Pub Date : 2025-12-01DOI: 10.1016/j.precisioneng.2025.12.001
Damian Gogolewski
This paper describes a method for assessing the repeatability of stylus measurements based on a direct comparison of the profiles measured without shifting the position of a sample. The analysis was conducted based on ISO 21920–2, H-H plots, coefficient of determination R2 and using Wavelet coherence analysis. The samples for research were manufactured using two technologies to ensure different surface topographies and to verify the method on a wide spectrum. The conducted analysis showed a high correlation (R2 > 0.97) between measurements with differences in profiles for subsequent measurements in relation to the scale. The application of the multiscale method allowed for recording the occurrence of differences (for scale up to 64 μm) and to define the place and potential reason for their occurrence, which was not possible with the use of classical parametric assessment. A different mapping of selected morphological features, as well as a profile shifts in subsequent measurements were also noted. The research has the potential for practical use in both the research field and industrial applications, and can contribute to supplementing the current standards.
{"title":"Repeatability of stylus measurements in a multiscale approach","authors":"Damian Gogolewski","doi":"10.1016/j.precisioneng.2025.12.001","DOIUrl":"10.1016/j.precisioneng.2025.12.001","url":null,"abstract":"<div><div>This paper describes a method for assessing the repeatability of stylus measurements based on a direct comparison of the profiles measured without shifting the position of a sample. The analysis was conducted based on ISO 21920–2, H-H plots, coefficient of determination R<sup>2</sup> and using Wavelet coherence analysis. The samples for research were manufactured using two technologies to ensure different surface topographies and to verify the method on a wide spectrum. The conducted analysis showed a high correlation (R<sup>2</sup> > 0.97) between measurements with differences in profiles for subsequent measurements in relation to the scale. The application of the multiscale method allowed for recording the occurrence of differences (for scale up to 64 μm) and to define the place and potential reason for their occurrence, which was not possible with the use of classical parametric assessment. A different mapping of selected morphological features, as well as a profile shifts in subsequent measurements were also noted. The research has the potential for practical use in both the research field and industrial applications, and can contribute to supplementing the current standards.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 87-95"},"PeriodicalIF":3.7,"publicationDate":"2025-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145684905","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-27DOI: 10.1016/j.precisioneng.2025.11.027
Weipeng Li , Weidong Yu , Zhengyan Dai , Yukai Zhu , Guangyuan Wang , Xiantao Li
The nonlinearity of hybrid reluctance actuators (HRA) significantly restricts their applications in XY stage requiring long stroke, high bandwidth, and high precision. This paper presents an improved design methodology and experimental verification focusing on nonlinearity reduction of a XY stage based on hybrid reluctance actuators (HRA-XYS). Initially, the primary sources of nonlinearity in conventional HRA were analyzed, leading to a magnetic flux topological optimization approach for nonlinearity mitigation. Subsequently, a comprehensive dynamic model incorporating nonlinear characteristics was established, followed by a nonlinear optimization framework for key parameter design. Based on the optimization results, a prototype was fabricated for comprehensive performance evaluation and a proportional-derivative (PD)-based feedback compensator was implemented to extend bandwidth by actively modifying system stiffness and damping. Experimental results demonstrate significant improvements: nonlinearity <3.2 %, cross-axis coupling <0.4 %, positioning accuracy better than 0.1 μm, working stroke exceeding ±500 μm, and bandwidth of 375 Hz. These achievements verify the effectiveness of the proposed linearity-oriented design methodology and underscore its advance compared to similar works, indicating that the optimized actuator exhibits superior comprehensive performance in precision, stroke capability, and dynamic response characteristics.
{"title":"Linearization design of a XY stage based on hybrid reluctance actuators","authors":"Weipeng Li , Weidong Yu , Zhengyan Dai , Yukai Zhu , Guangyuan Wang , Xiantao Li","doi":"10.1016/j.precisioneng.2025.11.027","DOIUrl":"10.1016/j.precisioneng.2025.11.027","url":null,"abstract":"<div><div>The nonlinearity of hybrid reluctance actuators (HRA) significantly restricts their applications in XY stage requiring long stroke, high bandwidth, and high precision. This paper presents an improved design methodology and experimental verification focusing on nonlinearity reduction of a XY stage based on hybrid reluctance actuators (HRA-XYS). Initially, the primary sources of nonlinearity in conventional HRA were analyzed, leading to a magnetic flux topological optimization approach for nonlinearity mitigation. Subsequently, a comprehensive dynamic model incorporating nonlinear characteristics was established, followed by a nonlinear optimization framework for key parameter design. Based on the optimization results, a prototype was fabricated for comprehensive performance evaluation and a proportional-derivative (PD)-based feedback compensator was implemented to extend bandwidth by actively modifying system stiffness and damping. Experimental results demonstrate significant improvements: nonlinearity <3.2 %, cross-axis coupling <0.4 %, positioning accuracy better than 0.1 μm, working stroke exceeding ±500 μm, and bandwidth of 375 Hz. These achievements verify the effectiveness of the proposed linearity-oriented design methodology and underscore its advance compared to similar works, indicating that the optimized actuator exhibits superior comprehensive performance in precision, stroke capability, and dynamic response characteristics.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 178-190"},"PeriodicalIF":3.7,"publicationDate":"2025-11-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145737213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-24DOI: 10.1016/j.precisioneng.2025.11.026
Yongjun Wang , Wan Fang , Ke Zhang , Zhengyu Wang , Chengyao Zhang , Xiaojuan Mo , Zhenying Cheng , Ruijun Li
Structural deformations caused by environmental temperature fluctuations and local heat sources are the primary factors affecting the accuracy of high-precision instruments. An optimal method based on a multi-objective genetic algorithm has been proposed and demonstrated to enhance thermal stability in interferometers. A mathematical model relating the thermal error of the interferometer to temperature fluctuations and the uniformity of the temperature field is established. Finite element analysis is conducted to evaluate the overall temperature distribution of the interferometers. The temperature field is optimized using a multi-objective genetic algorithm, and stability experiments are carried out on the interferometers both before and after optimization. As a result, the temperature fluctuation of the interferometer is reduced by 60.6 %, while temperature field uniformity and interferometer stability are improved by 55.9 % and 55.1 %, respectively. The experimental results indicate that the temperature field optimization method based on NSGA-II effectively improves the thermal stability of interferometers.
{"title":"Thermal error modeling and multi-objective optimization design to enhance the thermal stability of interferometers","authors":"Yongjun Wang , Wan Fang , Ke Zhang , Zhengyu Wang , Chengyao Zhang , Xiaojuan Mo , Zhenying Cheng , Ruijun Li","doi":"10.1016/j.precisioneng.2025.11.026","DOIUrl":"10.1016/j.precisioneng.2025.11.026","url":null,"abstract":"<div><div>Structural deformations caused by environmental temperature fluctuations and local heat sources are the primary factors affecting the accuracy of high-precision instruments. An optimal method based on a multi-objective genetic algorithm has been proposed and demonstrated to enhance thermal stability in interferometers. A mathematical model relating the thermal error of the interferometer to temperature fluctuations and the uniformity of the temperature field is established. Finite element analysis is conducted to evaluate the overall temperature distribution of the interferometers. The temperature field is optimized using a multi-objective genetic algorithm, and stability experiments are carried out on the interferometers both before and after optimization. As a result, the temperature fluctuation of the interferometer is reduced by 60.6 %, while temperature field uniformity and interferometer stability are improved by 55.9 % and 55.1 %, respectively. The experimental results indicate that the temperature field optimization method based on NSGA-II effectively improves the thermal stability of interferometers.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 63-74"},"PeriodicalIF":3.7,"publicationDate":"2025-11-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618674","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-22DOI: 10.1016/j.precisioneng.2025.11.025
Zhifu Ma, Yong Lu, Kenan Deng
High-precision surface reconstruction is crucial for freeform surface measurement, and the Non-Uniform Rational B-Spline (NURBS) surface fitting is widely used in this process. To improve the NURBS surface fitting accuracy based on sparse and unstructured contact measurement data, this paper proposes a freeform surface reconstruction method that integrates NURBS surface fitting with iterative control point coordinate optimization. The proposed method begins by employing cubic spline interpolation to generate uniformly spaced fitting points from measurement data. Then, the fitting point is parameterized by chord length parameterization and the initial NURBS surface parameter is obtained with least squares fitting. Subsequently, an iterative control point coordinate optimization strategy is applied to reconstruct the surface. In this strategy, the distance between measurement points and the fitted NURBS surface is calculated, and then a new index, the sum of local squared distances (SLSD) is introduced. According to the calculated SLSD, the NURBS surface is reconstructed locally and iteratively by optimizing the control point coordinates corresponding to the max SLSD. With the proposed strategy, only one control point is optimized at a time, and the parameterization results of measurement points within the influence region of the control point are optimized simultaneously. Experiment result shows that the reconstruction accuracy of the proposed method is higher than 0.02 mm.
{"title":"NURBS-based freeform surface reconstruction from sparse and unstructured contact measurement data using iterative control point optimization","authors":"Zhifu Ma, Yong Lu, Kenan Deng","doi":"10.1016/j.precisioneng.2025.11.025","DOIUrl":"10.1016/j.precisioneng.2025.11.025","url":null,"abstract":"<div><div>High-precision surface reconstruction is crucial for freeform surface measurement, and the Non-Uniform Rational B-Spline (NURBS) surface fitting is widely used in this process. To improve the NURBS surface fitting accuracy based on sparse and unstructured contact measurement data, this paper proposes a freeform surface reconstruction method that integrates NURBS surface fitting with iterative control point coordinate optimization. The proposed method begins by employing cubic spline interpolation to generate uniformly spaced fitting points from measurement data. Then, the fitting point is parameterized by chord length parameterization and the initial NURBS surface parameter is obtained with least squares fitting. Subsequently, an iterative control point coordinate optimization strategy is applied to reconstruct the surface. In this strategy, the distance between measurement points and the fitted NURBS surface is calculated, and then a new index, the sum of local squared distances (SLSD) is introduced. According to the calculated SLSD, the NURBS surface is reconstructed locally and iteratively by optimizing the control point coordinates corresponding to the max SLSD. With the proposed strategy, only one control point is optimized at a time, and the parameterization results of measurement points within the influence region of the control point are optimized simultaneously. Experiment result shows that the reconstruction accuracy of the proposed method is higher than 0.02 mm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 37-48"},"PeriodicalIF":3.7,"publicationDate":"2025-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618676","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-22DOI: 10.1016/j.precisioneng.2025.11.023
Shuying Yang , Lei Zheng , Jiju Guan , Weifang Chen , Rupeng Zhu
As critical transmission components in aero-engines, hard-tooth-surface involute helical cylindrical gears require precise control of surface morphology to ensure high-quality manufacturing with minimized subsurface damage. The complexity of form grinding processes arises from intricate wheel-workpiece spatial kinematics and heterogeneous local contact geometries, which challenge the prediction of chip formation mechanisms and resultant surface topography. This study presents a numerical calculation model to characterize surface morphology in helical gear form grinding. By analyzing localized contact conditions and geometric mapping relationships, the abrasive grain trajectories were mathematically formulated through a spatial helical motion model. The helical tooth surface was discretized to calculate undeformed chip thickness along the normal direction, enabling the reconstruction of three-dimensional surface morphology. Experimental validation using manufactured specimens confirmed the accuracy of the model, with further investigation revealing non-uniform surface distribution characteristics. Key findings demonstrate that surface roughness along the involute profile increases with rolling angle, exhibiting negative correlation with wheel speed, while positively correlating with feed rate and grinding depth. The proposed model provides a theoretical foundation for optimizing helical gear grinding parameters and enhancing in-service performance through surface integrity control.
{"title":"Mechanism-based prediction of helical gear grinding Surface roughness: Integrated modeling of spatial kinematics and abrasive trajectory effects","authors":"Shuying Yang , Lei Zheng , Jiju Guan , Weifang Chen , Rupeng Zhu","doi":"10.1016/j.precisioneng.2025.11.023","DOIUrl":"10.1016/j.precisioneng.2025.11.023","url":null,"abstract":"<div><div>As critical transmission components in aero-engines, hard-tooth-surface involute helical cylindrical gears require precise control of surface morphology to ensure high-quality manufacturing with minimized subsurface damage. The complexity of form grinding processes arises from intricate wheel-workpiece spatial kinematics and heterogeneous local contact geometries, which challenge the prediction of chip formation mechanisms and resultant surface topography. This study presents a numerical calculation model to characterize surface morphology in helical gear form grinding. By analyzing localized contact conditions and geometric mapping relationships, the abrasive grain trajectories were mathematically formulated through a spatial helical motion model. The helical tooth surface was discretized to calculate undeformed chip thickness along the normal direction, enabling the reconstruction of three-dimensional surface morphology. Experimental validation using manufactured specimens confirmed the accuracy of the model, with further investigation revealing non-uniform surface distribution characteristics. Key findings demonstrate that surface roughness along the involute profile increases with rolling angle, exhibiting negative correlation with wheel speed, while positively correlating with feed rate and grinding depth. The proposed model provides a theoretical foundation for optimizing helical gear grinding parameters and enhancing in-service performance through surface integrity control.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 49-62"},"PeriodicalIF":3.7,"publicationDate":"2025-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-22DOI: 10.1016/j.precisioneng.2025.11.022
Kaiji Sato, Mizuki Takeda
The growing demand for automation and labor-saving solutions has intensified interest in digital technology applications that replicate real-world systems and utilize analytical results in physical settings. Fulfilling these needs requires the development of a high-precision simulator that can be automatically and effortlessly generated from data easily obtainable from a physical machine. This paper proposes an innovative method for generating a precision simulator for motion systems. The proposed method uses feedforward elements derived through our feedforward design methodology. In this approach, following a specified procedure, a learning controller distinguishes four operational characteristics based on specific types of motion profiles, and the derived elements are combined according to predetermined rules to produce a simulator. We applied this method to a ball-screw mechanism and assessed the performance of the generated simulator by comparing it with experimental data. In the experimental setup, we observed position-dependent submicrometer vibrations, which cannot be represented by conventional mechanical models. The simulator, constructed by combining FF elements from high-resolution measured or reconstructed data, replicated vibrations with similar frequencies. However, its ability to effectively mimic certain responses, including the observed submicrometer vibrations, was limited. Notably, the vibration amplitude varied with velocity. Nevertheless, the results demonstrated that straightforward refinement of the simulator generation process could produce a simulator with high simulation accuracy.
{"title":"Practical simulator generation using a simple feedforward element design method for precision motion systems abbreviated title: Practical precision simulator generation","authors":"Kaiji Sato, Mizuki Takeda","doi":"10.1016/j.precisioneng.2025.11.022","DOIUrl":"10.1016/j.precisioneng.2025.11.022","url":null,"abstract":"<div><div>The growing demand for automation and labor-saving solutions has intensified interest in digital technology applications that replicate real-world systems and utilize analytical results in physical settings. Fulfilling these needs requires the development of a high-precision simulator that can be automatically and effortlessly generated from data easily obtainable from a physical machine. This paper proposes an innovative method for generating a precision simulator for motion systems. The proposed method uses feedforward elements derived through our feedforward design methodology. In this approach, following a specified procedure, a learning controller distinguishes four operational characteristics based on specific types of motion profiles, and the derived elements are combined according to predetermined rules to produce a simulator. We applied this method to a ball-screw mechanism and assessed the performance of the generated simulator by comparing it with experimental data. In the experimental setup, we observed position-dependent submicrometer vibrations, which cannot be represented by conventional mechanical models. The simulator, constructed by combining FF elements from high-resolution measured or reconstructed data, replicated vibrations with similar frequencies. However, its ability to effectively mimic certain responses, including the observed submicrometer vibrations, was limited. Notably, the vibration amplitude varied with velocity. Nevertheless, the results demonstrated that straightforward refinement of the simulator generation process could produce a simulator with high simulation accuracy.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 13-26"},"PeriodicalIF":3.7,"publicationDate":"2025-11-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145618677","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-21DOI: 10.1016/j.precisioneng.2025.11.024
Mingcai Xing , Zhenwen Cheng , Shuo Liu , Meide Yang
In this work, the multi-roller statics model of planetary roller screw mechanism (PRSM) considering the lubrication performance is established. The effects of oil film stiffness on multi-roller statics characteristics are investigated. The thread-pair oil film stiffness on screw-roller side (SRS) and nut-roller side (NRS) are described, and the thread-pair engagement stiffness with oil film is calculated. The thread-pair load distribution (TPLD) on SRS and NRS with and without lubrication are compared for PRSM. Furthermore, the influences of lubrication performance on the multi-roller load sharing (MRLS) and TPLD with pitch error, roller nominal diameter error (RNDE), screw eccentric error (SEE) and nut eccentric error (NEE) are studied. It is found that the lubrication performance reduces the uniformity of MRLS and TPLD.
{"title":"Effects of lubrication performance on multi-roller statics characteristics of planetary roller screw mechanism with errors","authors":"Mingcai Xing , Zhenwen Cheng , Shuo Liu , Meide Yang","doi":"10.1016/j.precisioneng.2025.11.024","DOIUrl":"10.1016/j.precisioneng.2025.11.024","url":null,"abstract":"<div><div>In this work, the multi-roller statics model of planetary roller screw mechanism (PRSM) considering the lubrication performance is established. The effects of oil film stiffness on multi-roller statics characteristics are investigated. The thread-pair oil film stiffness on screw-roller side (SRS) and nut-roller side (NRS) are described, and the thread-pair engagement stiffness with oil film is calculated. The thread-pair load distribution (TPLD) on SRS and NRS with and without lubrication are compared for PRSM. Furthermore, the influences of lubrication performance on the multi-roller load sharing (MRLS) and TPLD with pitch error, roller nominal diameter error (RNDE), screw eccentric error (SEE) and nut eccentric error (NEE) are studied. It is found that the lubrication performance reduces the uniformity of MRLS and TPLD.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"98 ","pages":"Pages 1-12"},"PeriodicalIF":3.7,"publicationDate":"2025-11-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145584614","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-19DOI: 10.1016/j.precisioneng.2025.11.019
Jun Zha , Kai Cheng , Dongxu Wu , Huijie Zhang , Fei Xue
Hydrostatic bearings play an indispensable role in high precision machines and equipment such as precision machine tools, measuring instruments, optical equipment, and large-scale scientific facilities, owing to their high precision potential, high stiffness, high damping, low friction, and high loading capacity. However, the error motion of hydrostatic bearings as defined indicates the deviation of their actual motion trajectory or altitude from their ideal state, which is a key factor limiting their performance and the ultimate accuracy of the precision machines and equipment they support. This paper provides a systematic and comprehensive review and the insights on the research and development progress of hydrostatic bearing error motions in the contexts of past, present and the future. Firstly, it elaborates in details on the definition, classification, and standardized characterization and evaluation metrics of hydrostatic bearing error motions. Secondly, it provides an in-depth analysis of the main generation mechanisms of the error motions. Building upon this, it further reviews and categorizes the modeling and analysis methods for the error motions, and systematically formulates and summarizes their suppression and control strategies. Finally, it discusses the existing scientific and technological challenges, and highlights the future research trends and directions. This review aims to provide researchers and engineering practitioners with a comprehensive overview of the current research status, key enabling technologies, and future trends in hydrostatic bearing error motions. It is also intended to promote further improvements in the motion accuracy of hydrostatic bearings and thus enhance their further development in precision engineering applications with higher precision and accuracy requirements particularly in an industrial scale.
{"title":"Error motions in hydrostatic bearings: Mechanisms, analysis, and control","authors":"Jun Zha , Kai Cheng , Dongxu Wu , Huijie Zhang , Fei Xue","doi":"10.1016/j.precisioneng.2025.11.019","DOIUrl":"10.1016/j.precisioneng.2025.11.019","url":null,"abstract":"<div><div>Hydrostatic bearings play an indispensable role in high precision machines and equipment such as precision machine tools, measuring instruments, optical equipment, and large-scale scientific facilities, owing to their high precision potential, high stiffness, high damping, low friction, and high loading capacity. However, the error motion of hydrostatic bearings as defined indicates the deviation of their actual motion trajectory or altitude from their ideal state, which is a key factor limiting their performance and the ultimate accuracy of the precision machines and equipment they support. This paper provides a systematic and comprehensive review and the insights on the research and development progress of hydrostatic bearing error motions in the contexts of past, present and the future. Firstly, it elaborates in details on the definition, classification, and standardized characterization and evaluation metrics of hydrostatic bearing error motions. Secondly, it provides an in-depth analysis of the main generation mechanisms of the error motions. Building upon this, it further reviews and categorizes the modeling and analysis methods for the error motions, and systematically formulates and summarizes their suppression and control strategies. Finally, it discusses the existing scientific and technological challenges, and highlights the future research trends and directions. This review aims to provide researchers and engineering practitioners with a comprehensive overview of the current research status, key enabling technologies, and future trends in hydrostatic bearing error motions. It is also intended to promote further improvements in the motion accuracy of hydrostatic bearings and thus enhance their further development in precision engineering applications with higher precision and accuracy requirements particularly in an industrial scale.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1060-1086"},"PeriodicalIF":3.7,"publicationDate":"2025-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578683","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-19DOI: 10.1016/j.precisioneng.2025.11.020
Joffray Guillory , Jean-Pierre Wallerand , Daniel Truong , Ben Sargeant , Charles Richards , Stuart Robson , Asier García Berdote , Pablo Puerto , Pierre-Elie Hervé , Marc Gouttefarde
Improving the positioning accuracy of cable-driven parallel robots (CDPRs) is crucial for industrial applications. These robots, operating in large volumes and handling heavy loads, have an accuracy limited by several factors, such as variations in ambient temperature or changes of the load being transported, which affect the mechanical structure of the robot or the tensions in the cables. For instance, CoGiRo is a CDPR of dimensions of 11 m × 15 m × 6 m able to move a platform weighing up to 500 kg. Its resolution is a few tens of micrometres, but its positioning, estimated from the winch encoders, lacks accuracy. To accurately place the CoGiRo mobile platform in the desired position and orientation, this paper proposes to use multilateration and photogrammetric measurement systems in a collaborative way. Photogrammetry continuously measured the poses of the mobile platform with worst-case coordinate uncertainties in the depth direction moving away from the cameras, with 0.2 mm being typical for all lines of sight, dropping to 0.5 mm where lines of sight were blocked by occlusion. The photogrammetric system reported poses at 2 Hz to the multilateration system, enabling it to align its stations on the distant targets and measure static poses of the platform with an estimated uncertainty typically less than 70 μm for the position coordinates and less than 110 μrad for the orientation angles. Multilateration measurements were then used by CoGiRo to reduce its positioning errors to less than 250 μm. The technique was validated using a practical assembly of two square-shaped metallic parts equipped with 10 independent capacitive distance sensors that allowed us to demonstrate part alignment to better than 250 μm.
{"title":"Positioning of a cable-driven parallel robot at better than 250 μm using multilateration and photogrammetric measurement systems","authors":"Joffray Guillory , Jean-Pierre Wallerand , Daniel Truong , Ben Sargeant , Charles Richards , Stuart Robson , Asier García Berdote , Pablo Puerto , Pierre-Elie Hervé , Marc Gouttefarde","doi":"10.1016/j.precisioneng.2025.11.020","DOIUrl":"10.1016/j.precisioneng.2025.11.020","url":null,"abstract":"<div><div>Improving the positioning accuracy of cable-driven parallel robots (CDPRs) is crucial for industrial applications. These robots, operating in large volumes and handling heavy loads, have an accuracy limited by several factors, such as variations in ambient temperature or changes of the load being transported, which affect the mechanical structure of the robot or the tensions in the cables. For instance, CoGiRo is a CDPR of dimensions of 11 m × 15 m × 6 m able to move a platform weighing up to 500 kg. Its resolution is a few tens of micrometres, but its positioning, estimated from the winch encoders, lacks accuracy. To accurately place the CoGiRo mobile platform in the desired position and orientation, this paper proposes to use multilateration and photogrammetric measurement systems in a collaborative way. Photogrammetry continuously measured the poses of the mobile platform with worst-case coordinate uncertainties in the depth direction moving away from the cameras, with 0.2 mm being typical for all lines of sight, dropping to 0.5 mm where lines of sight were blocked by occlusion. The photogrammetric system reported poses at 2 Hz to the multilateration system, enabling it to align its stations on the distant targets and measure static poses of the platform with an estimated uncertainty typically less than 70 μm for the position coordinates and less than 110 μrad for the orientation angles. Multilateration measurements were then used by CoGiRo to reduce its positioning errors to less than 250 μm. The technique was validated using a practical assembly of two square-shaped metallic parts equipped with 10 independent capacitive distance sensors that allowed us to demonstrate part alignment to better than 250 μm.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1087-1108"},"PeriodicalIF":3.7,"publicationDate":"2025-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145623799","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-11-19DOI: 10.1016/j.precisioneng.2025.11.015
Qi Wang , Dahoon Ahn , Yang Zhang , Peng Yan , Ziran Wang
Bionic stepping piezoelectric actuators such as stick–slip or inchworm actuators demonstrate important applications in semiconductor manufacturing and active optics, where high-speed and high-precision motion capabilities, as well as load performance, often involve a trade-off arising from distinct actuation mechanisms. This study proposes a compact piezoelectric actuator based on biomimetic driving principles combining the advantages of stick–slip and inchworm actuations by employing only two piezoelectric stack units. The design comprises a multifunctional driving foot based on a flexible triangular mechanism and a clamping foot based on a spring hinge. The asymmetrical structure features displacement amplification and enables combined lateral and coupling motions, supporting a hybrid driving principle to achieve both stick–slip and inchworm motions from a performance perspective. A prototype of the designed piezoelectric actuator was fabricated to verify its feasibility and performance. The experimental results show that the actuator achieves a maximum speed of 52.89 mm/s and a maximum output force of 24.52 N, with a motion resolution of 23 nm, which significantly outperform existing results in the literature.
{"title":"A high performance hybrid-driven piezoelectric actuator based on asymmetrical structure with combined lateral and coupling motions","authors":"Qi Wang , Dahoon Ahn , Yang Zhang , Peng Yan , Ziran Wang","doi":"10.1016/j.precisioneng.2025.11.015","DOIUrl":"10.1016/j.precisioneng.2025.11.015","url":null,"abstract":"<div><div>Bionic stepping piezoelectric actuators such as stick–slip or inchworm actuators demonstrate important applications in semiconductor manufacturing and active optics, where high-speed and high-precision motion capabilities, as well as load performance, often involve a trade-off arising from distinct actuation mechanisms. This study proposes a compact piezoelectric actuator based on biomimetic driving principles combining the advantages of stick–slip and inchworm actuations by employing only two piezoelectric stack units. The design comprises a multifunctional driving foot based on a flexible triangular mechanism and a clamping foot based on a spring hinge. The asymmetrical structure features displacement amplification and enables combined lateral and coupling motions, supporting a hybrid driving principle to achieve both stick–slip and inchworm motions from a performance perspective. A prototype of the designed piezoelectric actuator was fabricated to verify its feasibility and performance. The experimental results show that the actuator achieves a maximum speed of 52.89 mm/s and a maximum output force of 24.52 N, with a motion resolution of 23 nm, which significantly outperform existing results in the literature.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"97 ","pages":"Pages 1049-1059"},"PeriodicalIF":3.7,"publicationDate":"2025-11-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145578682","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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