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2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)最新文献

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Rod type cermet based NTC themo-resistive sensors 棒型陶瓷基NTC热阻传感器
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260962
S. Jagtap, Saikumar Vemuri, S. Rane, R. Aiyer, S. Gosavi
Environment friendly thick film NTC thermistors based on spinel-type Semiconducting electroceramics compositions based on oxides of (Mn, Co, Ni) were fabricated on cyclindrical/rod type alumina substrate. Prepared rod type NTC thermistors were characterized by X-ray diffraction, and Scanning electron microscopy with energy depressive Xray analysis. Rod thermistor samples showed compact and homogeneous microstructure. The electrical parameters such as device resistance, thermistor constant, ageing, thermal cycling, and humidity testing of the thermistors were determined.
在圆形/棒状氧化铝衬底上制备了尖晶石型(Mn, Co, Ni)氧化物半导体电陶瓷材料的环境友好型厚膜NTC热敏电阻。用x射线衍射和扫描电子显微镜对制备的棒型NTC热敏电阻进行了表征。棒状热敏电阻样品具有致密均匀的微观结构。测定了热敏电阻的器件电阻、热敏电阻常数、老化、热循环、湿度测试等电学参数。
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引用次数: 0
Evaluation of compatibility of SnO2: CuO thin film based H2S sensor on LTCC substrates 基于SnO2: CuO薄膜的H2S传感器在LTCC衬底上的相容性评价
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260871
M. Kaur, S. Kailasa Ganapathi, N. Ramgir, N. Datta, D. K. Aswal, S. Gupta, Varsha Chaware, Vivek A. Rane, V. Giramkar, G. Phatak
Integrated SnO2: CuO thin-film based H2S gas sensor has been realized using low temperature co-fired ceramics (LTCC) tapes with heater and thermister buried inside the LTCC multilayer structure. The SnO2: CuO thin films are deposited on top of the structure. At operating temperature of 180°C, these films revealed sensing properties very similar to the reference films deposited on Alumina substrates. Further, effect of operating temperature on sensitivity was studied and sensor films on LTCC substrate were found to detect H2S with maximum sensitivity at a lower operating temperature of 100°C. The developed sensors have been tested for a period of more than one year and found to show a stable response.
采用低温共烧陶瓷(LTCC)带,在LTCC多层结构中埋入加热器和热敏电阻,实现了SnO2: CuO薄膜H2S气体传感器的集成。SnO2: CuO薄膜沉积在结构的顶部。在180°C的工作温度下,这些薄膜显示出与沉积在氧化铝衬底上的参考薄膜非常相似的传感特性。此外,研究了工作温度对灵敏度的影响,发现LTCC衬底上的传感器膜在较低的工作温度(100℃)下检测H2S的灵敏度最高。开发的传感器经过一年多的测试,显示出稳定的响应。
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引用次数: 1
Virtual prototyping of a MEMS capacitive pressure sensor for TPMS using Intellisuite® 使用Intellisuite®的用于TPMS的MEMS电容式压力传感器的虚拟样机
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260867
Deepika, M. Mittal, Anurekha Sharma
Tire pressure monitoring system (TPMS) plays an important role in automobile safety. One of the important components of TPMS is a MEMS pressure sensor. This paper presents the virtual prototyping of TPMS which involves design, virtual fabrication and system level modelling of a square diaphragm based capacitive pressure sensor for a given stroke length. Intellisuite® MEMS design tool is used for obtaining the virtual prototype. The analytical expression for the sensitivity of square diaphragm in small deflection regime is derived and comparison of calculated results with simulated is presented.
胎压监测系统(TPMS)在汽车安全中起着重要的作用。TPMS的重要组成部分之一是MEMS压力传感器。本文介绍了一种给定行程长度的方形膜片电容式压力传感器的虚拟样机设计、虚拟制造和系统级建模。使用Intellisuite®MEMS设计工具获取虚拟样机。推导了方形膜片在小挠度工况下的灵敏度解析表达式,并将计算结果与仿真结果进行了比较。
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引用次数: 4
Automation of biodiesel plant with bio-sensing technologies 生物传感技术在生物柴油装置自动化中的应用
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260958
Prodyut Dhar, A. Mazumdar
Among the alternative fuels, biodiesel and its blends are considered suitable and the most promising fuel for diesel engine. The properties of biodiesel are found similar to that of diesel. Many researchers have experimentally evaluated the performance characteristics of conventional diesel engines fuelled by biodiesel and its blends. The biodiesel production process requires simultaneous real time monitoring of certain properties like viscosity, acid number, iodine value, moisture content etc, such that the values are within ASTM standards. Therefore, an automated Biodiesel plant fitted with new innovative biosensors have been proposed which could make real time decision taking ability and monitor the overall production mechanism. The control system of the biosensor and production process was coupled with ARTIFICIAL NEURAL NETWORK (ANN). The proposed system have capability to detect 8 different starting oil samples and optimizes itself the best production yield of biodiesel. Therefore, the optimizing problems of the quality of initial feed of vegetable oil used for production of biodiesel are overcome. This paper provides experimental knowledge on the enormous studies for the development of advanced reactor system engineering for large scale production of biodiesel for commercial purpose.
在替代燃料中,生物柴油及其混合燃料被认为是最适合和最有前途的柴油发动机燃料。生物柴油的性质与柴油相似。许多研究人员通过实验评估了以生物柴油及其混合物为燃料的传统柴油发动机的性能特征。生物柴油生产过程需要同时实时监测某些特性,如粘度、酸值、碘值、水分含量等,使这些值符合ASTM标准。因此,本文提出了一种配备新型生物传感器的自动化生物柴油装置,该装置具有实时决策能力并能监控整个生产机制。采用人工神经网络(ANN)对生物传感器和生产过程的控制系统进行耦合。该系统能够检测8种不同的起始油样品,并自行优化生物柴油的最佳产率。解决了生产生物柴油用植物油初始饲料质量的优化问题。本文为大规模商业化生产生物柴油的先进反应器系统工程的开发提供了大量的实验知识。
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引用次数: 1
Effect of Bi2O3 as sintering aid in modifying the NTC characteristics of MnCr2O4 compositions for temperature sensors Bi2O3助烧剂对温度传感器MnCr2O4材料NTC特性的影响
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260953
K. Stella, K. Krishnankutty, K. R. Dayas, A. Seema
Densification process of Mn-Cr-O negative temperature coefficient (NTC) ceramic compositions in presence of Bi2O3 as a sintering aid and also as a dopant was studied. Bi2O3 (3.8mole %) decreased the sintering temperature of the phase pure MnxCr3−xO4 compositions and obtained more than 95% of theoretical density. Electrical characteristics of the compositions were evaluated and it is found that Bi2O3 addition improved NTC properties, thus making these more suitable as temperature sensor.
研究了Bi2O3作为助烧剂和掺杂剂存在下Mn-Cr-O负温度系数(NTC)陶瓷复合材料的致密化过程。Bi2O3 (3.8mol %)降低了相纯MnxCr3−xO4组合物的烧结温度,获得了95%以上的理论密度。结果表明,Bi2O3的加入改善了NTC的性能,使其更适合作为温度传感器。
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引用次数: 1
Design and implementation of micro-machined cantilever structures for MEMS-based digital inverter and electron tunneling sensor 基于mems的数字逆变器和电子隧道传感器微加工悬臂结构的设计与实现
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260918
T. K. Bhattacharyya
Micro-cantilevers are one of the most fundamental building blocks of many applications in the field of MEMS sensors and actuators. They are extensively explored micro-structures and yet, the most interesting ones in terms of their analytical elegance and probable applications in various domains. In this work, a detailed account, starting from the theory of micro-cantilever beams to their applications, has been investigated. The dynamic/modal response of the cantilevers under different damping mechanisms and the effects of their dimensions and the surrounding atmosphere have been analytically and experimentally investigated for arrays of cantilevers of wide range of dimensions [1]. Static response of the cantilevers under electrostatic actuation mechanism has been analyzed based on the Euler- Bernoulli beam theory. An integro-differential semi-numerical technique to solve the Euler-Bernoulli equation to find the static deflection of micro-cantilevers under electrostatic actuation has been presented [2]. An analytical technique to account for the effects of stiction forces on the static response of the beams has also been developed based on the above formulation [3]. For transient response analysis of the cantilevers, a distributed R-C ladder network model of the cantilever has been developed in which, by numerically co-solving Kirchhoff's current and voltage laws and the Euler-Bernoulli equation, the switching response of the cantilever has been thoroughly analyzed [4].
微悬臂梁是MEMS传感器和执行器领域许多应用中最基本的组成部分之一。它们被广泛地探索微观结构,然而,就其分析的优雅性和在各个领域的可能应用而言,它们是最有趣的。在这项工作中,从微悬臂梁的理论到它们的应用,已经进行了详细的研究。对不同阻尼机制下悬臂梁的动力/模态响应及其尺寸和周围大气的影响进行了分析和实验研究[1]。基于欧拉-伯努利梁理论,分析了静电驱动机构下悬臂梁的静力响应。提出了一种求解静电驱动下微悬臂梁静挠度的Euler-Bernoulli方程的积分-微分半数值方法[2]。在上述公式的基础上[3],还发展了一种分析技术来解释粘力对梁的静力响应的影响。对于悬臂梁的瞬态响应分析,建立了悬臂梁的分布式R-C阶梯网络模型,通过数值协解Kirchhoff电流和电压定律以及Euler-Bernoulli方程,深入分析了悬臂梁的开关响应[4]。
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引用次数: 1
Prognostics and health management: Utilizing the life cycle knowledge to reduce life cycle cost 预后和健康管理:利用生命周期知识降低生命周期成本
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260908
Dignata Das
Prognostics is the process of predicting the future reliability of a product by assessing the extent of deviation or degradation of a product from its expected normal operating conditions. Health monitoring is a process of measuring and recording the extent of deviation and degradation from a normal operating condition. Traditional reliability engineering has attempted to quantify reliability as a failure probability and physics of failure based reliability assessment determines a range of possible times to failure. However, each product experiences its own unique life cycle that impacts its rate of degradation. With sensors as the eyes and ears to determine the actual environment, on board or off site computational platforms, and algorithms to process the information give us the ability to assess the reliability of each product and make operations, maintenance, and support decisions in an individualized manner. This talk with introduce the science and mathematics of prognostics and provide examples of use of the tools and techniques as applied in various applications such as batteries, fans, power electronics, and computers. It will also provide information on the development process of the IEEE standard on prognostics for electronics.
预测是通过评估产品偏离其预期正常运行条件的程度或退化来预测产品未来可靠性的过程。健康监测是测量和记录偏离正常工作条件的程度和退化的过程。传统的可靠性工程试图将可靠性量化为失效概率和基于失效物理的可靠性评估确定可能失效的时间范围。然而,每个产品都有自己独特的生命周期,这影响了它的降解速度。传感器作为眼睛和耳朵来确定实际环境,船上或场外的计算平台,以及处理信息的算法,使我们能够评估每个产品的可靠性,并以个性化的方式做出操作、维护和支持决策。本讲座将介绍预测的科学和数学,并提供在电池、风扇、电力电子和计算机等各种应用中使用工具和技术的示例。它还将提供有关电子产品预测的IEEE标准发展过程的信息。
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引用次数: 0
Chemi-resistive gas sensing properties of cobalt-phthalocyanine / iron-phthalocyanine composite films 钴-酞菁/铁-酞菁复合薄膜的耐化学气敏性能
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260942
Arvind Kumar, S. Samanta, Ashutosh Kumar Singh, A. Debnath, R. Prasad, D. K. Aswal, S. Gupta
Thin film of cobalt phthalocyanine (CoPc), iron phthalocyanine (FePc) and CoPc-FePc composite were grown on sapphire substrate by molecular beam epitaxy under identical experimental conditions. Composite films showed very high mobility ∼ 110 cm2V−1s−1 at room temperature, which is nearly two orders of magnitude higher as compared to the pure CoPc and FePc films. We demonstrate that due to high mobility of composite phthalocyanine films, it showed enhanced sensitivity for chlorine (Cl2) gas as compared to pure CoPc and FePc films
在相同的实验条件下,采用分子束外延的方法在蓝宝石衬底上生长了酞菁钴(CoPc)、酞菁铁(FePc)和CoPc-FePc复合材料薄膜。复合薄膜在室温下表现出非常高的迁移率~ 110 cm2V−1s−1,比纯CoPc和FePc薄膜高出近两个数量级。我们证明,由于复合酞菁膜的高迁移率,与纯CoPc和FePc膜相比,它对氯(Cl2)气体的敏感性增强
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引用次数: 0
Development of biosensor by direct covalent immobilization of glucose oxidase on boron doped diamond film 硼掺杂金刚石膜上葡萄糖氧化酶直接共价固定化生物传感器的研制
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260929
Ri-ichi Murakamia, Cheolmun Yim
A direct covalent immobilization of glucose oxidase was performed on carboxylated boron doped diamond (BDD) film using 1-Ethyl-3-(dimethylaminopropyl)-carbodiimide (EDC). The carboxylated BDD film deposited using the microwave plasma CVD was obtained by the chemical treatments of oxidization and hydrolysis. The immobilized glucose oxidase was confirmed by a spectrophotometric assay to have the enzyme activity on the BDD film. The activity of the immobilized glucose oxidase indicated long term stability. In addition, the glucose concentration was electrically detected using a redox reaction to the activity of the immobilized glucose oxidase during electrochemical measurements. Carboxylated BDD film allows a short and simple attachment of biomolecules, and leads to development of biomolecules-based biosensors or bio-chips.
采用1-乙基-3-(二甲氨基丙基)-碳二酰亚胺(EDC)在羧化硼掺杂金刚石(BDD)薄膜上直接共价固定葡萄糖氧化酶。采用微波等离子体气相沉积技术,通过氧化和水解等化学处理得到羧化BDD薄膜。用分光光度法测定了固定化葡萄糖氧化酶在BDD膜上的酶活性。固定化葡萄糖氧化酶的活性显示出长期的稳定性。此外,在电化学测量过程中,利用固定化葡萄糖氧化酶活性的氧化还原反应,电检测葡萄糖浓度。羧基化BDD薄膜允许生物分子的短而简单的附着,并导致生物分子为基础的生物传感器或生物芯片的发展。
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引用次数: 0
Design, fabrication and electrical characterization of high material constant Chip-in-Glass thermal sensors 高材料常数玻璃芯片热传感器的设计、制造和电学特性
Pub Date : 2012-03-07 DOI: 10.1109/ISPTS.2012.6260925
M. Muralidharan, A. Seema, E. Sunny, K. R. Dayas
Nickel manganite based negative temperature coefficient (NTC) thermistor compositions are extensively used as thermal sensors in a wide range of products and devices. Ni0.701Mn1.823Cr0.35Fe0.07Si0.056O4 NTC thermistor composition was prepared through solid state route. The tape casting slurry composition was optimized to get defect free ceramic tapes. Chip thermistors were prepared from these NTC tapes by optimizing the process parameters. The prepared chip thermistors were encapsulated in borosilicate glass to form Chip-in-Glass thermal sensors with high material constant and excellent reliability.
镍锰矿基负温度系数(NTC)热敏电阻组合物作为热传感器广泛应用于各种产品和器件中。采用固态法制备了Ni0.701Mn1.823Cr0.35Fe0.07Si0.056O4 NTC热敏电阻组合物。为获得无缺陷的陶瓷带,优化了铸带浆料组成。通过优化工艺参数,制备了芯片热敏电阻。将所制备的芯片热敏电阻封装在硼硅酸盐玻璃中,形成具有高材料常数和优异可靠性的chip -in- glass热传感器。
{"title":"Design, fabrication and electrical characterization of high material constant Chip-in-Glass thermal sensors","authors":"M. Muralidharan, A. Seema, E. Sunny, K. R. Dayas","doi":"10.1109/ISPTS.2012.6260925","DOIUrl":"https://doi.org/10.1109/ISPTS.2012.6260925","url":null,"abstract":"Nickel manganite based negative temperature coefficient (NTC) thermistor compositions are extensively used as thermal sensors in a wide range of products and devices. Ni0.701Mn1.823Cr0.35Fe0.07Si0.056O4 NTC thermistor composition was prepared through solid state route. The tape casting slurry composition was optimized to get defect free ceramic tapes. Chip thermistors were prepared from these NTC tapes by optimizing the process parameters. The prepared chip thermistors were encapsulated in borosilicate glass to form Chip-in-Glass thermal sensors with high material constant and excellent reliability.","PeriodicalId":6431,"journal":{"name":"2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)","volume":"19 1","pages":"208-211"},"PeriodicalIF":0.0,"publicationDate":"2012-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87249383","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2012 1st International Symposium on Physics and Technology of Sensors (ISPTS-1)
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