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Electrodeposition of Ru on Nanoscale Trench Patterns 在纳米级沟槽图案上电沉积 Ru
Pub Date : 2024-05-02 DOI: 10.1149/2162-8777/ad4677
Youjung Kim, Jinhyun Lee, Jin-Kyo Seo, H. Han, Inseong Hwang, S. Yoon, Bongyoung Yoo
Ru deposition in advanced technology nodes can improve performance by providing low resistance in nanoscale features. In this study, we reported the electrochemical reactions of Ru3+ on an Ru surface using multi-cyclic voltammetry (CV) and behavior of additives during Ru electrodeposition using linear sweep voltammetry (LSV) and potentiostatic measurements. Disodium 3,3'-dithiobis(1-propanesulfonate) (SPS), polyvinylpyrrolidone (PVP), and a bromide ion (Br-) were added for bottom-up filling. We investigated the suppression behavior of PVP. The current density and the onset potential of suppressor breakdown were affected by the suppressor concentration. PVP interacted synergistically with Br- and showed additional suppression. PVP formed a suppressing layer with Br- after formation of a bromide layer. SPS could reduce roughness during electrodeposition of Ru. Based on these results, nano-trenches were filled with Ru using the optimized additive condition.
先进技术节点中的 Ru 沉积可在纳米级特征中提供低电阻,从而提高性能。在这项研究中,我们使用多循环伏安法(CV)报告了 Ru 表面上 Ru3+ 的电化学反应,并使用线性扫描伏安法(LSV)和恒电位测量法报告了 Ru 电沉积过程中添加剂的行为。我们添加了 3,3'-二硫双(1-丙烷磺酸钠)(SPS)、聚乙烯吡咯烷酮(PVP)和溴离子(Br-)进行自下而上的填充。我们研究了 PVP 的抑制行为。抑制剂击穿的电流密度和起始电位受抑制剂浓度的影响。PVP 与 Br- 起着协同作用,并显示出额外的抑制作用。在形成溴化层后,PVP 与 Br- 形成抑制层。SPS 可以降低电沉积 Ru 过程中的粗糙度。基于这些结果,使用优化的添加剂条件在纳米沟槽中填充了 Ru。
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引用次数: 0
Negative Dielectric Constant in Novel Structure of PA-GO Composite /MnO2/Fe3O4/n-Si PA-GO 复合材料/MnO2/Fe3O4/n-Si 新型结构中的负介电常数
Pub Date : 2024-05-02 DOI: 10.1149/2162-8777/ad467a
A. Ashery, Samia Gad, G. Turky
We present a novel structure of PA-GO composite /MnO2/Fe3O4/n-Si arranged by simple technique and examined by scanning electron microscope, X-ray diffraction, and Raman spectroscopy. The negative dielectric constant appeared for all voltages at frequencies of 103, 102, 10 Hz, proving that the dielectric constant has negative values only at frequencies above one megahertz 106Hz. Also, the dielectric loss has negative values with temperature at all voltages and high frequencies. This structure also has a low dielectric loss tangent from 4 to 50 with all voltages and temperatures and high rectification ratio reach to 1200 times, and high Rj. The performance of dielectric constant, dielectric loss, and dielectric loss tangent depend on the change of frequencies and voltages. The electrical properties of this structure were examined by conventional, dv/dlnI, and the Nord and Cheung method. The ideality factor fluctuates between 3.09 and 3.29, and the barrier height is in the range of 0.56 to 0.58 at room temperature. We found similar results using different methods of measuring the electrical properties. This indicates that the structure is a promising material for preparing diodes, supercapacitor, and high storage devices.
我们用简单的技术排列了 PA-GO 复合材料/MnO2/Fe3O4/n-Si,并用扫描电子显微镜、X 射线衍射和拉曼光谱对其进行了研究。在频率为 103、102 和 10 Hz 的所有电压下,介电常数均为负值,这证明介电常数只有在频率高于一兆赫 106Hz 时才为负值。此外,在所有电压和高频率下,介电损耗随温度的变化均为负值。在所有电压和温度条件下,该结构的介电损耗正切值从 4 到 50 都很低,整流比高达 1200 倍,Rj 也很高。介电常数、介电损耗和介电损耗正切的性能取决于频率和电压的变化。通过传统方法、dv/dlnI 以及 Nord 和 Cheung 方法检验了该结构的电学特性。在室温下,理想因子在 3.09 和 3.29 之间波动,势垒高度在 0.56 至 0.58 之间。我们使用不同的电学特性测量方法发现了类似的结果。这表明该结构是一种很有前途的材料,可用于制备二极管、超级电容器和高存储设备。
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引用次数: 0
Effects of Gas-Dissolved Water for Ceria Nanoparticles on the SiO2 Film Surface in Post-CMP Cleaning 气溶水对二氧化硅薄膜表面铈纳米粒子在后 CMP 清洁中的影响
Pub Date : 2024-05-02 DOI: 10.1149/2162-8777/ad4678
Kihong Park, Wookyung Jeon, Pengzhan Liu, Sang-Hyuk Jeon, Seokjun Hong, Sanghyeon Park, Taesung Kim
As a trend of using colloidal and smaller ceria nanoparticles (CNPs) at the shallow trench isolation (STI) chemical mechanical polishing (CMP) in semiconductor manufacturing, post-CMP cleaning challenges in the removal of residual CNPs on the SiO2 film surface became much more challenging. We investigated the reduction/oxidation of ceria nanoparticles (CNPs) by hydrogen gas-dissolved water (H2 GDW), carbon dioxide gas-dissolved water (CO2 GDW), and oxygen gas-dissolved water (O2 GDW). The concentration of Ce3+ on the CNPs changed from 18.64% to 19.48%, 20.31% to 21.94%, and 21.27% to 19.22%, respectively, after immersion in H2 GDW, CO2 GDW, and O2 GDW for 3 to 12 h. Following the Ce3+ concentration of the CNP surface, adhesion energies between CNPs immersed in H2 GDW, CO2 GDW, and O2 GDW for 6 hours with SiO2 surface were 6.06E-16 J, 6.18E-16 J, and 4.83E-16 J. Cleaning experiments under megasonic conditions revealed the efficacy of H2 GDW and O2 GDW in removing residual CNPs from SiO2 surfaces. The residual cerium (Ce) ion concentrations remaining on the SiO2 film surface after cleaning, were 0.06, 0.41, and 0.10 ppb for H2 GDW, CO2 GDW, and O2 GDW, respectively.
随着在半导体制造中的浅沟槽隔离(STI)化学机械抛光(CMP)中使用胶体和更小的铈纳米颗粒(CNPs)成为一种趋势,CMP 后的清洁工作在去除二氧化硅薄膜表面残留的 CNPs 方面也变得更具挑战性。我们研究了氢气溶解水(H2 GDW)、二氧化碳气溶解水(CO2 GDW)和氧气溶解水(O2 GDW)对铈纳米粒子(CNPs)的还原/氧化作用。在 H2 GDW、CO2 GDW 和 O2 GDW 中浸泡 3 至 12 小时后,CNP 上的 Ce3+ 浓度分别从 18.64% 变为 19.48%、20.31% 变为 21.94%、21.27% 变为 19.22%。根据 CNP 表面的 Ce3+ 浓度,在 H2 GDW、CO2 GDW 和 O2 GDW 中浸泡 6 小时的 CNP 与 SiO2 表面的粘附能分别为 6.06E-16 J、6.18E-16 J 和 4.83E-16 J。H2 GDW、CO2 GDW 和 O2 GDW 清洁后,SiO2 薄膜表面残留的铈 (Ce) 离子浓度分别为 0.06、0.41 和 0.10 ppb。
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引用次数: 0
Tunable EOT Scaling Down to 0. 55 nm for HfO2-Based Gate-Stacks on Ge Substrate by In Situ H2 Plasma Treatment 通过原位 H2 等离子体处理将 Ge 基底上基于 HfO2 的栅极堆的可调 EOT 放大至 0.
Pub Date : 2024-04-24 DOI: 10.1149/2162-8777/ad430a
Hui-Hsuan Li, Shang-Chiun Chen, YuHsien Lin, ChaoHsin Chien
We propose a continuous fabrication method for HfO2-based gate stacks on a Ge bulk p-type metal–oxide–semiconductor capacitor (pMOSCAP) with HfGeOx interfacial layer by H2 plasma treatment through in situ plasma-enhanced atomic layer deposition. The electrical characteristics showed that the proper hydrogen plasma treatment could obtain an aggressively scaled equivalent oxide thickness of approximately 0.55 nm and a relatively low gate leakage current of 8 × 10-4 A/cm2 under PMA 500C.
我们提出了一种在带有 HfGeOx 界面层的 Ge 体 p 型金属氧化物半导体电容器 (pMOSCAP) 上通过原位等离子体增强原子层沉积进行氢等离子体处理的基于 HfO2 的栅叠层的连续制造方法。电学特性表明,在 PMA 500C 条件下,适当的氢等离子体处理可获得约 0.55 nm 的等效氧化物厚度和 8 × 10-4 A/cm2 的相对较低的栅极漏电流。
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引用次数: 0
Investigation of the Magnetic Features of the Fullerene-Dimer-Like Nanostructure (C60)2: A Monte Carlo Study 富勒烯-二聚体类纳米结构 (C60)2 的磁性特征研究:蒙特卡罗研究
Pub Date : 2024-04-24 DOI: 10.1149/2162-8777/ad430b
D. Kabouchi, Z. Fadil, R. El Fdil, C. Raorane, B. Kabouchi, A. Mhirech, E. Salmani, S. Kim, A. M. Tighezza, P. Rosesaih
The current investigation employs Monte Carlo simulations to explore the magnetic features of a Fullerene-dimer-like nanostructure (C60)2 characterized by the spin σ-1. It explores how the coupling interaction Jσ, the biquadratic parameter K, the external magnetic H and the crystal D fields influence the thermal and magnetic features of the nanostructure, particularly the blocking temperature (TB). The results also highlight the dependence of hysteresis cycles and the coercive magnetic field Hc on the values of Jσ, K, and D, with significant variations at lower temperatures. The findings indicate the distinctive magnetic behavior of the Fullerene-dimer-like nanostructure (C60)2 potentially useful in various technological applications.
目前的研究采用蒙特卡罗模拟来探索以自旋σ-1 为特征的富勒烯二聚体类纳米结构 (C60)2 的磁性特征。它探讨了耦合相互作用 Jσ、双二次参数 K、外磁 H 和晶体 D 场如何影响纳米结构的热特性和磁特性,尤其是阻塞温度 (TB)。研究结果还强调了磁滞周期和矫顽力磁场 Hc 对 Jσ、K 和 D 值的依赖性,在较低温度下变化显著。研究结果表明,富勒烯二聚体类纳米结构 (C60)2 具有独特的磁性行为,可用于各种技术应用。
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引用次数: 0
Investigating a Cylindrical Dielectric Resonator Antenna Fabricated with Li3MgNbO5 Microwave Dielectric Ceramic 研究用 Li3MgNbO5 微波介质陶瓷制作的圆柱形介质谐振器天线
Pub Date : 2024-04-23 DOI: 10.1149/2162-8777/ad4239
Dinesh M A, Vinay Kumar, Raghvendra Kumar, Vibha Rani Gupta, Subramanian Venkatachalam, V. Dayal
This work aims to fabricate a single-feed line Cylindrical Dielectric Resonator Antenna (CDRA) using low-temperature sintered Li3MgNbO5 microwave dielectric ceramic as a resonator, excited in HEM11ẟ mode. The ceramic synthesized using the conventional solid-state route resulted in a single-phase material exhibiting a cubic structure with an Fm-3m space group. The densely packed cylindrical disk of the ceramic was subsequently characterized for its microwave dielectric behaviour in TE01δ mode using the Hakki-Coleman method. The dielectric permittivity (εr) measures 14.4, with a loss factor (tan δ) nearly equal to 4.01×10-4 and a temperature coefficient (τf) of -50.9 ppm/°C. The antenna design was executed using the high-frequency structure simulator design software, utilizing the dielectric ceramic as the resonator, Cu strip as the feedline, and FR4 as the substrate. The maximum energy was coupled to the antenna when the resonator was placed at 11.75 mm on the substrate. The fabricated CDRA, using appropriate simulated parameters, resonated at 7.67 GHz, offering a return loss (S11) of -32.64 dB and an impedance bandwidth of 10.73%. Furthermore, the CDRA displayed a voltage standing wave ratio of 1.04, ensuring a nearby ideal impedance match and a bandwidth of 810 MHz to support high-speed data transmission.
这项研究旨在利用低温烧结 Li3MgNbO5 微波介质陶瓷作为谐振器,以 HEM11ẟ 模式激发,制造单馈电线圆柱介质谐振器天线(CDRA)。采用传统固态路线合成的陶瓷是一种单相材料,具有 Fm-3m 空间群的立方结构。随后,利用哈基-科尔曼方法对陶瓷的密集圆柱盘在 TE01δ 模式下的微波介电行为进行了表征。介电常数(εr)为 14.4,损耗因子(tan δ)几乎等于 4.01×10-4,温度系数(τf)为 -50.9 ppm/°C。天线设计是利用高频结构模拟器设计软件进行的,采用介质陶瓷作为谐振器,铜带作为馈线,FR4 作为基板。当谐振器放置在基板上 11.75 毫米处时,耦合到天线上的能量最大。利用适当的模拟参数,制造出的 CDRA 共振频率为 7.67 GHz,回波损耗 (S11) 为 -32.64 dB,阻抗带宽为 10.73%。此外,CDRA 的电压驻波比为 1.04,确保了附近的理想阻抗匹配和 810 MHz 的带宽,从而支持高速数据传输。
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引用次数: 0
A Tripartite Composite Incorporating Nitrogen-Doped Graphene Oxide, Polypyrrole, and Silica for Lithium-Ion Battery Anodes 用于锂离子电池阳极的氮掺杂石墨烯氧化物、聚吡咯和二氧化硅三方复合材料
Pub Date : 2024-04-23 DOI: 10.1149/2162-8777/ad423b
Mohammed Al-Bujasim, Metin Gençten, K. B. Dönmez, M. B. Arvas, N. Karatepe, Y. Şahin
In this study, N-doped graphene oxide-polypyrrole-silica (NGO-PPy-SiO2) composite was employed as a possible anode in Li-ion batteries. The chronoamperometric technique was employed to synthesize NGO, and within this study two samples were produced, one characterized by a high polypyrrle content (N1) and the other by a low polypyrrle content (N2). N2 has the maximum initial discharge capacity of 785 mAh/g at 0.1C, which is greater than N1's capacity of 501 mAh/g. The initial coulombic efficiency of the first cycle is around 72%, whereas the ICE of N2 is approximately 60%. N1 demonstrates outstanding cycling performance for 100 cycles at high rate (10 C) with maintain capacity as 100% and coulombic efficiency of 100%, as well as extremely stable capacity during the cycling. N2 has a maintain capacity of ≈ 79% and excellent coulombic efficiency, however the capacity during cycling is not as stable as N1.
本研究将掺杂 N 的氧化石墨烯-聚吡咯-二氧化硅(NGO-PPy-SiO2)复合材料用作锂离子电池的可能阳极。本研究采用精密计时器技术合成非政府组织,并制备出两种样品,一种样品的聚吡咯含量较高(N1),另一种样品的聚吡咯含量较低(N2)。N2 在 0.1C 时的最大初始放电容量为 785 mAh/g,高于 N1 的 501 mAh/g。第一个循环的初始库仑效率约为 72%,而 N2 的 ICE 约为 60%。N1 在高速率(10 摄氏度)下循环 100 次后显示出卓越的循环性能,容量保持率为 100%,库仑效率为 100%,并且在循环过程中容量极为稳定。N2 的维持容量≈79%,库仑效率极佳,但循环期间的容量不如 N1 稳定。
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引用次数: 0
Charge-Traps, Thermal Stability and Water-Uptakes of CaSiO3/EP and SiO2/EP Nanocomposites from Molecular Simulations and First-Principles Calculations 从分子模拟和第一性原理计算看 CaSiO3/EP 和 SiO2/EP 纳米复合材料的电荷陷阱、热稳定性和吸水性
Pub Date : 2024-04-23 DOI: 10.1149/2162-8777/ad423a
Yanyan Zhang, Weifeng Sun
Various analytical methods were employed to elucidate the effects of filling nano-calcium-silicate or nano-silica on the electronic property, water-uptake, and thermal stability of an amine-crosslinked epoxy (EP) polymer. Molecular-mixture models consisting of a nanofiller or several calcium ions and EP crosslinked macro-molecules were used to simulate local regions of nanofiller/matrix interface or ion-infiltrated matrix, calculating their density of electron-states by first-principles method to determine whether and how the nanofillers introduce charge traps into EP matrix. Calcium cations on nanofiller surface dissociate away from coordinating with silicon-oxygen tetrahedron and infiltrate into void spaces in EP matrix, leaving a larger free volume at filler/matrix interface than in matrix. Calcium cations dissolved in EP matrix adsorbed in the low electrostatic potential region or coordinate with carbonyl groups in EP matrix and thus introduce a miniband of deep electron traps at energy levels >1eV lower than conduction band minimum of the amine-crosslinked EP polymer. Even at room temperature, thermal vibrations can break coordinate bonds between calcium cations and silicon-oxygen framework on calcium-silicate nanofiller surface and make considerable calcium ions infiltrating void spaces within EP matrix, leading to comprehensive improvements of cohesive energy, thermal stability, and charge trapping ability in the calcium-silicate/EP nanocomposite.
采用多种分析方法阐明了填充纳米硅酸钙或纳米二氧化硅对胺交联环氧(EP)聚合物的电子特性、吸水性和热稳定性的影响。使用由一个纳米填料或几个钙离子和环氧交联大分子组成的分子混合物模型模拟纳米填料/基质界面或离子渗入基质的局部区域,通过第一原理方法计算其电子态密度,以确定纳米填料是否以及如何在环氧基质中引入电荷陷阱。纳米填料表面的钙阳离子从与硅氧四面体的配位中解离出来,渗入 EP 基质的空隙中,在填料/基质界面处留下了比基质中更大的自由体积。溶解在 EP 基质中的钙阳离子吸附在低静电位区域,或与 EP 基质中的羰基配位,从而在比胺交联 EP 聚合物最低导带低 >1eV 的能级上引入了一个小的深电子陷阱带。即使在室温下,热振动也能破坏硅酸钙纳米填料表面的钙阳离子与硅氧框架之间的配位键,使大量钙离子渗入 EP 基体的空隙中,从而全面提高硅酸钙/EP 纳米复合材料的内聚能、热稳定性和电荷捕获能力。
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引用次数: 0
DFT Calculations on Defect Induced and Doped ASiNR for Sensing the COPD Breath Biomarker 用于传感慢性阻塞性肺病呼吸生物标记物的缺陷诱导和掺杂 ASiNR 的 DFT 计算
Pub Date : 2024-04-19 DOI: 10.1149/2162-8777/ad40cf
Akash Ramasamy, S. A, Hariharan Rajalakshmi Mohanraj, D. John Thiruvadigal
COPD is a respiratory disease with a high mortality rate worldwide. The major cause of death in COPD patients is due to late diagnosis. Early detection of COPD is crucial for significantly reducing the risk of death but is challenging to attain. A distinguished way to early diagnosis is by using the nanosensor for sensing the COPD breath biomarkers. For the first time, we report an armchair silicene nanoribbon (ASiNR) as a promising sensing material for the diagnosis of hexanal a COPD breath biomarker. In this present study, the density functional theory (DFT) with Grimme D2 corrected approach was incorporated to observe the ground state electronic properties and adsorption mechanism of hexanal on the pristine, defect induced (D) and B-, C-, and N-doped ASiNR systems. N-ASiNR systems show the highest adsorption energy value among previously reported works due to the presence of strong covalent interaction, and it does not show recovery at room temperature. The B-ASiNR system with higher charge transfer exhibits large work function change with the fastest recovery at room temperature in 1.81 s. Our results confirms B-doped ASiNR system acts as an efficient reusable work function-based sensor for the early diagnosis of COPD at room temperature.
慢性阻塞性肺病是全世界死亡率很高的呼吸系统疾病。慢性阻塞性肺病患者死亡的主要原因是诊断过晚。早期发现慢性阻塞性肺病对大幅降低死亡风险至关重要,但实现这一目标却很困难。利用纳米传感器感测慢性阻塞性肺病呼气生物标志物是早期诊断的一个重要方法。我们首次报道了一种臂向硅纳米带(ASiNR),它是一种很有前景的传感材料,可用于诊断 COPD 呼气生物标志物己醛。在本研究中,采用 Grimme D2 修正方法的密度泛函理论(DFT)观察了原始、缺陷诱导(D)和 B、C 及 N 掺杂 ASiNR 系统上正己醛的基态电子特性和吸附机理。由于存在强共价作用,N-ASiNR 系统的吸附能值在之前报道的作品中最高,而且在室温下不会出现恢复。我们的研究结果证实,掺 B 的 ASiNR 系统是一种可重复使用的基于功函数的高效传感器,可用于室温下慢性阻塞性肺病的早期诊断。
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引用次数: 0
Biomass-Derived Integrated Hierarchical Porous Carbon Embedded with Ni@C Nanoparticles for High-Performance and Cost-Effective Microwave Absorbent Design 生物质衍生的嵌有 Ni@C 纳米颗粒的集成分层多孔碳用于高性能、低成本的微波吸收器设计
Pub Date : 2024-04-18 DOI: 10.1149/2162-8777/ad4059
Xinran Bi, Weipeng Dai, Xiaocheng Lu, Zidong Zhang, Junhui Men
High-performance and cost-effective microwave absorbing materials are of vital importance in not only military but also civil fields. Here, an in-situ generation-carbonization one-step method is proposed to synthesize excellent absorbents based on a common solid waste, willow catkins. The results demonstrate that the microwave absorption performance has been successfully improved owing to the magnetic particles, the core-shell nanoparticles, and the hierarchical porous structure, which results in strong conductivity loss, dielectric loss, magnetic loss, interface polarization, and multiple scattering. The maximum reflection loss (RLmax) reaches up to -50.66 dB and -49.09 dB, respectively, at 16.6 and 17.1 GHz with the thickness of 1.65 mm, resulting in double-peak absorption. What’s more, the effective absorption bandwidth (EAB, RL<−10 dB) can get up to 5.7 GHz (from 12.4 to 18 GHz) with the thickness of 1.84 mm. Great absorption performance can be obtained simply through impregnation and carbonization, which constructs a fruitful and cost-effective paradigm for resource utilization of solid waste such as willow catkins.
高性能、低成本的微波吸收材料不仅在军事领域,在民用领域也至关重要。本文提出了一种基于常见固体废弃物柳絮的原位生成-碳化一步法合成优良吸波材料的方法。结果表明,由于磁性颗粒、核壳纳米颗粒和分层多孔结构的存在,微波吸收性能得到了成功改善,从而产生了较强的传导损耗、介电损耗、磁性损耗、界面极化和多重散射。在厚度为 1.65 mm 时,16.6 和 17.1 GHz 的最大反射损耗(RLmax)分别达到 -50.66 dB 和 -49.09 dB,从而产生双峰值吸收。此外,厚度为 1.84 mm 时,有效吸收带宽(EAB,RL<-10 dB)可达 5.7 GHz(从 12.4 到 18 GHz)。只需通过浸渍和碳化就能获得很好的吸收性能,这为柳树荑花序等固体废弃物的资源化利用构建了一个富有成效且经济高效的范例。
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引用次数: 0
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ECS Journal of Solid State Science and Technology
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