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IEEE Sensors, 2005.最新文献

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Fabrication of ultrafloppy single-crystal silicon cantilever for magnetic resonance imaging 磁共振成像用超高速单晶硅悬臂梁的研制
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597688
J. Park, D.-W. Lee, U. Gysin, S. Rast, E. Meyer, M. Despont, C. Gerber
We have proposed a fabrication method of the ultrafloppy single-crystal silicon cantilever and evaluated their mechanical properties under several conditions. A spring constant of the fabricated cantilever was less than 0.0001 N/m and minimum detectable force was around 10-16 N at room temperature. With them, we performed the measurement of the vacuum dependent and temperature dependent. First the change of a quality factor was measured as a function of vacuum. A big increase of the quality factor is observed in a range of 1 to 0.1 Pa. The quality factor these cantilever are very high (Q=68840+/-1184) in a high vacuum. In the second experiment we measured the temperature dependent of the resonance frequency and the internal friction. By decreasing the operating temperature, the resonance frequency is slightly increased due to the change of Young's modules. The internal friction is observed the minimum at 20K and the maximum at 160K. The best sensitivity is achieved at 20K, where a factor of 10 is compared to room temperature
提出了一种制备超弹性单晶硅悬臂梁的方法,并对其在不同条件下的力学性能进行了评价。所制备悬臂梁的弹性常数小于0.0001 N/m,室温下最小可测力约为10-16 N。利用它们,我们进行了真空依赖和温度依赖的测量。首先,测量了质量因子的变化作为真空的函数。在1 ~ 0.1 Pa范围内,质量因子有较大的增加。在高真空条件下,这些悬臂梁的质量系数非常高(Q=68840+/-1184)。在第二个实验中,我们测量了温度与共振频率和内摩擦的关系。通过降低工作温度,由于杨氏模的变化,谐振频率略有增加。内摩擦在20K时最小,160K时最大。最佳灵敏度在20K时达到,与室温相比为10倍
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引用次数: 2
Silicon-based high-frequency multiple-Fourier horn ultrasonic nozzles for atomization and pumping 用于雾化和泵送的硅基高频多傅立叶喇叭超声喷嘴
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597883
C. Tsai, Y.L. Song, S. Tsai, Y. Chou, J. Cheng
This paper reports for the first time on successful atomization and pumping using microfabricated silicon-based high frequency ultrasonic nozzles of a novel design. The nozzle is made of a piezoelectric drive section with transducers isolated from the liquid and a silicon-resonator consisting of multiple Fourier horns with a central channel for liquid flow. Such nozzles possess a number of advantages over conventional metal-based bulk-type ultrasonic nozzles such as microelectromechanical-system (MEMS)-based microfabrication technology for mass production, much higher ultrasonic frequency and thus much smaller drop diameter, much narrower drop-size distribution, and much lower electric drive power requirement. Monodispersed droplets (mist) are produced at the resonance frequency due to pure capillary wave atomization mechanism. For example, more than 93% of the droplets 7.0 mum in diameter were produced at ultrasonic resonance frequency of 484.5 kHz. Pumping is also achieved at the resonance frequency as in atomization
本文首次报道了一种新型硅基高频超声喷嘴的雾化和泵送。喷嘴由压电驱动部分和与液体隔离的换能器以及由多个傅里叶角组成的硅谐振器组成,该硅谐振器具有用于液体流动的中心通道。与传统的金属本体型超声喷嘴相比,这种喷嘴具有许多优点,例如基于微机电系统(MEMS)的批量生产微加工技术,更高的超声波频率,从而更小的液滴直径,更窄的液滴尺寸分布,更低的电力驱动功率要求。由于纯毛细波雾化机制,在共振频率下产生单分散液滴(雾)。例如,在484.5 kHz的超声共振频率下,超过93%的直径为7.0 mum的液滴产生。泵送也实现在共振频率的雾化
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引用次数: 0
High Order Bandpass Sigma Delta Interface for Vibratory Gyroscopes 用于振动陀螺仪的高阶带通σ δ接口
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597891
Yufeng Dong, M. Kraft, W. Redman-White
Previous work on sigma delta (SigmaDelta) interfaces for micromachined vibratory gyroscopes were based on lowpass SigmaDelta modulators. However, for a lowpass SigmaDelta interface the signal band is a relatively small fraction of the sampling frequency fs , which increases the noise aliasing and result in a relatively high noise floor in the signal band. Due to the characteristic of narrowband amplitude-modulated signals of vibratory rate gyroscopes, a bandpass SigmaDelta interface is more attractive. A bandpass SigmaDelta interface is superior as it is relatively immune to 1/f noise compared to a lowpass SigmaDelta interface. To achieve a similar noise floor with a given oversampling ratio (OSR), the sampling frequency of a bandpass SigmaDelta interface can be much lower than that of a lowpass SigmaDelta interface. Furthermore, some high order SigmaDelta loop topologies have favorable noise shaping characteristics for electronic noise originating from the pickoff circuit and signal anti-aliasing. Therefore, the requirements for the electronic circuits can be considerably relaxed
先前关于微机械振动陀螺仪的sigma delta (SigmaDelta)接口的工作是基于低通SigmaDelta调制器。然而,对于低通SigmaDelta接口,信号频带是采样频率fs的一个相对较小的部分,这增加了噪声混叠并导致信号频带中相对较高的本底噪声。由于振动速率陀螺仪窄带调幅信号的特点,带通SigmaDelta接口更具吸引力。与低通SigmaDelta接口相比,带通SigmaDelta接口更优越,因为它相对不受1/f噪声的影响。为了在给定过采样比(OSR)的情况下获得相似的本底噪声,带通SigmaDelta接口的采样频率可以比低通SigmaDelta接口的采样频率低得多。此外,一些高阶SigmaDelta环路拓扑对于源自拾取电路的电子噪声和信号抗混叠具有良好的噪声整形特性。因此,对电子电路的要求可以大大放宽
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引用次数: 9
Omnidirectional ultrasonic location sensor 全向超声定位传感器
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597791
A. Nishitani, Y. Nishida, H. Mizoguch
Rapid construction of the human activity observation system at low cost is necessary with respect to research into human activities and commercialization. The authors have developed an ultrasonic 3D tag system that uses ultrasonic transmitters/receivers for observing human activities. The newly developed system monitors the positions of objects to which transmitters are attached. The ultrasonic 3D tag system can be installed in a wide variety of environments, but the time and the installation cost required to install the numerous required receivers are prohibitive. Therefore, the present authors developed an omnidirectional ultrasonic location sensor. The omnidirectional ultrasonic location sensor is useful because the number of sensors to be attached can be reduced. The present paper proposes an omnidirectional ultrasonic location sensor and reports its feasibility
快速构建低成本的人类活动观测系统是人类活动研究和商业化的必然要求。作者开发了一种超声波3D标签系统,该系统使用超声波发射器/接收器来观察人类活动。新开发的系统可以监测附着发射器的物体的位置。超声波3D标签系统可以安装在各种各样的环境中,但是安装大量所需接收器所需的时间和安装成本令人望而却步。为此,研制了一种全向超声定位传感器。全向超声定位传感器是有用的,因为可以减少连接的传感器数量。本文提出了一种全向超声定位传感器,并报告了其可行性
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引用次数: 19
A CMOS capacitance sensor that monitors cell viability 监测细胞活力的CMOS电容传感器
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597915
S. Prakash, P. Abshire
We describe a CMOS capacitance sensor for measuring the capacitive behavior of living cells in a culture environment, in the presence of weak electric fields. The underlying physical phenomenon results primarily from polarization of the ionic cloud surrounding the cell in aqueous medium. The measured capacitance depends on a variety of factors including cell morphology, membrane integrity, medium pH and extra cellular ionic concentration and serves as an indicator of cell health. The capacitance sensor uses the principle of charge sharing and maps sensed capacitance values to voltages. The sensor chip has been fabricated in a commercially available 0.5 mum, 2-poly 3-metal CMOS technology. The sensors have been successfully used for long term monitoring of cell viability in vitro
我们描述了一种CMOS电容传感器,用于测量在培养环境中存在弱电场的活细胞的电容行为。潜在的物理现象主要是由水介质中围绕电池的离子云的极化引起的。测得的电容取决于多种因素,包括细胞形态、膜完整性、介质pH和细胞外离子浓度,并作为细胞健康的指标。电容传感器采用电荷共享原理,并将感应电容值映射到电压。该传感器芯片采用商用的0.5 μ m、2-聚- 3金属CMOS技术制造。该传感器已成功用于体外细胞活力的长期监测
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引用次数: 37
Practical industrial applications of TDL analyzers TDL分析仪的实际工业应用
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597868
P. Kaspersen, O. Bjoroey, I. Linnerud, V. Avetisov
Gas analyzers for industrial applications must have high reliability and require little maintenance. Analyzers for in situ measurements using tuneable diode laser spectroscopy in the near infrared have proven to meet these requirements. A brief description of the measurement principle and the LaserGas II analyzer is given. Some examples of practical industrial applications where this measurement technique is superior to most other techniques are presented
用于工业应用的气体分析仪必须具有高可靠性,并且需要很少的维护。使用近红外可调谐二极管激光光谱进行现场测量的分析仪已被证明可以满足这些要求。简要介绍了测量原理和LaserGas II分析仪。给出了一些实际工业应用的例子,其中这种测量技术优于大多数其他技术
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引用次数: 0
Competitive binding assays in microcapsules as "smart tattoo" biosensors 微胶囊作为“智能纹身”生物传感器的竞争性结合分析
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597946
S. Chinnayelka, M. Mcshane
This paper demonstrates a novel fluorescence resonance energy transfer (RET) sensor system, wherein a competitive binding (CB) assay is encapsulated into microcapsules. For CB approaches intended as smart tattoos, microcapsules are superior to hydrogel microparticle systems, as they provide space in the capsule interior for the free movement of the sensing elements while maintaining constant sensing assay concentration. Previously-developed CB glucose sensors suffer from toxicity, nonspecificity, lack of efficient encapsulation technology, and poor reversibility. To overcome some of these limitations, apo-glucose-oxidase (AG) was used as a glucose binding protein and was entrapped in polyelectrolyte microcapsules. The glucose-sensitive change in RET of the fluorescein isothiocyanate (FITC)-dextran and tetramethylrhodamine isothio-cyanate (TRITC)-AG entrapped in microcapsules showed 5times more specificity towards glucose over other sugars, with a sensitivity of 0.035units/mM in the range of 0-40mM. These response characteristics appear to be suitable for glucose monitoring in diabetic patients
本文演示了一种新型荧光共振能量转移(RET)传感器系统,其中竞争性结合(CB)检测被封装到微胶囊中。对于用于智能纹身的CB方法,微胶囊优于水凝胶微粒系统,因为它们在胶囊内部为传感元件的自由运动提供空间,同时保持恒定的传感检测浓度。先前开发的CB葡萄糖传感器存在毒性、非特异性、缺乏有效的封装技术和可逆性差等问题。为了克服这些限制,载脂蛋白葡萄糖氧化酶(AG)被用作葡萄糖结合蛋白,并被包裹在聚电解质微胶囊中。微胶囊包裹的异硫氰酸荧光素(FITC)-葡聚糖和异硫氰酸四甲基罗丹明(TRITC)-AG的RET对葡萄糖的敏感性变化是其他糖的5倍,在0-40mM范围内的敏感性为0.035单位/mM。这些反应特征似乎适用于糖尿病患者的血糖监测
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引用次数: 5
Unbalance Detection in Electrical Engines Using an In-Line Fiber Etalon 利用直列光纤标准子检测发动机不平衡
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597957
J.M. Cones, J. Bravo, F. Arregui, I. Matías
In this work, an indirect method for the detection of voltage unbalance in electrical engines using an optical fiber sensor is presented. The in-line fiber etalon structure has been designed and used to detect 0-5% voltage unbalances in the frequency range up to 500 Hz. The interferometric sensing mechanism of the sensor allows a high sensitivity with the additional advantages of EMI immunity and high dielectric isolation. In order to prove this claim, a 1.5 kW squirrel cage induction motor is unbalanced and its vibration analyzed. It is shown that a precise unbalance factor can be detected without accessing to the electric part of the machine and an accurate monitoring can be obtained using the analysis proposed. This scheme can be applied to reduce the oscillating electromagnetic torque, power losses and temperature rise due to unbalance, and leading to a higher efficiency and the extension of the life of the machine
本文提出了一种利用光纤传感器间接检测发动机电压不平衡的方法。设计了直列光纤标准子结构,并用于检测频率范围达500 Hz的0-5%电压不平衡。该传感器的干涉传感机制使其具有高灵敏度,并具有EMI抗扰性和高介电隔离性的额外优点。为了证明这一说法,对1.5 kW鼠笼式异步电动机进行了不平衡分析,并对其振动进行了分析。结果表明,在不接触机器电气部分的情况下,可以精确地检测出不平衡系数,并利用所提出的分析方法获得准确的监测结果。该方案可以减少振荡电磁转矩、功率损耗和不平衡引起的温升,从而提高效率,延长机器寿命
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引用次数: 4
Markov chain-based models for missing and faulty data in MICA2 sensor motes 基于马尔可夫链的MICA2传感器数据缺失和故障模型
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597764
F. Koushanfar, M. Potkonjak
We have developed Markov chain-based techniques for infield modeling the missing and faulty data for the widely used MICA2 sensor motes. These models help designers of sensor nodes and sensor networks to gain insights into the behavior of any particular sensor platform. The models also enable users of sensor networks to collect high integrity data from the deployed networks in a more efficient and reliable way. The new approach for development and validation of faults and missing data has two phases. In the first phase, we conduct exploratory analysis of data traces collected from the deployed sensor networks. In the second phase, we use the density estimation-based procedure to derive semi Markov models that best capture the patterns and statistics of missing and faulty data in the analyzed sensor data streams. We have applied the fault detection and missing data modeling procedure on light, temperature and humidity sensors on MICA2 motes in sensor networks deployed in office space and natural habitats. The technical highlight of the research presented in this paper include: (i) exploratory data analysis and studying the properties of the sensor data streams; and (ii) adoption of a new class of semi Markov-chain models for capturing and predicting missing and faulty data in actual data trace streams
我们开发了基于马尔可夫链的内场建模技术,用于广泛使用的MICA2传感器数据的缺失和错误数据。这些模型帮助传感器节点和传感器网络的设计者深入了解任何特定传感器平台的行为。这些模型还使传感器网络的用户能够以更高效、更可靠的方式从部署的网络中收集高完整性的数据。开发和验证故障和缺失数据的新方法分为两个阶段。在第一阶段,我们对从部署的传感器网络收集的数据轨迹进行探索性分析。在第二阶段,我们使用基于密度估计的过程来推导半马尔可夫模型,该模型可以最好地捕获所分析传感器数据流中缺失和错误数据的模式和统计信息。我们将故障检测和缺失数据建模程序应用于部署在办公空间和自然栖息地的传感器网络中MICA2节点上的光、温度和湿度传感器。本文研究的技术重点包括:(i)探索性数据分析和研究传感器数据流的特性;(ii)采用一类新的半马尔可夫链模型来捕获和预测实际数据跟踪流中的缺失和错误数据
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引用次数: 23
A new architecture of thermopiles array with WTA implementation 基于WTA实现的热电堆阵列新结构
Pub Date : 2005-10-31 DOI: 10.1109/ICSENS.2005.1597885
K. Hou, Chih-Hsiung Shen
In this paper, a novel architecture of a thermopile array imager for high speed target's position identification is presented. The sensor array fully integrated in CMOS standard technology, features pixel access and in a particular topology also position detection. According to the description given, with larger absorbing area of floating membrane and therefore less thermal conductance per pixel, is used for the quick estimation of the rough values for spot position and intensity. The winner-take-all (WTA) circuit is used in combination with readout circuit for determining which of the 16 times 16 pixels have received the largest amount of infrared radiation. It is a parallel structure of 16 times 16 cells connected to a common control line. The results obtained so far have shown that integrated thermopile array have reached a high level of development and reliability that are suited for high accuracy infrared tracking applications
本文提出了一种用于高速目标位置识别的热电堆阵列成像仪结构。传感器阵列完全集成在CMOS标准技术中,具有像素访问和特定拓扑结构中的位置检测功能。根据所给出的描述,利用浮膜吸收面积较大,每像素热导率较小,用于快速估计光斑位置和强度的粗略值。赢家通吃(WTA)电路与读出电路结合使用,用于确定16 × 16像素中哪一个接收到最大的红外辐射。它是一个由16 × 16个单元组成的平行结构,连接到一条公共控制线。目前的研究结果表明,集成热电堆阵列已达到较高的发展水平和可靠性,适合高精度红外跟踪应用
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引用次数: 1
期刊
IEEE Sensors, 2005.
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