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2013 Spanish Conference on Electron Devices最新文献

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Analysis of crossover point and threshold voltage for triple gate MOSFET 三栅MOSFET的交叉点和阈值电压分析
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481352
D. Sharma, S. Vishvakarma
In this paper, we have analyzed for the first time that the body potential versus gate voltage characteristic curves for device having equal channel length but different body widths pass through a single common point called as `crossover point', for triple gate (TriG) MOSFET. We have found that at this crossover point, there is no potential drop from body center to the surface in the Si body. However, there is potential variation along the channel length. The value of crossover point increases with decreasing value of channel length for short channel devices. However, for long channel devices there is no such crossover point. Using the concept of crossover point, we have justified that in case of surface potential based definition, the threshold voltage changes anomalously with the body thickness variation for different channel lengths.
在本文中,我们首次分析了具有相同通道长度但不同体宽的器件的体电位与栅极电压特性曲线通过称为“交叉点”的单个公共点,用于三栅极(TriG) MOSFET。我们发现在这个交点处,硅体中没有从体心到表面的电位下降。然而,沿着通道长度存在潜在的变化。对于短通道器件,交叉点的值随着通道长度的减小而增大。然而,对于长通道设备,没有这样的交叉点。利用交叉点的概念,我们证明了在基于表面电位定义的情况下,对于不同的通道长度,阈值电压随体厚度的变化而异常变化。
{"title":"Analysis of crossover point and threshold voltage for triple gate MOSFET","authors":"D. Sharma, S. Vishvakarma","doi":"10.1109/CDE.2013.6481352","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481352","url":null,"abstract":"In this paper, we have analyzed for the first time that the body potential versus gate voltage characteristic curves for device having equal channel length but different body widths pass through a single common point called as `crossover point', for triple gate (TriG) MOSFET. We have found that at this crossover point, there is no potential drop from body center to the surface in the Si body. However, there is potential variation along the channel length. The value of crossover point increases with decreasing value of channel length for short channel devices. However, for long channel devices there is no such crossover point. Using the concept of crossover point, we have justified that in case of surface potential based definition, the threshold voltage changes anomalously with the body thickness variation for different channel lengths.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"2016 1","pages":"99-102"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86321983","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Hydrogenated amorphous silicon deposited by high pressure sputtering for HIT solar cells 高压溅射沉积氢化非晶硅用于HIT太阳能电池
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481411
R. Garcia-Hemansanz, E. García‐Hemme, D. Pastor, Á. Prado, I. Mártil, G. González-Díaz, J. Olea, Francisco J. Ferrer
Hydrogenated amorphous silicon thin films were deposited using a high pressure sputtering (HPS) system. In this work, we have studied the composition and optical properties of the films (band-gap, absorption coefficient), and their dependence with the deposition parameters. For films deposited at high pressure (1 mbar), composition measurements show a critical dependence of the purity of the films with the RF power. Films manufactured with RF-power above 80W exhibit good properties for future application, similar to the films deposited by CVD (Chemical Vapor Deposition) for hydrogenated amorphous silicon.
采用高压溅射(HPS)法制备了氢化非晶硅薄膜。在这项工作中,我们研究了薄膜的组成和光学性质(带隙,吸收系数),以及它们与沉积参数的关系。对于在高压下(1mbar)沉积的薄膜,成分测量表明薄膜的纯度与射频功率有关键的依赖关系。rf功率高于80W的薄膜在未来的应用中表现出良好的性能,类似于CVD(化学气相沉积)沉积氢化非晶硅的薄膜。
{"title":"Hydrogenated amorphous silicon deposited by high pressure sputtering for HIT solar cells","authors":"R. Garcia-Hemansanz, E. García‐Hemme, D. Pastor, Á. Prado, I. Mártil, G. González-Díaz, J. Olea, Francisco J. Ferrer","doi":"10.1109/CDE.2013.6481411","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481411","url":null,"abstract":"Hydrogenated amorphous silicon thin films were deposited using a high pressure sputtering (HPS) system. In this work, we have studied the composition and optical properties of the films (band-gap, absorption coefficient), and their dependence with the deposition parameters. For films deposited at high pressure (1 mbar), composition measurements show a critical dependence of the purity of the films with the RF power. Films manufactured with RF-power above 80W exhibit good properties for future application, similar to the films deposited by CVD (Chemical Vapor Deposition) for hydrogenated amorphous silicon.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"17 1","pages":"337-340"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82784543","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Defect assessment and leakage control in atomic layer deposited Al2O3 and HfO2 dielectrics Al2O3和HfO2电介质原子层沉积缺陷评估与泄漏控制
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481396
M. B. González, J. M. Rafí, O. Beldarrain, M. Zabala, F. Campabadal
In this work, a systematic study of the electrical characteristics of Al2O3 and HfO2 dielectrics based MOS capacitors is presented enabling the analysis of the impact of pre-existing electrically active defects, stress induced degradation and the dielectric breakdown phenomena on the leakage current behavior.
在这项工作中,系统地研究了基于Al2O3和HfO2介质的MOS电容器的电学特性,从而分析了预先存在的电活性缺陷、应力诱导降解和介质击穿现象对泄漏电流行为的影响。
{"title":"Defect assessment and leakage control in atomic layer deposited Al2O3 and HfO2 dielectrics","authors":"M. B. González, J. M. Rafí, O. Beldarrain, M. Zabala, F. Campabadal","doi":"10.1109/CDE.2013.6481396","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481396","url":null,"abstract":"In this work, a systematic study of the electrical characteristics of Al2O3 and HfO2 dielectrics based MOS capacitors is presented enabling the analysis of the impact of pre-existing electrically active defects, stress induced degradation and the dielectric breakdown phenomena on the leakage current behavior.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"50 2","pages":"277-280"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91439889","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Design and fabrication of sensor structures for the measurement of toxic gases 有毒气体测量传感器结构的设计与制造
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481354
J. Gonzalez-Chavarri, I. Castro-Hurtado, G. Mandayo, E. Castaño
In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.
本文介绍了在苯气体传感器件上直接生长氧化锌纳米结构的方法。该传感器由氧化铝衬底与铂互指微电极和铂加热器组成。纳米结构的生长过程基于气-液-固方法,从射频溅射锌薄膜开始。
{"title":"Design and fabrication of sensor structures for the measurement of toxic gases","authors":"J. Gonzalez-Chavarri, I. Castro-Hurtado, G. Mandayo, E. Castaño","doi":"10.1109/CDE.2013.6481354","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481354","url":null,"abstract":"In this paper the direct growth of ZnO nanostructures onto a sensing device for benzene gas sensing is presented. This sensor consists in an alumina substrate with platinum interdigitated microelectrodes and a Pt heater. The nanostructure growth process is based on a vapor-liquid-solid method starting from a RF sputtered Zn thin film.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"78 1","pages":"107-110"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83884227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Peak emission wavelength tuning for Light Emitting Diodes and lasers for InGaN — deltaInyGa1−yN Quantum Well by varying the composition of the delta well 通过改变δ阱的组成来调整InGaN - deltaInyGa1−yN量子阱的发光二极管和激光器的峰值发射波长
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481379
I. Mahbub, M. S. Islam, S. Biswas
Four InGaN-delta InyGa1-yN Quantum Wells (QW) with four different values of y (1, 0.9, 0.8, 0.7) were investigated through the numerical solution of a k.p Hamiltonian with the Finite Difference Method (FDM). The spontaneous emission spectra and optical gain spectra of the four structures have been found to have a definite pattern where increasing the value of y gradually shifted the spectra toward the higher energy regions. The electron-hole ground state overlaps were not found to change by a great amount. Increasing y brought about a predictable shift of the spectra toward the higher energy regions at the expense of electron-hole wave function overlap.
利用有限差分法(FDM)对四种不同y值(1、0.9、0.8、0.7)的InGaN-delta InyGa1-yN量子阱(QW)进行了数值求解。发现这四种结构的自发发射光谱和光增益光谱有一个明确的模式,即随着y值的增加,光谱逐渐向高能区移动。电子-空穴基态重叠没有发生很大的变化。增加y可以使能谱向高能区移动,但代价是电子-空穴波函数重叠。
{"title":"Peak emission wavelength tuning for Light Emitting Diodes and lasers for InGaN — deltaInyGa1−yN Quantum Well by varying the composition of the delta well","authors":"I. Mahbub, M. S. Islam, S. Biswas","doi":"10.1109/CDE.2013.6481379","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481379","url":null,"abstract":"Four InGaN-delta InyGa1-yN Quantum Wells (QW) with four different values of y (1, 0.9, 0.8, 0.7) were investigated through the numerical solution of a k.p Hamiltonian with the Finite Difference Method (FDM). The spontaneous emission spectra and optical gain spectra of the four structures have been found to have a definite pattern where increasing the value of y gradually shifted the spectra toward the higher energy regions. The electron-hole ground state overlaps were not found to change by a great amount. Increasing y brought about a predictable shift of the spectra toward the higher energy regions at the expense of electron-hole wave function overlap.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"21 1","pages":"207-210"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85707837","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The Intermediate Band approach in the third solar cell generation context 中间波段方法在第三太阳能电池发电环境
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481401
G. González-Díaz, I. Mártil, A. del Prado, D. Pastor, E. García‐Hemme, R. García-Hernansanz, P. Wahnón, J. Olea
Within the framework of the third solar cell generation some new ideas to enlarge the spectral response of the solar cells toward the infrared have been proposed. Among them the inclusion of an Intermediate Band (IB) seems to be very promising. This paper will deal with one of the ways to generate the IB namely the deep level center approach. We will discuss not only its existence but also the carriers lifetime recovery which is necessary to obtain the expected increase of the solar cell efficiency.
在第三代太阳能电池的框架内,提出了一些扩大太阳能电池对红外光谱响应的新思路。其中包括一个中间波段(IB)似乎很有希望。本文将讨论生成IB的一种方法,即深层中心方法。我们不仅讨论了它的存在性,还讨论了载流子寿命回收,这是获得预期的太阳能电池效率提高所必需的。
{"title":"The Intermediate Band approach in the third solar cell generation context","authors":"G. González-Díaz, I. Mártil, A. del Prado, D. Pastor, E. García‐Hemme, R. García-Hernansanz, P. Wahnón, J. Olea","doi":"10.1109/CDE.2013.6481401","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481401","url":null,"abstract":"Within the framework of the third solar cell generation some new ideas to enlarge the spectral response of the solar cells toward the infrared have been proposed. Among them the inclusion of an Intermediate Band (IB) seems to be very promising. This paper will deal with one of the ways to generate the IB namely the deep level center approach. We will discuss not only its existence but also the carriers lifetime recovery which is necessary to obtain the expected increase of the solar cell efficiency.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"112 1","pages":"297-300"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79623062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Simulation of a-Si:H dual junction solar cells a-Si:H双结太阳能电池的模拟
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481420
A. Garcia-Rivera, E. Comesaña, A. García-Loureiro, R. Valin, J. Rodríguez, M. Vetter
In this paper the behaviour of the current density-voltage (J-V) characteristic curves of hydrogenated amorphous silicon (a-Si:H) tandem solar cells (a-Si:H/a-Si:H) with heavy doped tunnelling junction of hydrogenated microcrystalline silicon (JLc-Si:H) n±/p± is analysed. The multi-junction solar cells are being used as an alternative to single junction (SJ) solar cells trying to reduce the Staebler-Wronski Effect (SWE) and to increase the solar cell stability and efficiency. The dual-junction (DJ) solar cell is formed by a stack of two p-i-n a-Si:H solar cells (top and bottom solar cells) whose J-V characteristic curves are also studied. Important in this kind of device is an exact adjustment of the current generation in top and bottom cells since both cells are connected in series and therefore must generate the same short circuit current density (Jsc). The Jsc could present a miss-matching due to the different absorption of light in deeper parts of the device if the thickness of top and bottom cell are not well adjusted. Changing the relation between the thickness of the active layers of the tandem solar cell, the miss-matching in the Jsc value between top and bottom solar cells can be minimized. The here developed computer simulations of the electrical and optical properties of the tandem device will help us to get a better understanding of tandem solar cells in order to design in a future work multi-junction solar cells made of different materials.
本文分析了重掺杂氢化微晶硅(JLc-Si:H)隧道结的氢化非晶硅(a-Si:H)串联太阳能电池(a-Si:H/a-Si:H) n±/p±的电流密度-电压(J-V)特性曲线。多结太阳能电池正被用作单结太阳能电池的替代品,试图减少Staebler-Wronski效应(SWE),提高太阳能电池的稳定性和效率。双结(DJ)太阳电池由两个p-i-n - a- si:H太阳电池(顶部和底部太阳电池)堆叠而成,并研究了其J-V特性曲线。在这种设备中,重要的是精确调整顶部和底部电池的电流产生,因为两个电池是串联连接的,因此必须产生相同的短路电流密度(Jsc)。如果顶部和底部电池的厚度没有很好地调整,Jsc可能会由于器件较深部分对光的吸收不同而出现不匹配。通过改变串联太阳电池有源层厚度之间的关系,可以最大限度地减少上下两层太阳电池间Jsc值的不匹配。本文开发的串联装置的电学和光学性质的计算机模拟将有助于我们更好地了解串联太阳能电池,以便在未来的工作中设计由不同材料制成的多结太阳能电池。
{"title":"Simulation of a-Si:H dual junction solar cells","authors":"A. Garcia-Rivera, E. Comesaña, A. García-Loureiro, R. Valin, J. Rodríguez, M. Vetter","doi":"10.1109/CDE.2013.6481420","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481420","url":null,"abstract":"In this paper the behaviour of the current density-voltage (J-V) characteristic curves of hydrogenated amorphous silicon (a-Si:H) tandem solar cells (a-Si:H/a-Si:H) with heavy doped tunnelling junction of hydrogenated microcrystalline silicon (JLc-Si:H) n±/p± is analysed. The multi-junction solar cells are being used as an alternative to single junction (SJ) solar cells trying to reduce the Staebler-Wronski Effect (SWE) and to increase the solar cell stability and efficiency. The dual-junction (DJ) solar cell is formed by a stack of two p-i-n a-Si:H solar cells (top and bottom solar cells) whose J-V characteristic curves are also studied. Important in this kind of device is an exact adjustment of the current generation in top and bottom cells since both cells are connected in series and therefore must generate the same short circuit current density (Jsc). The Jsc could present a miss-matching due to the different absorption of light in deeper parts of the device if the thickness of top and bottom cell are not well adjusted. Changing the relation between the thickness of the active layers of the tandem solar cell, the miss-matching in the Jsc value between top and bottom solar cells can be minimized. The here developed computer simulations of the electrical and optical properties of the tandem device will help us to get a better understanding of tandem solar cells in order to design in a future work multi-junction solar cells made of different materials.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"7 1","pages":"373-376"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75278816","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Deep level defects on mono-like and polycrystalline silicon solar cells 单晶硅和多晶硅太阳能电池的深层缺陷
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481405
E. Perez, H. García, H. Castán, S. Dueñas, L. Bailón, B. Moralejo, O. Martínez, J. Jiménez, V. Parra
Defects on mono-like and polycrystalline silicon solar cells are studied in depth. These defects are in the basis of the higher quantum efficiency of mono-like solar cells (~18%) with respect to polycrystalline ones (~16%). Using the thermal admittance spectroscopy technique we found that both of them have a deep level due to a Fe-B complex. Furthermore, the deep level in the first one (224meV) is shallower than in the second one (345meV). Shallower deep levels degrade less the efficiency on solar cells, so this characteristic of the deep level in the mono-like solar cells leads to a better results in efficiency.
对单晶硅和多晶硅太阳电池缺陷进行了深入研究。这些缺陷是基于单晶太阳能电池的量子效率(~18%)高于多晶太阳能电池(~16%)。利用热导纳光谱技术,我们发现由于Fe-B配合物,它们都具有深能级。此外,第一个(224meV)的深能级比第二个(345meV)浅。较浅的深层层对太阳能电池的效率降低较少,因此单体太阳能电池的深层层的这一特性导致了更好的效率结果。
{"title":"Deep level defects on mono-like and polycrystalline silicon solar cells","authors":"E. Perez, H. García, H. Castán, S. Dueñas, L. Bailón, B. Moralejo, O. Martínez, J. Jiménez, V. Parra","doi":"10.1109/CDE.2013.6481405","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481405","url":null,"abstract":"Defects on mono-like and polycrystalline silicon solar cells are studied in depth. These defects are in the basis of the higher quantum efficiency of mono-like solar cells (~18%) with respect to polycrystalline ones (~16%). Using the thermal admittance spectroscopy technique we found that both of them have a deep level due to a Fe-B complex. Furthermore, the deep level in the first one (224meV) is shallower than in the second one (345meV). Shallower deep levels degrade less the efficiency on solar cells, so this characteristic of the deep level in the mono-like solar cells leads to a better results in efficiency.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"15 4 1","pages":"313-316"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78637647","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Electroosmotic impulsion device for integration in PCB-MEMS 集成在PCB-MEMS中的电渗透脉冲装置
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481357
A. Luque, J. M. Soto, F. Perdigones, C. Aracil, J. Quero
This paper presents the design and fabrication process of a microfluidic pump based on the electroosmotic effect, and demonstrates its working. The device is fabricated using a combination of standard PCB processing and SU-8 photolithography, using Flame Retardant 4 (FR4) as substrate, SU-8 as structural material to construct the microchannels and chambers, and copper to built the lines for the electrical connections. The fabrication materials provide an inexpensive device. The proposed pump is intended to be included in SU-8 microfluidic portable platforms as an impulsion device which provides a continuous flow rate. Preliminary experimental results show an electroosmotic effect at 60 V, providing a flow rate of 1 μL/min.
本文介绍了一种基于电渗透效应的微流体泵的设计和制造过程,并对其工作原理进行了说明。该器件采用标准PCB加工和SU-8光刻技术的组合制造,使用阻燃剂4 (FR4)作为衬底,SU-8作为结构材料构建微通道和腔室,铜构建用于电气连接的线路。制造材料提供了一种廉价的装置。所提出的泵打算包括在SU-8微流体便携式平台作为一个脉冲装置,提供连续的流量。初步实验结果表明,在电压为60 V、流速为1 μL/min时,存在电渗透效应。
{"title":"Electroosmotic impulsion device for integration in PCB-MEMS","authors":"A. Luque, J. M. Soto, F. Perdigones, C. Aracil, J. Quero","doi":"10.1109/CDE.2013.6481357","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481357","url":null,"abstract":"This paper presents the design and fabrication process of a microfluidic pump based on the electroosmotic effect, and demonstrates its working. The device is fabricated using a combination of standard PCB processing and SU-8 photolithography, using Flame Retardant 4 (FR4) as substrate, SU-8 as structural material to construct the microchannels and chambers, and copper to built the lines for the electrical connections. The fabrication materials provide an inexpensive device. The proposed pump is intended to be included in SU-8 microfluidic portable platforms as an impulsion device which provides a continuous flow rate. Preliminary experimental results show an electroosmotic effect at 60 V, providing a flow rate of 1 μL/min.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"12 1","pages":"119-122"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80030662","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Subthreshold response of a MOSFET to radiation effects MOSFET对辐射效应的亚阈值响应
Pub Date : 2013-03-21 DOI: 10.1109/CDE.2013.6481340
J. Banqueri, M. Carvajal, S. Martinez-Garcia, A. Palma, M. Vilches, A. Lallena
A study of the degradation of the subthreshold swing in a general-purpose pMOSFET is carried out to evaluate its use as a dosimetric parameter. Its reliability in terms of sensitivity, linearity, and reproducibility is experimentally tested and compared with the threshold voltage shift under gamma rays from a 60Co source up to 56 Gy, typical in radiotherapy treatments. The dependence of the subthreshold swing as a function of temperature is characterized and modeled as a mean for thermal compensation when used for dose measurement. Very promising results have been obtained for the subthreshold swing as a complementary dosimetric parameter to the threshold voltage for enhancing the confidence of dose verification systems based on MOSFETs.
对通用pMOSFET中亚阈值摆幅的退化进行了研究,以评估其作为剂量学参数的用途。通过实验测试了其灵敏度、线性度和再现性方面的可靠性,并将其与放射治疗中典型的60Co源高达56 Gy的伽马射线下的阈值电压位移进行了比较。当用于剂量测量时,亚阈值摆动作为温度函数的依赖性被表征并建模为热补偿的平均值。亚阈值摆幅作为阈值电压的补充剂量学参数,提高了基于mosfet的剂量验证系统的置信度,得到了非常有希望的结果。
{"title":"Subthreshold response of a MOSFET to radiation effects","authors":"J. Banqueri, M. Carvajal, S. Martinez-Garcia, A. Palma, M. Vilches, A. Lallena","doi":"10.1109/CDE.2013.6481340","DOIUrl":"https://doi.org/10.1109/CDE.2013.6481340","url":null,"abstract":"A study of the degradation of the subthreshold swing in a general-purpose pMOSFET is carried out to evaluate its use as a dosimetric parameter. Its reliability in terms of sensitivity, linearity, and reproducibility is experimentally tested and compared with the threshold voltage shift under gamma rays from a 60Co source up to 56 Gy, typical in radiotherapy treatments. The dependence of the subthreshold swing as a function of temperature is characterized and modeled as a mean for thermal compensation when used for dose measurement. Very promising results have been obtained for the subthreshold swing as a complementary dosimetric parameter to the threshold voltage for enhancing the confidence of dose verification systems based on MOSFETs.","PeriodicalId":6614,"journal":{"name":"2013 Spanish Conference on Electron Devices","volume":"35 1","pages":"51-54"},"PeriodicalIF":0.0,"publicationDate":"2013-03-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"77310568","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
期刊
2013 Spanish Conference on Electron Devices
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