Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495473
R. Houlihan, M. Timothy, Conor Duffy, R. Macloughlin, O. Olszewski
We present results from a vibrating mesh nebulizer for which the mesh is a micro-machined silicon membrane perforated with up to a thousand micron-sized, pyramidal holes. Finite element modelling is used to better understand the measured results of the nebulizer when tested in the dry state as well as when loaded with a liquid. In particular, we found that the frequency response of the system is well represented by the superposition of the frequency response of its two main subcomponents: the piezo driving unit and the silicon membrane. As such, the system is found to have resonance peaks for which the complete assembly flexes in addition to peaks that correspond to the flexural resonance modes of the silicon membrane on its own. Similarly, finite element modelling was used to understand differences observed between the frequency response measured on the nebulizer in the dry condition compared to its wet or liquid loaded operation. It was found that coupling between the structural and the acoustic domains shifts the resonance peaks significantly to the left of the frequency plot. In fact, it was found that at the operating frequency of the nebulizer, the system resonates in a (0,3) when the membrane is loaded with a liquid compared with a (0,2) resonance mode when it is operating in the dry state.
{"title":"Acoustic Structural Coupling In A Silicon Based Vibrating Mesh Nebulizer","authors":"R. Houlihan, M. Timothy, Conor Duffy, R. Macloughlin, O. Olszewski","doi":"10.1109/Transducers50396.2021.9495473","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495473","url":null,"abstract":"We present results from a vibrating mesh nebulizer for which the mesh is a micro-machined silicon membrane perforated with up to a thousand micron-sized, pyramidal holes. Finite element modelling is used to better understand the measured results of the nebulizer when tested in the dry state as well as when loaded with a liquid. In particular, we found that the frequency response of the system is well represented by the superposition of the frequency response of its two main subcomponents: the piezo driving unit and the silicon membrane. As such, the system is found to have resonance peaks for which the complete assembly flexes in addition to peaks that correspond to the flexural resonance modes of the silicon membrane on its own. Similarly, finite element modelling was used to understand differences observed between the frequency response measured on the nebulizer in the dry condition compared to its wet or liquid loaded operation. It was found that coupling between the structural and the acoustic domains shifts the resonance peaks significantly to the left of the frequency plot. In fact, it was found that at the operating frequency of the nebulizer, the system resonates in a (0,3) when the membrane is loaded with a liquid compared with a (0,2) resonance mode when it is operating in the dry state.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"24 1","pages":"615-618"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78210100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
This paper reports the classification of white blood cells based on cell diameter Dc, specific membrane capacitance Csm and cytoplasmic conductivity $sigma_{text{cy}}$ leveraging a double T-type constriction channel based microfluidic platform. As a demonstration, Dc, Csm and $sigma_{text{cy}}$ of granulocytes ($mathrm{n}_{text{cell}}=683$), monocytes ($mathrm{n}_{text{cell}}=203$) and lymphocytes ($mathrm{n}_{text{cell}}=856$) were quantified as $9.23pm 0.60$ vs. $9.40pm 0.54$ vs. $6.64pm 0.41 mu mathrm{m}, 1.22pm 0.20$ vs. $1.55pm 0.40$ vs. $1.54pm 0.27 mu mathrm{F}/text{cm}^{2}, 0.35pm 0.06$ vs. $0.53pm 0.06$ vs. $0.46 pm 0.06 mathrm{S}/mathrm{m}$. Successful classification rates of white blood cells were quantified as 71.6% (Dc), 60.4% (Csm), 73.6% ($sigma_{text{cy}}$) and 95.2% (Dc & Csm & $sigma_{text{cy}}$).
本文利用基于双t型收缩通道的微流控平台，基于细胞直径Dc、比膜电容Csm和细胞质电导率$sigma_{text{cy}}$对白细胞进行了分类。作为示范，将粒细胞($mathrm{n}_{text{cell}}=683$)、单核细胞($mathrm{n}_{text{cell}}=203$)和淋巴细胞($mathrm{n}_{text{cell}}=856$)的Dc、Csm和$sigma_{text{cy}}$量化为$9.23pm 0.60$ vs. $9.40pm 0.54$ vs. $6.64pm 0.41 mu mathrm{m}, 1.22pm 0.20$ vs. $1.55pm 0.40$ vs. $1.54pm 0.27 mu mathrm{F}/text{cm}^{2}, 0.35pm 0.06$ vs. $0.53pm 0.06$ vs. $0.46 pm 0.06 mathrm{S}/mathrm{m}$。白细胞分类成功率量化为71.6% (Dc), 60.4% (Csm), 73.6% ($sigma_{text{cy}}$) and 95.2% (Dc & Csm & $sigma_{text{cy}}$).
{"title":"Classification of White Blood Cells Based on Cell Diameter, Specific Membrane Capacitance and Cytoplasmic Conductivity Leveraging Microfluidic Constriction Channel","authors":"Huiwen Tan, Minruihong Wang, Yi Zhang, Xukun Huang, Deyong Chen, Min-Hsien Wu, Junbo Wang, Jian Chen","doi":"10.1109/Transducers50396.2021.9495490","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495490","url":null,"abstract":"This paper reports the classification of white blood cells based on cell diameter D<inf>c</inf>, specific membrane capacitance C<inf>sm</inf> and cytoplasmic conductivity <tex>$sigma_{text{cy}}$</tex> leveraging a double T-type constriction channel based microfluidic platform. As a demonstration, D<inf>c</inf>, C<inf>sm</inf> and <tex>$sigma_{text{cy}}$</tex> of granulocytes (<tex>$mathrm{n}_{text{cell}}=683$</tex>), monocytes (<tex>$mathrm{n}_{text{cell}}=203$</tex>) and lymphocytes (<tex>$mathrm{n}_{text{cell}}=856$</tex>) were quantified as <tex>$9.23pm 0.60$</tex> vs. <tex>$9.40pm 0.54$</tex> vs. <tex>$6.64pm 0.41 mu mathrm{m}, 1.22pm 0.20$</tex> vs. <tex>$1.55pm 0.40$</tex> vs. <tex>$1.54pm 0.27 mu mathrm{F}/text{cm}^{2}, 0.35pm 0.06$</tex> vs. <tex>$0.53pm 0.06$</tex> vs. <tex>$0.46 pm 0.06 mathrm{S}/mathrm{m}$</tex>. Successful classification rates of white blood cells were quantified as 71.6% (D<inf>c</inf>), 60.4% (C<inf>sm</inf>), 73.6% (<tex>$sigma_{text{cy}}$</tex>) and 95.2% (D<inf>c</inf> & C<inf>sm</inf> & <tex>$sigma_{text{cy}}$</tex>).","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"11 1","pages":"1028-1031"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"78363937","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495660
Si Kuan Thio, Sungwoo Bae, Y. Koh, Sung-Yang Park
A plasmonic-enhanced floating electrode optoelectronic tweezers (FEOET) device is presented for effective optical droplet manipulation. Due to the importance of having a high-quality photoconductive layer, conventional FEOET devices face the issue between ineffective dielectrophoretic (DEP) performance and cost-ineffective fabrication. In this study, the use of metallic nanoparticles enables plasmonic light scattering to significantly enhance light absorption onto a photoconductive layer of the device, resulting in a largely improved DEP performance. Two numerical simulation studies have demonstrated the working principle of plasmonic-enhanced DEP and were further validated experimentally by an improved spectrophotometric light absorbance of the TiOPc layer, as well as demonstrating an 11-fold increase in light-actuated droplet speed. With much-improved DEP performance, this plasmonic-enhanced FEOET technology can provide a low-cost solution for various digital microfluidic (DMF) applications with the benefits of device simplicity.
{"title":"Plasmonic-Enhanced Floating Electrode Optoelectronic Tweezers (FEOET) for Effective Optical Droplet Manipulation","authors":"Si Kuan Thio, Sungwoo Bae, Y. Koh, Sung-Yang Park","doi":"10.1109/Transducers50396.2021.9495660","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495660","url":null,"abstract":"A plasmonic-enhanced floating electrode optoelectronic tweezers (FEOET) device is presented for effective optical droplet manipulation. Due to the importance of having a high-quality photoconductive layer, conventional FEOET devices face the issue between ineffective dielectrophoretic (DEP) performance and cost-ineffective fabrication. In this study, the use of metallic nanoparticles enables plasmonic light scattering to significantly enhance light absorption onto a photoconductive layer of the device, resulting in a largely improved DEP performance. Two numerical simulation studies have demonstrated the working principle of plasmonic-enhanced DEP and were further validated experimentally by an improved spectrophotometric light absorbance of the TiOPc layer, as well as demonstrating an 11-fold increase in light-actuated droplet speed. With much-improved DEP performance, this plasmonic-enhanced FEOET technology can provide a low-cost solution for various digital microfluidic (DMF) applications with the benefits of device simplicity.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"112 1","pages":"1016-1019"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75029516","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495618
S. M. Rasid, A. Michael, H. Pota, Ssu-Han Chen, C. Kwok
This paper presents the development of a dynamic analytical model for piezoelectrically driven micro-lens actuator for micro-optics applications. The model uniquely considers the effect of residual stress in the thin films constituting the micro-actuator and the actuating DC offset voltage of the micro-lens actuator. Euler-Bernoulli beam theory is used to formulate the dynamic model. Experiments were performed on the fabricated piezoelectric micro-lens actuator to validate the dynamic analytical model. The results show that the measured resonance frequency of 927 Hz and change in resonance frequency of 4 Hz/V for actuating DC voltage are in good agreement with the analytical dynamic model prediction of resonance frequency 948 Hz and shift in resonance frequency 4.5 Hz/V. This model allows one to predict the dynamic behavior of the micro-lens actuator under the residual stress and actuating DC voltage.
{"title":"Modelling and Experimental Validation of Piezoelectrically Driven Micro-Lens Actuator","authors":"S. M. Rasid, A. Michael, H. Pota, Ssu-Han Chen, C. Kwok","doi":"10.1109/Transducers50396.2021.9495618","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495618","url":null,"abstract":"This paper presents the development of a dynamic analytical model for piezoelectrically driven micro-lens actuator for micro-optics applications. The model uniquely considers the effect of residual stress in the thin films constituting the micro-actuator and the actuating DC offset voltage of the micro-lens actuator. Euler-Bernoulli beam theory is used to formulate the dynamic model. Experiments were performed on the fabricated piezoelectric micro-lens actuator to validate the dynamic analytical model. The results show that the measured resonance frequency of 927 Hz and change in resonance frequency of 4 Hz/V for actuating DC voltage are in good agreement with the analytical dynamic model prediction of resonance frequency 948 Hz and shift in resonance frequency 4.5 Hz/V. This model allows one to predict the dynamic behavior of the micro-lens actuator under the residual stress and actuating DC voltage.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"28 1","pages":"443-446"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"75497123","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495459
Yen-Lin Chen, Yu-Cheng Huang, Meng-Lin Hsieh, Sheng-Kai Yeh, W. Fang
This study proposes a novel design to implement a triaxial tactile force sensor, as shown in Fig. 1. The tactile force sensor is fabricated by TSMC standard CMOS process. The normal and shear forces sensing capabilities are achieved by three independent sensing components monolithically integrated on a single chip. Capacitive sensing membrane forms the normal force detection element and piezo-resistive bridges form the shear force detection elements. Merits of the design include (Fig. 2): (1) fully-clamped square-diaphragm array as the capacitive-type normal force sensing element: flexible only in out-of-plane direction (z-axis) to detect the normal load and avoid the cross-talk from shear forces; (2) clamped-clamped beam with Wheatstone bridge circuits as the piezo-resistive shear force sensing elements: flexible only in one in-plane direction (x-axis or y-axis) to detect the single axis share load, and the cross-talk from normal load is removed by the Wheatstone bridge circuits. Measurement results show the sensitivities of the proposed tri-axial tactile force sensor are 1.26 fF/N in z-axis, 2.043 mV/N in x-axis, 2.248 mV/N in y-axis and have less than 10% overall crosstalk.
{"title":"A Novel CMOS-MEMS Tri-Axial Tactile Force Sensor Using Capacitive and Piezoresistive Sensing Mechanisms","authors":"Yen-Lin Chen, Yu-Cheng Huang, Meng-Lin Hsieh, Sheng-Kai Yeh, W. Fang","doi":"10.1109/Transducers50396.2021.9495459","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495459","url":null,"abstract":"This study proposes a novel design to implement a triaxial tactile force sensor, as shown in Fig. 1. The tactile force sensor is fabricated by TSMC standard CMOS process. The normal and shear forces sensing capabilities are achieved by three independent sensing components monolithically integrated on a single chip. Capacitive sensing membrane forms the normal force detection element and piezo-resistive bridges form the shear force detection elements. Merits of the design include (Fig. 2): (1) fully-clamped square-diaphragm array as the capacitive-type normal force sensing element: flexible only in out-of-plane direction (z-axis) to detect the normal load and avoid the cross-talk from shear forces; (2) clamped-clamped beam with Wheatstone bridge circuits as the piezo-resistive shear force sensing elements: flexible only in one in-plane direction (x-axis or y-axis) to detect the single axis share load, and the cross-talk from normal load is removed by the Wheatstone bridge circuits. Measurement results show the sensitivities of the proposed tri-axial tactile force sensor are 1.26 fF/N in z-axis, 2.043 mV/N in x-axis, 2.248 mV/N in y-axis and have less than 10% overall crosstalk.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"8 1","pages":"210-213"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73272748","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495433
Mi-Gyeong Kang, Heejae Shin, Youngjun Cho, Jaeu Park, Jinwoong Jeong, Sanghoon Lee
This paper demonstrates optimization and demonstration of rotational TENGs (RoTENGs) for neural stimulation. The proposed RoTENGs generate electrical stimulation pulses by motor rotation. Two prototypes are investigated for this study. The generated pulse parameters can be modulated by changing the speed of the motor. The current and charge values of the pulses are also investigated for neurostimulation. Furthermore, neural stimulation of a sciatic nerve in rats using the proposed RoTENGs is demonstrated with monitoring muscle movement and with recording neural signals. The result indicates that this RoTENG could be used for neuromodulation applications such as neuroprosthetics and rehabilitation near future.
{"title":"Optimization of Motor-Based Rotational Triboelectric Nanogenerators (RoTENGs) for Neural Stimulation","authors":"Mi-Gyeong Kang, Heejae Shin, Youngjun Cho, Jaeu Park, Jinwoong Jeong, Sanghoon Lee","doi":"10.1109/Transducers50396.2021.9495433","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495433","url":null,"abstract":"This paper demonstrates optimization and demonstration of rotational TENGs (RoTENGs) for neural stimulation. The proposed RoTENGs generate electrical stimulation pulses by motor rotation. Two prototypes are investigated for this study. The generated pulse parameters can be modulated by changing the speed of the motor. The current and charge values of the pulses are also investigated for neurostimulation. Furthermore, neural stimulation of a sciatic nerve in rats using the proposed RoTENGs is demonstrated with monitoring muscle movement and with recording neural signals. The result indicates that this RoTENG could be used for neuromodulation applications such as neuroprosthetics and rehabilitation near future.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"27 1","pages":"1472-1475"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"74491315","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495747
T. Yamashita, T. Takeshita, Atsushi Oouchi, Takeshi Kobayashi
This paper presents a novel film type of flexible loudspeaker by ultra-thin piezoelectric PZT/Si bare chip integrated on flexible film substrate. The device is designed to operate without a closed membrane offering significant improvements with respect to manufacturability. We have revealed that a fully audible sound pressure level of around 40 dB at 6500 Hz was generated for a film with an ultrathin PZT/Si chip 1 × 5 mm2 in size. This technology is expected to be applied as electronic parts for surround or flexible parametric speakers for electronic paper and smartphones.
{"title":"Flexible Film Loudspeaker Based on Piezoelectric PZT/Si Ultra-Thin MEMS Chips","authors":"T. Yamashita, T. Takeshita, Atsushi Oouchi, Takeshi Kobayashi","doi":"10.1109/Transducers50396.2021.9495747","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495747","url":null,"abstract":"This paper presents a novel film type of flexible loudspeaker by ultra-thin piezoelectric PZT/Si bare chip integrated on flexible film substrate. The device is designed to operate without a closed membrane offering significant improvements with respect to manufacturability. We have revealed that a fully audible sound pressure level of around 40 dB at 6500 Hz was generated for a film with an ultrathin PZT/Si chip 1 × 5 mm2 in size. This technology is expected to be applied as electronic parts for surround or flexible parametric speakers for electronic paper and smartphones.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"21 1","pages":"671-674"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"72769434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495410
T. Nguyen, Ngoc Van Tran, T. X. Dinh, C. Tran, V. Dau, T. D. Chu, Ha Nguyen Hoang, T. Bui
We present a multi-physics simulation associated with experimental investigation for an electrohydrodynamic gyroscope based on ion wind corona discharge. The present device consisting of multiple point-ring electrodes generates a synthetic jet flow of ions for inertial sensing applications. Meanwhile the residual charge of jet is neutralized by an external ring electrode to guarantee the ion wind stable while circulating inside the device's channels. The working principle including the generation and then circulation of jet flow within the present device is firstly demonstrated by a numerical simulation and the feasibility and stability of the device are then successfully investigated by experimental work. Results show owing to the ion wind corona discharge based approach associated with new configuration, the present device is robust and consumes low energy.
{"title":"Numerical Study and Experimental Investigation of an Electrohydrodynamic Device for Inertial Sensing","authors":"T. Nguyen, Ngoc Van Tran, T. X. Dinh, C. Tran, V. Dau, T. D. Chu, Ha Nguyen Hoang, T. Bui","doi":"10.1109/Transducers50396.2021.9495410","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495410","url":null,"abstract":"We present a multi-physics simulation associated with experimental investigation for an electrohydrodynamic gyroscope based on ion wind corona discharge. The present device consisting of multiple point-ring electrodes generates a synthetic jet flow of ions for inertial sensing applications. Meanwhile the residual charge of jet is neutralized by an external ring electrode to guarantee the ion wind stable while circulating inside the device's channels. The working principle including the generation and then circulation of jet flow within the present device is firstly demonstrated by a numerical simulation and the feasibility and stability of the device are then successfully investigated by experimental work. Results show owing to the ion wind corona discharge based approach associated with new configuration, the present device is robust and consumes low energy.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"52 1","pages":"1351-1354"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79110728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495629
Hong Zhou, Dongxiao Li, Xindan Hui, Xianming He, He Huang, X. Mu
A miniaturized optical gas sensor is developed by integrating the state-of-the-art complementary metal-oxide-semiconductor compatible metamaterial absorber with a gas-selective-trapping polyvinylamine (PVAm) for rapid and sensitive on-chip sensing of carbon dioxide. The implementation of carbon dioxide detection relies on the ingenious cooperation between metamaterials and PVAm, where PVAm functions as a sensitive layer to capture gas molecules and metamaterial absorber excites surface-enhanced infrared absorption to achieve sensitivity enhancement. We have experimentally demonstrated a minimum of 40 ppm detection limit on a small footprint (100 × 100 µm2), showing great advantages in terms of both detection limit and size when compared with commercial IR gas sensors (>50 ppm at centimeters level). This work provides a valuable toolkit for carbon dioxide sensing as well as gains new insights into the successful system-level integration of miniaturized gas sensing platform.
{"title":"Mid-IR Metamaterial Absorber with Polyvinylamine as a Sensitive Layer for On-Chip Sensing of Carbon Dioxide","authors":"Hong Zhou, Dongxiao Li, Xindan Hui, Xianming He, He Huang, X. Mu","doi":"10.1109/Transducers50396.2021.9495629","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495629","url":null,"abstract":"A miniaturized optical gas sensor is developed by integrating the state-of-the-art complementary metal-oxide-semiconductor compatible metamaterial absorber with a gas-selective-trapping polyvinylamine (PVAm) for rapid and sensitive on-chip sensing of carbon dioxide. The implementation of carbon dioxide detection relies on the ingenious cooperation between metamaterials and PVAm, where PVAm functions as a sensitive layer to capture gas molecules and metamaterial absorber excites surface-enhanced infrared absorption to achieve sensitivity enhancement. We have experimentally demonstrated a minimum of 40 ppm detection limit on a small footprint (100 × 100 µm2), showing great advantages in terms of both detection limit and size when compared with commercial IR gas sensors (>50 ppm at centimeters level). This work provides a valuable toolkit for carbon dioxide sensing as well as gains new insights into the successful system-level integration of miniaturized gas sensing platform.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"88 1","pages":"859-862"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79384593","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495478
Muhannad Ghanam, Thomas Bilger, F. Goldschmidtboeing, P. Woias
In this paper we present a concept for capacitive force sensors with a high operating temperature range and a low temperature drift. The sensors are completely fabricated out of silicon to ensure the absence of thermal stresses for a broad temperature range. The sensing capacitance is shielded by bulk silicon, which forms a Faraday cage against external static or quasi-static electrical interference around the electrodes. The sensors have a high sensitivity, since the capacitance changes by 100% at full scale (FS) load. First results show a high linearity and extremely low temperature drift of the base capacitance as well as a temperature drift of the sensitivity of only 0.006%FS /K at 300 °C without additional compensation.
{"title":"Full Silicon Capacitive Force Sensors with Low Temperature Drift and High Temperature Range","authors":"Muhannad Ghanam, Thomas Bilger, F. Goldschmidtboeing, P. Woias","doi":"10.1109/Transducers50396.2021.9495478","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495478","url":null,"abstract":"In this paper we present a concept for capacitive force sensors with a high operating temperature range and a low temperature drift. The sensors are completely fabricated out of silicon to ensure the absence of thermal stresses for a broad temperature range. The sensing capacitance is shielded by bulk silicon, which forms a Faraday cage against external static or quasi-static electrical interference around the electrodes. The sensors have a high sensitivity, since the capacitance changes by 100% at full scale (FS) load. First results show a high linearity and extremely low temperature drift of the base capacitance as well as a temperature drift of the sensitivity of only 0.006%FS /K at 300 °C without additional compensation.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"25 1","pages":"1190-1193"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"84790971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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