Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260878
B. Mahale, S. Gangal, D. Bodas
Micro cantilever actuator based on Poly (vinylidene fluoride) (PVdF) is fabricated and tested for its performance. β phase PVdF films are suitable for this purpose. Attempt is made to achieve β phase PVdF films using spin coating technique and annealing the films at various temperatures. The films are metalized and poled at high electric field (70MV/m) to enhance and stabilize the phase. PVdF cantilever is fabricated using special arrangement made with the help of sharp blades. Two cantilevers of same thickness and width of the 20µm and 500µm respectively and different lengths of 2mm and 3mm are fabricated. Actuation of the cantilevers is tested in terms of deflection by applying the electric field across the cantilever from 50–300V in the steps of 50V. The maximum actuation at 300V is 100µm for 2 mm length and 170 µm for 3mm length. Hysteresis is also observed. The results obtained are reported and discussed.
{"title":"PVdF based micro actuator","authors":"B. Mahale, S. Gangal, D. Bodas","doi":"10.1109/ISPTS.2012.6260878","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260878","url":null,"abstract":"Micro cantilever actuator based on Poly (vinylidene fluoride) (PVdF) is fabricated and tested for its performance. β phase PVdF films are suitable for this purpose. Attempt is made to achieve β phase PVdF films using spin coating technique and annealing the films at various temperatures. The films are metalized and poled at high electric field (70MV/m) to enhance and stabilize the phase. PVdF cantilever is fabricated using special arrangement made with the help of sharp blades. Two cantilevers of same thickness and width of the 20µm and 500µm respectively and different lengths of 2mm and 3mm are fabricated. Actuation of the cantilevers is tested in terms of deflection by applying the electric field across the cantilever from 50–300V in the steps of 50V. The maximum actuation at 300V is 100µm for 2 mm length and 170 µm for 3mm length. Hysteresis is also observed. The results obtained are reported and discussed.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"173 1","pages":"59-62"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79583311","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260971
S. Mahendia, A. Tomar, P. Goyal, R. Kumar, S. Kumar
Surface plasmon behavior of the silver nanoparticles embedded in PVA matrix has been analyzed. The progressive shift in SPR caused by the addition of increasing amount of glucose from 30 to 50 mg/dl has been investigated to monitor the sensing operation of this nanocomposite and tried to correlate with the refractive index behavior by calculating refractive index sensitivity (S). To understand the reason of shifting of SPR, interaction of glucose molecules with embedded silver nanoparticles has been studied through FTIR spectroscopy.
{"title":"PVA-Ag nanocomposite: As glucose sensing material","authors":"S. Mahendia, A. Tomar, P. Goyal, R. Kumar, S. Kumar","doi":"10.1109/ISPTS.2012.6260971","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260971","url":null,"abstract":"Surface plasmon behavior of the silver nanoparticles embedded in PVA matrix has been analyzed. The progressive shift in SPR caused by the addition of increasing amount of glucose from 30 to 50 mg/dl has been investigated to monitor the sensing operation of this nanocomposite and tried to correlate with the refractive index behavior by calculating refractive index sensitivity (S). To understand the reason of shifting of SPR, interaction of glucose molecules with embedded silver nanoparticles has been studied through FTIR spectroscopy.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"30 1","pages":"365-367"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79026606","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260864
S. Bindu, M. Suresh
Conducting polymer materials have received attention in recent years as they exhibit unique characteristics such as electrical conductivity and flexibility which make them suitable for use in biomedical and electronic applications. They can be used as strain gauges with greater flexibility compared to metal and semiconductor strain gauges. In the course of developing a strain gauge, understanding of electrical characteristics of conducting polymer is essential and some aspects are presented in this paper. Preliminary investigations on PEDOT-PSS thick films have shown that its AC resistance is fairly stable compared to DC resistance.
{"title":"Short term variation of resistivity of conducting polymers and its dependence on electric field","authors":"S. Bindu, M. Suresh","doi":"10.1109/ISPTS.2012.6260864","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260864","url":null,"abstract":"Conducting polymer materials have received attention in recent years as they exhibit unique characteristics such as electrical conductivity and flexibility which make them suitable for use in biomedical and electronic applications. They can be used as strain gauges with greater flexibility compared to metal and semiconductor strain gauges. In the course of developing a strain gauge, understanding of electrical characteristics of conducting polymer is essential and some aspects are presented in this paper. Preliminary investigations on PEDOT-PSS thick films have shown that its AC resistance is fairly stable compared to DC resistance.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"95 5 1","pages":"13-16"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83088408","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260931
R. Tripathi, A. Prabhakar, S. Mukherji
In this study C and S bend shape SU-8 polymer optical waveguides of different bending diameters have been microfabricated to experimentally investigate the effect of bending on the sensitivity of the waveguides. The real-time change in absorbance with change in refractive index varying from 1.33 to 1.38 of external medium is observed at wavelength 530 nm. It is observed that in both C and S shape, the sensitivity increases with the decreasing bending diameter. After an optimum value any further decrease in bending diameter reduces the sensitivity of waveguides. Maximum sensitivity observed with C shape is 5.35 ΔA / RIU and S shape is 13.04 ΔA / RIU, which is more than twice as compared to C shape.
{"title":"Comparison of micro fabricated C and S bend shape SU-8 polymer waveguide of different bending diameters for maximum sensitivity","authors":"R. Tripathi, A. Prabhakar, S. Mukherji","doi":"10.1109/ISPTS.2012.6260931","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260931","url":null,"abstract":"In this study C and S bend shape SU-8 polymer optical waveguides of different bending diameters have been microfabricated to experimentally investigate the effect of bending on the sensitivity of the waveguides. The real-time change in absorbance with change in refractive index varying from 1.33 to 1.38 of external medium is observed at wavelength 530 nm. It is observed that in both C and S shape, the sensitivity increases with the decreasing bending diameter. After an optimum value any further decrease in bending diameter reduces the sensitivity of waveguides. Maximum sensitivity observed with C shape is 5.35 ΔA / RIU and S shape is 13.04 ΔA / RIU, which is more than twice as compared to C shape.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"20 1","pages":"228-231"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73212360","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260961
A. Suryawanshi, A. Joshi
Measurement of Urine Flow Rate is one of the important parts of Urodynamics. The study and analysis of Urodynamics is helpful in diagnosing lower urinary tract diseases. Uroflowmetry, part of Urodynamics, is a non-invasive test very easy to implement. It involves measurement of urine flow rate and other associated parameters. This paper presents Urine Flow Rate measurement based on Volumetric Pressure measurement technique. For implementation of this technique special purpose probe is designed. Pressure sensor used in this paper is from MPX series. The output of the sensor is connected to Analog to Digital Converter and microcontroller after signal conditioning and amplification. The main principle of measurement technique uses the air pressure in a closed tube above a column of water (urine). As flow rate changes, the level in container changes accordingly and the air pressure in the closed tube above the column will change proportionally. By measuring the air pressure and associated time the flow rate is calculated. Once flow rate is calculated the other parameters as decided by the International Continence Society like Maximum flow rate, Average flow rate, voided volume and total time for voiding, time for maximum flow rate are calculated and displayed on PC. The graph of Flow rate (milliliters) versus time (sec) is plotted. This graph has typical nature in normal functioning of lower urinary tract if this nature gets changed then there might be some problem associated with this tract or patient may need further investigations. By observing this nature of graph Doctor used to do the diagnosis.
{"title":"Urine flow rate measurement based on volumetric pressure measurement principle","authors":"A. Suryawanshi, A. Joshi","doi":"10.1109/ISPTS.2012.6260961","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260961","url":null,"abstract":"Measurement of Urine Flow Rate is one of the important parts of Urodynamics. The study and analysis of Urodynamics is helpful in diagnosing lower urinary tract diseases. Uroflowmetry, part of Urodynamics, is a non-invasive test very easy to implement. It involves measurement of urine flow rate and other associated parameters. This paper presents Urine Flow Rate measurement based on Volumetric Pressure measurement technique. For implementation of this technique special purpose probe is designed. Pressure sensor used in this paper is from MPX series. The output of the sensor is connected to Analog to Digital Converter and microcontroller after signal conditioning and amplification. The main principle of measurement technique uses the air pressure in a closed tube above a column of water (urine). As flow rate changes, the level in container changes accordingly and the air pressure in the closed tube above the column will change proportionally. By measuring the air pressure and associated time the flow rate is calculated. Once flow rate is calculated the other parameters as decided by the International Continence Society like Maximum flow rate, Average flow rate, voided volume and total time for voiding, time for maximum flow rate are calculated and displayed on PC. The graph of Flow rate (milliliters) versus time (sec) is plotted. This graph has typical nature in normal functioning of lower urinary tract if this nature gets changed then there might be some problem associated with this tract or patient may need further investigations. By observing this nature of graph Doctor used to do the diagnosis.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"47 1","pages":"334-337"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76839055","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260968
S. Patil, A. Singh
Paper reports on the interesting changes that has been observed in the optical, morphological and physical properties of the chemical bath deposited (CBD) nanocrystalline ZnxCd(1−x)S thin films deposited on amorphous glass substrates. Optical bandgap has been found to be blue shifted from 2.28 eV for x=0.1 wt. % to 2.52 eV for x=0.9 wt. %. Besides, morphological studies showed dramatic change, flake-like morphology is changed to spherical particle with increasing content of Zn. Surface wettability property is found to be changed significantly from hydrophobic (water contact angle of 128°), for lower Zn content (x=0.1 wt. %), to hydrophilic (water contact angle of 22°), for higher Zn content (x=0.9 wt. %). Thickness is found to be decreased continuously with increasing content of Zn in the film.
{"title":"Tailoring of optical band gap, morphology and surface wettability of bath deposited nanocrystalline ZnxCd(1−x)S thin films with incorporation of Zn for solar cell application","authors":"S. Patil, A. Singh","doi":"10.1109/ISPTS.2012.6260968","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260968","url":null,"abstract":"Paper reports on the interesting changes that has been observed in the optical, morphological and physical properties of the chemical bath deposited (CBD) nanocrystalline ZnxCd(1−x)S thin films deposited on amorphous glass substrates. Optical bandgap has been found to be blue shifted from 2.28 eV for x=0.1 wt. % to 2.52 eV for x=0.9 wt. %. Besides, morphological studies showed dramatic change, flake-like morphology is changed to spherical particle with increasing content of Zn. Surface wettability property is found to be changed significantly from hydrophobic (water contact angle of 128°), for lower Zn content (x=0.1 wt. %), to hydrophilic (water contact angle of 22°), for higher Zn content (x=0.9 wt. %). Thickness is found to be decreased continuously with increasing content of Zn in the film.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"24 1","pages":"353-356"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72807512","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260941
A. Mishra, S.N. Tiwari
Grafting is important, feasible and dominant over other means for getting good yields from the plants because it does not implicate soma clonal variation in the yields. The detection of graft compatibility at early stage is, therefore, important in agriculture and forestry production. The other reported methods for detection of graft compatibility in plants are time-consuming, require skilled labour along with repeated treatments and are not user friendly. The present study deals with utilization of drop of electrical resistance for developing a biosensor capable to detect the graft compatibility in commercial practice. Biosensor is a sensing devise that detects the biological phenomenon by converting the bio chemical signal into an electrical signal through the transducer. In the present study, the electrical resistance of graft union in Rose auto graft has been measured at various days after grafting in Rose plant and its pattern of variation has been studied. A mathematical model of the obtained pattern has been developed and a transducer has been designed to trace this pattern. A model of the biosensor which includes the said transducer for signal transduction in graft union and applicable for compatibility detection in plants has been envisaged.
{"title":"Biosensor for graft compatibility detection based on signal transduction through electrical resistance of graft union in plants","authors":"A. Mishra, S.N. Tiwari","doi":"10.1109/ISPTS.2012.6260941","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260941","url":null,"abstract":"Grafting is important, feasible and dominant over other means for getting good yields from the plants because it does not implicate soma clonal variation in the yields. The detection of graft compatibility at early stage is, therefore, important in agriculture and forestry production. The other reported methods for detection of graft compatibility in plants are time-consuming, require skilled labour along with repeated treatments and are not user friendly. The present study deals with utilization of drop of electrical resistance for developing a biosensor capable to detect the graft compatibility in commercial practice. Biosensor is a sensing devise that detects the biological phenomenon by converting the bio chemical signal into an electrical signal through the transducer. In the present study, the electrical resistance of graft union in Rose auto graft has been measured at various days after grafting in Rose plant and its pattern of variation has been studied. A mathematical model of the obtained pattern has been developed and a transducer has been designed to trace this pattern. A model of the biosensor which includes the said transducer for signal transduction in graft union and applicable for compatibility detection in plants has been envisaged.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"94 1","pages":"261-264"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79166699","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260874
Rupali P. Waichal, Gauri D. Karvir, K. Patil, P. Ambekar, I. Mulla, S. Kale
Cuprous oxide (Cu2O) nanoparticles with size of about 32 nm are synthesized via electrochemical method in NaCl solution with copper electrodes and K2Cr2O7 as an additive. Different techniques such as scanning electron microscopy (SEM), energy dispersive x-ray analysis (EDAX), x-ray Diffraction (XRD), transmission electron microscopy (TEM) and electron spectroscopy for chemical analysis (ESCA) are used for sample characterization. A universal miniature furnace is designed and developed for gas sensing application. It is made with alumina (Al2O3) tube with 0.5 mm inner diameter, 1mm outer diameter and 1 cm length and has capacity to reach up to 3500C. Calibration of bed/furnace is done with Keithley 240°C source meter with Lab tracer 2.0 software. Cu2O nanoparticle coating (thickness around 10 microns) is formed on the surface of the miniature alumina furnace, with thin platinum wire used as electrode. The current Vs. % RH of P type Cu2O exhibits linear change in current from 3.83 × 10−7 to 2.62 ×10−7 Amps for a relative humidity change from 11 to 84 % RH, respectively.
{"title":"Synthesis of cuprous oxide nanoparticles by electrochemical method and evaluation of the corresponding nanoparticle film for humidity sensing","authors":"Rupali P. Waichal, Gauri D. Karvir, K. Patil, P. Ambekar, I. Mulla, S. Kale","doi":"10.1109/ISPTS.2012.6260874","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260874","url":null,"abstract":"Cuprous oxide (Cu<inf>2</inf>O) nanoparticles with size of about 32 nm are synthesized via electrochemical method in NaCl solution with copper electrodes and K<inf>2</inf>Cr<inf>2</inf>O<inf>7</inf> as an additive. Different techniques such as scanning electron microscopy (SEM), energy dispersive x-ray analysis (EDAX), x-ray Diffraction (XRD), transmission electron microscopy (TEM) and electron spectroscopy for chemical analysis (ESCA) are used for sample characterization. A universal miniature furnace is designed and developed for gas sensing application. It is made with alumina (Al<inf>2</inf>O<inf>3</inf>) tube with 0.5 mm inner diameter, 1mm outer diameter and 1 cm length and has capacity to reach up to 3500C. Calibration of bed/furnace is done with Keithley 240°C source meter with Lab tracer 2.0 software. Cu<inf>2</inf>O nanoparticle coating (thickness around 10 microns) is formed on the surface of the miniature alumina furnace, with thin platinum wire used as electrode. The current Vs. % RH of P type Cu<inf>2</inf>O exhibits linear change in current from 3.83 × 10<sup>−7</sup> to 2.62 ×10<sup>−7</sup> Amps for a relative humidity change from 11 to 84 % RH, respectively.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"97 1","pages":"47-50"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86001689","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260913
A. Joshi, S. Gangal, D. Bodas, J. Rauch
Optimization of RF sputtered piezoelectric PZT thin films for thickness and stoichiometry for use in MEMS application is discussed in this paper. The effect of sputtering parameters on PZT film stoichiometry is studied using EDS and XPS techniques. 600 nm thin PZT film with Zr:Ti ratio of 52∶48 is achieved in single sputtering cycle. The film is annealed using conventional furnace annealing technique and the effect of annealing process on phase formation is studied using XRD technique. The optimized PZT thin film shows sufficiently good stoichiometry. A piezoelectric coefficient (d33) value for PZT thin film deposited at optimum parameters is 450pm/V. Optimized PZT thin film parameters are used for successful fabrication of cantilever using silicon bulk micromachining.
{"title":"Optimization of RF sputtered PZT thin films for MEMS cantilever application","authors":"A. Joshi, S. Gangal, D. Bodas, J. Rauch","doi":"10.1109/ISPTS.2012.6260913","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260913","url":null,"abstract":"Optimization of RF sputtered piezoelectric PZT thin films for thickness and stoichiometry for use in MEMS application is discussed in this paper. The effect of sputtering parameters on PZT film stoichiometry is studied using EDS and XPS techniques. 600 nm thin PZT film with Zr:Ti ratio of 52∶48 is achieved in single sputtering cycle. The film is annealed using conventional furnace annealing technique and the effect of annealing process on phase formation is studied using XRD technique. The optimized PZT thin film shows sufficiently good stoichiometry. A piezoelectric coefficient (d33) value for PZT thin film deposited at optimum parameters is 450pm/V. Optimized PZT thin film parameters are used for successful fabrication of cantilever using silicon bulk micromachining.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"17 1","pages":"173-176"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90033513","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2012-03-07DOI: 10.1109/ISPTS.2012.6260875
G. K. Ananthasuresh
Microelectronics and microsystems technologies are distinguished from each other because of the moving mechanical entities, both solids and fluids. As the field of microsystems technology was developed primarily by researchers working originally in the microelectronics area, there is most often a leaning towards electrical and electronics side. Fabrication and materials processing too have received much attention in this field. Thus, it is very common in this field to see that problems are usually overcome by enhancing fabrication, materials, or electronics. However, it should not be forgotten that it is mechanics that is also central to microsystems technology. The purpose of this talk is to illustrate how mechanical approach can be used to solve some problems in microsystems.
{"title":"Mechanical solutions to problems in microsystems","authors":"G. K. Ananthasuresh","doi":"10.1109/ISPTS.2012.6260875","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260875","url":null,"abstract":"Microelectronics and microsystems technologies are distinguished from each other because of the moving mechanical entities, both solids and fluids. As the field of microsystems technology was developed primarily by researchers working originally in the microelectronics area, there is most often a leaning towards electrical and electronics side. Fabrication and materials processing too have received much attention in this field. Thus, it is very common in this field to see that problems are usually overcome by enhancing fabrication, materials, or electronics. However, it should not be forgotten that it is mechanics that is also central to microsystems technology. The purpose of this talk is to illustrate how mechanical approach can be used to solve some problems in microsystems.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"5 1","pages":"1-1"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87833880","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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