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2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)最新文献

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Miniaturization of LTCC based hot plates for gas sensors application 用于气体传感器的LTCC热板的小型化
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260886
Chandrakant Patel, Adwaita Jadhav, Sudhir Lone, Vivek A. Rane, Varsha Chaware, V. Giramkar, G. Phatak
Low Temperature Co-fired Ceramic (LTCC) is amongst the favoured technologies for preparing miniature integrated packages and devices for various sensor and actuators applications. It is known that semiconductor gas sensors work at elevated temperatures. We have developed LTCC based micro hotplates with integrated temperature sensors for preparing miniature gas sensors. We have devised way to fabricate small size (Long side 6.5mm) suspended hot plate design of LTCC based hotplate with integrated thermistor. This paper presents results of heater and thermistor characterization for solid rectangular block and suspended hotplate designs of the hot plate. It is seen that the heaters as well as the thermistors present a linear behavior for both the designs. The rectangular solid block design dissipates about 3.5W power while the suspended hot plate design requires only about 144mW reaching steady state temperature of 250°C.
低温共烧陶瓷(LTCC)是为各种传感器和执行器应用制备微型集成封装和器件的热门技术之一。众所周知,半导体气体传感器可以在高温下工作。我们开发了基于LTCC的微型热板,集成了温度传感器,用于制备微型气体传感器。我们设计了一种制造小尺寸(长边6.5mm)悬浮热板的方法,该热板是基于集成热敏电阻的LTCC热板。本文介绍了固体矩形块加热器和热敏电阻特性的研究结果,以及热板的悬挂式热板设计。可以看出,加热器和热敏电阻在两种设计中都呈现线性行为。矩形实心块设计功耗约3.5W,而悬浮热板设计功耗仅约144mW,达到250℃的稳态温度。
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引用次数: 3
Impedance spectroscopy analysis of In2O3 thin film gas sensor In2O3薄膜气体传感器的阻抗谱分析
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260922
C. Mariappan, E. Prabhu, K. I. Gnanasekar, V. Jayaraman, T. Gnanasekaran
In2O3 thin film was fabricated using pulsed laser deposition technique. The structure and morphology of the thin film were characterized by X-ray diffraction and atomic force microscopy respectively. AC impedance of In2O3 thin film gas sensor were investigated at different temperatures (275 – 425 °C) when exposed into clean air and air containing NOx. Significant NOx sensing characteristics of thin film were observed at 325 °C by ac impedance analysis. The resistance and capacitance of indium oxide film were increased in the presence of NOx. The mechanism for the increase of resistance and of capacitance is presented.
采用脉冲激光沉积技术制备了In2O3薄膜。用x射线衍射和原子力显微镜对薄膜的结构和形貌进行了表征。研究了不同温度下(275 ~ 425℃)暴露在洁净空气和含NOx空气中的In2O3薄膜气体传感器的交流阻抗。通过交流阻抗分析,发现薄膜在325°C时具有明显的NOx感应特性。在NOx的存在下,氧化铟膜的电阻和电容量均有所增加。给出了电阻和电容增大的机理。
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引用次数: 1
Isotherm behavior studies of silica nanoparticles: Role of surfactant concentration and particle size 二氧化硅纳米颗粒的等温行为研究:表面活性剂浓度和粒径的作用
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260884
P. Devi, P. Reddy, Suman Singh, M. Singla, C. Ghanshyam, A.K. Paul Pawan Kapur, Vishal
In the present work, the effect of the surfactant concentration and particle size on the 2D assembly and corresponding isotherms of the silica nanoparticles at the air/water interface is studied and reported using Langmuir-Blodgett (LB) technique. Silica nanoparticles (NPs) of different sizes (30 nm & 150 nm) were synthesized by Stöber's method and were characterized to determine their sizes and dispersity using scanning electron microscopy. As-synthesized NPs were hydrophobized to varying extents through addition of varying amounts (0.5 mg to 1.5 mg) of cationic surfactant, cetyltrimethylammoniumbromide (CTAB). The lift off area (area/particle) and corresponding yield was found to be very low for 30 nm sized particles. The yield in case of 150 nm sized particles participating in monolayer formation is found to be much higher implying a more optimal interaction with surfactant in the studied concentration range. The low yield at small particle size can be attributed to the partial surface modification of particles.
本文采用Langmuir-Blodgett (LB)技术研究了表面活性剂浓度和粒径对二氧化硅纳米颗粒在空气/水界面的二维组装及其等温线的影响。利用Stöber的方法合成了不同尺寸(30 nm和150 nm)的二氧化硅纳米颗粒(NPs),并利用扫描电镜对其进行了表征,以确定其尺寸和分散性。通过添加不同量(0.5 mg ~ 1.5 mg)的阳离子表面活性剂十六烷基三甲基溴化铵(CTAB),合成的NPs具有不同程度的疏水性。发现对于30 nm大小的颗粒,升力面积(面积/颗粒)和相应的产率非常低。当粒径为150 nm的颗粒参与单层形成时,产率要高得多,这意味着在研究的浓度范围内,表面活性剂与表面活性剂的相互作用更为理想。小粒径下的低产率可归因于颗粒的部分表面改性。
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引用次数: 0
Organic nano-electro-mechanical-sensor systems for healthcare and environmental applications 用于医疗保健和环境应用的有机纳米机电传感器系统
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260924
V. Rao
Organic field effect transistors and polymer microcantilevers are two classes of organic sensors with potential applications in biochemical sensing. The organic field effect transistors (OFETs) with region regular poly3-hexylthiophene(rr-P3HT) and hexafluoro-2-propanol-substituted polysiloxane (SXFA) as an organic layer, have been used for detection of explosive vapors with excellent sensitivity of less than 70 ppt for 1,3,5-trinitro-1,3,5-triazacyclohexane (RDX) and less than 100 ppt for 2,4,6-trinitrotoluene (TNT) [1–3]. Piezo-resistive & piezo-electric polymer composite microcantilevers have been demonstrated as sensitive and cost effective platforms for bio-chemical detection [4–12]. Integration of the OFET and the polymer cantilever platform can bring orthogonality to the sensing where selectivity is a critical requirement. We have recently achieved this by integrating a strain sensitive organic field effect transistor (OFET) on the surface of a polymer nanomechanical cantilever [6]. This sensor named as the “Organic CantiFET” shows the highest deflection and surface stress sensitivity reported till date and opens up opportunities for realizing highly sensitive yet selective low cost polymer sensors for a variety of applications.
有机场效应晶体管和聚合物微悬臂梁是两类在生化传感领域具有潜在应用前景的有机传感器。以区域规则聚3-己基噻吩(r - p3ht)和六氟-2-丙醇取代聚硅氧烷(SXFA)为有机层的有机场效应晶体管(ofet)已被用于爆炸性气体的检测,对1,3,5-三硝基-1,3,5-三氮杂环己烷(RDX)的灵敏度小于70 ppt,对2,4,6-三硝基甲苯(TNT)的灵敏度小于100 ppt[1 - 3]。压电和压电聚合物复合微悬臂梁已被证明是生物化学检测的敏感和经济有效的平台[4-12]。OFET和聚合物悬臂平台的集成可以为选择性是关键要求的传感带来正交性。我们最近通过在聚合物纳米机械悬臂[6]表面集成应变敏感的有机场效应晶体管(OFET)实现了这一目标。这种被称为“有机CantiFET”的传感器显示出迄今为止报道的最高挠度和表面应力灵敏度,并为实现各种应用的高灵敏度但选择性低成本聚合物传感器开辟了机会。
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引用次数: 0
Nanocrystalline Gadolinium doped Ceria (Ce0.8Gd0.2O3-δ) for oxygen sensor and solid oxide fuel cell applications 纳米钆掺杂氧化铈(Ce0.8Gd0.2O3-δ)用于氧传感器和固体氧化物燃料电池
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260893
Shrikant G. Kulkarni, G. Phatak, P. Ramesh, S. Duttagupta
Gadolinium doped Ceria (GDC) is a known oxygen ion conductor in intermediate temperature range. This is a preliminary work aimed at exploring the suitability of using nanocrystalline GDC as oxygen sensor in intermediate operating temperature range (500°C–700°C). The nanocrystalline Gadolinium doped Ceria (GDC) has been prepared by sol-gel method with EDTA as chelating agent. Particle size around 10±5nm was obtained after calcination at 600°C. Pellets prepared using this material were sintered 1350°C, which show 90% of the theoretical density. The dc and ac (1Hz–1MHz) conductivity of these pellet was measured in the temperature range 200–600°C and 500–700°C respectively. Highest conductivity of the order of 4.61X10−5 S/cm was recorded at 700°C. Possible reasons for low conductivity are discussed.
钆掺杂铈(GDC)是已知的中温氧离子导体。这是一项初步的工作,旨在探索使用纳米晶GDC作为氧传感器在中等工作温度范围(500°C - 700°C)的适用性。以EDTA为螯合剂,采用溶胶-凝胶法制备了纳米钆掺杂氧化铈(GDC)。在600℃下煅烧得到的颗粒尺寸约为10±5nm。用该材料制备的球团经1350℃烧结,其密度达到理论密度的90%。在200-600°C和500-700°C的温度范围内分别测量了这些颗粒的直流和交流(1Hz-1MHz)电导率。在700°C时,最高电导率为4.61X10−5 S/cm。讨论了低电导率的可能原因。
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引用次数: 5
Nadi Parikshan Yantra and analysis of radial pulse Nadi Parikshan Yantra和径向脉冲分析
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260910
A. E. Kalange, B. Mahale, S. Aghav, S. Gangal
Diagnosis according to Ayurveda is to find the root cause of a disease. Out of the eight different kinds of examinations Nadi-Pariksha (pulse examination) is important. Nadi-pariksha is done at the root of the thumb by examining the radial artery using three fingers. The features associated with the pulse pressure signals are important from diagnostic point of view. Ancient Ayurveda identifies the health status by observing the wrist pulses in terms of ‘Vata’, ‘Pitta’ and ‘Kapha’, collectively called as tridosha, as the basic elements of human body and in their combinations.
根据阿育吠陀的诊断是找到疾病的根本原因。在八种不同的检查中,Nadi-Pariksha(脉搏检查)是重要的。Nadi-pariksha是用三个手指检查桡动脉在拇指根部完成的。从诊断的角度来看,与脉冲压力信号相关的特征是重要的。古代阿育吠陀通过观察腕部的“Vata”、“Pitta”和“Kapha”脉搏来确定健康状况,统称为tridosha,作为人体的基本元素及其组合。
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引用次数: 20
Optimization of poly (methyl methacrylate) as sacrificial layer for application in low temperature MEMS 聚甲基丙烯酸甲酯作为牺牲层在低温微机电系统中的应用优化
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260894
Abhijeet Kshirsagar, S. Duttagupta, S. Gangal
The recent development in smart systems can benefit from the integration of MEMS and CMOS technology with emphasis on low temperature processing that utilizes low cost substrates. The main constraints in MEMS/IC process are high thermal budget and harsh chemical usage in the processing. Polymers are generally used in surface micromachining as sacrificial layers, but face a problem of high temperature (150–250°C) baking cycles and the cost associated with it. This paper reports an in-house preparation (optimized formulation) and optimization of PMMA solution with a view to solve the problem with high temperature processing. Surface micromachined silicon nitride cantilevers using PMMA as sacrificial layer is fabricated to prove its feasibility for low temperature MEMS applications.
智能系统的最新发展可以受益于MEMS和CMOS技术的集成,重点是利用低成本基板的低温加工。MEMS/IC工艺的主要限制是高热预算和苛刻的化学品使用。聚合物通常作为牺牲层用于表面微加工,但面临高温(150-250°C)烘烤周期和相关成本的问题。本文报道了PMMA溶液的内部制备(优化配方)和优化,以期解决高温加工问题。制备了以PMMA为牺牲层的表面微加工氮化硅悬臂梁,证明了其在低温MEMS应用的可行性。
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引用次数: 1
Growth of carbon nanoflakes from nitric acid oxidized electric arc-discharged CNTs and its gas sensing properties 硝酸氧化电弧放电碳纳米管的生长及其气敏性能
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260960
A. Singh
This paper presents synthesis, characterization and gas sensing properties of two dimensional nanostructures i.e. carbon nanoflakes (CNFs) grown by electro-phoretic deposition(EPD) on steel substrate using nitric acid refluxed electric arc synthesized carbon nanotubes(CNTs). Formation of CNFs has been confirmed by XRD and Raman spectra. Optical band gap measurement has been performed by UV-Vis spectroscopy. The morphology of CNFs has been studied via SEM. The EPD film has been characterized for gas sensing. The sensor responded to relatively low concentrations of liquefied petroleum gas (LPG) thus suggesting high-quality CNFs are useful for gas sensors. Sensor has shown maximum response at 200 °C.
本文介绍了利用硝酸回流电弧合成的碳纳米管(CNTs)在钢基体上电泳沉积(EPD)生长的二维纳米结构碳纳米片(CNFs)的合成、表征及其气敏性能。通过XRD和拉曼光谱证实了CNFs的形成。用紫外可见光谱法测量了光学带隙。利用扫描电镜对CNFs的形貌进行了研究。EPD薄膜具有气敏特性。该传感器对相对低浓度的液化石油气(LPG)有响应,这表明高质量CNFs对气体传感器很有用。传感器在200°C时显示出最大响应。
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引用次数: 0
Linear regression based statistical approach for detecting proportion of component gases in manhole gas mixture 基于线性回归的人孔气体混合物组分气体比例统计检测方法
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260865
Varun Ojha, P. Dutta, H. Saha, Sugato Ghosh
The present article proposes the issues in designing an intelligent recognizer for detecting proportion of component gases in manhole gas mixture. The major components found in manhole gas mixture are Hydrogen Sulfide (H2S), Ammonia (NH3), Methane (CH4), Carbon Dioxide (CO2), Nitrogen Oxide (NOx), and Carbon Monoxide (CO). The manhole gas is formed after the decomposition of waste products, domestic garbage etc. into the sewer pipelines which are built for exhausting these waste products out of our cities and towns. The manholes are built across these pipelines for cleaning purpose. Thus safety for the people working in this field is a matter of concern because all the above mentioned gases are harmful gases and they are potent to loss of human lives. Also detection of these gas components is of primary concern today as because a short exposure of these components with human physiology results endanger to their lives. So our focus is on developing an intelligent gas recognition system which can recognize multiple gases simultaneously. A gas sensor array is an array of sensors, consisting of two or more electrical type semiconductor gas sensors. Response of electrical type semiconductor gas sensors in presence of gases are either the change in resistance or change in voltage of the sensor. At an instant a gas sensor array contains as many sensors as many individual gases we are targeting to detect. Use of multiple gas sensors and presence of multiple gases together results cross-sensitivity. The cross-sensitivity is an overlapping effect of one gas on another sensor. We adopt linear regression based statistical approach to deal with issues of simultaneous detection of multiple gases notwithstanding cross-sensitivity issue.
提出了一种用于检测人孔气体混合物中组分气体比例的智能识别器的设计问题。在人孔气体混合物中发现的主要成分是硫化氢(H2S)、氨(NH3)、甲烷(CH4)、二氧化碳(CO2)、氮氧化物(NOx)和一氧化碳(CO)。人孔气体是废物、生活垃圾等分解后进入下水道管道形成的,这些管道是为将这些废物排出城镇而建造的。沙井建在这些管道上用于清洁。因此,在这一领域工作的人的安全是一个值得关注的问题,因为上述所有气体都是有害气体,它们有可能造成人的生命损失。此外,这些气体成分的检测是当今主要关注的问题,因为人体生理学短时间接触这些成分会危及他们的生命。因此,开发一种能够同时识别多种气体的智能气体识别系统是我们研究的重点。气体传感器阵列是由两个或多个电型半导体气体传感器组成的传感器阵列。电型半导体气体传感器在气体存在时的响应是传感器的电阻变化或电压变化。在瞬间,气体传感器阵列包含与我们要检测的单个气体相同数量的传感器。使用多个气体传感器和同时存在多种气体会产生交叉灵敏度。交叉灵敏度是一种气体在另一种传感器上的重叠效应。我们采用基于线性回归的统计方法来处理多种气体同时检测的问题,尽管存在交叉灵敏度问题。
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引用次数: 15
Use of spaceborne GPS Navigation sensor for autonomous LEO orbit determination 利用星载GPS导航传感器自主确定LEO轨道
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260882
S. Aghav, S. Gangal
In this paper, a simple but fairly accurate algorithm, to determine orbit of the Low Earth Orbit (LEO) satellite, in its real time and with low computational burden is reported. This is done by using raw navigation solution provided by GPS Navigation sensor. A fixed step-size Runge-Kutta 4th order numerical integration method is selected for orbit propagation. Both, the Least square and Extended Kalman Filter (EKF) orbit estimation algorithms are developed and the results of the same are compared with each other. The least square algorithm converges after seven iterations. In the case of EKF, the algorithm converges after three iterations. Hence, EKF algorithm satisfies the criterions of low computation burden which is required for autonomous orbit determination.
本文提出了一种简单而准确的低地球轨道(LEO)卫星轨道实时确定算法,计算量小。这是通过使用GPS导航传感器提供的原始导航解决方案完成的。采用固定步长龙格-库塔四阶数值积分法进行轨道传播。提出了最小二乘和扩展卡尔曼滤波(EKF)轨道估计算法,并对两者的估计结果进行了比较。最小二乘算法经过7次迭代后收敛。对于EKF,算法在三次迭代后收敛。因此,EKF算法满足自主定轨所需的计算量小的准则。
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引用次数: 2
期刊
2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)
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