Multi-degree-of-freedom (M-DOF) actuation technology has garnered extensive research and applications in precision positioning, optical alignment, and biomedical manipulation due to its salient advantages of flexible motion, high integration, and reliability. Advancements in novel materials have facilitated the development of M-DOF actuators based on diverse driving principles. Compared with other actuation mechanisms, M-DOF piezoelectric actuators have become a critical solution for performance enhancement and holistic optimization of precision actuation systems. Their compact structure, rapid response, high precision, low-speed high-torque capability, and electromagnetic interference-free operation have attracted significant attention. This paper provides a comprehensive review of research progress in M-DOF piezoelectric actuators over the past three decades. First, current challenges and development trends in M-DOF actuation technology are outlined, with comparative analysis highlighting the unique advantages of piezoelectric actuators. Next, a systematic classification of M-DOF piezoelectric actuators is presented alongside their primary application domains. Finally, challenges are analyzed through five key design aspects, and future research directions are prospected. This review aims to establish a foundational reference for advancing research and applications in M-DOF piezoelectric actuators.
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