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Hybrid reluctance-actuated Stewart platform for high-precision position control 用于高精度位置控制的混合磁阻驱动Stewart平台
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.021
Christian Haider, Damian Senoner, Andreas Sinn, Adis Husanović, Benjamin Friedl, Georg Schitter
This paper presents a Stewart platform with hybrid reluctance-actuated struts to achieve six-degrees-of-freedom motion capability. Tailored hybrid reluctance actuators (HRAs) are integrated into a novel strut design to achieve axial force transmission to the Stewart platform’s end effector via flexure-based joints. Each actuator has a motion range of ±1 mm, leading to a platform workspace of ±1.34 mm along the vertical z-axis and ±1.1 mm in x- and y-direction. The rotational range amounts to ±0.66°/0.78° for tip/tilt motion. By implementation of a MIMO decoupling approach using canonical polyadic decomposition (CPD), position control bandwidths of up to 30 Hz are reached in the task space. The platform achieves millimeter stroke with sub-micrometer translational resolution (45 nm RMS), sub-microradian angular resolution (300 nrad RMS) and a bidirectional repeatability (1σ) of 0.15–0.32 µm and 3.5–4.8 µrad. The overall positioning accuracy (RMSE), quantified against external interferometric measurements, amounts to 1-2.3 µm in translation and 11–15 µrad in rotation.
提出了一种具有混合勉力杆的Stewart平台,实现了六自由度的运动能力。定制的混合磁阻执行器(HRAs)集成到一种新颖的支柱设计中,通过基于柔性的关节将轴向力传递到Stewart平台的末端执行器。每个驱动器的运动范围为±1mm,导致平台工作空间沿垂直z轴为±1.34 mm, x和y方向为±1.1 mm。旋转范围为±0.66°/0.78°的尖端/倾斜运动。通过使用典型多进分解(CPD)实现MIMO解耦方法,在任务空间中达到高达30 Hz的位置控制带宽。该平台实现了亚微米平移分辨率(45 nm RMS)、亚微米角分辨率(300 nrad RMS)的毫米行程,双向重复性(1σ)为0.15-0.32µm和3.5-4.8µrad。总体定位精度(RMSE),根据外部干涉测量量化,平移量为1-2.3µm,旋转量为11-15µrad。
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引用次数: 0
Achieving near-atomic-level surface finish on GCr15 bearing steel via CMP: mechanisms and process optimization 通过CMP实现GCr15轴承钢近原子级表面光洁度:机理和工艺优化
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-17 DOI: 10.1016/j.precisioneng.2025.11.018
Yulong Dai , Fanning Meng , Chunjing Shi , Can Wu , Chun Cao , Zeqiang Li , Zuochao Zhang
GCr15, a widely utilized high-carbon chromium bearing steel, is extensively employed in manufacturing bearing rings due to its excellent wear resistance and corrosion resistance. In aerospace applications where stringent surface roughness requirements are imposed on bearings, this study presents a novel polishing slurry comprising D-sorbitol, silica sol, H2O2, disodium EDTA, and benzotriazole (BTA) to achieve near-atomic-level polishing of GCr15 bearing steel within a defined parameter range. Under a 20 μm × 20 μm measurement area, the lowest reported areal surface roughness (Sa) value of 0.204 nm was attained, approaching atomic-scale smoothness. The polishing mechanism was investigated via Energy-Dispersive X-ray Spectroscopy (EDS), X-ray Photoelectron Spectroscopy (XPS) and Inductively Coupled Plasma Mass Spectrometry (ICP-MS), revealing that under alkaline conditions, H2O2 and disodium EDTA oxidize Fe and Cr to form chelate complexes such as [Fe(EDTA)] − and [Cr(EDTA)]-. These complexes synergize with the mechanical removal action of SiO2 abrasives to realize an ultra-smooth surface.
GCr15是一种应用广泛的高碳铬轴承钢,由于其优异的耐磨性和耐腐蚀性,被广泛应用于制造轴承套圈。在对轴承表面粗糙度要求严格的航空航天应用中,本研究提出了一种由d -山梨醇、硅溶胶、H2O2、EDTA二钠和苯并三唑(BTA)组成的新型抛光浆,可以在规定的参数范围内实现对GCr15轴承钢的近原子级抛光。在20 μm × 20 μm的测量区域内,获得了最低的表面粗糙度(Sa)值0.204 nm,接近原子尺度的光滑度。利用能量色散x射线能谱(EDS)、x射线光电子能谱(XPS)和电感耦合等离子体质谱(ICP-MS)对抛光机理进行了研究,发现在碱性条件下,H2O2和EDTA二钠氧化Fe和Cr形成了螯合络合物[Fe(EDTA)]−和[Cr(EDTA)]-。这些复合物与SiO2磨料的机械去除作用协同作用,实现超光滑表面。
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引用次数: 0
Error sources in touch-trigger probing by a planar robot arm 平面机械臂触控探测的误差来源
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-15 DOI: 10.1016/j.precisioneng.2025.11.017
Soichi Ibaraki, Kandai Kawano
The accuracy of touch-trigger probing by a robotic manipulator is determined by the accuracy of the robot forward kinematic model to estimate the stylus sphere position from angular positions of rotary axes. While many past works employ a robot kinematic model only containing the Denavit-Hartenberg (DH) errors as error sources, this paper presents the application of a novel model, containing the angular positioning and radial error motions of all the rotary axes, to the robotic probing. In the probing of a straightedge, the experiments show that a large portion of a higher frequency component in the probed profiles is attributable to the angular positioning error motion of rotary axes. On the other hand, a lower frequency “waviness” component is attributable more to the DH errors. As a fundamental study, this paper targets the probing by a planar robot arm, as it has a simpler kinematics, with significantly less error parameters, than a six-axis robot.
机器人触摸触发探测的精度取决于机器人正运动学模型从旋转轴的角位置估计触控球位置的精度。以往的许多研究都采用仅包含Denavit-Hartenberg (DH)误差的机器人运动学模型作为误差源,本文提出了一种包含所有旋转轴的角定位和径向误差运动的新模型,用于机器人探测。在直尺的探测中,实验表明,在探测剖面中有很大一部分高频分量是由旋转轴的角定位误差运动引起的。另一方面,较低频率的“波浪形”分量更多地归因于DH误差。作为基础研究,本文的目标是平面机器人手臂的探测,因为它比六轴机器人具有更简单的运动学和更少的误差参数。
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引用次数: 0
High-precision construction method for laser tracker measurement network 激光跟踪仪测量网高精度施工方法
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.013
Lang Zou , Chen Luo , Gang Zhang , Yuanmin He , Qihang Zhang , Yijun Zhou
Efficient and precise automatic measurement is essential for evaluating the manufacturing accuracy of industrial components. The measurement network composed of multiple laser tracker measurement stations (LTMSs) as the foundation for achieving automated measurement of large-scale industrial components, it is particularly important to improve its measurement accuracy. However, the measurement accuracy of the measurement network, which is constructed according to the existing methods, often deviates from its optimal state. To address this, a high-precision construction method for laser tracker measurement network is developed. Firstly, the weight coefficient matrix based on the measurement errors of enhanced reference system points and the iterative optimization algorithm are used to improve the accuracy of the transformation parameters between adjacent LTMSs. Secondly, the optimal number of LTMSs is determined based on the principle of minimizing overall measurement errors for any two measurement points. Finally, the spatial position of each LTMS is optimized according to the principle of minimum measurement errors. The transformation parameters verification experiment and the simulation measurement experiment prove the effectiveness of the proposed method, which can significantly reduce the transformation errors and the overall measurement errors. The proposed method provides a valuable way for industries to improve the performance of automatic measurement of laser tracker measurement networks in real environment.
高效、精确的自动化测量是评价工业零部件制造精度的关键。由多个激光跟踪测量站(ltms)组成的测量网络作为实现大型工业部件自动化测量的基础,提高其测量精度显得尤为重要。然而,根据现有方法构建的测量网络的测量精度往往偏离其最优状态。针对这一问题,提出了一种高精度激光跟踪仪测量网的构建方法。首先,利用基于增强参考系点测量误差的权系数矩阵和迭代优化算法提高相邻LTMSs之间转换参数的精度;其次,根据任意两个测量点整体测量误差最小的原则确定LTMSs的最优数量;最后,根据最小测量误差原则对各LTMS的空间位置进行优化。变换参数验证实验和仿真测量实验证明了该方法的有效性,可以显著降低变换误差和整体测量误差。该方法为提高激光跟踪仪测量网络在实际环境中的自动测量性能提供了一条有价值的途径。
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引用次数: 0
Hybrid assisted polishing technique for 4H-SiC wafers using parallel plate dielectric barrier discharge plasma and mechanical polishing 平行平板介质阻挡放电等离子体与机械抛光混合辅助抛光技术
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.016
Dongxiao Yan , Nian Duan , Tukun Li , Paul Bills , Leigh Fleming , Hui Huang
To achieve sustainable and efficient production of 4H-SiC wafers, this study proposes a two-step plasma-assisted polishing method, which combines the parallel plate dielectric barrier discharge (PP-DBD) plasma irradiation with mechanical polishing (MP) using soft abrasives: (1) parallel-plate dielectric barrier discharge (PP-DBD) plasma irradiation to soften the wafer surface, followed by, (2) soft abrasives MP to remove the modified layer and achieve high surface quality. Key processing parameters—electrode spacing, applied voltage, and irradiation duration—were systematically optimised to form a uniform modified layer approximately 35 nm thick. The modified surfaces were characterised using transmission electron microscopy (TEM) and ellipsometry. The process achieved a material removal rate (MRR) of 220 nm/h, reducing the polishing time required to reach the target surface roughness from 300 min to 15 min compared with soft abrasives MP. This two-step, chemical-free approach significantly improves both polishing efficiency and surface quality, offering a scalable and environmentally sustainable solution for ultra-precision finishing of 4H-SiC wafers.
为了实现4H-SiC晶圆的可持续高效生产,本研究提出了一种两步等离子体辅助抛光方法,将平行板介质阻挡放电(PP-DBD)等离子体辐照与软性磨料机械抛光(MP)相结合:(1)平行板介质阻挡放电(PP-DBD)等离子体辐照软化晶圆表面,然后(2)软性磨料MP去除改性层,获得高表面质量。关键工艺参数-电极间距,施加电压和辐照时间-被系统地优化,形成一个均匀的修饰层约35纳米厚。利用透射电子显微镜(TEM)和椭偏仪对改性表面进行了表征。该工艺实现了220 nm/h的材料去除率(MRR),与软磨料MP相比,将达到目标表面粗糙度所需的抛光时间从300分钟减少到15分钟。这种两步、无化学物质的方法显著提高了抛光效率和表面质量,为4H-SiC晶圆的超精密加工提供了可扩展且环保的解决方案。
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引用次数: 0
Aspheric mirror high-efficiency precision grinding strategy based on the residual height modeling 基于残差高度建模的非球面反射镜高效精密磨削策略
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.014
Desheng Gao , Xiaoguang Guo , Wanxue Zhang , Yu Pu , Zhiqiang Liu , Renke Kang , Zhigang Dong
This research proposes a combined strategy of ultrasonic assisted grinding and precision grinding to address the inherent conflict between processing efficiency and high surface accuracy. The grinding residual height model elucidates the impact of grinding wheel and process factors on residual height, establishing a correlation between surface shape accuracy and residual height. The combined process strategy is evaluated on an off-axis aspheric mirror with a diameter of 150 mm. The ultrasonic vibration frequency (25 kHz) and ultrasonic amplitude (1.7μm) were established. The surface shape accuracy PV = 9.560 μm, RMS = 2.442 μm, Ra = 0.124 μm. The total processing cycle is 15 h 35 min. The research findings indicate that ultrasonic assisted grinding offers significant advantages in processing hard and brittle materials.
针对加工效率与高表面精度之间的内在矛盾,提出了超声辅助磨削与精密磨削相结合的磨削策略。磨削残留高度模型阐述了砂轮和工艺因素对残留高度的影响,建立了表面形状精度与残留高度之间的相关性。在直径为150mm的离轴非球面反射镜上对组合工艺策略进行了评价。确定了超声振动频率(25 kHz)和振幅(1.7μm)。表面形状精度PV = 9.560 μm, RMS = 2.442 μm, Ra = 0.124 μm。总加工周期为15小时35分钟。研究结果表明,超声辅助磨削在加工硬脆材料方面具有明显的优势。
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引用次数: 0
Development of micro-nibbling method based on dieless punching 基于无模冲孔的微蚕食方法的发展
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-12 DOI: 10.1016/j.precisioneng.2025.11.010
Kai Egashira, Taiki Mizutani
The nibbling process is a method used to cut arbitrary features from thin sheets by continuously piercing partially overlapping holes to form slits. While laser processing is currently the dominant method for such cutting, nibbling offers several advantages, including lower operational costs and the absence of thermal effects on the workpiece. In microfabrication, laser processing has inherent limitations that present both technical and financial challenges. Therefore, this study developed a micro-nibbling method for fabricating microfeatures using a dieless punching technique, where the workpiece is supported from underneath by a backing material, eliminating the need for a die and die set assembly and enabling the practical use of micropunches. A punching device specifically designed for micropunches, fabricated from cemented tungsten carbide using electrical discharge machining, was employed with stainless steel sheets as the workpiece. Initial experiments used a 20 μm-diameter punch on a 5 μm-thick sheet, varying the punch feed pitch from 5 to 15 μm, and successfully produced slits at all pitches, demonstrating the feasibility of the method. Subsequently, punches with diameters below 10 μm were used on 3 μm-thick sheets with feed pitches ranging from 3 to 8 μm. Additionally, slit-and-space patterns were produced using a 5 μm-diameter punch on 2 μm-thick sheets, yielding slits approximately 5 μm wide with comparable spacing. Rotating the punch at 1000 min−1 significantly reduced the punch load compared with non-rotating punches. Finally, the fabrication of cut-out pieces, including a 120 μm square and a 300 μm-radius sector on 5 μm-thick sheets, demonstrated the versatility and applicability of the proposed micro-nibbling method.
蚕食工艺是一种通过连续地穿透部分重叠的孔以形成狭缝来从薄板上切割任意特征的方法。虽然激光加工目前是这种切割的主要方法,但蚕食有几个优点,包括较低的操作成本和对工件没有热效应。在微加工中,激光加工具有固有的局限性,这在技术和财务上都是一个挑战。因此,本研究开发了一种使用无模冲孔技术制造微特征的微蚕食方法,其中工件由衬底材料从下方支撑,消除了对模具和模具组合的需要,并使微冲孔的实际使用成为可能。以不锈钢片为加工对象,采用电火花加工技术制备了一种专门用于微冲孔的硬质合金冲孔装置。初始实验采用直径为20 μm的冲床在5 μm厚的板料上,改变冲床进给间距为5 ~ 15 μm,并成功地在所有间距上产生狭缝,证明了该方法的可行性。随后,将直径小于10 μm的冲头用于3 μm厚的板材,进料间距为3 ~ 8 μm。此外,在厚度为2 μm的薄片上使用直径为5 μm的冲孔,可产生宽度约为5 μm的狭缝。与非旋转冲床相比,以1000分钟−1旋转冲床显着降低了冲床负载。最后,在5 μm厚的薄片上制备了120 μm正方形和300 μm半径扇形的切割片,验证了该方法的通用性和适用性。
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引用次数: 0
Research on polishing trajectory planning method for leading/trailing edge based on polishing removal model of counter torus flexible tool 基于反环面柔性刀具抛光去除模型的前尾缘抛光轨迹规划方法研究
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-12 DOI: 10.1016/j.precisioneng.2025.11.008
Zhang Yun , An Di , Ye Huan , Chen Zhitong , Cheng Geng , Liu Jingqing
To address the challenge of collaborative optimization between material removal efficiency and surface consistency caused by non-uniform machining allowances in the polishing of aero-engine blade leading/trailing edges, this paper proposes a trajectory planning method based on a removal model and a counter torus flexible polishing tool. By defining the counter torus flexible tool, a material removal model incorporating parameters such as curvature radius and preload is established through Hertz contact theory and orthogonal experimental data. Based on this model, a tool positioning coordinate system is constructed, and the tool posture is optimized by adjusting the yaw angle and rake angle to establish a trajectory optimization model with the goal of minimizing the average absolute deviation of cutting depth. Experiments show that when machining simple and complex blades with the counter torus flexible tool, the number of tool paths required is 9.8 % and 23.1 % of that of conventional convex tools, respectively. The surface roughness is better than Ra 0.4 μm, and the uniformity of material removal depth at the leading/trailing edges is significantly improved. This method provides theoretical and technical support for high-precision and high-efficiency polishing of aero-engine blade leading/trailing edges.
针对航空发动机叶片前后缘抛光过程中加工余量不均匀导致的材料去除效率与表面一致性协同优化问题,提出了一种基于去除模型和反环面柔性抛光工具的轨迹规划方法。通过定义反环面柔性刀具,利用赫兹接触理论和正交实验数据,建立了包含曲率半径和预紧力等参数的材料去除模型。基于该模型,构建刀具定位坐标系,通过调整横摆角和前倾角对刀具姿态进行优化,建立以切削深度平均绝对偏差最小为目标的轨迹优化模型。实验表明,用反环面柔性刀具加工简单和复杂叶片时,所需的刀路数分别是常规凸刀的9.8%和23.1%。表面粗糙度优于Ra 0.4 μm,前后缘材料去除深度均匀性显著提高。该方法为航空发动机叶片前后缘的高精度、高效率抛光提供了理论和技术支持。
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引用次数: 0
Stroke error analysis of planetary roller screw mechanism with eccentric errors and pitch errors 考虑偏心误差和节距误差的行星滚子螺杆机构行程误差分析
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-11 DOI: 10.1016/j.precisioneng.2025.11.011
Li Zu , Zhenwen Cheng , Manxin Wang , Mingcai Xing , Guanlin Ren
The stroke error of planetary roller screw mechanism (PRSM) is one of the main indicators for evaluating the performances of PRSM. However, the variation law of stroke error of PRSM is currently unclear. Hence, this paper proposes the stroke error prediction model of PRSM. And the test bench of stroke error of PRSM is established to prove the presented model. The eccentric errors (EE) of screw and nut, pitch errors of screw, nut and roller are measured by the dial indicator and profilometer, respectively. The effects of EE of screw and nut, pitch errors of screw, nut and roller on the stroke error of PRSM are investigated. This investigation indicates that the stroke accuracy of PRSM can be improved through regulating the geometrical errors.
行星滚子丝杠机构的行程误差是评价其性能的主要指标之一。然而,PRSM的行程误差变化规律目前尚不清楚。为此,本文提出了PRSM的行程误差预测模型。并建立了永磁同步电机行程误差试验台,对该模型进行了验证。用百分表和轮廓仪分别测量了螺杆、螺母的偏心误差(EE)和螺杆、螺母、滚子的节距误差。研究了螺杆和螺母的EE、螺杆、螺母和滚子的节距误差对永磁同步电机行程误差的影响。研究表明,通过调整其几何误差可以提高永磁同步电机的行程精度。
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引用次数: 0
Prediction of subsurface crack depth during abrasive machining of brittle materials based on nanoindentation tests 基于纳米压痕试验的脆性材料磨料加工亚表面裂纹深度预测
IF 3.7 2区 工程技术 Q2 ENGINEERING, MANUFACTURING Pub Date : 2025-11-10 DOI: 10.1016/j.precisioneng.2025.11.012
Huapan Xiao , Shenxin Yin , Yilin Wu , Qingqing Huang , Sen Yin
Subsurface damages (SSDs) are inevitably produced during traditional abrasive machining processes of brittle materials. Such damages significantly impact the service performance and lifespan of these materials, which should be evaluated. This paper develops a method for predicting the subsurface crack depth based on nanoindentation tests. The method attempts to establish new relationships between the deformation zone depth and the median crack depth, with particular attention to the indenter shape, subsurface crack inclination, and material elastic recovery. To validate the method, diamond wire sawing experiments are conducted on a single-crystal silicon ingot, and then the subsurface morphologies and indentation behavior of the silicon wafers are analyzed. The result shows that the subsurface median cracks exhibit a certain inclination angle, ranging from 10.3° to 19.3°. There is a turning point or position for the elastic recovery, nominal contact modulus, and hardness versus the maximum indentation load curve. The experimental values of SSD depth fall within the range of theoretical ones. The relative error between the theoretical and experimental values of SSD depth is minimized when utilizing some newly established relationships in contrast to prior relationships. The theoretical values of SSD depth for the conical indenter, considering crack inclination and elastic recovery, align more closely with the experimental values. Using prior relationships, the minimum relative errors are 18.5 % (conical indenter) and 20.7 % (pyramidal indenter). With the newly established relationships, these errors reduce to 16.6 % and 18.8 %, respectively. This research presents a novel method for evaluating SSDs in abrasive-machined brittle materials.
传统的脆性材料磨料加工过程中不可避免地会产生亚表面损伤。这种损坏严重影响了这些材料的使用性能和寿命,应该对其进行评估。本文提出了一种基于纳米压痕试验的地下裂纹深度预测方法。该方法试图建立变形区深度与中间裂纹深度之间的新关系,特别注意压头形状、地下裂纹倾角和材料弹性恢复。为了验证该方法的有效性,在单晶硅锭上进行了金刚石线锯实验,并分析了硅片的亚表面形貌和压痕行为。结果表明:地下中间裂纹具有一定的倾角,范围为10.3°~ 19.3°;弹性恢复、标称接触模量和硬度相对于最大压痕载荷曲线有一个转折点或位置。SSD深度的实验值在理论范围内。利用一些新建立的关系与已有的关系相比较,可以使SSD深度的理论值与实验值之间的相对误差最小化。考虑裂纹倾角和弹性恢复的锥形压头的SSD深度理论值与实验值更为接近。利用先验关系,最小相对误差为18.5%(圆锥压头)和20.7%(锥体压头)。在新建立的关系下,这些误差分别降低到16.6%和18.8%。本研究提出了一种评估磨料加工脆性材料中固态硬盘性能的新方法。
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引用次数: 0
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Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology
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