Pub Date : 2025-07-15DOI: 10.1007/s40042-025-01439-x
Narendra Naik Mude, Akash Bharat More, Yu-Jung Cha, Sung-Woon Cho
Amorphous metal–oxide–semiconductor (MOS)-based thin-film transistors (TFTs) are gaining attention because of their favorable electrical performance and better operational stability than conventional amorphous silicon semiconductors. This study investigates the impact of the annealing temperature and multilayered structures on the performance and stability of indium–tin–zinc-oxide (ITZO) TFTs. ITZO semiconductors are fabricated under annealing temperatures of 350, 400, and 450 °C to improve the quality of metal–oxide–metal (M–O–M) bonding networks and reduce defect states. Single-, bi-, and tri-layer film configurations are used to optimize the device’s performance and stability. TFTs fabricated at 400 °C with a bi-layer coating show superior device performance and operational stability owing to superior M–O–M bonding networks and reduced charge-trapping characteristics compared to other cases. These results emphasize the importance of annealing temperature and layer thickness in achieving a high mobility, low threshold voltage, and device stability for next-generation display technologies.
{"title":"Performance enhancement in solution-processed indium–tin–zinc-oxide thin-film transistors through annealing temperature modulation and multilayer stacking","authors":"Narendra Naik Mude, Akash Bharat More, Yu-Jung Cha, Sung-Woon Cho","doi":"10.1007/s40042-025-01439-x","DOIUrl":"10.1007/s40042-025-01439-x","url":null,"abstract":"<div><p>Amorphous metal–oxide–semiconductor (MOS)-based thin-film transistors (TFTs) are gaining attention because of their favorable electrical performance and better operational stability than conventional amorphous silicon semiconductors. This study investigates the impact of the annealing temperature and multilayered structures on the performance and stability of indium–tin–zinc-oxide (ITZO) TFTs. ITZO semiconductors are fabricated under annealing temperatures of 350, 400, and 450 °C to improve the quality of metal–oxide–metal (M–O–M) bonding networks and reduce defect states. Single-, bi-, and tri-layer film configurations are used to optimize the device’s performance and stability. TFTs fabricated at 400 °C with a bi-layer coating show superior device performance and operational stability owing to superior M–O–M bonding networks and reduced charge-trapping characteristics compared to other cases. These results emphasize the importance of annealing temperature and layer thickness in achieving a high mobility, low threshold voltage, and device stability for next-generation display technologies.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 6","pages":"778 - 786"},"PeriodicalIF":0.9,"publicationDate":"2025-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145090241","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-15DOI: 10.1007/s40042-025-01434-2
S. Goher, Z. Abbas, M. Y. Rafiq
This study investigates the impact of thermal radiation on the shear flow of two immiscible water-based hybrid nanofluids containing carbon nanotubes, confined within converging boundary layers of unequal strengths. The analysis focuses on comparing two widely used thermal conductivity models, namely, the Yamada–Ota and Xue models for hybrid nanofluids composed of single-walled (SWCNTs) and multi-walled carbon nanotubes (MWCNTs). By applying appropriate similarity transformations, the governing partial differential equations are reduced to a set of nonlinear ordinary differential equations, which are solved numerically using MATLAB's bvp4c solver. The effects of key parameters, including viscosity ratio, thermal conductivity ratio, radiation, and Schmidt number on velocity, temperature, and concentration fields, are examined in detail. Results demonstrate that the Xue model predicts a steeper temperature gradient compared to the Yamada–Ota model, and that increasing the Schmidt number reduces mass transfer in both fluid layers. The comparative analysis provides valuable insights for optimizing thermal and mass transport in stratified flow systems, with potential applications in microchannel heat exchangers, layered cooling devices, and energy systems.
{"title":"Significance of Yamada–Ota and Xue models in shear flow analysis of hybrid nanofluids within converging boundary layers of varying strengths","authors":"S. Goher, Z. Abbas, M. Y. Rafiq","doi":"10.1007/s40042-025-01434-2","DOIUrl":"10.1007/s40042-025-01434-2","url":null,"abstract":"<div><p>This study investigates the impact of thermal radiation on the shear flow of two immiscible water-based hybrid nanofluids containing carbon nanotubes, confined within converging boundary layers of unequal strengths. The analysis focuses on comparing two widely used thermal conductivity models, namely, the Yamada–Ota and Xue models for hybrid nanofluids composed of single-walled (SWCNTs) and multi-walled carbon nanotubes (MWCNTs). By applying appropriate similarity transformations, the governing partial differential equations are reduced to a set of nonlinear ordinary differential equations, which are solved numerically using MATLAB's bvp4c solver. The effects of key parameters, including viscosity ratio, thermal conductivity ratio, radiation, and Schmidt number on velocity, temperature, and concentration fields, are examined in detail. Results demonstrate that the Xue model predicts a steeper temperature gradient compared to the Yamada–Ota model, and that increasing the Schmidt number reduces mass transfer in both fluid layers. The comparative analysis provides valuable insights for optimizing thermal and mass transport in stratified flow systems, with potential applications in microchannel heat exchangers, layered cooling devices, and energy systems.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 6","pages":"764 - 777"},"PeriodicalIF":0.9,"publicationDate":"2025-07-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145090675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-09DOI: 10.1007/s40042-025-01427-1
Anh-Duy Nguyen, Geon Park, Hyunsoo Kim, An Hoang-Thuy Nguyen, Manh-Cuong Nguyen, Rino Choi
As the features of metal oxide semiconductor field-effect transistor (MOSFET) devices are aggressively scaled down, 3-dimensional (3D) integration is receiving significant attention for further semiconductor technology development. While hybrid bonding is a promising solution for 3D integration because it can achieve high interconnect density, thermal management of bonded dies would be a potential problem. The thermal conductivity of the interlayer dielectric is crucial for effective thermal management. With high thermal conductivity and low fabrication temperature, magnesium oxide (MgO) is one of the attractive dielectric interlayers. However, due to the high dielectric constant, crosstalk degradation is a major challenge for MgO implementation. This study proposes various strategies for MgO implementation. 2-dimensional technology, computer-aided-design, and transient thermal simulation have been utilized to investigate MgO performance as an interlayer dielectric. At the same time, the finite element method has been used to study the tradeoff with crosstalk performance. The simulated results reveal that the device operating temperature can be reduced to 7 °C by applying a MgO layer in SiO2 intermetal dielectric, with a thickness ratio ranging from 20 to 40%. MgO single-layer implementation as a heat-conducting channel has also been studied. M4, M5, or M6 are recommended for high thermal conductivity and low crosstalk tradeoff. This study demonstrates that an optimized usage of MgO layer in the back-end-of-line can minimize crosstalk degradation while maintaining heat dissipation enhancement. These results suggest that MgO interlayer can be an attractive solution to the local heating issue in high-performance applications.
{"title":"Heat management strategy for hybrid-bonded wafers using MgO interlayer dielectric","authors":"Anh-Duy Nguyen, Geon Park, Hyunsoo Kim, An Hoang-Thuy Nguyen, Manh-Cuong Nguyen, Rino Choi","doi":"10.1007/s40042-025-01427-1","DOIUrl":"10.1007/s40042-025-01427-1","url":null,"abstract":"<div><p>As the features of metal oxide semiconductor field-effect transistor (MOSFET) devices are aggressively scaled down, 3-dimensional (3D) integration is receiving significant attention for further semiconductor technology development. While hybrid bonding is a promising solution for 3D integration because it can achieve high interconnect density, thermal management of bonded dies would be a potential problem. The thermal conductivity of the interlayer dielectric is crucial for effective thermal management. With high thermal conductivity and low fabrication temperature, magnesium oxide (MgO) is one of the attractive dielectric interlayers. However, due to the high dielectric constant, crosstalk degradation is a major challenge for MgO implementation. This study proposes various strategies for MgO implementation. 2-dimensional technology, computer-aided-design, and transient thermal simulation have been utilized to investigate MgO performance as an interlayer dielectric. At the same time, the finite element method has been used to study the tradeoff with crosstalk performance. The simulated results reveal that the device operating temperature can be reduced to 7 °C by applying a MgO layer in SiO<sub>2</sub> intermetal dielectric, with a thickness ratio ranging from 20 to 40%. MgO single-layer implementation as a heat-conducting channel has also been studied. M4, M5, or M6 are recommended for high thermal conductivity and low crosstalk tradeoff. This study demonstrates that an optimized usage of MgO layer in the back-end-of-line can minimize crosstalk degradation while maintaining heat dissipation enhancement. These results suggest that MgO interlayer can be an attractive solution to the local heating issue in high-performance applications.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 6","pages":"809 - 820"},"PeriodicalIF":0.9,"publicationDate":"2025-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145090252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-08DOI: 10.1007/s40042-025-01432-4
Da Won Jung, Kyung Suk Lee
The Foucault pendulum is a highly educational experiment that provides a visible demonstration of Earth’s rotation—something difficult to perceive in everyday life. However, unlike the specially crafted Foucault pendulums exhibited in science museums, it is not easy for students to observe the precession caused by Earth’s rotation employing a simply constructed spherical pendulum made by themselves. Here, we theoretically explained that it was challenging because the precession of the spherical pendulum erased the precession caused by Earth’s rotation. We also supported this explanation by actual experimental data from our own simple pendulum. Moreover, based on this empirical and theoretical understanding, we focused on minimizing the initial angular velocity, the primary factor that makes it difficult to observe the Foucault pendulum’s precession, and successfully demonstrated Earth’s rotation. We hope that our investigation would help students carry out their own Foucault pendulum experiments and probe Earth’s rotation for themselves in a typical school setting without requiring any specialized equipment.
{"title":"Analyzing challenges of the Foucault pendulum experiment in school and strategies for successful implementation","authors":"Da Won Jung, Kyung Suk Lee","doi":"10.1007/s40042-025-01432-4","DOIUrl":"10.1007/s40042-025-01432-4","url":null,"abstract":"<div><p>The Foucault pendulum is a highly educational experiment that provides a visible demonstration of Earth’s rotation—something difficult to perceive in everyday life. However, unlike the specially crafted Foucault pendulums exhibited in science museums, it is not easy for students to observe the precession caused by Earth’s rotation employing a simply constructed spherical pendulum made by themselves. Here, we theoretically explained that it was challenging because the precession of the spherical pendulum erased the precession caused by Earth’s rotation. We also supported this explanation by actual experimental data from our own simple pendulum. Moreover, based on this empirical and theoretical understanding, we focused on minimizing the initial angular velocity, the primary factor that makes it difficult to observe the Foucault pendulum’s precession, and successfully demonstrated Earth’s rotation. We hope that our investigation would help students carry out their own Foucault pendulum experiments and probe Earth’s rotation for themselves in a typical school setting without requiring any specialized equipment.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 6","pages":"729 - 737"},"PeriodicalIF":0.9,"publicationDate":"2025-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145090665","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-08DOI: 10.1007/s40042-025-01425-3
Xiao Yan Chew, Il Gyeong Choi, Hyuk Jung Kim, Dong-han Yeom
The Janis-Newman-Winicour (JNW) spacetime possesses a naked singularity, although it represents an exact particle-like solution to the Einstein-Klein-Gordon theory with a massless scalar field. Here, we investigate the possible formation of a naked singularity in the JNW spacetime, using the thin-shell approximation to describe the gravitational collapse. By introducing different matter contents to construct thin-shells, we demonstrate the impossibility of naked singularity formation during the gravitational collapse unless the causality or null energy condition of the thin-shell is violated. Therefore, forming a visible naked singularity is impossible, and the weak cosmic censorship is satisfied.
{"title":"Can a naked singularity be formed during the gravitational collapse of a Janis-Newman-Winicour solution?","authors":"Xiao Yan Chew, Il Gyeong Choi, Hyuk Jung Kim, Dong-han Yeom","doi":"10.1007/s40042-025-01425-3","DOIUrl":"10.1007/s40042-025-01425-3","url":null,"abstract":"<div><p>The Janis-Newman-Winicour (JNW) spacetime possesses a naked singularity, although it represents an exact particle-like solution to the Einstein-Klein-Gordon theory with a massless scalar field. Here, we investigate the possible formation of a naked singularity in the JNW spacetime, using the thin-shell approximation to describe the gravitational collapse. By introducing different matter contents to construct thin-shells, we demonstrate the impossibility of naked singularity formation during the gravitational collapse unless the <i>causality</i> or <i>null energy condition</i> of the thin-shell is violated. Therefore, forming a visible naked singularity is impossible, and the weak cosmic censorship is satisfied.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 6","pages":"833 - 842"},"PeriodicalIF":0.9,"publicationDate":"2025-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145090663","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-08DOI: 10.1007/s40042-025-01433-3
Ji-Ho Jang, Dong-O Jeon, Hyunchang Jin, Hyung-Jin Kim
{"title":"Erratum: Beam dynamics for RAON linac and beam lines","authors":"Ji-Ho Jang, Dong-O Jeon, Hyunchang Jin, Hyung-Jin Kim","doi":"10.1007/s40042-025-01433-3","DOIUrl":"10.1007/s40042-025-01433-3","url":null,"abstract":"","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 5","pages":"726 - 726"},"PeriodicalIF":0.9,"publicationDate":"2025-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144914646","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-04DOI: 10.1007/s40042-025-01419-1
Jisoo Choi, Soyeon Jeong, Jeongmok Yang, Jaemin Kim, Moongyu Jang
Neurons in the human brain exchange signals with each other through synapses, synapses transmit neurons’ information and represent various associations. In this study, the devices using quantum dots (QDs) were fabricated and presented as a synaptic mimic device. A programming/erasing process was performed to insert or remove electrons from the quantum dots by applying a gate voltage to the electrode of the device having a stack structure of Pt/Cr/Al2O3/QDs/Al2O3/SiO2/Si. To use as a synaptic mimetic devices, analog characteristics that can express various levels of connection strength, repeatability, reproducibility, and retention are required. Therefore, the number of electrons stored in the quantum dots was adjusted by changing the applied voltage and time, and the synaptic characteristics of the device in various stages were confirmed. The state of the device was expressed through the flatband voltage shift by measuring the capacitance–voltage characteristic curves. In addition, it was observed that the device continued to operate when programming/erasing was repeated, and it was confirmed that the device’s state was maintained over time.
{"title":"Synaptic devices based on flash memory using quantum dots","authors":"Jisoo Choi, Soyeon Jeong, Jeongmok Yang, Jaemin Kim, Moongyu Jang","doi":"10.1007/s40042-025-01419-1","DOIUrl":"10.1007/s40042-025-01419-1","url":null,"abstract":"<div><p>Neurons in the human brain exchange signals with each other through synapses, synapses transmit neurons’ information and represent various associations. In this study, the devices using quantum dots (QDs) were fabricated and presented as a synaptic mimic device. A programming/erasing process was performed to insert or remove electrons from the quantum dots by applying a gate voltage to the electrode of the device having a stack structure of Pt/Cr/Al<sub>2</sub>O<sub>3</sub>/QDs/Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub>/Si. To use as a synaptic mimetic devices, analog characteristics that can express various levels of connection strength, repeatability, reproducibility, and retention are required. Therefore, the number of electrons stored in the quantum dots was adjusted by changing the applied voltage and time, and the synaptic characteristics of the device in various stages were confirmed. The state of the device was expressed through the flatband voltage shift by measuring the capacitance–voltage characteristic curves. In addition, it was observed that the device continued to operate when programming/erasing was repeated, and it was confirmed that the device’s state was maintained over time. </p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 4","pages":"400 - 413"},"PeriodicalIF":0.9,"publicationDate":"2025-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144843234","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-04DOI: 10.1007/s40042-025-01426-2
M. Asaduzzaman
A rigorous theoretical investigation has been made on the propagation of nonlinear gravito-nucleus acoustic waves (shock waves) in a magnetized degenerate quantum plasma, whose constituents are noninertial degenerate electrons and inertial nondegenerate heavy nuclei. To study the nonlinear propagation of these shock waves in the plasma system under consideration, the well-known reductive perturbation technique is used. The Burgers equation is derived and the associated shock structure solution is obtained to analyze the shock profile numerically. The dissipative force is responsible for the formation of the gravito-nucleus acoustic waves (GNAWs). The basic properties (amplitude, width, steepness, etc.) of these GNAWs have also been studied, which are significantly modified by the variation of kinematic viscosity, obliqueness, and number density of the plasma species. The results obtained from our present investigation can be applied to astrophysical compact objects like white dwarfs and neutron stars.
{"title":"Obliquely propagating gravito-nucleus acoustic waves in astrophysical degenerate quantum plasmas","authors":"M. Asaduzzaman","doi":"10.1007/s40042-025-01426-2","DOIUrl":"10.1007/s40042-025-01426-2","url":null,"abstract":"<div><p>A rigorous theoretical investigation has been made on the propagation of nonlinear gravito-nucleus acoustic waves (shock waves) in a magnetized degenerate quantum plasma, whose constituents are noninertial degenerate electrons and inertial nondegenerate heavy nuclei. To study the nonlinear propagation of these shock waves in the plasma system under consideration, the well-known reductive perturbation technique is used. The Burgers equation is derived and the associated shock structure solution is obtained to analyze the shock profile numerically. The dissipative force is responsible for the formation of the gravito-nucleus acoustic waves (GNAWs). The basic properties (amplitude, width, steepness, etc.) of these GNAWs have also been studied, which are significantly modified by the variation of kinematic viscosity, obliqueness, and number density of the plasma species. The results obtained from our present investigation can be applied to astrophysical compact objects like white dwarfs and neutron stars.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 4","pages":"441 - 446"},"PeriodicalIF":0.9,"publicationDate":"2025-07-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144843235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"","authors":"","doi":"","DOIUrl":"","url":null,"abstract":"","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 4","pages":"386 - 393"},"PeriodicalIF":0.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144843203","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2025-07-01DOI: 10.1007/s40042-025-01423-5
Tae Jong Hwang, Jong Su Kim
Amorphous Ga₂O₃ thin films were deposited on c-plane sapphire substrates by RF magnetron sputtering under varying oxygen partial pressures and crystallized into the monoclinic β-phase via post-annealing at 1000 °C in an oxygen atmosphere. Atomic force microscopy revealed that films grown under low oxygen conditions exhibited surface cracks, while those deposited at higher oxygen pressures showed smooth, crack-free surfaces. Raman spectroscopy showed a progressive increase in the intensities of Ga–O vibrational modes around 200 and 415 cm⁻1 with increasing oxygen partial pressure, indicating enhanced structural ordering. Optical transmittance measurements revealed a non-linear change in bandgap energy from 4.8 to 4.95 eV, likely due to variations in defect concentration and stoichiometry. The refractive index remained nearly constant at ~ 1.76, suggesting low film density or structural inhomogeneity. These results suggest that β-Ga₂O₃ thin films fabricated under different oxygen partial pressures may still exhibit variations in microstructure and optical properties even after post-annealing.
采用射频磁控溅射法在C面蓝宝石衬底上制备了Ga₂O₃非晶薄膜,并在氧气气氛中1000℃退火后结晶为单斜晶相β。原子力显微镜显示,在低氧条件下生长的薄膜表面有裂纹,而在高氧压力下沉积的薄膜表面光滑,无裂纹。拉曼光谱显示,随着氧分压的增加,在200和415 cm - 1附近Ga-O振动模式的强度逐渐增加,表明结构有序性增强。光学透射率测量显示,带隙能量从4.8 eV到4.95 eV呈非线性变化,这可能是由于缺陷浓度和化学计量的变化。折射率基本保持在~ 1.76,表明薄膜密度低或结构不均匀。这些结果表明,在不同氧分压下制备的β-Ga₂O₃薄膜即使经过退火后,其微观结构和光学性能仍然会发生变化。
{"title":"Crystallinity and optical properties of post-annealed Ga2O3 thin films deposited under varying oxygen partial pressures","authors":"Tae Jong Hwang, Jong Su Kim","doi":"10.1007/s40042-025-01423-5","DOIUrl":"10.1007/s40042-025-01423-5","url":null,"abstract":"<div><p>Amorphous Ga₂O₃ thin films were deposited on c-plane sapphire substrates by RF magnetron sputtering under varying oxygen partial pressures and crystallized into the monoclinic β-phase via post-annealing at 1000 °C in an oxygen atmosphere. Atomic force microscopy revealed that films grown under low oxygen conditions exhibited surface cracks, while those deposited at higher oxygen pressures showed smooth, crack-free surfaces. Raman spectroscopy showed a progressive increase in the intensities of Ga–O vibrational modes around 200 and 415 cm⁻<sup>1</sup> with increasing oxygen partial pressure, indicating enhanced structural ordering. Optical transmittance measurements revealed a non-linear change in bandgap energy from 4.8 to 4.95 eV, likely due to variations in defect concentration and stoichiometry. The refractive index remained nearly constant at ~ 1.76, suggesting low film density or structural inhomogeneity. These results suggest that β-Ga₂O₃ thin films fabricated under different oxygen partial pressures may still exhibit variations in microstructure and optical properties even after post-annealing.</p></div>","PeriodicalId":677,"journal":{"name":"Journal of the Korean Physical Society","volume":"87 4","pages":"386 - 393"},"PeriodicalIF":0.9,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145160763","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}