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Computational Models of Multisensory Integration with Recurrent Neural Networks: A Critical Review and Future Directions 递归神经网络的多感觉整合计算模型:一个重要的回顾和未来的方向
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-09-09 DOI: 10.1002/aisy.202500147
Ehsan Bolhasani, Seyed Hamed Aboutalebi, Yaser Merrikhi

Multisensory integration (MSI) is a core brain function underlying perception, learning, and behavior. Understanding the computational mechanisms of MSI is key to advancing AI and brain-inspired systems. While earlier models relied on probabilistic frameworks, recurrent neural networks (RNNs) offer advantages in capturing temporal dynamics and neural computations. This review presents a critical examination of computational models of MSI, focusing on the evolution from probabilistic integration to modern RNN-based methods. Biological evidence for temporal coordination in multisensory areas is analyzed and explored how different RNN architectures (e.g., vanilla, long short-term memory, and gated recurrent unit) simulate these dynamics. Comparative analyses show RNNs’ superiority in robustness and learning efficiency, with up to 46.9% improvement in classification tasks involving sensory fusion. We introduce a taxonomy of MSI tasks and a novel evaluation framework for model benchmarking. Real-world case studies—from speech recognition to prosthetic control—highlight practical applications. Challenges in interpretability, data efficiency, and generalization are also discussed. The review provides actionable insights for future research in both computational neuroscience and artificial intelligence. By bridging neurobiological principles and machine learning, RNN-based models pave the way for intelligent systems capable of flexible, context-aware multisensory processing.

多感觉整合(MSI)是一种潜在于感知、学习和行为的核心脑功能。理解微信号的计算机制是推进人工智能和大脑启发系统的关键。虽然早期的模型依赖于概率框架,但循环神经网络(rnn)在捕获时间动态和神经计算方面具有优势。这篇综述提出了对MSI计算模型的批判性检查,重点是从概率集成到现代基于rnn的方法的演变。分析和探讨了多感官区域时间协调的生物学证据,并探讨了不同的RNN架构(例如,香草,长短期记忆和门控循环单元)如何模拟这些动态。对比分析表明,RNNs在鲁棒性和学习效率方面具有优势,在涉及感觉融合的分类任务上提高了46.9%。我们介绍了MSI任务的分类和一个新的模型基准评估框架。现实世界的案例研究——从语音识别到假肢控制——突出了实际应用。还讨论了可解释性、数据效率和泛化方面的挑战。该综述为计算神经科学和人工智能的未来研究提供了可操作的见解。通过连接神经生物学原理和机器学习,基于rnn的模型为能够灵活、上下文感知的多感官处理的智能系统铺平了道路。
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引用次数: 0
Ensemble Deep Learning Approach for Brain Tumor Classification Using Vision Transformer and Convolutional Neural Network 基于视觉变压器和卷积神经网络的集成深度学习脑肿瘤分类方法
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-09-02 DOI: 10.1002/aisy.202500393
Ismail Oztel

The treatment plan for brain tumors varies depending on the type and stage of the tumor. Early diagnosis plays a vital role in determining appropriate treatment. In addition to clinical routines, artificial intelligence-based systems that produce automated, quantitative, and objective results can assist clinicians and scientists in making early diagnoses. For this motivation, this study proposes a deep learning-based system that classifies brain tumors obtained by magnetic resonance imaging. In the proposed approach, several wavelet transform approaches are applied to the raw dataset images. Thus, in addition to automated feature extraction in deep learning, it aimed to detect more detailed features. Therefore, four types of datasets have been obtained. Then, using the transfer learning approach, some popular convolutional neural network and vision transformer models are trained separately with the four-type datasets, and the test results are compared. The networks that produced the highest results are used to make the final decision with the ensemble technique. In the first analysis, the best performance was obtained using original data with an 83.50% accuracy value, and the second highest performance is obtained 81.72% accuracy value using the Daubhecies wavelet before deep learning. The third and fourth high performances are 81.47% and 81.22% accuracy, respectively, using original data. In the ensemble analysis, the highest result is achieved at 85.03% accuracy value using the bagging-ensemble approach of the networks, namely MobileNet-v3, vision transformer, ResNeXt, and DenseNet-201. This study demonstrates that using a hybrid wavelet transform and deep learning approach improves classification performance. This may inspire the use of the same method to solve different classification problems.

脑肿瘤的治疗方案根据肿瘤的类型和分期而有所不同。早期诊断在确定适当治疗方面起着至关重要的作用。除了临床常规之外,基于人工智能的系统可以产生自动化,定量和客观的结果,可以帮助临床医生和科学家进行早期诊断。出于这一动机,本研究提出了一种基于深度学习的系统,该系统对磁共振成像获得的脑肿瘤进行分类。在该方法中,将几种小波变换方法应用于原始数据集图像。因此,除了深度学习中的自动特征提取之外,它的目标是检测更详细的特征。因此,得到了四种类型的数据集。然后,利用迁移学习的方法,分别用四种类型的数据集对一些流行的卷积神经网络和视觉变换模型进行训练,并对测试结果进行比较。产生最高结果的网络用于集成技术的最终决策。在第一次分析中,使用原始数据获得了最好的性能,准确率值为83.50%,在深度学习之前使用daubecies小波获得了第二高的性能,准确率值为81.72%。使用原始数据时,第三和第四高的准确率分别为81.47%和81.22%。在集成分析中,使用MobileNet-v3、vision transformer、ResNeXt和DenseNet-201网络的套袋集成方法获得了最高的结果,准确率值为85.03%。该研究表明,使用混合小波变换和深度学习方法可以提高分类性能。这可能会启发使用相同的方法来解决不同的分类问题。
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引用次数: 0
Ultra-Efficient Kidney Stone Fragment Removal via Spinner-Induced Synergistic Circulation and Spiral Flow 通过纺丝机诱导的协同循环和螺旋流的超高效肾结石碎片去除
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-09-02 DOI: 10.1002/aisy.202500609
Yilong Chang, Jasmine Guadalupe Vallejo, Yangqing Sun, Ruike Renee Zhao

Kidney stones can cause severe pain and complications like chronic kidney disease. Although retrograde intrarenal surgery with laser lithotripsy is effective, current retrieval methods are inefficient, typically capturing only 1–3 fragments per ureteroscope pass and requiring many passes for full clearance. A novel spinner device that enables ultra-efficient fragment removal through spinning-induced localized suction is introduced. It generates spiral and circulating flows to capture fragments from over 20 mm away, eliminating the need to chase them. Optimized via computational fluid dynamics and validated in vitro and ex vivo, the spinner retrieves ≈60 small (0.5–2 mm) or ≈15 larger (2–3 mm) fragments per pass. It demonstrates nearly 100% capture of 60 fragments in bench tests and removes 45 fragments in 4 s in a porcine kidney model. This technology markedly improves procedural efficiency by reducing operative time, increasing stone-free rates, and minimizing the number of ureteroscope passes.

肾结石会引起严重的疼痛和慢性肾脏疾病等并发症。虽然逆行肾内手术联合激光碎石是有效的,但目前的取出方法效率低下,通常每次输尿管镜只能取出1-3个碎片,并且需要多次才能完全清除。介绍了一种通过旋转诱导的局部吸力实现超高效碎片清除的新型旋流装置。它产生螺旋和循环流,以捕获超过20毫米远的碎片,无需追逐它们。通过计算流体动力学优化并在体外和离体验证,纺丝机每次回收≈60个小(0.5-2 mm)或≈15个大(2-3 mm)碎片。在猪肾模型中,它几乎100%捕获了60个片段,并在4 s内去除了45个片段。该技术通过减少手术时间、增加结石排出率和减少输尿管镜通过次数显著提高手术效率。
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引用次数: 0
A High-Precision and Robust Geometric Relationships-Inspired Neural Network for the Inverse Kinematic Modeling of the Tendon-Actuated Continuum Manipulator 基于几何关系的高精度鲁棒神经网络肌腱驱动连续统机械臂运动学逆建模
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-09-02 DOI: 10.1002/aisy.202401027
Jinyu Duan, Jianxiong Hao, Pengyu Du, Bo Zhang, Zhiqiang Zhang, Chaoyang Shi

Continuum manipulators can operate in complex environments where traditional rigid manipulators fail. However, the modeling of inverse kinematics remains challenging because of its inherent nonlinearities and various external conditions. This work proposes an online learning control framework with a data cache pool utilizing a constant-curvature model inspired neural network (CCMINN) model to obtain the inverse kinematics model of tendon-actuated continuum manipulators. The CCMINN model is a kind of geometric relationships-inspired neural network, which is inspired by the geometric relationships within the constant-curvature model. This model improves the ability of traditional fully connected neural network models on high convergence speed and precision through its constant-curvature inspiration layers. These layers embed geometry insights into the neural network structure rather than loss functions like physics-informed neural networks. The online learning framework enables CCMINN to maintain high control accuracy in a variety of external load scenarios. Experiments show average tracking errors of 1.4 mm, 1.38 mm, and 1.48 mm (0.7%, 0.64%, and 0.74% of the continuum manipulator length) in the free space, under constant and variable loading conditions, respectively. The results show that combining the fast-converging CCMINN with an online learning control framework enables high-precision and robust positioning control of continuum manipulators under various external payloads.

连续体机械臂可以在传统刚性机械臂失效的复杂环境中工作。然而,由于其固有的非线性和各种外部条件,逆运动学建模仍然具有挑战性。本文提出了一种带数据缓存池的在线学习控制框架,利用常曲率模型启发神经网络(CCMINN)模型获得肌腱驱动连续体机械臂的逆运动学模型。CCMINN模型是一种受几何关系启发的神经网络,其灵感来源于常曲率模型中的几何关系。该模型通过其常曲率激励层,提高了传统全连接神经网络模型的高收敛速度和精度。这些层将几何洞察力嵌入到神经网络结构中,而不是像物理信息神经网络那样的损失函数。在线学习框架使CCMINN能够在各种外部负载情况下保持较高的控制精度。实验结果表明,在恒定载荷和可变载荷条件下,自由空间的平均跟踪误差分别为1.4 mm、1.38 mm和1.48 mm(占连续体机械手长度的0.7%、0.64%和0.74%)。结果表明,将快速收敛的CCMINN与在线学习控制框架相结合,可以实现连续统机械臂在各种外部载荷下的高精度鲁棒定位控制。
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引用次数: 0
Torque-Transmitting Architected Metamaterials for Flexible and Extendable Tubular Robotics 柔性和可伸缩管机器人的扭矩传递结构超材料
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-08-31 DOI: 10.1002/aisy.202500110
Sawyer Thomas, Aman Garg, Jeffery Lipton

Soft and continuum robots commonly rely on fluid, tendon, or rod-based power transmissions, to control robotic form and actuation. Architected geometry has enhanced robot control through tailored physical and mechanical properties based on topology. For example, twist-actuated metamaterials, such as handed shearing auxetics (HSAs), have expanded the soft robot design space, offering varied shape changes and direct integration with simple motors. Despite these advancements, current options for torque transmission limit the successful integration of HSAs in tubular robots, especially for constructions requiring maximized interior space for passing devices or additional concentric tubes. An architected structure based on patterned straight-line mechanisms is proposed that enables simultaneous bending, extending, and torsionally rigid (BETR) transmission. Pairing these new torque-transmitting materials with twist-driven materials HSAs creates new modalities for the varied actuation of tubular robots. Parameter trade offs in BETRs are analyzed, and a user operated robot is built that demonstrates feasibility for navigation, positioning, and anchoring in scaled 3D-printed anatomies.

软机器人和连续机器人通常依靠流体、肌腱或基于杆的动力传输来控制机器人的形状和驱动。通过基于拓扑的定制物理和机械特性,架构几何增强了机器人的控制。例如,扭曲驱动的超材料,如手动剪切辅助材料(hsa),扩大了软机器人的设计空间,提供了多种形状变化和与简单电机的直接集成。尽管取得了这些进步,但目前扭矩传输的选择限制了hsa在管状机器人中的成功集成,特别是对于需要最大内部空间以通过设备或额外同心管的结构。提出了一种基于模式直线机构的架构结构,可以同时实现弯曲,延伸和扭转刚性(BETR)传输。将这些新的扭矩传输材料与扭转驱动材料HSAs配对,为管状机器人的各种驱动创造了新的模式。分析了berts中的参数权衡,并构建了一个用户操作的机器人,演示了在缩放3d打印解剖结构中导航,定位和锚定的可行性。
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引用次数: 0
DePerio: Deep Learning-Based Oral Inflammatory Load Quantification for Periodontal Applications DePerio:基于深度学习的牙周应用口腔炎症负荷量化
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-08-31 DOI: 10.1002/aisy.202500357
Fatemeh Soheili, Negin Masoudifar, Shahin Ebrahimi, Navid Mohaghegh, Mahdi S. M. H. Daneshvar, Mahdi Amrollahi Biouki, Yasaman Tahernezhad, Chunxiang Sun, Michael Glogauer, Ebrahim Ghafar-Zadeh

Periodontal disease (PD) is a chronic condition associated with systemic risks like cardiovascular disease and diabetes. Traditional diagnostics detect advanced PD but often miss early-stage cases, where timely intervention is critical. Oral polymorphonuclear neutrophils (oPMNs) are emerging as key biomarkers for periodontal health. This study presents DePerio, an AI-driven deep neural network (DNN) method that isolates and quantifies oPMNs from saliva using their natural hydrophilic adhesion on treated surfaces. Trained on thousands of annotated bright-field images, DePerio accurately detects and counts oPMNs within milliseconds. Validation against standard techniques confirms its precision in measuring oral inflammatory load (OIL). Clinical testing on 51 samples from healthy and periodontitis patients demonstrates DePerio's capability to distinguish five OIL levels, assisting in PD severity assessment. This low-complexity, AI-powered tool offers a rapid, reliable approach for early PD detection and management in dental practices.

牙周病(PD)是一种与心血管疾病和糖尿病等系统性风险相关的慢性疾病。传统的诊断方法可以检测到晚期帕金森病,但往往会错过早期病例,因此及时干预至关重要。口腔多形核中性粒细胞(oPMNs)正在成为牙周健康的关键生物标志物。本研究提出了DePerio,一种人工智能驱动的深度神经网络(DNN)方法,利用唾液中opmn在处理表面上的天然亲水性粘附性,从唾液中分离和量化opmn。DePerio经过数千张带注释的亮场图像的训练,可以在几毫秒内准确地检测和计数opmn。对标准技术的验证证实了其测量口腔炎症负荷(OIL)的准确性。对健康和牙周炎患者的51个样本的临床测试表明,DePerio能够区分5个OIL水平,有助于PD严重程度评估。这种低复杂性、人工智能驱动的工具为牙科实践中的早期PD检测和管理提供了快速、可靠的方法。
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引用次数: 0
Insect-Inspired Resilient Machines 昆虫启发的弹性机器
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-08-24 DOI: 10.1002/aisy.202500270
Thirawat Chuthong, Thies H. Büscher, Stanislav N. Gorb, Poramate Manoonpong

Mechanical resilience is crucial for both animals and machines. Repairing or replacing damaged components of machines is often costly and time-consuming. Many walking insects, especially species that autotomize legs as a predator-avoidance strategy, exhibit remarkable adaptive control of their leg movement dynamics to compensate for leg loss. The embodied adaptation of leg control in insects can be informative for robotics to develop control strategies for damage compensation. From this point, the study utilizes the stick insect Medauroidea extradentata as a model organism to investigate the effects of leg amputation on the compensatory control of walking behavior. A decentralized adaptive resilient neural control system is proposed, leveraging self-embodied resilience strategies, for legged robots. Unlike model-based or machine learning-based approaches, relying on accurate mathematical models or extensive training data, the neural control system achieves self-organized gait patterns and adaptive leg movements through minimal sensory feedback, coupled with neural dynamics, synaptic plasticity, and robot-environment interactions. This embodied neural control approach is validated and demonstrated on simulated and real insect robots, resulting in robust locomotion and rapid adaptation (within seconds) to various leg loss cases. The combined findings reveal the potential for insect-inspired embodied emergent resilience in complex robotic systems toward resilient robotics.

机械弹性对动物和机器都至关重要。修理或更换损坏的机器部件通常既昂贵又费时。许多会走路的昆虫,特别是那些将腿自动化作为捕食者躲避策略的物种,表现出对腿运动动态的显著适应性控制,以补偿腿的损失。昆虫腿部控制的具体适应性可以为机器人制定损伤补偿控制策略提供信息。从这一点出发,本研究以竹节虫Medauroidea exentata为模式生物,研究截肢对行走行为代偿控制的影响。提出了一种基于自具弹性策略的分散自适应弹性神经控制系统。与基于模型或基于机器学习的方法不同,依赖于精确的数学模型或广泛的训练数据,神经控制系统通过最小的感觉反馈实现自组织的步态模式和自适应的腿部运动,再加上神经动力学、突触可塑性和机器人与环境的相互作用。这种嵌入的神经控制方法在模拟和真实的昆虫机器人上得到了验证和演示,从而实现了强大的运动和快速适应(在几秒钟内)各种腿部损失的情况。这些综合发现揭示了昆虫启发的复杂机器人系统中具有弹性的紧急弹性的潜力。
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引用次数: 0
On-Device Brain Tumor Classification from MR Images Using Smartphone 基于智能手机的磁共振图像的设备上脑肿瘤分类
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-08-24 DOI: 10.1002/aisy.202500205
Halil Ibrahim Ustun, Merve Bulbul, Gozde Yolcu Oztel, Veysel Harun Sahin

Correct and rapid classification of brain tumor types is crucial for the patient's treatment plans. This study aims to create a deep learning-based mobile application that leverages on-device AI capabilities to classify brain tumors. For this reason, first, a series of preprocessing steps are applied to MR images. Then, convolutional neural network , ViT, and MobileViT models are trained for this task. Also, pretrained VGG16, ResNet152V2, InceptionV3, InceptionResNetV2, and MobileNetV2 models are retrained for the brain tumor classification task with the transfer learning method. Using the publicly available “Brain Tumor MRI Dataset,” the model performances are evaluated, and test results are compared. MobileViT shows the best performance in terms of balance between inference time and success rate. Thus, the TensorFlow model of MobileViT is converted to the TensorFlow Lite model and integrated into the mobile application. The mobile application is developed using the Flutter framework. The application has been evaluated on two different devices, and 298.98 and 317.50 ms average inference times have been observed. The proposed system shows that rapid and effective brain tumor classification can be performed by integrating deep learning into the mobile application. This system can assist experts in the decision-making process.

正确和快速的脑肿瘤类型分类对患者的治疗计划至关重要。这项研究旨在创建一个基于深度学习的移动应用程序,利用设备上的人工智能功能对脑肿瘤进行分类。为此,首先对磁共振图像进行一系列预处理。然后,为此任务训练卷积神经网络、ViT和MobileViT模型。同时,利用迁移学习方法对预训练好的VGG16、ResNet152V2、InceptionV3、InceptionResNetV2和MobileNetV2模型进行再训练,用于脑肿瘤分类任务。使用公开可用的“脑肿瘤MRI数据集”,对模型性能进行评估,并对测试结果进行比较。MobileViT在推理时间和成功率之间的平衡方面表现出最好的性能。因此,MobileViT的TensorFlow模型被转换为TensorFlow Lite模型并集成到移动应用程序中。该移动应用程序是使用Flutter框架开发的。该应用程序已经在两个不同的设备上进行了评估,并观察到298.98和317.50 ms的平均推理时间。该系统表明,通过将深度学习集成到移动应用程序中,可以实现快速有效的脑肿瘤分类。该系统可以辅助专家进行决策。
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引用次数: 0
BiT-HyMLPKANClassifier: A Hybrid Deep Learning Framework for Human Peripheral Blood Cell Classification Using Big Transfer Models and Kolmogorov–Arnold Networks BiT-HyMLPKANClassifier:基于大转移模型和Kolmogorov-Arnold网络的人类外周血细胞分类混合深度学习框架
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-08-24 DOI: 10.1002/aisy.202500387
Ömer Miraç KÖKÇAM, Ferhat UÇAR

This paper proposes a novel hybrid framework to accurately identify human peripheral blood cells. Our approach includes Big Transfer (BiT) models, combining the extracted features with classifiers: the traditional Multilayer Perceptron (MLP), the Efficient Kolmogorov-Arnold Network (EfficientKAN) and our hybrid method (HybridMLPEfficientKAN). Peripheral Blood Cell (PBC) dataset of 17092 images covering eight cell types is preferred. BiT models provide high-dimensional features for classifications pipelines. Results show that combining MLP and EfficientKAN provides strong classification accuracy while reducing training overhead often seen in standalone EfficientKAN. Training durations in HybridMLPEfficientKAN remain close to MLP training, in the range of 100-250 seconds, instead of longer durations of over 700 or even 2000 seconds in EfficientKAN. HybridMLPEfficientKAN surpasses EfficientKAN in overall accuracy, exceeding 97% in BiT models. We also evaluate class-wise performance using recall, F1-score, specificity and Matthews Correlation-Coefficient (MCC). Hybrid approach effectively balances computational cost and prediction performance, making it an attractive solution for clinical settings where classification speed and accuracy are critical. This study highlights how BiT-based feature extraction combined with carefully designed models can provide efficient PBC recognition. The integration of MLP-level efficiency with KAN-style adaptability offers a promising avenue for developing high-accuracy, low-latency cell classification systems in hematological analysis.

本文提出了一种新的混合框架来准确地识别人类外周血细胞。我们的方法包括大传输(BiT)模型,将提取的特征与分类器相结合:传统的多层感知器(MLP),高效Kolmogorov-Arnold网络(EfficientKAN)和我们的混合方法(HybridMLPEfficientKAN)。外周血细胞(PBC)数据集包含17092张图像,涵盖8种细胞类型。BiT模型为分类管道提供了高维特征。结果表明,结合MLP和EfficientKAN提供了很强的分类精度,同时减少了单独使用EfficientKAN时经常出现的训练开销。HybridMLPEfficientKAN的训练时间仍然接近MLP训练,在100-250秒的范围内,而不是在EfficientKAN中超过700甚至2000秒的更长时间。HybridMLPEfficientKAN的整体准确率超过了EfficientKAN,在BiT模型中超过了97%。我们还使用召回率、f1评分、特异性和马修斯相关系数(MCC)来评估班级表现。混合方法有效地平衡了计算成本和预测性能,使其成为对分类速度和准确性至关重要的临床环境的有吸引力的解决方案。这项研究强调了基于比特的特征提取与精心设计的模型相结合可以提供有效的PBC识别。将mlp水平的效率与kan风格的适应性相结合,为血液学分析中开发高精度、低延迟的细胞分类系统提供了一条有前途的途径。
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引用次数: 0
Machine Learning Based on Digital Image Colorimetry Driven In Situ, Noncontact Plasma Etch Depth Prediction 基于数字图像比色法的机器学习原位非接触等离子体蚀刻深度预测
IF 6.1 Q1 AUTOMATION & CONTROL SYSTEMS Pub Date : 2025-08-21 DOI: 10.1002/aisy.202500517
Minji Kang, Seongho Kim, Eunseo Go, Donghyeon Paek, Geon Lim, Muyoung Kim, Changmin Kim, Soyeun Kim, Sung Kyu Jang, Moon Soo Bak, Min Sup Choi, Woo Seok Kang, Jaehyun Kim, Jaekwang Kim, Hyeong-U Kim

This study presents a noncontact, in situ framework for etch depth prediction in plasma etching using machine learning (ML) and digital image colorimetry (DIC). While conventional ex situ methods offer accuracy, they suffer from delays and contamination risks. To overcome these, two approaches are explored. First, etch depth is initially obtained through ellipsometry mapping and used to train an artificial neural network (ANN) based on process parameters (e.g., plasma power, pressure, and gas flow), achieving significantly lower mean squared error (MSE) than a linear baseline. This is extended with a Bayesian neural network (BNN) to capture uncertainty in the predictions. Second, it is demonstrated that red, green, and blue data from DIC alone can effectively predict etch depth without relying on process parameters. Together, these findings establish ML-DIC integration as a real-time, low-cost, and noninvasive alternative for plasma process monitoring.

本研究提出了一种使用机器学习(ML)和数字图像比色法(DIC)进行等离子体蚀刻深度预测的非接触式原位框架。虽然传统的移地方法提供了准确性,但它们存在延迟和污染风险。为了克服这些问题,我们探索了两种方法。首先,蚀刻深度最初通过椭偏映射获得,并用于训练基于工艺参数(如等离子体功率、压力和气体流量)的人工神经网络(ANN),获得比线性基线明显更低的均方误差(MSE)。用贝叶斯神经网络(BNN)对其进行扩展,以捕获预测中的不确定性。其次,证明了DIC的红、绿、蓝数据可以有效地预测蚀刻深度,而不依赖于工艺参数。总之,这些发现确立了ML-DIC集成作为实时、低成本、无创的血浆过程监测替代方案。
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引用次数: 0
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