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2013 Spanish Conference on Electron Devices最新文献

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Macroporous silicon FET transistors for power applications 用于功率应用的大孔硅场效应晶体管
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481350
D. Vega, R. Najar, M. Piña, A. Rodríguez
In this paper we propose the use of macroporous silicon for microelectronic devices. We propose and study four different FET transistor structures using macroporous silicon as base material. Macroporous silicon is a novel material whose application most commonly suggested is as photonic crystals. Nevertheless, this is a versatile structured material with applications in many different areas, though microelectronics is not usually cited. We suggest its use for electronics devices as a FET transistor. The presented structures are studied by simulation in device modelling software (TCAD). Two kinds of operation modes have been considered: vertical (axial) and horizontal (transverse) in relation to the etched pores in silicon. One of the notable features of the described structures is the ability to have a massive number of identical unitary-cell transistor devices operating in parallel, having an all-around gate. These features allow driving the gate with low controlling voltages while handling large current density. Furthermore, the external device volume remains small thanks to the very large area-to-volume ratio. Thanks to the considerable amount of active area achievable, we further propose the use of such devices for low-voltage power applications. In this paper we present the obtained results of our simulations of the proposed devices.
本文提出将大孔硅用于微电子器件。以大孔硅为基材,提出并研究了四种不同的场效应晶体管结构。大孔硅是一种新型材料,其应用最广泛的是作为光子晶体。然而,这是一种用途广泛的结构材料,应用于许多不同的领域,尽管微电子通常不被引用。我们建议将其作为FET晶体管用于电子器件。采用器件建模软件(TCAD)对所提出的结构进行了仿真研究。考虑了两种操作模式:垂直(轴向)和水平(横向)与硅中蚀刻孔的关系。所描述的结构的显著特征之一是能够有大量相同的单单元晶体管器件并联工作,具有全面的栅极。这些特性允许以低控制电压驱动栅极,同时处理大电流密度。此外,由于非常大的面积体积比,外部设备体积仍然很小。由于可实现相当大的有源面积,我们进一步建议将此类器件用于低压电源应用。在本文中,我们给出了我们所提出的器件的模拟结果。
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引用次数: 0
Etching of AIGaN/GaN HEMT structures by Cl2-based ICP 用cl2基ICP刻蚀AIGaN/GaN HEMT结构
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481334
Z. Gao, M. Romero, F. Calle
AIGaN/GaN mesa etching using different plasma combinations of Cl2/Ar, Cl2/BCl3 and Cl2/CF4 by inductively coupled plasma was investigated. It was observed that the etch rate of Cl2/Ar increases linearly with the Ar content. In contrast to the Ar-based mixtures, Cl2/BCl3 and Cl2/CF4 plasma combinations show a damage-free surface. Furthermore, the lowest isolation current values achieved in devices with reduced sheet resistance were achieved by using Cl2/BCl3 plasma.
研究了Cl2/Ar、Cl2/BCl3和Cl2/CF4不同等离子体组合在AIGaN/GaN表面的电感耦合腐蚀。结果表明,随着Ar含量的增加,Cl2/Ar的腐蚀速率呈线性增加。与ar基混合物相比,Cl2/BCl3和Cl2/CF4等离子体组合显示出无损伤表面。此外,通过使用Cl2/BCl3等离子体,在降低薄片电阻的器件中实现了最低的隔离电流值。
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引用次数: 2
Schottky Barrier MOSFETs working in the linear regime: A Monte Carlo study of microscopic transport 肖特基势垒mosfet线性工作:微观输运的蒙特卡罗研究
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481343
C. Couso, R. Rengel, M. J. Martín
This paper presents a detailed study (using a 2D Monte Carlo simulator) of the impact on electronic transport of dopant segregation layers in Schottky Barrier MOSFETs operating under the linear regime. It is shown that with a careful control of the layer parameters the performance of the devices are significantly improved, with a boosting of the drive current and an important reduction of the linear resistance (Rds(on)). The origin of these advantages can be related to internal microscopic transport quantities like transit time, distance travelled, scattering mechanisms, etc. The enhanced performance of Schottky Barrier MOSFETs including dopant segregation layers confirms the suitability of this technology to help extending the IRTS roadmap for Silicon MOS devices.
本文使用二维蒙特卡罗模拟器详细研究了在线性环境下工作的肖特基势垒mosfet中掺杂偏析层对电子输运的影响。结果表明,通过对层参数的仔细控制,器件的性能得到了显著改善,驱动电流得到了提高,线性电阻(Rds)得到了显著降低。这些优势的来源可能与内部微观输运量有关,如传输时间、传播距离、散射机制等。包括掺杂偏析层在内的肖特基势垒mosfet的增强性能证实了该技术的适用性,有助于扩展硅MOS器件的IRTS路线图。
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引用次数: 1
Modeling of time-dependent variability caused by Bias Temperature Instability 由偏置温度不稳定性引起的时变率的建模
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481387
J. Martín-Martínez, M. Moras, N. Ayala, V. Velayudhan, R. Rodríguez, M. Nafría, X. Aymerich
In small devices, Bias Temperature Instability (BTI) produces discrete threshold voltage (VT) shifts, which are attributed to the charge and discharge of single defects. A deep knowledge of the properties of these defects is required in order to correctly evaluate the BTI degradation in devices. In this work, these defects are experimentally characterized. Their properties are the input parameters to a previously presented BTI physics-based model that allows the evaluation of the corresponding VT shift. The model has been included in a circuit simulator. As an example the BTI effects on SRAM performance on SRAM cells performance and variability is studied.
在小型器件中,偏置温度不稳定性(BTI)产生离散阈值电压(VT)移位,这归因于单个缺陷的充放电。为了正确评估器件中的BTI退化,需要对这些缺陷的性质有深入的了解。在这项工作中,这些缺陷是实验表征。它们的属性是之前提出的基于BTI物理模型的输入参数,该模型允许评估相应的VT位移。该模型已应用于一个电路模拟器中。以BTI对SRAM性能的影响为例,研究了SRAM电池的性能和可变性。
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引用次数: 3
Metal oxide nanowires as building blocks for light detectors, gas sensors and biosensors 金属氧化物纳米线作为光探测器、气体传感器和生物传感器的构建模块
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481370
J. Pau, C. Núñez, A. Marín, E. Ruiz, J. Piqueras
Metal oxide nanowires are promising structures for the development of novel electronic and optoelectronic devices. In this work, we describe the synthesis of ZnO and CuO nanowires by vapor phase transport and Cu oxidation, respectively. After removal from the substrate, the nanowires are deposited on pairs of conductive electrodes previously evaporated on SiO2/Si substrates by dielectrophoresis. Al-doped ZnO (AZO) electrodes present good stability during the process and enable the fabrication of ultraviolet photoconductors and sensors along with ZnO nanowires. On the other hand, the deposition of CuO on AZO electrodes yields rectifying behavior related to the p-type conduction in CuO and the formation a diode-to-diode structure with the n-type electrodes. In contrast to ZnO photoconductors, these structures present optical response under illumination with visible and near-infrared light and short turn-on and recovery times.
金属氧化物纳米线是一种很有前途的新型电子和光电子器件结构。本文分别介绍了气相输运和Cu氧化法制备ZnO和CuO纳米线。从衬底上移除后,纳米线被沉积在导电电极对上,导电电极对之前通过介电电泳蒸发在SiO2/Si衬底上。al掺杂ZnO (AZO)电极在制备过程中表现出良好的稳定性,使其能够与ZnO纳米线一起制备紫外光导体和传感器。另一方面,在AZO电极上沉积CuO会产生与CuO中p型导电有关的整流行为,并与n型电极形成二极管对二极管结构。与ZnO光导体相比,这些结构在可见光和近红外光照射下具有光学响应,并且开启和恢复时间短。
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引用次数: 2
Direct-write patterning of metals and graphene oxide electrodes by arc erosion for organic device manufacturing 金属和氧化石墨烯电极的电弧侵蚀直接写入模式,用于有机器件制造
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481330
M. García-Vélez, Á. L. Álvarez, C. Coya, G. Alvarado, X. Díez-Betriu, A. de Andrés, J. Jiménez-Trillo
Electric arc erosion performed at low continuous voltages has been recently proven as a successful patterning technique for thin films of different conductive materials. In this work, we present an application of this procedure to materials typically aimed for device electrodes, such as indium tin oxide (ITO), gold (Au), graphene oxide (GO) or aluminum doped zinc oxide (AZO), as well as a more in depth study of the electrical discharge generation at submicron scale, which allows optimizing the procedure.
在低连续电压下进行的电弧侵蚀最近被证明是一种成功的不同导电材料薄膜的图案化技术。在这项工作中,我们将这一过程应用于通常用于器件电极的材料,如氧化铟锡(ITO)、金(Au)、氧化石墨烯(GO)或铝掺杂氧化锌(AZO),并对亚微米尺度下的放电产生进行了更深入的研究,从而可以优化这一过程。
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引用次数: 0
Trends in crystalline silicon growth for low cost and efficient photovoltaic cells 低成本高效光伏电池晶体硅生长趋势
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481403
V. Parra, T. Carballo, D. Cancillo, B. Moralejo, O. Martínez, J. Jiménez, J. Bullón, J. Míguez, R. Ordás
Photovoltaic (PV) industry is facing one of its worst times ever. The over-capacity and the reduced market worldwide are impacting the supply/demand across the PV value chain, leading to certainly low sell prices, noticeably below the production costs. As a consequence, many factories are going into insolvency in these times. In addition, the insufficient options to install PV modules demand devices based on well-optimized cost/performance (CP) ratios. Crystalline growth of silicon solar wafers for PV silicon devices has a direct influence on this critical relation. Two industrial approaches aiming at improving the CP ratio will be presented in this paper: i) the use of high-grade umg-Si feedstock and ii) the implementation of new seed-growth monocast process.
光伏产业正面临有史以来最糟糕的时期之一。产能过剩和全球市场萎缩正在影响整个光伏价值链的供需,导致销售价格明显低于生产成本。因此,在这段时间里,许多工厂都破产了。此外,安装光伏组件的选择不足,需要基于优化的成本/性能(CP)比率的设备。用于光伏硅器件的硅太阳硅片的晶体生长对这一临界关系有直接影响。本文将介绍两种旨在提高CP比的工业方法:i)使用高品位钨硅原料和ii)实施新的种子生长单播工艺。
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引用次数: 3
Nanodevice simulations on CloudStack 在CloudStack上的纳米器件模拟
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481329
F. Gomez-Folgar, E. Comesaña, R. Valin, A. García-Loureiro, T. F. Pena
It is well-known that nanodevice simulations are a high CPU demanding task. Currently, the environmental concern and the green IT revolution have made necessary to reuse the available computational resources being, at the same time, indispensable to reduce the energy consumption as much as possible. Nowadays, thanks to the cloud technology, it is possible to perform on-demand scaling of computational resources. Facilitating the optimal use of resources as they are required, it is possible to optimize the power consumption. In this paper, the possibilities of a private cloud to deploy and use Sentaurus, a tool for nanodevice simulation, are analysed. The architecture of the infrastructure that is being employed to perform semiconductor device simulations and to reuse the available computational power is also presented.
众所周知,纳米器件仿真是一项对CPU要求很高的任务。目前,环境问题和绿色IT革命使得有必要重新利用可用的计算资源,同时,尽可能减少能源消耗是必不可少的。如今,多亏了云技术,按需扩展计算资源成为可能。促进所需资源的最佳利用,可以优化功耗。在本文中,分析了私有云部署和使用纳米器件模拟工具Sentaurus的可能性。还介绍了用于执行半导体器件模拟和重用可用计算能力的基础设施的体系结构。
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引用次数: 2
Pressurized microvalve with SMD-based activation to drive fluid in low-cost and autonomous MEMS 基于smd激活的加压微阀,可在低成本和自主MEMS中驱动流体
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481364
G. Flores, F. Perdigones, J. Quero
This paper reports an inexpensive and simple method to impulse fluid in PCB-based Lab on a Chip (LOC) MEMS devices. This method consists on using pressurized SU-8 chambers, with membranes as cover. The membrane is burst thank to the increase of pressure in the chamber due to the increase of temperature, at constant volume. The increase of temperature is achieved supplying voltage to a Surface-Mounted-Device (SMD) resistor. This method is intended for fabricating autonomous and inexpensive LOC devices.
本文报道了一种在基于pcb的芯片实验室(Lab on a Chip, LOC) MEMS器件中实现流体脉冲的廉价而简单的方法。这种方法包括使用加压的SU-8室,用膜作为覆盖物。在体积不变的情况下,由于温度升高,腔内压力增加,膜破裂。温度的升高是通过向表面贴装器件(SMD)电阻提供电压来实现的。该方法用于制造自主和廉价的LOC器件。
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引用次数: 1
Thickness dependence of organic photodetector bandwidth 有机光电探测器带宽的厚度依赖性
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481372
B. Arredondo, B. Romero, C. de Dios, R. Vergaz, R. Criado, J. Sánchez-Pena
Organic bulk heterojunction photodiodes based on a blend of poly(3-hexylthiophene):1-(3-methoxycarbonyl)-propyl-1-1-phenyl-(6, 6)C61 (P3HT:PCBM) have been fabricated with different active layer thicknesses. Current-voltage characteristics and cut-off frequency were measured under Green-LED illumination. Impedance measurements were performed and a simple equivalent circuit was used to fit the resulting Cole-cole diagram. Parameters obtained from the fit were used to estimate the theoretical photodetector cut-off frequency and compared to the experimental one. The material dielectric constant was estimated using the capacitance obtained from the impedance fit.
以聚(3-己基噻吩):1-(3-甲氧基羰基)-丙基-1-1-苯基-(6,6)C61 (P3HT:PCBM)共混物为基础,制备了具有不同活性层厚度的有机体异质结光电二极管。在绿色led照明下测量了电流电压特性和截止频率。进行阻抗测量,并使用一个简单的等效电路拟合得到的科尔-科尔图。利用拟合得到的参数估计了光电探测器的理论截止频率,并与实验结果进行了比较。利用阻抗拟合得到的电容估计材料介电常数。
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引用次数: 1
期刊
2013 Spanish Conference on Electron Devices
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