Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495603
Shuai Shao, Zhifang Luo, Tao Wu
This work reports the Lamb wave resonator based on 15% Sc-doped (Al0.85Sc0.15N) thin films using magnetron co-sputtering. The dispersion characteristics of Lamb wave resonators are simulated for Al0.85Sc0.15N. The dispersion properties of Lamb waves on the coupling coefficient in Al0.85Sc0.15N thin films were simulated. An electromechanical coupling factor of nearly 4% can be obtained for S0 mode Lamb wave resonators. Optimized design using 3D finite element analysis (FEA) with perfectly matched layer (PML) to improve quality factor. The resonator fabrication process is discussed in detail. Al0.85Sc0.15N thin films with a 1.7° FWHM of (0002) rocking curve were obtained. Al0.85Sc0.15N Lamb wave resonators operating at approximately 310 MHz were fabricated. A high electromechanical coupling coefficient (kt2) of 3.7 % is reported, with the loaded quality factor of 1165.7 and unloaded quality factor of 1253.2, respectively.
{"title":"Design and Fabrication of LAMB Wave Resonator Based on 15% Scandium-Doped Aluminum Nitride Thin Film","authors":"Shuai Shao, Zhifang Luo, Tao Wu","doi":"10.1109/Transducers50396.2021.9495603","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495603","url":null,"abstract":"This work reports the Lamb wave resonator based on 15% Sc-doped (Al<inf>0.85</inf>Sc<inf>0.15</inf>N) thin films using magnetron co-sputtering. The dispersion characteristics of Lamb wave resonators are simulated for Al<inf>0.85</inf>Sc<inf>0.15</inf>N. The dispersion properties of Lamb waves on the coupling coefficient in Al<inf>0.85</inf>Sc<inf>0.15</inf>N thin films were simulated. An electromechanical coupling factor of nearly 4% can be obtained for S0 mode Lamb wave resonators. Optimized design using 3D finite element analysis (FEA) with perfectly matched layer (PML) to improve quality factor. The resonator fabrication process is discussed in detail. Al<inf>0.85</inf>Sc<inf>0.15</inf>N thin films with a 1.7° FWHM of (0002) rocking curve were obtained. Al<inf>0.85</inf>Sc<inf>0.15</inf>N Lamb wave resonators operating at approximately 310 MHz were fabricated. A high electromechanical coupling coefficient (k<inf>t</inf><sup>2</sup>) of 3.7 % is reported, with the loaded quality factor of 1165.7 and unloaded quality factor of 1253.2, respectively.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"14 1","pages":"1371-1374"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90179295","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495395
Lijun Lu, Guosheng Hu, Yang Huang, Jingquan Liu, Bin Yang
Flexible sensors have emerged and gained popularity in recent years due to their potential in electronic skin, medical care and other fields. However, single mechanism sensor shows great limitation in the cooperative monitoring of highly dynamic and static detection, which limits further practical applications seriously. This paper reports a strategy that combines piezoelectric and piezoresistive mechanisms for the realization of dual function in a single flexible sensor. Piezoelectric unit based on PVDF polymer is used for highly dynamic detection while piezoresistive cell composed of graphite sheet (GS) and PVDF electrospun mat is for static detection. Besides, this dual mechanism flexible sensor (DMFS) exhibits a higher piezoelectric sensitivity than the individual PVDF piezoelectric sensor due to the fact that the introduction of soft piezoresistive layer increases the transverse strain on the piezoelectric layer originated from large deformation of the low stiffness surface.
{"title":"Flexible Piezoelectric and Piezoresistive Mechanisms Coupled Sensor for Highly Dynamic and Static Collaborative Detection","authors":"Lijun Lu, Guosheng Hu, Yang Huang, Jingquan Liu, Bin Yang","doi":"10.1109/Transducers50396.2021.9495395","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495395","url":null,"abstract":"Flexible sensors have emerged and gained popularity in recent years due to their potential in electronic skin, medical care and other fields. However, single mechanism sensor shows great limitation in the cooperative monitoring of highly dynamic and static detection, which limits further practical applications seriously. This paper reports a strategy that combines piezoelectric and piezoresistive mechanisms for the realization of dual function in a single flexible sensor. Piezoelectric unit based on PVDF polymer is used for highly dynamic detection while piezoresistive cell composed of graphite sheet (GS) and PVDF electrospun mat is for static detection. Besides, this dual mechanism flexible sensor (DMFS) exhibits a higher piezoelectric sensitivity than the individual PVDF piezoelectric sensor due to the fact that the introduction of soft piezoresistive layer increases the transverse strain on the piezoelectric layer originated from large deformation of the low stiffness surface.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"23 1","pages":"896-899"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"80756980","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495539
N. Kawahara
CASE (Connected, Autonomous, Sharing & Service, Electric) is a keyword of future mobility society. In the CASE era, semiconductor technologies play an important role, and will continue to advance in each of the C, A, S and E domains respectively. While semiconductors for large-scale data processing and communication technology vital to the digital society can utilize the result of other industry (Mobile phones, etc.), those used in power devices for EVs, peripheral monitoring sensors for autonomous driving, and SoCs for driving control have many requirements specific to automobiles. It is therefore critical that automobile and parts manufacturers have the capacity to develop these technologies themselves. This paper describes the technical trends of power devices, sensors, and SoC technology in the context of CASE.
CASE (Connected, Autonomous, Sharing & Service, Electric)是未来移动社会的关键词。在CASE时代，半导体技术将发挥重要作用，并将继续在C、A、S和E领域分别取得进展。虽然对数字社会至关重要的用于大规模数据处理和通信技术的半导体可以利用其他行业(移动电话等)的成果，但用于电动汽车电源器件的半导体，用于自动驾驶的外围监控传感器以及用于驾驶控制的soc具有许多特定于汽车的要求。因此，汽车和零部件制造商有能力自行开发这些技术是至关重要的。本文介绍了在CASE背景下功率器件、传感器和SoC技术的发展趋势。
{"title":"Automotive Semiconductors in the Case Era","authors":"N. Kawahara","doi":"10.1109/Transducers50396.2021.9495539","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495539","url":null,"abstract":"CASE (Connected, Autonomous, Sharing & Service, Electric) is a keyword of future mobility society. In the CASE era, semiconductor technologies play an important role, and will continue to advance in each of the C, A, S and E domains respectively. While semiconductors for large-scale data processing and communication technology vital to the digital society can utilize the result of other industry (Mobile phones, etc.), those used in power devices for EVs, peripheral monitoring sensors for autonomous driving, and SoCs for driving control have many requirements specific to automobiles. It is therefore critical that automobile and parts manufacturers have the capacity to develop these technologies themselves. This paper describes the technical trends of power devices, sensors, and SoC technology in the context of CASE.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"11 1","pages":"95-96"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89296992","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495749
Takuro Okuwaki, Takaaki Haino, M. Sohgawa, Takashi Abe
A method for the contactless endpoint detection of gold etching using a quartz-based capacitive detector is reported herein. To design a microfabrication process, the etch rates of materials to be used must be determined to control the etch depth. However, the etch rate changes gradually when the etching solution is used repeatedly. An endpoint and/or etch rate detection method is required to ensure process repeatability in a manufacturing environment. This method should be contactless because the etchants for metals are typically highly corrosive. In this study, a 32 MHz quartz-crystal oscillator is used to detect changes in the concentration of specific ions. The developed method can detect nanometer-order thickness changes during gold etching.
{"title":"Contactless Endpoint Detection of Gold Etching Using Quartz-Based Capacitive Detector","authors":"Takuro Okuwaki, Takaaki Haino, M. Sohgawa, Takashi Abe","doi":"10.1109/Transducers50396.2021.9495749","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495749","url":null,"abstract":"A method for the contactless endpoint detection of gold etching using a quartz-based capacitive detector is reported herein. To design a microfabrication process, the etch rates of materials to be used must be determined to control the etch depth. However, the etch rate changes gradually when the etching solution is used repeatedly. An endpoint and/or etch rate detection method is required to ensure process repeatability in a manufacturing environment. This method should be contactless because the etchants for metals are typically highly corrosive. In this study, a 32 MHz quartz-crystal oscillator is used to detect changes in the concentration of specific ions. The developed method can detect nanometer-order thickness changes during gold etching.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"26 4 1","pages":"1126-1129"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89305385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495480
Chen Liu, Yao Zhu, Nan Wang, Bangtao Chen
Single-chip dual-band radio-frequency (RF) MEMS filters, as well as their constituting dual-resonance modified laterally coupled alternating thickness (LCAT) mode resonators based on Sc0.15Al0.85N are demonstrated. The dependence of the resonant frequency ($f_{s}$), the effective coupling coefficient (${k^{2}}_{eff}$) and the quality factor ($Q_{a}$) of both modes on the electrode pitches of the modified LCAT mode resonators are analyzed, and measurement results show that ${k^{2}}_{eff}$ and $Q_{a}$ of both modes can achieve over 5% and 700, respectively, with optimized pitch. The dual-band filter is designed to consist of modified LCAT resonators with 2 different pitches to achieve the low band around 3.3 GHz and high band over 4 GHz on a single chip. The measured bandwidths of the dual-band filter are 66 MHz and 33 MHz, respectively. The performance of the dual-band filter indicates that the presented resonators and filters are promising for the carrier aggregation (CA) technology in 5G applications.
{"title":"Single-Chip Dual-Band Filters Based on Spurious-Free Dual-Resonance Sc0.15Al0.85N Laterally Coupled Alternating Thickness (LCAT) Mode Resonators","authors":"Chen Liu, Yao Zhu, Nan Wang, Bangtao Chen","doi":"10.1109/Transducers50396.2021.9495480","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495480","url":null,"abstract":"Single-chip dual-band radio-frequency (RF) MEMS filters, as well as their constituting dual-resonance modified laterally coupled alternating thickness (LCAT) mode resonators based on Sc0.15Al0.85N are demonstrated. The dependence of the resonant frequency ($f_{s}$), the effective coupling coefficient (${k^{2}}_{eff}$) and the quality factor ($Q_{a}$) of both modes on the electrode pitches of the modified LCAT mode resonators are analyzed, and measurement results show that ${k^{2}}_{eff}$ and $Q_{a}$ of both modes can achieve over 5% and 700, respectively, with optimized pitch. The dual-band filter is designed to consist of modified LCAT resonators with 2 different pitches to achieve the low band around 3.3 GHz and high band over 4 GHz on a single chip. The measured bandwidths of the dual-band filter are 66 MHz and 33 MHz, respectively. The performance of the dual-band filter indicates that the presented resonators and filters are promising for the carrier aggregation (CA) technology in 5G applications.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"38 1","pages":"309-312"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87217877","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495486
S. Shoji, D. Yoon, D. Tanaka, T. Sekiguchi
For high throughput size controllable micro droplet generation, a three step half and half size/volume division of source droplet device using three stage cascade channel is introduced. Passive and active size/volume ratio controllable source droplet division devises are reported next. Finally, two types of microdroplet (daughter) generation devices using hydrodynamic droplet breakup of source droplet (mother) are described.
{"title":"High Throughput Size Controlled Microdroplet Generation","authors":"S. Shoji, D. Yoon, D. Tanaka, T. Sekiguchi","doi":"10.1109/Transducers50396.2021.9495486","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495486","url":null,"abstract":"For high throughput size controllable micro droplet generation, a three step half and half size/volume division of source droplet device using three stage cascade channel is introduced. Passive and active size/volume ratio controllable source droplet division devises are reported next. Finally, two types of microdroplet (daughter) generation devices using hydrodynamic droplet breakup of source droplet (mother) are described.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"1 1","pages":"206-208"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85345159","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495755
S. A. Moshizi, Shohreh Azadi, Andrew Belford, Shuying Wu, Z. J. Han, M. Asadnia
In this work, an ultra-sensitive flow sensor is presented, consisting of vertically grown graphene nanosheets (VGNs) with a mazelike structure and an elastomer (polydimethylsiloxane, PDMS). The VGNs/PDMS piezoresistive flow sensor exhibits great linearity, low-velocity detection threshold (1.127 mm/s) and super-high sensitivity under exposure to stationary flow (0.127 kΩ/(mL/min)). The proposed flow sensor, analogous to hair cells in the vestibular system, was embedded in a 3D-printed lateral semicircular canal, and the sensing performance was studied in response to various physiological movements. This work paves the way for development of physical sensors using novel two-dimensional (2D) materials for various biomedical applications.
{"title":"Using Advanced 2D Materials to Closely Mimic Vestibular Hair Cell Sensors","authors":"S. A. Moshizi, Shohreh Azadi, Andrew Belford, Shuying Wu, Z. J. Han, M. Asadnia","doi":"10.1109/Transducers50396.2021.9495755","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495755","url":null,"abstract":"In this work, an ultra-sensitive flow sensor is presented, consisting of vertically grown graphene nanosheets (VGNs) with a mazelike structure and an elastomer (polydimethylsiloxane, PDMS). The VGNs/PDMS piezoresistive flow sensor exhibits great linearity, low-velocity detection threshold (1.127 mm/s) and super-high sensitivity under exposure to stationary flow (0.127 kΩ/(mL/min)). The proposed flow sensor, analogous to hair cells in the vestibular system, was embedded in a 3D-printed lateral semicircular canal, and the sensing performance was studied in response to various physiological movements. This work paves the way for development of physical sensors using novel two-dimensional (2D) materials for various biomedical applications.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"103 1","pages":"739-742"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"91220856","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495602
Kamyar Behrouzi, Liwei Lin
We develop a sensing method based on the double-coffee ring phenomenon for the first time using localized surface plasmon resonance (LSPR) effect in gold nanoparticles (GNPs) to detect SARS-CoV-2 Nucleocapsid proteins with high sensitivity. Testing images are further analyzed via the convolutional neural learning for enhanced accuracy. The circular-shape hydrophilic PTFE porous membrane with a hydrophobic ring barrier is utilized as the sensing platform. When the virus proteins are interacting with antibody coated GNPs solution on the platform, a double-coffee ring image is observed and the convolutional neural network helps the differentiation for the first small protein-GNPs ring at the center and a second non-specific ring at the hydrophobic barrier. We use this double-coffee ring to detect viral infection and quantify the concentration of COVID-19 viruses in 5 ng/ml (LOD), similar to Abbott BinaxNOW® testing kit, to 1000 ng/ml. As such this detection scheme could open up a new class of biomolecular research in the field of micro/nano fluidics.
{"title":"Double-Coffee Ring Nanoplasmonic Effects with Convolutional Neural Learning for Sars-Cov-2 Detection","authors":"Kamyar Behrouzi, Liwei Lin","doi":"10.1109/Transducers50396.2021.9495602","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495602","url":null,"abstract":"We develop a sensing method based on the double-coffee ring phenomenon for the first time using localized surface plasmon resonance (LSPR) effect in gold nanoparticles (GNPs) to detect SARS-CoV-2 Nucleocapsid proteins with high sensitivity. Testing images are further analyzed via the convolutional neural learning for enhanced accuracy. The circular-shape hydrophilic PTFE porous membrane with a hydrophobic ring barrier is utilized as the sensing platform. When the virus proteins are interacting with antibody coated GNPs solution on the platform, a double-coffee ring image is observed and the convolutional neural network helps the differentiation for the first small protein-GNPs ring at the center and a second non-specific ring at the hydrophobic barrier. We use this double-coffee ring to detect viral infection and quantify the concentration of COVID-19 viruses in 5 ng/ml (LOD), similar to Abbott BinaxNOW® testing kit, to 1000 ng/ml. As such this detection scheme could open up a new class of biomolecular research in the field of micro/nano fluidics.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"19 1","pages":"381-384"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"90927839","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495470
V. Venkatesh, Qi Yang, Jingwen Zhang, J. Pikul, M. Allen
Miniaturization of modern devices, including the advent of highly distributed Internet of Things nodes, has created a need for miniaturization in energy systems. Air batteries can be an attractive power source for such small-scale devices. This paper investigates fabrication of thin zinc anodes for zinc-air batteries using a thermal evaporation technique. Zinc anodes produced by thermal evaporation are found to be of high purity, approximately 96% dense, and smooth (roughness less than 0.1 micron). Anodes up to 8 microns in thickness are demonstrated. The structural characterization of the evaporated zinc films was performed by profilometry and scanning electron microscopy. The purity of the evaporated film was determined by the energy dispersive X-ray spectroscopy. Thin zinc anodes fabricated by evaporation exhibited utilization of 96.5% at 10 mA (5C rate) discharge. Specific capacity was 791mAh/g, approaching the theoretical limit of zinc-air batteries (820mAh/g). The anodes produced by evaporation offer the potential to fabricate high energy density thin film microbatteries.
现代设备的小型化，包括高度分布式物联网节点的出现，已经产生了对能源系统小型化的需求。空气电池可以成为这种小型设备的有吸引力的电源。研究了用热蒸发法制备锌空气电池用薄锌阳极。热蒸发法制备的锌阳极纯度高，密度约96%，表面光滑(粗糙度小于0.1微米)。阳极的厚度可达8微米。用轮廓术和扫描电镜对蒸发锌膜进行了结构表征。用能量色散x射线光谱法测定蒸发膜的纯度。在10 mA (5C倍率)放电条件下，蒸发法制备的薄锌阳极的利用率为96.5%。比容量为791mAh/g，接近锌空气电池的理论极限(820mAh/g)。蒸发产生的阳极提供了制造高能量密度薄膜微电池的潜力。
{"title":"Fabrication and Characterization of Evaporated ZINC Anodes for Small-Scale ZINC-Air Batteries","authors":"V. Venkatesh, Qi Yang, Jingwen Zhang, J. Pikul, M. Allen","doi":"10.1109/Transducers50396.2021.9495470","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495470","url":null,"abstract":"Miniaturization of modern devices, including the advent of highly distributed Internet of Things nodes, has created a need for miniaturization in energy systems. Air batteries can be an attractive power source for such small-scale devices. This paper investigates fabrication of thin zinc anodes for zinc-air batteries using a thermal evaporation technique. Zinc anodes produced by thermal evaporation are found to be of high purity, approximately 96% dense, and smooth (roughness less than 0.1 micron). Anodes up to 8 microns in thickness are demonstrated. The structural characterization of the evaporated zinc films was performed by profilometry and scanning electron microscopy. The purity of the evaporated film was determined by the energy dispersive X-ray spectroscopy. Thin zinc anodes fabricated by evaporation exhibited utilization of 96.5% at 10 mA (5C rate) discharge. Specific capacity was 791mAh/g, approaching the theoretical limit of zinc-air batteries (820mAh/g). The anodes produced by evaporation offer the potential to fabricate high energy density thin film microbatteries.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"8 1","pages":"1134-1137"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73490444","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495450
Kenta Sembo, Taichi Yoshida, S. Toda, T. Horio, Yasuyuki Kimura, Yong-Joon Choi, Kazuhiro Takahashi, K. Takayama, K. Sawada, T. Noda
We report the world-first result of visualization of intra-stem ion dynamics of living plants using a novel ion image sensor. A dedicated ion image sensor that can insert to the plant stem was fabricated. The sensor has $128times 32$ ion-sensitive pixels to capture the ion distribution reflecting the structure of the stem (vascular bundle). Imaging results showed that hydrogen ions moved from the bottom to the top of the stem due to natural transpiration. Ion distribution reflecting the vascular bundle was also clearly visualized and confirmed to correspond with the plant stem cross-sectional structure. This sensor can be used to observe the activity of photosynthesis and possibly maximize production efficiency in agriculture.
{"title":"Real-Time in Vivo Imaging of Intra-Stem Ion Distribution Using Insertable CMOS Sensor for Plants","authors":"Kenta Sembo, Taichi Yoshida, S. Toda, T. Horio, Yasuyuki Kimura, Yong-Joon Choi, Kazuhiro Takahashi, K. Takayama, K. Sawada, T. Noda","doi":"10.1109/Transducers50396.2021.9495450","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495450","url":null,"abstract":"We report the world-first result of visualization of intra-stem ion dynamics of living plants using a novel ion image sensor. A dedicated ion image sensor that can insert to the plant stem was fabricated. The sensor has $128times 32$ ion-sensitive pixels to capture the ion distribution reflecting the structure of the stem (vascular bundle). Imaging results showed that hydrogen ions moved from the bottom to the top of the stem due to natural transpiration. Ion distribution reflecting the vascular bundle was also clearly visualized and confirmed to correspond with the plant stem cross-sectional structure. This sensor can be used to observe the activity of photosynthesis and possibly maximize production efficiency in agriculture.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"79 1","pages":"259-262"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76634949","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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