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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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Acoustoelectric Surface Acoustic Wave Switch in An Epitaxial Ingaas on Lithium Niobate Heterostructure 铌酸锂异质结构外延ingas的声电表面声波开关
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495622
M. Storey, L. Hackett, Sara DiGregorio, Michael R. Miller, G. Peake, M. Eichenfield, D. Weinstein
This work presents a 3-Port acoustoelectric switch design for surface acoustic wave signal processing. Using a multistrip coupler, the input acoustic wave at Port 1 is split into two parallel and electrically cross-linked acoustoelectric delay lines where an applied voltage can alter the gain and attenuation in each delay line based on the voltage polarity. The switch is demonstrated using a 270 MHz Leaky SAW mode on an InGaAs on 41° Y-cut lithium niobate heterostructure. Applying a +40 V voltage pulse results in an IL of -12.5 dB and -57.5 dB in the gain and isolation switch paths, respectively. This leads to a 45 dB difference in signal strength at the output ports.
本文提出了一种用于表面声波信号处理的三口声电开关设计。使用多带耦合器,端口1的输入声波被分成两条平行的电交联的声电延迟线,其中施加的电压可以根据电压极性改变每个延迟线的增益和衰减。该开关在41°y型切割铌酸锂异质结构的InGaAs上使用270 MHz漏形SAW模式进行了演示。施加+40 V电压脉冲,增益和隔离开关路径的IL分别为-12.5 dB和-57.5 dB。这导致输出端口的信号强度相差45db。
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引用次数: 3
Machine Learning Augmented VOC Identification by Mid-Infrared Nanoantennas with Microfluidics Chambers 机器学习增强中红外微流控室纳米天线VOC识别
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495761
Zhihao Ren, Zixuan Zhang, Jingxuan Wei, Haibo Wang, B. Dong, Chengkuo Lee
Infrared vibrational spectroscopy enhanced by plasmonic nanoantenna (PNA) become attractive sensing platforms for molecular recognition and characterization. With the rich information provided by IR fingerprint absorption and wavelength shift by broadband PNA, machine learning serves as a powerful tool to classify the complementary physical (refractive index) and chemical (chemical bond vibration) information and recognize the molecules. We propose an ultrasensitive broadband hook nanoantenna platform integrated with microfluidics channels and perform machine learning analysis to identify chemically similar alcoholic molecules in low concentrations. Our platform paves the way to advanced IR spectroscopic sensing for a wide range of chemical identification.
等离子体纳米天线(PNA)增强的红外振动光谱成为分子识别和表征的重要传感平台。利用红外指纹吸收和宽带PNA波长移提供的丰富信息,机器学习可以作为一种强大的工具,对互补的物理(折射率)和化学(化学键振动)信息进行分类,并识别分子。我们提出了一种集成微流体通道的超灵敏宽带挂钩纳米天线平台,并进行机器学习分析,以识别低浓度化学相似的酒精分子。我们的平台为广泛的化学鉴定铺平了先进的红外光谱传感道路。
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引用次数: 2
Soft Microfluidic Wearable Sensors for Biomedical Applications 生物医学应用的软微流体可穿戴传感器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495757
C. Lim
The future of healthcare wearables lies in continual sensing in an unobtrusive manner. Tactile sensing is especially important to capture mechanotransduced signals arising from the body, or as a result of interactions with the external environment. However, conventional sensors are rigid, stiff and obstrusive. Therefore, one of the key objectives is to confer flexibility and stretchability to our sensing elements, while maintaining its sensitivity and robustness. Here, we develop a novel liquid-based microfluidic and microtubular sensors that possess high flexibility, durability, and sensitivity. The sensors comprise a soft elastomer-based microfluidic template encapsulating a conductive liquid which serves as the active sensing element of the device. This sensor is capable of distinguishing and quantifying the various user-applied mechanical forces it is subjected to. We demonstrated healthcare applications of our sensors in rehabilitation monitoring, artificial sensing and disease tracking such as that for diabetic patients. Overall, our work highlights the potential of the liquid-based microfluidic sensing platforms in a wide range of healthcare applications and further facilitates the exploration and realization of functional liquid-state device technology.
医疗可穿戴设备的未来在于以一种不引人注目的方式持续感知。触觉感知对于捕获来自身体或与外部环境相互作用的机械转导信号尤其重要。然而,传统的传感器是刚性的,僵硬的和突兀的。因此,关键目标之一是赋予我们的传感元件的灵活性和可拉伸性,同时保持其灵敏度和鲁棒性。在这里,我们开发了一种新型的基于液体的微流体和微管传感器,具有高灵活性,耐用性和灵敏度。传感器包括软弹性体微流控模板,该模板封装导电液体,该导电液体作为该装置的主动传感元件。这种传感器能够区分和量化它所受到的各种用户施加的机械力。我们展示了我们的传感器在康复监测、人工传感和疾病跟踪(如糖尿病患者)方面的医疗应用。总的来说,我们的工作突出了基于液体的微流控传感平台在广泛的医疗保健应用中的潜力,并进一步促进了功能性液态器件技术的探索和实现。
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引用次数: 1
Benefactors 捐助者
Pub Date : 2021-06-20 DOI: 10.1109/transducers50396.2021.9495453
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引用次数: 0
Polymer based Acoustic Wave Sensor Using Hot Embossing Technique 基于热压技术的聚合物声波传感器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495735
Jungyoon Kim, Tianyi Zhang, Q. Guan, J. Sartori, Lauren E. Linderman, V. Mandic, T. Cui
The objective of this research is to develop a highly sensitive acoustic wave sensor using a tunneling current. The tunneling current device is fabricated with the hot embossing technology. Since polymethyl methacrylate (PMMA) is less expensive, has little stiffness, and is easier to work with micro-machining process compared to traditional silicon-based tunneling sensors, we fabricate the tip structure on the material using the hot embossing process. First, the frequency response of the tunneling device is measured by a piezoelectric transducer (PZT) and laser vibrometer to find the resonance frequency. Then the performance of the device is characterized by measuring the acoustic wave, which has the resonance frequency.
本研究的目的是开发一种利用隧道电流的高灵敏度声波传感器。采用热压成型工艺制作隧道电流装置。由于与传统的硅基隧道传感器相比,聚甲基丙烯酸甲酯(PMMA)价格较低,刚度小,并且更容易通过微加工工艺进行加工,因此我们使用热压印工艺在材料上制造尖端结构。首先,利用压电换能器和激光测振仪测量隧道装置的频率响应,找出谐振频率;然后通过测量具有共振频率的声波来表征该装置的性能。
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引用次数: 0
Integrated On-Chip Cellular Exosome Isolation and RNA Analysis Microsystem 集成片上细胞外泌体分离和RNA分析微系统
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495727
Yunxing Lu, Xiaoyu Jian, Zhaoduo Tong, Zhenhua Wu, S. Qiu, Chuanjie Shen, Hao Yin, Hongju Mao
Exosomes have now received increasing focus as a promising biomarker for cancer diagnostics because of its specific biocomponents (including proteins, mRNA and lncRNA et al) acquired from parental cells. However, efficiently isolation and quantitative analysis of tumor-related exosomal nucleic acid is still in urgent need. Here, we present an integrated exosome processing microfluidic platform which combines exosome on-chip isolation and sensitive exosomal RNA analysis through droplet digital polymerase chain reaction (ddPCR). Utilizing our system, samples from cell line supernatant could be rapidly detected and demonstrated remarkable detection signals. Owning to advantages including highly sensitive, pollution-free, high-volume (~ 25 µl), low cost and easy handling, our microfluidic system offers a promising means for early cancer diagnosis and prognosis in the era of liquid biopsy.
由于外泌体具有从亲代细胞获得的特异性生物成分(包括蛋白质、mRNA和lncRNA等),因此外泌体作为一种有前景的癌症诊断生物标志物受到越来越多的关注。然而,肿瘤相关外泌体核酸的高效分离和定量分析仍是迫切需要的。在这里,我们提出了一个集成的外泌体处理微流控平台,该平台结合了芯片上的外泌体分离和通过液滴数字聚合酶链反应(ddPCR)进行灵敏的外泌体RNA分析。利用该系统可以快速检测细胞系上清样品,并显示出显著的检测信号。我们的微流控系统具有灵敏度高、无污染、体积大(~ 25µl)、成本低、操作方便等优点,为液体活检时代的早期癌症诊断和预后提供了一种很有前景的手段。
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引用次数: 0
A CMOS-MEMS Fluorescence Quenching Gas Sensor Encapsulated with Silicon-Based LED Reflector 硅基LED反射器封装的CMOS-MEMS荧光猝灭气体传感器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495443
Ya-Chu Lee, Shihwei Lin, Chengshiun Liou, C. Tsou, W. Fang
This study demonstrates a simple approach to enhance the sensitivity and reduce the power consumption of a fluorescence quenching based gas sensor using a silicon-based encapsulation as the optical reflector (Fig. 1). The design consists of a CMOS-MEMS gas sensor, a blue LED, and a silicon optical reflector integrated using the bonding technologies (Fig. 1a). Moreover, the gas sensor containing the vertically integrated photo sensor, resistive temperature detector (RTD), thermal isolation trenches, and cavities for gas sensing materials is implemented using the TSMC $0.35mumathrm{m}$ CMOS process (Fig. 1b). The gas concentration is detected on the basis of the fluorescence intensity measured by the photo sensor on the CMOS platform [1] [2]. This design has three merits: (1) simple approach to integrate the optical reflector to sensing chip to enhance the performances of gas sensor, and wafer level packaging can be achieved for future applications, (2) the reflector could reflect and redirect the high intensity emitting light from the top-side of LED to enhance the sensitivity of gas sensor (Fig. 1b), and (3) the power consumption of the LED as well as the gas sensor can be reduced. In applications, the concentration of O2 is measured. Measurement results show the sensitivity of gas concentration for the proposed design with reflector and the reference design without reflector are $0.26mumathrm{A}/%$ (O2/N2) and $0.019mumathrm{A}/%$ (O2/N2) respectively. Moreover, the LED driving current reduced from 100 mA to 20 mA by adding the reflector (reducing power consumption for blue-LED).
本研究展示了一种使用硅基封装作为光学反射器来提高荧光猝灭气体传感器灵敏度和降低功耗的简单方法(图1)。该设计由CMOS-MEMS气体传感器、蓝色LED和使用键合技术集成的硅光学反射器组成(图1a)。此外,气体传感器包含垂直集成光传感器、电阻式温度检测器(RTD)、热隔离沟槽和气敏材料腔,采用TSMC $0.35mu mathm {m}$ CMOS工艺实现(图1b)。利用CMOS平台[1][2]上的光传感器测量的荧光强度来检测气体浓度。该设计有三个优点:(1)将光学反射器集成到传感芯片中,以简单的方式提高气体传感器的性能,并为未来的应用实现晶圆级封装;(2)反射器可以反射和重定向从LED顶部发出的高强度光,以提高气体传感器的灵敏度(图1b);(3)可以降低LED和气体传感器的功耗。在应用中,测量氧的浓度。测量结果表明,有反射镜和无反射镜的参考设计对气体浓度的灵敏度分别为$0.26mumathrm{A}/%$ (O2/N2)和$0.019mumathrm{A}/%$ (O2/N2)。此外,通过增加反射器,LED驱动电流从100 mA降低到20 mA(降低了蓝色LED的功耗)。
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引用次数: 2
Machine Vision Based Method for Measuring Single-Cell Biophysical Properties Using Dielectrophoresis Mobility 基于机器视觉的单细胞生物物理特性测量方法
Pub Date : 2021-06-20 DOI: 10.1109/transducers50396.2021.9495379
Sheng-Zong Chen, Zhizhong Zhang, Rong Zhu
Measurement on single-cell biophysical properties is of great significance for cell sorting, cytopathology tracking, etc. Dielectrophoresis (DEP) based single-cell measurement has attracted increasingly interests because of its non-invasive, label-free, and easy integration with other functional structures. However, the measurement accuracy and efficiency of DEP-based method highly depends on cell motion tracking. Here, we propose a machine vision-based DEP motion tracking method to realize accurate and fast measurements on single-cell biophysical properties.
单细胞生物物理性质的测定对细胞分选、细胞病理跟踪等具有重要意义。基于Dielectrophoresis (DEP)的单细胞检测技术因其无创、无标记、易于与其他功能结构集成等优点而受到越来越多的关注。然而,基于dep方法的测量精度和效率在很大程度上依赖于细胞运动跟踪。在这里,我们提出了一种基于机器视觉的DEP运动跟踪方法,以实现对单细胞生物物理特性的准确和快速测量。
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引用次数: 0
A Highly Sensitive Point-of-Care Covid-19 Serological Test using Immuno-PCR in 35 Mins 一种35分钟内使用免疫pcr的高灵敏度护理点Covid-19血清学检测方法
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495696
Pengfei Zhang, Liben Chen, Jiumei Hu, Alexander Y. Trick, Fan-En Chen, K. Hsieh, Yang Zhao, Tza-Huei Wang
Serological tests play important roles in the fight against the Coronavirus Disease 2019 (COVID-19). The most commonly used methods, enzyme-linked immunosorbent assays (ELISA), provide reliable and sensitive antibody measurement though they require bulky laboratory infrastructure as well as lengthy turnaround time. Conversely, lateral flow immunoassays (LFIA) are suitable for rapid point-of-care tests but with limited sensitivity. To combine the best attributes of ELISA and LFIA, we developed a novel streamlined immuno-PCR assay and applied it to a portable magnetofluidic instrument for point-of-care serological tests. In testing 107 clinical samples, our point-of-care serological test showed 98.3% (58/59) specificity and 93.8% (45/48) agreement with benchtop immunoassays. Moreover, 100% agreement was achieved by only slightly increasing the total assay time to 45 min, demonstrating its potential as a new point-of-care serological test for COVID-19 and beyond.
血清学检测在抗击2019冠状病毒病(COVID-19)中发挥着重要作用。最常用的方法是酶联免疫吸附测定法(ELISA),它提供了可靠和敏感的抗体测量,尽管它们需要庞大的实验室基础设施以及较长的周转时间。相反,侧流免疫测定法(LFIA)适用于快速的即时检测,但灵敏度有限。为了结合ELISA和LFIA的最佳特性,我们开发了一种新型流线型免疫pcr检测方法,并将其应用于便携式磁流体仪器,用于即时血清学检测。在107份临床样本中,我们的即时血清学检测结果的特异性为98.3%(58/59),与台式免疫检测结果的一致性为93.8%(45/48)。此外,仅将总检测时间略微增加到45分钟,就实现了100%的一致性,这表明它有潜力成为COVID-19及其他疾病的新型护理点血清学检测方法。
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引用次数: 1
Redox-Type Label-Free ATP Image Sensor for Highly Sensitive in Vitro Imaging of Extracellular ATP 用于细胞外ATP高灵敏度体外成像的氧化还原型无标签ATP图像传感器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495500
H. Doi, T. Horio, Y. Choi, Kazuhiro Takahashi, T. Noda, K. Sawada
To decrease the limit of detection of imaging of extracellular ATP dynamics in the brain, we developed a redox-type, highly sensitive, label-free ATP image sensor with a reasonable spatial resolution ($37.3 mumathrm{m}$-pitch) effective utilization in in-vitro experiments. The lowest detectable concentration achieved in our sensor, which is based on hydrogen peroxide detection techniques using redox enzymes, was $3 mu mathrm{M}$. Further, according to the results of the in-vitro biological experiment conducted using a 10 mM-HEPES buffer, our sensor demonstrated a 100 times superior performance compared to the existing imaging devices that were also based on hydrogen ion (H+) detection techniques. It is expected that our novel ATP image sensor can be successfully applied for highly sensitive imaging of ATP released from brain nerve tissues and cells. It also has potential application in the spatiotemporal analysis of ATP.
为了降低脑细胞外ATP动态成像的检测限制,我们开发了一种具有合理空间分辨率($37.3 mu mathm {m}$-pitch)的氧化还原型、高灵敏度、无标记ATP图像传感器,有效地用于体外实验。我们的传感器基于过氧化氢检测技术,使用氧化还原酶,最低可检测浓度为$3 mu mathm {M}$。此外,根据使用10 mM-HEPES缓冲液进行的体外生物实验结果,我们的传感器与现有的基于氢离子(H+)检测技术的成像设备相比,性能优越100倍。我们的新型ATP图像传感器有望成功应用于脑神经组织和细胞释放的ATP的高灵敏度成像。它在ATP的时空分析中也有潜在的应用前景。
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引用次数: 0
期刊
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
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