Pub Date : 2018-08-01DOI: 10.1109/3m-nano.2018.8552189
Jiyu Sun, Wei Wu, Na Li, Xianping Liu, Zhijun Zhang
The nanomechanical and angle-dependence optical properties of elytra of Popillia indgigonacea Motsch were studied in this paper. The surface morphology structure and interior microstructure of elytron are investigated by confocal laser scanning microscope (CLSM) and scanning electron microscopy (SEM), respectively. There are fish-like scales and pits on the surface of elytron. The interior microstructures are composed of multilayer of epicuticle, and then is feather-like units of exocuticle. The nanomechanical properties were got by nanoindentation technique. The values of reduced modulus (Er) and hardness (H) of the transverse section display a declining tendency from epicuticle to endocuticle, and fluctuant variation for longitudinal section. The relatively higher Er and H of elytron surface play a role in resisting force, and the lower strength is to buffer. Additionally, the optical testing of elytron specimen was conducted by angle-resolved spectroscopy system in different angles from 0° to 60°. The reflectance peak gradually transfers from 588 to 510 nm showing colors of orange, yellow and green when the incidence angle switches from 0° to 60° in multilayer.
{"title":"Nanomechanical and Angle-dependence Optical Properties in Beetle Popillia Indgigonacea Motsch (Coleoptera)","authors":"Jiyu Sun, Wei Wu, Na Li, Xianping Liu, Zhijun Zhang","doi":"10.1109/3m-nano.2018.8552189","DOIUrl":"https://doi.org/10.1109/3m-nano.2018.8552189","url":null,"abstract":"The nanomechanical and angle-dependence optical properties of elytra of Popillia indgigonacea Motsch were studied in this paper. The surface morphology structure and interior microstructure of elytron are investigated by confocal laser scanning microscope (CLSM) and scanning electron microscopy (SEM), respectively. There are fish-like scales and pits on the surface of elytron. The interior microstructures are composed of multilayer of epicuticle, and then is feather-like units of exocuticle. The nanomechanical properties were got by nanoindentation technique. The values of reduced modulus (Er) and hardness (H) of the transverse section display a declining tendency from epicuticle to endocuticle, and fluctuant variation for longitudinal section. The relatively higher Er and H of elytron surface play a role in resisting force, and the lower strength is to buffer. Additionally, the optical testing of elytron specimen was conducted by angle-resolved spectroscopy system in different angles from 0° to 60°. The reflectance peak gradually transfers from 588 to 510 nm showing colors of orange, yellow and green when the incidence angle switches from 0° to 60° in multilayer.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"3 1","pages":"130-133"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85173638","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper discusses the effects of micro-structures on growth behaviors of neurons, including the cell migration and morphology. In the work, the electron beam lithography and lift-off technology were used to pattern wire grid structures with different widths on polished silicon surfaces. The structures and the morphological changes of neurons cultured on the structures were observed by scanning electron microscope (SEM). The experimental results have shown that the neurons grew orderly along the direction of the micro-structures. Moreover, the structure with a specific width would change the morphology of neurons.
{"title":"Effects of Micro-structures on Growth Behaviors of Neurons","authors":"Xueying Yang, Caijun Liu, Xing Chen, Ying Wang, Xinyue Wang, Zhengxun Song, Zuobin Wang, Zuobin Wang","doi":"10.1109/3M-NANO.2018.8552253","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552253","url":null,"abstract":"This paper discusses the effects of micro-structures on growth behaviors of neurons, including the cell migration and morphology. In the work, the electron beam lithography and lift-off technology were used to pattern wire grid structures with different widths on polished silicon surfaces. The structures and the morphological changes of neurons cultured on the structures were observed by scanning electron microscope (SEM). The experimental results have shown that the neurons grew orderly along the direction of the micro-structures. Moreover, the structure with a specific width would change the morphology of neurons.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"71 1","pages":"79-82"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90393095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3m-nano.2018.8552220
{"title":"3M-NANO 2018 TOC","authors":"","doi":"10.1109/3m-nano.2018.8552220","DOIUrl":"https://doi.org/10.1109/3m-nano.2018.8552220","url":null,"abstract":"","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"125 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75356609","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552175
Hengzhi Hu, Xudong Zheng, Yiyu Lin
doubly decoupled spring structure has been widely used in MEMS gyroscopes to suppress the cross- coupling between gyroscope driving mode and sensing mode. However, rotation and translation error of the sensing mode limits the performance of doubly decoupled gyroscopes. We propose three ways to further suppress the rotation error. Firstly, by reducing the stiffness of the decoupling beam to reduce the coupling stress and keeping approximately mode matching of gyroscope driving and sensing mode. Secondly, by reducing the effective lever arm length of the decoupling structure by adopting a trapezoid connection design , and thus the overall lever torque and the rotation angle of the sense frame are both lowered. In addition, we propose a novel rotation suppression electrode on the sense frame to further suppress rotation of sensing mass. Finite element analysis results demonstrate that, comparing to the decoupled structure using rectangular connection, the trapezoid connection structure we propose suppresses the rotation error by 71.3%;the rotation error can be further suppressed by our rotation suppression electrode, the suppression level is 14% at 4V applied voltage which can be further improved with increased suppression voltage..
{"title":"Rotation Error Suppression for a Doubly Decoupled MEMS Gyroscope","authors":"Hengzhi Hu, Xudong Zheng, Yiyu Lin","doi":"10.1109/3M-NANO.2018.8552175","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552175","url":null,"abstract":"doubly decoupled spring structure has been widely used in MEMS gyroscopes to suppress the cross- coupling between gyroscope driving mode and sensing mode. However, rotation and translation error of the sensing mode limits the performance of doubly decoupled gyroscopes. We propose three ways to further suppress the rotation error. Firstly, by reducing the stiffness of the decoupling beam to reduce the coupling stress and keeping approximately mode matching of gyroscope driving and sensing mode. Secondly, by reducing the effective lever arm length of the decoupling structure by adopting a trapezoid connection design , and thus the overall lever torque and the rotation angle of the sense frame are both lowered. In addition, we propose a novel rotation suppression electrode on the sense frame to further suppress rotation of sensing mass. Finite element analysis results demonstrate that, comparing to the decoupled structure using rectangular connection, the trapezoid connection structure we propose suppresses the rotation error by 71.3%;the rotation error can be further suppressed by our rotation suppression electrode, the suppression level is 14% at 4V applied voltage which can be further improved with increased suppression voltage..","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"32 1","pages":"91-95"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74544352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552190
Yanan Zeng, Yuan Liu, Fan Yang, Junsheng Lu, X. Chang, Xiaodong Hu
A phase noise optimizing method was proposed in this paper to improve the imaging quality of digital microscopic holography (DHM). In this method, bidimensional empirical mode decomposition (BEMD) was utilized to decompose the digital hologram. According to the principle of decomposition, the characteristics of first order intrinsic mode function (IMF1) are close to the gray value of ideal interference fringes. Therefore, after using BEMD method the digital hologram was optimized with enhanced interference fringes, from which phase image with reduced noise can be retrieved. The validity of the proposed method on noise reduction was verified by experimental results on a nano-step.
{"title":"Optimization of Phase Noise in Digital Holographic Microscopy","authors":"Yanan Zeng, Yuan Liu, Fan Yang, Junsheng Lu, X. Chang, Xiaodong Hu","doi":"10.1109/3M-NANO.2018.8552190","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552190","url":null,"abstract":"A phase noise optimizing method was proposed in this paper to improve the imaging quality of digital microscopic holography (DHM). In this method, bidimensional empirical mode decomposition (BEMD) was utilized to decompose the digital hologram. According to the principle of decomposition, the characteristics of first order intrinsic mode function (IMF1) are close to the gray value of ideal interference fringes. Therefore, after using BEMD method the digital hologram was optimized with enhanced interference fringes, from which phase image with reduced noise can be retrieved. The validity of the proposed method on noise reduction was verified by experimental results on a nano-step.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"41 1","pages":"382-385"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73578885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552195
Jiyu Sun, Yueming Wang, Limei Tian, Chunxiang Pan
Micro/nano capsules embedment was an effective method to repair micro crack and mechanical damage. In this paper, preparation technology of self-healing micro-nano capsule based on calcium alginate was studied by in-situ method. And the rate of covering and particle size were investigated under different emulsifier dosages and core-wall ratios.
{"title":"Study on Preparation Technology of Self-healing Micro-nano Capsule based on Calcium Alginate","authors":"Jiyu Sun, Yueming Wang, Limei Tian, Chunxiang Pan","doi":"10.1109/3M-NANO.2018.8552195","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552195","url":null,"abstract":"Micro/nano capsules embedment was an effective method to repair micro crack and mechanical damage. In this paper, preparation technology of self-healing micro-nano capsule based on calcium alginate was studied by in-situ method. And the rate of covering and particle size were investigated under different emulsifier dosages and core-wall ratios.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"67 1","pages":"151-154"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84665380","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552181
Chenlong Li, Hong-sen Yan
Combining multi-dimensional Taylor network (MTN) model with improved conjugate gradient (ICG) method, named ICG-MTN, is proposed for identification of nonlinear time-delay system in this paper. MTN is regarded as the identification model relying on its characteristic of strong approximation, and ICG method is regarded as the learning algorithm of MTN. Meanwhile, back propagation neural network (BPNN) is regarded as the method of comparison. By the experimental results, the nonlinear time-delay system can be identified effectively by the proposed method, and the effectiveness is better than the BPNN.
{"title":"Identification of Nonlinear Time-delay System Using Multi-dimensional Taylor Network Model","authors":"Chenlong Li, Hong-sen Yan","doi":"10.1109/3M-NANO.2018.8552181","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552181","url":null,"abstract":"Combining multi-dimensional Taylor network (MTN) model with improved conjugate gradient (ICG) method, named ICG-MTN, is proposed for identification of nonlinear time-delay system in this paper. MTN is regarded as the identification model relying on its characteristic of strong approximation, and ICG method is regarded as the learning algorithm of MTN. Meanwhile, back propagation neural network (BPNN) is regarded as the method of comparison. By the experimental results, the nonlinear time-delay system can be identified effectively by the proposed method, and the effectiveness is better than the BPNN.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"7 1","pages":"87-90"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84793840","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552254
S. Huang, Xiubing Jing, Peng Shang, Fujun Wang
this paper proposes a novel piezoelectric actuated (PEA) two-degree-of-freedom (2-DOF) compliant stage. Firstly, the stage’s structure is introduced. The stage have mirror symmetry about the YZ-plane. It mainly consists of a Scott-Russell (SR) mechanism, a leverage mechanism, and a U-shaped flexure hinge (UFH) mechanism. The input end of the UFH mechanism can be guided by the parallelogram guidance mechanism. And a rotational constraint of the UFH mechanism can be obtained. Hence the undesirable parasitic rotational motions and the coupling motion of UFH mechanism can be eliminated. Secondly, the analytical model of the compliant stage is established by considering all the connecting linkages as flexible components. Finally, by finite element analysis (FEA), the amplification ratio and the natural frequencies of the stage are estimated. The FEA results show that the stage has good performance.
{"title":"Design of A Novel Piezoelectric Actuated Two-Degree-of-freedom Compliant Stage","authors":"S. Huang, Xiubing Jing, Peng Shang, Fujun Wang","doi":"10.1109/3M-NANO.2018.8552254","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552254","url":null,"abstract":"this paper proposes a novel piezoelectric actuated (PEA) two-degree-of-freedom (2-DOF) compliant stage. Firstly, the stage’s structure is introduced. The stage have mirror symmetry about the YZ-plane. It mainly consists of a Scott-Russell (SR) mechanism, a leverage mechanism, and a U-shaped flexure hinge (UFH) mechanism. The input end of the UFH mechanism can be guided by the parallelogram guidance mechanism. And a rotational constraint of the UFH mechanism can be obtained. Hence the undesirable parasitic rotational motions and the coupling motion of UFH mechanism can be eliminated. Secondly, the analytical model of the compliant stage is established by considering all the connecting linkages as flexible components. Finally, by finite element analysis (FEA), the amplification ratio and the natural frequencies of the stage are estimated. The FEA results show that the stage has good performance.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"100 1","pages":"18-22"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89920057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552202
Jian Jin, Si Di, Y. Hua, J. Qi
Fabrication of micro/nano-fluidic channel is the key to micro/nano-fluidic system. Because of its simple equipment, low cost and good bonding strength, bonding technology becomes a suitable technology for sealing micro/nano-fluidic channel. However, during bonding process, the molten polymer will flow into the groove structure inevitably. When the size of the fluid channel decrease, especially when the size reaches the nanometer level, the flowing polymer can easily lead to the channel blockage. It has a negative influence on the precise control of the dimension of the fluid channel. In this paper, the hypothesis of the expansion centerline is put forward by the finite element simulation. According to the hypothesis, a ‘filling-barrier’ structure is designed to reduce the displacement produced by the pressure in the bonding process. Because the amount of filling is diverted, the top filling phenomenon is inhibited and the possibility of blockage is reduced during the bonding process. This paper also gives some design principles of the "filling-barrier" structure, by which we can control the influence of bonding pressure effectively.
{"title":"Controllable Micro/nano-fluidic Channel Bonding Process Based on the Expansion Centerline and “Filling-Barrier” Structure","authors":"Jian Jin, Si Di, Y. Hua, J. Qi","doi":"10.1109/3M-NANO.2018.8552202","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552202","url":null,"abstract":"Fabrication of micro/nano-fluidic channel is the key to micro/nano-fluidic system. Because of its simple equipment, low cost and good bonding strength, bonding technology becomes a suitable technology for sealing micro/nano-fluidic channel. However, during bonding process, the molten polymer will flow into the groove structure inevitably. When the size of the fluid channel decrease, especially when the size reaches the nanometer level, the flowing polymer can easily lead to the channel blockage. It has a negative influence on the precise control of the dimension of the fluid channel. In this paper, the hypothesis of the expansion centerline is put forward by the finite element simulation. According to the hypothesis, a ‘filling-barrier’ structure is designed to reduce the displacement produced by the pressure in the bonding process. Because the amount of filling is diverted, the top filling phenomenon is inhibited and the possibility of blockage is reduced during the bonding process. This paper also gives some design principles of the \"filling-barrier\" structure, by which we can control the influence of bonding pressure effectively.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"108 1","pages":"23-27"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75848907","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2018-08-01DOI: 10.1109/3M-NANO.2018.8552229
Si Chen, Henry Francis, Chih-Hua Ho, Kaijun Che, Yun-Ran Wang, M. Hopkinson, Shiyong Zhang, C. Jin, Chaoyuan Jin
Following the demonstration of quality factor (Q-factor) control in coupled photonic crystal nanocavities, we present our new research work on the Q-factor control in laterally coupled vertical cavities. Thermal-optic Q-tuning has been successfully observed when bringing a square-shaped vertical cavity and an adjacent Fabry-Pérot-like cavity into resonance. The approach paves the way towards a few quantum optical applications using vertical cavities.
{"title":"Quality Factor Control in Laterally-Coupled Vertical Cavities","authors":"Si Chen, Henry Francis, Chih-Hua Ho, Kaijun Che, Yun-Ran Wang, M. Hopkinson, Shiyong Zhang, C. Jin, Chaoyuan Jin","doi":"10.1109/3M-NANO.2018.8552229","DOIUrl":"https://doi.org/10.1109/3M-NANO.2018.8552229","url":null,"abstract":"Following the demonstration of quality factor (Q-factor) control in coupled photonic crystal nanocavities, we present our new research work on the Q-factor control in laterally coupled vertical cavities. Thermal-optic Q-tuning has been successfully observed when bringing a square-shaped vertical cavity and an adjacent Fabry-Pérot-like cavity into resonance. The approach paves the way towards a few quantum optical applications using vertical cavities.","PeriodicalId":6583,"journal":{"name":"2018 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"9 1","pages":"60-64"},"PeriodicalIF":0.0,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72728394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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