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2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)最新文献

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Corrosion Monitoring Of Sacrificial Anodes Based On Contour Plot Analysis Of Electro-Mechanical Impedance Spectra 基于机电阻抗谱等值线图分析的牺牲阳极腐蚀监测
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495493
Jeslin Thalapil, Durgesh U. Tamhane, Sauvik Banerjee, S. Tallur
In this paper, we utilize a graphical technique originally proposed for damage assessment in beams, to determine the extent of corrosion of sacrificial zinc anode discs instrumented with piezoelectric transducers using Electro-Mechanical Impedance (EMI) measurements. The underlying parameters determining extent of corrosion (thicknesses of the zinc and zinc oxide films) are extracted from measured resonance frequencies of radial and transverse vibration modes by finding roots of the characteristic equations of these modes graphically through contour plot. This technique shows excellent agreement with experimental results, requires no calibration and is computationally inexpensive unlike optimization techniques.
在本文中,我们利用最初提出的用于梁损伤评估的图形技术,利用机电阻抗(EMI)测量来确定带有压电换能器的牺牲锌阳极盘的腐蚀程度。通过等高线图求径向和横向振动模态特征方程的根,从测量到的共振频率中提取出决定腐蚀程度的基本参数(锌和氧化锌膜的厚度)。该技术与实验结果非常吻合,不需要校准,与优化技术不同,计算成本低廉。
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引用次数: 0
Bacterial Force on Nanopillars: Interaction at Single Cell 细菌对纳米柱的作用力:单细胞的相互作用
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495593
Jagriti Singh, Vaibhav Sharma, S. Chandorkar, P. Sen
Despite extensive studies there are contradictory findings regarding effects of nano-topography on bacterial adherence and viability. Here, we report that bacteria have ability to locate nearest pillars, enabling itself to expand and attach, and pulling these pillars towards itself. Two types of nanopillars, namely, Straight pillars (SP) and Conical pillars (CP) were used to investigate the behavior of bacterial cell on surface nano topographies. We calculated that the force applied by the bacteria on these pillars is in the order of few hundred nano-newtons, and most importantly, the magnitude of the applied force depends on the pillar dimensions. Straight pillars are bent significantly compared to sharp-tipped conical pillars, suggesting higher overall mechanical stress in/throughout the bacterial membrane on straight pillars, leading to membrane rupture and ultimately cell death. In the case of bacterial membrane on conical pillars, severe localized stress generated in the membrane, near the regions where pillars contacted the membrane due to small cross-section of conical pillars, pierces the membrane (no bending of pillars) which causes cell death.
尽管进行了广泛的研究,但关于纳米形貌对细菌粘附和生存能力的影响,发现存在矛盾。在这里,我们报道细菌有能力找到最近的柱子,使自己能够扩张和附着,并将这些柱子拉向自己。采用直柱(SP)和锥形柱(CP)两种纳米柱,研究了细菌细胞在纳米表面的行为。我们计算出细菌施加在这些柱子上的力大约是几百纳米牛顿,最重要的是,施加的力的大小取决于柱子的尺寸。与尖锥柱相比,直柱弯曲明显,这表明直柱上细菌膜的整体机械应力更高,导致膜破裂,最终导致细胞死亡。在锥形柱上的细菌膜,由于锥形柱的截面小,在柱与膜接触的区域附近,膜上产生了严重的局部应力,刺穿膜(柱不弯曲),导致细胞死亡。
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引用次数: 1
Enhanced Formaldehyde Sensing Performance Based on SnO2 Nanosheets/Titanium Carbide (MXene) Composites 基于SnO2纳米片/碳化钛(MXene)复合材料的甲醛传感性能增强
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495402
Gaoqiang Niu, R. Ramachandran, Changhui Zhao, Fei Wang
SnO2/MXene composites were synthesized by a facile hydrothermal method, where the SnO2 nanosheets grew evenly on the surface of MXene flakes. Compared with the pure SnO2, the 5% MXene-SnO2 based sensor displayed optimal formaldehyde sensing performance at a lower operating temperature of 160 °C. Furthermore, the sensor with 5% MXene-SnO2 also showed high response, good selectivity, excellent reproducibility, and a good linearity over the concentration of 1–100 ppm.
采用水热法合成了SnO2/MXene复合材料,SnO2纳米片均匀生长在MXene薄片表面。与纯SnO2相比,5% MXene-SnO2传感器在较低的工作温度(160℃)下表现出最佳的甲醛传感性能。此外,在1 ~ 100 ppm的浓度范围内,含有5% MXene-SnO2的传感器也表现出高响应、良好的选择性、良好的重现性和良好的线性。
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引用次数: 0
An L-Shaped 2-Dimensional Particle Velocity Sensor l型二维粒子速度传感器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495596
Zhezheng Zhu, Lingmeng Yang, Wenhan Chang, Chengchen Gao, Y. Hao, Zhenchuan Yang
An L-shaped two-dimensional acoustic particle velocity sensor (APVS), which has integrated two best performing one-dimensional APVS on a single chip is presented. This structure keeps the two sensitive axes exactly orthogonal to each other, avoiding the alignment error. There are no silicon substrate blocking in both sensitive directions, so the flow directions nearby the wires have little differences. As a result, the two axes have equal sensitivity, thus requiring no correction. The measured velocity sensitivity at 1 kHz is 2.53 dB V/Pa, with relative direction sensitivity of 28 dB. Since the total size of the chip is only 4.4 × 4.4 mm, it can detect the 2-D particle velocity at one point.
提出了一种l型二维声粒子速度传感器(APVS),它将两种性能最好的一维声粒子速度传感器集成在一个芯片上。这种结构使两个敏感轴彼此完全正交,避免了对准误差。在两个敏感方向上都没有硅衬底阻挡,因此导线附近的流动方向差异很小。因此,两个轴具有相同的灵敏度,因此不需要校正。测得的1 kHz速度灵敏度为2.53 dB V/Pa,相对方向灵敏度为28 dB。由于芯片的总尺寸仅为4.4 × 4.4 mm,因此可以检测到一点的二维粒子速度。
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引用次数: 1
An Energy Harvesting Scheme with Temperature Threshold Triggered Generation for Heat Event Autonomous Monitoring 基于温度阈值触发的热事件自主监测能量收集方案
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495484
Ruofeng Han, Nianying Wang, Qisheng He, Jiachou Wang, Xinxin Li
This paper proposes a temperature threshold triggered energy harvesting scheme for potential monitoring thermal event. The demonstrated prototype comprises a generation cantilever and a bimetallic cantilever that magnetically attract together. When the structure is heated to a pre-set temperature threshold, heat absorption induced bimetallic effect of the bimetallic cantilever will cause sufficiently bend of the generation cantilever to get rid of the magnetic attraction and vibrate freely to generate electricity. After the heat in the bimetallic cantilever is dissipated, the two cantilevers attract together again to return to the original state. Under continual heating, the temperature threshold triggered cycle is repeated to intermittently generate electricity. In this paper, the temperature threshold of the harvester is modeled, and the harvester prototype is fabricated. When triggered at 71°C, the harvester is tested to generate Vpp of 1.14 V and power of 1.077 µW within one cycle.
提出了一种温度阈值触发能量收集方案,用于潜在热事件监测。所演示的原型包括产生悬臂梁和双金属悬臂梁,其磁性吸引在一起。当结构被加热到预先设定的温度阈值时,热吸收引起的双金属悬臂梁的双金属效应会使发电悬臂梁充分弯曲,从而摆脱磁场的吸引,自由振动产生电能。在双金属悬臂中的热量消散后,两个悬臂再次吸引在一起,恢复到原始状态。在持续加热的情况下,重复温度阈值触发循环,间歇发电。本文对收割机的温度阈值进行了建模,并制作了收割机样机。当在71°C触发时,测试采集器在一个周期内产生1.14 V的Vpp和1.077 μ W的功率。
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引用次数: 0
A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability 演示36 ppt频率稳定性的硅MEMS磁盘谐振振荡器
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495722
Madan Parajuli, G. Sobreviela, Hemin Zhang, A. Seshia
This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µLHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*106 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.
本文报告的实验结果表明,体声波(BAW)硅盘谐振振荡器具有良好的短期频率稳定性,为45.6 μ LHz (36 ppt@0.4 s积分时间)。BAW圆盘谐振器的n=4径向模式在1.25 MHz下具有1.8*106的高质量因数。该盘的锚锚设计与节点位置对齐,以最大限度地减少锚锚阻尼。这里报告的测量短期频率稳定性的结果相对于最先进的基准来说是有利的。
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引用次数: 1
Metalized Soft Polymers for Electromechanical Transducers on Glass Substrates 玻璃基板机电换能器用金属化软聚合物
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495385
Boshen Liang, G. Keulemans, Dominika Wys o cka, Lei Zhang, V. Rochus, T. Stakenborg, P. Heremans, D. Cheyns
In this study, two different semiconductor-grade polymers are utilized to build up membrane-based electromechanical transducers. With three to four orders of magnitude lower modulus in comparison with silicon, the use of polymers as the vibrating membrane improves the mechanical output characteristics where larger vibration amplitude is needed. Novel processing methods, including an excimer laser-aided wafer-to-water transferring technique, have been developed for the introduction of polymers into the standard cleanroom fabrication environment. Both piezoelectric and electrostatic transducers are fabricated on glass substrates and then characterized with laser dropper velocimetry. Comparison is made to exemplify the advantages and disadvantages of using polymers with varied dynamic specifications for different applications, where the compromise between fabrication robustness and device performance is needed.
在这项研究中,两种不同的半导体级聚合物被用来构建基于膜的机电换能器。与硅相比,聚合物的模量降低了三到四个数量级,使用聚合物作为振动膜可以改善需要较大振动幅值的机械输出特性。新的加工方法,包括准分子激光辅助晶圆到水转移技术,已经开发用于将聚合物引入标准洁净室制造环境。在玻璃基板上制备了压电式和静电式换能器,并用激光滴速法对其进行了表征。比较了不同应用中使用不同动态规格聚合物的优点和缺点,其中需要在制造稳健性和器件性能之间做出妥协。
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引用次数: 0
Lung Cancer On Chip for Testing Immunotherapy 用于检测免疫治疗的肺癌芯片
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495530
Han-Jung Liao, Jean-An Chieh, Yu-Chen Chen, Kang-Yun Lee, Y. Chan, S. Ho, Wei-Lun Sun, Yu-Shiuan Wang, Wan-Chen Huang, Wei-Chiao Chang, Cheng-Hsien Liu
Immunotherapy is a cancer therapy by enhancing T cell activity. Immune checkpoint, like PD-1/PD-L1, is a key mechanism to regulate T cell activity. The drugs for disrupting the PD-1-PD-L1 interaction are the present promising cancer therapy strategy. Current immunotherapy results in clinical trials show significant improvement in the survival rate in melanoma and lung cancer. However, Due to the high price of immunotherapy reagents, it is challenging to use preclinical experiments to find the appropriate drug dosage. Therefore, here we developed a microfluidic device combined with the following features. The first is highly biocompatible porous photo-initiated cross-linked hydrogel (GelMA) as a 3D culture model to mimic tumor tissue environment. The second is the peripheral channels to stimulate the immune cell environment in blood vessels. The third is the concentration gradient generator to achieve high-throughput multiple drug concentration testing. The results verified that cells could survive in GelMA, and the T cells could infiltrate into GelMA containing cancer cells. Furthermore, this Labchip can simultaneously detect the effects of three doses of drug counterparts on immune cells.
免疫疗法是一种通过增强T细胞活性来治疗癌症的疗法。免疫检查点,如PD-1/PD-L1,是调节T细胞活性的关键机制。破坏PD-1-PD-L1相互作用的药物是目前很有前途的癌症治疗策略。目前在临床试验中的免疫治疗结果显示,在黑色素瘤和肺癌的存活率显著提高。然而,由于免疫治疗试剂价格昂贵,通过临床前实验寻找合适的药物剂量是一项挑战。因此,我们开发了一种结合以下特点的微流控装置。第一种是高度生物相容性的多孔光引发交联水凝胶(GelMA)作为模拟肿瘤组织环境的3D培养模型。二是外周通道刺激免疫细胞进入血管环境。三是浓度梯度发生器,实现高通量多药浓度检测。结果证实细胞能够在GelMA中存活,T细胞能够浸润到含有癌细胞的GelMA中。此外,该Labchip可以同时检测三种剂量的药物对应物对免疫细胞的影响。
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引用次数: 1
Highly Deformable and Stable Gas Sensor Based on Anti-Drying Ionic Organohydrogel for O2 Gas Detection 基于抗干燥离子有机水凝胶的高变形稳定气体传感器用于O2气体检测
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495705
Yuanqing Lin, Zixuan Wu, Yaoming Wei, Yuning Liang, Kankan Zhai, K. Tao, Chunwei Li, Xi Xie, Jin Wu
This paper presented a novel method to prepare organohydrogel-based stretchable O2 sensor with high performance, including good linearity, anti-drying property, low limit of detection (LOD) and long-term stability. A facile solvent replacement approach was devised to partially exchange water with xylitol molecules, generating the stable organohydrogel. Compared with gas sensor based on pristine hydrogel, this organohydrogel-based sensor displayed high water retention, leading to the prolonged life time (>30 days) therefore. In addition, LOD was lowered by 2.45 times to 0.56 ppm. Furthermore, the sensing mechanism was investigated, revealing an electrochemical reaction mechanism occurred at the electrode-hydrogel interface. This work provided a facile method for enhancing the performance of hydrogel-based gas sensor.
本文提出了一种制备有机水凝胶可拉伸O2传感器的新方法,该传感器具有良好的线性度、抗干燥性、低检测限和长期稳定性。设计了一种简单的溶剂替代方法,使木糖醇分子部分交换水,生成稳定的有机水凝胶。与基于原始水凝胶的气体传感器相比,这种基于有机水凝胶的传感器具有较高的保水性,从而延长了使用寿命(>30天)。此外,LOD降低了2.45倍,为0.56 ppm。进一步研究了传感机理,揭示了在电极-水凝胶界面发生的电化学反应机理。本工作为提高水凝胶型气体传感器的性能提供了一种简便的方法。
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引用次数: 0
Untethered Soft Crawling Robots Driven by Magnetic Anisotropy 磁各向异性驱动的无系绳软爬行机器人
Pub Date : 2021-06-20 DOI: 10.1109/Transducers50396.2021.9495674
Fanping Sui, Dongkai Wang, Ruiqi Guo, Renxiao Xu, Liwei Lin
We herein present a soft crawling robot based on the design of the magnetic anisotropic actuation to realize untethered crawling movements. With the self-assembled iron filing mesh tuned magnetically and sealed in silicone rubber matrix, we are able to fabricate a large quantity of crawling robots in parallel by a molding process. The magnetic anisotropy is established in the body of the robot to induce the magnetic actuation. Under an alternating magnetic field near the resonant frequency of the robot, the legs of the robot can bend and release repeatedly to achieve a forward moving velocity of ~0.19 cm/s at 2.5 Hz and 46 mT. In addition, the soft crawling robot is robust enough such that even crushed by a 1.8-ton automobile, it can still be fully functional. We envision the magnetic soft robot design and working principle can be further studied for the advancements of micro-robotics research.
本文提出了一种基于磁各向异性驱动设计的柔性爬行机器人,实现无系绳爬行运动。利用自组装的磁调谐铁锉网和硅橡胶基体密封,我们可以通过模塑工艺并行制造大量的爬行机器人。在机器人体内建立磁各向异性来诱导磁致动。在接近机器人谐振频率的交变磁场下,机器人的腿可以反复弯曲和释放,以2.5 Hz和46 mT的速度实现~0.19 cm/s的向前移动速度。此外,软爬行机器人足够坚固,即使被1.8吨重的汽车压碎,它仍然可以完全发挥功能。展望了磁性软机器人的设计和工作原理的进一步研究,为微机器人研究的进一步发展奠定了基础。
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引用次数: 0
期刊
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
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