This study presents a digital-twin approach for characterizing and correcting spatial errors in a four-laser-tracker multistation measurement system (FLTMMS). A CMM-calibrated tetrahedral artifact was measured in multiple orientations; the data were used to fit a polynomial error model for systematic deviations. Uncertainty was quantified with a kernel-density-estimation Monte Carlo method that propagates measurement and model uncertainties within the digital twin. Validation experiments assessed correction performance and uncertainty prediction. After correction, the point-wise standard uncertainty decreased from 12.491 to 8.136 μm, whereas the nearly unchanged edge length uncertainty (5.358 → 5.334 μm) reflects geometry-limited propagation. Coverage-probability tests showed close agreement with theory—71 %, 96 %, and 98 % for coverage factors kp = 1, 2, and 3, versus theoretical 68.27 %, 95.45 %, and 99.73 %. Using all corrected points inside the declared working volume, all inter-point distances were formed; the empirical 95.45 % quantile (kp ≈ 2) gives a system-level distance MPE of 9.270 μm. The digital twin also reproduces the geometry-induced anisotropy of the four-tracker layout, with the largest dispersion along the axis nearly normal to the tracker plane. These results indicate that the proposed method provides traceable correction and well-calibrated uncertainty for FLTMMS, while making explicit the residual bias commonly observed in digital-twin predictions.
{"title":"Digital twin-driven spatial error distribution modeling for a four-station laser tracker system","authors":"Yiliang Lin, Enchen Wu, Xiaolong Wang, Wei Wang, Ting Ding, Qiuyu Zhang, Xiaoye He","doi":"10.1016/j.precisioneng.2025.12.012","DOIUrl":"10.1016/j.precisioneng.2025.12.012","url":null,"abstract":"<div><div>This study presents a digital-twin approach for characterizing and correcting spatial errors in a four-laser-tracker multistation measurement system (FLTMMS). A CMM-calibrated tetrahedral artifact was measured in multiple orientations; the data were used to fit a polynomial error model for systematic deviations. Uncertainty was quantified with a kernel-density-estimation Monte Carlo method that propagates measurement and model uncertainties within the digital twin. Validation experiments assessed correction performance and uncertainty prediction. After correction, the point-wise standard uncertainty decreased from 12.491 to 8.136 μm, whereas the nearly unchanged edge length uncertainty (5.358 → 5.334 μm) reflects geometry-limited propagation. Coverage-probability tests showed close agreement with theory—71 %, 96 %, and 98 % for coverage factors k<sub>p</sub> = 1, 2, and 3, versus theoretical 68.27 %, 95.45 %, and 99.73 %. Using all corrected points inside the declared working volume, all inter-point distances were formed; the empirical 95.45 % quantile (k<sub>p</sub> ≈ 2) gives a system-level distance MPE of 9.270 μm. The digital twin also reproduces the geometry-induced anisotropy of the four-tracker layout, with the largest dispersion along the axis nearly normal to the tracker plane. These results indicate that the proposed method provides traceable correction and well-calibrated uncertainty for FLTMMS, while making explicit the residual bias commonly observed in digital-twin predictions.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 248-261"},"PeriodicalIF":3.7,"publicationDate":"2025-12-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145790626","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-11DOI: 10.1016/j.precisioneng.2025.11.028
Peng Tang , Zhenyu Liu , Guodong Sa , Jianrong Tan
Fringe projection profilometry (FPP) is an efficient and high-precision approach to establish surface measurement, which assumes the measured object receives only direct illumination from the measurement device instead of global illumination. However, in practice, the inter-reflective structure of the object surface itself introduces indirect illumination, which leads to inter-reflection errors and severely limits the measurement accuracy of FPP. Existing inter-reflection error correction methods typically require carefully chosen pattern parameters or additional installed hardware, reducing the measurement flexibility and efficiency. To address this issue, a method based on phase-difference look-up-table (PD-LUT) is proposed without additional patterns or hardware. The influence of inter-reflection errors on the FPP measurement is first analyzed. Besides, the optimal function for inter-reflection error correction is defined in the form of complex modulation-phase representation. To optimize this optimal function, the relationship between the modulation of global illumination and phase difference between direct and indirect illumination is constructed as PD-LUT. PD-LUT is utilized to obtain candidate wrapped phase corresponding to direct illumination and then the final optimal absolute phase is identified from these candidates. Qualitative and quantitative contrast experiments demonstrate that the proposed method exhibits excellent performance in dealing with inter-reflection errors and achieves accurate and reliable measurements even under challenging conditions.
{"title":"Inter-reflection error correction method based on phase-difference look-up-table for fringe projection profilometry","authors":"Peng Tang , Zhenyu Liu , Guodong Sa , Jianrong Tan","doi":"10.1016/j.precisioneng.2025.11.028","DOIUrl":"10.1016/j.precisioneng.2025.11.028","url":null,"abstract":"<div><div>Fringe projection profilometry (FPP) is an efficient and high-precision approach to establish surface measurement, which assumes the measured object receives only direct illumination from the measurement device instead of global illumination. However, in practice, the inter-reflective structure of the object surface itself introduces indirect illumination, which leads to inter-reflection errors and severely limits the measurement accuracy of FPP. Existing inter-reflection error correction methods typically require carefully chosen pattern parameters or additional installed hardware, reducing the measurement flexibility and efficiency. To address this issue, a method based on phase-difference look-up-table (PD-LUT) is proposed without additional patterns or hardware. The influence of inter-reflection errors on the FPP measurement is first analyzed. Besides, the optimal function for inter-reflection error correction is defined in the form of complex modulation-phase representation. To optimize this optimal function, the relationship between the modulation of global illumination and phase difference between direct and indirect illumination is constructed as PD-LUT. PD-LUT is utilized to obtain candidate wrapped phase corresponding to direct illumination and then the final optimal absolute phase is identified from these candidates. Qualitative and quantitative contrast experiments demonstrate that the proposed method exhibits excellent performance in dealing with inter-reflection errors and achieves accurate and reliable measurements even under challenging conditions.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 236-247"},"PeriodicalIF":3.7,"publicationDate":"2025-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145790628","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-07DOI: 10.1016/j.precisioneng.2025.12.006
Chuang Zhao , Hao Yi , Jiale Guo , Limin Zhu , Lingxi Guo , Jie Lan , Yuli Sun , Dunwen Zuo
Cracks are a common form of subsurface damage (SSD) in optical glass grinding, directly affecting the positioning accuracy and lifespan of hemispherical resonator gyroscopes (HRGs). This study presents a predictive model for SSD in hemispherical resonator grinding, based on indentation fracture theory. The SSD and surface roughness average (Ra) data, obtained from grinding experiments under various conditions, were used to optimize the model's accuracy. Material scratching tests under different loads revealed that only surface plastic deformation occurred, with no observable SSD at 120 mN. The characteristics of surface damage (SD) transitioned from plastic deformation to brittle fracture between 120 mN and 300 mN, with subsurface cracks propagating in the direction of maximum stress. The model's practical applicability was further verified through precision grinding trials conducted on hemispherical resonators. A minimum error of 1.41 % and a mean error of 14.94 % demonstrate the model's predictive capability within a specific range.
{"title":"Prediction of subsurface damage in precision grinding of hemispherical resonators","authors":"Chuang Zhao , Hao Yi , Jiale Guo , Limin Zhu , Lingxi Guo , Jie Lan , Yuli Sun , Dunwen Zuo","doi":"10.1016/j.precisioneng.2025.12.006","DOIUrl":"10.1016/j.precisioneng.2025.12.006","url":null,"abstract":"<div><div>Cracks are a common form of subsurface damage (SSD) in optical glass grinding, directly affecting the positioning accuracy and lifespan of hemispherical resonator gyroscopes (HRGs). This study presents a predictive model for SSD in hemispherical resonator grinding, based on indentation fracture theory. The SSD and surface roughness average (Ra) data, obtained from grinding experiments under various conditions, were used to optimize the model's accuracy. Material scratching tests under different loads revealed that only surface plastic deformation occurred, with no observable SSD at 120 mN. The characteristics of surface damage (SD) transitioned from plastic deformation to brittle fracture between 120 mN and 300 mN, with subsurface cracks propagating in the direction of maximum stress. The model's practical applicability was further verified through precision grinding trials conducted on hemispherical resonators. A minimum error of 1.41 % and a mean error of 14.94 % demonstrate the model's predictive capability within a specific range.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 120-130"},"PeriodicalIF":3.7,"publicationDate":"2025-12-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Refractory high-entropy alloys (RHEAs), showing excellent mechanical properties at high temperature, are expected to have promising applications in various industries, for instance, the key components of aero engines. On account of high strength and hardness as well as good corrosion resistance, electrochemical machining (ECM) brings in a promising but challenging way to process RHEAs efficiently. In this work, to implement a practicable ECM process for RHEAs, the electrochemical dissolution behavior of a (TiVCr)95W5 RHEA in different pH conditions was investigated using different solutions, namely 10 % NaNO3, 10 % NaNO3+0.5 % HNO3, and 10 % NaNO3+0.5 % NaOH. The results show that the RHEA exhibits a more significant corrosion tendency, lower resistance, and more uniform dissolution for each refractory element in the 10 % NaNO3+0.5 % NaOH solution than that in the other two solutions, and the heterogeneous corrosions in interdendritic areas are also eliminated. The effects of OH− ion concentration, cathode feed rate, machining voltage, and duty cycle on the ECM performance of the RHEA were then investigated. Further, a dissolution model for the dissolution behavior of RHEAs during ECM has been established. Besides, an orthogonal experiment was also carried out to optimize the processing parameters, where the best performance was achieved by an electrolyte of 10 % NaNO3+0.5 % NaOH, a cathode feed rate of 5.4 μm/s, a machining voltage of 23 V, and a pulsed power duty cycle of 30 %. Finally, a round hole of 1.224 mm diameter (the standard deviation of diameter is 0.0176 mm and the relative error is 2.04 %) and a 0.9778 × 0.9746 mm square hole were successfully machined using ECM (the standard deviation of transverse and longitudinal are 0.0183 and 0.0126 mm respectively), which further verified the feasibility of machining RHEAs using the ECM technique.
{"title":"Effect of pH on the electrochemical dissolution behavior of a (TiVCr)95W5 refractory high-entropy alloy and the machining of various structures","authors":"Juchen Zhang , Haitao Xu , Wenjun Tang , Zhonghao Lian , Yixiang Qiao , Xiaokang Yue , Shunhua Chen","doi":"10.1016/j.precisioneng.2025.12.007","DOIUrl":"10.1016/j.precisioneng.2025.12.007","url":null,"abstract":"<div><div>Refractory high-entropy alloys (RHEAs), showing excellent mechanical properties at high temperature, are expected to have promising applications in various industries, for instance, the key components of aero engines. On account of high strength and hardness as well as good corrosion resistance, electrochemical machining (ECM) brings in a promising but challenging way to process RHEAs efficiently. In this work, to implement a practicable ECM process for RHEAs, the electrochemical dissolution behavior of a (TiVCr)<sub>95</sub>W<sub>5</sub> RHEA in different pH conditions was investigated using different solutions, namely 10 % NaNO<sub>3</sub>, 10 % NaNO<sub>3</sub>+0.5 % HNO<sub>3,</sub> and 10 % NaNO<sub>3</sub>+0.5 % NaOH. The results show that the RHEA exhibits a more significant corrosion tendency, lower resistance, and more uniform dissolution for each refractory element in the 10 % NaNO<sub>3</sub>+0.5 % NaOH solution than that in the other two solutions, and the heterogeneous corrosions in interdendritic areas are also eliminated. The effects of OH<sup>−</sup> ion concentration, cathode feed rate, machining voltage, and duty cycle on the ECM performance of the RHEA were then investigated. Further, a dissolution model for the dissolution behavior of RHEAs during ECM has been established. Besides, an orthogonal experiment was also carried out to optimize the processing parameters, where the best performance was achieved by an electrolyte of 10 % NaNO<sub>3</sub>+0.5 % NaOH, a cathode feed rate of 5.4 μm/s, a machining voltage of 23 V, and a pulsed power duty cycle of 30 %. Finally, a round hole of 1.224 mm diameter (the standard deviation of diameter is 0.0176 mm and the relative error is 2.04 %) and a 0.9778 × 0.9746 mm square hole were successfully machined using ECM (the standard deviation of transverse and longitudinal are 0.0183 and 0.0126 mm respectively), which further verified the feasibility of machining RHEAs using the ECM technique.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 148-165"},"PeriodicalIF":3.7,"publicationDate":"2025-12-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737090","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-05DOI: 10.1016/j.precisioneng.2025.12.004
X. Yin , Z. Zhang , W. Bai, J. Lian, G. Zhao
The goal of this study is to explore the underlying mechanisms to achieve ultra-low frequency active seismic vibration isolation, with a focus on dynamic analysis and multi-input-multi-output control algorithms. To this purpose, a dedicated seismic isolation system is constructed. A theoretical study is firstly performed in order to accurately derive the dynamic model of the system. This is done by individually modelling the dynamics of each sub-system and then connecting the sub-systems via a feedback approach. With the derived model, the couplings between the inertial sensor and the active platform are clearly presented. As for the controller, an LQG controller augmented with a virtual sensor fusion control scheme is proposed. In such a configuration, the influence induced by the high-frequency flexible modes can be suppressed so that the real states of the system can be accurately predicted by the Kalman filter. Experiments are then conducted for validating the theoretical analysis and examining the vibration isolation performance. A reduction of the transmitted motion of up to 60 dB in a frequency range from 0.1 Hz to 10 Hz is obtained, where the 60 dB reduction is achieved around the resonances of the system.
{"title":"Tilt-translational analysis and enhanced LQG control with a virtual sensor fusion configuration: in application to ultra-low frequency seismic vibration isolation","authors":"X. Yin , Z. Zhang , W. Bai, J. Lian, G. Zhao","doi":"10.1016/j.precisioneng.2025.12.004","DOIUrl":"10.1016/j.precisioneng.2025.12.004","url":null,"abstract":"<div><div>The goal of this study is to explore the underlying mechanisms to achieve ultra-low frequency active seismic vibration isolation, with a focus on dynamic analysis and multi-input-multi-output control algorithms. To this purpose, a dedicated seismic isolation system is constructed. A theoretical study is firstly performed in order to accurately derive the dynamic model of the system. This is done by individually modelling the dynamics of each sub-system and then connecting the sub-systems via a feedback approach. With the derived model, the couplings between the inertial sensor and the active platform are clearly presented. As for the controller, an LQG controller augmented with a virtual sensor fusion control scheme is proposed. In such a configuration, the influence induced by the high-frequency flexible modes can be suppressed so that the real states of the system can be accurately predicted by the Kalman filter. Experiments are then conducted for validating the theoretical analysis and examining the vibration isolation performance. A reduction of the transmitted motion of up to 60 dB in a frequency range from 0.1 Hz to 10 Hz is obtained, where the 60 dB reduction is achieved around the resonances of the system.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 191-205"},"PeriodicalIF":3.7,"publicationDate":"2025-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Electrochemical mechanical polishing (ECMP), through the introduction of electric field, promotes the chemical reaction during polishing. However, the addition of electric field will accelerate the oxidative corrosion, at this time the effective corrosion inhibitor must be added in the polishing solution. Nevertheless, most traditional corrosion inhibitors are toxic and inhibition efficiency is low. In order to meet this technical challenge, this paper investigates the effect of two green corrosion inhibitors, chitosan oligosaccharide (COS) and carboxymethylcellulose sodium (CMC-Na), on Co ECMP, and compares them with the traditional inhibitor TAZ. The results show that when COS and CMC-Na are added at the same time, the polished Co surface quality can be greatly improved, and the surface roughness decreases by 94.6 %. It indicates that adding COS and CMC-Na simultaneously can play the best corrosion inhibition effect and achieve the best surface quality. The synergistic behavior and action mechanism of COS/CMC-Na are analyzed by polishing experiments, static corrosion, electrochemical tests, XPS, and AFM. This study provides a reference for the development of green polishing solutions for Co ECMP.
{"title":"Synergistic mechanism of green corrosion inhibitors COS and CMC-Na in Co electrochemical mechanical polishing","authors":"Chunlin Cai, Min Zhong, Meirong Yi, Xiaobing Li, Jianfeng Chen, Wenhu Xu","doi":"10.1016/j.precisioneng.2025.12.008","DOIUrl":"10.1016/j.precisioneng.2025.12.008","url":null,"abstract":"<div><div>Electrochemical mechanical polishing (ECMP), through the introduction of electric field, promotes the chemical reaction during polishing. However, the addition of electric field will accelerate the oxidative corrosion, at this time the effective corrosion inhibitor must be added in the polishing solution. Nevertheless, most traditional corrosion inhibitors are toxic and inhibition efficiency is low. In order to meet this technical challenge, this paper investigates the effect of two green corrosion inhibitors, chitosan oligosaccharide (COS) and carboxymethylcellulose sodium (CMC-Na), on Co ECMP, and compares them with the traditional inhibitor TAZ. The results show that when COS and CMC-Na are added at the same time, the polished Co surface quality can be greatly improved, and the surface roughness decreases by 94.6 %. It indicates that adding COS and CMC-Na simultaneously can play the best corrosion inhibition effect and achieve the best surface quality. The synergistic behavior and action mechanism of COS/CMC-Na are analyzed by polishing experiments, static corrosion, electrochemical tests, XPS, and AFM. This study provides a reference for the development of green polishing solutions for Co ECMP.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 108-119"},"PeriodicalIF":3.7,"publicationDate":"2025-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737214","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-05DOI: 10.1016/j.precisioneng.2025.12.005
Dingyi Tao , Zhen Yin , Qinglong An , Qing Miao , Chenwei Dai , Ming Zhang , Hua Li , Zehui Liang , Yue Kou
The GH4169 nickel-based superalloy, owing to its outstanding tensile strength, excellent creep resistance, and long fatigue life, has become a key material for manufacturing critical hot-section components in aero-engines, such as turbine blades. When machining the cooling holes on the surface of turbine blades, large axial forces and burrs at the outlet are prone to occur. To overcome the aforementioned problems, a longitudinal–torsional ultrasonic vibration-assisted peck drilling (LTUPD) method is presented in this study. A simulation of the LTUPD drill's cutting-edge motion trajectory is carried out, and the mechanical behavior during the three stages of burr formation is investigated(stable cutting → critical transition → tearing and separation). A dynamic axial force prediction model for burr formation was developed based on discrete cutting-edge modeling and the Johnson–Cook constitutive law. The effects of ultrasonic amplitude, spindle speed, feed rate, and pecking depth on the axial force–burr height relationship were investigated through a series of single-factor experiments. Experimental validation indicates that the axial force prediction model achieves an error within 8 % compared with measurements; Ultrasonic vibration markedly reduces axial force and inhibits burr generation.; A reduction in feed rate and pecking depth leads to lower axial force and burr height; The axial force and burr height decrease with increasing spindle speed up to 9000 r/min, whereas a further increase in speed results in their growth. The optimal drilling conditions were obtained at 9000 r/min spindle speed, 6.3 mm/min feed rate, 6 μm ultrasonic amplitude, and 0.03 mm pecking depth. Using this combination, axial force in LTUPD decreased by 40 %, while burr height was lowered by more than 20 % relative to conventional drilling.
{"title":"Dynamic axial force prediction model and method for controlling burr height in Longitudinal-torsional ultrasonic pecking micro-drilling of GH4169 superalloy","authors":"Dingyi Tao , Zhen Yin , Qinglong An , Qing Miao , Chenwei Dai , Ming Zhang , Hua Li , Zehui Liang , Yue Kou","doi":"10.1016/j.precisioneng.2025.12.005","DOIUrl":"10.1016/j.precisioneng.2025.12.005","url":null,"abstract":"<div><div>The GH4169 nickel-based superalloy, owing to its outstanding tensile strength, excellent creep resistance, and long fatigue life, has become a key material for manufacturing critical hot-section components in aero-engines, such as turbine blades. When machining the cooling holes on the surface of turbine blades, large axial forces and burrs at the outlet are prone to occur. To overcome the aforementioned problems, a longitudinal–torsional ultrasonic vibration-assisted peck drilling (LTUPD) method is presented in this study. A simulation of the LTUPD drill's cutting-edge motion trajectory is carried out, and the mechanical behavior during the three stages of burr formation is investigated(stable cutting → critical transition → tearing and separation). A dynamic axial force prediction model for burr formation was developed based on discrete cutting-edge modeling and the Johnson–Cook constitutive law. The effects of ultrasonic amplitude, spindle speed, feed rate, and pecking depth on the axial force–burr height relationship were investigated through a series of single-factor experiments. Experimental validation indicates that the axial force prediction model achieves an error within 8 % compared with measurements; Ultrasonic vibration markedly reduces axial force and inhibits burr generation.; A reduction in feed rate and pecking depth leads to lower axial force and burr height; The axial force and burr height decrease with increasing spindle speed up to 9000 r/min, whereas a further increase in speed results in their growth. The optimal drilling conditions were obtained at 9000 r/min spindle speed, 6.3 mm/min feed rate, 6 μm ultrasonic amplitude, and 0.03 mm pecking depth. Using this combination, axial force in LTUPD decreased by 40 %, while burr height was lowered by more than 20 % relative to conventional drilling.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 131-147"},"PeriodicalIF":3.7,"publicationDate":"2025-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737092","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-05DOI: 10.1016/j.precisioneng.2025.12.009
Wenxin Zhang , Zhanfeng Wang , Junjie Zhang
While inherent heterogeneous microstructures introduce significant anisotropic machining response of polycrystalline metals, reducing the anisotropy by grain refinement is crucial for achieving the ultrahigh surface integrity. In the present work, we propose an in-situ integrated grain refinement strategy of polycrystalline Cu by firstly ultrasonic vibration-assisted diamond cutting for suppressing the anisotropic cutting behavior in subsequent conventional diamond cutting, the two processes of which are carried out within one experimental setup. Specifically, the promoted propensity and underlying mechanisms of cutting-induced grain refinement within subsurface by vibration assistance are discovered by experiments and multiscale numerical simulations. A maximum decrease of average grain size in subsurface from initial 13.5 μm–5.3 μm accompanied by dislocation glide-dominated dynamic recrystallization is revealed. Subsequent in-situ conventional diamond cutting on the fine-grained Cu yields an ultrasmooth surface formation with significantly suppressed grain boundary surface steps, accompanied with a 71.1 % reduction of surface roughness from its coarse-grained counterpart. Subsequent instrumented nanoindentation tests on retaining refinement layer with a 4 μm thickness demonstrate the enhanced mechanical performance of machined surface of fine-grained Cu in terms of increased hardness and elastic modulus. This study demonstrates the feasibility and effectiveness of applying grain refinement by in-situ integrated vibration-assisted diamond cutting for improving the machining performance of polycrystalline metals.
{"title":"In-situ integrated ultrasonic vibration-assisted grain refinement for suppressing anisotropic diamond cutting behavior of polycrystalline Cu","authors":"Wenxin Zhang , Zhanfeng Wang , Junjie Zhang","doi":"10.1016/j.precisioneng.2025.12.009","DOIUrl":"10.1016/j.precisioneng.2025.12.009","url":null,"abstract":"<div><div>While inherent heterogeneous microstructures introduce significant anisotropic machining response of polycrystalline metals, reducing the anisotropy by grain refinement is crucial for achieving the ultrahigh surface integrity. In the present work, we propose an in-situ integrated grain refinement strategy of polycrystalline Cu by firstly ultrasonic vibration-assisted diamond cutting for suppressing the anisotropic cutting behavior in subsequent conventional diamond cutting, the two processes of which are carried out within one experimental setup. Specifically, the promoted propensity and underlying mechanisms of cutting-induced grain refinement within subsurface by vibration assistance are discovered by experiments and multiscale numerical simulations. A maximum decrease of average grain size in subsurface from initial 13.5 μm–5.3 μm accompanied by dislocation glide-dominated dynamic recrystallization is revealed. Subsequent in-situ conventional diamond cutting on the fine-grained Cu yields an ultrasmooth surface formation with significantly suppressed grain boundary surface steps, accompanied with a 71.1 % reduction of surface roughness from its coarse-grained counterpart. Subsequent instrumented nanoindentation tests on retaining refinement layer with a 4 μm thickness demonstrate the enhanced mechanical performance of machined surface of fine-grained Cu in terms of increased hardness and elastic modulus. This study demonstrates the feasibility and effectiveness of applying grain refinement by in-situ integrated vibration-assisted diamond cutting for improving the machining performance of polycrystalline metals.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 166-177"},"PeriodicalIF":3.7,"publicationDate":"2025-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737211","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-02DOI: 10.1016/j.precisioneng.2025.12.003
Shiyu Li , Ji Zhou , Chi Tu , Xia Kang , Jingteng Liu , Haifeng Sun , Junbo Liu
Dynamic image degradation in reflective projection objectives limits sub-nanometer chip fabrication in high-numerical aperture (NA) extreme ultraviolet (EUV) lithography systems. Micro-vibrations induce optical misalignments via opto-mechanical coupling, causing spatial image blur. An opto-mechanical coupled model and a multi-parameter optimization method are proposed to evaluate the mirror position offset and reduce the vibration response. Based on the second Lagrange equations, a multi-body dynamics model considering the internal stiffness, damping and mass of the objective is established. The predicted mirror displacement errors along the X, Y and Z axes are 3.01 %, 3.39 % and 0.12 % respectively. Hopkins’ partially coherent imaging theory and wavefront aberration transfer functions are used to develop a dynamic image blur evaluation model. On this basis, a hybrid genetic algorithm-particle swarm optimization (GA-PSO) method is proposed to optimize stiffness and damping parameters, reducing mirror displacement responses and spatial image pattern errors (PE) by over 36 % and 40 % respectively.
{"title":"Dynamic image blurring analysis and vibration suppression in reflective lithography projection objective","authors":"Shiyu Li , Ji Zhou , Chi Tu , Xia Kang , Jingteng Liu , Haifeng Sun , Junbo Liu","doi":"10.1016/j.precisioneng.2025.12.003","DOIUrl":"10.1016/j.precisioneng.2025.12.003","url":null,"abstract":"<div><div>Dynamic image degradation in reflective projection objectives limits sub-nanometer chip fabrication in high-numerical aperture (NA) extreme ultraviolet (EUV) lithography systems. Micro-vibrations induce optical misalignments via opto-mechanical coupling, causing spatial image blur. An opto-mechanical coupled model and a multi-parameter optimization method are proposed to evaluate the mirror position offset and reduce the vibration response. Based on the second Lagrange equations, a multi-body dynamics model considering the internal stiffness, damping and mass of the objective is established. The predicted mirror displacement errors along the X, Y and Z axes are 3.01 %, 3.39 % and 0.12 % respectively. Hopkins’ partially coherent imaging theory and wavefront aberration transfer functions are used to develop a dynamic image blur evaluation model. On this basis, a hybrid genetic algorithm-particle swarm optimization (GA-PSO) method is proposed to optimize stiffness and damping parameters, reducing mirror displacement responses and spatial image pattern errors (PE) by over 36 % and 40 % respectively.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 96-107"},"PeriodicalIF":3.7,"publicationDate":"2025-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145684906","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-12-02DOI: 10.1016/j.precisioneng.2025.12.002
Ya Xu , Xiaotong Du , Xiaodong Su , Suet To , LiMin Zhu , Zhiwei Zhu
By processing photocurable silica-polymer-based nanocomposites, the additive and subtractive manufacturing techniques have recently emerged as powerful tools for fast prototyping fused silica components with complex structures. However, the inherently low form accuracy and low surface smoothness achieved by current additive and subtractive manufacturing of the nanocomposites prohibit their application in generating fused silica glass optics. To satisfy the requirements for producing high-quality optical surfaces with high efficiency, we proposed an innovative fast-prototyping technique for creating complex-shaped fused silica optics by shaping silica nanocomposites through ultra-precision diamond cutting. Unlike fused silica glass, which has high hardness and low fracture toughness, silica nanocomposites are easier to cut due to the coexistence of soft and ductile polymers. The shaped components are then converted into conforming fused silica optics through high-temperature debinding and sintering. To enable high-performance prototyping of fused silica optics, the silica nanocomposites were first optimized by balancing machinability and sinterability. For the optimized nanocomposites, evolutions of surface micro/nanotopographies and dimensions from cutting to sintering were characterized, and the achievable sizes were investigated by generating micro-gratings with various widths. Finally, a diffractive/refractive hybrid lens and a spherical microlens array were successfully fabricated with further characterization of their optical performance, demonstrating the superiority of the proposed technique for the rapid prototyping of fused silica micro-optics.
{"title":"Fast prototyping of complex-shaped fused silica micro-optics through diamond turning of silica nanocomposites","authors":"Ya Xu , Xiaotong Du , Xiaodong Su , Suet To , LiMin Zhu , Zhiwei Zhu","doi":"10.1016/j.precisioneng.2025.12.002","DOIUrl":"10.1016/j.precisioneng.2025.12.002","url":null,"abstract":"<div><div>By processing photocurable silica-polymer-based nanocomposites, the additive and subtractive manufacturing techniques have recently emerged as powerful tools for fast prototyping fused silica components with complex structures. However, the inherently low form accuracy and low surface smoothness achieved by current additive and subtractive manufacturing of the nanocomposites prohibit their application in generating fused silica glass optics. To satisfy the requirements for producing high-quality optical surfaces with high efficiency, we proposed an innovative fast-prototyping technique for creating complex-shaped fused silica optics by shaping silica nanocomposites through ultra-precision diamond cutting. Unlike fused silica glass, which has high hardness and low fracture toughness, silica nanocomposites are easier to cut due to the coexistence of soft and ductile polymers. The shaped components are then converted into conforming fused silica optics through high-temperature debinding and sintering. To enable high-performance prototyping of fused silica optics, the silica nanocomposites were first optimized by balancing machinability and sinterability. For the optimized nanocomposites, evolutions of surface micro/nanotopographies and dimensions from cutting to sintering were characterized, and the achievable sizes were investigated by generating micro-gratings with various widths. Finally, a diffractive/refractive hybrid lens and a spherical microlens array were successfully fabricated with further characterization of their optical performance, demonstrating the superiority of the proposed technique for the rapid prototyping of fused silica micro-optics.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 75-86"},"PeriodicalIF":3.7,"publicationDate":"2025-12-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145684904","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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