Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology最新文献_第5页

Inter-reflection error correction method based on phase-difference look-up-table for fringe projection profilometry 基于相位差查表的条纹投影轮廓间反射误差校正方法

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-11 DOI: 10.1016/j.precisioneng.2025.11.028

Peng Tang , Zhenyu Liu , Guodong Sa , Jianrong Tan

Fringe projection profilometry (FPP) is an efficient and high-precision approach to establish surface measurement, which assumes the measured object receives only direct illumination from the measurement device instead of global illumination. However, in practice, the inter-reflective structure of the object surface itself introduces indirect illumination, which leads to inter-reflection errors and severely limits the measurement accuracy of FPP. Existing inter-reflection error correction methods typically require carefully chosen pattern parameters or additional installed hardware, reducing the measurement flexibility and efficiency. To address this issue, a method based on phase-difference look-up-table (PD-LUT) is proposed without additional patterns or hardware. The influence of inter-reflection errors on the FPP measurement is first analyzed. Besides, the optimal function for inter-reflection error correction is defined in the form of complex modulation-phase representation. To optimize this optimal function, the relationship between the modulation of global illumination and phase difference between direct and indirect illumination is constructed as PD-LUT. PD-LUT is utilized to obtain candidate wrapped phase corresponding to direct illumination and then the final optimal absolute phase is identified from these candidates. Qualitative and quantitative contrast experiments demonstrate that the proposed method exhibits excellent performance in dealing with inter-reflection errors and achieves accurate and reliable measurements even under challenging conditions.

条纹投影轮廓法（FPP）是一种高效、高精度的表面测量方法，它假设被测物体只接收来自测量设备的直接照明，而不是全局照明。但在实际应用中，目标表面本身的互反射结构引入了间接照明，导致互反射误差，严重限制了FPP的测量精度。现有的反射间误差校正方法通常需要仔细选择模式参数或额外安装硬件，从而降低了测量的灵活性和效率。为了解决这一问题，提出了一种基于相位差查找表（PD-LUT）的方法，无需额外的模式或硬件。首先分析了反射间误差对FPP测量的影响。此外，以复调制相位表示的形式定义了反射间误差校正的最优函数。为了优化该最优函数，将全局照明调制与直接照明和间接照明的相位差之间的关系构建为PD-LUT。利用PD-LUT获得直接照明对应的候选包合相位，然后从这些候选包合相位中识别出最终的最优绝对相位。定性和定量对比实验表明，该方法在处理反射间误差方面表现出优异的性能，即使在具有挑战性的条件下也能实现准确可靠的测量。

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引用次数: 0

Dynamic image blurring analysis and vibration suppression in reflective lithography projection objective 反射式光刻投影物镜动态图像模糊分析及振动抑制

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-02 DOI: 10.1016/j.precisioneng.2025.12.003

Shiyu Li , Ji Zhou , Chi Tu , Xia Kang , Jingteng Liu , Haifeng Sun , Junbo Liu

Dynamic image degradation in reflective projection objectives limits sub-nanometer chip fabrication in high-numerical aperture (NA) extreme ultraviolet (EUV) lithography systems. Micro-vibrations induce optical misalignments via opto-mechanical coupling, causing spatial image blur. An opto-mechanical coupled model and a multi-parameter optimization method are proposed to evaluate the mirror position offset and reduce the vibration response. Based on the second Lagrange equations, a multi-body dynamics model considering the internal stiffness, damping and mass of the objective is established. The predicted mirror displacement errors along the X, Y and Z axes are 3.01 %, 3.39 % and 0.12 % respectively. Hopkins’ partially coherent imaging theory and wavefront aberration transfer functions are used to develop a dynamic image blur evaluation model. On this basis, a hybrid genetic algorithm-particle swarm optimization (GA-PSO) method is proposed to optimize stiffness and damping parameters, reducing mirror displacement responses and spatial image pattern errors (PE) by over 36 % and 40 % respectively.

在高数值孔径极紫外光刻系统中，反射投影物镜的动态图像退化限制了亚纳米芯片的制造。微振动通过光-机械耦合引起光学失调，造成空间图像模糊。提出了一种光-机耦合模型和多参数优化方法来评估反射镜的位置偏移并减小振动响应。基于第二拉格朗日方程，建立了考虑目标体内部刚度、阻尼和质量的多体动力学模型。预测的X、Y、Z轴镜面位移误差分别为3.01%、3.39%和0.12%。利用Hopkins的部分相干成像理论和波前像差传递函数建立了动态图像模糊评价模型。在此基础上，提出了一种混合遗传算法-粒子群优化（GA-PSO）方法来优化刚度和阻尼参数，将镜面位移响应和空间图像模式误差（PE）分别降低了36%和40%以上。

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引用次数: 0

Effect of pH on the electrochemical dissolution behavior of a (TiVCr)95W5 refractory high-entropy alloy and the machining of various structures pH对（TiVCr）95W5难熔高熵合金电化学溶解行为及不同组织加工的影响

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-06 DOI: 10.1016/j.precisioneng.2025.12.007

Juchen Zhang , Haitao Xu , Wenjun Tang , Zhonghao Lian , Yixiang Qiao , Xiaokang Yue , Shunhua Chen

Refractory high-entropy alloys (RHEAs), showing excellent mechanical properties at high temperature, are expected to have promising applications in various industries, for instance, the key components of aero engines. On account of high strength and hardness as well as good corrosion resistance, electrochemical machining (ECM) brings in a promising but challenging way to process RHEAs efficiently. In this work, to implement a practicable ECM process for RHEAs, the electrochemical dissolution behavior of a (TiVCr)₉₅W₅ RHEA in different pH conditions was investigated using different solutions, namely 10 % NaNO₃, 10 % NaNO₃+0.5 % HNO_3, and 10 % NaNO₃+0.5 % NaOH. The results show that the RHEA exhibits a more significant corrosion tendency, lower resistance, and more uniform dissolution for each refractory element in the 10 % NaNO₃+0.5 % NaOH solution than that in the other two solutions, and the heterogeneous corrosions in interdendritic areas are also eliminated. The effects of OH⁻ ion concentration, cathode feed rate, machining voltage, and duty cycle on the ECM performance of the RHEA were then investigated. Further, a dissolution model for the dissolution behavior of RHEAs during ECM has been established. Besides, an orthogonal experiment was also carried out to optimize the processing parameters, where the best performance was achieved by an electrolyte of 10 % NaNO₃+0.5 % NaOH, a cathode feed rate of 5.4 μm/s, a machining voltage of 23 V, and a pulsed power duty cycle of 30 %. Finally, a round hole of 1.224 mm diameter (the standard deviation of diameter is 0.0176 mm and the relative error is 2.04 %) and a 0.9778 × 0.9746 mm square hole were successfully machined using ECM (the standard deviation of transverse and longitudinal are 0.0183 and 0.0126 mm respectively), which further verified the feasibility of machining RHEAs using the ECM technique.

耐火高熵合金（RHEAs）具有优异的高温力学性能，在航空发动机关键部件等领域具有广阔的应用前景。电化学加工（ECM）由于具有高强度、高硬度和良好的耐腐蚀性，为高效加工RHEAs提供了一种很有前途但又充满挑战的方法。在本工作中，为了实现一个可行的ECM工艺，研究了（TiVCr）95W5 RHEA在不同pH条件下的电化学溶解行为，使用不同的溶液，即10% NaNO3, 10% NaNO3+ 0.5% HNO3和10% NaNO3+ 0.5% NaOH。结果表明：与其他两种溶液相比，10% NaNO3+ 0.5% NaOH溶液中RHEA的腐蚀倾向更明显，耐蚀性更低，各难熔元素的溶解更均匀，枝晶间区域的非均相腐蚀也被消除。研究了OH−离子浓度、阴极进给速率、加工电压和占空比对RHEA电解加工性能的影响。此外，建立了溶蚀过程中溶蚀行为的溶蚀模型。通过正交实验对工艺参数进行了优化，其中电解液为10% NaNO3+ 0.5% NaOH，阴极进给速率为5.4 μm/s，加工电压为23 V，脉冲功率占空比为30%时，工艺性能最佳。最后，利用电解加工技术成功加工了直径为1.224 mm的圆孔（直径标准差为0.0176 mm，相对误差为2.04%）和0.9778 × 0.9746 mm的方孔（横向和纵向标准差分别为0.0183和0.0126 mm），进一步验证了利用电解加工技术加工rhea的可行性。

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引用次数: 0

Dynamic axial force prediction model and method for controlling burr height in Longitudinal-torsional ultrasonic pecking micro-drilling of GH4169 superalloy GH4169高温合金纵扭超声微孔动态轴向力预测模型及毛刺高度控制方法

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-05 DOI: 10.1016/j.precisioneng.2025.12.005

Dingyi Tao , Zhen Yin , Qinglong An , Qing Miao , Chenwei Dai , Ming Zhang , Hua Li , Zehui Liang , Yue Kou

The GH4169 nickel-based superalloy, owing to its outstanding tensile strength, excellent creep resistance, and long fatigue life, has become a key material for manufacturing critical hot-section components in aero-engines, such as turbine blades. When machining the cooling holes on the surface of turbine blades, large axial forces and burrs at the outlet are prone to occur. To overcome the aforementioned problems, a longitudinal–torsional ultrasonic vibration-assisted peck drilling (LTUPD) method is presented in this study. A simulation of the LTUPD drill's cutting-edge motion trajectory is carried out, and the mechanical behavior during the three stages of burr formation is investigated(stable cutting → critical transition → tearing and separation). A dynamic axial force prediction model for burr formation was developed based on discrete cutting-edge modeling and the Johnson–Cook constitutive law. The effects of ultrasonic amplitude, spindle speed, feed rate, and pecking depth on the axial force–burr height relationship were investigated through a series of single-factor experiments. Experimental validation indicates that the axial force prediction model achieves an error within 8 % compared with measurements; Ultrasonic vibration markedly reduces axial force and inhibits burr generation.; A reduction in feed rate and pecking depth leads to lower axial force and burr height; The axial force and burr height decrease with increasing spindle speed up to 9000 r/min, whereas a further increase in speed results in their growth. The optimal drilling conditions were obtained at 9000 r/min spindle speed, 6.3 mm/min feed rate, 6 μm ultrasonic amplitude, and 0.03 mm pecking depth. Using this combination, axial force in LTUPD decreased by 40 %, while burr height was lowered by more than 20 % relative to conventional drilling.

GH4169镍基高温合金因其优异的抗拉强度、优异的抗蠕变性能和较长的疲劳寿命，已成为制造航空发动机关键热截面部件（如涡轮叶片）的关键材料。在加工涡轮叶片表面冷却孔时，容易产生较大的轴向力和出口毛刺。为了克服上述问题，本研究提出了一种纵向-扭转超声振动辅助轻击钻井（LTUPD）方法。对LTUPD钻头的尖端运动轨迹进行了仿真，研究了毛刺形成的三个阶段（稳定切削→临界转变→撕裂分离）的力学行为。基于离散前沿建模和Johnson-Cook本构定律，建立了毛刺形成的动态轴向力预测模型。通过一系列单因素实验，研究了超声振幅、主轴转速、进给速度和攻齿深度对轴向力-毛刺高度关系的影响。实验验证表明，轴向力预测模型与实测值的误差在8%以内；超声振动显著降低轴向力，抑制毛刺的产生；减小进给速度和剔齿深度会降低轴向力和毛刺高度；主轴转速达到9000 r/min时，轴向力和毛刺高度随转速的增加而减小，而转速的进一步增加则导致轴向力和毛刺高度的增大。在主轴转速为9000 r/min、进给速度为6.3 mm/min、超声振幅为6 μm、钻削深度为0.03 mm时，获得了最佳钻削条件。使用这种组合，与常规钻井相比，LTUPD的轴向力降低了40%，毛刺高度降低了20%以上。

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引用次数: 0

In-situ integrated ultrasonic vibration-assisted grain refinement for suppressing anisotropic diamond cutting behavior of polycrystalline Cu 原位集成超声振动辅助晶粒细化抑制多晶铜的各向异性金刚石切削行为

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-05 DOI: 10.1016/j.precisioneng.2025.12.009

Wenxin Zhang , Zhanfeng Wang , Junjie Zhang

While inherent heterogeneous microstructures introduce significant anisotropic machining response of polycrystalline metals, reducing the anisotropy by grain refinement is crucial for achieving the ultrahigh surface integrity. In the present work, we propose an in-situ integrated grain refinement strategy of polycrystalline Cu by firstly ultrasonic vibration-assisted diamond cutting for suppressing the anisotropic cutting behavior in subsequent conventional diamond cutting, the two processes of which are carried out within one experimental setup. Specifically, the promoted propensity and underlying mechanisms of cutting-induced grain refinement within subsurface by vibration assistance are discovered by experiments and multiscale numerical simulations. A maximum decrease of average grain size in subsurface from initial 13.5 μm–5.3 μm accompanied by dislocation glide-dominated dynamic recrystallization is revealed. Subsequent in-situ conventional diamond cutting on the fine-grained Cu yields an ultrasmooth surface formation with significantly suppressed grain boundary surface steps, accompanied with a 71.1 % reduction of surface roughness from its coarse-grained counterpart. Subsequent instrumented nanoindentation tests on retaining refinement layer with a 4 μm thickness demonstrate the enhanced mechanical performance of machined surface of fine-grained Cu in terms of increased hardness and elastic modulus. This study demonstrates the feasibility and effectiveness of applying grain refinement by in-situ integrated vibration-assisted diamond cutting for improving the machining performance of polycrystalline metals.

虽然多晶金属的非均质组织会引起明显的各向异性加工响应，但通过细化晶粒来降低各向异性是实现超高表面完整性的关键。在本工作中，我们首先提出了超声振动辅助金刚石切削多晶铜的原位综合晶粒细化策略，以抑制后续常规金刚石切削的各向异性切削行为，这两个过程在一个实验装置中进行。具体而言，通过实验和多尺度数值模拟发现了振动辅助下切削诱导晶粒细化的倾向和潜在机制。晶粒尺寸从初始的13.5 μm ~ 5.3 μm逐渐减小，并伴有位错滑移主导的动态再结晶。随后在细晶铜上进行原位常规金刚石切割，形成了超光滑的表面，其晶界表面台阶明显受到抑制，表面粗糙度比粗晶铜降低了71.1%。随后对厚度为4 μm的保留细化层进行了纳米压痕测试，结果表明，细晶Cu加工表面的硬度和弹性模量均有所提高。本研究验证了原位集成振动辅助金刚石切削晶粒细化技术提高多晶金属加工性能的可行性和有效性。

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引用次数: 0

Fast prototyping of complex-shaped fused silica micro-optics through diamond turning of silica nanocomposites 利用金刚石车削二氧化硅纳米复合材料快速成型复杂形状熔融二氧化硅微光学元件

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-02 DOI: 10.1016/j.precisioneng.2025.12.002

Ya Xu , Xiaotong Du , Xiaodong Su , Suet To , LiMin Zhu , Zhiwei Zhu

By processing photocurable silica-polymer-based nanocomposites, the additive and subtractive manufacturing techniques have recently emerged as powerful tools for fast prototyping fused silica components with complex structures. However, the inherently low form accuracy and low surface smoothness achieved by current additive and subtractive manufacturing of the nanocomposites prohibit their application in generating fused silica glass optics. To satisfy the requirements for producing high-quality optical surfaces with high efficiency, we proposed an innovative fast-prototyping technique for creating complex-shaped fused silica optics by shaping silica nanocomposites through ultra-precision diamond cutting. Unlike fused silica glass, which has high hardness and low fracture toughness, silica nanocomposites are easier to cut due to the coexistence of soft and ductile polymers. The shaped components are then converted into conforming fused silica optics through high-temperature debinding and sintering. To enable high-performance prototyping of fused silica optics, the silica nanocomposites were first optimized by balancing machinability and sinterability. For the optimized nanocomposites, evolutions of surface micro/nanotopographies and dimensions from cutting to sintering were characterized, and the achievable sizes were investigated by generating micro-gratings with various widths. Finally, a diffractive/refractive hybrid lens and a spherical microlens array were successfully fabricated with further characterization of their optical performance, demonstrating the superiority of the proposed technique for the rapid prototyping of fused silica micro-optics.

通过加工光固化二氧化硅聚合物基纳米复合材料，增材和减材制造技术最近成为快速成型具有复杂结构的熔融二氧化硅组件的有力工具。然而，目前纳米复合材料的加法和减法制造固有的低形状精度和低表面光滑性阻碍了它们在熔融石英玻璃光学器件中的应用。为了满足高质量光学表面的高效率生产需求，提出了一种创新的快速成型技术，通过超精密金刚石切割成型二氧化硅纳米复合材料，制造复杂形状的熔融二氧化硅光学材料。不同于熔融石英玻璃的高硬度和低断裂韧性，二氧化硅纳米复合材料由于柔软和延展性聚合物的共存而更容易切割。然后通过高温脱脂和烧结将成形的组件转化为合格的熔融硅光学元件。为了实现熔融二氧化硅光学元件的高性能原型，首先通过平衡可加工性和烧结性对二氧化硅纳米复合材料进行了优化。对于优化后的纳米复合材料，表征了从切割到烧结过程中表面微纳米形貌和尺寸的演变，并通过生成不同宽度的微光栅来研究可实现的尺寸。最后，成功制备了一个衍射/折射混合透镜和一个球形微透镜阵列，并对其光学性能进行了进一步的表征，证明了该技术在熔融石英微光学器件快速成型中的优越性。

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引用次数: 0

Repeatability of stylus measurements in a multiscale approach 多尺度方法中手写笔测量的可重复性

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-12-01 DOI: 10.1016/j.precisioneng.2025.12.001

Damian Gogolewski

This paper describes a method for assessing the repeatability of stylus measurements based on a direct comparison of the profiles measured without shifting the position of a sample. The analysis was conducted based on ISO 21920–2, H-H plots, coefficient of determination R² and using Wavelet coherence analysis. The samples for research were manufactured using two technologies to ensure different surface topographies and to verify the method on a wide spectrum. The conducted analysis showed a high correlation (R² > 0.97) between measurements with differences in profiles for subsequent measurements in relation to the scale. The application of the multiscale method allowed for recording the occurrence of differences (for scale up to 64 μm) and to define the place and potential reason for their occurrence, which was not possible with the use of classical parametric assessment. A different mapping of selected morphological features, as well as a profile shifts in subsequent measurements were also noted. The research has the potential for practical use in both the research field and industrial applications, and can contribute to supplementing the current standards.

本文描述了一种基于直接比较测量的轮廓而不移动样品位置的手写笔测量的可重复性评估方法。基于ISO 21920-2、H-H图、确定系数R2和小波相干分析进行分析。用于研究的样品是使用两种技术制造的，以确保不同的表面形貌，并在广泛的光谱上验证该方法。所进行的分析显示，测量值与与量表相关的后续测量值的轮廓差异之间存在高相关性（R2 > 0.97）。多尺度方法的应用允许记录差异的发生（尺度可达64 μm），并定义其发生的位置和潜在原因，这是使用经典参数评估无法实现的。所选形态特征的不同映射，以及随后测量中的剖面移位也被注意到。该研究在研究领域和工业应用方面都有实际应用的潜力，并有助于补充现行标准。

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引用次数: 0

Hybrid reluctance-actuated Stewart platform for high-precision position control 用于高精度位置控制的混合磁阻驱动Stewart平台

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-03-01 Epub Date: 2025-11-19 DOI: 10.1016/j.precisioneng.2025.11.021

Christian Haider, Damian Senoner, Andreas Sinn, Adis Husanović, Benjamin Friedl, Georg Schitter

This paper presents a Stewart platform with hybrid reluctance-actuated struts to achieve six-degrees-of-freedom motion capability. Tailored hybrid reluctance actuators (HRAs) are integrated into a novel strut design to achieve axial force transmission to the Stewart platform’s end effector via flexure-based joints. Each actuator has a motion range of

\pm

1 mm, leading to a platform workspace of

\pm

1.34 mm along the vertical z-axis and

\pm

1.1 mm in x- and y-direction. The rotational range amounts to

\pm

0.66°/0.78° for tip/tilt motion. By implementation of a MIMO decoupling approach using canonical polyadic decomposition (CPD), position control bandwidths of up to 30 Hz are reached in the task space. The platform achieves millimeter stroke with sub-micrometer translational resolution (45 nm RMS), sub-microradian angular resolution (300 nrad RMS) and a bidirectional repeatability (1

σ

) of 0.15–0.32 µm and 3.5–4.8 µrad. The overall positioning accuracy (RMSE), quantified against external interferometric measurements, amounts to 1-2.3 µm in translation and 11–15 µrad in rotation.

提出了一种具有混合勉力杆的Stewart平台，实现了六自由度的运动能力。定制的混合磁阻执行器（HRAs）集成到一种新颖的支柱设计中，通过基于柔性的关节将轴向力传递到Stewart平台的末端执行器。每个驱动器的运动范围为±1mm，导致平台工作空间沿垂直z轴为±1.34 mm， x和y方向为±1.1 mm。旋转范围为±0.66°/0.78°的尖端/倾斜运动。通过使用典型多进分解（CPD）实现MIMO解耦方法，在任务空间中达到高达30 Hz的位置控制带宽。该平台实现了亚微米平移分辨率（45 nm RMS）、亚微米角分辨率（300 nrad RMS）的毫米行程，双向重复性（1σ）为0.15-0.32µm和3.5-4.8µrad。总体定位精度（RMSE），根据外部干涉测量量化，平移量为1-2.3µm，旋转量为11-15µrad。

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引用次数: 0

Modeling and analysis of forces in laser-assisted micro-milling Inconel 718 under softening effects and size effects 软化效应和尺寸效应下激光辅助微铣削Inconel 718的受力建模与分析

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-10-30 DOI: 10.1016/j.precisioneng.2025.10.024

Chen Cong , Xiaohong Lu , Ying Chen , Xiuqing Hao , Wentian Shi , Steven Y. Liang

Inconel 718 is a critical material in aerospace, energy, and power sectors for manufacturing micro-components because of its exceptional properties such as high-temperature strength, thermal stability, and resistance to thermal fatigue. It is also a typically difficult-to-machine material. Laser-assisted micro-milling (LAMM) is a potentially effective processing method for such materials. However, the elevated temperatures induced by the laser can alter the material properties within the cutting zone. Coupled with the size effects inherent to micro-milling, this gives rise to highly complex fluctuations in cutting forces that are difficult to characterize accurately. To this end, the traditional Johnson-Cook (JC) constitutive model is modified by comprehensively considering the thermal softening effects and size effects. A cutting force prediction model for LAMM is established based on the mechanical analysis of different deformation zones. Cutting experiments are conducted to verify the accuracy of the cutting force model. The model simulation shows that the maximum errors of the three-directional forces are 9.84 %, 7.12 %, and 11.2 % respectively. The proposed force prediction model provides robust theoretical support for subsequent tool wear monitoring and machining accuracy control in LAMM processes.

因科乃尔718具有优异的性能，如高温强度、热稳定性和抗热疲劳性能，是航空航天、能源和电力领域制造微型部件的关键材料。它也是一种典型的难以加工的材料。激光辅助微铣削（LAMM）是一种潜在的有效的加工方法。然而，激光引起的高温会改变切割区内的材料性能。再加上微铣削固有的尺寸效应，这导致了切削力高度复杂的波动，难以准确表征。为此，综合考虑热软化效应和尺寸效应，对传统的Johnson-Cook （JC）本构模型进行了修正。在对不同变形区进行力学分析的基础上，建立了LAMM的切削力预测模型。通过切削实验验证了切削力模型的准确性。模型仿真结果表明，三方向力的最大误差分别为9.84%、7.12%和11.2%。提出的力预测模型为后续的刀具磨损监测和加工精度控制提供了有力的理论支持。

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引用次数: 0

Sustainable micro-milling of Ti6Al4V: Role of MoS2 and CuO nanofluids in minimum quantity lubrication Ti6Al4V的可持续微铣削：MoS2和CuO纳米流体在最小量润滑中的作用

IF 3.7 2区工程技术 Q2 ENGINEERING, MANUFACTURING

Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology

Pub Date : 2026-01-01 Epub Date: 2025-09-22 DOI: 10.1016/j.precisioneng.2025.09.020

Hamed Hassanpour , Amir Rasti , Sina Sabbaghi Farshi , Hossein Sabzi

The current research explores how various nano minimum quantity lubrication (NMQL) techniques impact surface integrity in the micro-milling of Ti6Al4V. Accordingly, three combinations including MQL, NMQL + CuO, and NMQL + MoS₂ were evaluated across three different spindle speeds. Surface roughness was assessed using areal surface roughness (Sa). Findings show that increasing spindle speeds up to 32,000 rpm leads to lower Sa values across all lubrication methods. The inclusion of nanoparticles like MoS₂ enhances surface finish, with a significant reductions in Sa of 21 %. Increasing spindle speed from 16,000 to 32,000 rpm also effectively decreases burr width. Among the methods, NMQL + MoS₂ achieved the smallest burr width of approximately 110 μm. Furthermore, surface hardness increased under all test conditions, with NMQL + MoS₂ achieving the highest hardness. White layer formation is one of the challenges of micromachining. Regarding of the thickness of this layer, NMQL + MoS₂ showed the thinnest layer, and at 32,000 rpm, the white layer was completely removed. It also proves that white layer can be totally eliminated by optimizing cutting parameters under NMQL condition. Corrosion resistance evaluation revealed that NMQL + CuO had the highest resistance. Overall, the findings suggest that adding nanoparticles, particularly MoS₂, to the MQL system can significantly enhance surface properties during the micro-milling of Ti6Al4V alloy, offering a viable solution for a consistent and high-quality micro-milling process.

目前的研究探讨了各种纳米最小量润滑（NMQL）技术对Ti6Al4V微铣削表面完整性的影响。因此，在三种不同主轴转速下，对MQL、NMQL + CuO和NMQL + MoS2三种组合进行了评估。使用面表面粗糙度（Sa）评估表面粗糙度。研究结果表明，将主轴转速提高到32,000 rpm会降低所有润滑方法的Sa值。MoS2等纳米颗粒的加入提高了表面光洁度，Sa显著降低了21%。将主轴转速从16,000转增加到32,000转，也有效地减少毛刺宽度。其中，NMQL + MoS2的毛刺宽度最小，约为110 μm。此外，在所有测试条件下，表面硬度都有所增加，其中NMQL + MoS2的硬度最高。白层的形成是微加工的难题之一。在这一层的厚度上，NMQL + MoS2是最薄的一层，在32,000 rpm时，白色层被完全去除。同时也证明了在NMQL条件下，通过优化切削参数可以完全消除白层。耐蚀性评价表明，NMQL + CuO的耐蚀性最高。总体而言，研究结果表明，在MQL体系中添加纳米颗粒，特别是MoS2，可以显著提高Ti6Al4V合金微铣削过程中的表面性能，为实现一致和高质量的微铣削工艺提供了可行的解决方案。

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