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Numerical simulation of materials-oriented ultra-precision diamond cutting: review and outlook 面向材料的超精密金刚石切削数值模拟:回顾与展望
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2023-02-10 DOI: 10.1088/2631-7990/acbb42
Liang Zhao, Junjie Zhang, Jianguo Zhang, Houfu Dai, A. Hartmaier, Tao Sun
Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials. While fundamental understanding of the impact of workpiece material properties on cutting mechanisms is crucial for promoting the capability of the machining technique, numerical simulation methods at different length and time scales act as important supplements to experimental investigations. In this work, we present a compact review on recent advancements in the numerical simulations of material-oriented diamond cutting, in which representative machining phenomena are systematically summarized and discussed by multiscale simulations such as molecular dynamics simulation and finite element simulation: the anisotropy cutting behavior of polycrystalline material, the thermo-mechanical coupling tool-chip friction states, the synergetic cutting responses of individual phase in composite materials, and the impact of various external energetic fields on cutting processes. In particular, the novel physics-based numerical models, which involve the high precision constitutive law associated with heterogeneous deformation behavior, the thermo-mechanical coupling algorithm associated with tool-chip friction, the configurations of individual phases in line with real microstructural characteristics of composite materials, and the integration of external energetic fields into cutting models, are highlighted. Finally, insights into the future development of advanced numerical simulation techniques for diamond cutting of advanced structured materials are also provided. The aspects reported in this review present guidelines for the numerical simulations of ultra-precision mechanical machining responses for a variety of materials.
超精密金刚石切削是实现各种材料表面超光滑加工的一种很有前途的加工技术。虽然对工件材料特性对切削机制影响的基本理解对于提高加工技术的能力至关重要,但不同长度和时间尺度的数值模拟方法是实验研究的重要补充。在这项工作中,我们对材料取向金刚石切削数值模拟的最新进展进行了简要回顾,其中通过分子动力学模拟和有限元模拟等多尺度模拟系统地总结和讨论了具有代表性的加工现象:研究了多晶材料的各向异性切削行为,刀具-切屑摩擦状态的热-机械耦合,复合材料中单个相的协同切削响应,以及各种外部能场对切削过程的影响。特别强调了基于物理的新型数值模型,包括与非均质变形行为相关的高精度本构律,与刀具-切屑摩擦相关的热-力耦合算法,符合复合材料真实微观结构特征的单个相配置,以及将外部能场集成到切削模型中。最后,对先进结构材料的金刚石切削的先进数值模拟技术的未来发展也提供了见解。这篇综述中所报道的方面为各种材料的超精密机械加工响应的数值模拟提供了指导。
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引用次数: 7
3D printed fiber-optic nanomechanical bioprobe 3D打印光纤纳米机械生物探针
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2023-01-30 DOI: 10.1088/2631-7990/acb741
Mengqiang Zou, C. Liao, Yanping Chen, Lei Xu, Shuo Tang, Gaixia Xu, Ke Ma, Jiangtao Zhou, Zhihao Cai, Bozhe Li, Cong Zhao, Zhourui Xu, Yuanyuan Shen, Shen Liu, Y. Wang, Zongsong Gan, Hao Wang, Xuming Zhang, S. Kasas, Yiping Wang
Ultrasensitive nanomechanical instruments, e.g. atomic force microscopy (AFM), can be used to perform delicate biomechanical measurements and reveal the complex mechanical environment of biological processes. However, these instruments are limited because of their size and complex feedback system. In this study, we demonstrate a miniature fiber optical nanomechanical probe (FONP) that can be used to detect the mechanical properties of single cells and in vivo tissue measurements. A FONP that can operate in air and in liquids was developed by programming a microcantilever probe on the end face of a single-mode fiber using femtosecond laser two-photon polymerization nanolithography. To realize stiffness matching of the FONP and sample, a strategy of customizing the microcantilever’s spring constant according to the sample was proposed based on structure-correlated mechanics. As a proof-of concept, three FONPs with spring constants varying from 0.421 N m−1 to 52.6 N m−1 by more than two orders of magnitude were prepared. The highest microforce sensitivity was 54.5 nm μN−1 and the detection limit was 2.1 nN. The Young’s modulus of heterogeneous soft materials, such as polydimethylsiloxane, muscle tissue of living mice, onion cells, and MCF-7 cells, were successfully measured, which validating the broad applicability of this method. Our strategy provides a universal protocol for directly programming fiber-optic AFMs. Moreover, this method has no special requirements for the size and shape of living biological samples, which is infeasible when using commercial AFMs. FONP has made substantial progress in realizing basic biological discoveries, which may create new biomedical applications that cannot be realized by current AFMs.
超灵敏的纳米机械仪器,如原子力显微镜(AFM),可用于进行精密的生物力学测量,揭示生物过程的复杂机械环境。然而,这些仪器由于其尺寸和复杂的反馈系统而受到限制。在这项研究中,我们展示了一种微型光纤纳米机械探针(FONP),可用于检测单细胞的机械特性和体内组织测量。利用飞秒激光双光子聚合纳米光刻技术,在单模光纤的端面设计了微悬臂探针,开发了一种可在空气和液体中工作的光纤激光器。为了实现微悬臂梁与试样的刚度匹配,基于结构相关力学,提出了一种根据试样定制微悬臂梁弹簧常数的策略。作为概念验证,制备了三个弹簧常数在0.421 N m−1至52.6 N m−1之间变化超过两个数量级的fonp。微力灵敏度最高为54.5 nm μN−1,检出限为2.1 nN。异质软质材料(如聚二甲基硅氧烷、活小鼠肌肉组织、洋葱细胞和MCF-7细胞)的杨氏模量成功测量,验证了该方法的广泛适用性。我们的策略为直接编程光纤afm提供了一个通用协议。此外,该方法对活体生物样品的大小和形状没有特殊要求,这在使用商用AFMs时是不可行的。FONP在实现基础生物学发现方面取得了实质性进展,这可能会创造出当前afm无法实现的新的生物医学应用。
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引用次数: 4
Interface engineering of an electrospun nanofiber-based composite cathode for intermediate-temperature solid oxide fuel cells 中温固体氧化物燃料电池用电纺纳米纤维复合阴极的界面工程
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2023-01-25 DOI: 10.1088/2631-7990/acb626
Seo Ju Kim, Deokyoon Woo, Donguk Kim, Tae-kyeong Lee, Jaeyeob Lee, Wonyoung Lee
Sluggish oxygen reduction reaction (ORR) kinetics are a major obstacle to developing intermediate-temperature solid-oxide fuel cells (IT-SOFCs). In particular, engineering the anion defect concentration at an interface between the cathode and electrolyte is important for facilitating ORR kinetics and hence improving the electrochemical performance. We developed the yttria-stabilized zirconia (YSZ) nanofiber (NF)-based composite cathode, where the oxygen vacancy concentration is controlled by varying the dopant cation (Y2O3) ratio in the YSZ NFs. The composite cathode with the optimized oxygen vacancy concentration exhibits maximum power densities of 2.66 and 1.51 W cm−2 at 700 and 600 °C, respectively, with excellent thermal stability at 700 °C over 500 h under 1.0 A cm−2. Electrochemical impedance spectroscopy and distribution of relaxation time analysis revealed that the high oxygen vacancy concentration in the NF-based scaffold facilitates the charge transfer and incorporation reaction occurred at the interfaces between the cathode and electrolyte. Our results demonstrate the high feasibility and potential of interface engineering for achieving IT-SOFCs with higher performance and stability.
缓慢的氧还原反应(ORR)动力学是发展中温固体氧化物燃料电池(it - sofc)的主要障碍。特别是,在阴极和电解质之间的界面上设计阴离子缺陷浓度对于促进ORR动力学从而提高电化学性能非常重要。我们开发了钇稳定氧化锆(YSZ)纳米纤维(NF)基复合阴极,其中氧空位浓度通过改变YSZ纳米纤维中掺杂阳离子(Y2O3)的比例来控制。优化后的氧空位浓度复合阴极在700℃和600℃时的最大功率密度分别为2.66和1.51 W cm−2,在1.0 A cm−2下,在700℃、500 h内具有优异的热稳定性。电化学阻抗谱和弛豫时间分布分析表明,高氧空位浓度有利于阴极与电解质界面发生电荷转移和掺入反应。我们的研究结果表明,界面工程在实现具有更高性能和稳定性的it - sofc方面具有很高的可行性和潜力。
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引用次数: 0
Atomic layer deposition for nanoscale oxide semiconductor thin film transistors: review and outlook 纳米级氧化半导体薄膜晶体管的原子层沉积:回顾与展望
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2023-01-18 DOI: 10.1088/2631-7990/acb46d
Hye-mi Kim, Dong-Gyu Kim, Yoon‐Seo Kim, Min-Suk Kim, Jinsin Park
Since the first report of amorphous In–Ga–Zn–O based thin film transistors, interest in oxide semiconductors has grown. They offer high mobility, low off-current, low process temperature, and wide flexibility for compositions and processes. Unfortunately, depositing oxide semiconductors using conventional processes like physical vapor deposition leads to problematic issues, especially for high-resolution displays and highly integrated memory devices. Conventional approaches have limited process flexibility and poor conformality on structured surfaces. Atomic layer deposition (ALD) is an advanced technique which can provide conformal, thickness-controlled, and high-quality thin film deposition. Accordingly, studies on ALD based oxide semiconductors have dramatically increased recently. Even so, the relationships between the film properties of ALD-oxide semiconductors and the main variables associated with deposition are still poorly understood, as are many issues related to applications. In this review, to introduce ALD-oxide semiconductors, we provide: (a) a brief summary of the history and importance of ALD-based oxide semiconductors in industry, (b) a discussion of the benefits of ALD for oxide semiconductor deposition (in-situ composition control in vertical distribution/vertical structure engineering/chemical reaction and film properties/insulator and interface engineering), and (c) an explanation of the challenging issues of scaling oxide semiconductors and ALD for industrial applications. This review provides valuable perspectives for researchers who have interest in semiconductor materials and electronic device applications, and the reasons ALD is important to applications of oxide semiconductors.
自从首次报道非晶in - ga - zn - o基薄膜晶体管以来,人们对氧化物半导体的兴趣日益浓厚。它们提供高迁移率、低断流、低工艺温度以及广泛的组合物和工艺灵活性。不幸的是,使用物理气相沉积等传统工艺沉积氧化物半导体会导致问题,特别是对于高分辨率显示器和高度集成的存储设备。传统的方法在结构表面上具有有限的工艺灵活性和较差的一致性。原子层沉积(ALD)是一种先进的技术,可以提供保形、厚度控制和高质量的薄膜沉积。因此,近年来对ALD基氧化物半导体的研究急剧增加。尽管如此,与应用相关的许多问题一样,人们对ald氧化物半导体的薄膜特性与沉积相关的主要变量之间的关系仍然知之甚少。在这篇综述中,我们介绍了ald -氧化物半导体,我们提供:(a)简要总结了基于ALD的氧化物半导体在工业中的历史和重要性,(b)讨论了ALD在氧化物半导体沉积中的好处(垂直分布的原位成分控制/垂直结构工程/化学反应和薄膜性能/绝缘体和界面工程),以及(c)解释了氧化半导体和ALD在工业应用中的缩放问题。这一综述为研究半导体材料和电子器件应用的研究人员提供了有价值的视角,以及ALD对氧化物半导体应用的重要意义。
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引用次数: 2
Two-dimensional laser-induced periodic surface structures formed on crystalline silicon by GHz burst mode femtosecond laser pulses GHz突发模式飞秒激光脉冲在晶体硅上形成二维激光诱导的周期性表面结构
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2023-01-07 DOI: 10.1088/2631-7990/acb133
Shota Kawabata, Shi Bai, K. Obata, G. Miyaji, K. Sugioka
Femtosecond laser pulses with GHz burst mode that consist of a series of trains of ultrashort laser pulses with a pulse interval of several hundred picoseconds offer distinct features in material processing that cannot be obtained by the conventional irradiation scheme of femtosecond laser pulses (single-pulse mode). However, most studies using the GHz burst mode femtosecond laser pulses focus on ablation of materials to achieve high-efficiency and high-quality material removal. In this study, we explore the ability of the GHz burst mode femtosecond laser processing to form laser-induced periodic surface structures (LIPSS) on silicon. It is well known that the direction of LIPSS formed by the single-pulse mode with linearly polarized laser pulses is typically perpendicular to the laser polarization direction. In contrast, we find that the GHz burst mode femtosecond laser (wavelength: 1030 nm, intra-pulse duration: 220 fs, intra-pulse interval time (intra-pulse repetition rate): 205 ps (4.88 GHz), burst pulse repetition rate: 200 kHz) creates unique two-dimensional (2D) LIPSS. We regard the formation mechanism of 2D LIPSS as the synergetic contribution of the electromagnetic mechanism and the hydrodynamic mechanism. Specifically, generation of hot spots with highly enhanced electric fields by the localized surface plasmon resonance of subsequent pulses in the bursts within the nanogrooves of one-dimensional LIPSS formed by the preceding pulses creates 2D LIPSS. Additionally, hydrodynamic instability including convection flow determines the final structure of 2D LIPSS.
GHz突发模式的飞秒激光脉冲由一系列脉冲间隔为几百皮秒的超短激光脉冲序列组成,在材料加工中具有传统飞秒激光脉冲(单脉冲模式)照射方案无法获得的独特特性。然而,大多数使用GHz突发模式飞秒激光脉冲的研究都集中在材料的烧蚀上,以实现高效率和高质量的材料去除。在这项研究中,我们探索了GHz突发模式飞秒激光处理在硅上形成激光诱导周期性表面结构(LIPSS)的能力。众所周知,单脉冲模式与线偏振激光脉冲形成的LIPSS方向通常垂直于激光偏振方向。相比之下,我们发现GHz突发模式飞秒激光器(波长:1030 nm,脉冲内持续时间:220 fs,脉冲内间隔时间(脉冲内重复率):205 ps (4.88 GHz),突发脉冲重复率:200 kHz)创建了独特的二维(2D) LIPSS。我们认为二维LIPSS的形成机制是电磁机制和水动力机制共同作用的结果。具体来说,在由前一个脉冲形成的一维LIPSS的纳米沟槽内,通过后续脉冲的局部表面等离子体共振产生具有高度增强电场的热点,产生二维LIPSS。此外,包括对流流在内的流体动力不稳定性决定了2D LIPSS的最终结构。
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引用次数: 8
Laser machining fundamentals: micro, nano, atomic and close-to-atomic scales 激光加工基础:微、纳米、原子和近原子尺度
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2023-01-07 DOI: 10.1088/2631-7990/acb134
Jinshi Wang, F. Fang, Hao An, Shang-Hua Wu, Huimin Qi, Yuexuan Cai, Guanyu Guo
With the rapid development in advanced industries, such as microelectronics and optics sectors, the functional feature size of devises/components has been decreasing from micro to nanometric, and even ACS for higher performance, smaller volume and lower energy consumption. By this time, a great many quantum structures are proposed, with not only an extreme scale of several or even single atom, but also a nearly ideal lattice structure with no material defect. It is almost no doubt that such structures play critical role in the next generation products, which shows an urgent demand for the ACSM. Laser machining is one of the most important approaches widely used in engineering and scientific research. It is high-efficient and applicable for most kinds of materials. Moreover, the processing scale covers a huge range from millimeters to nanometers, and has already touched the atomic level. Laser–material interaction mechanism, as the foundation of laser machining, determines the machining accuracy and surface quality. It becomes much more sophisticated and dominant with a decrease in processing scale, which is systematically reviewed in this article. In general, the mechanisms of laser-induced material removal are classified into ablation, CE and atomic desorption, with a decrease in the scale from above microns to angstroms. The effects of processing parameters on both fundamental material response and machined surface quality are discussed, as well as theoretical methods to simulate and understand the underlying mechanisms. Examples at nanometric to atomic scale are provided, which demonstrate the capability of laser machining in achieving the ultimate precision and becoming a promising approach to ACSM.
随着微电子、光学等先进工业的快速发展,器件/元件的功能特征尺寸已从微级逐渐减小到纳米级,甚至实现了高性能、小体积、低能耗的ACS。此时,提出了大量的量子结构,不仅有几个甚至单个原子的极端尺度,而且有接近理想的晶格结构,没有材料缺陷。毫无疑问,这种结构在下一代产品中发挥着至关重要的作用,这表明了对ACSM的迫切需求。激光加工是广泛应用于工程和科学研究的重要加工方法之一。它效率高,适用于大多数材料。此外,加工规模涵盖了从毫米到纳米的巨大范围,并且已经达到了原子水平。激光与材料的相互作用机理是激光加工的基础,决定着加工精度和表面质量。随着加工规模的减小,它变得越来越复杂和占主导地位,本文对此进行了系统的综述。一般来说,激光诱导材料去除的机制分为烧蚀、CE和原子脱附,从微米以上的尺度降低到埃。讨论了加工参数对基本材料响应和加工表面质量的影响,以及模拟和理解其潜在机制的理论方法。给出了纳米到原子尺度的实例,证明了激光加工在实现极限精度方面的能力,并成为一种有前途的ACSM方法。
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引用次数: 8
Crack-free high-aspect ratio holes in glasses by top–down percussion drilling with infrared femtosecond laser GHz-bursts 红外飞秒激光自顶向下冲击钻削玻璃无裂纹高纵横比孔
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2022-12-29 DOI: 10.1088/2631-7990/acaa14
Pierre Balage, John J. Lopez, G. Bonamis, C. Hönninger, I. Manek-Hönninger
We report novel results on top-down percussion drilling in different glasses with femtosecond laser GHz-bursts. Thanks to this particular regime of light–matter interaction, combining non-linear absorption and thermal cumulative effects, we obtained crack-free holes of aspect ratios exceeding 30 in sodalime and 70 in fused silica. The results are discussed in terms of inner wall morphology, aspect ratio and drilling speed.
我们报告了用飞秒激光ghz -爆发在不同玻璃上进行自上而下冲击钻孔的新结果。由于这种特殊的光-物质相互作用机制,结合非线性吸收和热累积效应,我们获得了宽高比超过30的钠盐和70的熔融二氧化硅的无裂纹孔。结果从内壁形貌、纵横比和钻速等方面进行了讨论。
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引用次数: 8
Anisotropic thermal expansion in high-entropy multicomponent AlB2-type diboride solid solutions 高熵多组分alb2型二硼化物固溶体的各向异性热膨胀
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2022-12-15 DOI: 10.1088/2631-7990/acabee
F. Monteverde, M. Gaboardi, F. Saraga, Lun Feng, W. Fahrenholtz, G. Hilmas
High-entropy (HE) ultra-high temperature ceramics have the chance to pave the way for future applications propelling technology advantages in the fields of energy conversion and extreme environmental shielding. Among others, HE diborides stand out owing to their intrinsic anisotropic layered structure and ability to withstand ultra-high temperatures. Herein, we employed in-situ high-resolution synchrotron diffraction over a plethora of multicomponent compositions, with four to seven transition metals, with the intent of understanding the thermal lattice expansion following different composition or synthesis process. As a result, we were able to control the average thermal expansion (TE) from 1.3 × 10−6 to 6.9 × 10−6 K−1 depending on the combination of metals, with a variation of in-plane to out-of-plane TE ratio ranging from 1.5 to 2.8.
高熵(HE)超高温陶瓷有机会为未来的应用铺平道路,在能量转换和极端环境屏蔽领域推动技术优势。其中,HE二硼化物因其固有的各向异性层状结构和承受超高温的能力而脱颖而出。在此,我们采用原位高分辨率同步加速器衍射对大量的多组分组成,4到7过渡金属,以了解不同的组成或合成过程后的热晶格膨胀。因此,我们能够根据金属的组合将平均热膨胀(TE)控制在1.3 × 10−6到6.9 × 10−6 K−1之间,而面内与面外的热膨胀比变化范围为1.5到2.8。
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引用次数: 1
Two/Quasi-two-dimensional perovskite-based heterostructures: construction, properties and applications 二维/准二维钙钛矿异质结构:结构、性质和应用
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2022-12-13 DOI: 10.1088/2631-7990/acab40
Haizhen Wang, Yingying Chen, Dehui Li
Two-dimensional (2D)/quasi-2D organic-inorganic halide perovskites are regarded as naturally formed multiple quantum wells with inorganic layers isolated by long organic chains, which exhibit layered structure, large exciton binding energy, strong nonlinear optical effect, tunable bandgap via changing the layer number or chemical composition, improved environmental stability, and excellent optoelectronic properties. The extensive choice of long organic chains endows 2D/quasi-2D perovskites with tunable electron-phonon coupling strength, chirality, or ferroelectricity properties. In particular, the layered nature of 2D/quasi-2D perovskites allows us to exfoliate them to thin plates to integrate with other materials to form heterostructures, the fundamental structural units for optoelectronic devices, which would greatly extend the functionalities in view of the diversity of 2D/quasi-2D perovskites. In this paper, the recent achievements of 2D/quasi-2D perovskite-based heterostructures are reviewed. First, the structure and physical properties of 2D/quasi-2D perovskites are introduced. We then discuss the construction and characterizations of 2D/quasi-2D perovskite-based heterostructures and highlight the prominent optical properties of the constructed heterostructures. Further, the potential applications of 2D/quasi-2D perovskite-based heterostructures in photovoltaic devices, light emitting devices, photodetectors/phototransistors, and valleytronic devices are demonstrated. Finally, we summarize the current challenges and propose further research directions in the field of 2D/quasi-2D perovskite-based heterostructures.
二维/准二维有机-无机卤化物钙钛矿被认为是自然形成的多个量子阱,其无机层被长有机链隔离,具有层状结构,激子结合能大,非线性光学效应强,通过改变层数或化学成分可调节带隙,提高环境稳定性和优异的光电性能。长有机链的广泛选择使二维/准二维钙钛矿具有可调谐的电子-声子耦合强度、手性或铁电性。特别是,二维/准二维钙钛矿的层状性质使我们能够将其剥离成薄板,与其他材料集成形成异质结构,这是光电器件的基本结构单元,鉴于二维/准二维钙钛矿的多样性,这将大大扩展其功能。本文综述了近年来二维/准二维钙钛矿异质结构的研究进展。首先,介绍了二维/准二维钙钛矿的结构和物理性质。然后,我们讨论了二维/准二维钙钛矿基异质结构的构建和表征,并强调了构建的异质结构的突出光学性质。此外,还展示了二维/准二维钙钛矿异质结构在光伏器件、发光器件、光电探测器/光电晶体管和谷电子器件中的潜在应用。最后,总结了目前在二维/准二维钙钛矿异质结构领域面临的挑战,并提出了进一步的研究方向。
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引用次数: 1
Effect of tool geometry on ultraprecision machining of soft-brittle materials: a comprehensive review 刀具几何形状对软脆材料超精密加工的影响
IF 14.7 1区 工程技术 Q1 ENGINEERING, MANUFACTURING Pub Date : 2022-12-13 DOI: 10.1088/2631-7990/acab3f
Weihai Huang, Jiwang Yan
Brittle materials are widely used for producing important components in the industry of optics, optoelectronics, and semiconductors. Ultraprecision machining of brittle materials with high surface quality and surface integrity helps improve the functional performance and lifespan of the components. According to their hardness, brittle materials can be roughly divided into hard-brittle and soft-brittle. Although there have been some literature reviews for ultraprecision machining of hard-brittle materials, up to date, very few review papers are available that focus on the processing of soft-brittle materials. Due to the ‘soft’ and ‘brittle’ properties, this group of materials has unique machining characteristics. This paper presents a comprehensive overview of recent advances in ultraprecision machining of soft-brittle materials. Critical aspects of machining mechanisms, such as chip formation, surface topography, and subsurface damage for different machining methods, including diamond turning, micro end milling, ultraprecision grinding, and micro/nano burnishing, are compared in terms of tool-workpiece interaction. The effects of tool geometries on the machining characteristics of soft-brittle materials are systematically analyzed, and dominating factors are sorted out. Problems and challenges in the engineering applications are identified, and solutions/guidelines for future R&D are provided.
脆性材料广泛用于光学、光电、半导体等行业的重要元器件生产。脆性材料的超精密加工,具有高表面质量和表面完整性,有助于提高部件的功能性能和寿命。脆性材料按其硬度大致可分为硬脆型和软脆型。虽然已有一些文献对硬脆材料的超精密加工进行了综述,但迄今为止,针对软脆材料的超精密加工的综述文献很少。由于“软”和“脆”的特性,这组材料具有独特的加工特性。本文综述了软脆材料超精密加工的最新进展。加工机制的关键方面,如切屑形成、表面形貌和亚表面损伤不同的加工方法,包括金刚石车削、微端铣、超精密磨削和微/纳米抛光,在工具-工件相互作用方面进行了比较。系统分析了刀具几何形状对软脆材料加工特性的影响,梳理了影响软脆材料加工特性的主要因素。确定了工程应用中的问题和挑战,并为未来的研发提供了解决方案/指导方针。
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引用次数: 7
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International Journal of Extreme Manufacturing
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