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A novel approach of jet polishing for interior surface of small grooved components using three developed setups 使用三种已开发设置对小型凹槽部件内表面进行喷射抛光的新方法
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2024-01-05 DOI: 10.1088/2631-7990/ad1bba
Qinming Gu, Zhenyu Zhang, Hongxiu Zhou, Jiaxin Yu, Dong Wang, Junyuan Feng, C. Shi, Jianjun Yang, Junfeng Qi
It is a challenge to polish the interior surface of an additively manufactured component with complex structures and groove sizes less than 1 mm. Traditional polishing methods are disabled to polish the component, meanwhile keeping the structure intact. To overcome this challenge, small grooved components made of aluminum alloy with sizes less than 1 mm were fabricated by a custom-made printer. A novel approach of multi-phase jet polishing is proposed using a developed polisher, consisting of solid, liquid and gas phases. In comparison, an abrasive air jet polishing is suggested through a customized polisher, including solid and gas phases. After jet polishing, surface roughness (Sa) on the interior surface of grooves decreases from pristine 8.596 to 0.701 and 0.336 μm by abrasive air jet polishing and multi-phase jet polishing, respectively, and Sa reduces 92% and 96%, correspondingly. A formula is given out for the relationship between linear energy density and unit defect volume. The optimized parameters in additive manufacturing are that linear energy density varies from 0.135 to 0.22 J∙mm-1. Defect volume of unit area achieved by optimized parameters lessens 1/12 that of non-optimized ones. Computational fluid dynamics simulation reveals that material is removed by shear stress, and the alumina abrasives experience multiple collisions with the defects on the heat pipe groove, resulting in uniform material removal. This is in good agreement with the experimental results. The novel proposed setups, approach and findings provide new insights to manufacture complex-structured components, polish the small grooved structure, and keep it unbroken.
对结构复杂、沟槽尺寸小于 1 毫米的快速成型部件的内表面进行抛光是一项挑战。传统的抛光方法无法在抛光组件的同时保持结构的完整。为了克服这一难题,我们使用定制打印机制造了尺寸小于 1 毫米的铝合金小凹槽部件。我们提出了一种新颖的多相喷射抛光方法,使用开发的抛光机,由固相、液相和气相组成。相比之下,建议通过定制的抛光机(包括固相和气相)进行磨料空气喷射抛光。经过喷射抛光后,凹槽内表面的表面粗糙度(Sa)从原始的 8.596 微米分别降低到 0.701 微米和 0.336 微米,其中磨料空气喷射抛光和多相喷射抛光的 Sa 分别降低了 92% 和 96%。给出了线性能量密度与单位缺陷体积之间的关系式。增材制造的优化参数为线性能量密度从 0.135 到 0.22 J∙mm-1 不等。优化参数实现的单位面积缺陷体积是未优化参数的 1/12。计算流体动力学模拟显示,材料是通过剪切应力去除的,氧化铝磨料与热管沟槽上的缺陷发生多次碰撞,从而均匀地去除材料。这与实验结果十分吻合。新提出的设置、方法和研究结果为制造复杂结构部件、抛光小凹槽结构并保持其无破损提供了新的见解。
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引用次数: 0
Elliptical vibration chiseling: a novel process for texturing ultra-high-aspect-ratio microstructures on the metallic surface 椭圆振凿:在金属表面形成超高宽比微结构的新工艺
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2024-01-05 DOI: 10.1088/2631-7990/ad1bbb
Zhiwei Li, Jianfu Zhang, Zhongpeng Zheng, P. Feng, D. Yu, Jianjian Wang
High-aspect-ratio metallic surface microstructures are increasingly demanded in breakthrough applications, such as high-performance heat transfer enhancement and surface plasmon devices. However, the fast and cost-effective fabrication of high-aspect-ratio microstructures on metallic surfaces remains challenging for existing techniques. This study proposes a novel cutting-based process, namely elliptical vibration chiseling (EV-chiseling), for the high-efficiency texturing of surface microstructures with an ultrahigh aspect ratio. Unlike conventional cutting, EV-chiseling superimposes a microscale elliptical vibration on a backward-moving tool. The tool chisels into the material in each vibration cycle to generate an upright chip with a high aspect ratio through material deformation. Thanks to the tool’s backward movement, the chip is left on the material surface to form a microstructure rather than falling off. Since one microstructure is generated in one vibration cycle, the process can be highly efficient using ultrafast (>1 kHz) tool vibration. A finite element analysis model is established to explore the process mechanics of EV-chiseling. Next, a mechanistic model of the microstructured surface generation is developed to describe the microstructures’ aspect ratio dependency on the process parameters. Then, surface texturing tests are performed on copper to verify the efficacy of EV-chiseling. Uniformed micro ribs with a spacing of 1~10 μm and an aspect ratio of 2~5 have been successfully textured on copper. Compared with the conventional EV-cutting that uses a forward-moving tool, EV-chiseling can improve the aspect ratio of textured microstructure by up to 40 times. The experimental results also verify the accuracy of the developed surface generation model of microstructures. Finally, the effects of elliptical trajectory, depth of cut (DoC), tool shape, and tool edge radius on the surface generation of micro ribs have been discussed.
高宽比金属表面微结构在高性能传热增强和表面等离子体器件等突破性应用中的需求日益增长。然而,对于现有技术而言,在金属表面快速、低成本地制造高宽比微结构仍具有挑战性。本研究提出了一种基于切割的新型工艺,即椭圆振动凿刻(EV-chiseling),用于高效制备具有超高纵横比的表面微结构。与传统切割工艺不同,EV-凿刻工艺是在向后移动的工具上叠加微尺度椭圆振动。在每个振动周期中,刀具凿入材料,通过材料变形产生具有高纵横比的直立切屑。由于工具向后运动,切屑留在材料表面形成微结构,而不是脱落。由于一个振动周期可产生一个微结构,因此使用超快(>1 kHz)工具振动可实现高效工艺。我们建立了一个有限元分析模型来探索电动车凿毛的工艺力学。接着,建立了微结构表面生成的力学模型,以描述微结构的高宽比与工艺参数的关系。然后,对铜进行了表面纹理测试,以验证 EV 凿刻的功效。在铜上成功制备出了间距为 1~10 μm、纵横比为 2~5 的均匀微肋。与使用前移工具的传统 EV 切割相比,EV-凿刻可将纹理微结构的纵横比提高 40 倍。实验结果还验证了所开发的微结构表面生成模型的准确性。最后,还讨论了椭圆轨迹、切削深度(DoC)、刀具形状和刀具边缘半径对微肋表面生成的影响。
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引用次数: 0
Printability disparities in heterogeneous material combinations via laser directed energy deposition: a comparative study 通过激光定向能沉积异质材料组合的可印刷性差异:一项比较研究
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2024-01-04 DOI: 10.1088/2631-7990/ad172f
Jinsheng Ning, Lida Zhu, Shuhao Wang, Zhichao Yang, Peihua Xu, Pengsheng Xue, Hao Lu, Miao Yu, Yunha Zhao, Jiachen Li, S. Bose, Amit Bandyopadhyay
Additive manufacturing provides achievability for the fabrication of bimetallic and multi-material structures; however, the material compatibility and bondability directly affect the parts’ formability and final quality. It is essential to understand the underlying printability of different material combinations based on an adapted process. Here, the printability disparities of two common and attractive material combinations (nickel- and iron-based alloys) are evaluated at the macro and micro levels via laser directed energy deposition (DED). The deposition processes were captured using in situ high-speed imaging, and the dissimilarities in melt pool features and track morphology were quantitatively investigated within specific process windows. Moreover, the microstructure diversity of the tracks and blocks processed with varied material pairs was comparatively elaborated and, complemented with the informative multi-physics modeling, the presented non-uniformity in mechanical properties (microhardness) among the heterogeneous material pairs was rationalized. The differences in melt flow induced by the unlike thermophysical properties of the material pairs and the resulting element intermixing and localized re-alloying during solidification dominate the presented dissimilarity in printability among the material combinations. This work provides an in-depth understanding of the phenomenological differences in the deposition of dissimilar materials and aims to guide more reliable DED forming of bimetallic parts.
增材制造可实现双金属和多材料结构的制造;然而,材料的兼容性和粘合性会直接影响零件的成型性和最终质量。了解不同材料组合在适应工艺基础上的基本可打印性至关重要。本文通过激光定向能沉积(DED)技术,从宏观和微观层面评估了两种常见且具有吸引力的材料组合(镍基合金和铁基合金)的可印刷性差异。利用原位高速成像技术捕捉了沉积过程,并定量研究了特定工艺窗口内熔池特征和轨迹形态的差异。此外,还对使用不同材料对加工的轨道和区块的微观结构多样性进行了比较阐述,并辅以翔实的多物理场建模,对异质材料对之间呈现的机械性能(显微硬度)不均匀性进行了合理解释。材料对不同的热物理性质引起的熔体流动差异,以及由此导致的元素混杂和凝固过程中的局部再合金化,主导了材料组合间印刷适性的差异。这项研究深入了解了异种材料沉积过程中的现象学差异,旨在为双金属零件更可靠的 DED 成形提供指导。
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引用次数: 0
Design and optimization of fluid lubricated bearings operated with extreme working performances-A comprehensive review 极端工作条件下流体润滑轴承的设计与优化--综述
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2023-12-22 DOI: 10.1088/2631-7990/ad1825
Guohua Zhang, Ming Huang, Gangli Chen, Jiasheng Li, Yang Liu, Jianguo He, Yueqing Zheng, Siwei Tang, Hailong Cui
Fluid lubricated bearings have been widely adopted for supporting components of high-end equipments in the field of metrology, semi-conductor, aviation, strategic defense, ultra-precision manufacturing, medical treatment and power generations. These fields all involve extreme working conditions such as ultra-high moving precision, ultra-high rotation speed, ultra-heavy bearing load, ultra-high environmental temperature, high radiation and high vacuum, which present challenges for the design and optimization of reliable fluid lubricated bearings. Breakthrough of any related bottlenecks will promote the development course of high-end equipments. To further promote the advancement of high-end equipments, this paper reviews the design and optimization of fluid lubricated bearings operated with typical extreme working performances. Targeting on the realization of extreme working perfor mances, the current challenges, the current solutions, the underlying deficiencies and the promising developing directions regarding to the design and optimization of fluid lubricat ed bearings are systematically pointed out. This paper can provide guidance for choosing suitable fluid lubricated bearings and optimizing their structures based on required extreme working performances.
流体润滑轴承已广泛应用于计量、半导体、航空、战略防御、超精密制造、医疗和发电等领域高端设备的配套部件。这些领域均涉及超高运动精度、超高转速、超重轴承载荷、超高环境温度、高辐射、高真空等极端工况,对可靠的流体润滑轴承的设计和优化提出了挑战。相关瓶颈的突破将推动高端装备的发展进程。为进一步推动高端装备的发展,本文综述了典型极端工作性能下流体润滑轴承的设计与优化。针对极端工作性能的实现,系统地指出了流体润滑轴承设计与优化方面的当前挑战、现有解决方案、潜在不足和有前景的发展方向。本文可为根据所需的极限工作性能选择合适的流体润滑轴承并优化其结构提供指导。
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引用次数: 0
Slippery Hydrogel with Desiccation-Tolerant "Skin" for High-Precision Additive Manufacturing 用于高精度增材制造的具有耐干燥 "皮肤 "的滑溜水凝胶
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2023-12-19 DOI: 10.1088/2631-7990/ad1730
Desheng Liu, Pan Jiang, Yue Hu, Yaozhong Lu, Yixian Wang, Jiayu Wu, Danli Hu, Tao Wu, Xiaolong Wang
Hydrogels inevitably undergo dehydration, structural collapse, and shrinkage deformation due to the uninterrupted evaporation in the atmosphere, thereby losing their flexibility, slippery, and manufacturing precision. Here, we propose a novel bioinspired strategy to construct a spontaneously formed “skin” on the slippery hydrogels by incorporating biological stress metabolites trehalose into the hydrogel network, which can generate robust hydrogen bonding interactions to restrain water evaporation. The contents of trehalose in hydrogel matrix can also regulate the desiccation-tolerance, mechanical properties, and lubricating performance of slippery hydrogels in a wide range. Combining vat photopolymerization 3D printing and trehalose-modified slippery hydrogels enables to achieve the structural hydrogels with high resolution, shape fidelity, and sophisticated architectures, instead of structural collapse and shrinkage deformation caused by dehydration. And thus, this proposed functional hydrogel adapts to manufacture large-scale hydrogels with sophisticated architectures in a long-term process. As a proof-of-concept demonstration, a high-precision and sophisticated slippery hydrogel vascular phantom was easily fabricated to imitate guidewire intervention. Additionally, the proposed protocol is universally applicable to diverse types of hydrogel systems. This strategy opens up a versatile methodology to fabricate dry-resistant slippery hydrogel for functional structures and devices, expanding their high-precision processing and broad applications in the atmosphere.
水凝胶由于在大气中不间断蒸发,不可避免地会发生脱水、结构坍塌和收缩变形,从而失去柔韧性、滑爽性和制造精度。在这里,我们提出了一种新颖的生物启发策略,通过在水凝胶网络中加入生物应激代谢物树胶糖,在光滑的水凝胶上构建一层自发形成的 "皮肤",这种 "皮肤 "可以产生强大的氢键相互作用来抑制水分蒸发。水凝胶基质中曲哈洛糖的含量还能在很大范围内调节滑爽水凝胶的干燥耐受性、机械性能和润滑性能。将大桶光聚合三维打印技术与曲哈洛糖改性的滑溜水凝胶相结合,可以获得分辨率高、形状逼真、结构复杂的水凝胶,而不会出现脱水导致的结构坍塌和收缩变形。因此,这种拟议的功能性水凝胶可用于在长期过程中制造具有复杂结构的大规模水凝胶。作为概念验证,高精度和复杂的滑溜水凝胶血管模型被轻松制作出来,以模仿导丝介入。此外,所提出的方案普遍适用于不同类型的水凝胶系统。这一策略开辟了为功能结构和装置制造耐干滑水凝胶的多功能方法,扩大了其高精度加工和在大气中的广泛应用。
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引用次数: 0
Nontraditional energy-assisted mechanical machining of difficult-to-cut materials and components in aerospace community: a comparative analysis 航空航天界对难切削材料和部件的非传统能量辅助机械加工:比较分析
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2023-12-19 DOI: 10.1088/2631-7990/ad16d6
Guolong Zhao, B. Zhao, Wenfeng Ding, Lianjia Xin, Zhiwen Nian, Jianhao Peng, Ning He, Jiuhua Xu
Difficult-to-cut materials such as titanium alloys, high-temperature alloys, metal/ceramic/polymer-matrix composites, hard and brittle materials, as well as geometrically complex components such as thin-walled structures, micro channels and complex surfaces, are widely used in aerospace community. Mechanical machining is the main material removal process and responsible for the vast majority of material removal for aerospace components. Nevertheless, it encounters many problems in terms of severe and rapid tool wear, low machining efficiency, and deteriorated surface integrity. Nontraditional energy-assisted mechanical machining is a hybrid process in which nontraditional energies, e.g., vibration, laser, electric, etc., are applied to improve the machinability of local material and decrease burden of mechanical machining. It provides a feasible and promising way for improving machinability and surface quality, reducing process forces, and prolonging tool life, etc. However, systematic reviews of this technology are lacking with respect to the current research status and development direction. This paper reviews recent progress in nontraditional energy-assisted mechanical machining of difficult-to-cut materials and components in aerospace community. It focuses on the processing principles, material responses under nontraditional energy, resultant forces and temperatures, material removal mechanisms and applications of these processes including vibration-, laser-, electric-, magnetic-, chemical-, cryogenic cooling-, and hybrid nontraditional energies-assisted mechanical machining. Eventually, a comprehensive summary of the principles, advantages and limitations for each hybrid process is provided, and future perspectives on forward design, device development and sustainability of nontraditional energy-assisted mechanical machining processes are discussed.
钛合金、高温合金、金属/陶瓷/聚合物基复合材料、硬脆材料等难切削材料,以及薄壁结构、微通道和复杂表面等几何形状复杂的部件,在航空航天领域得到广泛应用。机械加工是主要的材料去除工艺,负责航空航天部件的绝大部分材料去除工作。然而,机械加工也会遇到许多问题,如刀具磨损严重、速度快、加工效率低、表面完整性差等。非传统能量辅助机械加工是一种混合加工过程,其中应用了非传统能量,如振动、激光、电等,以改善局部材料的可加工性并减轻机械加工的负担。它为提高加工性能和表面质量、减少加工力、延长刀具寿命等提供了一种可行且有前景的方法。然而,关于该技术的研究现状和发展方向,目前还缺乏系统的综述。本文综述了航空航天界在对难切削材料和部件进行非传统能量辅助机械加工方面的最新进展。重点介绍了非传统能量辅助机械加工的加工原理、材料在非传统能量下的反应、产生的力和温度、材料去除机理和应用,包括振动、激光、电、磁、化学、低温冷却和混合非传统能量辅助机械加工。最后,对每种混合工艺的原理、优势和局限性进行了全面总结,并讨论了非传统能源辅助机械加工工艺的前瞻性设计、设备开发和可持续性的未来前景。
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引用次数: 0
Review on Laser Directed Energy Deposited Aluminum Alloys 激光定向能沉积铝合金综述
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2023-12-18 DOI: 10.1088/2631-7990/ad16bb
Tianshu Liu, Peng Chen, Feng Qiu, Hong-Yu Yang, Nicholas Yew Jin Tan, Y. Chew, Di Wang, Ruidi Li, Qichuan Jiang, Chaolin Tan
The lightweight aluminum (Al) alloys have been widely used in frontier fields like aerospace and automotive industries, which attracts great interest in additive manufacturing to process high-value Al parts. As a mainstream additive manufacturing technique, laser directed energy deposition (LDED) shows good scalability to meet requirements for large-format components manufacturing and repairing. However, LDED Al alloys are highly challenging due to the inherent poor printability (e.g., low laser absorption, high oxidation sensitivity and cracking tendency). To further promote the development of LDED high-performance Al alloys, this review gains a deep understanding of the challenges and strategies to improve printability in LDED Al alloys. The porosity, cracking, distortion, inclusions, elements evaporation and resultant inferior mechanical properties (than laser powder bed fusion) are the key challenges in LDED Al alloys. Processing parameter optimizations, in-situ alloy design, reinforcing particle addition and field assistance are the efficient approaches to improve the printability and performance of LDED Al alloys. The underlying correlations between processes, alloy innovation, characteristic microstructures, and achievable performances in LDED Al alloys are discussed. The benchmarking mechanical properties and primary strengthening mechanism of LDED Al alloys are summarized. This review aims to provide a critical and in-depth evaluation of current progress in LDED Al alloys. The future opportunities and perspectives in LDED high-performance Al alloys are also outlooked.
轻质铝(Al)合金已广泛应用于航空航天和汽车等前沿领域,这引起了人们对增材制造加工高价值铝零件的极大兴趣。作为一种主流的快速成型制造技术,激光定向能沉积(LDED)显示出良好的可扩展性,可满足大型部件制造和维修的要求。然而,LDED Al 合金由于其固有的打印性能差(如低激光吸收率、高氧化敏感性和开裂倾向),具有很高的挑战性。为了进一步推动 LDED 高性能铝合金的发展,本综述深入探讨了提高 LDED 铝合金可印刷性的挑战和策略。气孔、开裂、变形、夹杂物、元素蒸发以及由此导致的较差机械性能(与激光粉末床融合相比)是 LDED 铝合金面临的主要挑战。优化加工参数、原位合金设计、添加强化颗粒和现场辅助是提高 LDED 铝合金可印刷性和性能的有效方法。本文讨论了 LDED Al 合金的工艺、合金创新、特征微结构和可实现性能之间的内在联系。总结了 LDED Al 合金的基准机械性能和主要强化机制。本综述旨在对 LDED 铝合金的当前进展进行批判性的深入评估。此外,还展望了 LDED 高性能铝合金的未来机遇和前景。
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引用次数: 0
Alloy design for laser powder bed fusion additive manufacturing: a critical review 激光粉末床熔融增材制造的合金设计:重要综述
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2023-12-15 DOI: 10.1088/2631-7990/ad1657
Zhuangzhuang Liu, Qihang Zhou, Xiaokang Liang, Xiebin Wang, Guichuan Li, Kim Vanmeensel, Jianxin Xie
Metal additive manufacturing (AM) has been extensively studied in recent decades. Despite the significant progress achieved in manufacturing complex shapes and structures, challenges such as severe cracking when using existing alloys for laser powder bed fusion (L-PBF) AM persisted. This is due to the fact that commercial alloys are primarily designed for conventional casting or forging processes, without considering the fast cooling rates, steep temperature gradients, and multiple thermal cycles of L-PBF. To address this, there is an urgent need to develop novel alloys specifically tailored for L-PBF technologies. This review provides a comprehensive summary of the strategies employed in alloy design for L-PBF. It aims to guide future research on designing novel alloys dedicated to L-PBF instead of adapting the existing alloys for L-PBF. The review begins by discussing the features of L-PBF processes, focusing on rapid solidification and intrinsic heat treatment. Next, the printability of the four main existing alloys (Fe-, Ni-, Al-, and Ti-based alloys) is critically assessed, with a comparison to their conventional weldability. It was found that the weldability criteria are not always applicable in estimating printability. Furthermore, the review presents recent advances in alloy development and associated strategies, categorizing them into crack mitigation-oriented, microstructure manipulation-oriented, and machine learning-assisted approaches. Lastly, an outlook and suggestions are given to highlight the issues that need be addressed in future work.
近几十年来,人们对金属增材制造(AM)进行了广泛的研究。尽管在制造复杂形状和结构方面取得了重大进展,但将现有合金用于激光粉末床熔融(L-PBF)AM 时仍存在严重开裂等难题。这是因为商用合金主要是为传统的铸造或锻造工艺而设计的,没有考虑到 L-PBF 的快速冷却速率、陡峭的温度梯度和多次热循环。为解决这一问题,迫切需要开发出专门针对低压成型工艺的新型合金。本综述全面总结了 L-PBF 合金设计所采用的策略。其目的是指导未来的研究工作,设计出专用于 L-PBF 的新型合金,而不是对现有合金进行改造,使其适用于 L-PBF。综述首先讨论了 L-PBF 工艺的特点,重点是快速凝固和固有热处理。接着,对现有的四种主要合金(铁基合金、镍基合金、铝基合金和钛基合金)的可印刷性进行了严格评估,并与它们的传统焊接性进行了比较。研究发现,焊接性标准并不总是适用于评估可印刷性。此外,综述还介绍了合金开发和相关策略的最新进展,并将其分为以裂纹缓解为导向的方法、以微观结构操作为导向的方法和机器学习辅助方法。最后,还提出了展望和建议,以强调未来工作中需要解决的问题。
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引用次数: 0
Atomic layer deposition in advanced display technologies: from photoluminescence to encapsulation 先进显示技术中的原子层沉积:从光致发光到封装
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2023-12-14 DOI: 10.1088/2631-7990/ad15f5
Rong Chen, Kun Cao, Yanwei Wen, Fan Yang, Jian Wang, Xiao Liu, Bin Shan
Driven by the growing demand for next-generation displays, the evolution of advanced luminescent materials with exceptional photoelectric properties, such as quantum dots and phosphors are accelerating rapidly. Nevertheless, the primary challenge confronting the practical applications of these luminescent materials lie in meeting high durability requirements. This perspective delves into atomic layer deposition (ALD) developed for stabilizing luminescent materials, which is employed in the fabrication of flexible display devices through material modification, surface and interface engineering, encapsulation, cross-scale manufacturing, and simulations. To satisfy low-cost, high-efficiency, and high-reliability manufacturing requirements, equipments such as spatial ALD and fluidized ALD have been developed. The strategic approach establishes the groundwork for the development of ultra-stable luminescent materials, highly efficient LEDs, and thin-film packaging. This significantly enhances their potential applicability in LED illumination and backlight displays, marking a notable advancement in the display industry.
在下一代显示器需求不断增长的推动下,量子点和荧光粉等具有特殊光电特性的先进发光材料正在迅速发展。然而,这些发光材料在实际应用中面临的主要挑战是如何满足高耐久性要求。本视角深入探讨了为稳定发光材料而开发的原子层沉积(ALD)技术,该技术通过材料改性、表面和界面工程、封装、跨尺度制造和模拟,用于制造柔性显示器件。为了满足低成本、高效率和高可靠性的制造要求,人们开发了空间 ALD 和流化 ALD 等设备。这种战略方法为开发超稳定发光材料、高效 LED 和薄膜封装奠定了基础。这大大提高了它们在 LED 照明和背光显示器中的潜在适用性,标志着显示器行业的显著进步。
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引用次数: 0
Fabrication and integration of photonic devices for phase-change memory and neuromorphic computing 制造和集成用于相变存储器和神经形态计算的光子器件
IF 14.7 1区 工程技术 Q1 Engineering Pub Date : 2023-12-13 DOI: 10.1088/2631-7990/ad1575
Wen Zhou, Xue‐Ying Shen, Xiaolong Yang, Jiangjing Wang, Wei Zhang
In the past decade, there has been tremendous progress in integrating chalcogenide phase-change materials (PCMs) on the silicon photonic platform for non-volatile memory to neuromorphic in-memory computing applications. Especially, these non von Neumann computational elements and systems benefit from mass manufacturing of silicon photonic integrated circuits (PICs) on 8-inch wafers using 130-nm complementary metal-oxide semiconductor (CMOS) line. Chip manufacturing based on the deep-ultraviolet (DUV) lithography and electron-beam lithography (EBL) enable rapid prototyping of PICs, which can be integrated with high-quality PCMs based on the wafer-scale sputtering technique as a back-end-of-line (BEOL) process. In this article, we overview recent advances of waveguide integrated PCM memory cells, functional devices, and neuromorphic systems, with an emphasis on fabrication and integration processes to attain the state-of-the-art device performance. After a short overview of PCM based photonic devices, we discuss the materials properties of the functional layer as well as the progress on the light guiding layer, namely, the silicon and germanium waveguide platforms. Next, we discuss the cleanroom fabrication flow of waveguide devices integrated with thin films and nanowires, silicon waveguide and plasmonic microheaters for electrothermal switching of PCMs and mixed-mode operation. Finally, the fabrication of photonic and photonic-electronic neuromorphic computing systems is reviewed. These systems consist arrays of PCM memory elements for associative learning, matrix-vector multiplication, and pattern recognition. With large-scale integration, neuromorphic photonic computing paradigm holds the promise to outperform digital electronic accelerators by taking the advantages of ultra-high bandwidth, high speed, and energy efficient operation in running machine learning algorithms.
过去十年间,在硅光子平台上集成掺杂卤化物相变材料 (PCM) 用于非易失性存储器和神经形态内存计算应用方面取得了巨大进展。这些非冯-诺伊曼计算元件和系统尤其受益于在 8 英寸晶圆上使用 130 纳米互补金属氧化物半导体 (CMOS) 线路大规模制造硅光子集成电路 (PIC)。基于深紫外(DUV)光刻技术和电子束光刻技术(EBL)的芯片制造实现了 PIC 的快速原型开发,PIC 可以与基于晶圆级溅射技术的高质量 PCM 集成,作为一种后端(BEOL)工艺。在本文中,我们将概述波导集成 PCM 存储单元、功能器件和神经形态系统的最新进展,重点介绍实现最先进器件性能的制造和集成工艺。在简要概述基于 PCM 的光子器件后,我们讨论了功能层的材料特性以及光导层(即硅和锗波导平台)的进展。接下来,我们将讨论集成了薄膜和纳米线的波导器件、硅波导和等离子体微加热器的无尘室制造流程,以实现 PCM 的电热开关和混合模式操作。最后,还回顾了光子和光子电子神经形态计算系统的制造过程。这些系统由用于联想学习、矩阵向量乘法和模式识别的 PCM 存储元件阵列组成。随着大规模集成的实现,神经形态光子计算范例有望在运行机器学习算法时发挥超高带宽、高速和高能效运行的优势,从而超越数字电子加速器。
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引用次数: 0
期刊
International Journal of Extreme Manufacturing
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