impact is substantial since μLED predominantly operated at low current density, around 1–5 A/cm. Consequently, the reduction of defect density, encompassing both internal and sidewall defects, becomes imperative even in 40–80 μm InGaN-based μLEDs. This not only improves the overall efficiency of μLEDs but also fortifies the brightness stability of μLED displays if process etching by NBE. It was also found that the etching shape had an influence on EQE. It could be attributed to fact that the etching profile angle of NBE was more vertical than that of ICPRIE. Because the different angles of the mesa resulted in different light intensity. The μLEDs emitting with a wavelength of 450 nm, the light extraction efficiency and intensity at a mesa angle 58° of NBE etching μLEDs was about 8% lower than those of an angle (38°) of ICPRIE etching μLEDs by simulation.
本研究采用电感耦合等离子体反应离子刻蚀(ICPRIE)和无缺陷中性束刻蚀(NBE)工艺,研究了基于 InGaN 的、芯片尺寸为 40 μm ✕40 μm 的蓝光 4✕4 阵列微型 LED(μLED)和芯片尺寸为 80 μm ✕80 μm 的 2✕2 阵列 μLED。在这种尺寸的 μLED 中,评估了侧壁缺陷的形成对 EQE 的影响。不管是 40 μm ✕40 μm 还是 80 μm ✕80 μm,采用 NBE 工艺蚀刻的 μLED 阵列之间的 EQE 几乎没有差别,但在 ICPRIE 中观察到了依赖性。即使在这种尺寸下,也发现 EQE 的尺寸效应小于使用 ICPRIE 进行无缺陷中性束蚀刻时的尺寸效应。由于 μLED 主要在 1-5 A/cm 左右的低电流密度下工作,因此这种影响非常大。因此,即使在基于 InGaN 的 40-80 μm μLED 中,也必须降低包括内部和侧壁缺陷在内的缺陷密度。如果采用 NBE 工艺蚀刻,这不仅能提高 μLED 的整体效率,还能增强 μLED 显示屏的亮度稳定性。研究还发现,蚀刻形状对 EQE 有影响。这可能是由于 NBE 的蚀刻剖面角度比 ICPRIE 的更垂直。因为不同的网格角度会导致不同的光强。通过模拟波长为 450 nm 的 μLED,NBE 蚀刻 μLED 的啮合角 58°时的光萃取效率和强度比 ICPRIE 蚀刻 μLED 的啮合角(38°)低约 8%。
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引用次数: 0
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