Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第7页

A novel bionic parallel XY piezoelectric stick-slip positioning stage 新型仿生平行 XY 压电粘滑定位平台

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-21 DOI: 10.1016/j.precisioneng.2024.11.009

Meng Xu , Yiling Yang , Yang Lv , Gaohua Wu , Yuguo Cui

This paper reports a novel parallel XY piezoelectric stick-slip positioning stage with bionic actuation mechanisms and driving strategies by mimicking fleas in nature. In particular, it exhibits low stress, macro-stroke decoupling, easy regulation, and smooth transition. Double-circular arc bionic flexible hinges are devised to reduce stress. Meanwhile, piezoelectric stick-slip driving is combined with orthogonal guiding mechanisms to realize high resolution, large stroke, and parallel decoupling. Also, a bionic driving strategy with improved Hopf oscillators is proposed to regulate stick-slip motion and decrease system disturbances. Statics and dynamics models are derived, and stress, frequency, and single-step displacement are simulated. Finally, a prototype is manufactured, and its performance is tested. The maximum velocity is 9.03 mm/s, x- and y-direction displacement coupling rates are 0.89 % and 0.92 %, resolutions are 5 nm and 5.5 nm, and maximum horizontal and vertical loads are 1.4 N and 40 N, respectively. Meanwhile, the positioning stage can quickly converge to its steady state even under a 30 V interference and suppress the micro/nano vibration using the proposed driving strategy. Experiments verify the effectiveness of the structural design and bionic driving strategy.

本文报告了一种新型平行 XY 压电粘滑定位平台，它采用仿生驱动机制和驱动策略，模仿自然界中的跳蚤。特别是，它具有低应力、大行程解耦、易于调节和平稳过渡等特点。双圆弧仿生柔性铰链可降低应力。同时，压电粘滑驱动与正交导向机制相结合，实现了高分辨率、大行程和平行解耦。此外，还提出了一种带有改进型霍普夫振荡器的仿生驱动策略，以调节粘滑运动并减少系统干扰。推导出了静力学和动力学模型，并模拟了应力、频率和单步位移。最后，制造了一个原型，并对其性能进行了测试。最大速度为 9.03 mm/s，X 和 Y 方向位移耦合率分别为 0.89 % 和 0.92 %，分辨率分别为 5 nm 和 5.5 nm，最大水平和垂直载荷分别为 1.4 N 和 40 N。同时，利用所提出的驱动策略，即使在 30 V 的干扰下，定位台也能迅速收敛到稳定状态，并抑制微/纳米振动。实验验证了结构设计和仿生驱动策略的有效性。

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引用次数: 0

Stroboscopic sampling moiré microscope (SSMM) for investigating full field in-plane vibration of MEMS mechanical transducers 频闪采样moir<s:1>显微镜（SSMM）用于研究MEMS机械换能器的全场面内振动

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-19 DOI: 10.1016/j.precisioneng.2024.11.004

Mona Yadi , Tsutomu Uenohara , Yasuhiro Mizutani , Yoshiharu Morimoto , Yasuhiro Takaya

Precise analysis of the full-field in-plane vibration of microelectromechanical system (MEMS) transducers is crucial for assessing their device functionality and performance. As an example, in the context of frequency/amplitude modulation of Quartz Tuning Fork (QTF)-based atomic force microscopy (AFM) systems, understanding QTF’s in-plane vibration can significantly enhance accurate evaluation of tip-sample forces. Current methods, such as analytical and numerical approaches, have limitations when it comes to providing accurate measurements. To address these limitations, we proposed an experimental approach that combines stroboscopic and sampling moiré (SM) techniques. This method focuses on investigating the in-plane vibration of a QTF and utilizes the obtained results to measure the sensor’s dynamic properties such as vibration mode shape, resonance frequency (

f_{0}

), and quality factor (

Q

). Nanometer-scale light pulses, generated using a custom-designed stroboscope, are synchronized with the QTF’s excitation voltage to freeze the vibration effectively, enabling imaging using a standard CCD camera. Subsequently, SM analysis is employed to extract the surface vibration profile, facilitating the measurement of vibration mode shape,

f_{0}

, and

Q

. This technique shows promise for analyzing the dynamic behavior of various micro-devices compatible with the sample preparation process.

精确分析微机电系统（MEMS）换能器的全场面内振动对于评估其功能和性能至关重要。例如，在基于石英音叉（QTF）的原子力显微镜（AFM）系统的频率/幅度调制背景下，了解QTF的面内振动可以显著提高对尖端-样品力的准确评估。目前的方法，如解析和数值方法，在提供精确测量时存在局限性。为了解决这些限制，我们提出了一种结合频闪和采样摩尔（SM）技术的实验方法。该方法侧重于研究QTF的平面内振动，并利用获得的结果测量传感器的动态特性，如振动模态、共振频率（f0）和质量因子(Q)。使用定制设计的频闪仪产生纳米级光脉冲，与QTF的激励电压同步，有效地冻结振动，从而使用标准CCD相机进行成像。随后，采用SM分析提取表面振动剖面，便于测量振动模态振型、f0和q。该技术有望分析与样品制备过程兼容的各种微器件的动态行为。

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引用次数: 0

Stiffness model for pneumatic spring with air-diaphragm coupling effect 具有空气-膜片耦合效应的气动弹簧刚度模型

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-17 DOI: 10.1016/j.precisioneng.2024.11.008

Yumei Bai , Rongxing Liu , Jiulin Wu , Jixing Che , Mingkai Wu , Rui Zhou , Xuedong Chen , Lizhan Zeng , Wei Jiang

An accurate pneumatic spring stiffness model is essential for achieving subhertz, quasi-zero stiffness vibration isolation in optical experiments, precision measurements, and semiconductor manufacturing involving heavy equipment. Conventional stiffness models for pneumatic springs with diaphragms often neglect the effect of the elastic diaphragm, making it difficult to accurately characterise pneumatic spring stiffness. This paper presents an innovative pneumatic spring stiffness model that incorporates the air-diaphragm coupling effect—a phenomenon in which the air and diaphragm interact synergistically to affect stiffness. The inclusion of this coupling effect alters the effective area and volume of the pneumatic spring, two critical parameters influencing stiffness. Detailed mechanical and geometrical derivations are provided to establish an accurate stiffness model. A modification coefficient is introduced to quantify the air-diaphragm coupling effect on stiffness, and various factors influencing this coefficient, as well as their impact on stiffness, are examined. An experiment was conducted to validate the proposed model, showing a relative error of less than 1.65 % between the experimental and theoretical results. Considering the air-diaphragm coupling effect, the absolute error approximation was reduced by an order of magnitude, and the relative stiffness decreased by 11.05 % and 8.26 % in Experiments 1 and 2, respectively. Owing to its high precision, the proposed model provides theoretical guidance for the engineering design of pneumatic springs and facilitates the accurate matching of quasi-zero stiffness vibration isolation systems for heavy equipment in ultra-precision applications.

准确的气动弹簧刚度模型对于在光学实验、精密测量和涉及重型设备的半导体制造中实现亚赫兹、准零刚度振动隔离至关重要。带膜片的气动弹簧的传统刚度模型通常会忽略弹性膜片的影响，因此难以准确表征气动弹簧的刚度。本文提出了一种创新的气动弹簧刚度模型，其中包含空气-膜片耦合效应--空气和膜片协同作用影响刚度的现象。这种耦合效应改变了气动弹簧的有效面积和体积，而这是影响刚度的两个关键参数。为建立精确的刚度模型，提供了详细的机械和几何推导。引入了一个修正系数来量化空气-膜片耦合效应对刚度的影响，并研究了影响该系数的各种因素及其对刚度的影响。实验验证了所提出的模型，结果表明实验结果与理论结果之间的相对误差小于 1.65%。考虑到空气-隔膜耦合效应，绝对误差近似值降低了一个数量级，实验 1 和实验 2 中的相对刚度分别降低了 11.05 % 和 8.26 %。该模型精度高，为气动弹簧的工程设计提供了理论指导，有助于为超精密应用中的重型设备精确匹配准零刚度隔振系统。

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引用次数: 0

Distance deviation sensitivity on null test of convex hyperboloid mirrors with large relative aperture 具有大相对孔径的凸双曲面反射镜无效测试的距离偏差灵敏度

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-17 DOI: 10.1016/j.precisioneng.2024.11.006

Shijie Li , Jiani Liu , Bingcai Liu , Ailing Tian , Sibo Niu , Lumin Zhao , Haitao Liu , Chunyan Shi , Jin Zhang , Haifeng Liang , Changlong Cai

In the shape measurement of convex hyperboloid mirrors with large relative apertures, alignment deviations can significantly affect the accuracy of null test results owing to their sensitivity, resulting in inaccurate results. This paper introduces autocollimation and compensation methods. Subsequently, a shape detection experiment of a large relative aperture convex hyperboloid mirror with a diameter of 15 mm was conducted using the aforementioned methods. Further, a detailed simulation analysis was performed to address the inconsistencies between the two test results. The results suggested that the Hindle sphere method was highly sensitive to distance deviation. Furthermore, the distances in the optical path exerted a complementary effect, which easily obscured the true surface shape of the measured part. The computer-generated hologram (CGH) method could accurately determine the true surface shape deviation based on the alignment judgment provided by the aligned CGH part. These studies provide scientific guidance for more accurately obtaining the true surface shape error of the hyperboloid mirror under test, and have significant engineering application value.

在对具有较大相对孔径的凸面双曲面反射镜进行形状测量时，对准偏差会由于其灵敏度而严重影响无效测试结果的准确性，导致结果不准确。本文介绍了自动对准和补偿方法。随后，利用上述方法对直径为 15 毫米的大相对孔径凸双曲面反射镜进行了形状检测实验。此外，针对两次检测结果不一致的问题，还进行了详细的模拟分析。结果表明，Hindle 球方法对距离偏差非常敏感。此外，光路中的距离会产生互补效应，很容易掩盖被测零件的真实表面形状。计算机生成全息图（CGH）方法可以根据对准的 CGH 零件提供的对准判断准确确定真实的表面形状偏差。这些研究为更准确地获取被测双曲面镜的真实表面形状误差提供了科学指导，具有重要的工程应用价值。

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引用次数: 0

Rapid non-contact measurement of distance between two pins of flexspline in harmonic reducers based on standard/actual parts comparison 基于标准件/实际件对比，非接触式快速测量谐波减速器中挠性花键两针之间的距离

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-16 DOI: 10.1016/j.precisioneng.2024.11.007

Caitao Liu, YuGuo Cui, Dan Liang, Li Liu, JunQiang Lou

In order to achieve rapid and precise measurement of distance between two pins of flexspline in harmonic reducers, an rapid non-contact measurement strategy based on standard/actual parts comparison is proposed. Firstly, to eliminate the installation eccentricity error of flexspline fixture, a sine-quadrant eccentricity error elimination method is designed. The sinusoidal curve and quadrant of the measured fixture eccentricity error with respect to the fixture rotation angle is used to calculate the eccentric error components along x and y axes, which has the advantages of simplicity and rapidity. Secondly, a Gaussian-Harmonic Wavelet Filtering (GHWF) algorithm is proposed to filter out the noise in the measurement process, which can effectively suppress the Gibbs phenomenon in harmonic wavelet transformation and improve the signal-to-noise ratio. Finally, an experimental platform including baseplate, turntable, flexspline, moving platform and laser sensor is constructed, in order to verify the performances of error elimination, noise filtering and distance measuring. Experimental results show that the measurement error of the proposed strategy is less than 7 μm, which is consistent with the accuracy obtained by the commercial high-precision gear measuring instrument. The average measurement time is about 29.6 s, much less than the 5 min of the commercial instrument, showing great application potential for the efficient distance measurement of gears and flexsplines.

为了实现谐波减速器挠性规两销间距的快速精确测量，提出了一种基于标准件/实际件比对的快速非接触测量策略。首先，为了消除挠性规夹具的安装偏心误差，设计了一种正弦象限偏心误差消除方法。利用测量到的夹具偏心误差与夹具旋转角度的正弦曲线和象限来计算沿 x 轴和 y 轴的偏心误差分量，具有简单、快速的优点。其次，提出了一种高斯-谐波小波滤波（GHWF）算法来滤除测量过程中的噪声，该算法能有效抑制谐波小波变换中的吉布斯现象，提高信噪比。最后，为了验证误差消除、噪声过滤和距离测量的性能，构建了包括基板、转盘、挠性板、移动平台和激光传感器在内的实验平台。实验结果表明，所提策略的测量误差小于 7 μm，与商用高精度齿轮测量仪获得的精度一致。平均测量时间约为 29.6 秒，远少于商用仪器的 5 分钟，显示出在高效测量齿轮和挠性曲线距离方面的巨大应用潜力。

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引用次数: 0

Based on domain adversarial neural network with multiple loss collaborative optimization for milling tool wear state monitoring under different machining conditions 基于域对抗神经网络的多损失协同优化，用于监测不同加工条件下的铣刀磨损状态

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-14 DOI: 10.1016/j.precisioneng.2024.11.005

Qiang Liu , Jiaqi Liu , Xianli Liu , Jing Ma , Bowen Zhang

In machining, it is crucial to monitor the tool wear status in real time to guarantee the quality of the workpiece being machined. Tool wear monitoring technology mainly reflects the tool state through the physical signals generated during the machining. At present, the technology faces many challenges in practical applications. When facing different machining scenarios, the model is difficult to adapt to new machining scenarios. Therefore, this study proposes a method to monitoring the tool wear state under different machining conditions based on Domain Adversarial Neural Network with multiple loss collaborative optimization (MLCODANN). This method takes the domain adversarial neural network as the framework and uses a multiple loss collaborative optimization method to adjust the optimization direction of the loss. It avoids the problem of conflict between the domain alignment and the classification loss, improves the convergence of model loss. In addition, this study used ResNet18 as a feature extraction network to extract features of the cutting signal. Meanwhile, the horizontal and vertical convolutional kernels

1 \times k

and

k \times 1

are used instead of the convolutional kernel

k \times k

, which reduces model parameters and training time the and improves the model performance. Finally, through comparative experiments, it is proved that MLCODANN model has high accuracy in recognizing tool wear state under different machining conditions.

在机械加工中，实时监控刀具磨损状态对保证加工工件的质量至关重要。刀具磨损监测技术主要通过加工过程中产生的物理信号来反映刀具状态。目前，该技术在实际应用中面临诸多挑战。面对不同的加工场景，该模型很难适应新的加工场景。因此，本研究提出了一种基于域对抗神经网络与多重损失协同优化（MLCODANN）的方法来监测不同加工条件下的刀具磨损状态。该方法以领域对抗神经网络为框架，采用多重损失协同优化方法调整损失的优化方向。它避免了领域排列与分类损失之间的冲突问题，提高了模型损失的收敛性。此外，本研究使用 ResNet18 作为特征提取网络，提取切割信号的特征。同时，采用水平卷积核 1×k 和垂直卷积核 k×1 代替卷积核 k×k，减少了模型参数和训练时间，提高了模型性能。最后，通过对比实验证明，MLCODANN 模型对不同加工条件下刀具磨损状态的识别具有较高的精度。

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引用次数: 0

Fabrication of angle-gradient echelle grating on metallic glass using shaped vibration cutting with time-varying trajectory 利用具有时变轨迹的异形振动切割在金属玻璃上制作角梯度梯度光栅

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-12 DOI: 10.1016/j.precisioneng.2024.11.002

Wei Dai , Pingfa Feng , Zhimeng Chen , Feng Feng , Mengying Luan , Jianjian Wang

In order to solve the problem of narrow band coverage of traditional infrared gratings, a new type of diffraction grating is invented and named as angle-gradient echelle grating. The blaze angle of the grating gradually changes along the direction of the grating grooves, which can be regarded as etching countless sub-gratings with different blaze angles on a grating, breaking the limitation of the number of blaze angles of traditional gratings. In addition, in order to solve the processing problem of angle-gradient echelle grating, a new processing method, shaped vibration cutting (SVC) with a time-varying trajectory is developed. By exploring the influence of different processing parameters on the grating processing results, a suitable processing plan was proposed. Eventually, angle-gradient echelle grating with blaze angles varying from 30° to 55° and surface roughness of as low as 20 nm was fabricated on metallic glass, a material that is difficult to machine.

为了解决传统红外光栅覆盖波段窄的问题，人们发明了一种新型衍射光栅，并将其命名为角梯度埃歇尔光栅。这种光栅的焰角沿着光栅槽的方向逐渐变化，可以说是在一个光栅上刻蚀了无数个不同焰角的子光栅，打破了传统光栅焰角数量的限制。此外，为了解决角梯度榭层光栅的加工问题，还开发了一种新的加工方法--具有时变轨迹的异形振动切割（SVC）。通过探讨不同加工参数对光栅加工结果的影响，提出了合适的加工方案。最终，在金属玻璃这种难以加工的材料上制造出了炽热角从 30°到 55°不等、表面粗糙度低至 20 nm 的角梯度埃歇尔光栅。

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引用次数: 0

Kinematics modeling and trajectory optimization for precision grinding of variable-parameter helical grooves 可变参数螺旋槽精密磨削的运动学建模和轨迹优化

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-10 DOI: 10.1016/j.precisioneng.2024.10.015

Yong Li , Guofu Ding , Zhihui Yang , Changjiu Xia , Zhe Liu , Lei Jiang

End mills with variable helix angles in a certain range can suppress the cutting vibration, and the change of the core radius can improve the cutting rigidity and realize the best match between the rigidity and the chip removal performance. However, the existing process cannot accurately realize the continuous variable helix angle along the cutting edge. Moreover, the change in helix angle and core radius increases the difficulty of calculating the grinding trajectory and makes it difficult to control the rake angle accurately, and that results in the performance of this end mill cannot be accurately guaranteed. Therefore, this paper proposed a kinematics modeling and trajectory optimization method for the precision grinding of variable-parameter helical grooves. Firstly, a general grinding kinematics model is established by geometric analysis. Secondly, with the rake angle, helix angle, and core radius as constraints, models are constructed to solve the location and direction parameters of the grinding wheel. Then, the calculation and optimization method of the grinding trajectory for variable-parameter helical grooves is developed. Finally, the experimental verification is carried out and the results show that the maximum rake angle error is 0.09°, the maximum helix angle error is 0.08°, and the maximum core radius error is 0.053 mm. It indicates the grinding kinematics model and the trajectory optimization are correct. This process can also be used to grind complex helical grooves on custom cutting tools such as drills and screw taps.

在一定范围内可变螺旋角的立铣刀可抑制切削振动，改变刀芯半径可提高切削刚性，实现刚性与排屑性能的最佳匹配。然而，现有工艺无法精确实现沿切削刃连续可变的螺旋角。而且，螺旋角和刀芯半径的变化增加了磨削轨迹的计算难度，使前角难以精确控制，导致该立铣刀的性能无法得到准确保证。因此，本文提出了变参数螺旋槽精密磨削的运动学建模和轨迹优化方法。首先，通过几何分析建立了一般磨削运动学模型。其次，以前角、螺旋角和铁芯半径为约束条件，建立模型求解砂轮的位置和方向参数。然后，建立了变参数螺旋槽磨削轨迹的计算和优化方法。最后，进行了实验验证，结果表明最大前角误差为 0.09°，最大螺旋角误差为 0.08°，最大砂芯半径误差为 0.053 mm。这表明磨削运动学模型和轨迹优化是正确的。该工艺还可用于磨削钻头和丝锥等定制刀具上的复杂螺旋槽。

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引用次数: 0

Review of ultrasonic vibration-assisted milling technology 超声波振动辅助铣削技术回顾

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-09 DOI: 10.1016/j.precisioneng.2024.10.021

Ang Li , Xuewei Zhang , Jianbo Chen , Ting Shi , Lu Wen , Tianbiao Yu

Compared with the conventional milling technology, the ultrasonic vibration-assisted milling technology has better machining performance for hard-to-machine materials. With the progress of ultrasonic generators and ultrasonic transducers, the research of the ultrasonic-assisted milling technology has been developed rapidly. Correspondingly, new design requirements and theoretical concepts are proposed to meet the high-performance requirements of manufacturing complex structures with hard-to-machine materials. There are few comprehensive reviews about the ultrasonic vibration-assisted milling technology. Therefore, we present the first comprehensive review of the advantages, the basic principles, the historical research progress, the cutting tools, the workpiece material properties and the cutting characteristics of the ultrasonic vibration-assisted milling technology to lay a foundation for the related research. In addition, the shortcomings of the existing theories and the outlook for future research directions are also discussed.

与传统铣削技术相比，超声波振动辅助铣削技术对难加工材料具有更好的加工性能。随着超声波发生器和超声波换能器的进步，超声波辅助铣削技术的研究得到了快速发展。相应地，也提出了新的设计要求和理论概念，以满足难加工材料复杂结构的高性能加工要求。有关超声振动辅助铣削技术的全面综述很少。因此，我们首次对超声波振动辅助铣削技术的优点、基本原理、历史研究进展、切削工具、工件材料特性和切削特性进行了全面综述，为相关研究奠定基础。此外，还讨论了现有理论的不足之处以及对未来研究方向的展望。

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引用次数: 0

An integrated hot embossing and thermal reflow method for precision manufacture of plano-convex glass microlens arrays 用于精密制造平凸玻璃微透镜阵列的集成热压印和热回流方法

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-11-04 DOI: 10.1016/j.precisioneng.2024.11.001

Gao Yang , Kang Yang , Jianzhi Li , Chi Fai Cheung , Feng Gong

Plano-convex glass microlens arrays (MLAs) have broad applications in imaging, sensing, illumination, and communication systems. This paper proposed a three-step method to precision manufacture of plano-convex glass MLAs, which involves fabrication of SiC microhole arrays (MHAs), hot embossing of glass micropillar arrays (MPAs) and thermal reflow of glass MLAs. The effects of embossing temperature, force, and time on the replication accuracy of glass MPAs are evaluated. Subsequently, the glass MPAs with decent replication accuracy were subjected to thermal reflow experiments for studying the effects of reflowing temperature and reflowing time on the geometric features of formed glass MLAs. It is found that the height and tip curvature of reflowed glass microlenses can be controlled by adjusting the reflowing temperature and time. The warpage amplitudes and mean birefringence of most reflowed glass substrates are less than 5 μm and 27 nm/cm, respectively. Furthermore, the reflowed glass microlens arrays shows a decent uniformity in an area with a diameter of ∼4 mm. Finally, the feasibility of the integrated hot embossing and thermal reflow method in producing glass nano-lens arrays is also demonstrated. As a result, the hybrid forming technology that combines hot embossing with thermal reflow not only avoids the difficulties of fabrication of MLA and NLA mold inserts, but also possesses the advantages of high efficiency and low cost, which is expected to be a promising mass production technology for glass micro/nano-lens arrays.

平凸玻璃微透镜阵列（MLA）在成像、传感、照明和通信系统中有着广泛的应用。本文提出了一种分三步精密制造平凸玻璃微透镜阵列的方法，包括制造碳化硅微孔阵列（MHA）、热压印玻璃微柱阵列（MPA）和热回流玻璃微透镜阵列。评估了压花温度、力度和时间对玻璃 MPA 复制精度的影响。随后，对复制精度良好的玻璃 MPA 进行了热回流实验，以研究回流温度和回流时间对成型玻璃 MLA 几何特征的影响。实验发现，回流玻璃微透镜的高度和尖端曲率可通过调节回流温度和时间来控制。大多数回流玻璃基板的翘曲幅度和平均双折射分别小于 5 μm 和 27 nm/cm。此外，回流玻璃微透镜阵列在直径为 4 毫米的区域内显示出良好的均匀性。最后，还证明了热压印和热回流焊集成方法在生产玻璃纳米透镜阵列方面的可行性。因此，热压凸与热回流相结合的混合成型技术不仅避免了 MLA 和 NLA 模具镶件制造的困难，而且具有高效率和低成本的优点，有望成为一种有前途的玻璃微/纳米透镜阵列批量生产技术。

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引用次数: 0