Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495729
Navid Farhoudi, P. Kairy, J. Magda, F. Solzbacher, C. Reiche
Many biomedical sensing concepts for continuous monitoring of analytes rely on implanting electronic components inside the body to operate, which raises issues about long-term biocompatibility. In recent reports, an implantable sensing modality was reported in which ultrasound absorption in smart hydrogel resonators at a particular probing frequency is used to track the changes in ionic strength and glucose concentration of an analyte solution. This sensing concept allows the implanted component to be free from electronics, with corresponding possible advantages with respect to biocompatibility and lifetime of the device. However, an unsuitable probing frequency can undermine the received signal's quality from the implants or even entirely cause a signal loss. Here we present our work on creating an ultrasound characterization system and using it to determine optimum probing frequencies for the hydrogel resonator structures within a given frequency window. Furthermore, we demonstrate that the signal amplitude depends on the probing frequency's location relative to the frequency response peaks at a fixed dynamic range for swelling of smart hydrogels.
{"title":"Characterization of Smart Hydrogel-Based Ultrasound Resonators for Implantable Sensing Applications","authors":"Navid Farhoudi, P. Kairy, J. Magda, F. Solzbacher, C. Reiche","doi":"10.1109/Transducers50396.2021.9495729","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495729","url":null,"abstract":"Many biomedical sensing concepts for continuous monitoring of analytes rely on implanting electronic components inside the body to operate, which raises issues about long-term biocompatibility. In recent reports, an implantable sensing modality was reported in which ultrasound absorption in smart hydrogel resonators at a particular probing frequency is used to track the changes in ionic strength and glucose concentration of an analyte solution. This sensing concept allows the implanted component to be free from electronics, with corresponding possible advantages with respect to biocompatibility and lifetime of the device. However, an unsuitable probing frequency can undermine the received signal's quality from the implants or even entirely cause a signal loss. Here we present our work on creating an ultrasound characterization system and using it to determine optimum probing frequencies for the hydrogel resonator structures within a given frequency window. Furthermore, we demonstrate that the signal amplitude depends on the probing frequency's location relative to the frequency response peaks at a fixed dynamic range for swelling of smart hydrogels.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"47 1","pages":"839-842"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87018235","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495565
Izhar, Wei-Qing Xu, Hadi Tavakkoli, Jose Cabot, Xu Zhao, Mingzheng Duan, Yi-Kuen Lee
In this work, we report a single-chip integration of CMOS compatible MEMS temperature, humidity, and highly sensitive flow sensor for the application of human thermal comfort (HTC) sensing. The present multi-sensors chip (MSC) comes up with a couple of merits. Firstly, it utilizes a low-cost 3-mask fabrication process to fabricate temperature, humidity, and flow sensors on a single chip with a proper packaging layer (parylene C) that acts as both packaging (for temperature & flow sensors) and a humidity sensing layer. Secondly, a fully released thermoresistive calorimetric flow (TCF) sensor with dual pairs of detectors is fabricated to achieve high sensitivity. The fabricated (flow, humidity, and temperature) sensors were characterized under different air velocities, humidity, and temperature levels, respectively. The measurement results indicated a maximum sensitivity of 312 mV/ms−1 for the developed TCF sensor with dual detectors design which is almost doubled compared to conventional single pair of detectors design. Furthermore, the humidity sensor achieved an average sensitivity of 7.83 fF/%RH, whereas the temperature sensor shows a resistance change of $5.78Omega/^{circ}mathrm{C}$ and TCR of $1.43 times 10^{-3}/^{circ} mathrm{C}$. The experimental results indicated that our MSC is promising for the HTC sensing application for smart buildings in the era of Internet of Things (IoT).
{"title":"Single-Chip Integration of CMOS Compatible Mems Temperature/Humidity and Highly Sensitive Flow Sensors for Human Thermal Comfort Sensing Application","authors":"Izhar, Wei-Qing Xu, Hadi Tavakkoli, Jose Cabot, Xu Zhao, Mingzheng Duan, Yi-Kuen Lee","doi":"10.1109/Transducers50396.2021.9495565","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495565","url":null,"abstract":"In this work, we report a single-chip integration of CMOS compatible MEMS temperature, humidity, and highly sensitive flow sensor for the application of human thermal comfort (HTC) sensing. The present multi-sensors chip (MSC) comes up with a couple of merits. Firstly, it utilizes a low-cost 3-mask fabrication process to fabricate temperature, humidity, and flow sensors on a single chip with a proper packaging layer (parylene C) that acts as both packaging (for temperature & flow sensors) and a humidity sensing layer. Secondly, a fully released thermoresistive calorimetric flow (TCF) sensor with dual pairs of detectors is fabricated to achieve high sensitivity. The fabricated (flow, humidity, and temperature) sensors were characterized under different air velocities, humidity, and temperature levels, respectively. The measurement results indicated a maximum sensitivity of 312 mV/ms−1 for the developed TCF sensor with dual detectors design which is almost doubled compared to conventional single pair of detectors design. Furthermore, the humidity sensor achieved an average sensitivity of 7.83 fF/%RH, whereas the temperature sensor shows a resistance change of $5.78Omega/^{circ}mathrm{C}$ and TCR of $1.43 times 10^{-3}/^{circ} mathrm{C}$. The experimental results indicated that our MSC is promising for the HTC sensing application for smart buildings in the era of Internet of Things (IoT).","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"42 1","pages":"1219-1222"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87208656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495493
Jeslin Thalapil, Durgesh U. Tamhane, Sauvik Banerjee, S. Tallur
In this paper, we utilize a graphical technique originally proposed for damage assessment in beams, to determine the extent of corrosion of sacrificial zinc anode discs instrumented with piezoelectric transducers using Electro-Mechanical Impedance (EMI) measurements. The underlying parameters determining extent of corrosion (thicknesses of the zinc and zinc oxide films) are extracted from measured resonance frequencies of radial and transverse vibration modes by finding roots of the characteristic equations of these modes graphically through contour plot. This technique shows excellent agreement with experimental results, requires no calibration and is computationally inexpensive unlike optimization techniques.
{"title":"Corrosion Monitoring Of Sacrificial Anodes Based On Contour Plot Analysis Of Electro-Mechanical Impedance Spectra","authors":"Jeslin Thalapil, Durgesh U. Tamhane, Sauvik Banerjee, S. Tallur","doi":"10.1109/Transducers50396.2021.9495493","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495493","url":null,"abstract":"In this paper, we utilize a graphical technique originally proposed for damage assessment in beams, to determine the extent of corrosion of sacrificial zinc anode discs instrumented with piezoelectric transducers using Electro-Mechanical Impedance (EMI) measurements. The underlying parameters determining extent of corrosion (thicknesses of the zinc and zinc oxide films) are extracted from measured resonance frequencies of radial and transverse vibration modes by finding roots of the characteristic equations of these modes graphically through contour plot. This technique shows excellent agreement with experimental results, requires no calibration and is computationally inexpensive unlike optimization techniques.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"75 1","pages":"1182-1185"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86997675","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495676
Jiumei Hu, Liben Chen, Pengfei Zhang, K. Hsieh, Hui Li, Tza-Huei Wang
We present herein a facile vacuum-driven microfluidic device that is capable of multi-step sample digitalization based on the gas permeability of PDMS. The device features 1) a suction layer that is connected to an external vacuum to generate a continuous negative pressure within the device, and 2) an outlet-free microarray layer with treelike multi-level bifurcated microchannels connecting to 4096 dead-end microwells to realize multiple loading steps until all the microwells being filled. To efficiently prevent sample evaporation at high temperatures, we use a glass slide that is pre-poured with thermosetting oil to seal the gas-permeable PDMS. Moreover, we demonstrated successful detection of single-cell methicillin-resistant Staphylococcus aureus (MRSA) with three loading steps targeting the resistance marker gene MecA via digital PCR amplification on the device.
{"title":"A Vacuum-Driven Microfluidic Array for Multi-Step Sample Digitalization","authors":"Jiumei Hu, Liben Chen, Pengfei Zhang, K. Hsieh, Hui Li, Tza-Huei Wang","doi":"10.1109/Transducers50396.2021.9495676","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495676","url":null,"abstract":"We present herein a facile vacuum-driven microfluidic device that is capable of multi-step sample digitalization based on the gas permeability of PDMS. The device features 1) a suction layer that is connected to an external vacuum to generate a continuous negative pressure within the device, and 2) an outlet-free microarray layer with treelike multi-level bifurcated microchannels connecting to 4096 dead-end microwells to realize multiple loading steps until all the microwells being filled. To efficiently prevent sample evaporation at high temperatures, we use a glass slide that is pre-poured with thermosetting oil to seal the gas-permeable PDMS. Moreover, we demonstrated successful detection of single-cell methicillin-resistant Staphylococcus aureus (MRSA) with three loading steps targeting the resistance marker gene MecA via digital PCR amplification on the device.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"1 1","pages":"1004-1007"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89954801","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495628
Hao Huang, Zhe Zhao, K. Tao, Jin Wu, Bowen Ji, W. Yuan, Honglong Chang
Inspired by the classic friction phenomenon in life, a multi-layer interdigital Electret/Triboelectric Multilayered Power Generator (ET-MPG) that imitates the friction of book pages is designed. Its production is based on a flexible substrate and has special properties that other rigid devices do not have. For example, a very small positive pressure can increase its output performance by 80%, and the final peak power density can reach 0.18W/m2. Through exploration experiments, it is known that the number of output peaks of the interdigital electrode has a corresponding relationship with the number of figures, and the output performance can be multiplied. When the sliding rate is 1m/s, the highest peak voltage reaches 30 V, the average output power of a single layer reaches 10 µW, and the power density can reach 54 mW/m2 in the preliminary results. In addition, by exploring the influencing factors of the friction between the intersecting books, we can understand the large amount of energy contained in this multi-layer flexible structure. The peak energy density of a single page reaches 2.3 J/m2. In addition, the electret generator not only has a high-performance output, but also because it uses all flexible materials, its wearing comfort is unmatched by other rigid devices. This is of great significance to the energy supply of wearable devices and the energy collection on the surface of the human body.
{"title":"Intersecting Book Inspired High-Power-Density Electret/Triboelectric Multilayered Power Generator with Flexible Interdigital Electrodes","authors":"Hao Huang, Zhe Zhao, K. Tao, Jin Wu, Bowen Ji, W. Yuan, Honglong Chang","doi":"10.1109/Transducers50396.2021.9495628","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495628","url":null,"abstract":"Inspired by the classic friction phenomenon in life, a multi-layer interdigital Electret/Triboelectric Multilayered Power Generator (ET-MPG) that imitates the friction of book pages is designed. Its production is based on a flexible substrate and has special properties that other rigid devices do not have. For example, a very small positive pressure can increase its output performance by 80%, and the final peak power density can reach 0.18W/m2. Through exploration experiments, it is known that the number of output peaks of the interdigital electrode has a corresponding relationship with the number of figures, and the output performance can be multiplied. When the sliding rate is 1m/s, the highest peak voltage reaches 30 V, the average output power of a single layer reaches 10 µW, and the power density can reach 54 mW/m2 in the preliminary results. In addition, by exploring the influencing factors of the friction between the intersecting books, we can understand the large amount of energy contained in this multi-layer flexible structure. The peak energy density of a single page reaches 2.3 J/m2. In addition, the electret generator not only has a high-performance output, but also because it uses all flexible materials, its wearing comfort is unmatched by other rigid devices. This is of great significance to the energy supply of wearable devices and the energy collection on the surface of the human body.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"7 1","pages":"936-939"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87945736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Cancer is one of the leading causes of death globally. To simulate a similar environment of human tissue is the difficulty in cancer research. The development of 3D culture model is used to imitate the environment to provide a potential research strategy. Matrigel is the most commonly used material for 3D culture models. However, it is derived from murine tumors, unsuitable for clinical applications. In this study, the methacrylated gelatin (GelMA) was blended with type I collagen as a biomaterial in our microfluidic device. We further optimized the device design; it can perform entirely experimental functions without requiring complicated parts such as pumps and valves. On this microfluidic platform, the biocompatible hydrogel and cells could be patterned via liquid dielectrophoresis (LDEP) and dielectrophoretic force (DEP). The experimental results demonstrated that the human lung cancer cells were patterned via both DEP/LDEP and light-curing hydrogel with low cell mortality. The patterned cells' mortality rate is less than 5% after 24 hr of cultivation. Our results suggest the potential of this device for future clinical cancer study applications. Furthermore, we also expect to achieve bionic tumors and explore the interaction between 3D cell models and drugs.
{"title":"A Microfluidic Device Platform Reconstructing Lung Pattern for Cancer Immunotherapy Applications","authors":"Yu-Chen Chen, Han-Jung Liao, Jean-An Chich, Pin-Tzu Lai, Yi-Ying Liang, Kang-Yun Lee, Wei-Lun Sun, S. Ho, Yu-Shiuan Wang, Wan-Chen Huang, Wei-Chiao Chang, Sung-Yang Wei, Cheng-Hsien Liu","doi":"10.1109/Transducers50396.2021.9495673","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495673","url":null,"abstract":"Cancer is one of the leading causes of death globally. To simulate a similar environment of human tissue is the difficulty in cancer research. The development of 3D culture model is used to imitate the environment to provide a potential research strategy. Matrigel is the most commonly used material for 3D culture models. However, it is derived from murine tumors, unsuitable for clinical applications. In this study, the methacrylated gelatin (GelMA) was blended with type I collagen as a biomaterial in our microfluidic device. We further optimized the device design; it can perform entirely experimental functions without requiring complicated parts such as pumps and valves. On this microfluidic platform, the biocompatible hydrogel and cells could be patterned via liquid dielectrophoresis (LDEP) and dielectrophoretic force (DEP). The experimental results demonstrated that the human lung cancer cells were patterned via both DEP/LDEP and light-curing hydrogel with low cell mortality. The patterned cells' mortality rate is less than 5% after 24 hr of cultivation. Our results suggest the potential of this device for future clinical cancer study applications. Furthermore, we also expect to achieve bionic tumors and explore the interaction between 3D cell models and drugs.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"169 1","pages":"479-482"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85077854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495574
Lingmeng Yang, Zhezheng Zhu, Wenhan Chang, Fanrui Meng, Chengchen Gao, Y. Hao, Zhenchuan Yang
A compact and superdirective particle velocity gradient (PVG) sensor based on two MEMS hot-wire acoustic particle velocity sensor (APVS) chips is proposed. The capability of directly measurement of second-order directionality of acoustic field makes the PVG sensors are more competitive than currently used acoustic vector sensors or microphone arrays, while the compact design can broaden their working frequency. With the APVS spacing of 3.6mm, the measured directional patterns are all cosine squared shape up to 5 kHz, which demonstrated the feasibility for directly acquirement of second-ordered directionality. The sensor could be monolithic integrated to further shorten the spacing of velocity sensors, and to be more competitive for high-sound-frequency and narrow-space directional acoustic sensing applications.
{"title":"A Compact Acoustic Particle Velocity Gradient Sensor Based on MEMS Hot-Wire Sensor Chips","authors":"Lingmeng Yang, Zhezheng Zhu, Wenhan Chang, Fanrui Meng, Chengchen Gao, Y. Hao, Zhenchuan Yang","doi":"10.1109/Transducers50396.2021.9495574","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495574","url":null,"abstract":"A compact and superdirective particle velocity gradient (PVG) sensor based on two MEMS hot-wire acoustic particle velocity sensor (APVS) chips is proposed. The capability of directly measurement of second-order directionality of acoustic field makes the PVG sensors are more competitive than currently used acoustic vector sensors or microphone arrays, while the compact design can broaden their working frequency. With the APVS spacing of 3.6mm, the measured directional patterns are all cosine squared shape up to 5 kHz, which demonstrated the feasibility for directly acquirement of second-ordered directionality. The sensor could be monolithic integrated to further shorten the spacing of velocity sensors, and to be more competitive for high-sound-frequency and narrow-space directional acoustic sensing applications.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"20 1","pages":"50-53"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"85087775","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495733
Jia Lu, Yuji Suzuki
Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 µJ electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 times higher than conventional MEMS-based piezoelectrets.
{"title":"All-Polymer Soft-X-Ray-Charged Piezoelectret for Push-Button Energy Harvester","authors":"Jia Lu, Yuji Suzuki","doi":"10.1109/Transducers50396.2021.9495733","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495733","url":null,"abstract":"Piezoelectret using space-charged porous polymers attracts much attention due to its high piezoelectric coefficient. In the present study, a novel all-polymer soft-X-ray-charged multilayer piezoelectret is proposed for push-button energy harvesting. The prototype is microfabricated using a parylene-C structural layer with patterned gap-control protrusions, dip-coated PEDOT:PSS electrode, and a dip-coated polymer electret layer. With the current prototype, up to 24.6 µJ electrical energy has been obtained with a single pushing force of only 1.3 N, corresponding to a record-high piezoelectric coefficient d33 of 105 nC/N, 30 times higher than conventional MEMS-based piezoelectrets.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"55 1","pages":"920-923"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83724388","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495685
Craig B. Schindler, Hani C. Gomez, K. Pister
We present the first-ever successful jumps of a microrobot fabricated in a silicon-on-insulator (SOI) process with an energy storing spring etched into the silicon substrate. The 0.08 gram silicon robot used its onboard electrostatic inchworm motor to store 8µJ of spring energy and vertically jump more than 3mm when powered and controlled with wire tethers. The robot's vertical jump height is more than 3X higher than what has been previously demonstrated by an SOI robot.
{"title":"First Jumps of a Silicon Microrobot with an Energy Storing Substrate Spring","authors":"Craig B. Schindler, Hani C. Gomez, K. Pister","doi":"10.1109/Transducers50396.2021.9495685","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495685","url":null,"abstract":"We present the first-ever successful jumps of a microrobot fabricated in a silicon-on-insulator (SOI) process with an energy storing spring etched into the silicon substrate. The 0.08 gram silicon robot used its onboard electrostatic inchworm motor to store 8µJ of spring energy and vertically jump more than 3mm when powered and controlled with wire tethers. The robot's vertical jump height is more than 3X higher than what has been previously demonstrated by an SOI robot.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"89 1","pages":"349-352"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83813623","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2021-06-20DOI: 10.1109/Transducers50396.2021.9495740
Douwe S de Bruijn, K. F. Jorissen, W. Olthuis, A. van den Berg
Microfluidic electrical flow cytometry is a popular method to study a wide variety of biological cell properties. Unfortunately, when using coplanar electrodes, this method is sensitive to positional differences of passing particles or cells. In this work we present a novel compensation method to account for the particle position in a coplanar electrode setup using the measured electrical opacity. We demonstrate an accurate size discrimination of 5, 6 and 7 µm polystyrene beads irrespective of their position using the measured electrical opacity making use of the variation of electrical field strength with height in the channel. Thus, only two electrodes are required, which is favorable for microfluidic devices with size limitations.
{"title":"Particle Size Determination in Impedance Flow Cytometry Using Measured Opacity","authors":"Douwe S de Bruijn, K. F. Jorissen, W. Olthuis, A. van den Berg","doi":"10.1109/Transducers50396.2021.9495740","DOIUrl":"https://doi.org/10.1109/Transducers50396.2021.9495740","url":null,"abstract":"Microfluidic electrical flow cytometry is a popular method to study a wide variety of biological cell properties. Unfortunately, when using coplanar electrodes, this method is sensitive to positional differences of passing particles or cells. In this work we present a novel compensation method to account for the particle position in a coplanar electrode setup using the measured electrical opacity. We demonstrate an accurate size discrimination of 5, 6 and 7 µm polystyrene beads irrespective of their position using the measured electrical opacity making use of the variation of electrical field strength with height in the channel. Thus, only two electrodes are required, which is favorable for microfluidic devices with size limitations.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"1 1","pages":"1036-1039"},"PeriodicalIF":0.0,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86582468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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