Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第4页

In-situ integrated ultrasonic vibration-assisted grain refinement for suppressing anisotropic diamond cutting behavior of polycrystalline Cu 原位集成超声振动辅助晶粒细化抑制多晶铜的各向异性金刚石切削行为

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-12-05 DOI: 10.1016/j.precisioneng.2025.12.009

Wenxin Zhang , Zhanfeng Wang , Junjie Zhang

While inherent heterogeneous microstructures introduce significant anisotropic machining response of polycrystalline metals, reducing the anisotropy by grain refinement is crucial for achieving the ultrahigh surface integrity. In the present work, we propose an in-situ integrated grain refinement strategy of polycrystalline Cu by firstly ultrasonic vibration-assisted diamond cutting for suppressing the anisotropic cutting behavior in subsequent conventional diamond cutting, the two processes of which are carried out within one experimental setup. Specifically, the promoted propensity and underlying mechanisms of cutting-induced grain refinement within subsurface by vibration assistance are discovered by experiments and multiscale numerical simulations. A maximum decrease of average grain size in subsurface from initial 13.5 μm–5.3 μm accompanied by dislocation glide-dominated dynamic recrystallization is revealed. Subsequent in-situ conventional diamond cutting on the fine-grained Cu yields an ultrasmooth surface formation with significantly suppressed grain boundary surface steps, accompanied with a 71.1 % reduction of surface roughness from its coarse-grained counterpart. Subsequent instrumented nanoindentation tests on retaining refinement layer with a 4 μm thickness demonstrate the enhanced mechanical performance of machined surface of fine-grained Cu in terms of increased hardness and elastic modulus. This study demonstrates the feasibility and effectiveness of applying grain refinement by in-situ integrated vibration-assisted diamond cutting for improving the machining performance of polycrystalline metals.

虽然多晶金属的非均质组织会引起明显的各向异性加工响应，但通过细化晶粒来降低各向异性是实现超高表面完整性的关键。在本工作中，我们首先提出了超声振动辅助金刚石切削多晶铜的原位综合晶粒细化策略，以抑制后续常规金刚石切削的各向异性切削行为，这两个过程在一个实验装置中进行。具体而言，通过实验和多尺度数值模拟发现了振动辅助下切削诱导晶粒细化的倾向和潜在机制。晶粒尺寸从初始的13.5 μm ~ 5.3 μm逐渐减小，并伴有位错滑移主导的动态再结晶。随后在细晶铜上进行原位常规金刚石切割，形成了超光滑的表面，其晶界表面台阶明显受到抑制，表面粗糙度比粗晶铜降低了71.1%。随后对厚度为4 μm的保留细化层进行了纳米压痕测试，结果表明，细晶Cu加工表面的硬度和弹性模量均有所提高。本研究验证了原位集成振动辅助金刚石切削晶粒细化技术提高多晶金属加工性能的可行性和有效性。

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引用次数: 0

Dynamic image blurring analysis and vibration suppression in reflective lithography projection objective 反射式光刻投影物镜动态图像模糊分析及振动抑制

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-12-02 DOI: 10.1016/j.precisioneng.2025.12.003

Shiyu Li , Ji Zhou , Chi Tu , Xia Kang , Jingteng Liu , Haifeng Sun , Junbo Liu

Dynamic image degradation in reflective projection objectives limits sub-nanometer chip fabrication in high-numerical aperture (NA) extreme ultraviolet (EUV) lithography systems. Micro-vibrations induce optical misalignments via opto-mechanical coupling, causing spatial image blur. An opto-mechanical coupled model and a multi-parameter optimization method are proposed to evaluate the mirror position offset and reduce the vibration response. Based on the second Lagrange equations, a multi-body dynamics model considering the internal stiffness, damping and mass of the objective is established. The predicted mirror displacement errors along the X, Y and Z axes are 3.01 %, 3.39 % and 0.12 % respectively. Hopkins’ partially coherent imaging theory and wavefront aberration transfer functions are used to develop a dynamic image blur evaluation model. On this basis, a hybrid genetic algorithm-particle swarm optimization (GA-PSO) method is proposed to optimize stiffness and damping parameters, reducing mirror displacement responses and spatial image pattern errors (PE) by over 36 % and 40 % respectively.

在高数值孔径极紫外光刻系统中，反射投影物镜的动态图像退化限制了亚纳米芯片的制造。微振动通过光-机械耦合引起光学失调，造成空间图像模糊。提出了一种光-机耦合模型和多参数优化方法来评估反射镜的位置偏移并减小振动响应。基于第二拉格朗日方程，建立了考虑目标体内部刚度、阻尼和质量的多体动力学模型。预测的X、Y、Z轴镜面位移误差分别为3.01%、3.39%和0.12%。利用Hopkins的部分相干成像理论和波前像差传递函数建立了动态图像模糊评价模型。在此基础上，提出了一种混合遗传算法-粒子群优化（GA-PSO）方法来优化刚度和阻尼参数，将镜面位移响应和空间图像模式误差（PE）分别降低了36%和40%以上。

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引用次数: 0

Fast prototyping of complex-shaped fused silica micro-optics through diamond turning of silica nanocomposites 利用金刚石车削二氧化硅纳米复合材料快速成型复杂形状熔融二氧化硅微光学元件

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-12-02 DOI: 10.1016/j.precisioneng.2025.12.002

Ya Xu , Xiaotong Du , Xiaodong Su , Suet To , LiMin Zhu , Zhiwei Zhu

By processing photocurable silica-polymer-based nanocomposites, the additive and subtractive manufacturing techniques have recently emerged as powerful tools for fast prototyping fused silica components with complex structures. However, the inherently low form accuracy and low surface smoothness achieved by current additive and subtractive manufacturing of the nanocomposites prohibit their application in generating fused silica glass optics. To satisfy the requirements for producing high-quality optical surfaces with high efficiency, we proposed an innovative fast-prototyping technique for creating complex-shaped fused silica optics by shaping silica nanocomposites through ultra-precision diamond cutting. Unlike fused silica glass, which has high hardness and low fracture toughness, silica nanocomposites are easier to cut due to the coexistence of soft and ductile polymers. The shaped components are then converted into conforming fused silica optics through high-temperature debinding and sintering. To enable high-performance prototyping of fused silica optics, the silica nanocomposites were first optimized by balancing machinability and sinterability. For the optimized nanocomposites, evolutions of surface micro/nanotopographies and dimensions from cutting to sintering were characterized, and the achievable sizes were investigated by generating micro-gratings with various widths. Finally, a diffractive/refractive hybrid lens and a spherical microlens array were successfully fabricated with further characterization of their optical performance, demonstrating the superiority of the proposed technique for the rapid prototyping of fused silica micro-optics.

通过加工光固化二氧化硅聚合物基纳米复合材料，增材和减材制造技术最近成为快速成型具有复杂结构的熔融二氧化硅组件的有力工具。然而，目前纳米复合材料的加法和减法制造固有的低形状精度和低表面光滑性阻碍了它们在熔融石英玻璃光学器件中的应用。为了满足高质量光学表面的高效率生产需求，提出了一种创新的快速成型技术，通过超精密金刚石切割成型二氧化硅纳米复合材料，制造复杂形状的熔融二氧化硅光学材料。不同于熔融石英玻璃的高硬度和低断裂韧性，二氧化硅纳米复合材料由于柔软和延展性聚合物的共存而更容易切割。然后通过高温脱脂和烧结将成形的组件转化为合格的熔融硅光学元件。为了实现熔融二氧化硅光学元件的高性能原型，首先通过平衡可加工性和烧结性对二氧化硅纳米复合材料进行了优化。对于优化后的纳米复合材料，表征了从切割到烧结过程中表面微纳米形貌和尺寸的演变，并通过生成不同宽度的微光栅来研究可实现的尺寸。最后，成功制备了一个衍射/折射混合透镜和一个球形微透镜阵列，并对其光学性能进行了进一步的表征，证明了该技术在熔融石英微光学器件快速成型中的优越性。

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引用次数: 0

Repeatability of stylus measurements in a multiscale approach 多尺度方法中手写笔测量的可重复性

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-12-01 DOI: 10.1016/j.precisioneng.2025.12.001

Damian Gogolewski

This paper describes a method for assessing the repeatability of stylus measurements based on a direct comparison of the profiles measured without shifting the position of a sample. The analysis was conducted based on ISO 21920–2, H-H plots, coefficient of determination R² and using Wavelet coherence analysis. The samples for research were manufactured using two technologies to ensure different surface topographies and to verify the method on a wide spectrum. The conducted analysis showed a high correlation (R² > 0.97) between measurements with differences in profiles for subsequent measurements in relation to the scale. The application of the multiscale method allowed for recording the occurrence of differences (for scale up to 64 μm) and to define the place and potential reason for their occurrence, which was not possible with the use of classical parametric assessment. A different mapping of selected morphological features, as well as a profile shifts in subsequent measurements were also noted. The research has the potential for practical use in both the research field and industrial applications, and can contribute to supplementing the current standards.

本文描述了一种基于直接比较测量的轮廓而不移动样品位置的手写笔测量的可重复性评估方法。基于ISO 21920-2、H-H图、确定系数R2和小波相干分析进行分析。用于研究的样品是使用两种技术制造的，以确保不同的表面形貌，并在广泛的光谱上验证该方法。所进行的分析显示，测量值与与量表相关的后续测量值的轮廓差异之间存在高相关性（R2 > 0.97）。多尺度方法的应用允许记录差异的发生（尺度可达64 μm），并定义其发生的位置和潜在原因，这是使用经典参数评估无法实现的。所选形态特征的不同映射，以及随后测量中的剖面移位也被注意到。该研究在研究领域和工业应用方面都有实际应用的潜力，并有助于补充现行标准。

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引用次数: 0

Linearization design of a XY stage based on hybrid reluctance actuators 基于混合磁阻作动器的XY级线性化设计

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-27 DOI: 10.1016/j.precisioneng.2025.11.027

Weipeng Li , Weidong Yu , Zhengyan Dai , Yukai Zhu , Guangyuan Wang , Xiantao Li

The nonlinearity of hybrid reluctance actuators (HRA) significantly restricts their applications in XY stage requiring long stroke, high bandwidth, and high precision. This paper presents an improved design methodology and experimental verification focusing on nonlinearity reduction of a XY stage based on hybrid reluctance actuators (HRA-XYS). Initially, the primary sources of nonlinearity in conventional HRA were analyzed, leading to a magnetic flux topological optimization approach for nonlinearity mitigation. Subsequently, a comprehensive dynamic model incorporating nonlinear characteristics was established, followed by a nonlinear optimization framework for key parameter design. Based on the optimization results, a prototype was fabricated for comprehensive performance evaluation and a proportional-derivative (PD)-based feedback compensator was implemented to extend bandwidth by actively modifying system stiffness and damping. Experimental results demonstrate significant improvements: nonlinearity <3.2 %, cross-axis coupling <0.4 %, positioning accuracy better than 0.1 μm, working stroke exceeding ±500 μm, and bandwidth of 375 Hz. These achievements verify the effectiveness of the proposed linearity-oriented design methodology and underscore its advance compared to similar works, indicating that the optimized actuator exhibits superior comprehensive performance in precision, stroke capability, and dynamic response characteristics.

混合磁阻作动器的非线性特性极大地限制了其在长行程、高带宽和高精度的XY阶段的应用。本文提出了一种改进的设计方法和实验验证，重点研究了基于混合磁阻作动器（HRA-XYS）的XY级非线性降低。首先，分析了传统HRA中非线性的主要来源，并提出了一种磁通拓扑优化方法来缓解非线性。在此基础上，建立了考虑非线性特性的综合动力学模型，建立了关键参数的非线性优化框架。基于优化结果，制作了综合性能评估样机，并实现了基于比例导数（PD）的反馈补偿器，通过主动修改系统刚度和阻尼来扩展带宽。实验结果表明，该系统具有显著的改进效果：非线性3.2%，跨轴耦合0.4%，定位精度优于0.1 μm，工作行程超过±500 μm，带宽375 Hz。这些成果验证了所提出的线性导向设计方法的有效性，并强调了其与同类工作相比的先进性，表明优化后的执行器在精度、行程能力和动态响应特性方面具有优越的综合性能。

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引用次数: 0

Thermal error modeling and multi-objective optimization design to enhance the thermal stability of interferometers 提高干涉仪热稳定性的热误差建模和多目标优化设计

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-24 DOI: 10.1016/j.precisioneng.2025.11.026

Yongjun Wang , Wan Fang , Ke Zhang , Zhengyu Wang , Chengyao Zhang , Xiaojuan Mo , Zhenying Cheng , Ruijun Li

Structural deformations caused by environmental temperature fluctuations and local heat sources are the primary factors affecting the accuracy of high-precision instruments. An optimal method based on a multi-objective genetic algorithm has been proposed and demonstrated to enhance thermal stability in interferometers. A mathematical model relating the thermal error of the interferometer to temperature fluctuations and the uniformity of the temperature field is established. Finite element analysis is conducted to evaluate the overall temperature distribution of the interferometers. The temperature field is optimized using a multi-objective genetic algorithm, and stability experiments are carried out on the interferometers both before and after optimization. As a result, the temperature fluctuation of the interferometer is reduced by 60.6 %, while temperature field uniformity and interferometer stability are improved by 55.9 % and 55.1 %, respectively. The experimental results indicate that the temperature field optimization method based on NSGA-II effectively improves the thermal stability of interferometers.

环境温度波动和局部热源引起的结构变形是影响高精度仪器精度的主要因素。为了提高干涉仪的热稳定性，提出了一种基于多目标遗传算法的优化方法。建立了干涉仪热误差与温度波动和温度场均匀性的数学模型。对干涉仪的整体温度分布进行了有限元分析。采用多目标遗传算法对温度场进行优化，并对优化前后的干涉仪进行了稳定性实验。结果表明，干涉仪的温度波动降低了60.6%，温度场均匀性和干涉仪稳定性分别提高了55.9%和55.1%。实验结果表明，基于NSGA-II的温度场优化方法有效地提高了干涉仪的热稳定性。

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引用次数: 0

NURBS-based freeform surface reconstruction from sparse and unstructured contact measurement data using iterative control point optimization 基于迭代控制点优化的稀疏非结构化接触测量数据的nurbs自由曲面重建

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-22 DOI: 10.1016/j.precisioneng.2025.11.025

Zhifu Ma, Yong Lu, Kenan Deng

High-precision surface reconstruction is crucial for freeform surface measurement, and the Non-Uniform Rational B-Spline (NURBS) surface fitting is widely used in this process. To improve the NURBS surface fitting accuracy based on sparse and unstructured contact measurement data, this paper proposes a freeform surface reconstruction method that integrates NURBS surface fitting with iterative control point coordinate optimization. The proposed method begins by employing cubic spline interpolation to generate uniformly spaced fitting points from measurement data. Then, the fitting point is parameterized by chord length parameterization and the initial NURBS surface parameter is obtained with least squares fitting. Subsequently, an iterative control point coordinate optimization strategy is applied to reconstruct the surface. In this strategy, the distance between measurement points and the fitted NURBS surface is calculated, and then a new index, the sum of local squared distances (SLSD) is introduced. According to the calculated SLSD, the NURBS surface is reconstructed locally and iteratively by optimizing the control point coordinates corresponding to the max SLSD. With the proposed strategy, only one control point is optimized at a time, and the parameterization results of measurement points within the influence region of the control point are optimized simultaneously. Experiment result shows that the reconstruction accuracy of the proposed method is higher than 0.02 mm.

高精度的曲面重建是自由曲面测量的关键，非均匀有理b样条曲面拟合在此过程中得到了广泛的应用。为了提高基于稀疏非结构化接触测量数据的NURBS曲面拟合精度，提出了一种将NURBS曲面拟合与迭代控制点坐标优化相结合的自由曲面重建方法。该方法首先采用三次样条插值从测量数据中生成均匀间隔的拟合点。然后，通过弦长参数化对拟合点进行参数化，通过最小二乘拟合得到NURBS曲面的初始参数；随后，采用迭代控制点坐标优化策略对曲面进行重构。该策略首先计算测量点与拟合NURBS曲面之间的距离，然后引入一个新的指标——局部距离平方和（SLSD）。根据计算得到的SLSD，通过优化最大SLSD对应的控制点坐标，局部迭代重构NURBS曲面。采用该策略，每次只对一个控制点进行优化，同时对控制点影响区域内测点的参数化结果进行优化。实验结果表明，该方法的重建精度高于0.02 mm。

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引用次数: 0

Mechanism-based prediction of helical gear grinding Surface roughness: Integrated modeling of spatial kinematics and abrasive trajectory effects 基于机理的斜齿轮磨削表面粗糙度预测：空间运动学和磨料轨迹影响的综合建模

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-22 DOI: 10.1016/j.precisioneng.2025.11.023

Shuying Yang , Lei Zheng , Jiju Guan , Weifang Chen , Rupeng Zhu

As critical transmission components in aero-engines, hard-tooth-surface involute helical cylindrical gears require precise control of surface morphology to ensure high-quality manufacturing with minimized subsurface damage. The complexity of form grinding processes arises from intricate wheel-workpiece spatial kinematics and heterogeneous local contact geometries, which challenge the prediction of chip formation mechanisms and resultant surface topography. This study presents a numerical calculation model to characterize surface morphology in helical gear form grinding. By analyzing localized contact conditions and geometric mapping relationships, the abrasive grain trajectories were mathematically formulated through a spatial helical motion model. The helical tooth surface was discretized to calculate undeformed chip thickness along the normal direction, enabling the reconstruction of three-dimensional surface morphology. Experimental validation using manufactured specimens confirmed the accuracy of the model, with further investigation revealing non-uniform surface distribution characteristics. Key findings demonstrate that surface roughness along the involute profile increases with rolling angle, exhibiting negative correlation with wheel speed, while positively correlating with feed rate and grinding depth. The proposed model provides a theoretical foundation for optimizing helical gear grinding parameters and enhancing in-service performance through surface integrity control.

作为航空发动机的关键传动部件，硬齿面渐开线斜圆柱齿轮要求对其表面形貌进行精确控制，以保证高质量的制造，同时将亚表面损伤降到最低。磨削加工的复杂性源于复杂的砂轮-工件空间运动学和非均匀的局部接触几何形状，这对切屑形成机理和表面形貌的预测提出了挑战。提出了一种表征斜齿形磨削表面形貌的数值计算模型。通过分析局部接触条件和几何映射关系，通过空间螺旋运动模型建立了磨料颗粒运动轨迹的数学表达式。对螺旋齿面进行离散化，计算沿法线方向未变形的切屑厚度，重建三维表面形貌。利用人造标本进行的实验验证证实了该模型的准确性，进一步的研究揭示了非均匀表面分布特征。研究结果表明：渐开线轮廓的表面粗糙度随滚动角度的增加而增加，与砂轮转速呈负相关，与进给速度和磨削深度呈正相关；该模型为通过表面完整性控制优化斜齿轮磨削参数、提高斜齿轮在役性能提供了理论基础。

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引用次数: 0

Practical simulator generation using a simple feedforward element design method for precision motion systems abbreviated title: Practical precision simulator generation 实用模拟器的生成采用一种简单的前馈元件设计方法，用于精密运动系统简称：实用精密模拟器的生成

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-22 DOI: 10.1016/j.precisioneng.2025.11.022

Kaiji Sato, Mizuki Takeda

The growing demand for automation and labor-saving solutions has intensified interest in digital technology applications that replicate real-world systems and utilize analytical results in physical settings. Fulfilling these needs requires the development of a high-precision simulator that can be automatically and effortlessly generated from data easily obtainable from a physical machine. This paper proposes an innovative method for generating a precision simulator for motion systems. The proposed method uses feedforward elements derived through our feedforward design methodology. In this approach, following a specified procedure, a learning controller distinguishes four operational characteristics based on specific types of motion profiles, and the derived elements are combined according to predetermined rules to produce a simulator. We applied this method to a ball-screw mechanism and assessed the performance of the generated simulator by comparing it with experimental data. In the experimental setup, we observed position-dependent submicrometer vibrations, which cannot be represented by conventional mechanical models. The simulator, constructed by combining FF elements from high-resolution measured or reconstructed data, replicated vibrations with similar frequencies. However, its ability to effectively mimic certain responses, including the observed submicrometer vibrations, was limited. Notably, the vibration amplitude varied with velocity. Nevertheless, the results demonstrated that straightforward refinement of the simulator generation process could produce a simulator with high simulation accuracy.

对自动化和节省劳动力的解决方案日益增长的需求，增强了人们对数字技术应用的兴趣，这些应用可以复制现实世界的系统，并在物理环境中利用分析结果。为了满足这些需求，需要开发一种高精度模拟器，该模拟器可以从物理机器上容易获得的数据自动轻松地生成。本文提出了一种生成运动系统精密模拟器的创新方法。所提出的方法使用通过我们的前馈设计方法导出的前馈元素。在这种方法中，遵循指定的程序，学习控制器根据特定类型的运动轮廓区分四种操作特征，并根据预定规则组合派生元素以产生模拟器。我们将该方法应用于滚珠丝杠机构，并通过与实验数据的比较来评估生成的模拟器的性能。在实验设置中，我们观察到位置相关的亚微米振动，这是传统力学模型无法表示的。该模拟器通过结合高分辨率测量或重建数据中的FF元素构建，可以复制相似频率的振动。然而，它有效模拟某些响应的能力，包括观察到的亚微米振动，是有限的。值得注意的是，振动幅值随速度变化。然而，结果表明，直接改进模拟器生成过程可以产生具有高仿真精度的模拟器。

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引用次数: 0

Effects of lubrication performance on multi-roller statics characteristics of planetary roller screw mechanism with errors 润滑性能对误差行星滚子丝杠机构多滚子静力学特性的影响

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-21 DOI: 10.1016/j.precisioneng.2025.11.024

Mingcai Xing , Zhenwen Cheng , Shuo Liu , Meide Yang

In this work, the multi-roller statics model of planetary roller screw mechanism (PRSM) considering the lubrication performance is established. The effects of oil film stiffness on multi-roller statics characteristics are investigated. The thread-pair oil film stiffness on screw-roller side (SRS) and nut-roller side (NRS) are described, and the thread-pair engagement stiffness with oil film is calculated. The thread-pair load distribution (TPLD) on SRS and NRS with and without lubrication are compared for PRSM. Furthermore, the influences of lubrication performance on the multi-roller load sharing (MRLS) and TPLD with pitch error, roller nominal diameter error (RNDE), screw eccentric error (SEE) and nut eccentric error (NEE) are studied. It is found that the lubrication performance reduces the uniformity of MRLS and TPLD.

建立了考虑润滑性能的行星螺杆机构多辊静力学模型。研究了油膜刚度对多辊静力特性的影响。描述了螺杆侧和螺母侧的螺纹副油膜刚度，并计算了螺纹副与油膜的啮合刚度。比较了有润滑和无润滑情况下SRS和NRS的螺纹对载荷分布。此外，还研究了润滑性能对多辊负载分担（MRLS）和具有节距误差、滚子公称直径误差（RNDE）、螺杆偏心误差（SEE）和螺母偏心误差（NEE）的TPLD的影响。研究发现，润滑性能降低了MRLS和TPLD的均匀性。

引用次数: 0