首页 > 最新文献

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献

英文 中文
Tooth profile piecewise modification method for cycloid gear of RV reducer based on meshing interval optimization 基于啮合区间优化的RV减速器摆线轮齿形分段修形方法
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-10-22 DOI: 10.1016/j.precisioneng.2025.10.018
Song Gao , Xuan Wang , Jiapeng Wang , Yiwan Li
Rotate vector (RV) reducer is a high-precision deceleration mechanism featuring advantages such as a large transmission ratio and load-bearing capacity. It is widely applied in fields of industrial robots. As a key component of RV reducer, the cycloid gear plays a decisive role in reducer's performance, and the cycloidal shape significantly affects the meshing performance. In this study, taking the RV-40E reducer as the object, a piecewise modification for the cycloidal gear based on meshing interval optimization was proposed. The working segment of cycloidal profile was modified by the rotated angular method, and the influence of meshing interval on transmission performance was analyzed. Then, taking the meshing-in and meshing-out phase angles as variables, the friction power loss and gluing coefficient as objectives, an optimization model for meshing interval was established. The single- and multi-objective optimizations were solved based on the genetic algorithm. The dedendum and addendum of cycloidal profiles were adopted spline curves. According to the continuity conditions at endpoints, the tooth profile equations of the non-working segments were obtained by spline interpolation method. The results demonstrated after optimization, the friction loss and gluing coefficient reduced by 6.30% and 10.50%, respectively, the reasonable radial clearances were maintained at the dedendum and addendum. Finally, the finite element simulation verification was carried out through ANSYS software. The proposed piecewise modification method not only ensures conjugate meshing in working segment, but also can flexibly control the gaps of non-working segments according to specific requirements, which provides the design ideas for gear tooth modification in engineering applications.
RV减速器是一种高精度的减速机构,具有传动比大、承载能力强等优点。广泛应用于工业机器人领域。摆线齿轮作为RV减速器的关键部件,对减速器的性能起着决定性的作用,摆线齿形对其啮合性能有显著影响。本文以RV-40E减速器为研究对象,提出了一种基于啮合区间优化的摆线齿轮分段修形方法。采用旋转角法对摆线轮廓的工作段进行了修正,分析了啮合间距对传动性能的影响。然后,以啮合相位角和啮合相位角为变量,以摩擦功率损失和粘接系数为目标,建立了啮合区间优化模型。采用遗传算法求解单目标和多目标优化问题。摆线轮廓的尾轴和尾轴采用样条曲线。根据末端连续条件,采用样条插值法得到了非工作齿段的齿形方程。结果表明,优化后的摩擦损失和粘接系数分别降低了6.30%和10.50%,齿根和齿根处保持了合理的径向间隙。最后通过ANSYS软件进行有限元仿真验证。提出的分段修形方法既保证了工作齿段的共轭啮合,又能根据具体要求灵活控制非工作齿段的间隙,为工程应用中的齿轮修形提供了设计思路。
{"title":"Tooth profile piecewise modification method for cycloid gear of RV reducer based on meshing interval optimization","authors":"Song Gao ,&nbsp;Xuan Wang ,&nbsp;Jiapeng Wang ,&nbsp;Yiwan Li","doi":"10.1016/j.precisioneng.2025.10.018","DOIUrl":"10.1016/j.precisioneng.2025.10.018","url":null,"abstract":"<div><div>Rotate vector (RV) reducer is a high-precision deceleration mechanism featuring advantages such as a large transmission ratio and load-bearing capacity. It is widely applied in fields of industrial robots. As a key component of RV reducer, the cycloid gear plays a decisive role in reducer's performance, and the cycloidal shape significantly affects the meshing performance. In this study, taking the RV-40E reducer as the object, a piecewise modification for the cycloidal gear based on meshing interval optimization was proposed. The working segment of cycloidal profile was modified by the rotated angular method, and the influence of meshing interval on transmission performance was analyzed. Then, taking the meshing-in and meshing-out phase angles as variables, the friction power loss and gluing coefficient as objectives, an optimization model for meshing interval was established. The single- and multi-objective optimizations were solved based on the genetic algorithm. The dedendum and addendum of cycloidal profiles were adopted spline curves. According to the continuity conditions at endpoints, the tooth profile equations of the non-working segments were obtained by spline interpolation method. The results demonstrated after optimization, the friction loss and gluing coefficient reduced by 6.30% and 10.50%, respectively, the reasonable radial clearances were maintained at the dedendum and addendum. Finally, the finite element simulation verification was carried out through ANSYS software. The proposed piecewise modification method not only ensures conjugate meshing in working segment, but also can flexibly control the gaps of non-working segments according to specific requirements, which provides the design ideas for gear tooth modification in engineering applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 677-689"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362964","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Vibration suppression strategy of elliptical gears based on configuration optimization design 基于构型优化设计的椭圆齿轮减振策略
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-10-17 DOI: 10.1016/j.precisioneng.2025.10.016
Changbin Dong , Juan Wang , Wangpeng Pei , Yongping Liu
The dynamic imbalance problem of elliptical gears seriously affects their service performance and can significantly induce vibration. In order to overcome the above technical difficulties, this paper proposes to use topology optimization technology to achieve structural optimization design of elliptical gear spokes, aiming to suppress vibration and alleviate the dynamic imbalance problem of elliptical gears. Based on nonlinear dynamics and viscoelastic theory, a 6-degree-of-freedom bending torsional coupling dynamic model was derived considering gear eccentricity excitation, and accurately solved the time-varying meshing stiffness, comprehensive transmission error, and time-varying tooth backlash parameters of the model. The influence of lightweight design on the vibration response of the system was analyzed by combining the time-domain diagram, FFT spectrum diagram, phase diagram, and Poincaré cross-sectional diagram. The results indicate that with the optimization of the rotational inertia and centroid position of the elliptical gear transmission system through lightweight design, the vibration response of the system has been weakened, but the frequency component has not shown significant changes.Finally, vibration experiments confirmed that lightweight design has a significant inhibitory effect on the vibration characteristics of elliptical gears. 1
椭圆齿轮的动不平衡问题严重影响椭圆齿轮的使用性能,并会引起振动。为了克服上述技术难点,本文提出利用拓扑优化技术实现椭圆齿轮辐条的结构优化设计,旨在抑制振动,缓解椭圆齿轮的动不平衡问题。基于非线性动力学和粘弹性理论,推导了考虑齿轮偏心激励的6自由度弯曲扭转耦合动力学模型,并精确求解了模型的时变啮合刚度、综合传动误差和时变齿隙参数。结合时域图、FFT谱图、相位图和poincarcars截面图,分析了轻量化设计对系统振动响应的影响。结果表明:通过轻量化设计对椭圆齿轮传动系统的转动惯量和质心位置进行优化后,系统的振动响应有所减弱,但频率分量变化不明显;最后,通过振动实验验证了轻量化设计对椭圆齿轮的振动特性有明显的抑制作用。1
{"title":"Vibration suppression strategy of elliptical gears based on configuration optimization design","authors":"Changbin Dong ,&nbsp;Juan Wang ,&nbsp;Wangpeng Pei ,&nbsp;Yongping Liu","doi":"10.1016/j.precisioneng.2025.10.016","DOIUrl":"10.1016/j.precisioneng.2025.10.016","url":null,"abstract":"<div><div>The dynamic imbalance problem of elliptical gears seriously affects their service performance and can significantly induce vibration. In order to overcome the above technical difficulties, this paper proposes to use topology optimization technology to achieve structural optimization design of elliptical gear spokes, aiming to suppress vibration and alleviate the dynamic imbalance problem of elliptical gears. Based on nonlinear dynamics and viscoelastic theory, a 6-degree-of-freedom bending torsional coupling dynamic model was derived considering gear eccentricity excitation, and accurately solved the time-varying meshing stiffness, comprehensive transmission error, and time-varying tooth backlash parameters of the model. The influence of lightweight design on the vibration response of the system was analyzed by combining the time-domain diagram, FFT spectrum diagram, phase diagram, and Poincaré cross-sectional diagram. The results indicate that with the optimization of the rotational inertia and centroid position of the elliptical gear transmission system through lightweight design, the vibration response of the system has been weakened, but the frequency component has not shown significant changes.Finally, vibration experiments confirmed that lightweight design has a significant inhibitory effect on the vibration characteristics of elliptical gears. <sup>1</sup></div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 632-649"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362965","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A high performance hybrid-driven piezoelectric actuator based on asymmetrical structure with combined lateral and coupling motions 一种基于横向运动和耦合运动的非对称结构的高性能混合驱动压电驱动器
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.015
Qi Wang , Dahoon Ahn , Yang Zhang , Peng Yan , Ziran Wang
Bionic stepping piezoelectric actuators such as stick–slip or inchworm actuators demonstrate important applications in semiconductor manufacturing and active optics, where high-speed and high-precision motion capabilities, as well as load performance, often involve a trade-off arising from distinct actuation mechanisms. This study proposes a compact piezoelectric actuator based on biomimetic driving principles combining the advantages of stick–slip and inchworm actuations by employing only two piezoelectric stack units. The design comprises a multifunctional driving foot based on a flexible triangular mechanism and a clamping foot based on a spring hinge. The asymmetrical structure features displacement amplification and enables combined lateral and coupling motions, supporting a hybrid driving principle to achieve both stick–slip and inchworm motions from a performance perspective. A prototype of the designed piezoelectric actuator was fabricated to verify its feasibility and performance. The experimental results show that the actuator achieves a maximum speed of 52.89 mm/s and a maximum output force of 24.52 N, with a motion resolution of 23 nm, which significantly outperform existing results in the literature.
仿生步进式压电致动器,如粘滑或尺蠖致动器,在半导体制造和主动光学中展示了重要的应用,在这些领域,高速和高精度的运动能力以及负载性能通常涉及不同致动机制产生的权衡。本研究提出了一种基于仿生驱动原理的紧凑型压电驱动器,该驱动器结合了粘滑驱动和尺蠖驱动的优点,仅采用两个压电堆叠单元。本设计包括基于柔性三角机构的多功能驱动脚和基于弹簧铰链的夹紧脚。这种不对称结构具有位移放大的特点,可以实现横向和耦合运动,从性能角度来看,支持混合驱动原理,可以实现粘滑和尺蠖运动。制作了压电驱动器的样机,验证了其可行性和性能。实验结果表明,该驱动器的最大速度为52.89 mm/s,最大输出力为24.52 N,运动分辨率为23 nm,明显优于已有的文献结果。
{"title":"A high performance hybrid-driven piezoelectric actuator based on asymmetrical structure with combined lateral and coupling motions","authors":"Qi Wang ,&nbsp;Dahoon Ahn ,&nbsp;Yang Zhang ,&nbsp;Peng Yan ,&nbsp;Ziran Wang","doi":"10.1016/j.precisioneng.2025.11.015","DOIUrl":"10.1016/j.precisioneng.2025.11.015","url":null,"abstract":"<div><div>Bionic stepping piezoelectric actuators such as stick–slip or inchworm actuators demonstrate important applications in semiconductor manufacturing and active optics, where high-speed and high-precision motion capabilities, as well as load performance, often involve a trade-off arising from distinct actuation mechanisms. This study proposes a compact piezoelectric actuator based on biomimetic driving principles combining the advantages of stick–slip and inchworm actuations by employing only two piezoelectric stack units. The design comprises a multifunctional driving foot based on a flexible triangular mechanism and a clamping foot based on a spring hinge. The asymmetrical structure features displacement amplification and enables combined lateral and coupling motions, supporting a hybrid driving principle to achieve both stick–slip and inchworm motions from a performance perspective. A prototype of the designed piezoelectric actuator was fabricated to verify its feasibility and performance. The experimental results show that the actuator achieves a maximum speed of 52.89 mm/s and a maximum output force of 24.52 N, with a motion resolution of 23 nm, which significantly outperform existing results in the literature.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1049-1059"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Hard-turning-induced surface integrity and fatigue performance of 18CrNiMo7-6 steel for V-notched specimens v形缺口18CrNiMo7-6钢硬车削诱导表面完整性及疲劳性能
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-09-20 DOI: 10.1016/j.precisioneng.2025.09.016
Yinxia Zhang , Man Liu , Jinyong Han , Siyu Zhai , Xiuwu Liu , Xiaodong Yan , Fuquan Nie , Zhenlong Peng
In conventional grinding processes for hardened steel, excessive residual tensile stress can negatively affect part performance. Additionally, using cutting fluids during grinding often causes environmental pollution. To address these issues, this study adopted dry hard turning (DHT) instead of grinding processing for fatigue specimens. This study focused on the DHT of 18CrNiMo7-6 hardened steel and examined how the DHT processing parameters affect the surface roughness, surface residual stress, and 3D surface morphology of 18CrNiMo7-6 hardened steel V-notch specimens. Additionally, fatigue tests and fracture analyses were performed to compare the fatigue performance of the specimens machined via DHT and grinding processing with the preferred parameters. The experimental results show that as the rotational speed (n) increases, the surface roughness (Ra) first decreases and then increases, whereas the residual compressive stress of the V-notch fatigue specimens first increases and then decreases. As the feed velocity (vf) increases, Ra increases, and the residual compressive stress decreases. Under specific conditions, when n = 1200 rpm and vf = 5 mm/min, Ra reaches a minimum of 0.259 μm, the axial residual stress reaches a maximum of −580.0 MPa and the tangential residual stress reaches a maximum of −420.6 MPa. Additionally, the surface integrity of the specimens machined via DHT is significantly superior to that of the specimens processed via conventional grinding, and the fatigue resistance of the DHT-machined specimens is superior to that of the specimens processed via grinding. The fatigue resistance of the DHT specimens is better than that of the ground specimens, which can realize “Turning instead of Grinding.”
在淬火钢的常规磨削工艺中,过量的残余拉伸应力会对零件性能产生负面影响。此外,在磨削过程中使用切削液往往会造成环境污染。为了解决这些问题,本研究采用干硬车削(DHT)来代替磨削加工疲劳试样。本研究以18CrNiMo7-6淬硬钢的DHT为研究对象,研究了DHT工艺参数对18CrNiMo7-6淬硬钢v形缺口试样表面粗糙度、表面残余应力和三维表面形貌的影响。此外,还进行了疲劳试验和断裂分析,比较了经DHT和磨削加工的试样在优选参数下的疲劳性能。实验结果表明:随着转速(n)的增大,表面粗糙度(Ra)先减小后增大,v型缺口疲劳试样的残余压应力先增大后减小;随着进给速度(vf)的增大,Ra增大,残余压应力减小。在特定条件下,当n = 1200 rpm, vf = 5 mm/min时,Ra最小值为0.259 μm,轴向残余应力最大值为−580.0 MPa,切向残余应力最大值为−420.6 MPa。此外,DHT加工的试样表面完整性明显优于常规磨削加工的试样,并且DHT加工的试样的抗疲劳性能优于常规磨削加工的试样。DHT试样的抗疲劳性能优于地面试样,可实现“车削而不磨”。
{"title":"Hard-turning-induced surface integrity and fatigue performance of 18CrNiMo7-6 steel for V-notched specimens","authors":"Yinxia Zhang ,&nbsp;Man Liu ,&nbsp;Jinyong Han ,&nbsp;Siyu Zhai ,&nbsp;Xiuwu Liu ,&nbsp;Xiaodong Yan ,&nbsp;Fuquan Nie ,&nbsp;Zhenlong Peng","doi":"10.1016/j.precisioneng.2025.09.016","DOIUrl":"10.1016/j.precisioneng.2025.09.016","url":null,"abstract":"<div><div>In conventional grinding processes for hardened steel, excessive residual tensile stress can negatively affect part performance. Additionally, using cutting fluids during grinding often causes environmental pollution. To address these issues, this study adopted dry hard turning (DHT) instead of grinding processing for fatigue specimens. This study focused on the DHT of 18CrNiMo7-6 hardened steel and examined how the DHT processing parameters affect the surface roughness, surface residual stress, and 3D surface morphology of 18CrNiMo7-6 hardened steel V-notch specimens. Additionally, fatigue tests and fracture analyses were performed to compare the fatigue performance of the specimens machined via DHT and grinding processing with the preferred parameters. The experimental results show that as the rotational speed (<em>n</em>) increases, the surface roughness (<em>Ra</em>) first decreases and then increases, whereas the residual compressive stress of the V-notch fatigue specimens first increases and then decreases. As the feed velocity (<em>v</em><sub><em>f</em></sub>) increases, <em>Ra</em> increases, and the residual compressive stress decreases. Under specific conditions, when <em>n =</em> 1200 rpm and <em>v</em><sub><em>f</em></sub> = 5 mm/min, <em>Ra</em> reaches a minimum of 0.259 μm, the axial residual stress reaches a maximum of −580.0 MPa and the tangential residual stress reaches a maximum of −420.6 MPa. Additionally, the surface integrity of the specimens machined via DHT is significantly superior to that of the specimens processed via conventional grinding, and the fatigue resistance of the DHT-machined specimens is superior to that of the specimens processed via grinding. The fatigue resistance of the DHT specimens is better than that of the ground specimens, which can realize “Turning instead of Grinding.”</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 268-278"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158621","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Deep learning-driven virtual phase shifting for enhanced interferometric surface profiling 深度学习驱动的虚拟相移增强干涉表面轮廓
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-10-28 DOI: 10.1016/j.precisioneng.2025.10.021
Jurim Jeon , Yangjin Kim , Naohiko Sugita
Accurate surface measurement of silicon wafers is essential for various high-precision applications, where even sub-nanometer deviations can lead to critical performance degradation. Phase-shifting interferometry (PSI) is widely used for this task owing to its high accuracy. Among PSI methods, the classical 4-step phase-shifting algorithm (PSA) with π/2 shifts offers an optimal balance between accuracy and simplicity, effectively compensating for second harmonic distortion. However, in real-world experiments, ideal phase shifts are difficult to realize because of environmental disturbances, which result in phase-shift errors and coupling effects with harmonic distortions. To address this limitation, we propose a deep learning-based virtual phase shifter (DLVPS) that generates three additional interferograms with accurate phase shifts, which accounts for second harmonic components, from a single experimental interferogram. The original input interferogram and the three generated interferograms comprise a synthetic interferogram sequence that enables accurate phase retrieval. Experimental validation on silicon wafer profiling confirmed that the DLVPS can produce more accurate phase shifts than the classical experimental method, demonstrating its robustness against environmental disturbances. The evaluation of the retrieved phase exhibited phase error of 0.0725 and standard deviation of 0.0368 rad, indicating that the proposed method achieved both high phase retrieval accuracy and robust repeatability. Our approach utilizes deep learning to reduce reliance on complex hardware-based phase shifting, achieving stable and precise phase retrieval in the presence of environmental disturbances. Furthermore, by combining this with analytic phase retrieval, the proposed method overcomes the practical limitations of PSI while preserving the strengths of the established 4-step PSA.
硅晶圆的精确表面测量对于各种高精度应用至关重要,即使是亚纳米偏差也可能导致关键性能下降。相移干涉法(PSI)因其精度高而被广泛应用于该任务。在PSI方法中,经典的π/2位移的4步相移算法(PSA)在精度和简单性之间取得了最佳平衡,有效地补偿了二次谐波失真。然而,在实际实验中,由于环境干扰,难以实现理想的相移,从而导致相移误差和谐波畸变耦合效应。为了解决这一限制,我们提出了一种基于深度学习的虚拟移相器(DLVPS),它可以从单个实验干涉图中生成三个具有精确相移的额外干涉图,这些干涉图占二次谐波分量。原始输入干涉图和生成的三个干涉图组成一个合成干涉图序列,可以实现精确的相位恢复。在硅片上进行的实验验证证实,DLVPS比传统的实验方法可以产生更精确的相移,证明了它对环境干扰的鲁棒性。相位评价的相位误差为0.0725,标准差为0.0368 rad,表明该方法具有较高的相位检索精度和鲁棒重复性。我们的方法利用深度学习来减少对复杂的基于硬件的相移的依赖,在存在环境干扰的情况下实现稳定和精确的相位检索。此外,通过将其与分析相位检索相结合,所提出的方法克服了PSI的实际局限性,同时保留了已建立的四步PSA的优势。
{"title":"Deep learning-driven virtual phase shifting for enhanced interferometric surface profiling","authors":"Jurim Jeon ,&nbsp;Yangjin Kim ,&nbsp;Naohiko Sugita","doi":"10.1016/j.precisioneng.2025.10.021","DOIUrl":"10.1016/j.precisioneng.2025.10.021","url":null,"abstract":"<div><div>Accurate surface measurement of silicon wafers is essential for various high-precision applications, where even sub-nanometer deviations can lead to critical performance degradation. Phase-shifting interferometry (PSI) is widely used for this task owing to its high accuracy. Among PSI methods, the classical 4-step phase-shifting algorithm (PSA) with π/2 shifts offers an optimal balance between accuracy and simplicity, effectively compensating for second harmonic distortion. However, in real-world experiments, ideal phase shifts are difficult to realize because of environmental disturbances, which result in phase-shift errors and coupling effects with harmonic distortions. To address this limitation, we propose a deep learning-based virtual phase shifter (DLVPS) that generates three additional interferograms with accurate phase shifts, which accounts for second harmonic components, from a single experimental interferogram. The original input interferogram and the three generated interferograms comprise a synthetic interferogram sequence that enables accurate phase retrieval. Experimental validation on silicon wafer profiling confirmed that the DLVPS can produce more accurate phase shifts than the classical experimental method, demonstrating its robustness against environmental disturbances. The evaluation of the retrieved phase exhibited phase error of 0.0725 and standard deviation of 0.0368 rad, indicating that the proposed method achieved both high phase retrieval accuracy and robust repeatability. Our approach utilizes deep learning to reduce reliance on complex hardware-based phase shifting, achieving stable and precise phase retrieval in the presence of environmental disturbances. Furthermore, by combining this with analytic phase retrieval, the proposed method overcomes the practical limitations of PSI while preserving the strengths of the established 4-step PSA.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 757-766"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145416751","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Algebraic kinematic modeling and trajectory analysis for double-sided planetary grinding of silicon wafers in semiconductor manufacturing 半导体制造中硅片双面行星磨削的代数运动学建模与轨迹分析
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-10-19 DOI: 10.1016/j.precisioneng.2025.10.013
Chung-Yu Tsai , Chih-Chun Cheng , Wei-Jie Luo
Double-sided planetary grinding (DSPG) of semiconductor materials faces several critical challenges, including the lack of a unified quantitative kinematic framework, systematic methods for determining optimal grinding cycles, and sufficient understanding of the trajectory overlap mechanisms that affect surface uniformity. Furthermore, current approaches cannot quantify the directional randomness in the grinding paths, leading to inefficient empirical parameter selection. To address these limitations, this study develops a comprehensive algebraic kinematic modeling framework. Precise mathematical models are derived to describe the planetary gear motion relationships, and an optimal cycle determination methodology is introduced. A novel trajectory overlap analysis method is proposed for examining the abrasive grain behavior, and a Shannon entropy method is employed to quantify the grinding path directional randomness and support data-driven optimization. Case studies show that the relative rotational speed ratios significantly influence the surface uniformity, with moderate grinding cycles achieving nearly uniform directional distributions. Moreover, the framework accurately predicts trajectory repetition cycles and explains the variations in the surface quality. Overall, it provides semiconductor engineers with systematic process control tools, overcoming the limitations of empirical approaches and enabling consistent, high-quality wafer processing for hard materials such as silicon carbide (SiC) and gallium nitride (GaN).
半导体材料的双面行星磨削(DSPG)面临着几个关键的挑战,包括缺乏统一的定量运动学框架,确定最佳磨削周期的系统方法,以及对影响表面均匀性的轨迹重叠机制的充分理解。此外,现有方法无法量化磨削路径的方向随机性,导致经验参数选择效率低下。为了解决这些限制,本研究开发了一个全面的代数运动学建模框架。推导了描述行星齿轮运动关系的精确数学模型,并介绍了最优周期确定方法。提出了一种新的轨迹重叠分析方法来检测磨粒行为,并利用香农熵法量化磨削路径方向随机性,支持数据驱动优化。实例研究表明,相对转速比显著影响表面均匀性,适度的磨削循环可以获得接近均匀的方向分布。此外,该框架准确地预测了轨迹重复周期,并解释了表面质量的变化。总的来说,它为半导体工程师提供了系统的过程控制工具,克服了经验方法的局限性,并实现了硬质材料(如碳化硅(SiC)和氮化镓(GaN))的一致,高质量的晶圆加工。
{"title":"Algebraic kinematic modeling and trajectory analysis for double-sided planetary grinding of silicon wafers in semiconductor manufacturing","authors":"Chung-Yu Tsai ,&nbsp;Chih-Chun Cheng ,&nbsp;Wei-Jie Luo","doi":"10.1016/j.precisioneng.2025.10.013","DOIUrl":"10.1016/j.precisioneng.2025.10.013","url":null,"abstract":"<div><div>Double-sided planetary grinding (DSPG) of semiconductor materials faces several critical challenges, including the lack of a unified quantitative kinematic framework, systematic methods for determining optimal grinding cycles, and sufficient understanding of the trajectory overlap mechanisms that affect surface uniformity. Furthermore, current approaches cannot quantify the directional randomness in the grinding paths, leading to inefficient empirical parameter selection. To address these limitations, this study develops a comprehensive algebraic kinematic modeling framework. Precise mathematical models are derived to describe the planetary gear motion relationships, and an optimal cycle determination methodology is introduced. A novel trajectory overlap analysis method is proposed for examining the abrasive grain behavior, and a Shannon entropy method is employed to quantify the grinding path directional randomness and support data-driven optimization. Case studies show that the relative rotational speed ratios significantly influence the surface uniformity, with moderate grinding cycles achieving nearly uniform directional distributions. Moreover, the framework accurately predicts trajectory repetition cycles and explains the variations in the surface quality. Overall, it provides semiconductor engineers with systematic process control tools, overcoming the limitations of empirical approaches and enabling consistent, high-quality wafer processing for hard materials such as silicon carbide (SiC) and gallium nitride (GaN).</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 660-676"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362967","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Isotropic point synthesis of flexures and of compliant mechanisms 挠曲和柔顺机构的各向同性点综合
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-10-09 DOI: 10.1016/j.precisioneng.2025.09.027
O. Sorgonà , L. Bruzzone , O. Giannini , M. Verotti
In this paper, the point compliance synthesis method is applied at the output port of a compliant mechanism to determine the points that satisfy the isotropy property. The kinetostatics of the compliant system is described using the ellipse of elasticity theory. According to the proposed modeling approach, based on projective geometry, the position of the isotropic points depends solely on the conic eccentricity, and their coordinates can be obtained through a simple arithmetic expression. Since any compliant system can be modeled by an ellipse of elasticity, the results obtained are of general validity. The synthesis procedure is applied to three case studies: two uniform flexures having axes with constant and variable curvature, and a closed-chain compliant mechanism. Numerical simulations and experimental testing are carried out to validate the procedure and to confirm the isotropy property.
本文将点柔度综合方法应用于柔度机构的输出端,以确定满足各向同性的点。用弹性椭圆理论描述了柔性系统的动静力学。该建模方法基于射影几何,各向同性点的位置仅取决于圆锥偏心率,其坐标可以通过一个简单的算术表达式得到。由于任何柔性系统都可以用弹性椭圆来建模,因此所得结果具有普遍的有效性。综合过程应用于三个案例研究:两个具有恒定曲率和变曲率轴的均匀弯曲机构,以及一个闭链柔性机构。数值模拟和实验验证了该方法的有效性,并确定了各向同性的性质。
{"title":"Isotropic point synthesis of flexures and of compliant mechanisms","authors":"O. Sorgonà ,&nbsp;L. Bruzzone ,&nbsp;O. Giannini ,&nbsp;M. Verotti","doi":"10.1016/j.precisioneng.2025.09.027","DOIUrl":"10.1016/j.precisioneng.2025.09.027","url":null,"abstract":"<div><div>In this paper, the <em>point compliance synthesis</em> method is applied at the output port of a compliant mechanism to determine the points that satisfy the isotropy property. The kinetostatics of the compliant system is described using the ellipse of elasticity theory. According to the proposed modeling approach, based on projective geometry, the position of the isotropic points depends solely on the conic eccentricity, and their coordinates can be obtained through a simple arithmetic expression. Since any compliant system can be modeled by an ellipse of elasticity, the results obtained are of general validity. The synthesis procedure is applied to three case studies: two uniform flexures having axes with constant and variable curvature, and a closed-chain compliant mechanism. Numerical simulations and experimental testing are carried out to validate the procedure and to confirm the isotropy property.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 624-631"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145362968","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Defect analysis by computed tomography in metallic materials: Optimisation, uncertainty quantification and classification 金属材料的计算机断层扫描缺陷分析:优化、不确定度量化和分类
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-09-20 DOI: 10.1016/j.precisioneng.2025.09.008
Emanuele Avoledo , Marco Petruzzi , Marco Pelegatti , Alessandro Tognan , Francesco De Bona , Michele Pressacco , Riccardo Toninato , Enrico Salvati
This paper presents a methodology to optimise post-processing parameters in X-ray Computed Tomography (CT) for defect detection in metallic materials. The approach addresses three main goals: minimisation of systematic errors in defect reconstruction, quantification of uncertainty, and reliable defect classification. The proposed methodology aims to remove the systematic error that impacts defect reconstruction, thereby improving the accuracy of defect size and morphology assessment, which is essential for fatigue life prediction, particularly in materials produced through additive manufacturing (AM). An iterative comparison between CT-based defect and fractographic measurements is involved to identify the optimal CT post-processing parameters, such as the grey threshold (GT). The methodology was applied to 11 dog-bone-shaped titanium alloy samples (5.5 mm nominal gauge diameter) produced via electron beam melting. The optimisation procedure resulted in a GT value that was 134% of that obtained using a commercial algorithm, effectively removing the systematic uncertainty associated with Murakami’s parameter area. The uncertainty of various defect features, such as equivalent diameter, sphericity and aspect ratio, was calculated by propagating the remaining stochastic uncertainty of area. An unsupervised K-means algorithm categorised unlabelled defects into three major types often encountered in AM: gas pores, keyholes, and lack of fusion. Finally, the labelled defects were processed through a support vector machine to infer the analytical form of the decision boundaries, achieving an accuracy of 99%.
本文提出了一种优化金属材料缺陷检测中x射线计算机断层扫描(CT)后处理参数的方法。该方法有三个主要目标:缺陷重建中的系统误差最小化,不确定性的量化,以及可靠的缺陷分类。提出的方法旨在消除影响缺陷重建的系统误差,从而提高缺陷尺寸和形态评估的准确性,这对于疲劳寿命预测至关重要,特别是在通过增材制造(AM)生产的材料中。基于CT的缺陷测量和断口测量之间的迭代比较涉及到确定最佳CT后处理参数,如灰色阈值(GT)。将该方法应用于电子束熔化法制备的11个狗骨型钛合金样品(公称规径5.5 mm)。优化程序产生的GT值是使用商业算法获得的值的134%,有效地消除了与村上参数面积相关的系统不确定性。通过传播剩余的面积随机不确定性,计算出等效直径、球度和纵横比等缺陷特征的不确定性。一种无监督K-means算法将未标记缺陷分为AM中经常遇到的三种主要类型:气孔、锁孔和缺乏融合。最后,通过支持向量机对标记的缺陷进行处理,推断出决策边界的解析形式,准确率达到99%。
{"title":"Defect analysis by computed tomography in metallic materials: Optimisation, uncertainty quantification and classification","authors":"Emanuele Avoledo ,&nbsp;Marco Petruzzi ,&nbsp;Marco Pelegatti ,&nbsp;Alessandro Tognan ,&nbsp;Francesco De Bona ,&nbsp;Michele Pressacco ,&nbsp;Riccardo Toninato ,&nbsp;Enrico Salvati","doi":"10.1016/j.precisioneng.2025.09.008","DOIUrl":"10.1016/j.precisioneng.2025.09.008","url":null,"abstract":"<div><div>This paper presents a methodology to optimise post-processing parameters in X-ray Computed Tomography (CT) for defect detection in metallic materials. The approach addresses three main goals: minimisation of systematic errors in defect reconstruction, quantification of uncertainty, and reliable defect classification. The proposed methodology aims to remove the systematic error that impacts defect reconstruction, thereby improving the accuracy of defect size and morphology assessment, which is essential for fatigue life prediction, particularly in materials produced through additive manufacturing (AM). An iterative comparison between CT-based defect and fractographic measurements is involved to identify the optimal CT post-processing parameters, such as the grey threshold (GT). The methodology was applied to 11 dog-bone-shaped titanium alloy samples (5.5 mm nominal gauge diameter) produced via electron beam melting. The optimisation procedure resulted in a GT value that was 134% of that obtained using a commercial algorithm, effectively removing the systematic uncertainty associated with Murakami’s parameter <span><math><msqrt><mrow><mtext>area</mtext></mrow></msqrt></math></span>. The uncertainty of various defect features, such as equivalent diameter, sphericity and aspect ratio, was calculated by propagating the remaining stochastic uncertainty of <span><math><msqrt><mrow><mtext>area</mtext></mrow></msqrt></math></span>. An unsupervised K-means algorithm categorised unlabelled defects into three major types often encountered in AM: gas pores, keyholes, and lack of fusion. Finally, the labelled defects were processed through a support vector machine to infer the analytical form of the decision boundaries, achieving an accuracy of 99%.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 235-248"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145158626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhancing the functionalities of three-dimensional imaging LiDAR: A review 增强三维成像激光雷达的功能:综述
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-10-06 DOI: 10.1016/j.precisioneng.2025.10.005
Xingsheng Liu , Anhu Li , Jincai Wu
Light detection and ranging (LiDAR) technology has garnered broad interest and experienced rapid growth as an essential approach to three-dimensional (3D) perception for unmanned systems, which exhibit significant potential in many flourishing fields. Motivated by the emerging need for more complex and diverse applications, LiDAR has been increasingly developed with enhanced functionalities. In this paper, we present a systematic review of the advances in 3D imaging LiDAR and its performance enhancement methods. The basic LiDAR architecture is demonstrated with fundamental principles in distance measurement and beam scanning. The research directions and progress in enhancing the 3D imaging performance of LiDAR are further discussed in terms of detection range, field of view and resolution, imaging speed, accuracy and stability, as well as information fusion. The representative 3D imaging LiDAR schemes are compared through quantitative evaluation and qualitative discussion about their strengths and limitations. Finally, we summarize the development trends of 3D imaging LiDAR towards system design integration, imaging mode expansion and multi-sensor fusion. It is intended to offer valuable insights for the exploration and application of 3D imaging LiDAR in future.
光探测和测距(LiDAR)技术作为无人系统三维(3D)感知的重要方法,在许多蓬勃发展的领域显示出巨大的潜力,已经引起了广泛的兴趣并经历了快速发展。由于对更复杂和多样化应用的新需求,激光雷达的功能日益增强。本文对三维成像激光雷达及其性能增强方法的研究进展进行了系统综述。介绍了激光雷达的基本结构和距离测量和波束扫描的基本原理。从探测距离、视场和分辨率、成像速度、精度和稳定性以及信息融合等方面进一步探讨了提高激光雷达三维成像性能的研究方向和进展。通过定量评价和定性讨论,比较了具有代表性的三维成像激光雷达方案的优缺点。最后,总结了三维成像激光雷达在系统设计集成、成像模式扩展和多传感器融合方面的发展趋势。旨在为未来3D成像激光雷达的探索和应用提供有价值的见解。
{"title":"Enhancing the functionalities of three-dimensional imaging LiDAR: A review","authors":"Xingsheng Liu ,&nbsp;Anhu Li ,&nbsp;Jincai Wu","doi":"10.1016/j.precisioneng.2025.10.005","DOIUrl":"10.1016/j.precisioneng.2025.10.005","url":null,"abstract":"<div><div>Light detection and ranging (LiDAR) technology has garnered broad interest and experienced rapid growth as an essential approach to three-dimensional (3D) perception for unmanned systems, which exhibit significant potential in many flourishing fields. Motivated by the emerging need for more complex and diverse applications, LiDAR has been increasingly developed with enhanced functionalities. In this paper, we present a systematic review of the advances in 3D imaging LiDAR and its performance enhancement methods. The basic LiDAR architecture is demonstrated with fundamental principles in distance measurement and beam scanning. The research directions and progress in enhancing the 3D imaging performance of LiDAR are further discussed in terms of detection range, field of view and resolution, imaging speed, accuracy and stability, as well as information fusion. The representative 3D imaging LiDAR schemes are compared through quantitative evaluation and qualitative discussion about their strengths and limitations. Finally, we summarize the development trends of 3D imaging LiDAR towards system design integration, imaging mode expansion and multi-sensor fusion. It is intended to offer valuable insights for the exploration and application of 3D imaging LiDAR in future.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 391-407"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145267073","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A positioning error prediction method for complex surface milling based on multi-source heterogeneous data fusion and deep interpretable learning 基于多源异构数据融合和深度可解释学习的复杂曲面铣削定位误差预测方法
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2026-01-01 Epub Date: 2025-09-13 DOI: 10.1016/j.precisioneng.2025.09.002
Jianying Han , Hua Yang , Xihuai Lu , Boren Hou , Shicheng Yi , Zirui Li
The machining of thin-walled parts with complex surfaces, such as aero-engine blades, poses substantial challenges due to their intricate geometry, flexibility, and the multi-axis kinematics involved. Ensuring high precision in such milling processes is crucial, as minute positioning errors can detrimentally affect aerodynamic performance and structural reliability. In this study, we propose a novel Residual-LSTM-iTransformer Network (RLTN) framework to predict and interpret machining positioning errors for complex surfaces under dynamic milling conditions. The RLTN model fuses multi-source heterogeneous data, including low-cost sensor signals (e.g. milling torque), machining parameters (spindle speed, feed rate, depth of cut, etc.), and workpiece attributes (local stiffness and curvature radius), into a unified deep learning architecture. Through hierarchical feature extraction via residual convolutional layers, sequential LSTM units, and a parameter-conditioned transformer, the model captures both local and long-range dependencies in the cutting process. A SHAP-based interpretability module is integrated, enabling quantitative attribution of error predictions to the process and material parameters. The RLTN is evaluated on high-precision blade milling datasets encompassing various cutting conditions. Experimental results demonstrate that the proposed approach outperforms conventional physical models and baseline learning methods in prediction accuracy. Moreover, the RLTN provides deep insight into the influence of key factors on machining errors, facilitating a better understanding of the error-generation mechanism. This interpretable framework paves the way for a closed-loop “predict-interpret-optimize” strategy in high-precision manufacturing, allowing process parameters to be optimized not only for minimum error but also for reduced uncertainty and improved consistency in manufacturing thin-walled parts with complex surface.
具有复杂表面的薄壁零件的加工,如航空发动机叶片,由于其复杂的几何形状,灵活性和涉及的多轴运动学,提出了巨大的挑战。在这种铣削过程中,确保高精度是至关重要的,因为微小的定位误差会对气动性能和结构可靠性产生不利影响。在这项研究中,我们提出了一个新的残差- lstm - ittransformer Network (RLTN)框架来预测和解释动态铣削条件下复杂表面的加工定位误差。RLTN模型将多源异构数据,包括低成本传感器信号(如铣削扭矩)、加工参数(主轴转速、进给速率、切削深度等)和工件属性(局部刚度和曲率半径)融合到一个统一的深度学习架构中。通过残差卷积层、顺序LSTM单元和参数条件变压器的分层特征提取,该模型捕获了切割过程中的局部和远程依赖关系。集成了基于shap的可解释性模块,可以定量地将误差预测归因于工艺和材料参数。RLTN在包含各种切削条件的高精度刀片铣削数据集上进行了评估。实验结果表明,该方法在预测精度上优于传统的物理模型和基线学习方法。此外,RLTN可以深入了解关键因素对加工误差的影响,有助于更好地理解误差产生机制。这种可解释的框架为高精度制造中的闭环“预测-解释-优化”策略铺平了道路,允许优化工艺参数,不仅可以实现最小误差,还可以减少制造具有复杂表面的薄壁零件的不确定性和提高一致性。
{"title":"A positioning error prediction method for complex surface milling based on multi-source heterogeneous data fusion and deep interpretable learning","authors":"Jianying Han ,&nbsp;Hua Yang ,&nbsp;Xihuai Lu ,&nbsp;Boren Hou ,&nbsp;Shicheng Yi ,&nbsp;Zirui Li","doi":"10.1016/j.precisioneng.2025.09.002","DOIUrl":"10.1016/j.precisioneng.2025.09.002","url":null,"abstract":"<div><div>The machining of thin-walled parts with complex surfaces, such as aero-engine blades, poses substantial challenges due to their intricate geometry, flexibility, and the multi-axis kinematics involved. Ensuring high precision in such milling processes is crucial, as minute positioning errors can detrimentally affect aerodynamic performance and structural reliability. In this study, we propose a novel Residual-LSTM-iTransformer Network (RLTN) framework to predict and interpret machining positioning errors for complex surfaces under dynamic milling conditions. The RLTN model fuses multi-source heterogeneous data, including low-cost sensor signals (e.g. milling torque), machining parameters (spindle speed, feed rate, depth of cut, etc.), and workpiece attributes (local stiffness and curvature radius), into a unified deep learning architecture. Through hierarchical feature extraction via residual convolutional layers, sequential LSTM units, and a parameter-conditioned transformer, the model captures both local and long-range dependencies in the cutting process. A SHAP-based interpretability module is integrated, enabling quantitative attribution of error predictions to the process and material parameters. The RLTN is evaluated on high-precision blade milling datasets encompassing various cutting conditions. Experimental results demonstrate that the proposed approach outperforms conventional physical models and baseline learning methods in prediction accuracy. Moreover, the RLTN provides deep insight into the influence of key factors on machining errors, facilitating a better understanding of the error-generation mechanism. This interpretable framework paves the way for a closed-loop “predict-interpret-optimize” strategy in high-precision manufacturing, allowing process parameters to be optimized not only for minimum error but also for reduced uncertainty and improved consistency in manufacturing thin-walled parts with complex surface.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 147-167"},"PeriodicalIF":3.7,"publicationDate":"2026-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145106127","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1