Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第4页

Collaborative control of surface quality and stability in hemispherical resonator grinding 半球形谐振腔磨削表面质量与稳定性的协同控制

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-13 DOI: 10.1016/j.precisioneng.2025.12.013

Jiangang Sun , Henan Liu , Biao Qin , Jian Cheng , Mingjun Chen

During the grinding of hemispherical resonator and other hard-brittle complex curved components, variations in geometric features lead to changes in contact conditions and force states, inducing non-uniform wheel wear and resulting in fluctuations in workpiece surface quality. Previous studies have indicated that grinding parameters are key factors influencing surface integrity and wheel wear behavior in the machining of hard-brittle materials. Building on this understanding, an optimization strategy centered on the grinding ratio is proposed herein for the first time to achieve simultaneous improvement of workpiece surface quality and wheel lifespan. Initially, a correlation model between grinding parameters and the grinding ratio was established using multiple linear regression and analysis of variance, revealing the evolution of wheel wear behavior and workpiece surface integrity under different grinding ratio conditions. Furthermore, a multi-objective optimization model tailored for hemispherical resonator was formulated, and the non-dominated sorting genetic algorithm (NSGA-II) combined with the ideal distance method was employed to determine the optimal grinding parameters. Experimental results demonstrate that, following optimization, hemispherical resonator surface roughness can be maintained within 68.90–76.94 nm, representing an improvement of 21.62 %–37.05 % compared with conventional grinding parameters, while the fluctuation range decreased by 33.14 %. Moreover, under the same material removal volume, wheel wear was reduced by 16.07 %–35.14 %. The proposed grinding ratio–centered optimization framework provides a theoretical basis for achieving high-quality and stable machining of hard-brittle complex curved components while extending wheel lifespan.

在半球形谐振器等硬脆复杂曲面部件的磨削过程中，几何特征的变化导致接触条件和受力状态的变化，导致砂轮磨损不均匀，工件表面质量波动。以往的研究表明，磨削参数是影响硬脆材料加工表面完整性和砂轮磨损行为的关键因素。在此基础上，首次提出了一种以磨削比为中心的优化策略，以实现工件表面质量和砂轮寿命的同步提高。首先，通过多元线性回归和方差分析，建立了磨削参数与磨削比之间的相关模型，揭示了不同磨削比条件下砂轮磨损行为和工件表面完整性的演变规律。在此基础上，建立了针对半球形谐振腔的多目标优化模型，采用非支配排序遗传算法（NSGA-II）结合理想距离法确定了最优磨削参数。实验结果表明，优化后的半球形谐振腔表面粗糙度可保持在68.90 ~ 76.94 nm范围内，比常规磨削参数提高21.62% ~ 37.05%，波动幅度减小33.14%。在相同材料去除率下，砂轮磨损量降低了16.07% ~ 35.14%。提出的以磨削比为中心的优化框架为实现硬脆复杂曲面零件的高质量稳定加工和延长车轮寿命提供了理论依据。

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引用次数: 0

Thermal error modeling and multi-objective optimization design to enhance the thermal stability of interferometers 提高干涉仪热稳定性的热误差建模和多目标优化设计

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-11-24 DOI: 10.1016/j.precisioneng.2025.11.026

Yongjun Wang , Wan Fang , Ke Zhang , Zhengyu Wang , Chengyao Zhang , Xiaojuan Mo , Zhenying Cheng , Ruijun Li

Structural deformations caused by environmental temperature fluctuations and local heat sources are the primary factors affecting the accuracy of high-precision instruments. An optimal method based on a multi-objective genetic algorithm has been proposed and demonstrated to enhance thermal stability in interferometers. A mathematical model relating the thermal error of the interferometer to temperature fluctuations and the uniformity of the temperature field is established. Finite element analysis is conducted to evaluate the overall temperature distribution of the interferometers. The temperature field is optimized using a multi-objective genetic algorithm, and stability experiments are carried out on the interferometers both before and after optimization. As a result, the temperature fluctuation of the interferometer is reduced by 60.6 %, while temperature field uniformity and interferometer stability are improved by 55.9 % and 55.1 %, respectively. The experimental results indicate that the temperature field optimization method based on NSGA-II effectively improves the thermal stability of interferometers.

环境温度波动和局部热源引起的结构变形是影响高精度仪器精度的主要因素。为了提高干涉仪的热稳定性，提出了一种基于多目标遗传算法的优化方法。建立了干涉仪热误差与温度波动和温度场均匀性的数学模型。对干涉仪的整体温度分布进行了有限元分析。采用多目标遗传算法对温度场进行优化，并对优化前后的干涉仪进行了稳定性实验。结果表明，干涉仪的温度波动降低了60.6%，温度场均匀性和干涉仪稳定性分别提高了55.9%和55.1%。实验结果表明，基于NSGA-II的温度场优化方法有效地提高了干涉仪的热稳定性。

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引用次数: 0

Effects of lubrication performance on multi-roller statics characteristics of planetary roller screw mechanism with errors 润滑性能对误差行星滚子丝杠机构多滚子静力学特性的影响

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-11-21 DOI: 10.1016/j.precisioneng.2025.11.024

Mingcai Xing , Zhenwen Cheng , Shuo Liu , Meide Yang

In this work, the multi-roller statics model of planetary roller screw mechanism (PRSM) considering the lubrication performance is established. The effects of oil film stiffness on multi-roller statics characteristics are investigated. The thread-pair oil film stiffness on screw-roller side (SRS) and nut-roller side (NRS) are described, and the thread-pair engagement stiffness with oil film is calculated. The thread-pair load distribution (TPLD) on SRS and NRS with and without lubrication are compared for PRSM. Furthermore, the influences of lubrication performance on the multi-roller load sharing (MRLS) and TPLD with pitch error, roller nominal diameter error (RNDE), screw eccentric error (SEE) and nut eccentric error (NEE) are studied. It is found that the lubrication performance reduces the uniformity of MRLS and TPLD.

建立了考虑润滑性能的行星螺杆机构多辊静力学模型。研究了油膜刚度对多辊静力特性的影响。描述了螺杆侧和螺母侧的螺纹副油膜刚度，并计算了螺纹副与油膜的啮合刚度。比较了有润滑和无润滑情况下SRS和NRS的螺纹对载荷分布。此外，还研究了润滑性能对多辊负载分担（MRLS）和具有节距误差、滚子公称直径误差（RNDE）、螺杆偏心误差（SEE）和螺母偏心误差（NEE）的TPLD的影响。研究发现，润滑性能降低了MRLS和TPLD的均匀性。

引用次数: 0

Digital twin-driven spatial error distribution modeling for a four-station laser tracker system 数字双驱动四站激光跟踪系统的空间误差分布建模

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-12 DOI: 10.1016/j.precisioneng.2025.12.012

Yiliang Lin, Enchen Wu, Xiaolong Wang, Wei Wang, Ting Ding, Qiuyu Zhang, Xiaoye He

This study presents a digital-twin approach for characterizing and correcting spatial errors in a four-laser-tracker multistation measurement system (FLTMMS). A CMM-calibrated tetrahedral artifact was measured in multiple orientations; the data were used to fit a polynomial error model for systematic deviations. Uncertainty was quantified with a kernel-density-estimation Monte Carlo method that propagates measurement and model uncertainties within the digital twin. Validation experiments assessed correction performance and uncertainty prediction. After correction, the point-wise standard uncertainty decreased from 12.491 to 8.136 μm, whereas the nearly unchanged edge length uncertainty (5.358 → 5.334 μm) reflects geometry-limited propagation. Coverage-probability tests showed close agreement with theory—71 %, 96 %, and 98 % for coverage factors k_p = 1, 2, and 3, versus theoretical 68.27 %, 95.45 %, and 99.73 %. Using all corrected points inside the declared working volume, all inter-point distances were formed; the empirical 95.45 % quantile (k_p ≈ 2) gives a system-level distance MPE of 9.270 μm. The digital twin also reproduces the geometry-induced anisotropy of the four-tracker layout, with the largest dispersion along the axis nearly normal to the tracker plane. These results indicate that the proposed method provides traceable correction and well-calibrated uncertainty for FLTMMS, while making explicit the residual bias commonly observed in digital-twin predictions.

提出了一种用于四激光跟踪器多站测量系统（FLTMMS）空间误差表征和校正的数字孪生方法。在多个方向上测量了三坐标校准的四面体伪影；这些数据被用来拟合系统偏差的多项式误差模型。用核密度估计蒙特卡罗方法量化不确定性，该方法在数字孪生内传播测量和模型不确定性。验证实验评估了校正性能和不确定度预测。校正后，点方向的标准不确定度从12.491降低到8.136 μm，而边缘长度不确定度（5.358→5.334 μm）基本不变，反映了几何限制的传播。覆盖概率测试显示与理论非常吻合——覆盖因子kp = 1、2和3的覆盖率分别为71%、96%和98%，而理论为68.27%、95.45%和99.73%。利用所有修正点在申报的工作体积内，形成所有点间距离；经验95.45%分位数（kp≈2）得到系统级距离MPE为9.270 μm。数字孪生体还再现了四跟踪器布局的几何诱导的各向异性，沿轴的最大色散几乎与跟踪器平面垂直。这些结果表明，该方法为FLTMMS提供了可追溯的校正和校准良好的不确定性，同时明确了数字孪生预测中常见的残余偏差。

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引用次数: 0

Comprehensive coupled wear-vibration analysis of roller linear guide considering multi-stage and multi-state actual contact variation 考虑多阶段多状态实际接触变化的滚子直线导轨磨损-振动综合耦合分析

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-22 DOI: 10.1016/j.precisioneng.2025.12.017

Tian-Wen Qi , Sheng-Hao Xu , De-Jun Cheng , Xue Zuo

Wear-induced stiffness variation in roller linear guides (RLGs) decreases their dynamic load-bearing stability and leads to significant positioning errors. However, most existing models assume uniform wear at the roller-raceway interfaces within idealized contact zones, which greatly limits dynamic performance analysis accuracy. This paper investigates the relationships among contact load, impact angle, and elastic deformation during a multi-stage contact-variation process associated with uneven wear evolution. Based on this analysis, it proposes a novel physics-based predictive wear model to determine the actual uneven wear-depth distribution and the corresponding contact zones between the carriage and rail raceways. Subsequently, a comprehensive wear-vibration coupling model is developed to analyze the wear-induced five-degree-of-freedom (5-DOF) dynamic behavior under multidirectional loading conditions, based on a mechanic model that accurately describes preload degradation in multi-state contact interfaces. Furthermore, numerical simulations are conducted to evaluate the uneven wear-depth distribution, preload degradation, and nonlinear dynamic characteristics. Moreover, the proposed method is compared with existing models. The findings demonstrate the superior performance of the proposed approach and show that it can accurately predict the actual wear-depth distribution and vibration behavior of RLG systems.

滚子直线导轨的磨损刚度变化会降低其动承载稳定性，导致定位误差显著。然而，现有模型大多假设理想接触区域内滚子滚道界面磨损均匀，这极大地限制了动态性能分析的准确性。本文研究了非均匀磨损多阶段接触变化过程中接触载荷、冲击角和弹性变形之间的关系。在此基础上，提出了一种新的基于物理的预测磨损模型，以确定车厢与轨道之间的实际不均匀磨损深度分布和相应的接触区域。随后，基于准确描述多状态接触界面预紧力退化的力学模型，建立了多向加载条件下的磨损-振动综合耦合模型，分析了多向加载条件下的磨损五自由度动力学行为。在此基础上，进行了数值模拟，分析了非均匀磨损深度分布、预紧力退化和非线性动态特性。并与现有模型进行了比较。研究结果证明了该方法的优越性，并表明该方法可以准确预测RLG系统的实际磨损深度分布和振动行为。

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引用次数: 0

Design of multi-electrode synchronized electrochemical trepanning with rotational feeding system for inner twisted blisk 内扭盘片多电极同步电化学钻孔旋转送料系统设计

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-13 DOI: 10.1016/j.precisioneng.2025.12.011

Erhao Jiao, Dong Zhu, Yunmiao Wang, Ruolong Wang

As a core component of aero-engine compressor, inner twisted blisk features confined internal spaces, numerous blades with complex twisted surfaces, which is difficult to manufacture and improve machining efficiency. Electrochemical trepanning (ECTr) is a specialized electrochemical machining (ECM) method offering advantages such as easily controllable flow fields and high machining flexibility. However, machining efficiency is limited by the widespread adoption of the single-blade machining mode in current ECTr. Therefore, this paper proposed a multi-electrode synchronized electrochemical trepanning (MES-ECTr) with rotational feeding method, and established a MES-ECTr with rotational feeding device to realize the synchronized machining of multiple inner twisted blades in a single feed operation. The parameters such as the layout, quantity and diameter of ball bearings in the rotational feeding module were optimized through fluid-structure interaction (FSI) simulation, and the reliability of the device were improved. Furthermore, to improve machining stability for multiple blades, a multi-channel electrolyte control (MC-EC) platform was established to monitor and regulate the electrolyte flow of multiple channels in real-time, thereby enhancing flow field uniformity. Finally, the MES-ECTr with rotational feeding experiments were conducted. Stable synchronized machining of three inner twisted blades was achieved at 18 V machining voltage and 1.5 mm/min feed rate, with excellent surface consistency and accuracy consistency. Compared to conventional single-blade mode, machining efficiency improved by 226 %, demonstrating the effectiveness of the designed MES-ECTr with rotational feeding system and its promising application prospects.

内扭盘是航空发动机压气机的核心部件，其内部空间狭小、叶片数量众多、扭面复杂，制造难度大，难以提高加工效率。电化学钻孔加工（ECTr）是一种特殊的电化学加工（ECM）方法，具有流场易于控制和加工灵活性高等优点。然而，目前ECTr普遍采用单刀片加工方式，限制了加工效率。因此，本文提出了一种旋转进给的多电极同步电化学钻削（MES-ECTr）方法，并建立了一种旋转进给的MES-ECTr装置，实现了一次进给操作中多个内扭叶片的同步加工。通过流固耦合（FSI）仿真，优化了旋转进给模块中滚珠轴承的布置、数量和直径等参数，提高了装置的可靠性。为提高多叶片的加工稳定性，建立了多通道电解液控制（MC-EC）平台，实时监测和调节多通道电解液流动，增强流场均匀性。最后，进行了MES-ECTr旋转进料实验。在18 V的加工电压和1.5 mm/min的进给速度下，实现了三片内扭叶片的稳定同步加工，具有良好的表面一致性和精度一致性。与传统的单刀片模式相比，加工效率提高了226%，证明了旋转进给系统MES-ECTr的有效性和广阔的应用前景。

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引用次数: 0

Mechanism-based prediction of helical gear grinding Surface roughness: Integrated modeling of spatial kinematics and abrasive trajectory effects 基于机理的斜齿轮磨削表面粗糙度预测：空间运动学和磨料轨迹影响的综合建模

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-11-22 DOI: 10.1016/j.precisioneng.2025.11.023

Shuying Yang , Lei Zheng , Jiju Guan , Weifang Chen , Rupeng Zhu

As critical transmission components in aero-engines, hard-tooth-surface involute helical cylindrical gears require precise control of surface morphology to ensure high-quality manufacturing with minimized subsurface damage. The complexity of form grinding processes arises from intricate wheel-workpiece spatial kinematics and heterogeneous local contact geometries, which challenge the prediction of chip formation mechanisms and resultant surface topography. This study presents a numerical calculation model to characterize surface morphology in helical gear form grinding. By analyzing localized contact conditions and geometric mapping relationships, the abrasive grain trajectories were mathematically formulated through a spatial helical motion model. The helical tooth surface was discretized to calculate undeformed chip thickness along the normal direction, enabling the reconstruction of three-dimensional surface morphology. Experimental validation using manufactured specimens confirmed the accuracy of the model, with further investigation revealing non-uniform surface distribution characteristics. Key findings demonstrate that surface roughness along the involute profile increases with rolling angle, exhibiting negative correlation with wheel speed, while positively correlating with feed rate and grinding depth. The proposed model provides a theoretical foundation for optimizing helical gear grinding parameters and enhancing in-service performance through surface integrity control.

作为航空发动机的关键传动部件，硬齿面渐开线斜圆柱齿轮要求对其表面形貌进行精确控制，以保证高质量的制造，同时将亚表面损伤降到最低。磨削加工的复杂性源于复杂的砂轮-工件空间运动学和非均匀的局部接触几何形状，这对切屑形成机理和表面形貌的预测提出了挑战。提出了一种表征斜齿形磨削表面形貌的数值计算模型。通过分析局部接触条件和几何映射关系，通过空间螺旋运动模型建立了磨料颗粒运动轨迹的数学表达式。对螺旋齿面进行离散化，计算沿法线方向未变形的切屑厚度，重建三维表面形貌。利用人造标本进行的实验验证证实了该模型的准确性，进一步的研究揭示了非均匀表面分布特征。研究结果表明：渐开线轮廓的表面粗糙度随滚动角度的增加而增加，与砂轮转速呈负相关，与进给速度和磨削深度呈正相关；该模型为通过表面完整性控制优化斜齿轮磨削参数、提高斜齿轮在役性能提供了理论基础。

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引用次数: 0

Prediction of subsurface damage in precision grinding of hemispherical resonators 半球形谐振器精密磨削亚表面损伤预测

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-07 DOI: 10.1016/j.precisioneng.2025.12.006

Chuang Zhao , Hao Yi , Jiale Guo , Limin Zhu , Lingxi Guo , Jie Lan , Yuli Sun , Dunwen Zuo

Cracks are a common form of subsurface damage (SSD) in optical glass grinding, directly affecting the positioning accuracy and lifespan of hemispherical resonator gyroscopes (HRGs). This study presents a predictive model for SSD in hemispherical resonator grinding, based on indentation fracture theory. The SSD and surface roughness average (Ra) data, obtained from grinding experiments under various conditions, were used to optimize the model's accuracy. Material scratching tests under different loads revealed that only surface plastic deformation occurred, with no observable SSD at 120 mN. The characteristics of surface damage (SD) transitioned from plastic deformation to brittle fracture between 120 mN and 300 mN, with subsurface cracks propagating in the direction of maximum stress. The model's practical applicability was further verified through precision grinding trials conducted on hemispherical resonators. A minimum error of 1.41 % and a mean error of 14.94 % demonstrate the model's predictive capability within a specific range.

裂纹是光学玻璃磨削过程中常见的亚表面损伤形式，直接影响半球面谐振陀螺仪的定位精度和使用寿命。基于压痕断裂理论，提出了半球形谐振腔磨削过程中SSD的预测模型。利用不同条件下磨削实验获得的SSD和表面粗糙度平均值（Ra）数据来优化模型的精度。不同载荷下的材料划伤试验表明，在120 mN下，材料只发生表面塑性变形，没有观察到SSD。在120 ~ 300 mN范围内，表面损伤特征由塑性变形向脆性断裂过渡，亚表面裂纹沿最大应力方向扩展。通过对半球形谐振器进行精密磨削试验，进一步验证了该模型的实用性。最小误差为1.41%，平均误差为14.94%，表明该模型在一定范围内具有较好的预测能力。

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引用次数: 0

Practical simulator generation using a simple feedforward element design method for precision motion systems abbreviated title: Practical precision simulator generation 实用模拟器的生成采用一种简单的前馈元件设计方法，用于精密运动系统简称：实用精密模拟器的生成

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-11-22 DOI: 10.1016/j.precisioneng.2025.11.022

Kaiji Sato, Mizuki Takeda

The growing demand for automation and labor-saving solutions has intensified interest in digital technology applications that replicate real-world systems and utilize analytical results in physical settings. Fulfilling these needs requires the development of a high-precision simulator that can be automatically and effortlessly generated from data easily obtainable from a physical machine. This paper proposes an innovative method for generating a precision simulator for motion systems. The proposed method uses feedforward elements derived through our feedforward design methodology. In this approach, following a specified procedure, a learning controller distinguishes four operational characteristics based on specific types of motion profiles, and the derived elements are combined according to predetermined rules to produce a simulator. We applied this method to a ball-screw mechanism and assessed the performance of the generated simulator by comparing it with experimental data. In the experimental setup, we observed position-dependent submicrometer vibrations, which cannot be represented by conventional mechanical models. The simulator, constructed by combining FF elements from high-resolution measured or reconstructed data, replicated vibrations with similar frequencies. However, its ability to effectively mimic certain responses, including the observed submicrometer vibrations, was limited. Notably, the vibration amplitude varied with velocity. Nevertheless, the results demonstrated that straightforward refinement of the simulator generation process could produce a simulator with high simulation accuracy.

对自动化和节省劳动力的解决方案日益增长的需求，增强了人们对数字技术应用的兴趣，这些应用可以复制现实世界的系统，并在物理环境中利用分析结果。为了满足这些需求，需要开发一种高精度模拟器，该模拟器可以从物理机器上容易获得的数据自动轻松地生成。本文提出了一种生成运动系统精密模拟器的创新方法。所提出的方法使用通过我们的前馈设计方法导出的前馈元素。在这种方法中，遵循指定的程序，学习控制器根据特定类型的运动轮廓区分四种操作特征，并根据预定规则组合派生元素以产生模拟器。我们将该方法应用于滚珠丝杠机构，并通过与实验数据的比较来评估生成的模拟器的性能。在实验设置中，我们观察到位置相关的亚微米振动，这是传统力学模型无法表示的。该模拟器通过结合高分辨率测量或重建数据中的FF元素构建，可以复制相似频率的振动。然而，它有效模拟某些响应的能力，包括观察到的亚微米振动，是有限的。值得注意的是，振动幅值随速度变化。然而，结果表明，直接改进模拟器生成过程可以产生具有高仿真精度的模拟器。

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引用次数: 0

Achieving sub-μm accuracy on a pagoda-type micro-CMM via dynamic volumetric error compensation 通过动态体积误差补偿，在宝塔式微型三坐标测量机上实现亚μm精度

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-23 DOI: 10.1016/j.precisioneng.2025.12.016

Ya-Xiong He , Yefeng Chen , Zai Luo , Dian Bian , Yinbao Cheng , Wensong Jiang , Yaru Li , Rui-Jun Li

The increasing demand for inspecting complex micro-structures challenges conventional metrology, driving the need for 3D coordinate measuring systems with micro- and nano-scale accuracy. This paper presents a volumetric error compensation approach to achieve sub-micrometer accuracy metrology by developing a global and dynamic error compensation model on the basis of Abbe principle and Bryan principle. A comprehensive volumetric error model for general CMMs incorporating all 21 geometric errors was derived from the fundamental Abbe and Bryan principles using kinematics of rigid bodies. The general model was then applied and simplified for a self-developed Pagoda-type micro-CMM equipped with integrated multi-degree-of-freedom sensors for instantaneous geometric error measurement. The efficacy of the volumetric error compensation was validated through single-axis positioning tests, gauge block measurements, and the inspection of complex micro-structures, including a bearing raceway and a high-aspect-ratio micro-hole. After dynamic volumetric error compensation, the positioning errors in three directions were reduced from a maximum of 130 nm to below 10 nm. Volumetric accuracy tests on gauge blocks showed a reduction in the standard deviation of length measurements by 73 % (X-axis), 55 % (Y-axis), and 75 % (Z-axis). The compensated system successfully measured a bearing's inner raceway with a radius standard deviation of 161 nm and a high-aspect-ratio (5:1) micro-hole with a maximum diameter standard deviation of 48 nm, achieving an expanded measurement uncertainty of 155 nm (k = 2).

对复杂微结构检测的需求日益增长，对传统计量学提出了挑战，推动了对具有微纳米级精度的三维坐标测量系统的需求。在Abbe原理和Bryan原理的基础上，建立了一种全局动态误差补偿模型，提出了一种实现亚微米精度测量的体积误差补偿方法。利用刚体运动学原理，从Abbe和Bryan的基本原理出发，导出了包含所有21种几何误差的通用三坐标测量机的综合体积误差模型。将该模型应用于自行研制的集成多自由度传感器的宝塔式微型三坐标测量机，并进行了简化。通过单轴定位试验、量块测量以及对轴承滚道和高纵横比微孔等复杂微结构的检测，验证了体积误差补偿的有效性。经过动态体积误差补偿后，三个方向的定位误差从最大130 nm减小到10 nm以下。量块的体积精度测试表明，长度测量的标准偏差减少了73% （x轴），55% （y轴）和75% （z轴）。补偿系统成功测量了半径标准差为161 nm的轴承内滚道和最大直径标准差为48 nm的高纵横比（5:1）微孔，实现了155 nm （k = 2）的扩展测量不确定度。

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引用次数: 0