Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597910
M. Hofmann, R. Schlierf, W. Mokwa, U. Schnakenberg, F. Kensy, J. Buchs
A flew method for measuring the impedance spectra of biological cell cultures in microtiter plates (MTP) is proposed. The application offers the opportunity of measuring the complex impedance of aqueous solutions without galvanic contact. A thin polyimide film is used as dielectric layer between two metal electrodes and the solutions. The impedance of these cells or aqueous solutions is determined by measuring the impedance of the whole application and subtracting the constant capacitance of the dielectric layer. This calculation is based on a newly developed equivalent electrical circuit. To show the applicability of the sensor, yeast cells (Hansenula polymorpha wt) are monitored at frequencies between 500 kHz and 15 MHz. The results demonstrate the ability of the sensor to measure even the relaxation step of the capacitance of living cells. Because of possible side effects, the influence of aqueous solutions on the polyimide film in general is investigated as well
{"title":"Galvanically decoupled impedance spectroscopy for biological high-throughput-screening in microtiter plates","authors":"M. Hofmann, R. Schlierf, W. Mokwa, U. Schnakenberg, F. Kensy, J. Buchs","doi":"10.1109/ICSENS.2005.1597910","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597910","url":null,"abstract":"A flew method for measuring the impedance spectra of biological cell cultures in microtiter plates (MTP) is proposed. The application offers the opportunity of measuring the complex impedance of aqueous solutions without galvanic contact. A thin polyimide film is used as dielectric layer between two metal electrodes and the solutions. The impedance of these cells or aqueous solutions is determined by measuring the impedance of the whole application and subtracting the constant capacitance of the dielectric layer. This calculation is based on a newly developed equivalent electrical circuit. To show the applicability of the sensor, yeast cells (Hansenula polymorpha wt) are monitored at frequencies between 500 kHz and 15 MHz. The results demonstrate the ability of the sensor to measure even the relaxation step of the capacitance of living cells. Because of possible side effects, the influence of aqueous solutions on the polyimide film in general is investigated as well","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130561407","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597893
Yi Zhang, C. Gu, A. Schwartzberg, J.Z. Zhang
Fiber SERS probes have great potential in chemical and biological sensing. To our knowledge, there has been no demonstration of any single-fiber SERS probes where both the excitation beam and SERS signals are transmitted through the same fiber with a significant length, which is required for a flexible probe. In this paper, we report our proof-of-concept demonstration of a single-fiber SERS probe with a 1 m long fiber. We demonstrate various configurations of the fiber probe, where the SERS substrate is coated on either a side-polished or end-polished fiber surface. While the side-polished fibers provide a large platform for signal generation, the end polished fibers are easy to manipulate and can transmit SERS signals back through the fiber. In our experiments, we have successfully detected SERS signals both at the end where the fiber is polished and coated with the SERS substrate and at the end where the excitation light is coupled into the fiber, using R6G as a testing sample
{"title":"Single-fiber probe based on surface enhanced Raman scattering (SERS)","authors":"Yi Zhang, C. Gu, A. Schwartzberg, J.Z. Zhang","doi":"10.1109/ICSENS.2005.1597893","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597893","url":null,"abstract":"Fiber SERS probes have great potential in chemical and biological sensing. To our knowledge, there has been no demonstration of any single-fiber SERS probes where both the excitation beam and SERS signals are transmitted through the same fiber with a significant length, which is required for a flexible probe. In this paper, we report our proof-of-concept demonstration of a single-fiber SERS probe with a 1 m long fiber. We demonstrate various configurations of the fiber probe, where the SERS substrate is coated on either a side-polished or end-polished fiber surface. While the side-polished fibers provide a large platform for signal generation, the end polished fibers are easy to manipulate and can transmit SERS signals back through the fiber. In our experiments, we have successfully detected SERS signals both at the end where the fiber is polished and coated with the SERS substrate and at the end where the excitation light is coupled into the fiber, using R6G as a testing sample","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"2 2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131166394","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597831
A. Goyal, P. Joshi, S. Tadigadapa, A. Gupta, P. Eklund
Single walled carbon nanotubes (SWNTs) are reservoirs of gases as they can adsorb on their walls as well as retain gas molecules in their hollow cylindrical interior. This has important applications for example in fuel cell technology for hydrogen storage, as a gas sensor for realization of artificial nose, etc. Storage of gases by carbon nanotubes have been recently investigated by monitoring changes in their thermoelectric power and electrical resistivity due to their interaction with gas molecules. In this paper we present a gravimetric study of interaction of gas molecules with isolated SWNTs using a micromachined ultrasensitive quartz crystal microbalance (QCM). The adsorption and desorption of gas molecules with different molecular weights from carbon nanotubes revealed that changes in resonance frequency and quality factor of the resonating crystal scale as approximately M0.45, where M is the mass the of the gas molecule as compared to M1/3 dependence observed in case of changes in thermoelectric power and electrical resistance for thin films of the carbon nanotubes. The use of QCM enables room temperature probing of gas interaction with isolated single walled carbon nanotubes. Specific interaction of gases with carbon nanotubes on QCM provides potential application of the device as a gas sensor
{"title":"Micromachined quartz resonator functionalized with single walled carbon nanotubes","authors":"A. Goyal, P. Joshi, S. Tadigadapa, A. Gupta, P. Eklund","doi":"10.1109/ICSENS.2005.1597831","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597831","url":null,"abstract":"Single walled carbon nanotubes (SWNTs) are reservoirs of gases as they can adsorb on their walls as well as retain gas molecules in their hollow cylindrical interior. This has important applications for example in fuel cell technology for hydrogen storage, as a gas sensor for realization of artificial nose, etc. Storage of gases by carbon nanotubes have been recently investigated by monitoring changes in their thermoelectric power and electrical resistivity due to their interaction with gas molecules. In this paper we present a gravimetric study of interaction of gas molecules with isolated SWNTs using a micromachined ultrasensitive quartz crystal microbalance (QCM). The adsorption and desorption of gas molecules with different molecular weights from carbon nanotubes revealed that changes in resonance frequency and quality factor of the resonating crystal scale as approximately M0.45, where M is the mass the of the gas molecule as compared to M1/3 dependence observed in case of changes in thermoelectric power and electrical resistance for thin films of the carbon nanotubes. The use of QCM enables room temperature probing of gas interaction with isolated single walled carbon nanotubes. Specific interaction of gases with carbon nanotubes on QCM provides potential application of the device as a gas sensor","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"290 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125872576","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597718
T. Nakamoto, Y. Hirota, J. Ide
Although GC/MS is a standard technique to analyze gases, a combination of mass spectrometry with a pattern recognition technique enables us to evaluate smells rapidly because lengthy measurement of gas chromatography is eliminated. Although several researchers have reported the classification of smells only using mass spectrometry, the estimation of the sensory-test result has not been studied. A neural network enables us to map the mass spectrum into the human sensory space. In this study, mint flavors were focused on. Four spearmint flavors and their mixtures were successfully separated and quantified only using the mass spectrum. Then, the mixtures of those flavors and peppermint flavor were evaluated. The scores of the sensory test such as QDA (quantitative descriptive analysis) method were estimated using the mass spectrometry and SOM (self-organized map). It was found that the accuracy of the estimated value using the SOM was better than that obtained according to the linear superposition theorem
{"title":"Record of mint flavor using mass spectrometry","authors":"T. Nakamoto, Y. Hirota, J. Ide","doi":"10.1109/ICSENS.2005.1597718","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597718","url":null,"abstract":"Although GC/MS is a standard technique to analyze gases, a combination of mass spectrometry with a pattern recognition technique enables us to evaluate smells rapidly because lengthy measurement of gas chromatography is eliminated. Although several researchers have reported the classification of smells only using mass spectrometry, the estimation of the sensory-test result has not been studied. A neural network enables us to map the mass spectrum into the human sensory space. In this study, mint flavors were focused on. Four spearmint flavors and their mixtures were successfully separated and quantified only using the mass spectrum. Then, the mixtures of those flavors and peppermint flavor were evaluated. The scores of the sensory test such as QDA (quantitative descriptive analysis) method were estimated using the mass spectrometry and SOM (self-organized map). It was found that the accuracy of the estimated value using the SOM was better than that obtained according to the linear superposition theorem","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125802818","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597765
B. Bahreyni, C. Shafai
A novel design of a resonant magnetic field sensor and complete modeling of its behavior are presented along with a description of the experimental set up and results. The sensor output is a shift in frequency, which is robust against interference and easy to be read by digital systems. An analytic model is derived for the sensor behavior using novel and existing techniques. This model takes advantage of the ability of Dunkerley's method to model complex structures. Devices were fabricated in an SOI bulk micromachining process. Experimental results for the performance of the devices are in good agreement with modeling predictions. The minimum detected field is 80muT with simple electronics. However, the theoretical minimum detectable signal for different devices is on the order of 10's of nano-teslas at 1Torr measured with a noiseless spectrum analyzer with a 100Hz bandwidth. This level of sensitivity is a consequence of the frequency modulation of the output signal
{"title":"A micromachined magnetometer with frequency modulation at the output","authors":"B. Bahreyni, C. Shafai","doi":"10.1109/ICSENS.2005.1597765","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597765","url":null,"abstract":"A novel design of a resonant magnetic field sensor and complete modeling of its behavior are presented along with a description of the experimental set up and results. The sensor output is a shift in frequency, which is robust against interference and easy to be read by digital systems. An analytic model is derived for the sensor behavior using novel and existing techniques. This model takes advantage of the ability of Dunkerley's method to model complex structures. Devices were fabricated in an SOI bulk micromachining process. Experimental results for the performance of the devices are in good agreement with modeling predictions. The minimum detected field is 80muT with simple electronics. However, the theoretical minimum detectable signal for different devices is on the order of 10's of nano-teslas at 1Torr measured with a noiseless spectrum analyzer with a 100Hz bandwidth. This level of sensitivity is a consequence of the frequency modulation of the output signal","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126365600","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597901
Á. Ágoston, E. Svasek, B. Jakoby
Recently a number of sensor principles for the online monitoring of lubrication oil in combustion engines have been investigated, where the utilized sensors aim at determining physical and chemical properties of the oil, which can be used as indicators for the deterioration of the oil. A crucial property of lubrication oil is its corrosiveness as it directly relates to the corrosive wear of engine parts. More than a decade ago, Japanese researchers proposed the utilization of resistive sensors, which would directly detect the corrosion of metallic parts. In our work, we investigate sensors utilizing the decomposition of metallic thin films in oil and relate their output to the oil's corrosive properties as characterized in a laboratory analysis (in particular its acidity and sulfur content). We report on the fabrication and testing of sensor prototypes employing copper thin films using oil samples from artificial aging tests in the laboratory
{"title":"A novel sensor monitoring corrosion effects of lubrication oil in an integrating manner","authors":"Á. Ágoston, E. Svasek, B. Jakoby","doi":"10.1109/ICSENS.2005.1597901","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597901","url":null,"abstract":"Recently a number of sensor principles for the online monitoring of lubrication oil in combustion engines have been investigated, where the utilized sensors aim at determining physical and chemical properties of the oil, which can be used as indicators for the deterioration of the oil. A crucial property of lubrication oil is its corrosiveness as it directly relates to the corrosive wear of engine parts. More than a decade ago, Japanese researchers proposed the utilization of resistive sensors, which would directly detect the corrosion of metallic parts. In our work, we investigate sensors utilizing the decomposition of metallic thin films in oil and relate their output to the oil's corrosive properties as characterized in a laboratory analysis (in particular its acidity and sulfur content). We report on the fabrication and testing of sensor prototypes employing copper thin films using oil samples from artificial aging tests in the laboratory","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"116 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127414528","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597790
A. Fuchs, B. Kortschak, G. Holler, H. Wegleiter, G. Brasseur
This paper describes a combined measurement of material density and particle velocity for dense bulk solids flow in pipelines. The measurement is based on electrical capacitance tomography techniques, enhanced by an insertion of artificial disturbances upstream the capacitive sensor. Obtained material velocity and material density allow for the estimation of the mass flow even for totally homogenous material flow. The applicability of this principle for parameter estimation is discussed, presenting theoretical considerations as well as preliminary measurement results
{"title":"Flow property determination in homogeneous media by means of perturbation injection","authors":"A. Fuchs, B. Kortschak, G. Holler, H. Wegleiter, G. Brasseur","doi":"10.1109/ICSENS.2005.1597790","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597790","url":null,"abstract":"This paper describes a combined measurement of material density and particle velocity for dense bulk solids flow in pipelines. The measurement is based on electrical capacitance tomography techniques, enhanced by an insertion of artificial disturbances upstream the capacitive sensor. Obtained material velocity and material density allow for the estimation of the mass flow even for totally homogenous material flow. The applicability of this principle for parameter estimation is discussed, presenting theoretical considerations as well as preliminary measurement results","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"281 1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127505875","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597856
M. Pertijs, J. Huijsing
This paper describes the interface electronics of a CMOS smart temperature sensor that is accurate to plusmn0.1degC over the full military temperature range. The sensor is fabricated in a standard CMOS process. Substrate bipolar transistors are used as temperature-sensitive devices. Precision interface electronics are used to make the most of their temperature characteristics. While the sensor is trimmed at one temperature, its accuracy over the full temperature range depends on the initial accuracy of the electronics. Dynamic offset cancellation and dynamic element matching are used to eliminate offset and gain errors. These techniques are combined with a sigma-delta ADC to obtain a readily usable digital temperature reading
{"title":"Precision interface electronics for a CMOS smart temperature sensor","authors":"M. Pertijs, J. Huijsing","doi":"10.1109/ICSENS.2005.1597856","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597856","url":null,"abstract":"This paper describes the interface electronics of a CMOS smart temperature sensor that is accurate to plusmn0.1degC over the full military temperature range. The sensor is fabricated in a standard CMOS process. Substrate bipolar transistors are used as temperature-sensitive devices. Precision interface electronics are used to make the most of their temperature characteristics. While the sensor is trimmed at one temperature, its accuracy over the full temperature range depends on the initial accuracy of the electronics. Dynamic offset cancellation and dynamic element matching are used to eliminate offset and gain errors. These techniques are combined with a sigma-delta ADC to obtain a readily usable digital temperature reading","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114453095","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597811
J. Spannhake, O. Schulz, A. Helwig, G. Miiller, T. Doll
Miniaturized non-dispersive infrared (NDIR) gas sensing systems require as key components bright thermal infrared (IR) sources that can be modulated at reasonably high speed to allow high-sensitivity lock-in detection to be applied. In addition such sources should provide a stable emission naffected by both short-term environmental changes as well as long-term drift. As miniaturized light bulbs, widely used in commercial NDIR gas sensing systems, cannot fulfil these requirements we have developed miniaturized thermal IR emitters with built-in monitoring and self-test features
{"title":"Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems","authors":"J. Spannhake, O. Schulz, A. Helwig, G. Miiller, T. Doll","doi":"10.1109/ICSENS.2005.1597811","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597811","url":null,"abstract":"Miniaturized non-dispersive infrared (NDIR) gas sensing systems require as key components bright thermal infrared (IR) sources that can be modulated at reasonably high speed to allow high-sensitivity lock-in detection to be applied. In addition such sources should provide a stable emission naffected by both short-term environmental changes as well as long-term drift. As miniaturized light bulbs, widely used in commercial NDIR gas sensing systems, cannot fulfil these requirements we have developed miniaturized thermal IR emitters with built-in monitoring and self-test features","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"49 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121652236","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2005-10-31DOI: 10.1109/ICSENS.2005.1597642
J. Frutos, D. Vernier, F. Bastien, M. de Labachelerie, Y. Bailly
A large displacement electrostatic valve has been designed and realized for a realistic turbulent boundary layer control. This actuator consists of a pair of rigid electrodes and a flexible film having a S-shape providing local high electrostatic forces required for controling rather large pressure differences. The aim is the reattachment of the boundary layer near an aircraft flap trailing edge by transferring momentum energy via high speed pulsated micro air jets. The valve controls the frequency and the speed of the micro jets. An array of fifteen actuators has been manufactured and characterized by particles images velocimetry (PIV) and hot wire anemometry (HWA). The devices are able to control pressure differences up to 27 kPa with a supply voltage of 400 V. For this maximum pressure, the corresponding jet velocity downstream a 45 degree skew micro orifice (0.4 mm diameter) is close to 100 ms-1
{"title":"An electrostatically actuated valve for turbulent boundary layer control","authors":"J. Frutos, D. Vernier, F. Bastien, M. de Labachelerie, Y. Bailly","doi":"10.1109/ICSENS.2005.1597642","DOIUrl":"https://doi.org/10.1109/ICSENS.2005.1597642","url":null,"abstract":"A large displacement electrostatic valve has been designed and realized for a realistic turbulent boundary layer control. This actuator consists of a pair of rigid electrodes and a flexible film having a S-shape providing local high electrostatic forces required for controling rather large pressure differences. The aim is the reattachment of the boundary layer near an aircraft flap trailing edge by transferring momentum energy via high speed pulsated micro air jets. The valve controls the frequency and the speed of the micro jets. An array of fifteen actuators has been manufactured and characterized by particles images velocimetry (PIV) and hot wire anemometry (HWA). The devices are able to control pressure differences up to 27 kPa with a supply voltage of 400 V. For this maximum pressure, the corresponding jet velocity downstream a 45 degree skew micro orifice (0.4 mm diameter) is close to 100 ms-1","PeriodicalId":119985,"journal":{"name":"IEEE Sensors, 2005.","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2005-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122217385","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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