Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第5页

Error motions in hydrostatic bearings: Mechanisms, analysis, and control 静压轴承中的误差运动：机制、分析和控制

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.019

Jun Zha , Kai Cheng , Dongxu Wu , Huijie Zhang , Fei Xue

Hydrostatic bearings play an indispensable role in high precision machines and equipment such as precision machine tools, measuring instruments, optical equipment, and large-scale scientific facilities, owing to their high precision potential, high stiffness, high damping, low friction, and high loading capacity. However, the error motion of hydrostatic bearings as defined indicates the deviation of their actual motion trajectory or altitude from their ideal state, which is a key factor limiting their performance and the ultimate accuracy of the precision machines and equipment they support. This paper provides a systematic and comprehensive review and the insights on the research and development progress of hydrostatic bearing error motions in the contexts of past, present and the future. Firstly, it elaborates in details on the definition, classification, and standardized characterization and evaluation metrics of hydrostatic bearing error motions. Secondly, it provides an in-depth analysis of the main generation mechanisms of the error motions. Building upon this, it further reviews and categorizes the modeling and analysis methods for the error motions, and systematically formulates and summarizes their suppression and control strategies. Finally, it discusses the existing scientific and technological challenges, and highlights the future research trends and directions. This review aims to provide researchers and engineering practitioners with a comprehensive overview of the current research status, key enabling technologies, and future trends in hydrostatic bearing error motions. It is also intended to promote further improvements in the motion accuracy of hydrostatic bearings and thus enhance their further development in precision engineering applications with higher precision and accuracy requirements particularly in an industrial scale.

静压轴承具有高精度潜力、高刚度、高阻尼、低摩擦、高承载能力等特点，在精密机床、测量仪器、光学设备、大型科学设施等高精度机器和设备中发挥着不可缺少的作用。然而，定义的静压轴承的误差运动是指其实际运动轨迹或高度与其理想状态的偏差，这是限制其性能及其所支持的精密机器和设备的最终精度的关键因素。本文系统、全面地综述了静压轴承误差运动在过去、现在和未来的研究和发展进展。首先，详细阐述了静压轴承误差运动的定义、分类、标准化表征和评价指标。其次，对误差运动的主要产生机理进行了深入分析。在此基础上，进一步对误差运动的建模和分析方法进行了综述和分类，并系统地制定和总结了误差运动的抑制和控制策略。最后，讨论了现有的科技挑战，并强调了未来的研究趋势和方向。本文旨在为研究人员和工程从业者提供静压轴承误差运动的研究现状、关键实现技术和未来趋势的全面概述。它还旨在促进静压轴承运动精度的进一步提高，从而加强其在精度和精度要求更高的精密工程应用中的进一步发展，特别是在工业规模。

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引用次数: 0

Positioning of a cable-driven parallel robot at better than 250 μm using multilateration and photogrammetric measurement systems 利用多角形和摄影测量系统定位250 μm以下的缆索驱动并联机器人

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.020

Joffray Guillory , Jean-Pierre Wallerand , Daniel Truong , Ben Sargeant , Charles Richards , Stuart Robson , Asier García Berdote , Pablo Puerto , Pierre-Elie Hervé , Marc Gouttefarde

Improving the positioning accuracy of cable-driven parallel robots (CDPRs) is crucial for industrial applications. These robots, operating in large volumes and handling heavy loads, have an accuracy limited by several factors, such as variations in ambient temperature or changes of the load being transported, which affect the mechanical structure of the robot or the tensions in the cables. For instance, CoGiRo is a CDPR of dimensions of 11 m × 15 m × 6 m able to move a platform weighing up to 500 kg. Its resolution is a few tens of micrometres, but its positioning, estimated from the winch encoders, lacks accuracy. To accurately place the CoGiRo mobile platform in the desired position and orientation, this paper proposes to use multilateration and photogrammetric measurement systems in a collaborative way. Photogrammetry continuously measured the poses of the mobile platform with worst-case coordinate uncertainties in the depth direction moving away from the cameras, with 0.2 mm being typical for all lines of sight, dropping to 0.5 mm where lines of sight were blocked by occlusion. The photogrammetric system reported poses at 2 Hz to the multilateration system, enabling it to align its stations on the distant targets and measure static poses of the platform with an estimated uncertainty typically less than 70 μm for the position coordinates and less than 110 μrad for the orientation angles. Multilateration measurements were then used by CoGiRo to reduce its positioning errors to less than 250 μm. The technique was validated using a practical assembly of two square-shaped metallic parts equipped with 10 independent capacitive distance sensors that allowed us to demonstrate part alignment to better than 250 μm.

提高缆索驱动并联机器人（CDPRs）的定位精度对工业应用至关重要。这些机器人在大量操作和处理重负载时，精度受到几个因素的限制，例如环境温度的变化或被运输负载的变化，这些因素会影响机器人的机械结构或电缆的张力。例如，CoGiRo是一种尺寸为11米× 15米× 6米的CDPR，能够移动重达500公斤的平台。它的分辨率是几十微米，但它的定位，估计从绞盘编码器，缺乏准确性。为了准确地将CoGiRo移动平台放置在所需的位置和方向上，本文提出了使用多方位和摄影测量系统协同工作的方法。摄影测量连续测量移动平台在远离相机的深度方向上坐标不确定性最坏情况下的位姿，所有视线的典型值为0.2 mm，视线被遮挡时降至0.5 mm。摄影测量系统以2hz的频率向多方位系统报告姿态，使其能够在远距离目标上对准其站点并测量平台的静态姿态，其位置坐标的估计不确定度通常小于70 μm，方向角的估计不确定度通常小于110 μrad。CoGiRo利用多重测量将定位误差降低到250 μm以下。该技术通过两个方形金属部件装配10个独立电容距离传感器的实际装配进行了验证，使我们能够证明零件对准精度优于250 μm。

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引用次数: 0

A high performance hybrid-driven piezoelectric actuator based on asymmetrical structure with combined lateral and coupling motions 一种基于横向运动和耦合运动的非对称结构的高性能混合驱动压电驱动器

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.015

Qi Wang , Dahoon Ahn , Yang Zhang , Peng Yan , Ziran Wang

Bionic stepping piezoelectric actuators such as stick–slip or inchworm actuators demonstrate important applications in semiconductor manufacturing and active optics, where high-speed and high-precision motion capabilities, as well as load performance, often involve a trade-off arising from distinct actuation mechanisms. This study proposes a compact piezoelectric actuator based on biomimetic driving principles combining the advantages of stick–slip and inchworm actuations by employing only two piezoelectric stack units. The design comprises a multifunctional driving foot based on a flexible triangular mechanism and a clamping foot based on a spring hinge. The asymmetrical structure features displacement amplification and enables combined lateral and coupling motions, supporting a hybrid driving principle to achieve both stick–slip and inchworm motions from a performance perspective. A prototype of the designed piezoelectric actuator was fabricated to verify its feasibility and performance. The experimental results show that the actuator achieves a maximum speed of 52.89 mm/s and a maximum output force of 24.52 N, with a motion resolution of 23 nm, which significantly outperform existing results in the literature.

仿生步进式压电致动器，如粘滑或尺蠖致动器，在半导体制造和主动光学中展示了重要的应用，在这些领域，高速和高精度的运动能力以及负载性能通常涉及不同致动机制产生的权衡。本研究提出了一种基于仿生驱动原理的紧凑型压电驱动器，该驱动器结合了粘滑驱动和尺蠖驱动的优点，仅采用两个压电堆叠单元。本设计包括基于柔性三角机构的多功能驱动脚和基于弹簧铰链的夹紧脚。这种不对称结构具有位移放大的特点，可以实现横向和耦合运动，从性能角度来看，支持混合驱动原理，可以实现粘滑和尺蠖运动。制作了压电驱动器的样机，验证了其可行性和性能。实验结果表明，该驱动器的最大速度为52.89 mm/s，最大输出力为24.52 N，运动分辨率为23 nm，明显优于已有的文献结果。

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引用次数: 0

Hybrid reluctance-actuated Stewart platform for high-precision position control 用于高精度位置控制的混合磁阻驱动Stewart平台

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.021

Christian Haider, Damian Senoner, Andreas Sinn, Adis Husanović, Benjamin Friedl, Georg Schitter

This paper presents a Stewart platform with hybrid reluctance-actuated struts to achieve six-degrees-of-freedom motion capability. Tailored hybrid reluctance actuators (HRAs) are integrated into a novel strut design to achieve axial force transmission to the Stewart platform’s end effector via flexure-based joints. Each actuator has a motion range of

\pm

1 mm, leading to a platform workspace of

\pm

1.34 mm along the vertical z-axis and

\pm

1.1 mm in x- and y-direction. The rotational range amounts to

\pm

0.66°/0.78° for tip/tilt motion. By implementation of a MIMO decoupling approach using canonical polyadic decomposition (CPD), position control bandwidths of up to 30 Hz are reached in the task space. The platform achieves millimeter stroke with sub-micrometer translational resolution (45 nm RMS), sub-microradian angular resolution (300 nrad RMS) and a bidirectional repeatability (1

σ

) of 0.15–0.32 µm and 3.5–4.8 µrad. The overall positioning accuracy (RMSE), quantified against external interferometric measurements, amounts to 1-2.3 µm in translation and 11–15 µrad in rotation.

提出了一种具有混合勉力杆的Stewart平台，实现了六自由度的运动能力。定制的混合磁阻执行器（HRAs）集成到一种新颖的支柱设计中，通过基于柔性的关节将轴向力传递到Stewart平台的末端执行器。每个驱动器的运动范围为±1mm，导致平台工作空间沿垂直z轴为±1.34 mm， x和y方向为±1.1 mm。旋转范围为±0.66°/0.78°的尖端/倾斜运动。通过使用典型多进分解（CPD）实现MIMO解耦方法，在任务空间中达到高达30 Hz的位置控制带宽。该平台实现了亚微米平移分辨率（45 nm RMS）、亚微米角分辨率（300 nrad RMS）的毫米行程，双向重复性（1σ）为0.15-0.32µm和3.5-4.8µrad。总体定位精度（RMSE），根据外部干涉测量量化，平移量为1-2.3µm，旋转量为11-15µrad。

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引用次数: 0

Achieving near-atomic-level surface finish on GCr15 bearing steel via CMP: mechanisms and process optimization 通过CMP实现GCr15轴承钢近原子级表面光洁度：机理和工艺优化

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-17 DOI: 10.1016/j.precisioneng.2025.11.018

Yulong Dai , Fanning Meng , Chunjing Shi , Can Wu , Chun Cao , Zeqiang Li , Zuochao Zhang

GCr15, a widely utilized high-carbon chromium bearing steel, is extensively employed in manufacturing bearing rings due to its excellent wear resistance and corrosion resistance. In aerospace applications where stringent surface roughness requirements are imposed on bearings, this study presents a novel polishing slurry comprising D-sorbitol, silica sol, H₂O₂, disodium EDTA, and benzotriazole (BTA) to achieve near-atomic-level polishing of GCr15 bearing steel within a defined parameter range. Under a 20 μm × 20 μm measurement area, the lowest reported areal surface roughness (Sa) value of 0.204 nm was attained, approaching atomic-scale smoothness. The polishing mechanism was investigated via Energy-Dispersive X-ray Spectroscopy (EDS), X-ray Photoelectron Spectroscopy (XPS) and Inductively Coupled Plasma Mass Spectrometry (ICP-MS), revealing that under alkaline conditions, H₂O₂ and disodium EDTA oxidize Fe and Cr to form chelate complexes such as [Fe(EDTA)] − and [Cr(EDTA)]^-. These complexes synergize with the mechanical removal action of SiO₂ abrasives to realize an ultra-smooth surface.

GCr15是一种应用广泛的高碳铬轴承钢，由于其优异的耐磨性和耐腐蚀性，被广泛应用于制造轴承套圈。在对轴承表面粗糙度要求严格的航空航天应用中，本研究提出了一种由d -山梨醇、硅溶胶、H2O2、EDTA二钠和苯并三唑（BTA）组成的新型抛光浆，可以在规定的参数范围内实现对GCr15轴承钢的近原子级抛光。在20 μm × 20 μm的测量区域内，获得了最低的表面粗糙度（Sa）值0.204 nm，接近原子尺度的光滑度。利用能量色散x射线能谱（EDS）、x射线光电子能谱（XPS）和电感耦合等离子体质谱（ICP-MS）对抛光机理进行了研究，发现在碱性条件下，H2O2和EDTA二钠氧化Fe和Cr形成了螯合络合物[Fe(EDTA)]−和[Cr(EDTA)]-。这些复合物与SiO2磨料的机械去除作用协同作用，实现超光滑表面。

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引用次数: 0

Error sources in touch-trigger probing by a planar robot arm 平面机械臂触控探测的误差来源

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-15 DOI: 10.1016/j.precisioneng.2025.11.017

Soichi Ibaraki, Kandai Kawano

The accuracy of touch-trigger probing by a robotic manipulator is determined by the accuracy of the robot forward kinematic model to estimate the stylus sphere position from angular positions of rotary axes. While many past works employ a robot kinematic model only containing the Denavit-Hartenberg (DH) errors as error sources, this paper presents the application of a novel model, containing the angular positioning and radial error motions of all the rotary axes, to the robotic probing. In the probing of a straightedge, the experiments show that a large portion of a higher frequency component in the probed profiles is attributable to the angular positioning error motion of rotary axes. On the other hand, a lower frequency “waviness” component is attributable more to the DH errors. As a fundamental study, this paper targets the probing by a planar robot arm, as it has a simpler kinematics, with significantly less error parameters, than a six-axis robot.

机器人触摸触发探测的精度取决于机器人正运动学模型从旋转轴的角位置估计触控球位置的精度。以往的许多研究都采用仅包含Denavit-Hartenberg （DH）误差的机器人运动学模型作为误差源，本文提出了一种包含所有旋转轴的角定位和径向误差运动的新模型，用于机器人探测。在直尺的探测中，实验表明，在探测剖面中有很大一部分高频分量是由旋转轴的角定位误差运动引起的。另一方面，较低频率的“波浪形”分量更多地归因于DH误差。作为基础研究，本文的目标是平面机器人手臂的探测，因为它比六轴机器人具有更简单的运动学和更少的误差参数。

引用次数: 0

High-precision construction method for laser tracker measurement network 激光跟踪仪测量网高精度施工方法

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.013

Lang Zou , Chen Luo , Gang Zhang , Yuanmin He , Qihang Zhang , Yijun Zhou

Efficient and precise automatic measurement is essential for evaluating the manufacturing accuracy of industrial components. The measurement network composed of multiple laser tracker measurement stations (LTMSs) as the foundation for achieving automated measurement of large-scale industrial components, it is particularly important to improve its measurement accuracy. However, the measurement accuracy of the measurement network, which is constructed according to the existing methods, often deviates from its optimal state. To address this, a high-precision construction method for laser tracker measurement network is developed. Firstly, the weight coefficient matrix based on the measurement errors of enhanced reference system points and the iterative optimization algorithm are used to improve the accuracy of the transformation parameters between adjacent LTMSs. Secondly, the optimal number of LTMSs is determined based on the principle of minimizing overall measurement errors for any two measurement points. Finally, the spatial position of each LTMS is optimized according to the principle of minimum measurement errors. The transformation parameters verification experiment and the simulation measurement experiment prove the effectiveness of the proposed method, which can significantly reduce the transformation errors and the overall measurement errors. The proposed method provides a valuable way for industries to improve the performance of automatic measurement of laser tracker measurement networks in real environment.

高效、精确的自动化测量是评价工业零部件制造精度的关键。由多个激光跟踪测量站（ltms）组成的测量网络作为实现大型工业部件自动化测量的基础，提高其测量精度显得尤为重要。然而，根据现有方法构建的测量网络的测量精度往往偏离其最优状态。针对这一问题，提出了一种高精度激光跟踪仪测量网的构建方法。首先，利用基于增强参考系点测量误差的权系数矩阵和迭代优化算法提高相邻LTMSs之间转换参数的精度；其次，根据任意两个测量点整体测量误差最小的原则确定LTMSs的最优数量；最后，根据最小测量误差原则对各LTMS的空间位置进行优化。变换参数验证实验和仿真测量实验证明了该方法的有效性，可以显著降低变换误差和整体测量误差。该方法为提高激光跟踪仪测量网络在实际环境中的自动测量性能提供了一条有价值的途径。

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引用次数: 0

Hybrid assisted polishing technique for 4H-SiC wafers using parallel plate dielectric barrier discharge plasma and mechanical polishing 平行平板介质阻挡放电等离子体与机械抛光混合辅助抛光技术

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.016

Dongxiao Yan , Nian Duan , Tukun Li , Paul Bills , Leigh Fleming , Hui Huang

To achieve sustainable and efficient production of 4H-SiC wafers, this study proposes a two-step plasma-assisted polishing method, which combines the parallel plate dielectric barrier discharge (PP-DBD) plasma irradiation with mechanical polishing (MP) using soft abrasives: (1) parallel-plate dielectric barrier discharge (PP-DBD) plasma irradiation to soften the wafer surface, followed by, (2) soft abrasives MP to remove the modified layer and achieve high surface quality. Key processing parameters—electrode spacing, applied voltage, and irradiation duration—were systematically optimised to form a uniform modified layer approximately 35 nm thick. The modified surfaces were characterised using transmission electron microscopy (TEM) and ellipsometry. The process achieved a material removal rate (MRR) of 220 nm/h, reducing the polishing time required to reach the target surface roughness from 300 min to 15 min compared with soft abrasives MP. This two-step, chemical-free approach significantly improves both polishing efficiency and surface quality, offering a scalable and environmentally sustainable solution for ultra-precision finishing of 4H-SiC wafers.

为了实现4H-SiC晶圆的可持续高效生产，本研究提出了一种两步等离子体辅助抛光方法，将平行板介质阻挡放电（PP-DBD）等离子体辐照与软性磨料机械抛光（MP）相结合：(1)平行板介质阻挡放电（PP-DBD）等离子体辐照软化晶圆表面，然后(2)软性磨料MP去除改性层，获得高表面质量。关键工艺参数-电极间距，施加电压和辐照时间-被系统地优化，形成一个均匀的修饰层约35纳米厚。利用透射电子显微镜（TEM）和椭偏仪对改性表面进行了表征。该工艺实现了220 nm/h的材料去除率（MRR），与软磨料MP相比，将达到目标表面粗糙度所需的抛光时间从300分钟减少到15分钟。这种两步、无化学物质的方法显著提高了抛光效率和表面质量，为4H-SiC晶圆的超精密加工提供了可扩展且环保的解决方案。

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引用次数: 0

Aspheric mirror high-efficiency precision grinding strategy based on the residual height modeling 基于残差高度建模的非球面反射镜高效精密磨削策略

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-13 DOI: 10.1016/j.precisioneng.2025.11.014

Desheng Gao , Xiaoguang Guo , Wanxue Zhang , Yu Pu , Zhiqiang Liu , Renke Kang , Zhigang Dong

This research proposes a combined strategy of ultrasonic assisted grinding and precision grinding to address the inherent conflict between processing efficiency and high surface accuracy. The grinding residual height model elucidates the impact of grinding wheel and process factors on residual height, establishing a correlation between surface shape accuracy and residual height. The combined process strategy is evaluated on an off-axis aspheric mirror with a diameter of 150 mm. The ultrasonic vibration frequency (25 kHz) and ultrasonic amplitude (1.7μm) were established. The surface shape accuracy PV = 9.560 μm, RMS = 2.442 μm, Ra = 0.124 μm. The total processing cycle is 15 h 35 min. The research findings indicate that ultrasonic assisted grinding offers significant advantages in processing hard and brittle materials.

针对加工效率与高表面精度之间的内在矛盾，提出了超声辅助磨削与精密磨削相结合的磨削策略。磨削残留高度模型阐述了砂轮和工艺因素对残留高度的影响，建立了表面形状精度与残留高度之间的相关性。在直径为150mm的离轴非球面反射镜上对组合工艺策略进行了评价。确定了超声振动频率（25 kHz）和振幅（1.7μm）。表面形状精度PV = 9.560 μm, RMS = 2.442 μm, Ra = 0.124 μm。总加工周期为15小时35分钟。研究结果表明，超声辅助磨削在加工硬脆材料方面具有明显的优势。

引用次数: 0

Development of micro-nibbling method based on dieless punching 基于无模冲孔的微蚕食方法的发展

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2025-11-12 DOI: 10.1016/j.precisioneng.2025.11.010

Kai Egashira, Taiki Mizutani

The nibbling process is a method used to cut arbitrary features from thin sheets by continuously piercing partially overlapping holes to form slits. While laser processing is currently the dominant method for such cutting, nibbling offers several advantages, including lower operational costs and the absence of thermal effects on the workpiece. In microfabrication, laser processing has inherent limitations that present both technical and financial challenges. Therefore, this study developed a micro-nibbling method for fabricating microfeatures using a dieless punching technique, where the workpiece is supported from underneath by a backing material, eliminating the need for a die and die set assembly and enabling the practical use of micropunches. A punching device specifically designed for micropunches, fabricated from cemented tungsten carbide using electrical discharge machining, was employed with stainless steel sheets as the workpiece. Initial experiments used a 20 μm-diameter punch on a 5 μm-thick sheet, varying the punch feed pitch from 5 to 15 μm, and successfully produced slits at all pitches, demonstrating the feasibility of the method. Subsequently, punches with diameters below 10 μm were used on 3 μm-thick sheets with feed pitches ranging from 3 to 8 μm. Additionally, slit-and-space patterns were produced using a 5 μm-diameter punch on 2 μm-thick sheets, yielding slits approximately 5 μm wide with comparable spacing. Rotating the punch at 1000 min⁻¹ significantly reduced the punch load compared with non-rotating punches. Finally, the fabrication of cut-out pieces, including a 120 μm square and a 300 μm-radius sector on 5 μm-thick sheets, demonstrated the versatility and applicability of the proposed micro-nibbling method.

蚕食工艺是一种通过连续地穿透部分重叠的孔以形成狭缝来从薄板上切割任意特征的方法。虽然激光加工目前是这种切割的主要方法，但蚕食有几个优点，包括较低的操作成本和对工件没有热效应。在微加工中，激光加工具有固有的局限性，这在技术和财务上都是一个挑战。因此，本研究开发了一种使用无模冲孔技术制造微特征的微蚕食方法，其中工件由衬底材料从下方支撑，消除了对模具和模具组合的需要，并使微冲孔的实际使用成为可能。以不锈钢片为加工对象，采用电火花加工技术制备了一种专门用于微冲孔的硬质合金冲孔装置。初始实验采用直径为20 μm的冲床在5 μm厚的板料上，改变冲床进给间距为5 ~ 15 μm，并成功地在所有间距上产生狭缝，证明了该方法的可行性。随后，将直径小于10 μm的冲头用于3 μm厚的板材，进料间距为3 ~ 8 μm。此外，在厚度为2 μm的薄片上使用直径为5 μm的冲孔，可产生宽度约为5 μm的狭缝。与非旋转冲床相比，以1000分钟−1旋转冲床显着降低了冲床负载。最后，在5 μm厚的薄片上制备了120 μm正方形和300 μm半径扇形的切割片，验证了该方法的通用性和适用性。

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引用次数: 0