Pub Date : 2025-11-10DOI: 10.1016/j.precisioneng.2025.11.009
Célestin Vallat, Loïc Tissot-Daguette, Florent Cosandier, Simon Henein
Four-bar linkages can transmit angular motion between two rigid links, but their transmission ratio is generally not constant due to kinematic nonlinearities. When such linkages are implemented with flexures – replacing joints with elastic elements to eliminate friction, backlash, and wear – additional parasitic motions are introduced. This article demonstrates that nonlinearities arising from both rigid-body kinematics and flexure deformations can be harnessed to compensate for one another, leading to optimized flexure-based couplers, inversors, reducers, and amplifiers. The analytical model merges Euler–Bernoulli beam theory with loop-closure kinematics, providing geometric design rules that exploit these nonlinear effects to improve transmission constancy. Finite element modeling and experiments on polymer prototypes confirm the validity of the approach, showing that optimized flexure couplers can match or even surpass the performance of ideal four-bar linkages. For instance, in a flexure mechanism with a 1:−1 transmission ratio, the error is reduced from 23% to below 1% for angular displacements up to ±20°. These results establish flexure-based transmission mechanisms as a new class of kinematic building blocks for the design of purely rectilinear and purely circular flexures.
{"title":"Optimized design of generalized flexure rotational couplers","authors":"Célestin Vallat, Loïc Tissot-Daguette, Florent Cosandier, Simon Henein","doi":"10.1016/j.precisioneng.2025.11.009","DOIUrl":"10.1016/j.precisioneng.2025.11.009","url":null,"abstract":"<div><div>Four-bar linkages can transmit angular motion between two rigid links, but their transmission ratio is generally not constant due to kinematic nonlinearities. When such linkages are implemented with flexures – replacing joints with elastic elements to eliminate friction, backlash, and wear – additional parasitic motions are introduced. This article demonstrates that nonlinearities arising from both rigid-body kinematics and flexure deformations can be harnessed to compensate for one another, leading to optimized flexure-based couplers, inversors, reducers, and amplifiers. The analytical model merges Euler–Bernoulli beam theory with loop-closure kinematics, providing geometric design rules that exploit these nonlinear effects to improve transmission constancy. Finite element modeling and experiments on polymer prototypes confirm the validity of the approach, showing that optimized flexure couplers can match or even surpass the performance of ideal four-bar linkages. For instance, in a flexure mechanism with a 1:−1 transmission ratio, the error is reduced from 23% to below 1% for angular displacements up to ±20°. These results establish flexure-based transmission mechanisms as a new class of kinematic building blocks for the design of purely rectilinear and purely circular flexures.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 961-976"},"PeriodicalIF":3.7,"publicationDate":"2025-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528358","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Tool servo diamond turning is a promising technique for machining complex-shaped optics, but its application to curved microlens arrays (MLAs) encounters significant challenges, particularly in achieving homogeneous surface quality. These challenges stem from the conflict between the single spiral tool path, based on a polar coordinate system, and the periodic structural features of the curved MLAs. To address these challenges, this paper proposes a novel ultra-precision cutting process: the translation-rotation positioning stage (TRPS)-assisted tool servo diamond turning process. This process integrates an auxiliary TRPS onto the rotary axis of the ultra-precision machine tool, creating a machining system controlled by a master-slave coordinated strategy. The TRPS assists in repositioning the center of each microlens unit to the rotational center of the machine tool's rotary axis before each cut, ensuring that each lens is machined with an individual true spiral tool path. A calibration strategy is proposed to define the positional relationship between the TRPS and the machine tool, and a tool path generation algorithm is developed to precisely guide the diamond turning tool during material removal. Experimental validation on a commercial ultra-precision lathe equipped with a self-developed TRPS confirms the effectiveness of the proposed process in achieving high-precision and high-homogeneity MLAs on curved substrates. These results highlight the significant potential of the TRPS-assisted approach for industrial applications.
{"title":"Translation-rotation positioning stage-assisted tool servo diamond turning of high-homogeneity curved microlens arrays","authors":"Hao Wu, ZeLong Jia, ZhiYue Wang, MingJun Ren, XinQuan Zhang, LiMin Zhu","doi":"10.1016/j.precisioneng.2025.11.007","DOIUrl":"10.1016/j.precisioneng.2025.11.007","url":null,"abstract":"<div><div>Tool servo diamond turning is a promising technique for machining complex-shaped optics, but its application to curved microlens arrays (MLAs) encounters significant challenges, particularly in achieving homogeneous surface quality. These challenges stem from the conflict between the single spiral tool path, based on a polar coordinate system, and the periodic structural features of the curved MLAs. To address these challenges, this paper proposes a novel ultra-precision cutting process: the translation-rotation positioning stage (TRPS)-assisted tool servo diamond turning process. This process integrates an auxiliary TRPS onto the rotary axis of the ultra-precision machine tool, creating a machining system controlled by a master-slave coordinated strategy. The TRPS assists in repositioning the center of each microlens unit to the rotational center of the machine tool's rotary axis before each cut, ensuring that each lens is machined with an individual true spiral tool path. A calibration strategy is proposed to define the positional relationship between the TRPS and the machine tool, and a tool path generation algorithm is developed to precisely guide the diamond turning tool during material removal. Experimental validation on a commercial ultra-precision lathe equipped with a self-developed TRPS confirms the effectiveness of the proposed process in achieving high-precision and high-homogeneity MLAs on curved substrates. These results highlight the significant potential of the TRPS-assisted approach for industrial applications.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 890-903"},"PeriodicalIF":3.7,"publicationDate":"2025-11-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528427","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-07DOI: 10.1016/j.precisioneng.2025.11.001
Sen Liang, Libin Wang, Qiang Fang, Yanding Wei
Redundantly actuated distributed parallel manipulators (RADPMs) consisting of multiple CNC locators are widely used for assembly and docking of large-scale components. The kinematic calibration is a crucial prerequisite for high-precision posture alignment with lower internal force. This article presents a novel calibration framework for n-PPPS RADPMs aimed at improving the calibration accuracy and addressing the incomplete modeling issues inherent in conventional methods. First, the error model is established based on the product of exponentials (POE) formula in the local frame representation. Then, a closed-loop constraint equation is constructed utilizing the identical posture of the end platform across all limbs to obtain the forward kinematics. The redundant error parameters are eliminated based on identifiability analysis. Furthermore, ridge regression estimation is employed for identification to enhance the computational robustness to measurement noise and random errors. Notably, the non-redundant actuation mode with a major joint set is adopted to avoid over-constraints caused by geometric errors, and motion information of redundant joints is retained and utilized for iterative calculation. Finally, simulations and experiments are conducted to validate the effectiveness and superiority of the proposed calibration framework. The results demonstrate that the error modeling method and the optimized solution algorithm significantly improve the accuracy without depending on excessive measurements.
{"title":"Kinematic calibration of redundantly actuated distributed parallel manipulators based on local POE formula and ridge estimation method","authors":"Sen Liang, Libin Wang, Qiang Fang, Yanding Wei","doi":"10.1016/j.precisioneng.2025.11.001","DOIUrl":"10.1016/j.precisioneng.2025.11.001","url":null,"abstract":"<div><div>Redundantly actuated distributed parallel manipulators (RADPMs) consisting of multiple CNC locators are widely used for assembly and docking of large-scale components. The kinematic calibration is a crucial prerequisite for high-precision posture alignment with lower internal force. This article presents a novel calibration framework for n-PPPS RADPMs aimed at improving the calibration accuracy and addressing the incomplete modeling issues inherent in conventional methods. First, the error model is established based on the product of exponentials (POE) formula in the local frame representation. Then, a closed-loop constraint equation is constructed utilizing the identical posture of the end platform across all limbs to obtain the forward kinematics. The redundant error parameters are eliminated based on identifiability analysis. Furthermore, ridge regression estimation is employed for identification to enhance the computational robustness to measurement noise and random errors. Notably, the non-redundant actuation mode with a major joint set is adopted to avoid over-constraints caused by geometric errors, and motion information of redundant joints is retained and utilized for iterative calculation. Finally, simulations and experiments are conducted to validate the effectiveness and superiority of the proposed calibration framework. The results demonstrate that the error modeling method and the optimized solution algorithm significantly improve the accuracy without depending on excessive measurements.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 879-889"},"PeriodicalIF":3.7,"publicationDate":"2025-11-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528280","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-05DOI: 10.1016/j.precisioneng.2025.11.006
M. Gołaszewski , S. Wojciechowski , B. Powałka , F. Botko , M. Geľatko
Micromilling outcomes are significantly affected by a condition of the machine-tool system, as well as the selection of milling inputs. In this context, many studies have been conducted on the evaluation of physical phenomena and technological effects of micromilling. However, the identification of a cutting force variations mechanisms and their effect on a machined surface formation still constitutes a research gap. Therefore, this study focused on an in-depth evaluation of cutting force variations mechanisms during radial immersion micromilling and their effect on a formation of a machined surface topography. The carried out research involved both the experimental trials, as well as the analytical modeling. In the first stage, a micromilling force model, concerning a distribution of elemental forces along the main and secondary cutting edges, as well as the rounded tool corner has been proposed. This model assumed that directions of the cutting force components are dependent on their point of application and included a calculations of a specific cutting force coefficients, tool run-out and geometrical parameters of cut. Moreover, the area of cut has been determined concerning a continuous consideration of the process kinematics. In the next part an evaluation of cutting force variations in terms of tool rotation angle, variable radial immersion, and tool helix angle has been presented. The generated modeled quantities were further validated experimentally on the ultra-precision 3-axis machine tool, involving a micromilling experiments on the Inconel 718 superalloy. The experiments included the measurements of cutting forces on the 3-axis piezoelectric dynamometer, as well as the machined surface topographies on the laser interferometer. Results have shown that during down-milling conditions, a substantial variations of feed and thrust forces were found. These variations manifested as abrupt changes in force signs as a function of tool rotation angle and radial depth of cut. Moreover, based on the conducted experiments, it was found that machined surface topographies reveal some areas in which an elevated surface irregularities are present, in comparison to ones appearing in the remaining zones. It was observed that a presence of these elevated irregularity bands is strictly correlated with an appearance of a thrust force variations during tool input.
{"title":"Evaluation of force variations mechanisms during radial immersion micromilling","authors":"M. Gołaszewski , S. Wojciechowski , B. Powałka , F. Botko , M. Geľatko","doi":"10.1016/j.precisioneng.2025.11.006","DOIUrl":"10.1016/j.precisioneng.2025.11.006","url":null,"abstract":"<div><div>Micromilling outcomes are significantly affected by a condition of the machine-tool system, as well as the selection of milling inputs. In this context, many studies have been conducted on the evaluation of physical phenomena and technological effects of micromilling. However, the identification of a cutting force variations mechanisms and their effect on a machined surface formation still constitutes a research gap. Therefore, this study focused on an in-depth evaluation of cutting force variations mechanisms during radial immersion micromilling and their effect on a formation of a machined surface topography. The carried out research involved both the experimental trials, as well as the analytical modeling. In the first stage, a micromilling force model, concerning a distribution of elemental forces along the main and secondary cutting edges, as well as the rounded tool corner has been proposed. This model assumed that directions of the cutting force components are dependent on their point of application and included a calculations of a specific cutting force coefficients, tool run-out and geometrical parameters of cut. Moreover, the area of cut has been determined concerning a continuous consideration of the process kinematics. In the next part an evaluation of cutting force variations in terms of tool rotation angle, variable radial immersion, and tool helix angle has been presented. The generated modeled quantities were further validated experimentally on the ultra-precision 3-axis machine tool, involving a micromilling experiments on the Inconel 718 superalloy. The experiments included the measurements of cutting forces on the 3-axis piezoelectric dynamometer, as well as the machined surface topographies on the laser interferometer. Results have shown that during down-milling conditions, a substantial variations of feed and thrust forces were found. These variations manifested as abrupt changes in force signs as a function of tool rotation angle and radial depth of cut. Moreover, based on the conducted experiments, it was found that machined surface topographies reveal some areas in which an elevated surface irregularities are present, in comparison to ones appearing in the remaining zones. It was observed that a presence of these elevated irregularity bands is strictly correlated with an appearance of a thrust force variations during tool input.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 904-924"},"PeriodicalIF":3.7,"publicationDate":"2025-11-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145528366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-03DOI: 10.1016/j.precisioneng.2025.10.025
Hui Zhuang , Jianguo Ding , Peng Chen , Yu Chang
The performances of aerostatic bearings are significantly influenced by the fluid-structure interaction (FSI) effect. However, the research on the performances of the aerostatic thrust bearing considering the FSI effect is not sufficient, especially for the dynamic characteristics such as the dynamic stiffness of the aerostatic bearing air film. In this paper, two-way steady and transient FSI analyses for the aerostatic thrust bearing are carried out using the finite difference method-finite element method (FDM-FEM) and the finite difference method-computational structural dynamics (FDM-CSD), respectively. The static performances of the thrust bearing and the dynamic characteristics of the air film are studied. The parametric modeling and simulation platform is developed based on the in-house code. The proposed FSI analysis methods are verified numerically and experimentally. Moreover, an improved model considering frequency-varying stiffness and damping of the air film is proposed to further facilitate FSI modeling and improve computational efficiency in dynamic stiffness evaluation. The results indicate that the load-carrying capacity and static stiffness of the thrust bearing decrease when introducing the structural deformation. For the dynamic stiffness of the aerostatic bearing air film when considering the FSI effect, it continues to increase as the perturbation frequency approaches the natural frequency of the thrust plate. The analysis method and conclusion of this study are beneficial to the performance evaluation and optimization of aerostatic bearings.
{"title":"Two-way steady and transient fluid-structure interaction analysis for aerostatic thrust bearings","authors":"Hui Zhuang , Jianguo Ding , Peng Chen , Yu Chang","doi":"10.1016/j.precisioneng.2025.10.025","DOIUrl":"10.1016/j.precisioneng.2025.10.025","url":null,"abstract":"<div><div>The performances of aerostatic bearings are significantly influenced by the fluid-structure interaction (FSI) effect. However, the research on the performances of the aerostatic thrust bearing considering the FSI effect is not sufficient, especially for the dynamic characteristics such as the dynamic stiffness of the aerostatic bearing air film. In this paper, two-way steady and transient FSI analyses for the aerostatic thrust bearing are carried out using the finite difference method-finite element method (FDM-FEM) and the finite difference method-computational structural dynamics (FDM-CSD), respectively. The static performances of the thrust bearing and the dynamic characteristics of the air film are studied. The parametric modeling and simulation platform is developed based on the in-house code. The proposed FSI analysis methods are verified numerically and experimentally. Moreover, an improved model considering frequency-varying stiffness and damping of the air film is proposed to further facilitate FSI modeling and improve computational efficiency in dynamic stiffness evaluation. The results indicate that the load-carrying capacity and static stiffness of the thrust bearing decrease when introducing the structural deformation. For the dynamic stiffness of the aerostatic bearing air film when considering the FSI effect, it continues to increase as the perturbation frequency approaches the natural frequency of the thrust plate. The analysis method and conclusion of this study are beneficial to the performance evaluation and optimization of aerostatic bearings.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 851-878"},"PeriodicalIF":3.7,"publicationDate":"2025-11-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-03DOI: 10.1016/j.precisioneng.2025.11.005
Yuanyuan Liu , Yongqiang Tang , Zilong Zhao , Lin Geng
Near-field ultrasonic levitation (NFUL) has demonstrated growing potential in precision applications, particularly in fields such as semiconductor manufacturing. However, one inherent characteristic of NFUL that cannot be overlooked in such scenarios is the oscillatory motion of the levitated object, which arises from the high-frequency squeeze effect generated by the excitation plate. To enhance the levitation accuracy of NFUL, as characterized by the oscillation amplitude, this study introduces grooves on the levitated surface of the object. A simplified analytical model of the NFUL system is first established, along with the corresponding Reynolds equation. By incorporating appropriate boundary conditions and the film thickness expression accounting for surface grooves, the steady-state pressure and film thickness distributions are numerically obtained using the eight-point discrete method. These results are subsequently embedded into a system of partial differential equations derived via the infinitesimal perturbation method to calculate the equivalent stiffness and damping coefficients of the squeeze film. Based on vibration transmission theory, the relationship between these coefficients and the oscillation behavior of the levitated object is established. The results reveal that, compared to the circular groove configuration, the radial groove configuration reduces the load-bearing capacity of the NFUL system but significantly improves levitation accuracy, which is consistent with the experimental measurements. Furthermore, increasing the groove depth, number, and central angle in the radial groove configuration contributes to further improvements in levitation accuracy.
{"title":"Improving ultrasonic levitation accuracy through surface groove design: Numerical investigation and validation","authors":"Yuanyuan Liu , Yongqiang Tang , Zilong Zhao , Lin Geng","doi":"10.1016/j.precisioneng.2025.11.005","DOIUrl":"10.1016/j.precisioneng.2025.11.005","url":null,"abstract":"<div><div>Near-field ultrasonic levitation (NFUL) has demonstrated growing potential in precision applications, particularly in fields such as semiconductor manufacturing. However, one inherent characteristic of NFUL that cannot be overlooked in such scenarios is the oscillatory motion of the levitated object, which arises from the high-frequency squeeze effect generated by the excitation plate. To enhance the levitation accuracy of NFUL, as characterized by the oscillation amplitude, this study introduces grooves on the levitated surface of the object. A simplified analytical model of the NFUL system is first established, along with the corresponding Reynolds equation. By incorporating appropriate boundary conditions and the film thickness expression accounting for surface grooves, the steady-state pressure and film thickness distributions are numerically obtained using the eight-point discrete method. These results are subsequently embedded into a system of partial differential equations derived via the infinitesimal perturbation method to calculate the equivalent stiffness and damping coefficients of the squeeze film. Based on vibration transmission theory, the relationship between these coefficients and the oscillation behavior of the levitated object is established. The results reveal that, compared to the circular groove configuration, the radial groove configuration reduces the load-bearing capacity of the NFUL system but significantly improves levitation accuracy, which is consistent with the experimental measurements. Furthermore, increasing the groove depth, number, and central angle in the radial groove configuration contributes to further improvements in levitation accuracy.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 791-803"},"PeriodicalIF":3.7,"publicationDate":"2025-11-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473595","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-01DOI: 10.1016/j.precisioneng.2025.11.002
Kai Liao , Wenjun Wang , Wenwen Tian , Chunjin Wang , Chi Fai Cheung
Silica glass, renowned for its exceptional physical, chemical, and biocompatible properties, serves as a critical substrate for microfluidic devices. However, its inherent hardness and brittleness present significant challenges for achieving precise and efficient fabrication. Although femtosecond lasers offer remarkable advantages in precision machining, achieving simultaneous enhancements in machining quality and processing efficiency remains a complex challenge. This study introduces a data-driven framework that integrates a Gaussian Process Regression (GPR) model with an improved Non-dominated Sorting Genetic Algorithm II (NSGA-II) for the multi-objective optimization of femtosecond laser-based microchannel fabrication. The GPR model systematically captures the relationships between processing parameters, surface roughness (Sa), and material removal rate (MRR), effectively addressing nonlinear interactions during multi-pass scanning. The enhanced NSGA-II algorithm incorporates adaptive parameter adjustments and improved population diversity to robustly explore the solution space, enabling the identification of optimal trade-offs between surface quality and processing efficiency. Experimental validation of the optimization results reveals strong agreement between predicted and actual outcomes, demonstrating the framework's effectiveness in simultaneously minimizing surface roughness and maximizing material removal rate. This work underscores the potential of combining GPR and NSGA-II to optimize femtosecond laser micromachining, offering a robust methodology to significantly improve both the quality and efficiency of microfabrication processes.
{"title":"Data-driven optimization of the quality and efficiency of silica glass microchannels in femtosecond laser processing via Gaussian process regression","authors":"Kai Liao , Wenjun Wang , Wenwen Tian , Chunjin Wang , Chi Fai Cheung","doi":"10.1016/j.precisioneng.2025.11.002","DOIUrl":"10.1016/j.precisioneng.2025.11.002","url":null,"abstract":"<div><div>Silica glass, renowned for its exceptional physical, chemical, and biocompatible properties, serves as a critical substrate for microfluidic devices. However, its inherent hardness and brittleness present significant challenges for achieving precise and efficient fabrication. Although femtosecond lasers offer remarkable advantages in precision machining, achieving simultaneous enhancements in machining quality and processing efficiency remains a complex challenge. This study introduces a data-driven framework that integrates a Gaussian Process Regression (GPR) model with an improved Non-dominated Sorting Genetic Algorithm II (NSGA-II) for the multi-objective optimization of femtosecond laser-based microchannel fabrication. The GPR model systematically captures the relationships between processing parameters, surface roughness (<em>S</em><sub><em>a</em></sub>), and material removal rate (<em>MRR</em>), effectively addressing nonlinear interactions during multi-pass scanning. The enhanced NSGA-II algorithm incorporates adaptive parameter adjustments and improved population diversity to robustly explore the solution space, enabling the identification of optimal trade-offs between surface quality and processing efficiency. Experimental validation of the optimization results reveals strong agreement between predicted and actual outcomes, demonstrating the framework's effectiveness in simultaneously minimizing surface roughness and maximizing material removal rate. This work underscores the potential of combining GPR and NSGA-II to optimize femtosecond laser micromachining, offering a robust methodology to significantly improve both the quality and efficiency of microfabrication processes.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 828-838"},"PeriodicalIF":3.7,"publicationDate":"2025-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473700","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-01DOI: 10.1016/j.precisioneng.2025.10.022
Kaiyang Xia , Chengshuo Liu , Zhongwei Li , Han Lai , Shiquan Liu , Genshen Liu , Yuan-Liu Chen
The voice coil motor-actuated fast tool servo (VCM-FTS) is capable of fabricating micro-structured surfaces with ultra-high precision and is widely employed in industrial applications. However, owing to the inherent low axial stiffness of such a system, it is highly susceptible to disturbances caused by cutting forces, resulting in relatively poor machining accuracy. Additionally, parameter variations during machining, such as fluctuations in the force constant of the VCM, can lead to trajectory tracking errors. To address these issues, this paper presents a VCM-FTS controlled by a cutting force compensation-based adaptive robust control (CFC-ARC) controller. Based on prior knowledge of the relationship between the cutting force and uncut chip area from planner trial cutting, the cutting force can be estimated through the ideal uncut chip area and then used as a feedforward term to mitigate disturbances caused by cutting forces. Furthermore, due to the intrinsic properties of ARC, the controller can adjust the system parameters in real time to handle undesired parameter variations. Compared with the traditional controlling method, the adaptation of the CFC-ARC controller improves the system’s positioning resolution, bandwidth and the sinusoidal trajectory tracking accuracy. In the machining of aspheric lens arrays and compound-eye lens arrays, the CFC-ARC controller reduced morphology errors by approximately 30%–45%, confirming its effectiveness in enhancing the machining precision of microstructured surfaces.
{"title":"Voice coil motor-actuated fast tool servo based on adaptive robust control with cutting force compensation for diamond turning","authors":"Kaiyang Xia , Chengshuo Liu , Zhongwei Li , Han Lai , Shiquan Liu , Genshen Liu , Yuan-Liu Chen","doi":"10.1016/j.precisioneng.2025.10.022","DOIUrl":"10.1016/j.precisioneng.2025.10.022","url":null,"abstract":"<div><div>The voice coil motor-actuated fast tool servo (VCM-FTS) is capable of fabricating micro-structured surfaces with ultra-high precision and is widely employed in industrial applications. However, owing to the inherent low axial stiffness of such a system, it is highly susceptible to disturbances caused by cutting forces, resulting in relatively poor machining accuracy. Additionally, parameter variations during machining, such as fluctuations in the force constant of the VCM, can lead to trajectory tracking errors. To address these issues, this paper presents a VCM-FTS controlled by a cutting force compensation-based adaptive robust control (CFC-ARC) controller. Based on prior knowledge of the relationship between the cutting force and uncut chip area from planner trial cutting, the cutting force can be estimated through the ideal uncut chip area and then used as a feedforward term to mitigate disturbances caused by cutting forces. Furthermore, due to the intrinsic properties of ARC, the controller can adjust the system parameters in real time to handle undesired parameter variations. Compared with the traditional controlling method, the adaptation of the CFC-ARC controller improves the system’s positioning resolution, bandwidth and the sinusoidal trajectory tracking accuracy. In the machining of aspheric lens arrays and compound-eye lens arrays, the CFC-ARC controller reduced morphology errors by approximately 30%–45%, confirming its effectiveness in enhancing the machining precision of microstructured surfaces.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 767-776"},"PeriodicalIF":3.7,"publicationDate":"2025-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473699","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-01DOI: 10.1016/j.precisioneng.2025.10.017
Guangye Qing , Bing Chen , Wenzhang Yang , Shunshun Li , Jun Yi , Lishu Lv , Bing Guo , Zhaohui Deng
High-precision curved optical components are widely used in aerospace, precision molds, medical devices, and other fields, which require higher profile accuracy and grinding stability in the resin-bonded arc-shaped diamond grinding wheels employed for processing these workpieces. However, the green silicon carbide (GC) dresser wears easily during the dressing process, leading to large arc profile errors and insufficient exposure of abrasive grains, which limits further improvements in grinding wheel performance. Therefore, this paper proposes using high-melting-point metal tantalum (Ta) as a dressing tool for resin-bonded diamond grinding wheels and investigates the mechanism of tantalum dressing using Raman spectroscopy, X-ray diffraction (XRD), and energy dispersive spectroscopy (EDS). The results indicate that during the dressing process, tantalum reacts with carbon and oxygen on the grinding wheel surface, which leads to the formation of new phases, including TaC, TiC and Ta2O5. The transition layer formed by these reaction products at the interface of the abrasive materials exhibits both lubrication and thermal barrier functions, effectively preventing diamond graphitization and enhancing the mechanical stability of the abrasive structure. Based on this, to further verify the effectiveness of tantalum in dressing arc-shaped diamond grinding wheels, a comparative experiment was conducted using tantalum and GC grinding rods. The dressing performance of the two tools was systematically evaluated through both quantitative and qualitative analyses of the grinding wheel run-out error, form error, and surface morphology. Experimental results show that using tantalum as the dressing tool significantly enhances grinding wheel profile precision, reducing run-out error from 62.4 μm to 4.3 μm and limiting form error to 7.5 μm. Compared to GC grinding rod dressing, tantalum dressing reduces run-out and form errors by 65.87 % and 52.83 %, respectively, clearly demonstrating the advantages of tantalum in enhancing shape accuracy. Moreover, tantalum dressing markedly improves the grinding wheel's surface characteristics, facilitating the full exposure of cutting edges on abrasive grains, which is essential for improving grinding performance.
{"title":"Research on precision dressing of resin-bonded arc-shaped diamond grinding wheel via tantalum metal.","authors":"Guangye Qing , Bing Chen , Wenzhang Yang , Shunshun Li , Jun Yi , Lishu Lv , Bing Guo , Zhaohui Deng","doi":"10.1016/j.precisioneng.2025.10.017","DOIUrl":"10.1016/j.precisioneng.2025.10.017","url":null,"abstract":"<div><div>High-precision curved optical components are widely used in aerospace, precision molds, medical devices, and other fields, which require higher profile accuracy and grinding stability in the resin-bonded arc-shaped diamond grinding wheels employed for processing these workpieces. However, the green silicon carbide (GC) dresser wears easily during the dressing process, leading to large arc profile errors and insufficient exposure of abrasive grains, which limits further improvements in grinding wheel performance. Therefore, this paper proposes using high-melting-point metal tantalum (Ta) as a dressing tool for resin-bonded diamond grinding wheels and investigates the mechanism of tantalum dressing using Raman spectroscopy, X-ray diffraction (XRD), and energy dispersive spectroscopy (EDS). The results indicate that during the dressing process, tantalum reacts with carbon and oxygen on the grinding wheel surface, which leads to the formation of new phases, including TaC, TiC and Ta<sub>2</sub>O<sub>5</sub>. The transition layer formed by these reaction products at the interface of the abrasive materials exhibits both lubrication and thermal barrier functions, effectively preventing diamond graphitization and enhancing the mechanical stability of the abrasive structure. Based on this, to further verify the effectiveness of tantalum in dressing arc-shaped diamond grinding wheels, a comparative experiment was conducted using tantalum and GC grinding rods. The dressing performance of the two tools was systematically evaluated through both quantitative and qualitative analyses of the grinding wheel run-out error, form error, and surface morphology. Experimental results show that using tantalum as the dressing tool significantly enhances grinding wheel profile precision, reducing run-out error from 62.4 μm to 4.3 μm and limiting form error to 7.5 μm. Compared to GC grinding rod dressing, tantalum dressing reduces run-out and form errors by 65.87 % and 52.83 %, respectively, clearly demonstrating the advantages of tantalum in enhancing shape accuracy. Moreover, tantalum dressing markedly improves the grinding wheel's surface characteristics, facilitating the full exposure of cutting edges on abrasive grains, which is essential for improving grinding performance.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 839-850"},"PeriodicalIF":3.7,"publicationDate":"2025-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473597","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-01DOI: 10.1016/j.precisioneng.2025.10.023
Feng Zhang , Weihang Dong , Yunbo Huang , Xiaolei Guo , Jimmy Johansson , Guanyu Chen , Zhenhua Qing
Excessive temperatures in the cutting zone can degrade the machining quality and efficiency of wood–plastic composites (WPC). Instead of parameter optimisation, cryogenic minimum quantity lubrication (CMQL) was introduced to control cutting temperature and improve surface quality. This study investigates the influence of feed per tooth and milling depth on cutting force and surface quality during CMQL milling of WPC, compared to dry cutting. Results show that at shallow cutting depths (0.1 mm), CMQL significantly reduces both cutting force and surface roughness, while weakening the effect of feed per tooth on these outcomes. Thus, CMQL is more suitable for finishing operations, where increasing feed per tooth moderately can further enhance efficiency. At larger depths, CMQL results in higher cutting forces than dry milling but effectively suppresses surface plastic deformation, reduces burrs and pits, and improves surface integrity. Overall, cutting force and roughness increase with greater feed per tooth and milling depth under both methods. These findings highlight the advantages of CMQL in improving surface quality compared with conventional dry milling, and offer guidance for optimising WPC milling performance and process efficiency.
{"title":"Effects of cryogenic minimum quantity lubrication on milling force and surface quality of wood-plastic composites","authors":"Feng Zhang , Weihang Dong , Yunbo Huang , Xiaolei Guo , Jimmy Johansson , Guanyu Chen , Zhenhua Qing","doi":"10.1016/j.precisioneng.2025.10.023","DOIUrl":"10.1016/j.precisioneng.2025.10.023","url":null,"abstract":"<div><div>Excessive temperatures in the cutting zone can degrade the machining quality and efficiency of wood–plastic composites (WPC). Instead of parameter optimisation, cryogenic minimum quantity lubrication (CMQL) was introduced to control cutting temperature and improve surface quality. This study investigates the influence of feed per tooth and milling depth on cutting force and surface quality during CMQL milling of WPC, compared to dry cutting. Results show that at shallow cutting depths (0.1 mm), CMQL significantly reduces both cutting force and surface roughness, while weakening the effect of feed per tooth on these outcomes. Thus, CMQL is more suitable for finishing operations, where increasing feed per tooth moderately can further enhance efficiency. At larger depths, CMQL results in higher cutting forces than dry milling but effectively suppresses surface plastic deformation, reduces burrs and pits, and improves surface integrity. Overall, cutting force and roughness increase with greater feed per tooth and milling depth under both methods. These findings highlight the advantages of CMQL in improving surface quality compared with conventional dry milling, and offer guidance for optimising WPC milling performance and process efficiency.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 804-816"},"PeriodicalIF":3.7,"publicationDate":"2025-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145473698","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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