首页 > 最新文献

IEEE Sensors, 2005.最新文献

英文 中文
Flow property determination in homogeneous media by means of perturbation injection 用微扰注入法测定均匀介质的流动特性
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597790
A. Fuchs, B. Kortschak, G. Holler, H. Wegleiter, G. Brasseur
This paper describes a combined measurement of material density and particle velocity for dense bulk solids flow in pipelines. The measurement is based on electrical capacitance tomography techniques, enhanced by an insertion of artificial disturbances upstream the capacitive sensor. Obtained material velocity and material density allow for the estimation of the mass flow even for totally homogenous material flow. The applicability of this principle for parameter estimation is discussed, presenting theoretical considerations as well as preliminary measurement results
本文介绍了管道中密集块状固体流动中物质密度和颗粒速度的联合测量方法。测量是基于电容层析成像技术,通过在电容传感器上游插入人工干扰来增强。所获得的物质速度和物质密度允许估计质量流,即使是完全均匀的物质流。讨论了该原理在参数估计中的适用性,给出了理论考虑和初步测量结果
{"title":"Flow property determination in homogeneous media by means of perturbation injection","authors":"A. Fuchs, B. Kortschak, G. Holler, H. Wegleiter, G. Brasseur","doi":"10.1109/ICSENS.2005.1597790","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597790","url":null,"abstract":"This paper describes a combined measurement of material density and particle velocity for dense bulk solids flow in pipelines. The measurement is based on electrical capacitance tomography techniques, enhanced by an insertion of artificial disturbances upstream the capacitive sensor. Obtained material velocity and material density allow for the estimation of the mass flow even for totally homogenous material flow. The applicability of this principle for parameter estimation is discussed, presenting theoretical considerations as well as preliminary measurement results","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"281 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127505875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A novel sensor monitoring corrosion effects of lubrication oil in an integrating manner 一种集成监测润滑油腐蚀效应的新型传感器
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597901
Á. Ágoston, E. Svasek, B. Jakoby
Recently a number of sensor principles for the online monitoring of lubrication oil in combustion engines have been investigated, where the utilized sensors aim at determining physical and chemical properties of the oil, which can be used as indicators for the deterioration of the oil. A crucial property of lubrication oil is its corrosiveness as it directly relates to the corrosive wear of engine parts. More than a decade ago, Japanese researchers proposed the utilization of resistive sensors, which would directly detect the corrosion of metallic parts. In our work, we investigate sensors utilizing the decomposition of metallic thin films in oil and relate their output to the oil's corrosive properties as characterized in a laboratory analysis (in particular its acidity and sulfur content). We report on the fabrication and testing of sensor prototypes employing copper thin films using oil samples from artificial aging tests in the laboratory
近年来,人们研究了许多用于内燃机润滑油在线监测的传感器原理,所使用的传感器旨在确定油的物理和化学性质,这些性质可以作为油变质的指标。润滑油的一个重要特性是它的腐蚀性,因为它直接关系到发动机部件的腐蚀性磨损。十多年前,日本研究人员提出利用电阻式传感器,直接检测金属部件的腐蚀情况。在我们的工作中,我们研究了利用油中金属薄膜分解的传感器,并将其输出与实验室分析中表征的油的腐蚀性(特别是其酸度和硫含量)联系起来。我们报告了传感器原型的制造和测试,采用铜薄膜,使用实验室人工老化试验的油样
{"title":"A novel sensor monitoring corrosion effects of lubrication oil in an integrating manner","authors":"Á. Ágoston, E. Svasek, B. Jakoby","doi":"10.1109/ICSENS.2005.1597901","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597901","url":null,"abstract":"Recently a number of sensor principles for the online monitoring of lubrication oil in combustion engines have been investigated, where the utilized sensors aim at determining physical and chemical properties of the oil, which can be used as indicators for the deterioration of the oil. A crucial property of lubrication oil is its corrosiveness as it directly relates to the corrosive wear of engine parts. More than a decade ago, Japanese researchers proposed the utilization of resistive sensors, which would directly detect the corrosion of metallic parts. In our work, we investigate sensors utilizing the decomposition of metallic thin films in oil and relate their output to the oil's corrosive properties as characterized in a laboratory analysis (in particular its acidity and sulfur content). We report on the fabrication and testing of sensor prototypes employing copper thin films using oil samples from artificial aging tests in the laboratory","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127414528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Chemical sensing with ZnO nanowires ZnO纳米线的化学传感
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597829
Z. Fan, J.G. Lu
Zinc oxide nanowires were configured as n-channel field-effect transistors. These transistors were implemented as chemical sensors for detection of various gases. The ammonia sensing behavior of nanowires was observed to switch from oxidizing to reducing when temperature increased from 300 to 500 K. This effect is attributed to the temperature dependent chemical potential shift. Carbon monoxide was found to increase the nanowire conductance in the presence of oxygen. In addition, nanowire detection sensitivity dependence on the diameter was investigated
将氧化锌纳米线配置为n沟道场效应晶体管。这些晶体管被用作检测各种气体的化学传感器。当温度从300 ~ 500 K升高时,观察到纳米线的氨传感行为由氧化向还原转变。这种效应归因于温度相关的化学势位移。在氧气存在的情况下,一氧化碳可以增加纳米线的电导率。此外,还研究了纳米线检测灵敏度随直径的变化规律
{"title":"Chemical sensing with ZnO nanowires","authors":"Z. Fan, J.G. Lu","doi":"10.1109/ICSENS.2005.1597829","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597829","url":null,"abstract":"Zinc oxide nanowires were configured as n-channel field-effect transistors. These transistors were implemented as chemical sensors for detection of various gases. The ammonia sensing behavior of nanowires was observed to switch from oxidizing to reducing when temperature increased from 300 to 500 K. This effect is attributed to the temperature dependent chemical potential shift. Carbon monoxide was found to increase the nanowire conductance in the presence of oxygen. In addition, nanowire detection sensitivity dependence on the diameter was investigated","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"103 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132761007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
An electrostatically actuated valve for turbulent boundary layer control 一种用于湍流边界层控制的静电驱动阀
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597642
J. Frutos, D. Vernier, F. Bastien, M. de Labachelerie, Y. Bailly
A large displacement electrostatic valve has been designed and realized for a realistic turbulent boundary layer control. This actuator consists of a pair of rigid electrodes and a flexible film having a S-shape providing local high electrostatic forces required for controling rather large pressure differences. The aim is the reattachment of the boundary layer near an aircraft flap trailing edge by transferring momentum energy via high speed pulsated micro air jets. The valve controls the frequency and the speed of the micro jets. An array of fifteen actuators has been manufactured and characterized by particles images velocimetry (PIV) and hot wire anemometry (HWA). The devices are able to control pressure differences up to 27 kPa with a supply voltage of 400 V. For this maximum pressure, the corresponding jet velocity downstream a 45 degree skew micro orifice (0.4 mm diameter) is close to 100 ms-1
针对实际的湍流边界层控制,设计并实现了一种大排量静电阀。该驱动器由一对刚性电极和具有s形的柔性薄膜组成,提供控制相当大的压力差所需的局部高静电力。其目的是通过高速脉动微空气射流传递动量能量,使飞机襟翼后缘附近的边界层重新附着。阀门控制微射流的频率和速度。利用粒子图像测速(PIV)和热线风速(HWA)技术对15个作动器阵列进行了表征。在电源电压为400v的情况下,设备可控制最大压差27kpa。在此最大压力下,45度偏斜微孔(直径0.4 mm)下游相应的射流速度接近100 ms-1
{"title":"An electrostatically actuated valve for turbulent boundary layer control","authors":"J. Frutos, D. Vernier, F. Bastien, M. de Labachelerie, Y. Bailly","doi":"10.1109/ICSENS.2005.1597642","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597642","url":null,"abstract":"A large displacement electrostatic valve has been designed and realized for a realistic turbulent boundary layer control. This actuator consists of a pair of rigid electrodes and a flexible film having a S-shape providing local high electrostatic forces required for controling rather large pressure differences. The aim is the reattachment of the boundary layer near an aircraft flap trailing edge by transferring momentum energy via high speed pulsated micro air jets. The valve controls the frequency and the speed of the micro jets. An array of fifteen actuators has been manufactured and characterized by particles images velocimetry (PIV) and hot wire anemometry (HWA). The devices are able to control pressure differences up to 27 kPa with a supply voltage of 400 V. For this maximum pressure, the corresponding jet velocity downstream a 45 degree skew micro orifice (0.4 mm diameter) is close to 100 ms-1","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122217385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Fabrication of ultrafloppy single-crystal silicon cantilever for magnetic resonance imaging 磁共振成像用超高速单晶硅悬臂梁的研制
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597688
J. Park, D.-W. Lee, U. Gysin, S. Rast, E. Meyer, M. Despont, C. Gerber
We have proposed a fabrication method of the ultrafloppy single-crystal silicon cantilever and evaluated their mechanical properties under several conditions. A spring constant of the fabricated cantilever was less than 0.0001 N/m and minimum detectable force was around 10-16 N at room temperature. With them, we performed the measurement of the vacuum dependent and temperature dependent. First the change of a quality factor was measured as a function of vacuum. A big increase of the quality factor is observed in a range of 1 to 0.1 Pa. The quality factor these cantilever are very high (Q=68840+/-1184) in a high vacuum. In the second experiment we measured the temperature dependent of the resonance frequency and the internal friction. By decreasing the operating temperature, the resonance frequency is slightly increased due to the change of Young's modules. The internal friction is observed the minimum at 20K and the maximum at 160K. The best sensitivity is achieved at 20K, where a factor of 10 is compared to room temperature
提出了一种制备超弹性单晶硅悬臂梁的方法,并对其在不同条件下的力学性能进行了评价。所制备悬臂梁的弹性常数小于0.0001 N/m,室温下最小可测力约为10-16 N。利用它们,我们进行了真空依赖和温度依赖的测量。首先,测量了质量因子的变化作为真空的函数。在1 ~ 0.1 Pa范围内,质量因子有较大的增加。在高真空条件下,这些悬臂梁的质量系数非常高(Q=68840+/-1184)。在第二个实验中,我们测量了温度与共振频率和内摩擦的关系。通过降低工作温度,由于杨氏模的变化,谐振频率略有增加。内摩擦在20K时最小,160K时最大。最佳灵敏度在20K时达到,与室温相比为10倍
{"title":"Fabrication of ultrafloppy single-crystal silicon cantilever for magnetic resonance imaging","authors":"J. Park, D.-W. Lee, U. Gysin, S. Rast, E. Meyer, M. Despont, C. Gerber","doi":"10.1109/ICSENS.2005.1597688","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597688","url":null,"abstract":"We have proposed a fabrication method of the ultrafloppy single-crystal silicon cantilever and evaluated their mechanical properties under several conditions. A spring constant of the fabricated cantilever was less than 0.0001 N/m and minimum detectable force was around 10-16 N at room temperature. With them, we performed the measurement of the vacuum dependent and temperature dependent. First the change of a quality factor was measured as a function of vacuum. A big increase of the quality factor is observed in a range of 1 to 0.1 Pa. The quality factor these cantilever are very high (Q=68840+/-1184) in a high vacuum. In the second experiment we measured the temperature dependent of the resonance frequency and the internal friction. By decreasing the operating temperature, the resonance frequency is slightly increased due to the change of Young's modules. The internal friction is observed the minimum at 20K and the maximum at 160K. The best sensitivity is achieved at 20K, where a factor of 10 is compared to room temperature","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116882740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Single-fiber probe based on surface enhanced Raman scattering (SERS) 基于表面增强拉曼散射(SERS)的单光纤探针
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597893
Yi Zhang, C. Gu, A. Schwartzberg, J.Z. Zhang
Fiber SERS probes have great potential in chemical and biological sensing. To our knowledge, there has been no demonstration of any single-fiber SERS probes where both the excitation beam and SERS signals are transmitted through the same fiber with a significant length, which is required for a flexible probe. In this paper, we report our proof-of-concept demonstration of a single-fiber SERS probe with a 1 m long fiber. We demonstrate various configurations of the fiber probe, where the SERS substrate is coated on either a side-polished or end-polished fiber surface. While the side-polished fibers provide a large platform for signal generation, the end polished fibers are easy to manipulate and can transmit SERS signals back through the fiber. In our experiments, we have successfully detected SERS signals both at the end where the fiber is polished and coated with the SERS substrate and at the end where the excitation light is coupled into the fiber, using R6G as a testing sample
光纤SERS探针在化学和生物传感领域具有很大的应用潜力。据我们所知,没有任何单光纤SERS探针的演示,其中激发束和SERS信号都通过具有显著长度的同一光纤传输,这是柔性探针所必需的。在本文中,我们报告了我们的单光纤SERS探针的概念验证演示,该探针具有1米长的光纤。我们演示了光纤探针的各种配置,其中SERS基板涂覆在侧面抛光或末端抛光的光纤表面上。侧面抛光的光纤为信号产生提供了一个大的平台,而末端抛光的光纤易于操作,可以通过光纤将SERS信号传回。在我们的实验中,我们使用R6G作为测试样品,成功地在光纤抛光和涂覆SERS基板的末端和激发光耦合到光纤的末端检测到SERS信号
{"title":"Single-fiber probe based on surface enhanced Raman scattering (SERS)","authors":"Yi Zhang, C. Gu, A. Schwartzberg, J.Z. Zhang","doi":"10.1109/ICSENS.2005.1597893","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597893","url":null,"abstract":"Fiber SERS probes have great potential in chemical and biological sensing. To our knowledge, there has been no demonstration of any single-fiber SERS probes where both the excitation beam and SERS signals are transmitted through the same fiber with a significant length, which is required for a flexible probe. In this paper, we report our proof-of-concept demonstration of a single-fiber SERS probe with a 1 m long fiber. We demonstrate various configurations of the fiber probe, where the SERS substrate is coated on either a side-polished or end-polished fiber surface. While the side-polished fibers provide a large platform for signal generation, the end polished fibers are easy to manipulate and can transmit SERS signals back through the fiber. In our experiments, we have successfully detected SERS signals both at the end where the fiber is polished and coated with the SERS substrate and at the end where the excitation light is coupled into the fiber, using R6G as a testing sample","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"2 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131166394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Out-of-plane polymer hollow micro needle array integrated on a microfluidic chip 集成在微流控芯片上的面外聚合物空心微针阵列
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597741
Heng Huang, C. Fu
This paper presented a novel method for the fabrication of out-of-plane hollow polymer micro-needle arrays. This method of the fabrication combined two different back-side exposure procedures was able to produce hollow micro needles with a nearly vertical internal wall and a tapered outside wall by one lithography step. Micro-fluidic channels can be integrated with the needle array by this approach simultaneously. The arrays are able to fabricate on a flexible membrane such as PDMS for compliant applications. Different types of the needles had been successfully realized and demonstrated in this paper
提出了一种制备面外中空聚合物微针阵列的新方法。这种制造方法结合了两种不同的背面曝光程序,能够通过一个光刻步骤产生具有几乎垂直内壁和锥形外壁的空心微针。通过这种方法,微流控通道可以与针阵列同时集成。该阵列能够在柔性膜上制造,如PDMS,用于兼容应用。本文成功地实现和演示了不同类型的针
{"title":"Out-of-plane polymer hollow micro needle array integrated on a microfluidic chip","authors":"Heng Huang, C. Fu","doi":"10.1109/ICSENS.2005.1597741","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597741","url":null,"abstract":"This paper presented a novel method for the fabrication of out-of-plane hollow polymer micro-needle arrays. This method of the fabrication combined two different back-side exposure procedures was able to produce hollow micro needles with a nearly vertical internal wall and a tapered outside wall by one lithography step. Micro-fluidic channels can be integrated with the needle array by this approach simultaneously. The arrays are able to fabricate on a flexible membrane such as PDMS for compliant applications. Different types of the needles had been successfully realized and demonstrated in this paper","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"33 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131655935","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Signal processing for estimating energy expenditure of elite athletes using triaxial accelerometers 用三轴加速度计估计优秀运动员能量消耗的信号处理
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597820
A. Wixted, D. Thiel, D. James, A. Hahn, C. Gore, D. Pyne
Fitness development of elite athletes requires an understanding of physiological factors such as athlete energy expenditure (EE). For athletes involved in football at the elite level, it is necessary to understand the energy demands during competition to develop training regimes. By identifying an appropriate EE estimator in triaxial accelerometer data, in conjunction with identifying sources of inter-athlete variance in that estimator, signal processing was developed to extract the estimator. In this system, low-power signal processing was implemented to extract both the EE estimator and other information of physiological and statistical interest
优秀运动员的体能发展需要了解运动员能量消耗等生理因素。对于参与精英水平足球运动的运动员来说,了解比赛期间的能量需求以制定训练制度是必要的。通过在三轴加速度计数据中识别适当的EE估计量,并在该估计量中识别运动员间方差的来源,开发了信号处理来提取估计量。在该系统中,实现了低功耗信号处理,以提取EE估计量和其他生理和统计信息
{"title":"Signal processing for estimating energy expenditure of elite athletes using triaxial accelerometers","authors":"A. Wixted, D. Thiel, D. James, A. Hahn, C. Gore, D. Pyne","doi":"10.1109/ICSENS.2005.1597820","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597820","url":null,"abstract":"Fitness development of elite athletes requires an understanding of physiological factors such as athlete energy expenditure (EE). For athletes involved in football at the elite level, it is necessary to understand the energy demands during competition to develop training regimes. By identifying an appropriate EE estimator in triaxial accelerometer data, in conjunction with identifying sources of inter-athlete variance in that estimator, signal processing was developed to extract the estimator. In this system, low-power signal processing was implemented to extract both the EE estimator and other information of physiological and statistical interest","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"132 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134148726","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations 用于测量高频波动的聚酰亚胺箔上的AeroMEMS壁热线风速计
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597756
U. Buder, A. Berns, E. Obermeier, R. Petz, W. Nitsche
Design, simulation, manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2
介绍了一种MEMS壁式热线风速计的设计、仿真、制造、校准和基本特性。采用一种高灵敏度镍薄膜电阻器,跨越聚酰亚胺箔中的反应性离子蚀刻腔。该传感器是文献中第一个具有隔热腔和柔性基底材料的传感器。聚酰亚胺基材允许采用传感器的空气动力学表面,如翼型和涡轮叶片。避免了气动表面和硅传感器表面曲率的不匹配,正如之前提出的MEMS热线风速表所观察到的那样。聚酰亚胺的低导热性和具有fem优化尺寸的腔体相结合,具有非常低的功耗(<30 mW)。高达80khz的壁面剪切应力波动可以在恒温模式下解决。在0 ~ 0.25 N/m2的壁面剪切应力范围内,平均灵敏度为0.44 V/(N/m2)
{"title":"AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations","authors":"U. Buder, A. Berns, E. Obermeier, R. Petz, W. Nitsche","doi":"10.1109/ICSENS.2005.1597756","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597756","url":null,"abstract":"Design, simulation, manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"107 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132079007","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
A novel immunosensing technique based on the thermal properties of biochemicals 一种基于生物化学热特性的免疫传感新技术
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597632
Yuyan Zhang, S. Tadigadapa
A new and independent method to investigate biological reactions and their products based upon the accurate and real-time measurement of the thermal conductivity of the reacting samples is presented. A micromachined thermopile based thermal sensor integrated with a planar heater and microfluidic channel has been fabricated for these measurements. The device was calibrated by measuring the thermal conductivity of standard fluids such as DI water and isopropyl alcohol. The calibrated device was then used to measure the thermal properties of biological molecules such as glucose, urea, Bovine Serum Albumin (BSA), Human Fibrinogen (HF), their antibodies, and the bound product. To the best of our knowledge, this is the first report of the observation of the real-time monitoring of antibody-antigen binding based on the change in the thermal properties of the reacting fluids
提出了一种新的、独立的研究生物反应及其产物的方法,该方法基于对反应样品的热导率的精确和实时测量。为此,研制了一种集成了平面加热器和微流控通道的微机械热电堆热传感器。该装置通过测量标准流体(如去离子水和异丙醇)的导热系数来校准。然后使用校准后的装置测量葡萄糖、尿素、牛血清白蛋白(BSA)、人纤维蛋白原(HF)、它们的抗体和结合产物等生物分子的热性能。据我们所知,这是第一篇基于反应流体热性质变化实时监测抗体-抗原结合的观察报告
{"title":"A novel immunosensing technique based on the thermal properties of biochemicals","authors":"Yuyan Zhang, S. Tadigadapa","doi":"10.1109/ICSENS.2005.1597632","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597632","url":null,"abstract":"A new and independent method to investigate biological reactions and their products based upon the accurate and real-time measurement of the thermal conductivity of the reacting samples is presented. A micromachined thermopile based thermal sensor integrated with a planar heater and microfluidic channel has been fabricated for these measurements. The device was calibrated by measuring the thermal conductivity of standard fluids such as DI water and isopropyl alcohol. The calibrated device was then used to measure the thermal properties of biological molecules such as glucose, urea, Bovine Serum Albumin (BSA), Human Fibrinogen (HF), their antibodies, and the bound product. To the best of our knowledge, this is the first report of the observation of the real-time monitoring of antibody-antigen binding based on the change in the thermal properties of the reacting fluids","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133776846","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
期刊
IEEE Sensors, 2005.
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1