Kelly Turner, Gerard Colston, Katarzyna Stokeley, Andrew Newton, Arne Renz, Marina Antoniou, Peter Gammon, Philip Mawby, Vishal Shah
In this report, the advanced manufacturing advantages of using supersaturated chlorinated chemistry are demonstrated at 1550 °C in 4H‐silicon carbide (4H‐SiC) epitaxy on trenches with different geometric profiles. Sloped mesa sidewalls (8°) show improved filling behavior compared with vertical sidewalls (2°) and lower the optimum chlorine/silicon ratio (Si:Cl) required to complete filling. Both the optimum Cl:Si ratio (10) and sidewall angle are lower for wider trench openings, allowing complete fill of 3 µm wide trenches (8 µm pitch, 5 µm depth) at a filling rate of 19 µm h−1. Excessive hydrogen chloride (HCl) diminishes filling by reducing sidewall growth and can also produce an end surface with very rough topography. This work demonstrates the importance of trench geometry on both the filling behavior and process optimization in chlorinated trench filling epitaxy for the manufacture of 4H‐SiC superjunction power electronics.
{"title":"Effect of Mesa Sidewall Angle on 4H‐Silicon Carbide Trench Filling Epitaxy Using Trichlorosilane and Hydrogen Chloride","authors":"Kelly Turner, Gerard Colston, Katarzyna Stokeley, Andrew Newton, Arne Renz, Marina Antoniou, Peter Gammon, Philip Mawby, Vishal Shah","doi":"10.1002/admi.202400466","DOIUrl":"https://doi.org/10.1002/admi.202400466","url":null,"abstract":"In this report, the advanced manufacturing advantages of using supersaturated chlorinated chemistry are demonstrated at 1550 °C in 4H‐silicon carbide (4H‐SiC) epitaxy on trenches with different geometric profiles. Sloped mesa sidewalls (8°) show improved filling behavior compared with vertical sidewalls (2°) and lower the optimum chlorine/silicon ratio (Si:Cl) required to complete filling. Both the optimum Cl:Si ratio (10) and sidewall angle are lower for wider trench openings, allowing complete fill of 3 µm wide trenches (8 µm pitch, 5 µm depth) at a filling rate of 19 µm h<jats:sup>−1</jats:sup>. Excessive hydrogen chloride (HCl) diminishes filling by reducing sidewall growth and can also produce an end surface with very rough topography. This work demonstrates the importance of trench geometry on both the filling behavior and process optimization in chlorinated trench filling epitaxy for the manufacture of 4H‐SiC superjunction power electronics.","PeriodicalId":115,"journal":{"name":"Advanced Materials Interfaces","volume":null,"pages":null},"PeriodicalIF":5.4,"publicationDate":"2024-09-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142202914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Najma Khatoon, Binod Subedi, Ahmad Majed, Shiping Wang, Jibao He, Julie N.L. Albert, Michael Naguib, Douglas B Chrisey
Intercalation is a powerful approach to customize the properties of layered materials such as titanium carbide (Ti3C2Tx) MXenes. Photonic curing, a novel technique employing intense pulsed light from a xenon flashlamp (≈280–1100 nm wavelength range), offers significant advantages over conventional annealing methods. The pulsed nature of photonic curing enables rapid quenching, which allows trapping of metastable states and the formation of unique nanostructures. Herein, this work reports on the ion exchange intercalation of Ti3C2Tx MXenes with aminopropyl terminated polydimethylsiloxane (amino‐PDMS) and the subsequent application of photonic curing to study pyrolysis of intercalated PDMS. The results showed an increase in the interlayer spacing (d‐spacing) of Ti3C2Tx from 1 to 13.5 nm for the 5 kg mol−1 amino‐PDMS (5K‐PDMS) intercalant. After photonic curing, the intercalated PDMS is converted into SiOx or silicon oxycarbide, and the d‐spacing decreased from 13.5 to 11 nm. Furthermore, curing the intercalated MXenes under controlled pressure in different gas environments, this work observes the conversion of PDMS to silicon carbide on the surface of MXenes layers. This study demonstrates the potential of photonic curing as a promising approach for cost‐effective, instantaneous, and scalable synthesis of customizable layered materials with precise control over the nanostructure within the layers.
{"title":"Synthesis and Photothermal Processing of Silicon‐Based Nanoconfined MXenes","authors":"Najma Khatoon, Binod Subedi, Ahmad Majed, Shiping Wang, Jibao He, Julie N.L. Albert, Michael Naguib, Douglas B Chrisey","doi":"10.1002/admi.202400447","DOIUrl":"https://doi.org/10.1002/admi.202400447","url":null,"abstract":"Intercalation is a powerful approach to customize the properties of layered materials such as titanium carbide (Ti<jats:sub>3</jats:sub>C<jats:sub>2</jats:sub>T<jats:italic><jats:sub>x</jats:sub></jats:italic>) MXenes. Photonic curing, a novel technique employing intense pulsed light from a xenon flashlamp (≈280–1100 nm wavelength range), offers significant advantages over conventional annealing methods. The pulsed nature of photonic curing enables rapid quenching, which allows trapping of metastable states and the formation of unique nanostructures. Herein, this work reports on the ion exchange intercalation of Ti<jats:sub>3</jats:sub>C<jats:sub>2</jats:sub>T<jats:italic><jats:sub>x</jats:sub></jats:italic> MXenes with aminopropyl terminated polydimethylsiloxane (amino‐PDMS) and the subsequent application of photonic curing to study pyrolysis of intercalated PDMS. The results showed an increase in the interlayer spacing (<jats:italic>d</jats:italic>‐spacing) of Ti<jats:sub>3</jats:sub>C<jats:sub>2</jats:sub>T<jats:italic><jats:sub>x</jats:sub></jats:italic> from 1 to 13.5 nm for the 5 kg mol<jats:sup>−1</jats:sup> amino‐PDMS (5K‐PDMS) intercalant. After photonic curing, the intercalated PDMS is converted into SiO<jats:sub>x</jats:sub> or silicon oxycarbide, and the <jats:italic>d</jats:italic>‐spacing decreased from 13.5 to 11 nm. Furthermore, curing the intercalated MXenes under controlled pressure in different gas environments, this work observes the conversion of PDMS to silicon carbide on the surface of MXenes layers. This study demonstrates the potential of photonic curing as a promising approach for cost‐effective, instantaneous, and scalable synthesis of customizable layered materials with precise control over the nanostructure within the layers.","PeriodicalId":115,"journal":{"name":"Advanced Materials Interfaces","volume":null,"pages":null},"PeriodicalIF":5.4,"publicationDate":"2024-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142226130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Marvin Kloß, Michael Beerbaum, Dominik Baier, Christian Weinberger, Frederik Zysk, Hossam Elgabarty, Thomas D. Kühne, Michael Tiemann
CPO‐27 is a metal‐organic framework (MOF) with coordinatively unsaturated metal centers (open metal sites). It is therefore an ideal host material for small guest molecules, including water. This opens up numerous possible applications, such as proton conduction, humidity sensing, water harvesting, or adsorption‐driven heat pumps. For all of these applications, profound knowledge of the adsorption and desorption of water in the micropores is mandatory. The hydration and water structure in CPO‐27‐M (M = Zn or Cu) is investigated using water vapor sorption, Fourier transform infrared (FTIR) spectroscopy, density functional theory (DFT) calculations, and molecular dynamics simulation. In the pores of CPO‐27‐Zn, water binds as a ligand to the Zn center. Additional water molecules are stepwise incorporated at defined positions, forming a network of H‐bonds with the framework and with each other. In CPO‐27‐Cu, hydration proceeds by an entirely different mechanism. Here, water does not coordinate to the metal center, but only forms H‐bonds with the framework; pore filling occurs mostly in a single step, with the open metal site remaining unoccupied. Water in the pores forms clusters with extensive intra‐cluster H‐bonding.
{"title":"Understanding Hydration in CPO‐27 Metal‐Organic Frameworks: Strong Impact of the Chemical Nature of the Metal (Cu, Zn)","authors":"Marvin Kloß, Michael Beerbaum, Dominik Baier, Christian Weinberger, Frederik Zysk, Hossam Elgabarty, Thomas D. Kühne, Michael Tiemann","doi":"10.1002/admi.202400476","DOIUrl":"https://doi.org/10.1002/admi.202400476","url":null,"abstract":"CPO‐27 is a metal‐organic framework (MOF) with coordinatively unsaturated metal centers (open metal sites). It is therefore an ideal host material for small guest molecules, including water. This opens up numerous possible applications, such as proton conduction, humidity sensing, water harvesting, or adsorption‐driven heat pumps. For all of these applications, profound knowledge of the adsorption and desorption of water in the micropores is mandatory. The hydration and water structure in CPO‐27‐<jats:italic>M</jats:italic> (<jats:italic>M</jats:italic> = Zn or Cu) is investigated using water vapor sorption, Fourier transform infrared (FTIR) spectroscopy, density functional theory (DFT) calculations, and molecular dynamics simulation. In the pores of CPO‐27‐Zn, water binds as a ligand to the Zn center. Additional water molecules are stepwise incorporated at defined positions, forming a network of H‐bonds with the framework and with each other. In CPO‐27‐Cu, hydration proceeds by an entirely different mechanism. Here, water does not coordinate to the metal center, but only forms H‐bonds with the framework; pore filling occurs mostly in a single step, with the open metal site remaining unoccupied. Water in the pores forms clusters with extensive intra‐cluster H‐bonding.","PeriodicalId":115,"journal":{"name":"Advanced Materials Interfaces","volume":null,"pages":null},"PeriodicalIF":5.4,"publicationDate":"2024-09-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142202916","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yanan Li, Nian Li, Constantin Harder, Shanshan Yin, Yusuf Bulut, Apostolos Vagias, Peter M. Schneider, Wei Chen, Stephan V. Roth, Aliaksandr S. Bandarenka, Peter Müller‐Buschbaum
Zinc titanate films with mesoporous structures have widespread applications ranging from sensors to supercapacitors and bio‐devices owing to their photoelectric properties and specific surface area. The present work investigates the morphology of mesoporous zinc titanate films obtained by calcination of hybrid thin films containing polymer templates and precursor mixtures of zinc acetate dihydrate (ZAD) and titanium isopropoxide (TTIP). ZnO and TiO2 films are fabricated for reference. The influences of hydrochloric acid contents (HCl), the ratios of ZAD and TTIP, and the solution concentrations on the film morphologies are studied. The amphiphilic diblock copolymer, polystyrene‐block‐polyethylene oxide (PS‐b‐PEO), plays the role of a structure directing template, as it self‐assembles into micelles in a solvent‐acid mixture of N, N‐dimethylformamide (DMF) and HCl. Thin films are prepared with spin‐coating and subsequent calcination. Adjusting the ratio of TTIP and ZAD leads to the structure evolution from order to disorder in a film. It depends on the hydrolysis and condensation processes of the precursors, providing different time‐to‐growth processes to control the film morphologies. An increase in solution concentration enhances the surface coverage. As probed with grazing‐incidence small‐angle X‐ray scattering, the inner structures are larger than the surface structures seen in scanning electron microscopy.
{"title":"Factors Shaping the Morphology in Sol‐Gel Derived Mesoporous Zinc Titanate Films: Unveiling the Role of Precursor Competition and Concentration","authors":"Yanan Li, Nian Li, Constantin Harder, Shanshan Yin, Yusuf Bulut, Apostolos Vagias, Peter M. Schneider, Wei Chen, Stephan V. Roth, Aliaksandr S. Bandarenka, Peter Müller‐Buschbaum","doi":"10.1002/admi.202400215","DOIUrl":"https://doi.org/10.1002/admi.202400215","url":null,"abstract":"Zinc titanate films with mesoporous structures have widespread applications ranging from sensors to supercapacitors and bio‐devices owing to their photoelectric properties and specific surface area. The present work investigates the morphology of mesoporous zinc titanate films obtained by calcination of hybrid thin films containing polymer templates and precursor mixtures of zinc acetate dihydrate (ZAD) and titanium isopropoxide (TTIP). ZnO and TiO<jats:sub>2</jats:sub> films are fabricated for reference. The influences of hydrochloric acid contents (HCl), the ratios of ZAD and TTIP, and the solution concentrations on the film morphologies are studied. The amphiphilic diblock copolymer, polystyrene‐<jats:italic>block</jats:italic>‐polyethylene oxide (PS‐<jats:italic>b</jats:italic>‐PEO), plays the role of a structure directing template, as it self‐assembles into micelles in a solvent‐acid mixture of N, N‐dimethylformamide (DMF) and HCl. Thin films are prepared with spin‐coating and subsequent calcination. Adjusting the ratio of TTIP and ZAD leads to the structure evolution from order to disorder in a film. It depends on the hydrolysis and condensation processes of the precursors, providing different time‐to‐growth processes to control the film morphologies. An increase in solution concentration enhances the surface coverage. As probed with grazing‐incidence small‐angle X‐ray scattering, the inner structures are larger than the surface structures seen in scanning electron microscopy.","PeriodicalId":115,"journal":{"name":"Advanced Materials Interfaces","volume":null,"pages":null},"PeriodicalIF":5.4,"publicationDate":"2024-09-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142227681","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Francis Lockwood Estrin, Oliver S.J. Hagger, M. Emre Sener, Daren J. Caruana
Metal Printing
In article 2400256, Daren J. Caruana and co-workers develop a single step method for depositing silver and copper tracks on a variety of dielectrics using an atmospheric pressure plasma jet. Particle free aqueous based metal salts are required as inks, which are reduced by the action of the plasma electrons and sintered. The resulting highly conductive and adhesive tracks may be deposited on glass, ceramics, polymeric materials, and even biological surfaces with zero damage to the substrates.