Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第3页

Advances in predicting surface shape changes of mirror blanks through elliptical nozzle gas jet forming 预测椭圆喷嘴气体喷射成形镜坯表面形状变化的进展

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-15 DOI: 10.1016/j.precisioneng.2024.10.007

Weijie Fu , Xiangyv Shen , Xinming Zhang

To facilitate the formation of bifocal aspheric optical surfaces, we present an approach for predicting the surface profile of bifocal aspheric surfaces formed by the gas-liquid interface when an elliptical nozzle gas jet is employed. Through an analysis of the gas flow field morphology emanating from the elliptical nozzle, we inferred the impact of gas jet parameters on the gas-liquid interface surface shape within the core region of the gas jet. By analyzing the variation in the gas flow field morphology emitted from an elliptical nozzle, we deduced the influence patterns of gas jet parameters on the gas-liquid interface surface shape within the gas jet's core region. Theoretical analysis is substantiated by numerical simulations, confirming regular changes in the vertex curvature and conic constant of mirror blanks concerning variations in jet initial velocity and nozzle aspect ratio. A comparison between experimental data and numerical simulation results reveals an average prediction deviation of 0.0083 mm⁻¹ for the vertex curvature and a prediction deviation of 10.7 % for the conic constant, challenging to rectify within numerical simulations. Hence, an empirical model, incorporating jet parameters, is developed based on experimental data to predict the vertex curvature and conic constant of mirror blanks. This model demonstrates an average prediction error of 2.901 × 10⁻³ mm⁻¹ for the vertex curvature and 7.64 % for the conic constant, surpassing the predictive accuracy of the numerical simulation model.

为了促进双焦点非球面光学表面的形成，我们提出了一种方法，用于预测采用椭圆喷嘴气体射流时气液界面形成的双焦点非球面的表面轮廓。通过分析从椭圆喷嘴喷出的气体流场形态，我们推断出气体射流参数对气体射流核心区域内气液界面表面形状的影响。通过分析从椭圆喷嘴喷出的气体流场形态的变化，我们推断出气体射流参数对气体射流核心区域内气液界面表面形状的影响模式。数值模拟证实了理论分析的正确性，并证实了镜面坯料的顶点曲率和圆锥常数随射流初速度和喷嘴长宽比的变化而发生的规律性变化。实验数据与数值模拟结果的比较显示，顶点曲率的平均预测偏差为 0.0083 mm-1，圆锥常数的预测偏差为 10.7%，这对数值模拟的纠正工作提出了挑战。因此，我们根据实验数据建立了一个包含喷射参数的经验模型，用于预测镜面坯料的顶点曲率和圆锥常数。该模型显示，顶点曲率的平均预测误差为 2.901 × 10-3 mm-1，圆锥常数的平均预测误差为 7.64%，超过了数值模拟模型的预测精度。

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引用次数: 0

Model-based dimensional NDE from few X-ray radiographs: Application to the evaluation of wall thickness in metallic turbine blades 基于模型的尺寸无损检测（从少量 X 射线射线照片中得出）：应用于金属涡轮叶片壁厚评估

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-15 DOI: 10.1016/j.precisioneng.2024.10.002

Cédric Fragnaud , Clément Remacha , Julián Betancur , Stéphane Roux

The extraction of 3D dimensional measurements based on a limited number of 2D X-ray radiographs of a part would offer a significant speed-up of quality control procedures in industry. However, there are challenges with respect to both measurements and uncertainties. This work addresses these challenges by creating an estimated numerical model of the imaged part on which dimensional measurements can be made. The numerical model is chosen as a parametric deformable model that encodes the expected shape variability of the parts resulting from the manufacturing process. The parameters and uncertainties of the numerical model of the imaged part are estimated by the registration of the computed projections of the model and the observed radiographs without the need of any segmentation. The registration requires the model, the initial parameters, and the observed radiographs. The proposed approach is applied to the inspection of turbine blades manufactured by investment casting, and in particular to the measurement of their wall thickness, which is a critical control. The deformable model consists in partitioning the inner ceramic core into multiple subparts, which may undergo a rigid body motion with respect to the master die. Wall thickness measurements are determined from the estimation of these rigid body motions. To assess the reliability of the proposed procedure, a repeatability study is performed. In addition, wall thickness measurements were compared to corresponding measurements from the surface of the metal boundary obtained by X-ray computed tomography. This surface was determined from a reconstructed tomogram using commercial software. Both analyses show that such measurements are reliable and efficient. Furthermore, residual differences between captured and computed projections reveal localized shape deviations from the CAD model, meaning that despite localized model errors, the approach is operable.

根据数量有限的部件二维 X 射线照片提取三维尺寸测量值，将大大加快工业质量控制程序的速度。然而，在测量和不确定性方面都存在挑战。为了应对这些挑战，这项工作创建了一个成像部件的估计数字模型，并在此基础上进行尺寸测量。数值模型被选为参数化可变形模型，该模型可对制造过程中产生的零件预期形状变化进行编码。成像部件数值模型的参数和不确定性是通过模型的计算投影与观察到的射线照片的配准来估算的，无需进行任何分割。注册需要模型、初始参数和观察到的射线照片。所提出的方法被应用于通过熔模铸造法制造的涡轮叶片的检测，特别是其壁厚的测量，这是一项关键控制。可变形模型包括将内部陶瓷芯分成多个子部分，这些子部分可相对于主模进行刚体运动。壁厚测量是通过对这些刚体运动的估计来确定的。为了评估所建议程序的可靠性，进行了重复性研究。此外，还将壁厚测量值与通过 X 射线计算机断层扫描获得的金属边界表面的相应测量值进行了比较。该表面是使用商业软件通过重建断层图确定的。这两项分析表明，这种测量方法既可靠又高效。此外，捕获投影和计算投影之间的残差显示了局部形状与 CAD 模型的偏差，这意味着尽管存在局部模型误差，但这种方法是可行的。

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引用次数: 0

Experimental investigation and numerical analysis of material removal efficiency using abrasive microaggregates in grinding processes of Ti6Al4V 在 Ti6Al4V 磨削过程中使用磨料微集料去除材料效率的实验研究和数值分析

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-11 DOI: 10.1016/j.precisioneng.2024.10.005

Dariusz Lipiński , Łukasz Rypina , Kamil Banaszek , Robert Tomkowski

Reducing plastic interactions between abrasive grains and the material being processed improves grinding efficiency and lowers energy consumption. Widening the cutting zone with abrasive grains enhances chip formation and reduces lateral material displacement. This can be achieved by using abrasive microaggregates.

The paper presents an experimental analysis of grinding with modified wheels containing abrasive microaggregates. It examines how these microaggregates impact the grinding wheel's surface microgeometry and material removal efficiency. The study measured changes in the number, surface area, volume, and spacing of active contact areas on the grinding wheel active surface. A comparative analysis using the Shos indicator showed that abrasive microaggregates promote the formation of active areas with wide cutting edges perpendicular to the cutting direction.

Finite element method simulations confirmed that abrasive microaggregates enhance material removal by widening the micro-cutting zone and increasing lateral resistance, which reduces the formation of flashes along the cutting path. The study also assessed how these surface features impact the roughness of the ground surface. A comparative analysis of roughness parameters showed a statistically significant reduction in surface, volume, hybrid, and functional parameters when using grinding wheels with abrasive microaggregates. This analysis was conducted using bootstrap statistical hypothesis tests.

减少磨粒与被加工材料之间的塑性相互作用可提高研磨效率，降低能耗。用磨料颗粒扩大切削区域可促进切屑的形成并减少材料的横向位移。本文对使用含有磨料微集料的改良砂轮进行磨削进行了实验分析。本文对使用含有磨料微集料的改良砂轮进行磨削进行了实验分析，研究了这些微集料对砂轮表面微几何形状和材料去除效率的影响。研究测量了砂轮有效表面上有效接触区的数量、表面积、体积和间距的变化。使用 Shos 指标进行的比较分析表明，磨料微集料可促进垂直于切削方向的宽切削刃活动区的形成。有限元法模拟证实，磨料微集料可通过扩大微切削区和增加横向阻力来提高材料去除率，从而减少切削路径上闪光的形成。研究还评估了这些表面特征如何影响磨削表面的粗糙度。对粗糙度参数的比较分析表明，在使用带有磨料微集料的砂轮时，表面、体积、混合和功能参数都有显著的统计学降低。这项分析是通过引导统计假设检验进行的。

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引用次数: 0

A novel mechanical model based on the dynamic stiffness matrix for unified dynamic and static modeling of planar compliant mechanisms 基于动态刚度矩阵的新型力学模型，用于平面顺变机构的统一动态和静态建模

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-11 DOI: 10.1016/j.precisioneng.2024.10.003

Yunsong Du , Tianbao Pan , Chongxin Qiao , Tiemin Li

This paper presents a dynamic and static modeling method for compliant mechanisms based on the dynamic stiffness matrix. Its advantage is that accurate dynamic and static modeling can be established simultaneously in frequency domain. Firstly, the dynamic stiffness matrices of flexure beams/hinges are introduced in detail. To ensure modeling accuracy, the nodes of flexible elements are translated to the research nodes, and the local coordinate system is rotated to make it consistent with the global coordinate system. The translation matrix and the rotation matrix are derived, and then the extended dynamic stiffness matrix of flexible elements is also obtained. Then the displacement of the discrete node and the displacement of the research node are taken as the hybrid state variables, and the dynamic model of the whole mechanism is established in frequency domain. The static model of the whole mechanism can be established by changing the angular frequency value. Eventually, two examples are given, and the proposed method is compared with other theoretical models and finite element analysis (FEA). The results show that this method has high modeling accuracy. It provides a reliable modeling method for dynamic and static performance analysis of compliant mechanisms.

本文提出了一种基于动态刚度矩阵的顺变机构动态和静态建模方法。其优点是可以在频域内同时建立精确的动态和静态模型。首先，详细介绍了挠性梁/铰链的动态刚度矩阵。为确保建模精度，将柔性元素的节点平移到研究节点，并旋转局部坐标系，使其与全局坐标系保持一致。推导出平移矩阵和旋转矩阵，进而得到柔性元件的扩展动刚度矩阵。然后将离散节点的位移和研究节点的位移作为混合状态变量，在频域建立整个机构的动态模型。通过改变角频率值可以建立整个机构的静态模型。最后，给出了两个实例，并将所提出的方法与其他理论模型和有限元分析（FEA）进行了比较。结果表明，该方法具有很高的建模精度。它为顺应机构的动态和静态性能分析提供了一种可靠的建模方法。

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引用次数: 0

Pulse dynamic regulation of electrochemical discharge milling by utilizing the slotted tube electrode 利用槽管电极实现电化学放电铣削的脉冲动态调节

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-11 DOI: 10.1016/j.precisioneng.2024.10.006

Chenhao Xue, Ningsong Qu

Electrochemical discharge machining (ECDM) has a splendid application potential for machining difficult-to-cut materials. It is a challenge to limit and control the discharge energy and area of DC power supply in ECDM. Owing to the uncertainty and randomness of the position and range of the single discharge, the unpredictable discharges deteriorate the surface quality of the workpiece, alter the size of the inter-electrode gap (IEG), and influence the distribution of the multi-physical fields. Therefore, to regulate the machining state and energy, the ideology of pulse dynamic machining is introduced, and a method of pulse dynamic ECDM utilizing the slotted electrodes is proposed. With the tool electrode rotating, the tube electrode transforms the pure electrochemical machining (pure-ECM) stage and the electrochemical discharge machining (ECDM) stage periodically through the slots at the bottom of it. The machining current waveform, surface roughness and sidewall taper of machined grooves, material removal rate (MRR), and relative tool wear rate (RTWR) are investigated. Additionally, the discharge types of the ECDM are explicitly defined and statistically classified. The experimental results show that the pulse dynamic regulation of hybrid machining using the slotted electrodes is beneficial to regularize the machining current waveform and optimize the machining quality.

电化学放电加工（ECDM）在加工难切削材料方面具有巨大的应用潜力。限制和控制 ECDM 中直流电源的放电能量和面积是一项挑战。由于单次放电的位置和范围具有不确定性和随机性，不可预测的放电会降低工件的表面质量，改变电极间隙（IEG）的大小，并影响多物理场的分布。因此，为了调节加工状态和能量，引入了脉冲动态加工的思想，并提出了一种利用开槽电极的脉冲动态 ECDM 方法。随着工具电极的旋转，管状电极通过其底部的槽，周期性地转换纯电化学加工（pure-ECM）阶段和电化学放电加工（ECDM）阶段。研究了加工电流波形、加工沟槽的表面粗糙度和侧壁锥度、材料去除率 (MRR) 和刀具相对磨损率 (RTWR)。此外，还对 ECDM 的放电类型进行了明确定义和统计分类。实验结果表明，使用开槽电极进行混合加工的脉冲动态调节有利于规范加工电流波形和优化加工质量。

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引用次数: 0

Study on grain removal characteristics and influencing factors of polycrystalline tungsten during polishing process 抛光过程中多晶钨的晶粒去除特性及影响因素研究

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-11 DOI: 10.1016/j.precisioneng.2024.10.004

Jian Ma , Hongbing Wan , Feng Peng , Hongyu Chen , Chang Chen , Pengqi Chen , Tufa Habtamu Beri , Heng Chen , Kun Ren , Binghai Lyu

In this paper, the polishing mechanism of polycrystalline tungsten has been studied, focusing on the reasons for the appearance of grain steps and the effects of different polishing factors on the polishing effect. The surface morphology and mechanical properties after polishing were analyzed by electron backscatter diffraction, scanning electron microscope, nanoindentation and other characterization tools. Effects of different polishing factors on the polishing effect were also analyzed by orthogonal and single factor experiments. Results show that the effects of abrasive size, polishing pressure, polishing speed, and abrasive concentration on the polishing effectiveness decrease in turn. The optimal polishing parameters obtained by orthogonal experiments are 60 rpm polishing speed, 5.0 μm abrasive size, 5 wt% abrasive concentration, and 30 kPa polishing pressure. In the single factor experiment, with the increase of abrasive size, the height of grain step decreased from 0.5 μm to 0.11 μm, and the surface roughness (Ra) decreases from 11.3 nm to 5.2 nm. Grain anisotropy is the main reason for the appearance of grain steps on the surface after polishing. Different grain orientations lead to different surface mechanical properties. The hardness of high grain step is higher than that of low grain step. In addition, the increase of abrasive size can effectively suppress the grain step phenomenon, thereby improving the surface polishing effect.

本文研究了多晶钨的抛光机理，重点探讨了晶阶出现的原因以及不同抛光因素对抛光效果的影响。通过电子反向散射衍射、扫描电子显微镜、纳米压痕等表征手段分析了抛光后的表面形貌和力学性能。还通过正交实验和单因素实验分析了不同抛光因素对抛光效果的影响。结果表明，磨料粒度、抛光压力、抛光速度和磨料浓度对抛光效果的影响依次减小。正交实验得到的最佳抛光参数为：抛光速度 60 rpm，磨料粒度 5.0 μm，磨料浓度 5 wt%，抛光压力 30 kPa。在单因素实验中，随着磨料粒度的增加，晶阶高度从 0.5 μm 减小到 0.11 μm，表面粗糙度（Ra）从 11.3 nm 减小到 5.2 nm。晶粒各向异性是抛光后表面出现晶阶的主要原因。不同的晶粒取向会导致不同的表面机械性能。高晶粒阶梯的硬度高于低晶粒阶梯。此外，增加磨料粒度可有效抑制晶阶现象，从而改善表面抛光效果。

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引用次数: 0

Trajectory generation for adhesive dispensing robots by modeling of material behavior 通过材料行为建模生成点胶机器人的轨迹

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-05 DOI: 10.1016/j.precisioneng.2024.09.025

Takayuki Yamabe , Kazuki Takagi , Ryunosuke Yamada , Tokuo Tsuji , Shota Ishikawa , Tomoaki Ozaki , Tatsuhiro Hiramitsu , Hiroaki Seki

It is difficult for robots to manipulate flexible objects, and adhesive dispensing is one such task. In this task, the adhesive material is pulled by a dispensing robot, which is problematic to predict. In this paper, we propose an analysis-based and a learning-based model to predict the behavior of the adhesive material, and a method to explore the robot trajectory. While analysis-based models consider physical behavior and require less training data, they are limited to specific physical behaviors. Learning-based models, on the other hand, can model many physical behaviors, but require a lot of training data. Finally, we use the predictions of these models to perform experiments and evaluate the differences between the target adhesive trajectory and the actual application results.

机器人很难操控柔性物体，粘合剂点胶就是其中一项任务。在这项任务中，点胶机器人要拉动粘合剂材料，而这是一个难以预测的问题。在本文中，我们提出了一种基于分析和基于学习的模型来预测粘合剂材料的行为，并提出了一种探索机器人轨迹的方法。基于分析的模型考虑的是物理行为，需要的训练数据较少，但仅限于特定的物理行为。另一方面，基于学习的模型可以模拟多种物理行为，但需要大量的训练数据。最后，我们利用这些模型的预测结果进行实验，并评估目标粘附轨迹与实际应用结果之间的差异。

引用次数: 0

On gear time-varying meshing stiffness calculation considering indexing feeds and processing characteristics of gear shaping processing 考虑分度进给和插齿加工特性的齿轮时变啮合刚度计算

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-04 DOI: 10.1016/j.precisioneng.2024.09.026

Yan Li , Gang Li , Zhonghou Wang , William Mayfield

Gear shaping causes processing characteristics on gear tooth surfaces (PCGTS), e.g., gear tooth surface deviation (GTSD) and processing textures (PT), which can affect gear meshing performances. Gear shaping simulation is operated to obtain PCGTS with different indexing feeds. An improved contact stiffness method of gear tooth surfaces is developed based on a wedge-shaped contact form to obtain tooth contact stiffness with PT caused by gear shaping. An improved time-varying meshing stiffness (TVMS) method for gears manufactured by gear shaping is developed to calculate TVMS of gears with GTSD and PT under different indexing feed conditions. Effectiveness of the improved TVMS method is validated using the finite element method. Analysis results of the proposed contact stiffness method of gear tooth surfaces indicate that PT caused by gear shaping can aggravate fluctuations of gear tooth contact stress. Analysis results of the proposed TVMS method for gears also indicate that GTSD of gear tooth surfaces caused by gear shaping can reduce their TVMS. The proposed TVMS method of gears can effectively analyze TVMS of gear tooth surfaces via gear shaping and evaluate processing settings of gear shaping to improve gear meshing performances.

插齿加工会导致齿轮齿面（PCGTS）出现加工特征，如齿面偏差（GTSD）和加工纹理（PT），从而影响齿轮的啮合性能。通过插齿模拟，可以获得不同分度进给量下的 PCGTS。基于楔形接触形式，开发了一种改进的齿轮齿面接触刚度方法，以获得由插齿引起的带有 PT 的齿面接触刚度。针对通过插齿制造的齿轮，开发了一种改进的时变啮合刚度（TVMS）方法，用于计算在不同分度进给条件下具有 GTSD 和 PT 的齿轮的 TVMS。使用有限元方法验证了改进的 TVMS 方法的有效性。拟议的齿轮齿面接触刚度方法的分析结果表明，插齿造成的 PT 会加剧齿轮齿面接触应力的波动。拟议的齿轮 TVMS 方法的分析结果还表明，由齿轮整形引起的齿轮齿面 GTSD 会降低其 TVMS。所提出的齿轮 TVMS 方法可有效分析通过插齿加工获得的轮齿表面 TVMS，并评估插齿加工的加工设置，以改善齿轮的啮合性能。

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引用次数: 0

Enhanced material removal modeling in cylindrical bonnet tool polishing: Incorporating time-dependent pad wear effects 圆柱形阀帽工具抛光中的强化材料去除模型：纳入随时间变化的垫片磨损效应

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-02 DOI: 10.1016/j.precisioneng.2024.09.027

Bingbing Teng, Chen Jiang, Zhenyu Jiang, Hui Ye, Shiwei Xu

To enhance the accuracy and stability of the material removal model for cylindrical bonnet tool polishing (CBTP), this study introduces a model incorporating the time-varying wear effect of the polishing pad. Initially, the functional principles of the CBTP method are systematically outlined. An advanced material removal model is then proposed, which accounts for the impact of pad wear on pressure and velocity distributions within the contact area. Experimental methods were employed to explore how pad wear affects the pad surface morphology, polishing quality, and material removal rates. Findings reveal that pad wear considerably influences both the depth of material removal and the quality of the polished surface. Validation experiments demonstrate that the enhanced model is accurate and stable. Including the time-varying factor, the discrepancy between the predicted and experimental values of the polishing spot size was 9.29 %, while the accuracy of the predicted material removal depth reached 90.74 %. Additionally, the removal profiles generated by the improved model closely matched those observed experimentally.

为了提高圆柱形阀帽工具抛光（CBTP）材料去除模型的精度和稳定性，本研究引入了一个包含抛光垫时变磨损效应的模型。首先，系统地概述了 CBTP 方法的功能原理。然后提出了一个先进的材料去除模型，该模型考虑了抛光垫磨损对接触区域内压力和速度分布的影响。实验方法用于探索垫片磨损如何影响垫片表面形态、抛光质量和材料去除率。研究结果表明，垫片磨损对材料去除深度和抛光表面质量都有很大影响。验证实验表明，增强型模型是准确和稳定的。包括时变因素在内，抛光光斑尺寸的预测值与实验值之间的差异为 9.29%，而材料去除深度的预测精度则达到了 90.74%。此外，改进模型生成的去除曲线与实验观察到的曲线非常吻合。

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引用次数: 0

Extraction of isotropic and anisotropic components for optical surface micro-metrology based on the two-dimensional power spectral density analysis 基于二维功率谱密度分析提取光学表面微测量的各向同性和各向异性成分

IF 3.5 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2024-10-02 DOI: 10.1016/j.precisioneng.2024.10.001

Jingjing Xia, Jun Yu, Siwen Lu, Chunan Xue, Yifan Zhu, Yufei Feng, Pengfeng Sheng, Zhanshan Wang

Extraction of surface characteristics is essential during surface processing and optical inspections. In this work, we propose a new extraction method by dividing the global feature within multiple directions into isotropic and anisotropic components and combining noise filtration, two-dimensional component extraction, and fast reconstruction. The mathematical descriptions of global and local features were derived. The noise by holes, scratches, and finite sampling points was restrained by Bearing Ratio analysis, Hough transform, and Welch window operation. The isotropic and anisotropic surface components were extracted in the two-dimensional power spectral density domain, reconstructed in the two-dimensional Fourier domain, and inversed in Cartesian coordinates. Five surfaces with anisotropic structural characteristics ranging from zero to two dimensions were analyzed. The general applicability was proved according to the consistency between surface processing methods and extracted results. A chemical mechanical polishing experiment was designed and accomplished to verify the sensitivity of the extraction method. The subtle variation in surface morphology was captured on the reconstructed surfaces near the polishing end-point, confirming its detectability on weak anisotropic components. This process-oriented surface extraction method can achieve qualified results without transcendental knowledge of surface conditions and offers openness to various surface evaluation criteria by statistical roughness indicators, which supports surface inspection for multiple surface processing techniques.

在表面处理和光学检测过程中，提取表面特征至关重要。在这项工作中，我们提出了一种新的提取方法，将多个方向上的全局特征分为各向同性和各向异性分量，并将噪声过滤、二维分量提取和快速重建结合起来。得出了全局特征和局部特征的数学描述。通过轴承比分析、Hough 变换和韦尔奇窗操作，抑制了孔洞、划痕和有限采样点带来的噪声。在二维功率谱密度域中提取了各向同性和各向异性表面成分，在二维傅里叶域中进行了重建，并在直角坐标中进行了反演。分析了五个具有各向异性结构特征（从零到二维）的表面。根据表面处理方法和提取结果之间的一致性，证明了该方法的普遍适用性。为了验证提取方法的灵敏度，设计并完成了化学机械抛光实验。在抛光终点附近的重建表面上捕捉到了表面形态的细微变化，证实了该方法对弱各向异性成分的检测能力。这种以工艺为导向的表面提取方法可以在不了解表面条件的情况下获得合格的结果，并通过统计粗糙度指标为各种表面评价标准提供开放性，从而为多种表面加工技术的表面检测提供支持。

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引用次数: 0